CN1230278C - 用于边缘抛光均匀性控制的设备 - Google Patents

用于边缘抛光均匀性控制的设备 Download PDF

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Publication number
CN1230278C
CN1230278C CNB028075366A CN02807536A CN1230278C CN 1230278 C CN1230278 C CN 1230278C CN B028075366 A CNB028075366 A CN B028075366A CN 02807536 A CN02807536 A CN 02807536A CN 1230278 C CN1230278 C CN 1230278C
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CN
China
Prior art keywords
platen
subregion
wafer
pressure
region
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CNB028075366A
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English (en)
Chinese (zh)
Other versions
CN1500028A (zh
Inventor
许苍山
杰夫·加斯帕雷奇
罗伯特·塔夫
肯尼思·J·巴勒
保罗·斯塔谢夫兹
埃瑞克·H·恩达尔
特拉维斯·罗伯特·泰勒
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Lam Research Corp
Original Assignee
Lam Research Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US09/823,722 external-priority patent/US6729945B2/en
Application filed by Lam Research Corp filed Critical Lam Research Corp
Publication of CN1500028A publication Critical patent/CN1500028A/zh
Application granted granted Critical
Publication of CN1230278C publication Critical patent/CN1230278C/zh
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/11—Lapping tools
    • B24B37/12—Lapping plates for working plane surfaces
    • B24B37/16—Lapping plates for working plane surfaces characterised by the shape of the lapping plate surface, e.g. grooved
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B21/00—Machines or devices using grinding or polishing belts; Accessories therefor
    • B24B21/04—Machines or devices using grinding or polishing belts; Accessories therefor for grinding plane surfaces
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
CNB028075366A 2001-03-30 2002-03-29 用于边缘抛光均匀性控制的设备 Expired - Fee Related CN1230278C (zh)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US09/823,722 2001-03-30
US09/823,722 US6729945B2 (en) 2001-03-30 2001-03-30 Apparatus for controlling leading edge and trailing edge polishing
US10/029,958 US6991512B2 (en) 2001-03-30 2001-12-21 Apparatus for edge polishing uniformity control
US10/029,958 2001-12-21

Publications (2)

Publication Number Publication Date
CN1500028A CN1500028A (zh) 2004-05-26
CN1230278C true CN1230278C (zh) 2005-12-07

Family

ID=26705511

Family Applications (1)

Application Number Title Priority Date Filing Date
CNB028075366A Expired - Fee Related CN1230278C (zh) 2001-03-30 2002-03-29 用于边缘抛光均匀性控制的设备

Country Status (7)

Country Link
US (1) US6991512B2 (enExample)
EP (1) EP1372909A1 (enExample)
JP (1) JP2005510368A (enExample)
KR (1) KR20030090698A (enExample)
CN (1) CN1230278C (enExample)
TW (1) TW590847B (enExample)
WO (1) WO2002078904A1 (enExample)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6623329B1 (en) * 2000-08-31 2003-09-23 Micron Technology, Inc. Method and apparatus for supporting a microelectronic substrate relative to a planarization pad
US6887338B1 (en) 2002-06-28 2005-05-03 Lam Research Corporation 300 mm platen and belt configuration
US7018273B1 (en) 2003-06-27 2006-03-28 Lam Research Corporation Platen with diaphragm and method for optimizing wafer polishing
KR100807046B1 (ko) * 2003-11-26 2008-02-25 동부일렉트로닉스 주식회사 화학기계적 연마장치
KR20060045167A (ko) * 2004-11-09 2006-05-17 동성에이앤티 주식회사 폴리싱 패드 및 그 제조방법
US8128461B1 (en) * 2008-06-16 2012-03-06 Novellus Systems, Inc. Chemical mechanical polishing with multi-zone slurry delivery
US8075703B2 (en) 2008-12-10 2011-12-13 Lam Research Corporation Immersive oxidation and etching process for cleaning silicon electrodes
CN102294646A (zh) * 2010-06-23 2011-12-28 中芯国际集成电路制造(上海)有限公司 研磨头及化学机械研磨机台
KR102319571B1 (ko) * 2017-03-06 2021-11-02 주식회사 케이씨텍 에어 베어링 및 이를 구비하는 기판 연마 장치
KR102389438B1 (ko) * 2017-03-23 2022-04-25 주식회사 케이씨텍 기판 지지 유닛 및 이를 포함하는 기판 연마 시스템, 기판 연마 방법
KR102318972B1 (ko) * 2017-03-28 2021-11-02 주식회사 케이씨텍 기판 연마 장치
CN109671664A (zh) * 2018-12-14 2019-04-23 北京半导体专用设备研究所（中国电子科技集团公司第四十五研究所） 晶圆载片台
CN109648460A (zh) * 2018-12-20 2019-04-19 丰豹智能科技(上海)有限公司 一种无电流多分区可拆卸感应装置
CN113579990B (zh) * 2021-07-30 2022-07-26 上海积塔半导体有限公司 固定研磨粒抛光装置及抛光方法

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08195363A (ja) 1994-10-11 1996-07-30 Ontrak Syst Inc 流体軸受を有する半導体ウェーハポリシング装置
US5916012A (en) 1996-04-26 1999-06-29 Lam Research Corporation Control of chemical-mechanical polishing rate across a substrate surface for a linear polisher
US6328642B1 (en) 1997-02-14 2001-12-11 Lam Research Corporation Integrated pad and belt for chemical mechanical polishing
US6062959A (en) 1997-11-05 2000-05-16 Aplex Group Polishing system including a hydrostatic fluid bearing support
US6336845B1 (en) 1997-11-12 2002-01-08 Lam Research Corporation Method and apparatus for polishing semiconductor wafers
US6186865B1 (en) * 1998-10-29 2001-02-13 Lam Research Corporation Apparatus and method for performing end point detection on a linear planarization tool
US6093089A (en) 1999-01-25 2000-07-25 United Microelectronics Corp. Apparatus for controlling uniformity of polished material
US6155915A (en) 1999-03-24 2000-12-05 Advanced Micro Devices, Inc. System and method for independent air bearing zoning for semiconductor polishing device
US6712679B2 (en) 2001-08-08 2004-03-30 Lam Research Corporation Platen assembly having a topographically altered platen surface

Also Published As

Publication number Publication date
JP2005510368A (ja) 2005-04-21
CN1500028A (zh) 2004-05-26
TW590847B (en) 2004-06-11
US20020151256A1 (en) 2002-10-17
EP1372909A1 (en) 2004-01-02
US6991512B2 (en) 2006-01-31
WO2002078904A1 (en) 2002-10-10
KR20030090698A (ko) 2003-11-28

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