CN1269201C - Analyser for analyzing minority carrier lifetime of solar battery - Google Patents
Analyser for analyzing minority carrier lifetime of solar battery Download PDFInfo
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- CN1269201C CN1269201C CNB2003101083107A CN200310108310A CN1269201C CN 1269201 C CN1269201 C CN 1269201C CN B2003101083107 A CNB2003101083107 A CN B2003101083107A CN 200310108310 A CN200310108310 A CN 200310108310A CN 1269201 C CN1269201 C CN 1269201C
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
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Abstract
The present invention relates to a device for analyzing the service life of minority carriers of solar batteries. A microwave system is composed of a microwave source, an isolator, an attenuator, a magic T, a short circuit piston, a microwave crystal detector, a varactor diode and a surface antenna; a data collecting and processing system is composed of a data collector and a computer. Four rectangular microstrip surface antennas are used for outputting microwave signals to a sample to be detected and for receiving emitted microwaves; a special signal conditioning and amplifying circuit carries out the operations of blocking, differentiating, magnifying, shielding and filtering to output signals of the microwave crystal detector, and then the processed output signals enter the data collector to obtain the digital quantity of photoconductive decay curves. The present invention adopts a microwave reflecting method to make photoconductive signals coupled, and the photoconductive changes are measured by measuring the changes of microwave reflecting power; the service life of minority carriers of measured silicon wafers and solar batteries is calculated from the photoconductivity decay curves; the on-line microwave reflecting lossless non-contact measurement for solar battery devices and material is realized.
Description
Technical field:
The present invention relates to a kind of solar cell minority carrier lifetime analyzer, is a kind of solar cell and raw material silicon chip thereof to be measured the non-equilibrium minority carrier tester in (few son) life-span, belongs to solar cell micro-parameter technical field of measurement and test.
Background technology:
Solar cell technology is the semiconductor technology of more complicated, and there are twenties road technical processs front and back, for example: cleaning, burn into diffusion, silk screen printing, sintering, plasma etching, PECVD (chemical vapour deposition (CVD)) etc.In each procedure, in the research and production of solar cell, generally be under guide of theory, to determine certain process conditions, change the technological parameter of certain one technology in the technology, the contrast experiment weighs the quality of several total technologies with the IV performance of last solar cell, more several then total technologies, the quality of the technological parameter of a certain link in the analysis process can take time and effort so very much, also is difficult to touch optimum process parameters at last.If the detection method of a cover to online characterization processes effect arranged, the technical process in each step is played the effect of monitoring, control, the quality of each road technology is in time estimated, to help improving technological level, make each road process lowest optimization, the solar cell of producing at last also must be a best performance.The most important parameters index of estimating each road technology quality is a minority carrier life time, and this index directly has influence on the output electric property energy of last produced solar cell, just photoelectric conversion efficiency.The online minority carrier life time device for monitoring and analyzing of one cover has been arranged, and the process modification of solar cell and raising are just evidence-based, and can improve the speed of seeking optimised process by timely rapid adjustment technology, big time saver, and financial resources greatly also use manpower and material resources sparingly.The existing technology of minority carrier life time of measuring is mainly at semi-conducting material, relevant testing apparatus has been applied to production line, minority carrier lifetime technology at solar cell device and material but is newer a special kind of skill, and correlation technique has the WT-2000 of Semilab company.But, what prior art adopted mostly is high-frequency coupling PCD (photoconductivity decay) method, adopt the technology of having only Semilab company of the PCD technology of microwave reflection, this technology does not solve the steady-state component problem of microwave reflection power level, the antenna reflection coefficient of the microwave coupling that adopts is smaller, be unfavorable for little microwave signal measurement, do not solve the sample anti-interference problem that small-signal is measured under little injection condition.Existing conventional bell-mouth antenna commonly used and rectangular microstrip antenna are difficult to accomplish and the waveguide impedance coupling that the power of emission and microwave reflection is limited, is not suitable for solar cell minority carrier lifetime analyzer.
Summary of the invention:
The objective of the invention is at the deficiencies in the prior art, design provides a cover solar cell minority carrier lifetime analyzer, realize the good coupling that microwave is launched and reflected on sample, can carry out the harmless non-cpntact measurement of online microwave reflection to solar cell device and material, obtain minority carrier life time information accurately.
