CN1207613C - Electrooptics device and electronic apparatus - Google Patents
Electrooptics device and electronic apparatus Download PDFInfo
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- CN1207613C CN1207613C CNB02144496XA CN02144496A CN1207613C CN 1207613 C CN1207613 C CN 1207613C CN B02144496X A CNB02144496X A CN B02144496XA CN 02144496 A CN02144496 A CN 02144496A CN 1207613 C CN1207613 C CN 1207613C
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1345—Conductors connecting electrodes to cell terminals
- G02F1/13454—Drivers integrated on the active matrix substrate
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- A—HUMAN NECESSITIES
- A44—HABERDASHERY; JEWELLERY
- A44C—PERSONAL ADORNMENTS, e.g. JEWELLERY; COINS
- A44C25/00—Miscellaneous fancy ware for personal wear, e.g. pendants, crosses, crucifixes, charms
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1335—Structural association of cells with optical devices, e.g. polarisers or reflectors
- G02F1/133509—Filters, e.g. light shielding masks
- G02F1/133512—Light shielding layers, e.g. black matrix
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
- G02F1/136209—Light shielding layers, e.g. black matrix, incorporated in the active matrix substrate, e.g. structurally associated with the switching element
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01R—ELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
- H01R31/00—Coupling parts supported only by co-operation with counterpart
- H01R31/06—Intermediate parts for linking two coupling parts, e.g. adapter
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- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R1/00—Details of transducers, loudspeakers or microphones
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/133388—Constructional arrangements; Manufacturing methods with constructional differences between the display region and the peripheral region
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/13606—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit having means for reducing parasitic capacitance
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
- G02F1/13624—Active matrix addressed cells having more than one switching element per pixel
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- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- Mathematical Physics (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Liquid Crystal (AREA)
- Acoustics & Sound (AREA)
- Signal Processing (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
Abstract
An electro-optical device includes a display electrode disposed in an image display region of a TFT array substrate, a pattern portion including at least one of wiring and a circuit element connected to the display electrode directly or through a pixel switching element and provided in a frame region, which defines the periphery of the image display region, and a lower shielding film for covering the TFT array substrate side of at least a portion of the pattern portion. Therefore, in the electro-optical device such as a liquid crystal device, a light-dark pattern due to the wiring and the circuit element provided in the frame region can be prevented from being projected near the edge of a display image.
Description
Technical field
The invention belongs to the technical field of electro-optical devices such as liquid-crystal apparatus, especially belong to the electro-optical device of the architrave photomask of being furnished with the specified image viewing area and be equipped with the technical field of the electronic equipment of this electro-optical device.
Background technology
In this electro-optical device, the element arrays substrate that conversion elements such as thin film transistor (TFT) that demonstration such as pixel electrode and strip shaped electric poles is used with various wirings such as electrode, data line and sweep trace, pixel transitions (following be called TFT under the suitable occasion) and thin film diode (following be called TFD under suitable occasion) etc. are formed, the opposed substrate that is formed with comprehensive opposite electrode that forms strip, photomask etc. is by arranged opposite.Between these pair of substrate, electrooptics materials such as liquid crystal are besieged by encapsulant, disposed the image display area that shows with electrode and have been positioned on the position of comparing more approaching central authorities with the sealing area that the has the sealing material on-chip zone of liquid crystal etc. (promptly towards).Especially here, from the plane, along under the architrave form of the inboard profile of sealing area, the architrave zone of image display area is by being prescribed with the same film that is set at such as above-mentioned opposed on-chip photomask (that is, from looking with the opposed direction of image display area).
In addition, in architrave zone and be arranged on the element arrays substrate of its peripheral outer peripheral areas, the so-called peripheral circuit internally-arranged type electro-optical device that is provided with peripheral circuits such as scan line drive circuit, data line drive circuit, sample circuit, check circuit also is general.
