CN207924178U - A kind of composite construction spacing reflection mirror - Google Patents
A kind of composite construction spacing reflection mirror Download PDFInfo
- Publication number
- CN207924178U CN207924178U CN201820245689.8U CN201820245689U CN207924178U CN 207924178 U CN207924178 U CN 207924178U CN 201820245689 U CN201820245689 U CN 201820245689U CN 207924178 U CN207924178 U CN 207924178U
- Authority
- CN
- China
- Prior art keywords
- layer
- aluminium oxide
- reflection mirror
- composite construction
- index layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Landscapes
- Optical Elements Other Than Lenses (AREA)
Abstract
The utility model belongs to optical technical field, proposes a kind of composite construction spacing reflection mirror.A kind of composite construction spacing reflection mirror proposed is using aluminium oxide ceramics as matrix;The upper surface sealing of the aluminium oxide ceramics has polished glass glaze;The upper surface plating of the polished glass glaze is formed with highly reflecting films layer;The high reflection film layer is made of successively transition zone, buffer layer, functional layer, low-index layer, high refractive index layer.The utility model manufacture craft is simple, ungauged regions, can large scale produce in enormous quantities, and saved great amount of cost.
Description
Technical field
The utility model belongs to optical technical field, relates generally to a kind of composite construction spacing reflection mirror.
Background technology
With the aggravation that space field competes, various countries pay much attention to the development of the relevant technologies, the master of spacecraft
It is to collect information one of to act on, and speculum is the core component in space astronomy optical instrument, and the quality of comprehensive performance is straight
Connecing influences image quality, service life, the instrument quality etc. of instrument, therefore has important meaning to the expansion of the performance of Space Optical System
Justice.The trend of space telescope principal reflection mirror design is large area, low-gravity, while speculum being required to have excellent mechanicalness
Energy and thermophysical property.
As reflecting mirror material, it is necessary to have lower density, higher intensity and elasticity modulus, the lower coefficient of expansion
And higher thermal coefficient.Research to reflecting mirror material is concentrated mainly on three classes material:(1)Metal material, including beryllium, aluminium,
Alloy etc.;These specific material stiffness and thermal coefficient are all very high, but coefficient of thermal expansion is larger, easy tos produce thermal deformation;In addition right
For beryllium, there is also be more toxic;(2)Glass material, including devitrified glass, quartz glass, super-low expansion melt stone
English etc.;These materials have lower coefficient of thermal expansion and preferable optical surface processing performance, but specific stiffness and heat conduction system
Number is relatively low, easy tos produce stress deformation, influences picture quality;(3)Ceramic material, including silicon carbide, silicon nitride and silicon carbide-based
Composite material;These materials have high specific stiffness, preferable thermally and chemically stability, lower thermal deformation coefficient, and resistance to space
Particle irradiation, but usually there is a problem of that optical surface processing performance is poor.
Carbofrax material is because of advantageous properties such as its low-density, high rigidity, high specific stiffnesses, in all speculum candidate materials
Comprehensive performance is superior, therefore as the mainstream of the research of high-performance light speculum in the world.However there is processing difficulties,
Complex procedures, high cost disadvantage, it is crucial that encountering bottleneck in reflectance optical aspect of performance.Main cause is carbonization
Silicon ceramic surface consistency is not high enough, crystalline structure cause polish difficulty it is big, polishing finish grade it is relatively low, although by into
The chemical vapor deposition of one step(CVD)Plating membrane means densified surface can get sufficiently small surface roughness after handling and polishing
(RMS), but it is then unable to do what one wishes for the smaller roughness surface of higher reflectivity requirements, and plated film needs to use vacuum equipment,
Manufacturing cost is high.
Glass material is also a kind of common spacing reflection mirror optical system application material, manufacture it is relatively simple, easily
Processing, and there is high consistency, the roughness obtained less than 0.1nm can be finely polished, more high reflectance is fully achieved
Roughness requirements.But the shortcomings of that there is brittleness is larger for glass material, rigidity is poor limits its application and development.
Aluminium oxide ceramics is not chosen for mirror blank material material usually, is the surface after polishing since ceramic defect itself is more
A large amount of micropores are still remained, excessive roughness is caused, lead to not obtain the reflectivity met the requirements.But it is with cost
The advantages that low, high temperature resistant, corrosion resistance are good, chemical stability is excellent, and hardness is big, has a good application prospect.
Therefore, the utility model is base material using aluminium oxide ceramics, and a kind of satisfaction more high reflectance of design realizes more high score
Resolution demand is provided simultaneously with the composite construction spacing reflection mirror of excellent mechanical properties.
Utility model content
To obtain the spacing reflection mirror for meeting more high reflectance demand, the utility model proposes a kind of composite construction space is anti-
Penetrate mirror.
