CN1254675C - Optical assembly measuring apparatus - Google Patents
Optical assembly measuring apparatus Download PDFInfo
- Publication number
- CN1254675C CN1254675C CN 02159312 CN02159312A CN1254675C CN 1254675 C CN1254675 C CN 1254675C CN 02159312 CN02159312 CN 02159312 CN 02159312 A CN02159312 A CN 02159312A CN 1254675 C CN1254675 C CN 1254675C
- Authority
- CN
- China
- Prior art keywords
- pedestal
- integrating sphere
- support
- optical module
- rotating disk
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Abstract
The present invention relates to a measuring device for an optical assembly, which comprises a base, a rotating disk, an integrating sphere unit and a supporting frame, wherein a reference point is arranged on the circumferential surface of the base; a shaft of the rotating disk is arranged on the base; a positioning scale is arranged on the circumferential surface of the rotating disk; the integrating sphere unit extends to the outer side from the rotating disk along the radius direction of the rotating disk; a shaft of the supporting frame is arranged on the rotating disk and is used for clamping an optical assembly; the base, the rotating disk and the supporting frame are positioned on a coaxial shaft, and the supporting frame is provided with a reference component for positioning the supporting frame. In addition, the present invention also provides the measuring device for the optical assembly, which comprises the base, the integrating sphere unit and the supporting frame.
Description
Technical field
The present invention relates to the optical module measurement mechanism of a kind of optical module measurement mechanism, particularly a measurement of reflectivity.
Background technology
Opto-electronics becomes one of popular new industry in recent years, no matter be that industrial application or learned research all has very big progress.
In optical module, the application of high reflection mirror (High Reflection Mirror) is extremely wide, and most high reflection mirror is that plating one optical thin film is made on a substrate.In the manufacture process of high reflection mirror, need to detect its reflectivity, and become to supply the data of comparison, so as to the yield of control high reflection mirror via the signal treatment conversion through optical instrument.
As shown in Figure 1, when measuring the reflectivity of an optical module 8, enter in the measurement mechanism 6 that is provided with optical module 8 by a light source region 5 emissions one light beam.Then, inject again in the integrating sphere 7, handle obtaining required data via signal via the light beam that optical module 8 is reflected.Wherein, measurement mechanism 6 is fixed on the pedestal 65 by four reflection subassemblies 61,62,63 and 64 to be formed, relative position between these reflection subassemblies 61,62,63 and 64 all needs accurate contraposition, the degree of accuracy of the reflection angle that is measured to guarantee and repeatability.
In above-mentioned measurement mechanism, a kind of measurement mechanism can only be measured the reflectivity of a fixed angle, and can't adjust with the need and arbitrarily.That is, when measuring different reflection angles, promptly need change another measurement mechanism, cause the inconvenience in the use, increase manufacturing cost simultaneously.And the relative position on the measurement mechanism between the reflection subassembly must be very accurate, if one of them is subjected to displacement, promptly can't accurately measure the reflectivity of optical module, causes the repeatability that is measured poor.Simultaneously, light source, measurement mechanism and integrating sphere must be located along the same line, and make that the volume of whole instrument is excessive, cause the restriction of dwindling on the instrument area, and then reduce the production capacity of per unit area.
Summary of the invention
In order to overcome the deficiencies in the prior art part, the object of the present invention is to provide a kind ofly can measure multiple reflection angle, breaching device area constraints, and the optical module measurement mechanism that improves degree of accuracy.
Yet the present invention utilizes concentric shafts rotation principle that a kind of optical module measurement mechanism is provided, and can measure the reflectivity of the various reflection angle angles of optical module.
For reaching above-mentioned purpose, the invention provides a kind of optical module measurement mechanism, comprise a pedestal, a rotating disk, an integrating sphere unit group and a support.Wherein, the periphery of pedestal is provided with a reference point; Turntable shaft is located on the pedestal, and the periphery of rotating disk is provided with a location scale; The integrating sphere unit is in the radial direction autorotation disk of rotating disk and extend laterally; Support shaft is located on the rotating disk, and in order to seize an optical module on both sides by the arms, pedestal, rotating disk and support are positioned on the concentric shafts, and support is provided with the reference component of a usefulness for the support location.In addition, the present invention also provides a kind of optical module measurement mechanism, and it comprises a pedestal, an integrating sphere unit and a support.Wherein, the periphery of pedestal is provided with a location scale; The integrating sphere unit is articulated on the pedestal, and the integrating sphere unit is provided with one first reference component; Support shaft is located on the integrating sphere unit, and in order to seize an optical module on both sides by the arms, pedestal, integrating sphere unit and support are positioned on the concentric shafts, and support is provided with second reference component of a usefulness for the support location.