To achieve these goals, the measurement silicon chip and the solar cell minority carrier life time analyzer of the present invention's design, adopt microwave reflection coupling light conductance signal, measure photoconductive variation by the variation of measuring microwave reflection power, from the minority carrier life time of tested silicon chip of photoconductivity decay curve calculation and solar cell.
Minority carrier life time analyzer of the present invention mainly is made up of pulse laser system, microwave system, data acquisition and treatment system three parts, pulse laser system produces exciting laser, shine on the sample, the driving source of minority carrier life time is the pulse laser of 10 nanoseconds, the photoconduction that causes sample changes, this photoconductive variation is directly proportional with the reflection power of coupling microwave in certain limit, the decline curve of microwave reflection power has just reflected the photoconductivity decay curve, just can calculate minority carrier life time from the decline curve of microwave reflection power; Microwave system mainly is made up of several parts such as microwave source, isolator, attenuator, magic T, short-circuit plunger, microwave crystal detector, capister, surface antennas; Data acquisition and treatment system mainly partly are made up of data acquisition unit, computer etc.
The present invention adopts four, and port reciprocity element---magic T is as the microwave differential element, the microwave that microwave source sends arrives magic T through isolator and attenuator, this microwave energy is divided into two parts, a part arrives sample through surface antenna, another part arrives short-circuit plunger, sample and surface antenna produce reflection to the incident microwave, the microwave reflection energy turns back to magic T again, short-circuit plunger also produces reflection to the incident microwave, the microwave reflection energy also turns back to magic T, after this two parts reflected energy converges to magic T, can cancel out each other, do subtraction, the difference of two-way microwave reflection energy can not got back to attenuator, only can arrive the microwave crystal detector, regulate short-circuit plunger, just can make the difference of above-mentioned two-way microwave reflection energy under stable state (pulse laser does not produce sample and excites) is zero, like this, pulse laser excites sample to make its conductivity variations, thereby cause the variation of microwave reflection power, this variation is detected by the microwave crystal detector, does not contain steady-state component, have only variable quantity, this just accomplishes fluently solid foundation to the conditioning of follow-up signal.
The present invention has designed special microstrip antenna-surface antenna, surface antenna is very important element in analyzer of the present invention, adopt the double-sided copper-clad resin plate, the bottom copper coin is reserved broadside, and thickness is than upper copper thickness of slab, and the upper strata copper coin forms four square copper coins through corrosion, mutually line, intermediate connection point links to each other with coaxial feeder, and microstrip antenna has realized that microwave signal is to the output of sample with to the reception of launched microwave.
The present invention has designed special-purpose signal condition and amplifying circuit the signal of microwave crystal detector output is carried out entering data acquisition unit again every straight, difference, amplification, shielding, filtering, obtains the digital quantity of PCD curve.
Crystal detector converts the variation of microwave reflection power to the variation of output voltage, there is certain flip-flop in this voltage signal, sometimes flip-flop even considerably beyond the alternating component of this voltage signal, also there is the High-frequency Interference composition in this signal simultaneously, before signal amplifies, earlier by a low-pass filter circuit, remove radio-frequency component, remove DC component through block isolating circuit then, pass through differential amplifier circuit again, the signal of Huo Deing is exactly the variation waveform of the output voltage surveyed of crystal detector like this, but High-frequency Interference is bigger, form the index variation waveform by the exponent arithmetic circuit variation, carry out filtering by bandwidth-limited circuit again, obtain the conditioning waveform, pass through the natural logrithm computing circuit then, obtain the conditioned signal of the output signal of crystal detector, the variation waveform of this voltage conditioned signal just changes into photoconductivity decay (PCD) curve of sample exactly through neural network computing, delivers to data acquisition unit through the output transmission circuit.The present invention is provided with screen all circuit is shielded, screen adopts passive screening, all circuit encapsulate in the can of a sealing, the input and output lead of this circuit adopts 50 ohm of coaxial shielding lines, connector adopts BNC (Bayonet Nut Connector) joint, the outer shell and the can of the joint of BNC are electrically connected, and the can good earth, external interference exerts an influence to circuit in the box hardly like this.
