CN1278391C

CN1278391C - Drying device

Info

Publication number: CN1278391C
Application number: CN 03145360
Authority: CN
Inventors: 渡部弘也; 三森健一; 伊藤卓雄
Original assignee: Alps Electric Co Ltd
Current assignee: Alps Alpine Co Ltd
Priority date: 2002-07-16
Filing date: 2003-07-08
Publication date: 2006-10-04
Anticipated expiration: 2023-07-08
Also published as: CN1495862A; JP2004049949A; JP4128040B2

Abstract

Provided is a drier in which compressed air is blown to a substrate carried almost in the horizontal direction by a carrier roll to remove a treating liquid so as to remove the treating liquid without blowing off the liquid. The drier is constituted by being equipped with a carrying means having a carrying passage R to carry a substrate W having liquid films or liquid droplets of the treating liquid 50 on the surfaces Wa, Wb in one direction, a blowing means 10 to blow drying air onto the surfaces Wa, Wb of the substrate W to move the liquid 50 to the upstream side of the carrying direction, and a liquid receiving means 11 which is disposed in contact or near the passage side r1 of the carrying passage R in the upstream side than the blowing means 10 and which receives the liquid 50 on the substrate surfaces Wa, Wb.

Description

Drying device

Technical field

The present invention relates to by to spraying compressed air to remove the drying device of treatment fluid with the horizontal direction substrate conveying substantially by conveying roller.

Background technology

Generally in the substrate manufacturing process of LCD etc., after substrate being cleaned in the clean groove by conveying roller, it is necessary in dry slot the substrate of humidity being carried out dry operation.Particularly in recent years, in order to enhance productivity, more require to have quick and powerful dried ability.Therefore, adopted the drying mode of the air knife that will remove attached to the treatment fluid of the water droplet on the substrate etc. by air-supply in the past.

So-called air knife drying mode, be to support following side by conveying roller, on the position that above-below direction is clamped, dispose a pair of air knife to the horizontal direction substrate conveying with length and width degree peristome, spray the Compressed Gas of non-active gas or clean air etc. from this air knife to substrate, thereby rearward will blow out attached to the treatment fluid on the substrate.

According to this air knife drying mode, the treatment fluid that adheres on substrate when substrate passes through, because the pressure of gas is rearward scraped from moving like that, has been concentrated fluid block in the rearward end of substrate between air knife up and down.Then by these fluid block are rearward blown away by above-mentioned compressed air, thereby remove the treatment fluid on the substrate and carry out drying.

But, above-mentioned treatment fluid, because the capillary effect of treatment fluid and substrate surface is being stained with more securely at edge of substrate treatment fluid, therefore will these treatment fluids all blow down need be bigger gas pressure, so the unusual problem of costliness of the operating cost that exists air-supply.

And in the air knife drying mode, for the treatment fluid of removing on the substrate blows it to air, the treatment fluid of dispersion becomes fog, fades and fall in air, might be once more attached on the substrate.The treatment fluid that adheres to so again becomes membranaceous or spherical remaining on the substrate, produces the water mark.Exhaust apparatus is set around air knife for this reason, forces to get rid of fog and prevent him, just need bigger operating cost for forced exhaust so once more attached on the substrate.

Summary of the invention

The present invention its objective is that in order to solve the above problems providing a kind of need not blow afloat treatment fluid the drying device that just can remove treatment fluid.

To achieve these goals, drying device of the present invention is characterised in that: possess: the conveying device with transport path that the substrate that has the treatment fluid of liquid film or droplet-like on the surface is carried towards direction; The described treatment fluid that nearby can make that is configured in described transport path moves the air-supply arrangement of sending dry usefulness gas like that to the surface of described substrate to the upstream side of throughput direction; From described transport path the wind apparatus of carrying contact or closely be arranged on the trackside of upstream side, reclaim described substrate lip-deep described treatment fluid be subjected to liquid device.

According to this formation, when substrate was carried along transport path, the treatment fluid of substrate surface was concentrated to the substrate end by air-supply from air-supply arrangement.Then, this treatment fluid is to transport path contact or close, by configuration be subjected to the liquid device withdrawal liquid, remove from substrate.So treatment fluid can not disperse in air, can reduce the air-supply wind-force of air-supply arrangement, can be reduced to the operating cost of air-supply.And, because treatment fluid can reclaim, there is no need that exhaust apparatus is set in addition again and dispel treatment fluid, for the operating cost of exhaust also can reduce.

And, preferably utilize the surface tension recycle process fluids of treatment fluid.According to this formation, substrate is carried along transport path, contact or when being subjected to liquid device, treatment fluid is subjected to liquid device because the capillary state that acts on liquid flows to down, removes from substrate.Therefore, there is no need to be provided with in addition the suction device recycle process fluids, the formation of device is oversimplified.

And the air supply direction that also can make air-supply arrangement will be subjected to liquid device to be arranged on the downstream of this air-supply towards being the direction (regulation incline direction) at the inclination angle of regulation with throughput direction.According to this formation, with substrate when transport path is carried, the treatment fluid of substrate surface is concentrated to the substrate bight of regulation incline direction side by the air-supply of air-supply arrangement.Thus, can make and be subjected to liquid device to be easy to recycle process fluids.

