CN207924178U - A kind of composite construction spacing reflection mirror - Google Patents

A kind of composite construction spacing reflection mirror Download PDF

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Publication number
CN207924178U
CN207924178U CN201820245689.8U CN201820245689U CN207924178U CN 207924178 U CN207924178 U CN 207924178U CN 201820245689 U CN201820245689 U CN 201820245689U CN 207924178 U CN207924178 U CN 207924178U
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layer
aluminium oxide
reflection mirror
composite construction
index layer
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CN201820245689.8U
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赵会峰
王�琦
张振华
田瑞平
黄小叶
潘国治
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Te Bo Science And Technology Ltd Of Hainan Air China
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Te Bo Science And Technology Ltd Of Hainan Air China
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Abstract

The utility model belongs to optical technical field, proposes a kind of composite construction spacing reflection mirror.A kind of composite construction spacing reflection mirror proposed is using aluminium oxide ceramics as matrix;The upper surface sealing of the aluminium oxide ceramics has polished glass glaze;The upper surface plating of the polished glass glaze is formed with highly reflecting films layer;The high reflection film layer is made of successively transition zone, buffer layer, functional layer, low-index layer, high refractive index layer.The utility model manufacture craft is simple, ungauged regions, can large scale produce in enormous quantities, and saved great amount of cost.

