CN1240872C - Vapor deposition apparatus - Google Patents
Vapor deposition apparatus Download PDFInfo
- Publication number
- CN1240872C CN1240872C CNB991215710A CN99121571A CN1240872C CN 1240872 C CN1240872 C CN 1240872C CN B991215710 A CNB991215710 A CN B991215710A CN 99121571 A CN99121571 A CN 99121571A CN 1240872 C CN1240872 C CN 1240872C
- Authority
- CN
- China
- Prior art keywords
- evaporation
- container
- nozzle tube
- coating device
- pipeline
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000007740 vapor deposition Methods 0.000 title 1
- 230000008020 evaporation Effects 0.000 claims abstract description 85
- 238000001704 evaporation Methods 0.000 claims abstract description 85
- 239000003795 chemical substances by application Substances 0.000 claims abstract description 28
- 239000011248 coating agent Substances 0.000 claims description 29
- 238000000576 coating method Methods 0.000 claims description 29
- 239000010408 film Substances 0.000 claims description 23
- 238000003860 storage Methods 0.000 claims description 18
- 239000007788 liquid Substances 0.000 claims description 16
- 230000000903 blocking effect Effects 0.000 claims description 3
- 230000005611 electricity Effects 0.000 claims description 3
- 230000002459 sustained effect Effects 0.000 claims description 3
- 239000010409 thin film Substances 0.000 claims description 3
- 238000009826 distribution Methods 0.000 claims description 2
- 238000000151 deposition Methods 0.000 abstract 1
- 239000007888 film coating Substances 0.000 abstract 1
- 238000009501 film coating Methods 0.000 abstract 1
- 238000007747 plating Methods 0.000 description 15
- 238000009833 condensation Methods 0.000 description 6
- 230000005494 condensation Effects 0.000 description 6
- 238000010438 heat treatment Methods 0.000 description 5
- 238000000034 method Methods 0.000 description 3
- 230000010412 perfusion Effects 0.000 description 2
- 238000003825 pressing Methods 0.000 description 2
- 238000009835 boiling Methods 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 239000011888 foil Substances 0.000 description 1
- 238000001802 infusion Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000001465 metallisation Methods 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 239000000523 sample Substances 0.000 description 1
- 230000003313 weakening effect Effects 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/04—Coating on selected surface areas, e.g. using masks
- C23C14/042—Coating on selected surface areas, e.g. using masks using masks
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
- C08J7/00—Chemical treatment or coating of shaped articles made of macromolecular substances
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/04—Coating on selected surface areas, e.g. using masks
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/243—Crucibles for source material
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Organic Chemistry (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Engineering & Computer Science (AREA)
- Health & Medical Sciences (AREA)
- Medicinal Chemistry (AREA)
- Polymers & Plastics (AREA)
- Physical Vapour Deposition (AREA)
- Nozzles (AREA)
- Chemical Vapour Deposition (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
Abstract
A vaporsation device, for vapour depositing a release agent strip in the form of longitudinal strips on a film 8 in a film coating plant, has an evaporation vessel 1 heated with an electric heater 5 for the release agent and a jet body 3 with outlet openings 7 for directing the produced release agent vapour against the film 8. The jet body 3 is designed as a closed hollow body, and the evaporation vessel 1 is connected in a lockable manner to the jet body 3 by means of a shut-off device 4.
Description
Technical field
The present invention relates to a kind of in film plated equipment on evaporation on the film evaporation coating device of the separating agent bar of elongate in shape, it has the separating agent container for evaporation of an electricity consumption heater heats and one and has the nozzle tube of the separating agent steam that is produced being guided into the spout of film.
Background technology
A kind of evaporation coating device of prior art is the theme of DE4309717.The described evaporation coating device of this document is made of a cylinder that keeps flat as container for evaporation, and it has the crack on the side of film, and described crack is covered by a nozzle tube that is designed to the pressing plate form.Transmit film to be deposited along this pressing plate.Therefore, container for evaporation length must be the same with thin-film width at least.For especially volume is standby in order to pack new one into when treating that the plating film was filled plating equipment originally just again must additional separating agent, then design the container for evaporation volume so big, so that the storage separating agent that is stored in the container is enough.
The shortcoming of this known evaporation coating device is, because container for evaporation has a large amount of storage separating agents, thereby has to no avail evaporated many separating agents when filling container and subsequently plating equipment being found time, and has wet equipment unit by condensation.To consider that in this case because of the pressure that reduces reduces, therefore when correspondingly not weakening the heating of container for evaporation, steam output has increased the separating agent boiling temperature when finding time.This is because the evaporation coating device volume greatly and in practice may be fast inadequately.Another shortcoming of known evaporation coating device is, the heating period of evaporation coating device is many and evaporation coating device is bulky undesirably long slowly because of storing separating agent, and work as a result setup time is correspondingly long slowly.