A kind of optical module measurement mechanism provided by the present invention is to utilize concentric shafts rotation principle to measure the reflectivity of the various reflection angles of optical module.Compare with known technology, the present invention is arranged at pedestal, integrating sphere unit and support on the concentric shafts, be used as reference coordinate with pedestal, can be fast and accurately adjust the angle of integrating sphere unit and support, and then can measure the reflectivity of the various reflection angles of optical module, shortened the time that measures.Simultaneously, owing to need not change another measurement mechanism when measuring different reflection angle, further provide cost savings.Moreover, because light source and integrating sphere unit must not be located along the same line, reduce the shared area of whole instrument, and then increase the production capacity of per unit area.In addition, the assembly of measurement mechanism is to be fixed on the concentric shafts among the present invention, is difficult for displacement and reduces the error measure, so it is all high to measure result's accuracy and repeatability.
Description of drawings
Fig. 1 is the synoptic diagram of known optical module measurement mechanism.
Fig. 2 A and Fig. 2 B are the stereographic map of the optical module measurement mechanism of the embodiment of the invention one.
Fig. 3 A, Fig. 3 B and Fig. 3 C are the embodiment of the invention one concrete a series of schematic perspective views of implementing.
Fig. 4 is the stereographic map of the optical module measurement mechanism of the embodiment of the invention two.
Fig. 5 A, Fig. 5 B and Fig. 5 C are the embodiment of the invention two concrete a series of schematic perspective views of implementing.
The element numbers explanation:
1 optical module measurement mechanism, 11 pedestals, 111 peripheries, 12 rotating disks, 121 peripheries, 13 integrating sphere unit, 131 integrating spheres, 132 shell bodies, 133 arms, 14 supports, 141 reference components, 15 fine-adjusting units, 2 optical modules, 3 optical module measurement mechanisms, 31 pedestals, 311 peripheries, 32 integrating sphere unit, 321 integrating spheres, 322 shell bodies, 323 arms, 324 first reference components, 33 supports, 331 second reference components, 4 optical modules, 5 light source region, 6 measurement mechanisms, 61,62,63,64 reflection subassemblies, 65 pedestals, 7 integrating spheres, 8 optical modules.
Embodiment
Hereinafter with reference to relevant drawings, a kind of optical module measurement mechanism according to the embodiment of the invention is described.
Shown in Fig. 2 A and Fig. 2 B, embodiments of the invention one provide a kind of optical module measurement mechanism 1, and it comprises a pedestal 11, a rotating disk 12, an integrating sphere unit 13 and a support 14.Wherein, the periphery 111 of pedestal 11 is provided with a reference point; Rotating disk 12 is located on the pedestal 11, and the periphery 121 of rotating disk 12 is provided with a location scale; Integrating sphere unit 13 is in the radial direction autorotation disk 12 of rotating disk 12 and extend laterally; Support 14 is located on the rotating disk 12, and in order to seize an optical module 2 (being shown in Fig. 3 A) on both sides by the arms, pedestal 11, rotating disk 12 are positioned on the concentric shafts with support 14, and support 14 is provided with the reference component 141 of a usefulness for support 14 location.
Shown in Fig. 2 A and Fig. 2 B, the pedestal 11 of present embodiment is fixed in optical module measurement mechanism 1 in the measuring flume (not shown) of optical instrument, causes displacement to prevent optical module measurement mechanism 1 when survey crew is replaced optical module 2.At this, the characteristics of pedestal 11 comprise that center of gravity is low, steadily are difficult for producing and rock.In addition, the periphery 111 of pedestal 11 is provided with a reference point, for the usefulness of rotating disk 12 and support 14 location.
Please refer to Fig. 2 A and Fig. 2 B, rotating disk 12 is located on the pedestal 11, and the periphery 121 of rotating disk 12 is provided with a location scale.
Please refer to Fig. 2 A and Fig. 2 B again, integrating sphere unit 13 is in the radial direction autorotation disk 12 of rotating disk 12 and extend laterally.At this, integrating sphere unit 13 comprises an integrating sphere 131, a shell body 132 and an arm 133, and integrating sphere 131 is arranged in the shell body 132, and shell body 132 is fixed on the rotating disk 12 by arm 133.Wherein, integrating sphere 131 is in order to collecting beam reflected, and detects its luminous flux, handle via signal again and can be for data relatively.