Also can dispose the described liquid device that is subjected to, make the acceptable solution dignity that has described treatment fluid in the face of its described substrate surface on prolonging described transport path, make the contact or near the trackside of described transport path outside the described transport path of the described periphery that is subjected to liquid level.According to this formation, contact or close scope becomes continuous plane owing to receive liquid side and transport path, so treatment fluid is successfully being flowed to be subjected to liquid level.

At this moment, also can make described reception liquid level have the end limit substantially linearly of contact or close described transport path, the trackside of described end edge described transport path disposes.Be subjected to liquid level and substrate surface because the end edge joint that prolongs with described basic straight line touches or be close according to this formation, so the scope that treatment fluid can flow out is wide, can improve the efficient that treatment fluid is discharged.

And, also can make the described liquid level that is subjected to be basic positive circular, make described be subjected to liquid level can with the same substantially horizontal plane of described transport path in be rotated.According to this formation, to the treatment fluid that is subjected to liquid level,, therefore can improve the drainage efficiency of treatment fluid owing to be subjected to the rotation of liquid level can be promptly from substrate isolates from flow of substrates.And, owing to rotated by liquid level, with carry in substrate contacts the time also alleviated its contact-impact, the conveying of substrate is carried out smoothly.

And, also the described liquid level that is subjected to can be made hydrophilic surface.According to this formation, the discharge from substrate to the treatment fluid that is subjected to liquid level is more successfully carried out.

And the described liquid level that is subjected to also can be the pore face.According to this formation, flow to and absorbed in the pore by the treatment fluid of liquid level, therefore can improve drainage efficiency with treatment fluid rapidly and substrate isolates.And, absorbed treatment fluid be subjected to the liquid level possess hydrophilic property, can promote from substrate to being subjected to the liquid level effluent to go out treatment fluid.

And then, can also possess at the drainage arrangement that is subjected to discharge on the liquid level treatment fluid.According to this formation, can prevent to pollute environment on every side from the treatment fluid that overflowed by liquid level.And, flow to the treatment fluid that is subjected to liquid level in order to reclaim, even such as being configured near the structure of the drainage pipe etc. that is subjected to liquid level very inaccuracy, also not worrying can wounded substrate, is favourable with comparing in structural design from the situation of the direct recycle process fluids of substrate surface therefore.

And the described liquid device that is subjected to also can be configured to vertical substantially direction by direction of principal axis, and the cylindrical member that forms the spiral helicine groove that reclaims described treatment fluid on outer peripheral face constitutes.According to this formation, substrate is in contact or near when carried by liquid device, this treatment fluid flows under capillary effect in the groove of cylindrical member outer peripheral face, discharges along spiral, therefore can improve the drainage efficiency of treatment fluid.

At this moment, preferably cylindrical member can rotate freely.This situation, because the rotation of cylindrical member, treatment fluid can flow in the groove quickly.And the substrate in the conveying can alleviate its contact-impact with cylindrical member when contacting, and the conveying of substrate can successfully be carried out.

And, it is desirable to form the described transport path of inclination, make the trackside in the downstream of described air-supply be lower than trackside with its subtend.According to this formation, need not be by the air-supply of air-supply arrangement, the treatment fluid on the substrate surface just can flow to the outside of substrate substantially.And not do not flow out, remain in the treatment fluid of substrate surface because the effect of deadweight moves to the trackside in downstream of the air-supply of substrate naturally and makes it more effectively to be subjected to liquid, that air-supply power can be set is lower, thereby alleviates the cost of air-supply.

At this moment, the angle of inclination of described transport path is preferably more than 2 °.According to this formation, compare air-supply power with technology in the past and can be suppressed to 1/10 degree.And the angle of inclination is the most desirable below 10 °.Such formation does not need special additional mechanism providing additional operation, utilizes average conveying mechanism just can realize, and, the conveying of substrate is stably carried out.

And then, described air-supply arrangement is made of the air knife with slit-shaped air outlet.

Description of drawings

Fig. 1 is the pattern stereogram of all formations of the drying device of the expression embodiment of the invention 1.

Fig. 2 is the vertical view of formation of the drying device of the expression embodiment of the invention 1.

Fig. 3 is the partial enlarged drawing of the drying device of the expression embodiment of the invention 1.

Fig. 4 is the partial front elevation view of the drying device of the expression embodiment of the invention 1.

Fig. 5 is the effect partial enlarged drawing for the drying device of the explanation embodiment of the invention 1.

Fig. 6 is the ideograph of formation of the dry slot that drying device possessed of the expression embodiment of the invention 1.

Fig. 7 is the pattern stereogram of all formations of the drying device of the expression embodiment of the invention 2, is the figure of corresponding diagram 1.

Fig. 8 is the pattern stereogram of all formations of the drying device of the expression embodiment of the invention 3, is the figure of corresponding diagram 1.

