CN1253731C - Heavy-cabiber light composite material mirror and its preparing method - Google Patents
Heavy-cabiber light composite material mirror and its preparing method Download PDFInfo
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- CN1253731C CN1253731C CN 200410018488 CN200410018488A CN1253731C CN 1253731 C CN1253731 C CN 1253731C CN 200410018488 CN200410018488 CN 200410018488 CN 200410018488 A CN200410018488 A CN 200410018488A CN 1253731 C CN1253731 C CN 1253731C
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- catoptron
- reflector
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- flatness
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Abstract
The present invention discloses a large-caliber light composite material reflector and a preparing method thereof for a space optical system. A basal body of the reflector is made of light silicon carbide aluminum (SiCp-Al) composite materials, and a reflecting layer is manufactured by the technology of optical copying or metal nickel chemical plating added with optical polishing according to the level of the requirements for processing accuracy of the reflector. The SiCp-Al light material reflector has the characteristic which is similar to that of a metal beryllium reflector, and has the advantages of simple mechanical processing, no toxin, low requirement for processing devices and environments, and simple manufacture technology.
Description
Technical field
The present invention relates to optical element, specifically be meant a kind of aperture lightweight compound substance catoptron and preparation method who is mainly used in the Space Optical System.
Background technology
In order to solve the surface deformation that the large caliber reflecting mirror deadweight causes, generally adopt light structures to alleviate the weight of catoptron itself.As U.S. Pat 5,076,700 at first disclose a kind of technical scheme that adopts honeycomb sandwich construction in the fused quartz matrix; U.S. Pat 4,035,065 discloses a kind of foamglass sandwich construction that adopts in basal body of reflector; U.S. Pat 176,588 discloses a kind of ceramic honeycomb sandwich construction that adopts in basal body of reflector; Chinese Shanghai Institute of Technical Physics patent " very light large aperture composite reflector ", application number: 01126514.0 and " a kind of low very light large aperture composite reflector that expands that is used for space camera ", application number: 01254216.4 discloses the low alloy that expands of a kind of employing as reflecting surface basic unit, and the centre is the ultra lightweighting catoptron of graphite fiber/epoxy resin panel folder honeycomb sandwich construction.The common ground of above-mentioned these light reflection mirrors is that structure and manufacturing process are generally comparatively complicated, requires very high to process equipment.
Summary of the invention
Based on the problem that above-mentioned prior art exists, it is simple to the objective of the invention is to propose a kind of structure and manufacturing process, and process equipment is required lower aperture lightweight compound substance catoptron and prepares the method for this catoptron.
Light reflection mirror of the present invention comprises: matrix, and with the metallic reflector of matrix strong bonded.Said matrix is to be made by lightweight carbonization sial system (SiCp-Al) material.
The preparation method of light reflection mirror of the present invention can select different manufacture crafts to finish according to the size of catoptron accuracy class and catoptron bore.At 1 more than the wavelength, the catoptron of bore below 300mm can adopt the method for optical reproduction for the surface figure accuracy grade.At 1 below the wavelength, the catoptron of bore more than 100mm can adopt the method for plated film for the surface figure accuracy grade.
Great advantage of the present invention is to adopt the SiCp-Al light material to have the characteristic similar with metallic beryllium as basal body of reflector, and it is simple to have machining, and is low to process equipment and environmental requirement, the manufacture craft characteristic of simple.
Description of drawings
Fig. 1 is the structural representation of aperture lightweight catoptron;
Fig. 2 is the structural representation of optics template.
Fig. 3 is the optical reproducing method process chart.
Embodiment
The present invention is described in further detail below in conjunction with accompanying drawing:
As shown in Figure 1, light reflection mirror of the present invention comprises: matrix 1, and with the metallic reflector 2 of matrix strong bonded.Said matrix is to be made by the SiCp-Al material.
The light reflection mirror preparation method comprises two kinds of optical reproducing method and film plating process.
