CN121153103A - 清洗液、清洗方法以及半导体元件的制造方法 - Google Patents

清洗液、清洗方法以及半导体元件的制造方法

Info

Publication number
CN121153103A
CN121153103A CN202480033606.7A CN202480033606A CN121153103A CN 121153103 A CN121153103 A CN 121153103A CN 202480033606 A CN202480033606 A CN 202480033606A CN 121153103 A CN121153103 A CN 121153103A
Authority
CN
China
Prior art keywords
cleaning
group
acid
cleaning liquid
atom
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202480033606.7A
Other languages
English (en)
Chinese (zh)
Inventor
岩本纮明
铃木步
濑户畅介
大崎爱姬子
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
AGC Inc
Original Assignee
Asahi Glass Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asahi Glass Co Ltd filed Critical Asahi Glass Co Ltd
Publication of CN121153103A publication Critical patent/CN121153103A/zh
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D17/00—Detergent materials or soaps characterised by their shape or physical properties
    • C11D17/08—Liquid soap, e.g. for dispensers; capsuled
    • C—CHEMISTRY; METALLURGY
    • C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
    • C11D7/02—Inorganic compounds
    • C11D7/04—Water-soluble compounds
    • C11D7/08—Acids
    • C—CHEMISTRY; METALLURGY
    • C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
    • C11D7/22—Organic compounds
    • C—CHEMISTRY; METALLURGY
    • C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
    • C11D7/22—Organic compounds
    • C11D7/32—Organic compounds containing nitrogen
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P52/00—Grinding, lapping or polishing of wafers, substrates or parts of devices

Landscapes

  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Wood Science & Technology (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Detergent Compositions (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
CN202480033606.7A 2023-06-14 2024-06-12 清洗液、清洗方法以及半导体元件的制造方法 Pending CN121153103A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2023097860 2023-06-14
JP2023-097860 2023-06-14
PCT/JP2024/021389 WO2024257814A1 (ja) 2023-06-14 2024-06-12 洗浄液、洗浄方法、及び半導体素子の製造方法

Publications (1)

Publication Number Publication Date
CN121153103A true CN121153103A (zh) 2025-12-16

Family

ID=93852186

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202480033606.7A Pending CN121153103A (zh) 2023-06-14 2024-06-12 清洗液、清洗方法以及半导体元件的制造方法

Country Status (4)

Country Link
JP (1) JPWO2024257814A1 (cg-RX-API-DMAC7.html)
CN (1) CN121153103A (cg-RX-API-DMAC7.html)
TW (1) TW202506982A (cg-RX-API-DMAC7.html)
WO (1) WO2024257814A1 (cg-RX-API-DMAC7.html)

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
MY162607A (en) * 2007-05-17 2017-06-30 Entegris Inc New antioxidants for post-cmp cleaning formulations
EP3197945B1 (en) * 2014-09-23 2020-10-21 3M Innovative Properties Company Nitrogen containing hydrofluoroethers and methods of using same
WO2019181435A1 (ja) * 2018-03-22 2019-09-26 富士フイルム株式会社 ろ過装置、精製装置、薬液の製造方法
US11560533B2 (en) * 2018-06-26 2023-01-24 Versum Materials Us, Llc Post chemical mechanical planarization (CMP) cleaning
WO2023095806A1 (ja) * 2021-11-25 2023-06-01 Ａｇｃ株式会社 化合物、組成物、表面処理剤、コーティング液、物品、及び物品の製造方法

Also Published As

Publication number Publication date
TW202506982A (zh) 2025-02-16
JPWO2024257814A1 (cg-RX-API-DMAC7.html) 2024-12-19
WO2024257814A1 (ja) 2024-12-19

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