Summary of the invention
Task of the present invention is so to design the evaporation coating device of the above-mentioned type, and promptly the separating agent loss is low as much as possible in plating equipment perfusion and when finding time, and makes the evaporation coating device work of getting ready as far as possible apace.
According to the present invention, for addressing these problems a kind of evaporation coating device that is used for becoming on evaporation on the film at film plated equipment the separating agent bar of elongate in shape has been proposed, it has separating agent container for evaporation and the nozzle tube with spout of the separating agent steam alignment thin film that will be produced of an electricity consumption heater heats, wherein, nozzle tube is designed to hollow body, container for evaporation can link to each other with nozzle tube by a cut-off equipment with blocking, the cylinder that nozzle tube is designed to keep flat, container for evaporation links to each other with nozzle tube by a pipeline with cut-off equipment, and nozzle tube has a row successive, spout along the length distribution of nozzle tube.
Owing to according to the present invention container for evaporation being linked to each other with nozzle tube with blocking and it being designed to individual member, so if do not need the film condensation steam, then people can reliably stop steam to flow out evaporation coating device in the cost lowland.Therefore, people can perfusion and prevent find time plating equipment the time steam flow into equipment and thereby be condensate on the environment division, can obviously be reduced in the separating agent consumption in the plating process thus.Spatially separately container for evaporation and nozzle tube have prevented that separating agent fog or other filths from appearing on the film by uncontrolled condensation.In addition, people can make evaporation coating device remain the preparation work state by continuous heating evaporation container.When reinstating equipment, in order to make the pending film of steam flow following closely, people only need open cut-off equipment just.Evaporation coating device of the present invention is particularly useful for producing capacitor foil.The separating agent of replacement plating strip on film, people are equipped with a common print seat can also for the container for evaporation that can block, so that giving separating agent on the coating surface that vertically interrupts on the film.A kind of layout with container for evaporation and print seat has so for example illustrated in DE4311581.Because ground has separated container for evaporation and nozzle tube according to the present invention, so container for evaporation does not need to have the width for the treatment of the plating film.Therefore, it can be that volume is especially little, can change rate of evaporation fast according to the processing condition that change such as the fluctuation of metallic vapor ratio or film speed fluctuation thus.People for example can accurately regulate the width of plating separating agent bar by changing the container for evaporation temperature by the present invention.
If the cylinder that nozzle tube is designed to keep flat then can consistently design nozzle tube with present container for evaporation shell.
When another improvement project according to the present invention was arranged in container for evaporation below the nozzle tube and connects nozzle tube and container for evaporation by a pipeline with shut off valve, people can be used for appointment the shut off valve of pipeline as cut-off equipment.Even such line blind valve (it is present in the plating equipment in the course of the work) under high vacuum also can be worked reliably.
Container for evaporation can be that volume is especially little, links to each other with container for evaporation so that when going into the parting liquid after-teeming in the container for evaporation when a storage vessel that parting liquid is housed thus, and the power regulation of evaporation coating device can be made a response especially apace.
When storage vessel linked to each other with container for evaporation with a pressure compensation pipeline by an after-teeming pipeline, the parting liquid after-teeming of container for evaporation can be carried out when equipment work.
When being positioned to by an improvement storage vessel of the present invention when being higher than container for evaporation and a shut off valve and being arranged in the after-teeming pipeline, parting liquid replenishes and can only just can realize by opening shut off valve as requested, and without the forced conveyance parting liquid.
With storage vessel with container for evaporation is arranged on the sustained height and after-teeming pipeline when being permanent open, fluid infusion need not be operated shut off valve ground and also can carry out continuously when according to another embodiment of the invention.
When spout has rectangular cross section, evaporation coating device few especially with oil.In addition, treating to have formed less excess oil and good especially plating district rib cutting edge of a knife or a sword on the film of plating by such nozzle configuration.
Nozzle tube has an electricradiator, can avoid vapor condensation simply in nozzle tube thus.
Description of drawings
The present invention allows various embodiment.In order to go on to say principle of the present invention, be schematically shown in the accompanying drawings wherein two embodiment and described hereinafter, wherein:
Fig. 1 is the skeleton view of evaporation coating device of the present invention;
Fig. 2 is the side-view of second embodiment of evaporation coating device.
Embodiment
Evaporation coating device shown in Figure 1 has a container for evaporation 1, and it links to each other with nozzle tube 3 by a pipeline 2.In pipeline 2, be connected into a cut-off equipment 4, can have prevented that thus steam from flowing into nozzle tube 3 from container for evaporation 1.