Therefore, in the architrave zone, exist from the regional to the periphery wiring of drawing of image display area.And under the occasion that the part of the peripheral circuits such as sample circuit that are connected with this wiring is set in the architrave zone, in the architrave zone, there is the circuit component of a part that constitutes this peripheral circuit.That is, in the architrave zone, there is the drafting department of forming by wiring and circuit component.
Electro-optical device with above-mentioned formation, according in being provided with the light-proofness mounting cup of the display window corresponding with image display area, the edge of display window is positioned near the principle of center line in architrave zone and is accommodated.
Summary of the invention
Yet,,, make conducting films such as Al film be formed pattern by the drafting department that wiring that is present in the on-chip architrave of element arrays zone and circuit component are formed according to above-mentioned electro-optical device.Therefore, especially strong and contain under the occasion of a large amount of oblique compositions at the incident light that is used for projector etc. and so on, in its surface reflection, incident light passes through between the slit of drafting department incident light simultaneously according to the reflectivity of drafting department.Like this, at the light of this drafting department reflection, be reflected by the architrave photomask that forms by opposed on-chip Cr (chromium) etc.In addition, (i) like this at inner face reflected light that the architrave photomask is reflected with the light after seeing through drafting department, reflected light by the backside reflection of element arrays substrate, (ii) the inner face reflected light that is reflected by this architrave photomask equally and see through drafting department after light, by the polarized light piece on the emitting side that is installed in electro-optical device, phase difference film, the reflected light of optical parameters such as dustproof glass reflection, (iii) a plurality of electro-optical devices are combined into light valve, by penetrating as other electro-optical device under the occasion of multiple-piece projector, the light that returns by combining optical, the inner face reflected light that generates by reflection such as drafting department and architrave photomask etc., final with penetrate light and mix and penetrate from this electro-optical device.
There is following point in The above results: with reflection in the drafting department and see through corresponding LO-pattern (such as, be furnished with under the occasion of many wirings the LO-pattern of striated etc.) will near the edge of display image, show.In addition, the surface of the drafting department of forming with circuit component by wiring, along with the uneven of its round floor and according to pattern form self, owing to exist concavo-convex, thereby by the inner face reflected light of relevant convex-concave surface reflection, also form LO-pattern by the interference of light effect, thereby LO-pattern final and that ejaculation light mixes, will be more obvious according to the structure of drafting department.
Otherwise, for blanking by the LO-pattern that the reflection of the inner face of above-mentioned wiring is mirrored, be necessary that the principle in the big many architrave zone of more shared than the drafting department of answering blanking according to the rules substrate region forms wide cut architrave photomask.Consequently, be difficult to the satisfied basic demand of this electro-optical device of the image display area of expansion as far as possible in limited substrate region of guaranteeing.And, if consider back light and inner face reflected light, by surface reflection towards element arrays substrate one side of architrave photomask, the light that final conduct has LO-pattern mixes with penetrating light, and then the practice by the complete blanking LO-pattern of this architrave photomask of simple expansion in theory also is difficult.
The present invention has considered the problems referred to above point, and its problem provides and can prevent by being set at electro-optical device that the caused LO-pattern of drafting department that wiring in the architrave zone and circuit component form mirrored in the outside of display image and the various electronic equipments of being furnished with electro-optical device like this.
The 1st electro-optical device of the present invention is furnished with for solving above-mentioned problem: be configured in the demonstration electrode in the on-chip image display area; Stipulate the architrave photomask on every side of above-mentioned image display area; By pixel transitions with element or directly by the distribution that is connected with electrode with this demonstration; Formation provides the circuit component of the peripheral circuit that picture signal uses with electrode to above-mentioned demonstration; Between above-mentioned architrave photomask and above-mentioned substrate, be arranged in the drafting department zone, that constitute by at least one side of above-mentioned distribution and foregoing circuit element of above-mentioned architrave photomask; In the zone of above-mentioned architrave photomask, overlapping with above-mentioned drafting department, the downside photomask that buries the regional interior of above-mentioned architrave photomask and cover from above-mentioned substrate side.