The utility model is to complete above-mentioned purpose to adopt the following technical scheme that:
A kind of composite construction spacing reflection mirror, the composite construction spacing reflection mirror is using aluminium oxide ceramics as base
Body;The upper surface sealing of the aluminium oxide ceramics has polished glass glaze;The upper surface plating of the polished glass glaze is formed with height
Reflective coating;The high reflection film layer is by transition zone, buffer layer, functional layer, low-index layer, high refractive index layer successively group
At the transition zone is alumina layer, and the buffer layer is silicon dioxide layer, and the functional layer is silver layer or aluminium layer or silver-colored aluminium
Alloy-layer, the low-index layer are magnesium fluoride or aluminium oxide or silicon dioxide layer, and the high refractive index layer is titanium dioxide
Titanium or zinc sulfide layer, the low-index layer can repeat to be superimposed upon on high refractive index layer in pairs with high refractive index layer.
The aluminium oxide ceramics is Al2O3>=99.0% corundum ceramic.
The polished glass glaze is Pyrex;The coefficient of expansion of the Pyrex is less than aluminium oxide ceramics, institute
State the difference Δ α≤± 0.5 × 10 of the coefficient of expansion of aluminium oxide ceramics and the Pyrex within the scope of 20 ~ 400 DEG C-6/K。
The utility model proposes a kind of composite construction spacing reflection mirror, the easy polishability and compact structure of glass material
Disadvantage of the ceramic material on plating conditions can be overcome, the glass surface finishes after polishing can meet more high reflectance plated film
Condition;The mechanical property of ceramics can provide enough intensity to obtain higher specific stiffness for glass;Raw material obtain extensively,
Manufacture craft is simple, ungauged regions, can large scale mass production;Surface is completely fine and close, and surface densification, nothing are carried out without additional
Complex process;Cleavable, grinding, polishing can be used for making plane, spherical surface or non-spherical reflector;Polishing difficulty is low, and precision can
Up to 0.1 nm or lower, and polishing requires and polishing time is short, has saved great amount of cost.
Description of the drawings
Fig. 1 is the structural schematic diagram of composite construction spacing reflection mirror.
Fig. 2 is the structural schematic diagram of high reflection film layer.
In figure:1, aluminium oxide ceramics;2, polished glass glaze;3, high reflection film layer;4/ transition zone;5, buffer layer;6, work(
Ergosphere;7, low-index layer;8, high refractive index layer.
Specific implementation mode
The utility model is illustrated in conjunction with attached drawing:
As shown in Figure 1, a kind of composite construction spacing reflection mirror, the speculum includes aluminium oxide ceramics 1, glass glaze
2 and high reflection membrane system 3;The aluminium oxide ceramics 1 is Al2O3>=99.0% corundum ceramic;The described sealing of glass glaze 2 in
The surface of aluminium oxide ceramics 1;The glass glaze 2 is Pyrex;The coefficient of expansion of the Pyrex is less than aluminium oxide
Ceramics, the difference Δ α≤± 0.5 of the coefficient of expansion of the aluminium oxide ceramics ceramics and the Pyrex within the scope of 20 ~ 400 DEG C
×10-6/K;The high reflection membrane system 3 is coated on the glass glaze 2 finely polished, and the high reflection membrane system 3 is by transition zone
4, buffer layer 5, functional layer 6, low-index layer 7, high refractive index layer 8 form successively, and the transition zone 4 is alumina layer, described
Buffer layer 5 is silicon dioxide layer, and the functional layer 6 is silver layer, aluminium layer or aerdentalloy layer, and the low-index layer 7 is fluorination
Magnesium, aluminium oxide or silicon dioxide layer, the high refractive index layer 8 are titanium dioxide or zinc sulfide layer, the low-index layer with it is high
Index layer can repeat to be superimposed upon on high refractive index layer in pairs.
The Pyrex raw material, which is melting by common process after glass metal, flows what booth was horizontally arranged under isothermy
On the corundum ceramic surface, the corundum ceramic surface can preprocessing and light-weight design;It is ceramic and glass associated through protecting
A kind of new ceramics base spacing reflection mirror composite mirrors blank material material is obtained after the processes such as temperature, annealing, cooling;By the mirror blank material material glass
High reflection membrane system is coated on polishing by magnetron sputtering method or vapour deposition process after glass glaze finishing polish and obtains a kind of pottery
Porcelain matrix composite spacing reflection mirror.
The properties of the composite construction spacing reflection mirror are related with the volume ratio of ceramic/glass, and numerical value is between two
Between kind material;The coefficient of expansion of glass glaze is slightly less than aluminium oxide ceramics, and aluminium oxide ceramics can be made to be combined with glass glaze tightly
Close zero defect, and since the specific stiffness of itself is big, mirror base raw material can be made to obtain excellent mechanical property, while having good
Thermal stability;By charity glass glaze, alumina ceramic face flatness and consistency obtain great improvement, polishing
Can be that being coated with for high reflectance membrane system provides excellent substrate afterwards, to realize more high reflectance, realize higher resolution demand.
