CN1078771C - Piezoelectric component - Google Patents
Piezoelectric component Download PDFInfo
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- CN1078771C CN1078771C CN97110749A CN97110749A CN1078771C CN 1078771 C CN1078771 C CN 1078771C CN 97110749 A CN97110749 A CN 97110749A CN 97110749 A CN97110749 A CN 97110749A CN 1078771 C CN1078771 C CN 1078771C
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Abstract
A ladder filter has a piezoelectric resonator having reduced spurious vibrations and having a wider range of selection of the difference DELTA F between the resonant frequency and the antiresonant frequency, and has a substantially reduced size. The ladder filter includes an insulating substrate on which four pattern electrodes are provided. Four lands are respectively formed as portions of the four pattern electrodes. Another land is formed as a portion of the second pattern electrode. External electrodes of four piezoelectric resonators adapted to vibrate in a longitudinal vibration mode and capable of being mounted in a surface mount manner are connected to the land of the pattern electrodes by supporting members made of an electroconductive material. The four piezoelectric resonators are arranged in a row in the order of a first series resonator, a first parallel resonator, a second parallel resonator and a second series resonator.A piezoelectric resonator has a base member including laminated piezoelectric layers and internal electrodes. The base member is polarized in different directions at both sides of each internal electrode. The internal electrodes are alternately covered by insulating film on opposing side surfaces of the base member. External electrodes are formed on the opposing side surfaces of the base member and the internal electrodes are connected thereto, respectively.A piezoelectric component achieves a desired Qm by using a presently available piezoelectric material. The piezoelectric component includes a supporting substrate on which pattern electrodes are provided. Electroconductive supporting members are disposed on the pattern electrodes, and a piezoelectric resonator is mounted on the supporting members. External electrodes of the piezoelectric resonator and the pattern electrodes are electrically connected to each other by the supporting members.
Description
The present invention relates generally to piezoelectric element, particularly comprise the piezoelectric element of at least one piezo-electric resonator, for example oscillator, frequency discriminator and filter.
Figure 13 is the perspective view of common piezoelectric element.Piezoelectric element 1 comprises the bearing substrate 2 that is formed with pattern electrodes 3a and 3b on the surface.Piezo-electric resonator 4 is bearing on this bearing substrate 2.Piezo-electric resonator 4 for example comprises the vibrating body 5 that is made of piezoelectric and the outer electrode 6a and the 6b that are formed on two apparent surfaces of vibrating body.When signal is externally imported between electrode 6a and the 6b, in vibrating body 5, excite longitudinal vibration mode.Support unit 7 for example is made of the electric conducting material on the pattern electrodes 3a.The middle body of piezo-electric resonator 4 is by support unit 7 supportings.The outer electrode 6a and the pattern electrodes 3a of piezo-electric resonator 4 are electrically connected mutually by supporting member 7 simultaneously.Another outer electrode 6b of piezo-electric resonator 4 is connected with pattern electrodes 3b by lead-in wire 8.
In the piezoelectric element 1 of this structure, in order to obtain required electrology characteristic, need be according to the size design of piezo-electric resonator and the electric capacity between condition of work design resonance frequency, degree of polarization and piezo-electric resonator 4 terminals.
But piezo-electric resonator has a mechanical quality factor Qm by used piezoelectric decision.Therefore, for Qm being set at required numerical value, need a kind of optimization piezoelectric that can be set to required numerical value or approaching required numerical value of development.Being generally the development piezoelectric will change for a long time.If used piezoelectric can set that a numerical value is not equal to only near required numerical value, then will be variant between actual characteristic and the target property.
At the problems referred to above, it is a principal object of the present invention to provide a kind of and adopt present available piezoelectric to have the piezoelectric element of required Qm numerical value.
For this reason,, provide above-mentioned all piezoelectric elements, it is characterized in that comprising: at least one piezo-electric resonator according to one aspect of the present invention; Be used to support the bearing substrate of described piezo-electric resonator; And elastomeric material, it is provided in to face on the surperficial facing surfaces of described bearing substrate between described piezo-electric resonator and the described bearing substrate and/or with described piezo-electric resonator.