According to the 1st electro-optical device of the present invention, drawn from image display area such as wirings such as data line, sweep traces, be configured in the architrave zone.Perhaps, replace this method or added, the transistor or the circuit components such as TFT, TFD that constitute at least a portion of the peripheral circuit that is connected with derivative wiring are configured in the architrave zone.Like this,, utilize the conversion of pixel such as TFT with element or directly picture signal etc. is sent to pixel electrode etc. and show and use electrode,, can realize driven with active matrix and passive matrix driving etc. by said process by being located at wiring and the circuit component in this architrave zone.
At this moment, especially stronger at the incident light that is used for projector etc. and so on, and contain under the occasion of a large amount of oblique compositions, according to the reflectivity that is formed the drafting department of pattern such as conducting films such as Al films, incident light is reflected on this surface, or incident light passes through between the slit of drafting department.In the part in architrave zone, by the downside photomask, the drafting department by wiring and circuit component are formed is covered from substrate side at least in part yet in the present invention.Like this, by reflection of this drafting department or the incident light that between the slit of drafting department, sees through through inner face reflection back or final directly with show the light quantity that mixes with ejaculation light, only reduce by this downside photomask absorption or the part that is reflected.More particularly, by the light after the drafting department reflection, even, near the architrave zone, propagate to substrate side by by opposed on-chip architrave photomask reflection, have only the part that is absorbed or reflect by the downside photomask, the light quantity that is mixed in the ejaculation light that shows usefulness obtains reducing.For the inner face reflected light that reflects by the architrave photomask with through the light behind the drafting department, the reflected light that optical parameters such as the back side by the element arrays substrate and polarized light piece, phase difference film, dustproof glass reflection back forms too, have only the part that is absorbed or reflect by the downside photomask, the light quantity that is mixed in the ejaculation light that shows usefulness obtains reducing.In addition, for the back light under the occasion of multiple-piece projector, by the inner face reflected light that forms after the further reflection such as drafting department and architrave photomask too, have only the part that is absorbed or reflect by the downside photomask, the interior light quantity of ejaculation light that is mixed in final demonstration usefulness obtains reducing.
Especially, the surface of the drafting department of forming with circuit component by wiring, along with the uneven of its round floor or according to this pattern form self, owing to exist concavo-convex, thereby the inner face reflected light that is reflected by relevant convex-concave surface also forms LO-pattern by the interference of light effect, by absorbing or reflection, can reduce this LO-pattern by the downside photomask.
According to above-mentioned electro-optical device of the present invention, it is caused to reduce the drafting department of being made up of wiring that is set at the architrave zone and circuit component, the LO-pattern that mirrors in the outside of display image.Therefore, there is no need to enlarge the width of architrave photomask near the edge of display image, can in limited substrate region, guarantee bigger image display area for the LO-pattern that blanking is mirrored.
In addition according to electro-optical device of the present invention because the downside photomask, not in whole architrave zone, and with the opposed part of drafting department in be set up, thereby compare with the occasion that in whole architrave zone, forms, can reduce the generation of stress.
Under a kind of pattern of the 1st electro-optical device of the present invention, in above-mentioned architrave zone, also is furnished with the architrave photomask of the upside that is configured in above-mentioned drafting department.
According to this pattern, according to by such as the built-in photomask that on substrate, forms and, forming at the photomask that is formed on by the opposed substrate of arranged opposite on the substrate by electrooptics materials such as liquid crystal,, can stipulate the architrave zone at the architrave photomask that the upside of drafting department is configured.Especially, the LO-pattern that is mirrored in the outside of the display image that takes place according to drafting department for inner face reflected light in the reflection of the inner face of this architrave photomask, the downside photomask of downside that can be by being configured in drafting department reduces.
Under other pattern of the 1st electro-optical device of the present invention, above-mentioned downside photomask on the flat surfaces of above-mentioned substrate, is formed by straight or smooth underlayer insulating film.