Fig. 9 is the pattern stereogram of all formations of the drying device of the expression embodiment of the invention 4, is the figure of corresponding diagram 1.

Among the figure: 10-air knife (air-supply arrangement), the 10a-peristome, 11-flat board member (being subjected to liquid device), 11 '-porous member (being subjected to liquid device), 11 "-and plectane parts (being subjected to liquid device); 11 -cylindrical member (being subjected to liquid device), 11a, 11b-platen surface (being subjected to liquid level), 11 ' a, 11 ' b-pore face (being subjected to liquid level); 11 " a, 11 " b-plectane face (being subjected to liquid level); 13-drainage arrangement, 14-groove, 50-treatment fluid; 104-conveying roller (conveying device); r1-trackside, R, Ra, Rb-transport path, W-substrate.

Embodiment

Below, by accompanying drawing embodiments of the invention are described.

At first, embodiment 1 is described, Fig. 1～Fig. 6 represents the drying device of the embodiment of the invention 1, Fig. 1 is its all stereogram that constitutes, Fig. 2 is its vertical view, and Fig. 3 is its main position enlarged drawing, and Fig. 4 is the front view that its main position constitutes, Fig. 5 is for the main position enlarged drawing of its effect is described, Fig. 6 is all formation schematic diagrames of the dry slot that possesses of this dry device.In addition, in following institute's drawings attached,, the size of each component parts, the ratio of size have been done suitable adjustment for the ease of observing.

Fig. 6 represents the dry slot 200 as an example, dry slot 200 by: with substrate W from inlet 200a begin a plurality of conveying rollers (conveying device) 104 of carrying along the transport path of basic horizontal towards outlet 200b, detergent remover feedway 201, displacement liquid feedway 202 and the drying device 203 along this transport path from the upstream side arranged in order constitutes.

Conveying roller 104 as shown in Figure 2, is made of pair of rolls 104a, the 104b of subtend respectively, and the end in each

roller

104a, 104b outside can supported rotationally by framework 105.At the outboard end of each roller 104a, the 104b rotating band not shown in the figures of reeling, this rotating band is driven by the drive motors not shown in the figures that is arranged on framework 105 outsides,

roller

104a, 104b are rotated synchronously, make and ask the substrate W that carries forwards to carry (throughput direction) at each roller 104a, above the 104b.

And, as shown in Figure 4,, the diameter of roller 104a and roller 104b is had nothing in common with each other by independently setting the diameter of each

roller

104a, 104b respectively, can under the state that makes substrate surface Wa, Wb cant angle theta angle, carry.Adopt the roller with diameter bigger than roller 104b on roller 104a, the end limit of the roller 104b side of substrate W is in lower position than the end limit of roller 104a side.And, such as the length that changes four pillars the framework of device is tilted, substrate W is tilted.The angle of inclination of substrate is preferably in more than 2 ° below 10 ° in the conveying.

At this moment, because the vibration in carrying makes the landing of substrate W adipping, the subtend landform becomes the section difference G (with reference to Fig. 5) of mounting substrate W inwardly in the side of each

roller

104a, 104b in order to prevent.Thus, forbid that substrate moves towards transverse direction, substrate is carried at the state of determining.

In addition, below, with the zone passed through with the surface of determining state conveying substrate W in this wise as transport path R.And, on to substrate, under the transport path of Wa and the situation that the transport path below the substrate is distinguished, be labeled as transport path Ra, transport path Rb respectively.

Detergent remover feedway 201 provides detergent remover A from the jet of groove shape to substrate, since substrate W from preceding paragraph operation (clean operation) if substrate surface Wa part air dry when being transported to drying process, after dried, be easy to generate uneven drying, so must prevent.The detergent remover A that sprays is similar material with the detergent remover that the clean operation of preceding paragraph operation (wet operation) is used, such as, be in ablution groove, to be full of pure water (figure part omitted) substrate is invaded processing therein as the preceding paragraph operation, detergent remover A just uses pure water.

Displacement liquid feedway 202 provided displacement liquid B to substrate W in advance before carrying out dried at drying device 203, can make substrate W dry quickly on drying device, injected displacement liquid B adopts has good dissolubility for the detergent remover in the described clean operation, high-volatile material.When being pure water, as the suitable IPA (b propanol) that adopts possess hydrophilic property of displacement liquid such as described detergent remover A.

In addition, a side or two sides of detergent remover feedway 201 and displacement liquid feedway 202 can be dispensed.Below, preceding paragraph operation (the clean operation) detergent remover that adheres to, the detergent remover A that detergent remover feedway 201 provides, displacement liquid B that displacement liquid feedway 202 provides are generically and collectively referred to as treatment fluid.

Drying device 203, as shown in Figure 2, by spraying Compressed Gas, the treatment fluid that adheres on substrate surface Wa, the Wb is focused on the air-supply arrangement 10 of angle end of substrate W rear end and the described treatment fluid that will concentrate on this angle end and just be subjected to liquid device 11 formations as liquids recovery to substrate surface Wa, Wb.