In above-mentioned piezoelectric element, piezo-electric resonator can the longitudinal vibration mode excited vibrational.
In above-mentioned piezoelectric, rubber can comprise electric conducting material.
In above-mentioned piezoelectric, a plurality of piezo-electric resonators can connect into ladder type to constitute ladder type filter on bearing substrate.
In above-mentioned piezoelectric element, piezo-electric resonator can comprise: vertical matrix; Constitute the excitation area of matrix at least a portion, the polarized piezoelectric parts that polarization takes place when applying electric field excitation area constitute, and the outer electrode that provides with excitation area.Will be at least in excitation area pair of internal electrodes be placed to perpendicular to matrix vertically and respectively with outer electrode to being connected, excitation area is along the matrix part longitudinal polarization, and excites vertical pattern fundamental vibration when vertical when electric field is applied to matrix through internal electrode.
In above-mentioned piezo-electric resonator, when applying electric field not the non-excitation area of excited vibrational can constitute the other parts of matrix.
Owing to provide rubber at (for example between piezo-electric resonator and the bearing substrate or on away from the piezo-electric resonator surface of bearing substrate or) on the piezo-electric resonator, so the oscillating load of piezo-electric resonator increases simultaneously between piezo-electric resonator and the bearing substrate and on piezo-electric resonator surface away from bearing substrate.If electric conducting material as the rubber that is provided between piezo-electric resonator and the bearing substrate, then can be improved connection reliability between the electrode on bearing substrate and the piezo-electric resonator.
By connecting with ladder type in the ladder type filter that a plurality of piezo-electric resonators form, utilize the rubber that is provided on the piezo-electric resonator can regulate oscillating load on each piezo-electric resonator that constitutes ladder type filter.
According to the present invention, can change the mechanical quality factor Qm of piezo-electric resonator effectively by the oscillating load that utilizes rubber to increase piezo-electric resonator.Therefore, can obtain to have the piezoelectric element of required Qm numerical value by the quantity of regulating rubber.By electric conducting material can be improved connection reliability between the electrode on bearing substrate and the piezo-electric resonator as the rubber that is provided between piezo-electric resonator and the bearing substrate.Therefore, the piezoelectric element that can obtained performance be improved.Regulate the ladder type filter that also can obtain by a plurality of piezo-electric resonators are formed and performance improves by Qm to each piezo-electric resonator.
By can further understanding target of the present invention, characteristics and advantage below in conjunction with the accompanying drawing description of this invention.
Fig. 1 is the exploded perspective illustration of the piezo-electric resonator of the representative embodiment of the invention.
Fig. 2 is the perspective view that is used for the piezo-electric resonator of piezoelectric element shown in Figure 1.
Fig. 3 is the schematic diagram of expression piezoelectric resonator structure shown in Figure 2.
Fig. 4 is illustrated in the plane graph that forms the state of insulation film on the piezo-electric resonator matrix shown in Figure 2.
Fig. 5 is the schematic diagram that adopts the structure of the rubber-like elastic material of conducting electricity between piezo-electric resonator and bearing substrate.
Fig. 6 is the major part schematic diagram that constitutes the piezoelectric element of ladder type filter according to a plurality of piezo-electric resonators of employing of the present invention.
Fig. 7 is the exploded perspective illustration of ladder type filter major part shown in Figure 6.
Fig. 8 is the equivalent circuit diagram of ladder type filter shown in Figure 6.
Fig. 9 is used for the curve chart that concerns between series connection in the ladder type filter and parallel resonator attenuation characteristic and the impedance operator for expression.
Figure 10 is the curve chart of expression ladder type filter characteristic for series connection and parallel resonator Qm adjustment.
The curve chart that Figure 11 adjusts for series resonator Qm for expression ladder type filter characteristic.
The curve chart that Figure 12 adjusts for parallel resonator Qm for expression ladder type filter characteristic.
Figure 13 is the decomposition diagram of common piezoelectric element.