Container for evaporation 1 has an electric heater 5 and for attemperation with and then regulate the separating agent rate and have a temp probe 6.
Container for evaporation 1 can be designed to big volumetrical container, thereby will charge into the enough at least material amounts of once wanting plating in the work period of storage separating agent in the container.But, heated an and storage vessel 9 that be filled with parting liquid also can be set, it links to each other with container for evaporation 1 by after-teeming pipeline 10.In the embodiment shown in fig. 1, in after-teeming pipeline 10, insert a shut off valve 11.Seal storage vessel 9 airtightly, but it links to each other with container for evaporation 1 upper side by a pressure compensation pipeline 12 above its parting liquid liquid level.People arrange storage vessel 9 to such an extent that be higher than container for evaporation 1, and therefore, parting liquid flows out storage vessel 9 and flows into container for evaporation 1 after opening shut off valve 11.Storage vessel 9 allows to have seldom the container for evaporation 1 of parting liquid and still works and allow parting liquid to flow into container for evaporation 1 subsequently in the course of the work.
In the embodiment of Fig. 2, container for evaporation 1 and storage vessel 9 are on the sustained height.Therefore, people can save the shut off valve in the after-teeming pipeline 10.The samely, pressure compensation pipeline 12 is always opened in the above-described embodiments.Liquid levels is always the same high in container for evaporation 1 and storage vessel 9 by after-teeming pipeline 10.Do not need to heat all parting liquids in order to change rate of evaporation, as long as a small amount of parting liquid more or less in the heating evaporation container 1.
The Reference numeral list
The 1-container for evaporation; The 2-pipeline; The 3-nozzle tube; The 4-cut-off equipment; The 5-heater; The 6-temperature is visited Head; The 7-spout; The 8-film; 9-stores container; 10-after-teeming pipeline; The 11-shutoff valve; 12-presses The force compensating pipeline;
Claims (8)
1. evaporation coating device that is used on evaporation on the film, becoming the separating agent bar of elongate in shape at film plated equipment, it has separating agent container for evaporation and the nozzle tube with spout of the separating agent steam alignment thin film that will be produced of an electricity consumption heater heats, it is characterized in that, nozzle tube (3) is designed to hollow body, container for evaporation (1) can link to each other with nozzle tube (3) by a cut-off equipment (4) with blocking, the cylinder that nozzle tube (3) is designed to keep flat, container for evaporation (1) links to each other with nozzle tube (3) by a pipeline (2) with cut-off equipment (4), and nozzle tube (3) has a row successive, spout (7) along the length distribution of nozzle tube (3).
2. evaporation coating device as claimed in claim 1 is characterized in that, container for evaporation (1) is arranged in below the nozzle tube (3).
3. evaporation coating device as claimed in claim 1 or 2 is characterized in that, the storage vessel (9) that parting liquid is housed links to each other so that the parting liquid after-teeming is gone in the container for evaporation (1) with container for evaporation (1).
4. evaporation coating device as claimed in claim 3 is characterized in that, storage vessel (9) links to each other with container for evaporation (1) with a pressure compensation pipeline (12) by an after-teeming pipeline (10).
5. evaporation coating device as claimed in claim 4 is characterized in that, storage vessel (9) is arranged to such an extent that be higher than container for evaporation (1), and a shut off valve is arranged in after-teeming pipeline (10).
6. evaporation coating device as claimed in claim 4 is characterized in that, storage vessel (9) and container for evaporation (1) are arranged on the sustained height and after-teeming pipeline (10) is permanent open.
7. evaporation coating device as claimed in claim 1 or 2 is characterized in that, spout (7) has rectangular cross section.