According to this pattern, because the downside photomask on the flat surfaces of substrate, is formed by straight or smooth underlayer insulating film, thereby produces concavo-convex on the surface of downside photomask hardly.Therefore, a light and the catoptrical part of inner face returned from the rear side of substrate, after if be reflected by the downside photomask, even sneak in the ejaculation light of final demonstration usefulness, because light by this smooth downside photomask reflection, follow interference hardly, thereby can reduce because the caused LO-pattern of interference effect.
Under other pattern of the 1st electro-optical device of the present invention, the foregoing circuit element, comprise the 1st transistor, above-mentioned demonstration electrode, be made of pixel electrode, this electro-optical device also is furnished with the 2nd transistor that is connected with pixel electrodes with element as above-mentioned pixel transitions, above-mentioned wiring is connected with above-mentioned the 2nd transistor.
According to this pattern, such as sample circuit, scan line drive circuit, data line drive circuit, check circuit, pre-charge circuit etc., by comprising at least a portion that the 1st transistor is configured in the peripheral circuit in the architrave zone simultaneously, provide picture signal to the 2nd transistor.Like this, pixel electrode is carried out conversion and control, can implement driven with active matrix by utilizing the 2nd transistor.
Under other pattern of the present invention's the 1st electro-optical device,, be provided with same film with above-mentioned downside photomask at the downside of the above-mentioned the 2nd transistorized channel region at least.
According to this pattern, because the 2nd transistorized channel region as the pixel transitions element that is connected with pixel electrode, covered from downside by the downside photomask, thereby can effectively prevent, and prevent the state of affairs that the 2nd characteristics of transistor changes owing to back light to this channel region incident the light leak electric current takes place.In addition, for incident light, if can be by by carrying out shading then special problem can not take place at the film formed wirings of shading such as the built-in photomask that is provided with in addition on the substrate, Al film, the photomask that on opposed substrate, is provided with etc. from last side direction the 2nd transistorized channel region incident.Therefore especially, since be used for to the downside photomask of the 2nd transistor shading in this pixel portions and, be used to prevent the downside photomask of the LO-pattern in the architrave zone, can form by same film, form simultaneously by same manufacturing process, thereby can simplify on-chip lit-par-lit structure and manufacture process.
Under other pattern of the 1st electro-optical device of the present invention, above-mentioned downside photomask is made of light absorping film.
According to this pattern, after back light incides on the substrate side surface of downside photomask, by optical absorption, this reflected light decay.Therefore, even this reflected light is sneaked in the ejaculation light of final demonstration usefulness, also can decay based on this catoptrical LO-pattern.
Under this pattern, above-mentioned light absorping film can contain at least one side of polysilicon film and refractory metal film.
According to this formation, can be set to light absorping film the downside of drafting department more simply with splendid optical absorption.
Under other pattern of the 1st electro-optical device of the present invention, above-mentioned downside photomask is formed island.
According to this pattern, form by pressing the island disjunction, especially compare with the occasion that in whole architrave zone, forms the downside photomask, can alleviate the stress that existence produced owing to this downside photomask, can improve the reliability of fabrication yield and device.
Under other pattern of the 1st electro-optical device of the present invention, above-mentioned downside photomask is made of conducting film.
According to this pattern, the downside photomask, owing to constitute by conducting film, thereby not only can be used as photomask, also can be used as uses such as wiring.
Under the pattern that this downside photomask is made of conducting film, can adopt following formation: above-mentioned downside photomask can be provided set potential at least in part.
Under this formation, can prevent from advance to feed through on wiring and the circuit component in the harmful effect of the potential change of architrave zone inner underside photomask.
Perhaps this downside photomask by the film formed pattern of conduction under, be laminated to the part of above-mentioned the 1st transistorized downside in the above-mentioned downside photomask at least, can have floating potential.