Claims (3)
1. a kind of composite construction spacing reflection mirror, it is characterised in that:The composite construction spacing reflection mirror is made pottery using aluminium oxide
Porcelain is as matrix;The upper surface sealing of the aluminium oxide ceramics has polished glass glaze;The upper surface of the polished glass glaze
Plating is formed with highly reflecting films layer;The high reflection film layer is by transition zone, buffer layer, functional layer, low-index layer, high refractive index layer
It forms successively;The transition zone is alumina layer, and the buffer layer is silicon dioxide layer, and the functional layer is silver layer or aluminium layer
Or aerdentalloy layer, the low-index layer is magnesium fluoride or aluminium oxide or silicon dioxide layer, the high refractive index layer are
Titanium dioxide or zinc sulfide layer, the low-index layer can repeat to be superimposed upon on high refractive index layer in pairs with high refractive index layer.
2. a kind of composite construction spacing reflection mirror as described in claim 1, it is characterised in that:The aluminium oxide ceramics is
Al2O3>=99.0% corundum ceramic.
3. a kind of composite construction spacing reflection mirror as described in claim 1, it is characterised in that:The polished glass glaze is
Pyrex;The coefficient of expansion of the Pyrex is less than aluminium oxide ceramics, and the aluminium oxide ceramics exists with the Pyrex
The difference Δ α≤± 0.5 × 10 of the coefficient of expansion within the scope of 20 ~ 400 DEG C-6/K。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201820245689.8U CN207924178U (en) | 2018-02-11 | 2018-02-11 | A kind of composite construction spacing reflection mirror |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201820245689.8U CN207924178U (en) | 2018-02-11 | 2018-02-11 | A kind of composite construction spacing reflection mirror |
Publications (1)
Publication Number | Publication Date |
---|---|
CN207924178U true CN207924178U (en) | 2018-09-28 |
Family
ID=63599997
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201820245689.8U Active CN207924178U (en) | 2018-02-11 | 2018-02-11 | A kind of composite construction spacing reflection mirror |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN207924178U (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN115838278A (en) * | 2022-11-29 | 2023-03-24 | 云南雷迅科技有限公司 | Composite material mirror blank for ceramic-based reflector |
-
2018
- 2018-02-11 CN CN201820245689.8U patent/CN207924178U/en active Active
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN115838278A (en) * | 2022-11-29 | 2023-03-24 | 云南雷迅科技有限公司 | Composite material mirror blank for ceramic-based reflector |
CN115838278B (en) * | 2022-11-29 | 2023-11-07 | 云南雷迅科技有限公司 | Composite material mirror blank for ceramic-based reflector |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN107935567A (en) | A kind of ceramic base spacing reflection mirror composite mirrors blank material material | |
RU2314268C2 (en) | Glass or glass ceramics molding method | |
US20130057952A1 (en) | Substrate made of an aluminum-silicon alloy or crystalline silicon, metal mirror, method for the production thereof, and use thereof | |
US4606750A (en) | Mold for direct press molding of optical glass element | |
CN100549818C (en) | The substrate that is used for special miniature photoetching | |
EP1597614B1 (en) | High precision mirror, and a method of making it | |
US20170050890A1 (en) | Advanced Mirrors Utilizing Polymer-Derived-Ceramic Mirror Substrates | |
JP2002012429A (en) | Glassy mold material for molding precision glass | |
CN207924178U (en) | A kind of composite construction spacing reflection mirror | |
CN1495137A (en) | Optical glass, prefabricated piece and making method optical element and making method thereof | |
US20160024648A1 (en) | Process for making triple graded CVC-CVD-CVC silicon carbide products | |
CN1253731C (en) | Heavy-cabiber light composite material mirror and its preparing method | |
WO2010074109A1 (en) | Material for forming optical element and process for producing same | |
WO2017083707A1 (en) | Advanced mirrors utilizing polymer-derived mirror substrates | |
Goela et al. | Rapid fabrication of lightweight ceramic mirrors via chemical vapor deposition | |
CN101219424B (en) | Process for producing compact silicon/silicon carbide coating of optics reflection mirror | |
Paquin et al. | Large optics from silicon carbide | |
Geyl et al. | Low CTE glass, SiC & Beryllium for lightweight mirror substrates | |
Goela et al. | Thermal stability of CVD-SiC lightweight optics | |
CN109581563A (en) | A kind of infrared fileter and preparation method thereof | |
WO2023234067A1 (en) | Low-reflection member, and coating liquid for low-reflection film | |
JPH06191972A (en) | Complex member | |
US20230161077A1 (en) | Anti-reflective optical coatings and methods of forming the same | |
CN116217270B (en) | Production process of diamond film coated dielectric ball with surface of zirconia ball | |
CN201004527Y (en) | A laser compound layer reflective mirror for CO2 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
GR01 | Patent grant | ||
GR01 | Patent grant | ||
CP03 | "change of name, title or address" | ||
CP03 | "change of name, title or address" |
Address after: 570100 2001, floor 1, building A17, Hainan Ecological Software Park, hi tech industry demonstration zone, Chengmai County, Hainan Province Patentee after: Hainan Haikong special glass technology Co., Ltd Address before: Room 302, hatching building, Hainan Ecological Software Park, South 1st ring road, Laocheng Economic Development Zone, Chengmai County, Hainan Province Patentee before: AVIC (HAINAN) SPECIAL GLASS MATERIALS Co.,Ltd. |