In present embodiment, the function of rotating disk 12 is in the anglec of rotation of adjusting integrating sphere unit 13, and when rotating disk 12 rotated, integrating sphere unit 13 rotated thereupon, and adjusts the anglec of rotation of integrating sphere unit 13 according to the position of the reference point of pedestal 11.
In addition, shown in Fig. 2 A and Fig. 2 B, present embodiment medium-height trestle 14 is located on the rotating disk 12, in order to seize an optical module 2 (being shown in Fig. 3 A) on both sides by the arms, pedestal 11, rotating disk 12 are positioned on the concentric shafts with support 14, and support 14 is provided with the reference component 141 of a usefulness for support 14 location.At this, support 14 is adjusted the anglec of rotation of support 14 according to the reference component 141 and the relative position of the location scale of rotating disk 12.That is support 14 is adjusted the incident angle that incident ray is injected optical module 2 according to required, and so as to changing the direction that light penetrates from optical module 2, the feasible light that penetrates from optical module 2 can be injected integrating sphere unit 13.
In addition, optical module measurement mechanism 1 of the present invention can also comprise a fine-adjusting unit 15, and this fine-adjusting unit 15 is arranged in the pedestal 11, in order to the anglec of rotation of precision adjustment rotating disk 12, shown in Fig. 2 A and Fig. 2 B.
In the present invention, be to utilize pedestal 11, rotating disk 12 to carry out start with the principle that support 14 is positioned on the concentric shafts.The incident angle of injecting optical module 2 when light source increases θ when spending, and its reflection angle can increase the θ degree relatively, so the angle in the path of light process optical module 2 can increase by 2 θ degree; In like manner, the incident angle of injecting optical module 2 when light source reduces θ when spending, and its reflection angle can reduce the θ degree relatively, so the angle in the path of light process optical module 2 also reduces by 2 θ degree.
Fig. 3 A, Fig. 3 B and Fig. 3 C are one of the concrete enforcement of present embodiment diagrammatic series of views.When utilizing the optical instrument (not shown) to carry out the albedo measurement of optical module 2, pedestal 11 must be locked in the measuring flume (not shown) of optical instrument at the beginning, and optical module 2 is positioned on the support 14, as shown in Figure 3A.The reflection angle that measures when desire is 70 when spending, and earlier scale 140 degree in location on the rotating disk 12 (promptly 2 times of the reflection angle that measures of desire) is aimed at the position of the reference point (0 degree) of pedestal 11, so as to adjusting the anglec of rotation of integrating sphere unit 13, shown in Fig. 3 B.Then, again the reference component 141 of support 14 is aimed at location scale 70 degree (i.e. the reflection angle of desire measurement) on the rotating disk 12, so as to adjusting the anglec of rotation of support 14, shown in Fig. 3 C.At last, light emitted one light beam is in optical module 2, and then folded light beam enters in the integrating sphere 131, and via the signal processing catoptrical luminous flux being converted to can be for the data of comparison.
The person of noting, in optical module measurement mechanism of the present invention, rotating disk 12 is that the reference point with pedestal 11 is that benchmark rotates, and 14 on support is that benchmark rotates with rotating disk 12, and therefore, rotating disk 12 all can be that benchmark is located with the reference point of pedestal 11 with support 14.Those skilled in the art should understand, the integrating sphere 131 of the optical module measurement mechanism 1 shown in Fig. 3 A, Fig. 3 B and Fig. 3 C is to be fixed on the rotating disk 12, and support 14 is located on the rotating disk 12, so that make that integrating sphere 131 and support 14 can be that benchmark is located with the reference point of pedestal 11; Otherwise, support can also be fixed on the rotating disk, and integrating sphere is located on the rotating disk, can make that equally integrating sphere and support are that benchmark is located with the reference point of pedestal.
Then, as shown in Figure 4, embodiments of the invention two also provide a kind of optical module measurement mechanism 3, and it comprises a pedestal 31, an integrating sphere unit 32 and a support 33.
Wherein, the periphery 311 of pedestal 31 is provided with a location scale; Integrating sphere unit 32 is articulated on the pedestal 31, and integrating sphere unit 32 is provided with first reference component 324; Support 33 is located on the pedestal 31, in order to seize an optical module 4 (being shown in Fig. 5 A) on both sides by the arms.At this, pedestal 31, integrating sphere unit 32 are positioned on the concentric shafts with support 33, and support 33 is provided with second reference component 331 of a usefulness for support 33 location.