Fig. 1 shows the piezoelectric element 10 of representing the embodiment of the invention.Piezoelectric element 10 comprises the bearing substrate 12 that is made of insulating material such as aluminium oxide.On each lateral parts of two opposite flank parts of bearing substrate 12, form two recesses 14. Pattern electrodes 16 and 18 is formed on the first type surface of two first type surfaces of bearing substrate 12.Pattern electrodes 16 comprises the first that is formed between a pair of recess in opposite directions 14 and extends L shaped second portion towards bearing substrate 12 middle bodies along wherein one of opposite flank of bearing substrate 12 again.Pattern electrodes 18 comprises that being formed at another extends L shaped second portion towards the bearing substrate middle body again to the first between the recess 14 in opposite directions with along another opposite flank of bearing substrate 12.Form two in bearing substrate 12 central authorities and face one another pattern electrodes 16 also separated by a distance and 18 end.Pattern electrodes 16 and 18 first extend to the position on another first type surface of bearing substrate 12 through recess 14.
Piezo-electric resonator 20 is fixed on the pattern electrodes 16 and 18 ends of bearing substrate 12 central authorities.Piezo-electric resonator 20 comprises the matrix 22 that for example is rectangle shape shown in Figure 2.Matrix 22 for example is made of piezoceramic material.As shown in Figure 3, a plurality of internal electrodes 24 are formed within the matrix 22.Each internal electrode so forms, make its first type surface perpendicular to matrix 22 vertically.Thereby matrix 22 makes its a pair of part on the opposite side of each internal electrode 24 along direction polarization shown in the arrow among Fig. 3 along its longitudinal polarization.But matrix 22 is not polarized at opposed end longitudinally.
In a side of matrix 22, be formed with along the groove 25 of matrix 22 longitudinal extensions.The central authorities that groove 25 is formed at matrix 22 Widths are divided into two with the side with matrix 22.As shown in Figure 4, on the side of cutting apart by groove 25, be formed with first insulation film 26 and second insulation film 28.The edge that is exposed to the internal electrode 24 in one of 22 two lateral parts of matrix of being divided into two by groove 25 alternately covers and does not cover with first insulation film 26.Be exposed to 22 two lateral parts of matrix of being divided into two by groove 25 a part in the edge of internal electrode 24 and the part relative with those parts that do not covered by first insulation film 16 with 28 coverings of second insulation film.
And, on outer electrode 30 and 32 matrixes 22 that first and second insulation films 26 and 28 are arranged formed thereon, be on the opposite flank of groove 25, the internal electrode 24 that does not cover with second insulation film 28 thereby the feasible internal electrode that does not cover with first insulation film 26 links to each other with outer electrode 30 links to each other with outer electrode 32.That is, in every pair of adjacent internal electrode 24, one links to each other with outer electrode 30 or 32 and another links to each other with outer electrode 32 or 30.
In this piezo-electric resonator 20, outer electrode 30 and 32 is used as the I/O electrode.When operation piezo-electric resonator 20, electric field is applied to the part between the every pair of adjacent inner electrode 24 that limits the segment base body 22 except that opposed end.Matrix 22 thus in this part by piezoelectric excitation.But, because matrix 22 is not polarized and owing to opposed end is not applied electric field (because the opposing end surface of matrix 22 on do not form electrode) in opposed end, thus matrix 22 in opposed end not by piezoelectric excitation.Therefore, form matrix 22 middle bodies as forming the opposed end zone of matrix 22 by the excitation area 36 of input signal excitation as the non-driver unit 38 that is not transfused to signal excitation.Each non-excitation area 38 is defined as the zone that an input signal does not produce actuating force.Therefore, polarized if the part between the internal electrode does not have, then electric field can be applied in the non-excitation area 38 part between every pair of adjacent inner electrode pair.And can adopt the structure of forbidding on some polarized piezoelectric layer, applying electric field.Always do not need to form so non-driver unit; Whole substrate 22 can form the driver unit zone.