Air-supply arrangement 10 as Fig. 2, as shown in Figure 3, is clamped on the position constituting as a pair of air knife (air-supply arrangement) 10 near peristome (air outlet) 10a of the slit-shaped of configuration by having respectively up and down with transport path Ra, Rb.This air knife 10 is configured to make its length direction to cross over transport path R, and described peristome 10a towards the upstream side of transport path R like that for the vertical plane tilted configuration, Compressed Gas is sprayed towards the rear of transport path R from peristome 10a.At this moment, the inclined angle alpha of substrate surface Wa, the Wb of air knife 10,10 (promptly hereto, incidence angle for the air-supply of transport path R) preferably is decided to be 50 °～70 °, thus the treatment fluid that on substrate surface Wa, Wb, adheres to just as the rear that is scraped substrate W move, put together as fluid block in the rearward end of substrate W.

And, air knife 10, near substrate surface Wa, Wb (being transport path Ra, Rb) configuration, and the angle of inclination of the vertical direction of the angle of inclination of the vertical direction of air knife 10 and substrate W (being the angle of the vertical direction of transport path Ra, Rb) θ similarly disposes.Thus, the pressure loss of Compressed Gas diminishes, and the air pressure that substrate surface Wa, Wb bear can be accomplished equalization in face.

And then the both ends of air knife 10 are configured in for before and after the throughput direction mutually on the position of deflection, and the air supply direction of air knife 10 tilts to dispose like that for the direction of throughput direction with the angle B of regulation.Thus, the treatment fluid that adheres on the substrate W can be concentrated to the end of the incline direction of the substrate W regulation left side of throughput direction (in such as the Fig. 2 for).The inclination angle B of the throughput direction of the long hand direction of air knife is about preferably 30 °～45 ° hereto.Thus, when the dual-side of substrate W sprayed Compressed Gas, treatment fluid flows to the speed of the angle end of substrate W can be basic identical at the dual-side of the substrate W that constitutes this angle end, thus can effectively treatment fluid be focused on the angle end a bit.And, if with transport path R self from the horizontal direction conveying that is inclined upwardly a little, can also more effectively treatment fluid be focused on the angle end.

And the Compressed Gas that sprays from peristome 10a adopts non-active gas, clean air etc.And the expulsion pressure of setting is not that requirement will dispel attached to the treatment fluid of substrate surface Wa, Wb, but it is moved to the degree of the rear end of substrate W.

Be subjected to liquid device 11 by: when substrate W contact or near the trackside r1 that is configured in described regulation incline direction side (such as the left side of Fig. 2) for throughput direction carried by liquid level when, because capillary effect, from described substrate W angle end treatment fluid is subjected to liquid with liquid condition, as shown in Figure 2, on the trackside r1 in described regulation incline direction side (that is the downstream of air supply direction), have from the parts that are subjected to liquid level of transport path R outer contacting or closely configuration and constitute.

Specifically, be subjected to liquid device 11 have with surface (the being subjected to liquid level) 11a of the same substantially horizontal plane of substrate surface Wa, have with the flat board member of the rectangle of the back side (the being subjected to liquid level) 11b of the same horizontal plane basic horizontal of substrate surface Wb substrate and constitute.An end limit 15a, the 15b of the surperficial 11a of this flat board member 11 and back side 11b, trackside r1 along the described regulation incline direction side of Ra, the Rb left side of throughput direction (on the Fig. 2 for) contacts or closely configuration like that respectively, substrate W by be subjected to liquid device 11 nearby the time,

platen surface

11a, 11b become continuous substantially plane.

Promptly,

platen surface

11a, 11b are respectively as the elongated surfaces performance function that substrate surface Wa, Wb are prolonged outside substrate W, substrate W is by when 10,10 of the air knives, the treatment fluid of staying described angle end is owing to capillary effect, and the end limit 15a, the 15b that stride across

platen surface

11a, 11b go out to flat board member 11 effluents from substrate surface Wa, Wb.

And the basic L font of the tortuous one-tenth in the other end of flat board member 11 is configured in the rhone, and the treatment fluid that overflows on platen surface 11a, the 11b passes to zigzag part 11c to rhone 20 drainings.

And

platen surface

11a, 11b constitute as hydrophilic surface, and treatment fluid is flowed out to flat board member 11 sides smoothly from substrate W.Such hydrophilic surface such as with after organic solvent processing platen surface 11a, the 11b, by using the UV rayed, can obtain easily.

And, close scope, as shown in Figure 5, when

treatment fluid

50a, 50b that substrate surface Wa, Wb angle end are detained are keeping liquid level owing to surface tension, regulation is as can be to the scope near described

platen surface

11a, 11b side shifting, can set suitable scope according to the kind (being the size of surface tension of liquid in detail) of the liquid of

treatment fluid

50a, 50b, the capillary size of platen surface 11a, 11b.Such as, if the liquid of treatment fluid 50a, the 50b aqueous solution class that to be surface tension big, the interval D of end limit 15a, the 15b of described trackside and flat board member 11 is set in the following scope of 5mm,

treatment fluid

50a, 50b are if the little organic class I liquid I of surface tension, and the interval of described trackside and described

end limit

15a, 15b is set in the following scope of 1mm.

