CN121491923A - 制备磨料制品的方法和由其制成的抛光系统 - Google Patents

制备磨料制品的方法和由其制成的抛光系统

Info

Publication number
CN121491923A
CN121491923A CN202511709792.4A CN202511709792A CN121491923A CN 121491923 A CN121491923 A CN 121491923A CN 202511709792 A CN202511709792 A CN 202511709792A CN 121491923 A CN121491923 A CN 121491923A
Authority
CN
China
Prior art keywords
diamond
layer
abrasive
conformable
hydrophobic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202511709792.4A
Other languages
English (en)
Chinese (zh)
Inventor
陈季汎
凯莱布·T·纳尔逊
摩西·M·戴维
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
3M Innovative Properties Co
Original Assignee
3M Innovative Properties Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 3M Innovative Properties Co filed Critical 3M Innovative Properties Co
Publication of CN121491923A publication Critical patent/CN121491923A/zh
Pending legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/11—Lapping tools
    • B24B37/20—Lapping pads for working plane surfaces
    • B24B37/26—Lapping pads for working plane surfaces characterised by the shape of the lapping pad surface, e.g. grooved
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K3/00—Materials not provided for elsewhere
    • C09K3/14—Anti-slip materials; Abrasives
    • C09K3/1436—Composite particles, e.g. coated particles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B53/00—Devices or means for dressing or conditioning abrasive surfaces
    • B24B53/017—Devices or means for dressing, cleaning or otherwise conditioning lapping tools
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/11—Lapping tools
    • B24B37/20—Lapping pads for working plane surfaces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/11—Lapping tools
    • B24B37/20—Lapping pads for working plane surfaces
    • B24B37/22—Lapping pads for working plane surfaces characterised by a multi-layered structure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/11—Lapping tools
    • B24B37/20—Lapping pads for working plane surfaces
    • B24B37/24—Lapping pads for working plane surfaces characterised by the composition or properties of the pad materials
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B53/00—Devices or means for dressing or conditioning abrasive surfaces
    • B24B53/02—Devices or means for dressing or conditioning abrasive surfaces of plane surfaces on abrasive tools
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B53/00—Devices or means for dressing or conditioning abrasive surfaces
    • B24B53/12—Dressing tools; Holders therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D11/00—Constructional features of flexible abrasive materials; Special features in the manufacture of such materials
    • B24D11/001—Manufacture of flexible abrasive materials
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
    • B24D3/02—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent
    • B24D3/04—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially inorganic
    • B24D3/14—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially inorganic ceramic, i.e. vitrified bondings

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Composite Materials (AREA)
  • Materials Engineering (AREA)
  • Ceramic Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Polishing Bodies And Polishing Tools (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Grinding-Machine Dressing And Accessory Apparatuses (AREA)
CN202511709792.4A 2017-07-11 2018-07-05 制备磨料制品的方法和由其制成的抛光系统 Pending CN121491923A (zh)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US201762530976P 2017-07-11 2017-07-11
US62/530,976 2017-07-11
CN201880046028.5A CN110914016A (zh) 2017-07-11 2018-07-05 包括可适形涂层的磨料制品和由其制成的抛光系统
PCT/IB2018/054978 WO2019012389A1 (en) 2017-07-11 2018-07-05 ABRASIVE ARTICLES COMPRISING ADAPTABLE COATINGS AND POLISHING SYSTEM MANUFACTURED THEREFROM

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
CN201880046028.5A Division CN110914016A (zh) 2017-07-11 2018-07-05 包括可适形涂层的磨料制品和由其制成的抛光系统

Publications (1)

Publication Number Publication Date
CN121491923A true CN121491923A (zh) 2026-02-10

Family

ID=65001911

Family Applications (2)

Application Number Title Priority Date Filing Date
CN202511709792.4A Pending CN121491923A (zh) 2017-07-11 2018-07-05 制备磨料制品的方法和由其制成的抛光系统
CN201880046028.5A Pending CN110914016A (zh) 2017-07-11 2018-07-05 包括可适形涂层的磨料制品和由其制成的抛光系统

Family Applications After (1)

Application Number Title Priority Date Filing Date
CN201880046028.5A Pending CN110914016A (zh) 2017-07-11 2018-07-05 包括可适形涂层的磨料制品和由其制成的抛光系统

Country Status (5)

Country Link
US (1) US12043785B2 (https=)
JP (1) JP7198801B2 (https=)
CN (2) CN121491923A (https=)
TW (1) TWI791028B (https=)
WO (1) WO2019012389A1 (https=)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102712203B1 (ko) * 2019-07-24 2024-10-02 엠.씨.케이 (주) 연마제품 및 이의 제조방법
GB2590511B (en) * 2019-11-20 2023-10-25 Best Engineered Surface Tech Llc Hybrid CMP conditioning head
TWI859404B (zh) * 2020-01-30 2024-10-21 台灣積體電路製造股份有限公司 可攜式清潔裝置
US12370648B2 (en) 2020-01-30 2025-07-29 Taiwan Semiconductor Manufacturing Co., Ltd. Surface clean system and method
US20230116900A1 (en) * 2020-03-18 2023-04-13 3M Innovative Properties Company Abrasive Article
US20210402563A1 (en) * 2020-06-26 2021-12-30 Applied Materials, Inc. Conditioner disk for use on soft or 3d printed pads during cmp
TWI772171B (zh) * 2021-09-08 2022-07-21 明志科技大學 化學機械研磨墊修整器的保護膜及保護膜疊層
JP2024535408A (ja) * 2021-09-29 2024-09-30 インテグリス・インコーポレーテッド ポリマーバッキングプレートを備えるパッドコンディショナー
CN117464554A (zh) * 2022-07-20 2024-01-30 格科半导体(上海)有限公司 一种研磨垫修整装置