The piezo-electric resonator 20 of this structure is fixed on the pattern electrodes 16 and 18 on the bearing substrate 12.At this moment, piezo-electric resonator 20 links to each other with 18 with pattern electrodes 16 by two support units 40 that are made of electric conducting material.The outer electrode 30 that is limited to the piezo-electric resonator 20 of longitudinal center links to each other with support unit 40 with 32 part.Fill with elastomeric material at interval between piezo-electric resonator 20 and the support unit 40, for example silicon rubber etc.And on the upper surface of piezo-electric resonator 20, be provided with silicon rubber elastomeric material 44.For example can adopt rubber as elastomeric material 42 and 44 with insulating property (properties).
When signal when pattern electrodes 16 and 18 inputs to piezoelectric element 10, voltage is applied in the piezoelectric layer of driver unit 36 of polarization in opposite direction, thereby makes piezoelectric layer integral body along same direction bulk expansion and contraction.Excited the vibration of vertical basic mode thus, its node is corresponding to the center of matrix 22.
In this piezoelectric part 10, the polarised direction of driver unit 36, consistent with each other according to the direction of vibration of the direction of an electric field of signal and driver unit 36.Be that piezo-electric resonator 20 is rigidity.Apply the inconsistent non-rigid piezo-electric resonator of direction with direction of vibration and polarised direction and electric field and compare, the rigidity piezo-electric resonator has bigger electromechanical coupling factor.So rigidity piezo-electric resonator 20 has bigger resonance frequency and the frequency difference Δ Fo between the anti-resonance frequency this means that piezo-electric resonator 20 has obtained broadband character.
In piezo-electric resonator 20,, Δ F can be adjusted into suitable numerical value by ratio that changes driver unit and non-driver unit and/or the formation position of selecting non-driver unit 38.Can adjust the electric capacity of piezo-electric resonator 20 by the number of plies that changes driver unit 36.Therefore can realize the impedance matching between piezoelectric element 10 and the external circuit easily.
In the application of any piezoelectric element 10, (for example adopt above-mentioned piezo-electric resonator), utilized near the frequency processing phase change resonance frequency (Fr) and anti-resonance frequency (Fa) as frequency discriminator or oscillator.But if the mechanical quality factor Qm of piezo-electric resonator 20 is excessive, thereby the pulsation that then the meeting generation causes because of unnecessary vibration in working range has a strong impact on the performance of piezo-electric resonator 20.Therefore, it is important suppressing Qm.Because the Qm of piezo-electric resonator 20 is by the piezoelectric decision of matrix 22, so can't control by selecting size of component, the piezoelectricity number of plies etc.
Therefore, in this piezoelectric element 10, by rubber 42 being filled in the interval between piezo-electric resonator 20 and the bearing substrate 12 and the upper surface that rubber 44 is coated in piezo-electric resonator 20 being controlled Qm.Promptly utilize rubber 42 and 44 to increase the oscillating load of piezo-electric resonator 20, thereby effectively suppress the Qm of piezo-electric resonator 20.Can obtain required Qm numerical value by the quantity of when measuring piezoelectric element 10 characteristics, adjusting rubber 42 and 44.
There is no need always to use simultaneously rubber 42 and 44; Only also be fine with one of them.With rubber-coated is compared at the upper surface of piezo-electric resonator 20, only rubber 42 is filled between piezo-electric resonator 20 and the bearing substrate 12 and can more effectively suppresses Qm.This is because stick to the vibration that rubber on piezo-electric resonator 20 and the bearing substrate 12 has more effectively suppressed piezo-electric resonator 20 simultaneously.Rubber 42 has been strengthened the supporting to piezo-electric resonator 20.But, if adjusting the Qm limit, the limit measures the piezoelectric element characteristic, to adjust Qm just more convenient by rubber 44 being coated in piezo-electric resonator 20 upper surfaces.
If increased the consumption of rubber 42 and 44, then the oscillating load on the piezo-electric resonator 20 becomes big and inhibitory action that Qm is subjected to is stronger.When piezo-electric resonator 20 vibrations, because it is to do the vertical pattern vibration corresponding to the node at center, so the displacement of its opposed end is bigger.Therefore, rubber 42 and the 44 pairs of contributions that suppress Qm near piezo-electric resonator 20 opposed ends are bigger.