Drying device as the embodiment of the invention 1, owing to be abovely to constitute like that, by conveying roller 104 from the substrate W that cleans operation and import because the roller diameter difference of

roller

104a, 104b, with (promptly to the oblique state of regulation incline direction inclination, the trackside of transport path Ra, Rb regulation incline direction side becomes the state of low level) to carry, the treatment fluid of substrate surface Wa, Wb all flows to outside the substrate W basically.

Then, do not flow out attached to treatment fluid residual on the substrate, along with substrate be transported to air knife 10 near, by the throughput direction Compressed Gas that spray at oblique rear towards a left side being moved to the rearward end of substrate W gradually from peristome 10a, focus on substrate W left comer end as fluid block, the state that liquid level overflows with a part is trapped in the left side side of substrate W.

Then, substrate W is while making the angle end in contact or near being subjected to liquid device 11 to pass through air knife at 10,10 o'clock, the liquid piece surface contact platen surface 11a, the 11b that overflow in the left side side of substrate W, treatment fluid is removed from substrate W as flow direction flat board member 11 sides owing to capillary effect.And the treatment fluid that goes out to flat board member 11 effluents is because the inclination of

platen surface

11a, 11b moves to zigzag part 11c, because the effect of deadweight forwards zigzag part 11c to and flows down, is discharged in the rhone 20.

So, according to the drying device 200 of present embodiment, owing to do not need treatment fluid is dispelled in the air, but under the state of liquid, reclaim, so that the expulsion pressure of air knife can be set is smaller, thereby can alleviate the operating cost of air-supply.And, because treatment fluid is reclaimed, can alleviate the burden of exhaust under the state of liquid, reduce the operating cost that is used for exhaust.

And owing to tiltedly substrate W is carried with the incline direction inclination of regulation, the treatment fluid on the substrate W can make treatment fluid swim over to basically beyond the substrate W when being directed into drying process, is removed.And residual treatment fluid on substrate surface Wa, Wb is because the cause of deadweight is stipulated the incline direction side shifting to substrate naturally, and further the air-supply wind-force of air knife 10 is set in the lowland.

In addition, the angle of inclination of this substrate (that is, the angle of inclination of transport path) θ preferably is set at more than 2 °, at this moment, as described later shown in (embodiment) like that, air-supply wind-force can be suppressed to about 1/10 of in the past technology.If the angle of inclination is set in below 10 °, need not add special mechanism, adopt just conveying substrate W stably of average conveying mechanism.

And then, because

platen surface

11a, 11b contact by

end limit

15a, 15b with substrate surface Wa, Wb or are close, treatment fluid can flow out in the long time before nearby by

end limit

15a, 15b at substrate W, length such as lengthening

end limit

15a, 15b, with contacting or close range widens of substrate and flat board member 11, can discharge treatment fluid more expeditiously.

And, because the angle of inclination that makes

platen surface

11a, 11b and substrate W (promptly, the inclination angle of transport path Ra, Rb) θ tilts with degree, therefore substrate surface Wa, Wb and

platen surface

11a, 11b are contacting or close scope is continuous substantially plane, can make the throughput direction of substrate W to concentrate on left back distolateral angle end.Treatment fluid successfully flows to flat board member 11 sides by the effect of deadweight.At this moment, further flow out to the treatment fluid of flat board member 11 sides because the effect of deadweight moves to zigzag part 11c naturally, can receive within the rhone 20 through zigzag part 11c, therefore without the driving of draining pump etc., reduced operating cost, needn't reserve the new place that draining pump is installed in addition, have the advantage that improves the design freedom in the dry slot 200.

Secondly, with reference to Fig. 7 embodiments of the invention 2 are described.In the drying device of present embodiment, utilize the same position of drying device of the embodiment 1 of Fig. 1～Fig. 6 explanation all to add same symbol, its declaratives omit.

As shown in Figure 7, in the drying device of present embodiment, as being subjected to liquid device to adopt porousness rectangular flat parts 11 ', and then be provided with the drainage arrangement 13 of discharging at the systemic treatment fluid of pore for these porousness parts 11 '.Has same formation with described embodiment 1 in addition.

Porousness parts 11 ' are same with described embodiment 1, are positioned at same substantially horizontal plane with substrate surface substrate surface Wa, Wa respectively as its platen surface (being subjected to liquid level) 11 ' a, the 11 ' b of pore face and constitute like that.An end limit 15a ', the 15b ' of the surface 11 ' a of these porousness parts 11 ' and the back side 11 ' b contacts with trackside r1 along the described regulation incline direction side of transport path Ra, Rb (such as the left on Fig. 2 to side) respectively or near disposing like that.