Family Cites Families (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5152917B1 (en) 1991-02-06 1998-01-13 Minnesota Mining & Mfg Structured abrasive article
US5352493A (en) 1991-05-03 1994-10-04 Veniamin Dorfman Method for forming diamond-like nanocomposite or doped-diamond-like nanocomposite films
US5435816A (en) 1993-01-14 1995-07-25 Minnesota Mining And Manufacturing Company Method of making an abrasive article
SG64333A1 (en) 1993-09-13 1999-04-27 Minnesota Mining & Mfg Abrasive article method of manufacture of same method of using same for finishing and a production tool
US6468642B1 (en) 1995-10-03 2002-10-22 N.V. Bekaert S.A. Fluorine-doped diamond-like coatings
US6021559A (en) 1996-11-01 2000-02-08 3M Innovative Properties Company Methods of making a cube corner article master mold
US6368198B1 (en) 1999-11-22 2002-04-09 Kinik Company Diamond grid CMP pad dresser
US5921856A (en) 1997-07-10 1999-07-13 Sp3, Inc. CVD diamond coated substrate for polishing pad conditioning head and method for making same
US6123612A (en) 1998-04-15 2000-09-26 3M Innovative Properties Company Corrosion resistant abrasive article and method of making
US6696157B1 (en) 2000-03-05 2004-02-24 3M Innovative Properties Company Diamond-like glass thin films
JP2004303983A (ja) 2003-03-31 2004-10-28 Fuji Photo Film Co Ltd 研磨パッド
US7160178B2 (en) 2003-08-07 2007-01-09 3M Innovative Properties Company In situ activation of a three-dimensional fixed abrasive article
EP1726682A1 (en) 2005-05-26 2006-11-29 NV Bekaert SA Coating comprising layered structures of diamond like nanocomposite layers and diamond like carbon layers.
KR101024674B1 (ko) 2007-12-28 2011-03-25 신한다이아몬드공업 주식회사 소수성 절삭공구 및 그제조방법
US20090224370A1 (en) 2008-03-10 2009-09-10 Slutz David E Non-planar cvd diamond-coated cmp pad conditioner and method for manufacturing
SG176629A1 (en) * 2009-06-02 2012-01-30 Saint Gobain Abrasives Inc Corrosion-resistant cmp conditioning tools and methods for making and using same
US8721395B2 (en) 2009-07-16 2014-05-13 Saint-Gobain Abrasives, Inc. Abrasive tool with flat and consistent surface topography for conditioning a CMP pad and method for making
SG11201407232YA (en) 2012-05-04 2014-12-30 Entegris Inc Cmp conditioner pads with superabrasive grit enhancement
CN104684686A (zh) 2012-08-02 2015-06-03 3M创新有限公司 具有精确成形特征部的研磨元件、用其制成的研磨制品及其制造方法
JP6715006B2 (ja) 2012-08-02 2020-07-01 スリーエム イノベイティブ プロパティズ カンパニー 精密に成形された構造部を有する研磨物品及びその作製方法
CN105102188B (zh) * 2013-03-12 2021-06-01 国立大学法人九州大学 研磨垫及研磨方法
JP2017503670A (ja) 2014-01-24 2017-02-02 スリーエム イノベイティブ プロパティズ カンパニー 構造化表面を有する研磨材料
SG11201608134YA (en) 2014-04-03 2016-10-28 3M Innovative Properties Co Polishing pads and systems and methods of making and using the same
CN106232696B (zh) 2014-04-24 2020-06-05 3M创新有限公司 具有亲水表面的流体控制膜、其制造方法以及用于清洁结构化表面的方法
SG11202000259RA (en) 2017-07-11 2020-02-27 3M Innovative Properties Co Abrasive articles including conformable coatings and polishing system therefrom
WO2019012388A1 (en) 2017-07-11 2019-01-17 3M Innovative Properties Company ABRASIVE ARTICLES COMPRISING CONFORMABLE COATINGS AND POLISHING SYSTEM COMPRISING THE SAME

Also Published As

Publication number Publication date
US12043785B2 (en) 2024-07-23
JP2020526406A (ja) 2020-08-31
CN110914016A (zh) 2020-03-24
WO2019012389A1 (en) 2019-01-17
TW201910055A (zh) 2019-03-16
JP7198801B2 (ja) 2023-01-04
US20200172780A1 (en) 2020-06-04
TWI791028B (zh) 2023-02-01

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