The rubber (for example silicon rubber) that can adopt conduction is as the rubber 42 between piezo-electric resonator 20 and the bearing substrate 12.If adopt electric conducting material as rubber 42, then improved the reliability of the conduction between outer electrode 30 and pattern electrodes 16 and outer electrode 32 and the pattern electrodes 18.When adopting such material, prevent conduction between two outer electrodes 30 and 32 in the recess 25 thereby as shown in Figure 5 the rubber 50 of insulation is inserted as filler.
Fig. 6 is the plane graph according to the major part of the piezoelectric element 10 of another embodiment of the present invention, and it adopts a plurality of piezo-electric resonators to constitute ladder type filter.Fig. 7 is the perspective view of piezoelectric element 10 major parts.In this piezoelectric element 10, be formed with four pattern electrodes 90,92,94 and 96 on the bearing substrate 12.Pattern electrodes 90-96 has along first to the 5th weld zone that is arranged in a row that is arranged in a spaced-apart determining deviation from bearing substrate 12 1 ends to the other end.Form the part of first weld zone, form the part of the second and the 5th weld zone, form the part of the 3rd weld zone, form the part of the 4th weld zone as pattern electrodes 96 as pattern electrodes 94 as pattern electrodes 92 as pattern electrodes 90.
Piezo- electric resonator 20a, 20b, the outer electrode 30 of 20c and 20d is connected with these weld zones by support unit 40 with 32.Piezo- electric resonator 20a, 20b, 20c and 20d so place, and form ladder type circuit as shown in Figure 8.On bearing substrate 12, place the crown cap (not shown).
This piezoelectric element 10 is used as and has the ladder type filter of ladder type circuit as shown in Figure 8.In order to form such ladder type filter, adopt two piezo- electric resonator 20a, 20b adopt as series resonator other piezo- electric resonator 20c and 20d as parallel resonator.Its piezo-electric resonator 20b in parallel of ladder type filter and 20d through such design have bigger electric capacity than the piezo-electric resonator 20a and the 20c that connect.As shown in Figure 9, in such ladder type filter, attenuation characteristic is by the impedance of series voltage resonator 20a and 20c and the impedance decision of parallel piezoelectric resonator device 20b and 20d.
In such ladder type filter, can control group delay frequency characteristic (group delay time (GDT)) by the Qm that controls piezo-electric resonator 20a-20d.The ladder type filter characteristic of making is in the above described manner investigated.Figure 10 shows the characteristic when suppressing the Qm of series connection and parallel piezoelectric resonator device 20a-20d.Figure 11 shows the characteristic when suppressing the Qm of series voltage resonator 20a and 20c.Figure 12 shows the characteristic when suppressing the Qm of parallel piezoelectric resonator device 20b and 20d.In Figure 10-12, dotted line represents to use group delay time before the elastomeric material and solid line represents to use the group delay time after the elastomeric material.
By Figure 10,11 and 12 as seen, can improve departing from of GDT by the Qm that suppresses piezo-electric resonator 20a-20d, and if suppress the Qm of all piezo-electric resonator 20a-20d, then effect is more obvious.Because resonator is very little because of Qm changes the amplitude variations that causes, so will not discuss.
As mentioned above, if adopt rubber 42 and 44, then need not change piezoelectric and just can control mechanical quality factor q m.In the above-described embodiments, adopt the piezo-electric resonator 20 of rigidity stacked piezoelectric resonator as above-mentioned piezoelectric element 10.But, also can adopt direction of vibration and polarised direction and electric field to apply the inconsistent non-rigid piezo-electric resonator of direction.If adopt can extensional vibration non-rigid piezo-electric resonator, then by can control the Qm of piezo-electric resonator by rubber 42 and 44 methods that increase oscillating loads.
And as shown in figure 13, have in the piezoelectric element of the piezo-electric resonator that is formed at the outer electrode on the matrix apparent surface and lead-in wire in employing, by rubber 42 being filled in the interval between piezo-electric resonator 20 and the bearing substrate 12 and/or rubber-coated can being controlled piezo-electric resonator Qm at the upper surface of piezo-electric resonator 20.