8. evaporation coating device as claimed in claim 1 or 2 is characterized in that, nozzle tube (3) has an electricradiator.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19848177.2 | 1998-10-20 | ||
| DE19848177A DE19848177A1 (en) | 1998-10-20 | 1998-10-20 | Vapor deposition of release agent for capacitor film has a closed hollow body evaporation vessel connected to the jet body with a shut off device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1251866A CN1251866A (en) | 2000-05-03 |
| CN1240872C true CN1240872C (en) | 2006-02-08 |
Family
ID=7884969
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB991215710A Expired - Fee Related CN1240872C (en) | 1998-10-20 | 1999-10-19 | Vapor deposition apparatus |
Country Status (6)
| Country | Link |
|---|---|
| JP (1) | JP4230068B2 (en) |
| KR (1) | KR100614131B1 (en) |
| CN (1) | CN1240872C (en) |
| DE (1) | DE19848177A1 (en) |
| GB (1) | GB2342929B (en) |
| IT (1) | IT1313766B1 (en) |
Families Citing this family (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE10128091C1 (en) * | 2001-06-11 | 2002-10-02 | Applied Films Gmbh & Co Kg | Device for coating a flat substrate used in the production of flat TV screens with organic illuminating diodes comprises a fixed vaporizer source for vaporizing materials |
| DE10330401B3 (en) * | 2003-07-04 | 2005-02-24 | Applied Films Gmbh & Co. Kg | Method and device for the area-wise application of release agents |
| CN100412226C (en) * | 2004-10-18 | 2008-08-20 | 中华映管股份有限公司 | Method for manufacturing front substrate of plasma display, vapor deposition process and apparatus therefor |
| CN100491584C (en) * | 2005-09-22 | 2009-05-27 | 中国科学院半导体研究所 | Method for preparing different refractivity film layer |
| ATE520799T1 (en) * | 2005-10-26 | 2011-09-15 | Applied Materials Gmbh & Co Kg | DEVICE FOR STEAMING SUBSTRATES |
| ATE509131T1 (en) | 2005-10-26 | 2011-05-15 | Applied Materials Gmbh & Co Kg | EVAPORATOR DEVICE WITH A CONTAINER FOR RECEIVING MATERIAL TO BE EVAPORATED |
| DE102008026001B4 (en) * | 2007-09-04 | 2012-02-16 | Von Ardenne Anlagentechnik Gmbh | Method and device for producing and processing layers on substrates under a defined process atmosphere and heating element |
| WO2011065999A1 (en) * | 2008-12-18 | 2011-06-03 | Veeco Instruments Inc. | Linear deposition source |
| WO2011065998A1 (en) * | 2008-12-18 | 2011-06-03 | Veeco Instruments Inc. | Linear deposition source |
| KR20120101425A (en) * | 2009-11-30 | 2012-09-13 | 비코 인스트루먼츠 인코포레이티드 | Linear deposition source |
| FR2956412B1 (en) * | 2010-02-16 | 2012-04-06 | Astron Fiamm Safety | CONSTANT VOLUME SHUT-OFF VALVE OF A VAPOR PHASE DEPOSITION SOURCE |
| TWI600470B (en) * | 2016-05-19 | 2017-10-01 | 康廷 熊 | Coating apparatus and method |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3922187A1 (en) * | 1989-07-06 | 1991-01-17 | Leybold Ag | DEVICE FOR PRODUCING METAL-FREE STRIPS ON FILM COATS COATED IN A VACUUM, IN PARTICULAR FOR CAPACITORS |
| DE4309717C2 (en) * | 1993-03-25 | 2002-03-28 | Unaxis Deutschland Holding | Process for evaporating a layer |
| US5863336A (en) * | 1996-04-08 | 1999-01-26 | General Electric Company | Apparatus for fabrication of superconductor |
-
1998
- 1998-10-20 DE DE19848177A patent/DE19848177A1/en not_active Withdrawn
-
1999
- 1999-10-06 IT IT1999MI002081A patent/IT1313766B1/en active
- 1999-10-12 KR KR1019990043933A patent/KR100614131B1/en not_active IP Right Cessation
- 1999-10-18 GB GB9924608A patent/GB2342929B/en not_active Expired - Lifetime
- 1999-10-18 JP JP29559499A patent/JP4230068B2/en not_active Expired - Fee Related
- 1999-10-19 CN CNB991215710A patent/CN1240872C/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| ITMI992081A1 (en) | 2001-04-06 |
| GB2342929A (en) | 2000-04-26 |
| CN1251866A (en) | 2000-05-03 |
| KR100614131B1 (en) | 2006-08-22 |
| DE19848177A1 (en) | 2000-04-27 |
| JP4230068B2 (en) | 2009-02-25 |
| JP2000129429A (en) | 2000-05-09 |
| ITMI992081A0 (en) | 1999-10-06 |
| GB9924608D0 (en) | 1999-12-22 |
| IT1313766B1 (en) | 2002-09-17 |
| GB2342929B (en) | 2003-05-21 |
| KR20000028990A (en) | 2000-05-25 |
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Effective date of registration: 20020906 Address after: Federal Republic of Germany, Kazakhstan Applicant after: Bauer Ze J process systems, Limited by Share Ltd Address before: Federal Republic of Germany, Kazakhstan Applicant before: Balzers Und Leybold Deutschland Holding AG |
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Owner name: APPLIED MATERIALS SHARES LIMITED PARTNERSHIP Free format text: FORMER NAME OR ADDRESS: APPLIED PHILIN GMBH + CO. KG |
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Address after: In Germany Patentee after: Applied Films GmbH & Co. KG Address before: Federal Republic of Germany Patentee before: Applied Films GmbH & Co. KG |
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Granted publication date: 20060208 Termination date: 20091119 |