Description

A kind of composite construction spacing reflection mirror
Technical field
The utility model belongs to optical technical field, relates generally to a kind of composite construction spacing reflection mirror.
Background technology
With the aggravation that space field competes, various countries pay much attention to the development of the relevant technologies, the master of spacecraft It is to collect information one of to act on, and speculum is the core component in space astronomy optical instrument, and the quality of comprehensive performance is straight Connecing influences image quality, service life, the instrument quality etc. of instrument, therefore has important meaning to the expansion of the performance of Space Optical System Justice.The trend of space telescope principal reflection mirror design is large area, low-gravity, while speculum being required to have excellent mechanicalness Energy and thermophysical property.
As reflecting mirror material, it is necessary to have lower density, higher intensity and elasticity modulus, the lower coefficient of expansion And higher thermal coefficient.Research to reflecting mirror material is concentrated mainly on three classes material:(1)Metal material, including beryllium, aluminium, Alloy etc.;These specific material stiffness and thermal coefficient are all very high, but coefficient of thermal expansion is larger, easy tos produce thermal deformation;In addition right For beryllium, there is also be more toxic;(2)Glass material, including devitrified glass, quartz glass, super-low expansion melt stone English etc.;These materials have lower coefficient of thermal expansion and preferable optical surface processing performance, but specific stiffness and heat conduction system Number is relatively low, easy tos produce stress deformation, influences picture quality;(3)Ceramic material, including silicon carbide, silicon nitride and silicon carbide-based Composite material;These materials have high specific stiffness, preferable thermally and chemically stability, lower thermal deformation coefficient, and resistance to space Particle irradiation, but usually there is a problem of that optical surface processing performance is poor.
Carbofrax material is because of advantageous properties such as its low-density, high rigidity, high specific stiffnesses, in all speculum candidate materials Comprehensive performance is superior, therefore as the mainstream of the research of high-performance light speculum in the world.However there is processing difficulties, Complex procedures, high cost disadvantage, it is crucial that encountering bottleneck in reflectance optical aspect of performance.Main cause is carbonization Silicon ceramic surface consistency is not high enough, crystalline structure cause polish difficulty it is big, polishing finish grade it is relatively low, although by into The chemical vapor deposition of one step(CVD)Plating membrane means densified surface can get sufficiently small surface roughness after handling and polishing (RMS), but it is then unable to do what one wishes for the smaller roughness surface of higher reflectivity requirements, and plated film needs to use vacuum equipment, Manufacturing cost is high.
Glass material is also a kind of common spacing reflection mirror optical system application material, manufacture it is relatively simple, easily Processing, and there is high consistency, the roughness obtained less than 0.1nm can be finely polished, more high reflectance is fully achieved Roughness requirements.But the shortcomings of that there is brittleness is larger for glass material, rigidity is poor limits its application and development.
Aluminium oxide ceramics is not chosen for mirror blank material material usually, is the surface after polishing since ceramic defect itself is more A large amount of micropores are still remained, excessive roughness is caused, lead to not obtain the reflectivity met the requirements.But it is with cost The advantages that low, high temperature resistant, corrosion resistance are good, chemical stability is excellent, and hardness is big, has a good application prospect.
Therefore, the utility model is base material using aluminium oxide ceramics, and a kind of satisfaction more high reflectance of design realizes more high score Resolution demand is provided simultaneously with the composite construction spacing reflection mirror of excellent mechanical properties.
Utility model content
To obtain the spacing reflection mirror for meeting more high reflectance demand, the utility model proposes a kind of composite construction space is anti- Penetrate mirror.
The utility model is to complete above-mentioned purpose to adopt the following technical scheme that:
A kind of composite construction spacing reflection mirror, the composite construction spacing reflection mirror is using aluminium oxide ceramics as base Body;The upper surface sealing of the aluminium oxide ceramics has polished glass glaze;The upper surface plating of the polished glass glaze is formed with height Reflective coating;The high reflection film layer is by transition zone, buffer layer, functional layer, low-index layer, high refractive index layer successively group At the transition zone is alumina layer, and the buffer layer is silicon dioxide layer, and the functional layer is silver layer or aluminium layer or silver-colored aluminium Alloy-layer, the low-index layer are magnesium fluoride or aluminium oxide or silicon dioxide layer, and the high refractive index layer is titanium dioxide Titanium or zinc sulfide layer, the low-index layer can repeat to be superimposed upon on high refractive index layer in pairs with high refractive index layer.
The aluminium oxide ceramics is Al2O3>=99.0% corundum ceramic.
The polished glass glaze is Pyrex;The coefficient of expansion of the Pyrex is less than aluminium oxide ceramics, institute State the difference Δ α≤± 0.5 × 10 of the coefficient of expansion of aluminium oxide ceramics and the Pyrex within the scope of 20 ~ 400 DEG C-6/K。
The utility model proposes a kind of composite construction spacing reflection mirror, the easy polishability and compact structure of glass material Disadvantage of the ceramic material on plating conditions can be overcome, the glass surface finishes after polishing can meet more high reflectance plated film Condition;The mechanical property of ceramics can provide enough intensity to obtain higher specific stiffness for glass;Raw material obtain extensively, Manufacture craft is simple, ungauged regions, can large scale mass production;Surface is completely fine and close, and surface densification, nothing are carried out without additional Complex process;Cleavable, grinding, polishing can be used for making plane, spherical surface or non-spherical reflector;Polishing difficulty is low, and precision can Up to 0.1 nm or lower, and polishing requires and polishing time is short, has saved great amount of cost.
Description of the drawings
Fig. 1 is the structural schematic diagram of composite construction spacing reflection mirror.
Fig. 2 is the structural schematic diagram of high reflection film layer.
In figure:1, aluminium oxide ceramics;2, polished glass glaze;3, high reflection film layer;4/ transition zone;5, buffer layer;6, work( Ergosphere;7, low-index layer;8, high refractive index layer.
Specific implementation mode
The utility model is illustrated in conjunction with attached drawing:
As shown in Figure 1, a kind of composite construction spacing reflection mirror, the speculum includes aluminium oxide ceramics 1, glass glaze 2 and high reflection membrane system 3;The aluminium oxide ceramics 1 is Al2O3>=99.0% corundum ceramic;The described sealing of glass glaze 2 in The surface of aluminium oxide ceramics 1;The glass glaze 2 is Pyrex;The coefficient of expansion of the Pyrex is less than aluminium oxide Ceramics, the difference Δ α≤± 0.5 of the coefficient of expansion of the aluminium oxide ceramics ceramics and the Pyrex within the scope of 20 ~ 400 DEG C ×10-6/K;The high reflection membrane system 3 is coated on the glass glaze 2 finely polished, and the high reflection membrane system 3 is by transition zone 4, buffer layer 5, functional layer 6, low-index layer 7, high refractive index layer 8 form successively, and the transition zone 4 is alumina layer, described Buffer layer 5 is silicon dioxide layer, and the functional layer 6 is silver layer, aluminium layer or aerdentalloy layer, and the low-index layer 7 is fluorination Magnesium, aluminium oxide or silicon dioxide layer, the high refractive index layer 8 are titanium dioxide or zinc sulfide layer, the low-index layer with it is high Index layer can repeat to be superimposed upon on high refractive index layer in pairs.
The Pyrex raw material, which is melting by common process after glass metal, flows what booth was horizontally arranged under isothermy On the corundum ceramic surface, the corundum ceramic surface can preprocessing and light-weight design;It is ceramic and glass associated through protecting A kind of new ceramics base spacing reflection mirror composite mirrors blank material material is obtained after the processes such as temperature, annealing, cooling;By the mirror blank material material glass High reflection membrane system is coated on polishing by magnetron sputtering method or vapour deposition process after glass glaze finishing polish and obtains a kind of pottery Porcelain matrix composite spacing reflection mirror.
The properties of the composite construction spacing reflection mirror are related with the volume ratio of ceramic/glass, and numerical value is between two Between kind material;The coefficient of expansion of glass glaze is slightly less than aluminium oxide ceramics, and aluminium oxide ceramics can be made to be combined with glass glaze tightly Close zero defect, and since the specific stiffness of itself is big, mirror base raw material can be made to obtain excellent mechanical property, while having good Thermal stability;By charity glass glaze, alumina ceramic face flatness and consistency obtain great improvement, polishing Can be that being coated with for high reflectance membrane system provides excellent substrate afterwards, to realize more high reflectance, realize higher resolution demand.