Promptly, platen surface 11 ' a, 11 ' b have the function of the elongated surfaces that substrate surface Wa, Wb are prolonged respectively outside substrate W, treatment fluid 50a, the 50b of substrate W by being trapped in described angle end when 10,10 of the air knives is because end limit 15a ', the 15b ' of platen surface 11 ' a, 11 ' b are crossed in capillary effect flows out smoothly to porousness parts 11 ' side from substrate surface Wa, Wb.The treatment fluid that flows into porousness parts 11 ' is absorbed by the pore in platen surface 11 ' a, the 11 ' b, isolates from substrate W rapidly.And this moment, because the suction of described platen surface 11 ' a, 11 ' b becomes hydrophilic surface, further promote to flow into treatment fluid from substrate W.

In addition, close scope and described embodiment 1 stipulate equally.

Exhaust apparatus 13 is made of gravitation pump 13a, the 13b of gravitation portion and drainage pipe 13c.The 13b of gravitation portion is installed on the end face of porousness parts 11 ', is attracted by gravitation pump 13a by drainage pipe 13c, will discharge from the treatment fluid that porousness parts 11 ' end face absorbs in the pore.

Drying device as the embodiment of the invention 2, constitute like that owing to above-mentioned, substrate W with its left comer end in contact or near porousness parts 11 ' time by between the

air knife

10,10 time, the fluid block surface that spills into substrate W left side side contacts with platen surface 11 ' a, 11 ' b, treatment fluid in the state downstream of liquid to porousness parts 11 ' side.At this moment, when the treatment fluid of outflow is absorbed by the pore in platen surface 11 ' a, the 11 ' b, attract draining by the 13b of gravitation portion by gravitation pump 13a.And, on pore, having absorbed platen surface 11 ' a, 11 ' the b possess hydrophilic property of treatment fluid, can promote to flow out treatment fluid from the angle end of described substrate W.

So in the drying device of present embodiment, also embodiment 1 is the same as described, treatment fluid is not distributed in the air, can reclaim under the state of liquid, therefore can reduce the cost of air-supply, exhaust.

And, because the inclination of platen surface 11 ' a, 11 ' b and substrate surface Wa, Wb is as one man tilted, substrate surface Wa, Wb contacts with dull and stereotyped 11 ' a, 11 ' b or close scope becomes continuous plane substantially, the treatment fluid of concentrating at substrate W left comer end since the effect of conducting oneself with dignity can successfully flow out to porousness parts 11 ' side.At this moment, because treatment fluid is absorbed by the pore of platen surface 11 ' a, 11 ' b, the treatment fluid of outflow can improve drainage efficiency rapidly from substrate isolates.And, have hydrophily owing to absorbed platen surface 11 ' a, the 11 ' b of treatment fluid, can promote treatment fluid to flow out from substrate W angle end, further improved drainage efficiency.

Secondly, use Fig. 8 to describe with regard to embodiments of the invention 3.And the drying device of present embodiment adopts the identical additional identical symbol in position of drying device of the embodiment 1 of Fig. 1～Fig. 6 explanation, so omit part explanation.

As shown in Figure 8, in the drying device of present embodiment, can armature parts 11 as adopted by liquid device ", these plectane parts 11 " sidepiece closely be provided with aqueduct 12.Has same formation with described embodiment 1 in addition.

These plectane parts 11 " same with described embodiment 1, be substrate surface Wa, Wb to be extended to the object that the treatment fluid outside the substrate W flows out outside substrate W near scope.Plectane parts 11 " surface (being subjected to liquid level) 11 " a and the back side (being subjected to liquid level) 11 " b lays respectively at substrate surface Wa, Wb and constitutes like that at same horizontal plane substantially, this plectane face 11 " a, 11 " and b periphery respectively the described incline direction side of transport path Ra, Rb (such as at the left on the figure to side) trackside r1 on be arranged on from transport path Ra, Rb outer contacting or close position.Thus, substrate W is trapped in treatment fluid 50a, the 50b of described angle end because plectane parts 11 are crossed in capillary effect by between the

air knife

10,10 time " peripheral part from substrate surface Wa, Wb to plectane parts 11 " effluent goes out.

And, plectane face 11 " a, 11 " b constitutes as hydrophilic surface, can successfully flow out to plectane parts 11 from the treatment fluid of substrate W " side.

And, plectane parts 11 ", can constitute rotatably, by drive unit not shown in the figures substrate W is rotated towards the direction speed basic synchronization ground that throughput direction is sent such direction of rotation (such as, vertical view inhour rotation among Fig. 8) and substrate W.Thus, when substrate W and plectane parts 11 " the side contact when passing through; can alleviate its contact-impact, in addition by plectane parts 11 " rotation make treatment fluid from substrate W side inflow promptly from substrate isolates, can remove treatment fluid from the angle end of substrate W effectively.

The pipe 12 that leaks, peripheral part is along plectane parts 11 " circular arc bending like that, crooked end limit is near plectane parts 11 " configuration the time, the other end of long hand direction is configured in the rhone 20.The pipe 12 that promptly leaks has the same function of zigzag part 11c with the flat board member 11 of described embodiment 1, can be with from plectane portion face 11 " a, 11 " treatment fluid that overflows of b forwards to the rhone 20.