Solar cell minority carrier lifetime analyzer of the present invention adopts the carrier of microwave system as minority carrier life time information, and the minority carrier life time information translation becomes microwave power and reflectivity information, analyzes these information and just can obtain minority carrier life time information accurately.(not having the excitation pulse light time) is output as zero when static, the output of (the excitation pulse light time is arranged) is exactly to characterize the microwave power of the photoconductivity decay curve of minority carrier life time to change in the time of dynamically, and the microwave surface antenna of design has been realized the good coupling that microwave is launched and reflected on sample.The present invention has realized solar cell device and material are carried out the harmless non-cpntact measurement of online microwave reflection, can be used for the online detection in each road process procedure of solar cell production process.
Description of drawings:
Fig. 1 is a solar cell minority carrier lifetime analyzer theory structure block diagram of the present invention.
Fig. 2 is the structural representation of four square microstrip antennas of the present invention.
Among Fig. 2,1 is the bottom copper coin, and 2 is epoxy resin medium, and 3 is square upper strata copper coin, and 4 is the cross line, 5 coaxial feeder tie points.
Fig. 3 is signal condition of the present invention and amplifying circuit schematic diagram.
Embodiment:
Below in conjunction with accompanying drawing technical scheme of the present invention is described in further detail.
Theory structure block diagram of the present invention as shown in Figure 1, pulse laser sends the laser radiation of 6-10ns to sample, surface antenna, microwave source, isolator, attenuator, magic T, short-circuit plunger, microwave crystal detector, variable capacitance diode etc. constitute microwave system, microwave source joins by BJ-100 microwave waveguide and isolator, isolator is a waveguide type, joins with the waveguide type attenuator.The present invention adopts four, and port reciprocity element---magic T is as the microwave differential element, attenuator is divided arm by waveguide equally with of magic T and is linked to each other, another of evil spirit T divided arm equally and linked to each other with the microwave crystal detector by waveguide bend, the E arm of evil spirit T links to each other with short-circuit plunger, the H arm of evil spirit T links to each other with surface antenna, and variable capacitance diode links to each other with microwave source by circuit; The microwave crystal detector links to each other with amplifying circuit with signal condition by the coaxial line of BNC connector, signal condition links to each other with data acquisition unit with the coaxial line of amplifying circuit by BNC connector, data acquisition unit links to each other with computer by data wire, and computer links to each other with microwave source by variable capacitance diode.
Element in the microwave system of the present invention---four square microstrip antennas specifically describe as shown in Figure 2, four square microstrip antennas adopt the double-sided copper-clad resin plate, bottom copper coin 1 is reserved broadside, and thickness is thicker than upper strata copper coin 3, upper strata copper coin 3 is four square copper coins, form through corrosion, four squares are connected to each other by cross line 4, the intermediate interdigitated point of cross line 4 is a coaxial feeder tie point 5, coaxial feeder tie point 5 links to each other the Transmission Microwave signal by the hollow duck eye of an epoxy resin medium layer 2 and bottom copper coin 1 with the microwave coaxial lead.Each square length of side of four square upper strata copper coins 3 is that the spacing between b=λ/2, two squares is λ/2, and wherein λ is microwave signal wavelength 3cm.The thickness h of epoxy resin medium 2 is 5mm, and bottom copper coin 1 thickness h 2 is 2mm.
Surface antenna of the present invention can well be launched and the Transmission Microwave signal, satisfies the requirement of analyzer of the present invention to antenna.
Signal condition of the present invention and amplifying circuit are as shown in Figure 3, by low pass filter, block isolating circuit, differential amplifier circuit, the exponent arithmetic circuit, bandwidth-limited circuit, the natural logrithm computing circuit, output transmission circuit and screen etc. partly constitute, low-pass filter circuit links to each other on printed circuit board (PCB) with block isolating circuit, block isolating circuit links to each other with the differential signal input of differential amplifier circuit, the output of differential amplifier circuit links to each other with the exponent arithmetic circuit, the output signal of exponent arithmetic circuit is delivered to the natural logrithm computing circuit through bandwidth-limited circuit, obtain the conditioned signal of primary signal, deliver to data acquisition unit through the output transmission circuit.Screen is all circuit board double wrapped, and connects the earth, and wherein the ground end of differential amplifier circuit also connects screen.The input and output lead of signal condition of the present invention and amplifying circuit adopts 50 ohm of coaxial shielding lines, and connector adopts BNC connector, and the outer shell of the joint of BNC and can screen are electrically connected, can screen good earth.