Claims (3)

1. a kind of composite construction spacing reflection mirror, it is characterised in that:The composite construction spacing reflection mirror is made pottery using aluminium oxide Porcelain is as matrix;The upper surface sealing of the aluminium oxide ceramics has polished glass glaze;The upper surface of the polished glass glaze Plating is formed with highly reflecting films layer;The high reflection film layer is by transition zone, buffer layer, functional layer, low-index layer, high refractive index layer It forms successively;The transition zone is alumina layer, and the buffer layer is silicon dioxide layer, and the functional layer is silver layer or aluminium layer Or aerdentalloy layer, the low-index layer is magnesium fluoride or aluminium oxide or silicon dioxide layer, the high refractive index layer are Titanium dioxide or zinc sulfide layer, the low-index layer can repeat to be superimposed upon on high refractive index layer in pairs with high refractive index layer.
2. a kind of composite construction spacing reflection mirror as described in claim 1, it is characterised in that:The aluminium oxide ceramics is Al2O3>=99.0% corundum ceramic.
3. a kind of composite construction spacing reflection mirror as described in claim 1, it is characterised in that:The polished glass glaze is Pyrex;The coefficient of expansion of the Pyrex is less than aluminium oxide ceramics, and the aluminium oxide ceramics exists with the Pyrex The difference Δ α≤± 0.5 × 10 of the coefficient of expansion within the scope of 20 ~ 400 DEG C-6/K。
CN201820245689.8U 2018-02-11 2018-02-11 A kind of composite construction spacing reflection mirror Active CN207924178U (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115838278A (en) * 2022-11-29 2023-03-24 云南雷迅科技有限公司 Composite material mirror blank for ceramic-based reflector

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115838278A (en) * 2022-11-29 2023-03-24 云南雷迅科技有限公司 Composite material mirror blank for ceramic-based reflector
CN115838278B (en) * 2022-11-29 2023-11-07 云南雷迅科技有限公司 Composite material mirror blank for ceramic-based reflector

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Address after: 570100 2001, floor 1, building A17, Hainan Ecological Software Park, hi tech industry demonstration zone, Chengmai County, Hainan Province

Patentee after: Hainan Haikong special glass technology Co., Ltd

Address before: Room 302, hatching building, Hainan Ecological Software Park, South 1st ring road, Laocheng Economic Development Zone, Chengmai County, Hainan Province

Patentee before: AVIC (HAINAN) SPECIAL GLASS MATERIALS Co.,Ltd.