CN121844213A - 图像处理方法、程序、图像处理装置、以及扫描探针显微镜 - Google Patents

图像处理方法、程序、图像处理装置、以及扫描探针显微镜

Info

Publication number
CN121844213A
CN121844213A CN202480058982.1A CN202480058982A CN121844213A CN 121844213 A CN121844213 A CN 121844213A CN 202480058982 A CN202480058982 A CN 202480058982A CN 121844213 A CN121844213 A CN 121844213A
Authority
CN
China
Prior art keywords
image
sample
image processing
processing method
corrected
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202480058982.1A
Other languages
English (en)
Chinese (zh)
Inventor
阿久津启
泽田隆二
足立健太
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Publication of CN121844213A publication Critical patent/CN121844213A/zh
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q30/00—Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices
    • G01Q30/04—Display or data processing devices
    • G01Q30/06—Display or data processing devices for error compensation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/10—STM [Scanning Tunnelling Microscopy] or apparatus therefor, e.g. STM probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Microscoopes, Condenser (AREA)
  • Image Processing (AREA)
CN202480058982.1A 2023-07-25 2024-06-18 图像处理方法、程序、图像处理装置、以及扫描探针显微镜 Pending CN121844213A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2023-120659 2023-07-25
JP2023120659 2023-07-25
PCT/JP2024/021980 WO2025022875A1 (ja) 2023-07-25 2024-06-18 画像処理方法、プログラム、画像処理装置、および走査型プローブ顕微鏡

Publications (1)

Publication Number Publication Date
CN121844213A true CN121844213A (zh) 2026-04-10

Family

ID=94374961

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202480058982.1A Pending CN121844213A (zh) 2023-07-25 2024-06-18 图像处理方法、程序、图像处理装置、以及扫描探针显微镜

Country Status (3)

Country Link
JP (1) JPWO2025022875A1 (https=)
CN (1) CN121844213A (https=)
WO (1) WO2025022875A1 (https=)

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06147821A (ja) * 1992-11-12 1994-05-27 Hitachi Constr Mach Co Ltd 走査型探針顕微鏡像の傾斜補正方法
JP4136157B2 (ja) * 1999-02-09 2008-08-20 オリンパス株式会社 分子測長方法
JP2002092586A (ja) * 2000-09-14 2002-03-29 Olympus Optical Co Ltd 画像解析装置、画像解析方法および画像解析処理をするための処理プログラムを記録した記録媒体
JP2004233242A (ja) * 2003-01-31 2004-08-19 Jeol Ltd 走査プローブ顕微鏡
JP5481883B2 (ja) * 2009-03-05 2014-04-23 株式会社島津製作所 特定部位検出方法を用いた試料分析装置
JP5601133B2 (ja) * 2010-10-01 2014-10-08 大日本印刷株式会社 画像処理装置、画像処理方法、プログラムおよび記憶媒体
JP7218262B2 (ja) * 2019-09-12 2023-02-06 株式会社日立ハイテク パターン高さ情報補正システム及びパターン高さ情報の補正方法
KR102275433B1 (ko) * 2019-09-23 2021-07-09 전남대학교산학협력단 Afm 이미지의 그림자 효과 제거를 위한 보정 시스템 및 그 방법
CN118974567A (zh) * 2022-04-07 2024-11-15 株式会社岛津制作所 数据处理方法、程序、图像处理装置以及扫描型探针显微镜

Also Published As

Publication number Publication date
JPWO2025022875A1 (https=) 2025-01-30
WO2025022875A1 (ja) 2025-01-30

Similar Documents

Publication Publication Date Title
JP6627903B2 (ja) データ補正方法、データ補正方法をコンピュータに実行させるプログラム、画像処理装置、走査型プローブ顕微鏡
US6880386B1 (en) Method and device for simultaneously determining the adhesion, friction, and other material properties of a sample surface
KR101324598B1 (ko) 주사탐침현미경을 사용한 샘플 스캐닝 방법 및 장치
CN117296075B (zh) 具有保留度量的实时去噪的afm成像
EP3077831A1 (en) Force measurement with real-time baseline determination
CN106104278A (zh) 扫描探针显微镜
CN121844213A (zh) 图像处理方法、程序、图像处理装置、以及扫描探针显微镜
JP7740527B2 (ja) データ処理方法、プログラム、画像処理装置、および、走査型プローブ顕微鏡
US9075080B2 (en) Method and apparatus for adaptive tracking using a scanning probe microscope
US11604210B2 (en) AFM imaging with real time drift correction
KR20230126494A (ko) 프로브를 포함하는 검사 장치를 이용한 이미지 계측 및 프로브 오염 검사 방법
US12352779B2 (en) Scanning probe microscope and method for measuring physical quantity using scanning probe microscope
CN109313215B (zh) 扫描型探针显微镜用数据处理装置
JP7810264B2 (ja) 画像処理方法、画像処理装置、走査型プローブ顕微鏡、およびプログラム
US7578176B2 (en) Systems and methods for utilizing scanning probe shape characterization
JP2005083886A (ja) 微少領域の摩擦力および摩擦係数測定方法
JP7622863B2 (ja) 走査型プローブ顕微鏡およびプログラム
KR101025657B1 (ko) 원자 현미경 및 이의 영상 보정 방법
JP2006138655A (ja) 走査型プローブ顕微鏡
WO2024150494A1 (ja) 探針劣化判定方法、探針劣化判定装置、および、探針劣化判定用プログラム
JPWO2025022875A5 (https=)
US10690697B1 (en) Metrology technique that provides true flattening
KR20240004958A (ko) 크립 보정을 하는 afm 이미징
JP2006250690A (ja) 走査型プローブ顕微鏡、走査型プローブ顕微鏡の探針の評価方法、およびプログラム
WO2026034063A1 (ja) 画像補正方法および走査型プローブ顕微鏡

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination