CN1212652C - 一种基于自组织的纳米颗粒图案的光刻方法 - Google Patents
一种基于自组织的纳米颗粒图案的光刻方法 Download PDFInfo
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- CN1212652C CN1212652C CN 02136120 CN02136120A CN1212652C CN 1212652 C CN1212652 C CN 1212652C CN 02136120 CN02136120 CN 02136120 CN 02136120 A CN02136120 A CN 02136120A CN 1212652 C CN1212652 C CN 1212652C
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CN 02136120 CN1212652C (zh) | 2002-07-19 | 2002-07-19 | 一种基于自组织的纳米颗粒图案的光刻方法 |
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CN 02136120 CN1212652C (zh) | 2002-07-19 | 2002-07-19 | 一种基于自组织的纳米颗粒图案的光刻方法 |
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CN1391264A CN1391264A (zh) | 2003-01-15 |
CN1212652C true CN1212652C (zh) | 2005-07-27 |
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Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
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CN1302517C (zh) * | 2004-03-26 | 2007-02-28 | 东南大学 | 自组织生长均匀有序半导体量子点阵列的方法 |
CN1309027C (zh) * | 2004-09-02 | 2007-04-04 | 上海交通大学 | 基于纳米材料排布的纳米刻蚀方法 |
CN100434353C (zh) * | 2006-01-24 | 2008-11-19 | 南京大学 | 具有直径和数密度一维梯度的纳米粒子阵列气相合成方法 |
CN100367467C (zh) * | 2006-06-09 | 2008-02-06 | 南京大学 | 常温下构筑高密度均匀分布硅纳米点、纳米线的方法 |
US7923373B2 (en) * | 2007-06-04 | 2011-04-12 | Micron Technology, Inc. | Pitch multiplication using self-assembling materials |
CN101519184B (zh) * | 2008-02-29 | 2012-05-23 | 财团法人工业技术研究院 | 利用光热效应制作应用基板的方法 |
KR101002683B1 (ko) * | 2008-08-19 | 2010-12-20 | 한국기계연구원 | 이중시트링과 릴리프밸브를 내장하는 고압력 볼밸브 |
CN102983065B (zh) * | 2011-09-06 | 2015-12-16 | 中芯国际集成电路制造(北京)有限公司 | 图案、掩模图案形成方法和半导体器件制造方法 |
CN107381498A (zh) * | 2016-05-17 | 2017-11-24 | 边捷 | 一种片状液相纳米颗粒制备方法 |
CN106430083B (zh) * | 2016-10-28 | 2018-03-06 | 深圳市华星光电技术有限公司 | 纳米级柱状物林的制作方法 |
CN112973650B (zh) * | 2021-02-08 | 2022-02-08 | 厦门大学 | 一种纳微复合球及其制备方法和应用 |
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Owner name: SHANGHAI HUAHONG (GROUP) CO., LTD.; SHANGHAI IC R Free format text: FORMER OWNER: SHANGHAI HUAHONG (GROUP) CO., LTD. Effective date: 20060901 |
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Effective date of registration: 20060901 Address after: 201203 No. 177 blue wave road, Zhangjiang hi tech park, Shanghai, Pudong New Area Co-patentee after: Shanghai integrated circuit research and Development Center Co., Ltd. Patentee after: Shanghai Huahong (Group) Co., Ltd. Address before: 18, Huaihai Road, Shanghai, No. 200020, building 918 Patentee before: Shanghai Huahong (Group) Co., Ltd. |
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