Please refer to Fig. 4, integrating sphere unit 32 is to comprise an integrating sphere 321, a shell body 322, an arm 323 and first reference component 324.Wherein, integrating sphere 321 is arranged in the shell body 322, and shell body 322 is articulated on the pedestal 31 by arm 323, and arm 323 is to be provided with first reference component 324, and it serves as at interval and integrating sphere 321 relative establishing with pedestal 31.At this, the anglec of rotation of integrating sphere unit 32 is adjusted in integrating sphere unit 32 with first reference component 324 according to the location scale of pedestal 31.
Please refer to Fig. 4 again, support 33 is located on the pedestal 31, in order to seize an optical module 4 (being shown in Fig. 5 A) on both sides by the arms.Wherein, support 33 is provided with second reference component 331 of a usefulness for support 33 location, and support 33 is adjusted the anglec of rotation of support 33 with second reference component 331 according to the location scale of pedestal 31.
In the same manner, in present embodiment, pedestal 31, integrating sphere unit 32 also are positioned on the concentric shafts with support 33.The person of noting, in the present invention, the pivot of the bearing of support 33 and arm 323 is a mandrel structure together, and the bearing of support 33 is interior axle, the pivot of arm 323 is outer shaft (as shown in Figure 4); In addition, those skilled in the art can also to adopt the bearing of support 33 be that the pivot of outer shaft, arm 323 is the design of interior axle.
The principle of present embodiment institute foundation is identical with embodiment one, but the adjustment that operation is gone up because of assembly has a little difference.
Then, Fig. 5 A, Fig. 5 B and Fig. 5 C are that one of concrete enforcement of present embodiment lists intention.When desire measures the reflectivity of 70 degree reflection angle, second reference component 331 of support 33 is threaded to the position of location scale 20 degree of pedestal 31, i.e. the complementary angle of reflection angle 70 degree is shown in Fig. 5 B.Then, again first reference component 324 of integrating sphere unit 32 is threaded to the position of scale 40 degree in location on the pedestal 31, promptly 2 times of the complementary angle of reflection angle 70 degree, shown in Fig. 5 C.At last, light source is launched a light beam in optical module 4 from scale 0 degree place, and then folded light beam enters in the integrating sphere 321, and via the signal processing catoptrical luminous flux being converted to can be for the data of comparison.
Above-mentioned only is illustrative, but not is restricted person.Anyly do not break away from spirit of the present invention and category, and, all should wrap expansion in the application's scope of patent protection its equivalent modifications of carrying out or change.
Claims (11)
1. optical module measurement mechanism is characterized in that comprising:
One pedestal, the periphery of this pedestal is provided with a reference point;
One rotating disk is located on this pedestal, and the periphery of this rotating disk is provided with a location scale;
One integrating sphere unit is in the radial direction autorotation disk of this rotating disk and extend laterally; And
One support is located on this rotating disk, and in order to seize an optical module on both sides by the arms, this pedestal, this rotating disk and this support are positioned on the concentric shafts, and this support is provided with the reference component of a usefulness for this support location.
2. optical module measurement mechanism as claimed in claim 1 is characterized in that, also comprises: a fine-adjusting unit is arranged on this pedestal, and adjusts the anglec of rotation of this rotating disk in order to precision.
3. optical module measurement mechanism as claimed in claim 1 is characterized in that, this integrating sphere unit comprises an integrating sphere, a shell body and an arm, and this integrating sphere is arranged in this shell body, and this shell body is fixed on this rotating disk by this arm.
4. optical module measurement mechanism as claimed in claim 1 is characterized in that, this integrating sphere unit rotates thereupon during this dial rotation, and adjusts the anglec of rotation of this integrating sphere unit according to the position of the reference point of this pedestal.
5. optical module measurement mechanism as claimed in claim 1 is characterized in that, this support is adjusted the anglec of rotation of this support according to the relative position of the location scale of this reference component and this rotating disk.
6. optical module measurement mechanism as claimed in claim 1, it is characterized in that, earlier adjust the anglec of rotation of this integrating sphere unit with this rotating disk during measurement, then adjust the anglec of rotation of this support with the reference component of this support according to the location scale of this rotating disk according to the reference point of this pedestal.