Under this formation pattern, owing to be laminated to the downside photomask part of the 1st transistorized downside, have floating potential, thereby can prevent the potential change of this downside photomask effectively, the 1st characteristics of transistor is produced harmful effect.
Especially under this occasion, can adopt following formation: in the above-mentioned downside photomask at least in the stacked part of the above-mentioned the 1st transistorized downside, can comprise according to make with above-mentioned downside photomask in the opposed part of the above-mentioned the 1st transistorized source electrode and with above-mentioned downside photomask in the part of above-mentioned the 1st transistor drain electrode contraposition principle disconnected from each other be configured to the part of island.
According to this formation, because island part according to the downside photomask, in the downside photomask with the opposed part of source electrode, with disconnected from each other with the opposed part of drain electrode, thereby based on the stray capacitance between the stray capacitance between downside photomask and the source electrode and downside photomask and the drain electrode, the capacitive coupling between source electrode and the drain electrode can reduce.Therefore, in the 1st transistor, can obtain higher transistor characteristic.
Under the pattern that above-mentioned downside photomask is made up of conducting film, can adopt following formation: in above-mentioned downside photomask at least in the stacked part of the above-mentioned the 1st transistorized downside, according to make with above-mentioned downside photomask in the opposed part of the above-mentioned the 1st transistorized source electrode, with the principle of separating the slit is set with the part of above-mentioned the 1st transistor drain electrode contraposition in the above-mentioned downside photomask.
According to this formation, because with the opposed part of source electrode in the downside photomask, with with the downside photomask in the opposed part of drain electrode, by the slit by disconnected from each other, thereby based on the stray capacitance between the stray capacitance between downside photomask and the source electrode and downside photomask and the drain electrode, the capacitive coupling between source electrode and the drain electrode can reduce.Therefore, in the 1st transistor, can obtain higher transistor characteristic.
Under the pattern that above-mentioned downside photomask is made of conducting film, can adopt following formation: above-mentioned downside photomask, can be not stacked at the above-mentioned the 1st transistorized channel region downside.
According to this formation, because the downside photomask is not configured in the 1st transistorized channel region downside, thereby can effectively prevents the potential change of this downside photomask, to the adverse effect of the 1st characteristics of transistor.
Under the pattern that above-mentioned downside photomask is made of conducting film, can adopt following formation: be laminated in the part of the above-mentioned the 1st transistorized channel region downside in the above-mentioned downside photomask at least, can have the above-mentioned the 1st transistorized grid potential.
According to this formation,, have the 1st transistorized grid potential, thereby, can partly form back of the body raceway groove by this downside photomask by the 1st transistorized gate electrode is configured to upside owing to be laminated in the downside photomask part of the 1st transistorized channel region downside.Thereby can improve the 1st characteristics of transistor.
Under other pattern of the 1st electro-optical device of the present invention, above-mentioned downside photomask is only to be formed in the zone of the outer thoughtful peripheral side of above-mentioned image display area by predefined Rack according to the incident angle that is irradiated to the incident light part in the above-mentioned architrave zone.
According to this pattern, in projector purposes such as enlarging projection, when the incident angle that is irradiated to the incident light part in the architrave zone increases, make according to corresponding with this incident angle by the downside photomask of predefined Rack in formation in the zone of the outer thoughtful peripheral side of image display area.That is, in the architrave zone, also can form the downside photomask only for to prevent in the necessary zone of LO-pattern according to incident angle, thus favourable.
But, only in the downside photomask that covers above-mentioned drafting department, can not obtain fully sometimes in the display image outside as the object of the invention, the effect that original any image that should not be shown is mirrored.That is, the zone beyond the formation zone of drafting department, in other words, in the zone that does not form any wiring and circuit component etc., because without any shade, thereby the state of affairs that incident light in statu quo passes through takes place.Like this, the light of " in statu quo passing through " arrives the outer rear flank of display image, may mirror fuzzy light image around this image, diminishes the aesthetic property of image.