And close scope is identical with described embodiment 1.

Drying device as the embodiment of the invention 3, constitute like that owing to above-mentioned, substrate W is with its left comer end in contact or near being subjected to liquid device 11 " time by between the

air knife

10,10 time; spill into the surperficial and plectane face 11 of fluid block of substrate W left side side " a, 11 " b contacts; treatment fluid is subjected to capillary effect, in the state downstream of liquid to plectane parts 11 " side.And, flow into plectane parts 11 " treatment fluid promptly isolated, being moved to pipe 12 sides of leaking by the rotation of plectane with substrate W, and then by capillary effect; from plectane face 11 " a, 11 " b flows to pipe 12 sides of leaking, and forwards pipe 12 rows of leaking to rhone 20 by the deadweight effect.

So, in the drying device of present embodiment, also the effect of embodiment 1 is the same as described, and the treatment fluid that flows out from substrate W is because the rotation by plectane sequentially moves to the pipe 12 that leaks, so can near substrate W, not be detained, thereby can improve the drainage efficiency of treatment fluid.

And, because plectane parts 11 " rotate the sidepiece of substrate W and these plectane parts 11 with the basic constant speed of the base speed of substrate W " contact when passing through, can alleviate its contact-impact, successfully conveying substrate W.

Secondly, utilize Fig. 9 that the embodiment of the invention 4 is described.In the drying device of present embodiment, the position additional identical symbol identical with the drying device of the embodiment 1 that adopts Fig. 1～Fig. 6 explanation is so omit part explanation.

As shown in Figure 9, the drying device shape of present embodiment is as being subjected to just also rotatable cylindrical member 11  of liquid device.In addition constitute identical with embodiment 1.

Cylindrical member 11 , the basic vertical direction of direction of principal axis ground configuration, and its outer peripheral face is at the trackside r1 of the incline direction side of the described regulation of transport path Ra, Rb (such as the left among Fig. 9 to side) is from transport path Ra, Rb outer contacting or near disposing like that.

And, at cylindrical member 11 , by drive unit not shown in the figures substrate W is sent such direction of rotation (such as, vertical view inhour rotation among Fig. 8) towards throughput direction and rotate with the basic constant speed of the transporting velocity of substrate W ground.

And then, on the outer peripheral face of cylindrical member 11 , form spiral helicine groove 14 in the direction that extends to rhone 20 near the position the substrate surface Wa.The treatment fluids that the rotation of this groove 14 by cylindrical member 11  will flow in the groove 14 more effectively import in the rhone 20, the direction of rotation of cylindrical member 11  is the anti-clockwise words of vertical view, the direction of rotation of formed groove 14 be near the substrate surface Wa towards the below, be inhour rotation in vertical view.It is big that the thickness of the pitch ratio substrate W of groove 14 is wanted, thereby can prevent to adhere again to substrate back Wb from the treatment fluid that substrate surface Wa flows in the groove.And then, will make hydrophilic surface in this groove 14, the treatment fluid that comes from substrate W is successfully flowed in the groove 14.

Drying device as the embodiment of the invention 4, owing to above-mentionedly constitute like that, thus substrate W the time with its left comer end in contact or near the outer peripheral face of cylindrical member 11 , by between the

air knife

10,10 time, the liquid piece surface that spills into substrate W left side side contacts with the cylindrical periphery face, flows to groove 14.Then, the treatment fluid that flows into groove 14 is isolated rapidly from substrate W by the rotation of cylindrical member 11 , imports the below, is drained in the rhone 20.

So, the drying device of present embodiment, because being trapped in the liquid piece 50 of the angle end of substrate W does not disperse in air, but under the state of liquid, be discharged in the rhone 20, therefore can reduce the cost of air-supply, exhaust, in addition owing to the treatment fluids that flow out in the groove 14 from substrate W are discharged along the hand of spiral, so the drainage efficiency height of treatment fluid.And, flow out to the rotation that groove 14 interior treatment fluids pass through columnar portion 11 , isolate from substrate W rapidly, sequentially discharged to drainage direction, therefore, can near substrate W, not be detained, can further improve drainage efficiency.

And, the rotation of the basic constant speed of the transporting velocity of cylindrical member 11  and substrate W, substrate W sidepiece contacts with this cylindrical member 11 , by the time alleviated contact-impact, successfully conveying substrate W.

In addition, the present invention is not limited to the above embodiments, only otherwise break away from design scope of the present invention, can implement various distortion.

Such as, in described embodiment 1, embodiment 3, can replace by zigzag part 11c, the pipe 12 that leaks treatment fluid is imported structure in the rhone 20, drainage pipe is set, the structure that the treatment fluid on platen surface or the plectane face is siphoned away with draining pump and adopt near platen surface or plectane face.At this moment, described draining pump and drainage pipe play a role as drainage arrangement of the present invention.In a single day like this, using drainage pipe to reclaim under the situation of the treatment fluid that flows out to platen surface or plectane face side, even configuration drainage pipe in inaccuracy ground is not worried wounded substrate W, therefore than more favourable from the direct recycle process fluids of substrate W angle end yet.