The optical reproducing method concrete steps are as follows:
A. matrix is handled: at first adopt Ginding process that flatness processing is carried out on the surface of SiCp-Al matrix material, flatness is 0.002mm-0.005mm.Then matrix surface is carried out degrease and handle, prescription for the treatment of liquid is as follows:
30 parts of demineralized waters
The concentrated sulphuric acid 10 parts+10%
Potassium dichromate 1 part ± 10%.
After matrix immersed treating fluid 30-60 minute, use pure water rinsing, put it in 60 ℃ the baking oven standby subsequently.
B. the preparation of optics template: at first adopt optical grinding/glossing that the substrate K9 glass of optics template is carried out flatness processing; flatness is N=1; Δ N=0.1; then on vacuum coating equipment, plating silicone oil diffusion barrier 201 behind its cleaning surfaces successively; SiO protection mould 203 and metallic aluminium reflective coating 202, the baking oven of putting into 600 ℃ after plated film is finished is standby.
C. above-mentioned SiCp-Al matrix 1 surface of handling well is coated with epoxide-resin glue, then that the one side that is coated with the aluminium mirror coating layer on the optics template is glued together with it, be placed in 600 ℃ the baking oven and solidified 24 hours.After the curing, since the existence of diffusion barrier, the SiO diaphragm
Separate with substrate K9 glass at an easy rate, SiO diaphragm and metallic aluminium reflectance coating are bonded on the basal body of reflector securely like this, make thereby finish catoptron.Said Formulaion of epoxy resin is: bisphenol-A type epoxy resin (100 gram)+imidazole curing agent (8 gram).
Optical reproduction quality for the detection optical replica mirror, as reflectivity detection, the detection of rete firmness etc., in reproduction process to adopting same material, the test sample of same processing, processing technology also duplicates, by the measurement of test sample being monitored the optical reproduction quality of catoptron.
The concrete steps of film plating process are as follows:
Matrix is handled identical with above-mentioned A step, adopt conventional chemical nickel plating technology plating nickel dam on matrix then, again the metal nickel dam is ground, polishes, at last in vacuum coating equipment on the metal nickel dam plating reflectance coating, thereby finish the making of the catoptron of high plane precision.
Claims (3)
1. aperture lightweight compound substance catoptron, comprising: matrix (1), the metallic reflector (2) with the matrix strong bonded is characterized in that: said matrix (1) is to be made by lightweight carbonization sial based material.
2. according to the preparation method of a kind of aperture lightweight compound substance catoptron of claim 1, this method comprises two kinds of optical reproducing method and film plating process, and it is characterized in that: the concrete steps of said optical reproducing method are as follows:
A. matrix is handled: at first adopting Ginding process is that flatness processing is carried out on the surface of matrix material to lightweight carbonization sial, and flatness is 0.002mm-0.005mm; Then matrix surface is carried out degrease and handle, prescription for the treatment of liquid is as follows:
30 parts of demineralized waters
The concentrated sulphuric acid 10 parts ± 10%
Potassium dichromate 1 part ± 10%;
After matrix immersed above-mentioned treating fluid 30-60 minute, use pure water rinsing, put it in 60 ℃ the baking oven standby subsequently;
B. the preparation of optics template: at first adopt optical grinding/glossing that the substrate K9 glass of optics template is carried out flatness processing, flatness is N=1, AN=0.1, then conventional cleaning is carried out on its surface, the back is plated silicone oil diffusion barrier (201) successively on vacuum coating equipment, SiO diaphragm (202) and metallic aluminium reflectance coating (203), the baking oven of putting into 60 ℃ after plated film is finished is standby;
C. be that matrix (1) surface is coated with epoxide-resin glue to the above-mentioned lightweight carbonization sial of handling well, then that the one side that is coated with aluminium mirror coating layer (203) on the optics template is glued together with it, be placed in 60 ℃ the baking oven and solidified 24 hours, after the curing, because the existence of diffusion barrier, SiO diaphragm (202) is separated with substrate K9 glass at an easy rate, and SiO diaphragm and metallic aluminium reflectance coating are bonded on the basal body of reflector securely like this, makes thereby finish catoptron;
The concrete steps of said film plating process are as follows:
Matrix is handled identical with above-mentioned A step, adopt the conventional chemical nickel plating technology to go up the plating nickel dam then at matrix (1), again the metal nickel dam is ground, polishes, at last in vacuum coating equipment on the metal nickel dam plating reflectance coating, thereby finish the making of catoptron.