7. optical module measurement mechanism is characterized in that comprising:
One pedestal, the periphery of this pedestal are provided with a location scale;
One integrating sphere unit is articulated on this pedestal, and this integrating sphere unit is provided with one first reference component; And
One support is located on this pedestal, and in order to seize an optical module on both sides by the arms, this pedestal, this integrating sphere unit and this support are positioned on the concentric shafts, and this support is provided with second reference component of a usefulness for this support location.
8. optical module measurement mechanism as claimed in claim 7, it is characterized in that, this integrating sphere unit comprises an integrating sphere, a shell body and an arm, this integrating sphere is arranged in this shell body, this shell body is articulated on this pedestal by this arm, and this first reference component system is arranged on this arm.
9. optical module measurement mechanism as claimed in claim 8 is characterized in that, this first reference component and this integrating sphere system lay respectively at the relative both sides of this pedestal.
10. optical module measurement mechanism as claimed in claim 7 is characterized in that, the anglec of rotation of this integrating sphere unit is adjusted in this integrating sphere unit with this first reference component according to the location scale of this pedestal.
11. optical module measurement mechanism as claimed in claim 7 is characterized in that, this support is adjusted the anglec of rotation of this support with this second reference component according to the location scale of this pedestal.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 02159312 CN1254675C (en) | 2002-12-26 | 2002-12-26 | Optical assembly measuring apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 02159312 CN1254675C (en) | 2002-12-26 | 2002-12-26 | Optical assembly measuring apparatus |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1510414A CN1510414A (en) | 2004-07-07 |
| CN1254675C true CN1254675C (en) | 2006-05-03 |
Family
ID=34237428
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 02159312 Expired - Fee Related CN1254675C (en) | 2002-12-26 | 2002-12-26 | Optical assembly measuring apparatus |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN1254675C (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100381806C (en) * | 2007-01-30 | 2008-04-16 | 北京理工大学 | Transmittance ratio test system for folding-shaft periscopic telescope optical system |
| CN107340463B (en) * | 2017-06-12 | 2019-09-10 | 中国科学院长春光学精密机械与物理研究所 | A kind of tested lamp pick device of LED lamp life tests equipment |
-
2002
- 2002-12-26 CN CN 02159312 patent/CN1254675C/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| CN1510414A (en) | 2004-07-07 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN109000571B (en) | Thickness consistency detection device | |
| CN100342210C (en) | Laser self-collimation zero reference error angle measuring method | |
| US3762821A (en) | Lens assembly | |
| CN1644296A (en) | Laser machining apparatus | |
| CN109974586B (en) | Geometric error compensation device for laser tracker | |
| US6480286B1 (en) | Method and apparatus for measuring thickness variation of a thin sheet material, and probe reflector used in the apparatus | |
| CN114719752B (en) | Method for measuring geometric parameters of precise parts based on universal tool microscope and measuring head | |
| CN206648613U (en) | A kind of big lens eccentricity measurement apparatus | |
| CN114415389A (en) | Optical-mechanical system adjustment method with multiple reflectors | |
| CN113203553B (en) | Lens center error measuring system and measuring method | |
| JP2003535321A (en) | Measurement method for facilitating manufacture of self-restoring laser gyroscope block | |
| WO2023029159A1 (en) | Double-sensor measuring system and method for annular thin-walled workpiece | |
| CN1254675C (en) | Optical assembly measuring apparatus | |
| CN1635354A (en) | Laser divergence angle measuring instrument and measuring method | |
| CN202361957U (en) | Angular position precision detection apparatus of precision positioning disk | |
| CN207365922U (en) | A kind of fine tuning fixture for sphere laser interferometer measurement sphere deviation from spherical form | |
| CN113290330A (en) | Laser processing head space position calibration method of six-axis five-linkage machine tool | |
| CN109959350A (en) | The detection method and device of prism right angle working face verticality | |
| CN109813296B (en) | Angle measuring device and method for eliminating scale factor error of fiber-optic gyroscope | |
| CN116086356A (en) | Device and method for measuring chip patch parallelism of quartz resonance beam | |
| CN114858096B (en) | Horizontal light path transfer goniometer and measuring method | |
| CN107869963B (en) | Measuring device | |
| CN105841926A (en) | Rapid positioning device and positioning method for optical system test | |
| CN113137978A (en) | Two-dimensional pointing mechanism precision measurement device | |
| CN111272095B (en) | High-precision two-dimensional position sensor centering detection device and method |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20060503 Termination date: 20100126 |