And, in described embodiment 2, can adopt plectane parts 11 " do not need to drive rotation, just independently rotary formation by drive unit.In this case, also can be at substrate W and plectane parts 11 " contacts side surfaces by the time alleviate its contact-impact; make to flow out to plectane face 11a ", 11b " treatment fluid move to drainage pipe 12 sides owing to the inclination of plectane parts 11; import drainage pipe 12 by deadweight, be discharged in the rhone 20.

Embodiment

The present inventor is for actual verification effect of the present invention, actual fabrication the drying device that the present invention constitutes.

The drying device of present embodiment with described embodiment 1 as basic comprising, the inclination angle of the substrate when the conveying (being the transport path inclination angle) is 2 °, carry out dried, consequently, with in the past (8L/mincm) relatively if about 1/10 air-supply wind-force just can make treatment fluid from flow of substrates to the flat board member side.

According to above the present invention who is described in detail, because treatment fluid does not disperse in air,, therefore can reduce the air-supply wind-force of air-supply arrangement with the form recovery of liquid, reduce the operating cost that is used to blow.And, also can reduce the operating cost that is used for exhaust because treatment fluid, need not be provided with the treatment fluid that the exhaust apparatus recovery is dispersed in addition with recovered in liquid state.

At this moment, in the face with the surface of the described substrate that is subjected to liquid device on prolonging described transport path, constitute as having the parts that are subjected to liquid level, the described periphery of liquid level that is subjected to contacts or closely configuration at the trackside to described transport path outside described transport path, contacted or close scope becomes continuous plane by liquid level and transport path, treatment fluid is successfully flowed out to be subjected to the liquid level side.

And, direction of principal axis is configured to vertical substantially direction, forming the spiral helicine groove that can receive described treatment fluid on outer peripheral face constitutes as the cylindrical member that can rotate freely, when substrate is carried in contact or near the sidepiece that is subjected to liquid device, flow into the treatment fluid in the groove because the rotation of cylindrical member is rapid and substrate isolates, and discharge along spiral, so the discharge efficient of treatment fluid can improve.And because the rotation of cylindrical member, the contact-impact the when substrate in the conveying contacts with cylindrical member can alleviate, and substrate is successfully carried.

Claims

1. drying device is characterized in that: possess:

Have the conveying device of the substrate of the treatment fluid that will have liquid film or droplet-like to the transport path of a direction conveying on the surface;

Be configured in described transport path nearby for described treatment fluid is moved to the upstream side of throughput direction, form towards described relatively throughput direction regulation the inclination angle direction and send dry air-supply arrangement with gas towards the surface of substrate;

Contact or near in the described transport path, the trackside of comparing the upstream side of relative throughput direction with described air-supply arrangement in the downstream of described air supply direction is provided with, and reclaims the liquid device that is subjected to of described treatment fluid on the described substrate surface.

2. drying device as claimed in claim 1 is characterized in that: the described liquid device that is subjected to reclaims described treatment fluid by capillary effect.

3. drying device as claimed in claim 1, it is characterized in that: dispose the described liquid device that is subjected to, make the liquid level that is subjected to that has described treatment fluid in the elongated surfaces on surface of its described substrate on described transport path, the described periphery that is subjected to liquid level is contacted beyond from described conveying road or close with the trackside of described transport path.

4. drying device as claimed in claim 3 is characterized in that: describedly had with the trackside of described transport path by liquid level to contact or the close end limit that is roughly linearity, described end edge the trackside configuration of described transport path.

5. drying device as claimed in claim 3 is characterized in that: the described liquid level that is subjected to has substantially just round shape, described be subjected to liquid level with the same substantially horizontal plane of described transport path in can be rotated.

6. drying device as claimed in claim 5 is characterized in that: the described transporting velocity basic synchronization ground rotation that is subjected to liquid level and described substrate.

7. drying device as claimed in claim 3 is characterized in that: the described liquid level that is subjected to is a hydrophilic surface.

8. drying device as claimed in claim 3 is characterized in that: the described liquid level that is subjected to is the pore face.

9. drying device as claimed in claim 3 is characterized in that: also possess discharge and be recovered in the described drainage arrangement that is subjected to the treatment fluid of liquid level.

10. drying device as claimed in claim 1 is characterized in that: the described liquid device that is subjected to is configured on the basic vertical direction by direction of principal axis, and the cylindrical member that forms the spiral helicine groove that can reclaim described treatment fluid on outer peripheral face constitutes.

11. drying device as claimed in claim 1 is characterized in that: the described transport path that forms makes the trackside in the downstream of described air-supply be lower than trackside with its subtend.

12. drying device as claimed in claim 11 is characterized in that: the inclination angle of described transport path is more than 2 °, below 10 °.

13. drying device as claimed in claim 1 is characterized in that: described air-supply arrangement is made of the air knife with slit-shaped air outlet.