3. according to the preparation method of a kind of aperture lightweight compound substance catoptron of claim 2, it is characterized in that: said Formulaion of epoxy resin is: bisphenol-A type epoxy resin 100 gram+imidazole curing agents 8 grams.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200410018488 CN1253731C (en) | 2004-05-20 | 2004-05-20 | Heavy-cabiber light composite material mirror and its preparing method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200410018488 CN1253731C (en) | 2004-05-20 | 2004-05-20 | Heavy-cabiber light composite material mirror and its preparing method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1580832A CN1580832A (en) | 2005-02-16 |
| CN1253731C true CN1253731C (en) | 2006-04-26 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN 200410018488 Expired - Fee Related CN1253731C (en) | 2004-05-20 | 2004-05-20 | Heavy-cabiber light composite material mirror and its preparing method |
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Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102478677A (en) * | 2010-11-24 | 2012-05-30 | 上海新产业光电技术有限公司 | Manufacture method for reflector of ultra-light-weight carbon fiber composite material |
| DE102011002953A1 (en) | 2011-01-21 | 2012-07-26 | Carl Zeiss Smt Gmbh | Substrate for mirror for extreme ultraviolet lithography, comprises base body which is alloy system that is made of intermetallic phase having crystalline component, where intermetallic phase has bravais lattice |
| CN102360089B (en) * | 2011-10-14 | 2012-12-26 | 中国科学院国家天文台南京天文光学技术研究所 | Large caliber granite glass compound spherical and aspheric reflectors and manufacture methods thereof |
| CN102508327B (en) * | 2011-11-03 | 2014-03-19 | 湖南航天诚远精密机械有限公司 | Method for preparing aluminum and silicon carbide composite material reflector with high volume fraction |
| CN103123401A (en) * | 2013-03-20 | 2013-05-29 | 台玻悦达太阳能镜板有限公司 | Novel solar reflecting mirror and manufacturing process thereof |
| CN105137512A (en) * | 2015-09-11 | 2015-12-09 | 兰州空间技术物理研究所 | Manufacturing method of ultra-light reflector |
| WO2018188072A1 (en) * | 2017-04-14 | 2018-10-18 | South China University Of Technology | OPTICS AL-MIRROR WITH HIGH VOLUME FRACTION SiCp/Al COMPOSITE-TITANIUM ALLOY-BISMUTHATE GLASS METAL PLUS DIELECTRIC MULTIPLE FILMS AND METHOD FOR MANUFACTURING THE SAME |
| WO2019019138A1 (en) * | 2017-07-28 | 2019-01-31 | South China University Of Technology | OPTICAL Ag MIRROR WITH HIGH VOLVUME FRACTION SiCp/Al COMPOSITE-TITANIUM ALLOY-PbO GLASS METAL PLUS DIELECTRIC FILMS, PREPARATION METHOD THEREFOR AND APPLICATION THEREOF |
| CN107500774A (en) * | 2017-09-05 | 2017-12-22 | 西安明科微电子材料有限公司 | A kind of aluminium silicon carbide material speculum preparation method |
| CN110488395B (en) * | 2019-07-26 | 2021-03-19 | 中国科学院长春光学精密机械与物理研究所 | Diffraction grating protection structure and preparation method thereof |
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Granted publication date: 20060426 |