GB9924608D0 - Vaporisation device - Google Patents

Vaporisation device

Info

Publication number
GB9924608D0
GB9924608D0 GBGB9924608.4A GB9924608A GB9924608D0 GB 9924608 D0 GB9924608 D0 GB 9924608D0 GB 9924608 A GB9924608 A GB 9924608A GB 9924608 D0 GB9924608 D0 GB 9924608D0
Authority
GB
United Kingdom
Prior art keywords
vaporisation device
vaporisation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
GBGB9924608.4A
Other versions
GB2342929A (en
GB2342929B (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold Systems GmbH
Original Assignee
Leybold Systems GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Systems GmbH filed Critical Leybold Systems GmbH
Publication of GB9924608D0 publication Critical patent/GB9924608D0/en
Publication of GB2342929A publication Critical patent/GB2342929A/en
Application granted granted Critical
Publication of GB2342929B publication Critical patent/GB2342929B/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J7/00—Chemical treatment or coating of shaped articles made of macromolecular substances
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04—Coating on selected surface areas, e.g. using masks
    • C23C14/042—Coating on selected surface areas, e.g. using masks using masks
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04—Coating on selected surface areas, e.g. using masks
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/243—Crucibles for source material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Engineering & Computer Science (AREA)
  • Health & Medical Sciences (AREA)
  • Medicinal Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Physical Vapour Deposition (AREA)
  • Chemical Vapour Deposition (AREA)
  • Nozzles (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
GB9924608A 1998-10-20 1999-10-18 Vaporisation device Expired - Lifetime GB2342929B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19848177A DE19848177A1 (en) 1998-10-20 1998-10-20 Vapor deposition of release agent for capacitor film has a closed hollow body evaporation vessel connected to the jet body with a shut off device

Publications (3)

Publication Number Publication Date
GB9924608D0 true GB9924608D0 (en) 1999-12-22
GB2342929A GB2342929A (en) 2000-04-26
GB2342929B GB2342929B (en) 2003-05-21

Family

ID=7884969

Family Applications (1)

Application Number Title Priority Date Filing Date
GB9924608A Expired - Lifetime GB2342929B (en) 1998-10-20 1999-10-18 Vaporisation device

Country Status (6)

Country Link
JP (1) JP4230068B2 (en)
KR (1) KR100614131B1 (en)
CN (1) CN1240872C (en)
DE (1) DE19848177A1 (en)
GB (1) GB2342929B (en)
IT (1) IT1313766B1 (en)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10128091C1 (en) * 2001-06-11 2002-10-02 Applied Films Gmbh & Co Kg Device for coating a flat substrate used in the production of flat TV screens with organic illuminating diodes comprises a fixed vaporizer source for vaporizing materials
DE10330401B3 (en) * 2003-07-04 2005-02-24 Applied Films Gmbh & Co. Kg Method and device for the area-wise application of release agents
CN100412226C (en) * 2004-10-18 2008-08-20 中华映管股份有限公司 Method for manufacturing front substrate of plasma display, vapor deposition process and apparatus therefor
CN100491584C (en) * 2005-09-22 2009-05-27 中国科学院半导体研究所 Method for preparing different refractivity film layer
ATE520799T1 (en) * 2005-10-26 2011-09-15 Applied Materials Gmbh & Co Kg DEVICE FOR STEAMING SUBSTRATES
EP1788113B1 (en) * 2005-10-26 2011-05-11 Applied Materials GmbH & Co. KG Evaporator with a container for receiving the evaporation material
DE102008026001B4 (en) * 2007-09-04 2012-02-16 Von Ardenne Anlagentechnik Gmbh Method and device for producing and processing layers on substrates under a defined process atmosphere and heating element
WO2011065998A1 (en) * 2008-12-18 2011-06-03 Veeco Instruments Inc. Linear deposition source
WO2011065999A1 (en) * 2008-12-18 2011-06-03 Veeco Instruments Inc. Linear deposition source
CN102712993A (en) * 2009-11-30 2012-10-03 维易科精密仪器国际贸易(上海)有限公司 Linear deposition source
FR2956412B1 (en) * 2010-02-16 2012-04-06 Astron Fiamm Safety CONSTANT VOLUME SHUT-OFF VALVE OF A VAPOR PHASE DEPOSITION SOURCE
TWI600470B (en) * 2016-05-19 2017-10-01 康廷 熊 Coating apparatus and method

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3922187A1 (en) * 1989-07-06 1991-01-17 Leybold Ag DEVICE FOR PRODUCING METAL-FREE STRIPS ON FILM COATS COATED IN A VACUUM, IN PARTICULAR FOR CAPACITORS
DE4309717C2 (en) * 1993-03-25 2002-03-28 Unaxis Deutschland Holding Process for evaporating a layer
US5863336A (en) * 1996-04-08 1999-01-26 General Electric Company Apparatus for fabrication of superconductor

Also Published As

Publication number Publication date
CN1240872C (en) 2006-02-08
DE19848177A1 (en) 2000-04-27
IT1313766B1 (en) 2002-09-17
ITMI992081A0 (en) 1999-10-06
CN1251866A (en) 2000-05-03
JP4230068B2 (en) 2009-02-25
GB2342929A (en) 2000-04-26
KR100614131B1 (en) 2006-08-22
JP2000129429A (en) 2000-05-09
GB2342929B (en) 2003-05-21
KR20000028990A (en) 2000-05-25
ITMI992081A1 (en) 2001-04-06

Similar Documents

Publication Publication Date Title
IL139781A0 (en) Tele-diagnostic device
EP1074275A4 (en) Photomatrix device
IL143043A0 (en) Tele-diagnostic device
GB9807055D0 (en) Micro-brewing device
GB9822242D0 (en) Device
GB2342929B (en) Vaporisation device
GB9826064D0 (en) Device
EP1054576A4 (en) Pseudo-stereophony device
GB9822185D0 (en) Device
GB9806966D0 (en) Bioloically modified device
GB2337099B (en) Device
GB0003899D0 (en) Vaporisation device
GB2340575B (en) Retaining device
GB9806541D0 (en) Device
GB2327282B (en) Sun-observation device
GB2341216B (en) Retaining device
GB9814376D0 (en) Conpacting device
GB2339218B (en) Anti - burglar device
CA83442S (en) Rescreational device
GB9816893D0 (en) Device
HU9803045D0 (en) Chest-forming device
GB9819701D0 (en) Device
GB9821833D0 (en) Device
GB9816677D0 (en) Device
GB9816412D0 (en) Device

Legal Events

Date Code Title Description
732E Amendments to the register in respect of changes of name or changes affecting rights (sect. 32/1977)