Claims (6)
1. piezoelectric element is characterized in that comprising:
At least one piezo-electric resonator;
Be used to support the bearing substrate of described piezo-electric resonator; And
Elastomeric material, it is provided in to face on the surperficial facing surfaces of described bearing substrate between described piezo-electric resonator and the described bearing substrate and/or with described piezo-electric resonator.
2. piezoelectric element as claimed in claim 1 is characterized in that piezo-electric resonator can excite with longitudinal vibration mode.
3. piezoelectric element as claimed in claim 1 or 2 is characterized in that described rubber can comprise electric conducting material.
4. as any described piezoelectric element among the claim 1-3, it is characterized in that a plurality of described piezo-electric resonators can connect into ladder type to constitute ladder type filter on described bearing substrate.
5. as any described piezoelectric element among the claim 1-4, it is characterized in that described piezo-electric resonator comprises:
Has matrix longitudinally;
Constitute the driver unit of described matrix at least a portion, the piezoelectric part that polarization takes place when applying electric field described driver unit constitutes; And
The pair of external electrodes that provides with described driver unit;
Will be at least in described driver unit pair of internal electrodes be placed to perpendicular to described matrix part vertically and respectively with described outer electrode to being connected, described driver unit is along the matrix longitudinal polarization, and excites vertical pattern fundamental vibration when vertical when electric field is applied to described matrix through internal electrode.
6. piezoelectric element as claimed in claim 5, when it is characterized in that applying electric field not the non-driver unit of excited vibrational constitute the other parts of matrix.
Applications Claiming Priority (8)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP122725/96 | 1996-04-18 | ||
| JP12272596 | 1996-04-18 | ||
| JP22302996 | 1996-08-05 | ||
| JP223029/96 | 1996-08-05 | ||
| JP02010397A JP3378163B2 (en) | 1996-08-05 | 1997-01-16 | Piezo components |
| JP02010297A JP3266031B2 (en) | 1996-04-18 | 1997-01-16 | Piezoelectric resonator and electronic component using the same |
| JP20102/97 | 1997-01-16 | ||
| JP20103/97 | 1997-01-16 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1172378A CN1172378A (en) | 1998-02-04 |
| CN1078771C true CN1078771C (en) | 2002-01-30 |
Family
ID=27457320
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN97110749A Expired - Lifetime CN1078771C (en) | 1996-04-18 | 1997-04-17 | Piezoelectric component |
Country Status (2)
| Country | Link |
|---|---|
| CN (1) | CN1078771C (en) |
| NO (1) | NO971751L (en) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5361045A (en) * | 1988-03-24 | 1994-11-01 | Office National D'etudes Et De Recherches Aerospatiales Styled O.N.E.R.A. | High-stability resonators of solid elastic material and oscillators using them |
| EP0626212A2 (en) * | 1993-05-28 | 1994-11-30 | Matsushita Electric Industrial Co., Ltd. | Holding structure of piezoelectric vibrator and manufacturing method therefor |
| US5406682A (en) * | 1993-12-23 | 1995-04-18 | Motorola, Inc. | Method of compliantly mounting a piezoelectric device |
-
1997
- 1997-04-17 NO NO971751A patent/NO971751L/en not_active Application Discontinuation
- 1997-04-17 CN CN97110749A patent/CN1078771C/en not_active Expired - Lifetime
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5361045A (en) * | 1988-03-24 | 1994-11-01 | Office National D'etudes Et De Recherches Aerospatiales Styled O.N.E.R.A. | High-stability resonators of solid elastic material and oscillators using them |
| EP0626212A2 (en) * | 1993-05-28 | 1994-11-30 | Matsushita Electric Industrial Co., Ltd. | Holding structure of piezoelectric vibrator and manufacturing method therefor |
| US5406682A (en) * | 1993-12-23 | 1995-04-18 | Motorola, Inc. | Method of compliantly mounting a piezoelectric device |
Also Published As
| Publication number | Publication date |
|---|---|
| NO971751D0 (en) | 1997-04-17 |
| CN1172378A (en) | 1998-02-04 |
| NO971751L (en) | 1997-10-20 |
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