Claims (1)
1, a kind of solar cell minority carrier lifetime analyzer comprises pulse laser system, microwave system, data acquisition and treatment system, it is characterized in that:
Pulse laser system: wherein the pulse laser 6-10ns laser radiation of sending is to sample;
Microwave system: wherein microwave source joins by BJ-100 type microwave waveguide and waveguide type isolator, isolator and waveguide type attenuator join, attenuator is divided arm by waveguide equally with of four port reciprocity elements evil spirits T and is linked to each other, another of evil spirit T divided arm equally and linked to each other with the microwave crystal detector by waveguide bend, the E arm of evil spirit T links to each other with short-circuit plunger, and the H arm of magic T links to each other with microstrip antenna;
Wherein, described microstrip antenna is four facing antennas, adopt the double-sided copper-clad resin plate, bottom copper coin (1) is reserved the limit, thickness is 2mm, thickness greater than upper strata copper coin (3), upper strata copper coin (3) is four square copper coins, be connected to each other by cross line (4), the intermediate interdigitated point of cross line (4) is a coaxial feeder tie point (5), and coaxial feeder tie point (5) links to each other with the microwave coaxial lead by the hollow duck eye of epoxy resin medium layer (2) and bottom copper coin (1), each square length of side of four square upper strata copper coins (3) is λ/2, two square pitch are λ/2, and wherein λ=3cm is the microwave signal wavelength;
Data acquisition and treatment system: wherein signal condition and amplifying circuit link to each other with microwave crystal detector in the microwave system, the synchronous signal conditioning links to each other with data acquisition unit with amplifying circuit, data acquisition unit links to each other with computer, and computer links to each other with microwave source by variable capacitance diode;
Wherein, in described signal condition and the amplifying circuit, the output of low-pass filter circuit links to each other with block isolating circuit, block isolating circuit links to each other with the differential signal input of differential amplifier circuit, the output of differential amplifier circuit links to each other with the exponent arithmetic circuit, the output signal of exponent arithmetic circuit is connected to the natural logrithm computing circuit through bandwidth-limited circuit, obtain the conditioned signal of primary signal, the variation waveform of this conditioned signal changes into the photoconductivity decay curve of sample through neural network computing, deliver to data acquisition unit through the output transmission circuit, screen is all circuit board double wrapped and connect the earth, the ground termination screen of differential amplifier circuit.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2003101083107A CN1269201C (en) | 2003-10-30 | 2003-10-30 | Analyser for analyzing minority carrier lifetime of solar battery |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2003101083107A CN1269201C (en) | 2003-10-30 | 2003-10-30 | Analyser for analyzing minority carrier lifetime of solar battery |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1540735A CN1540735A (en) | 2004-10-27 |
| CN1269201C true CN1269201C (en) | 2006-08-09 |
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| Application Number | Title | Priority Date | Filing Date |
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| CNB2003101083107A Expired - Fee Related CN1269201C (en) | 2003-10-30 | 2003-10-30 | Analyser for analyzing minority carrier lifetime of solar battery |
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| CN (1) | CN1269201C (en) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2011123469A1 (en) * | 2010-03-29 | 2011-10-06 | Intevac, Inc. | Time resolved photoluminescence imaging systems and methods for photovoltaic cell inspection |
| CN102645560A (en) * | 2012-03-29 | 2012-08-22 | 北京大华无线电仪器厂 | Special measuring clamp for microwave minority carrier lifetime testers |
| CN102709396A (en) * | 2012-06-13 | 2012-10-03 | 韩华新能源（启东）有限公司 | Solar crystalline silicon wafer analysis and screening method based on excessive carrier attenuation |
| CN102914502A (en) * | 2012-11-21 | 2013-02-06 | 厦门大学 | Non-contact nondestructive tester for semiconductor material minority carrier lifetime |
| CN103969263A (en) * | 2014-06-04 | 2014-08-06 | 哈尔滨工业大学 | Minority carrier lifetime tester based on high-frequency photoconduction attenuation |
| CN111128783B (en) * | 2019-12-30 | 2024-07-16 | 南方科技大学 | Longitudinal distribution test system and method for minority carrier lifetime |
| CN111505503B (en) * | 2020-04-17 | 2021-06-15 | 北京航空航天大学 | Lithium ion battery aging test method and test device based on micro mechanism |
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2003
- 2003-10-30 CN CNB2003101083107A patent/CN1269201C/en not_active Expired - Fee Related
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| CN1540735A (en) | 2004-10-27 |
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Granted publication date: 20060809 Termination date: 20101030 |