So the 2nd electro-optical device of the present invention for solving above-mentioned problem, is furnished with: be configured in the demonstration electrode in the on-chip image display area; Stipulate the architrave photomask on every side of above-mentioned image display area; By pixel transitions with element or be directly connected in above-mentioned demonstration distribution with electrode; Formation provides the circuit component of the peripheral circuit that picture signal uses with electrode to above-mentioned demonstration; Between above-mentioned architrave photomask and above-mentioned substrate, be positioned at the drafting department zone, that constitute by at least one side of above-mentioned distribution and foregoing circuit element of above-mentioned architrave photomask; In the zone of above-mentioned architrave photomask, overlapping with above-mentioned drafting department, bury in the zone of above-mentioned architrave photomask and from above-mentioned substrate side cover by the downside photomask of the island of a plurality of separation.
It is desirable to also to have in the zone in addition, formation zone of the above-mentioned drafting department in the zone of above-mentioned architrave photomask and be formed, the 2nd downside photomask that is formed as same film with above-mentioned downside photomask.
According to the 2nd electro-optical device of the present invention, drawn from image display area such as wirings such as data line, sweep traces, be configured in the architrave zone.Perhaps, replace this method or added, the transistor or the circuit components such as TFT, TFD that constitute at least a portion of the peripheral circuit that is connected with derivative wiring are configured in the architrave zone.Like this, by being arranged on wiring and the circuit component in this architrave zone, utilize the conversion of pixel such as TFT with element or directly picture signal etc. is sent to pixel electrode etc. and show and use electrode,, can realize driven with active matrix and passive matrix driving etc. by said process.
At this moment, especially strong and contain under the occasion of a large amount of oblique compositions at the incident light that is used for projector etc. and so on, as mentioned above, reflection of light in the generation drafting department and light from passing through between the slit of drafting department, they will diminish aesthetic property after being reflected on the image, zone beyond the formation zone of the drafting department in the architrave zone in addition, promptly do not form the zone of any wiring and circuit component etc., because without any shade, thereby the state of affairs that incident light in statu quo passes through takes place.
Yet in the present invention at first, through passing through of reflection of light in the former drafting department or light, they sneak into the interior possibility of light of composing images, can reduce by the light absorption or the light reflection of downside photomask.This record with above-mentioned relevant the 1st electro-optical device is consistent.Therefore especially in the present invention, in the zone beyond drafting department forms the zone,, the light of above-mentioned " former state is passed through " can be covered, that is, this light can be absorbed or reflect by the 2nd downside photomask by forming the 2nd downside photomask.Therefore, according to the present invention, can prevent the state of affairs that occurs fuzzy light image around image in advance, it is good to demonstrate aesthetic property, high-quality image.
In addition, form because downside photomask and the 2nd downside photomask are used as same film, thereby can realize the simplification of manufacturing process or cheapization of manufacturing cost etc.
The 3rd electro-optical device of the present invention is furnished with for solving above-mentioned problem: be configured in the demonstration electrode in the on-chip image display area; Stipulate the architrave photomask on every side of above-mentioned image display area; By pixel transitions with element or be directly connected in above-mentioned demonstration distribution with electrode; Formation provides the circuit component of the peripheral circuit that picture signal uses with electrode to above-mentioned demonstration; Between above-mentioned architrave photomask and above-mentioned substrate, be arranged in the drafting department zone, that constitute by at least one side of above-mentioned distribution and foregoing circuit element of above-mentioned architrave photomask; In the zone of above-mentioned architrave photomask, overlapping with above-mentioned drafting department, the downside photomask that buries the regional interior of above-mentioned architrave photomask and cover from above-mentioned substrate side; Cover as the 2nd transistorized at least channel region of above-mentioned pixel transitions from above-mentioned substrate side with element, be used as with the same film formed zone of above-mentioned downside photomask in photomask; In at least a portion of the outer peripheral areas of the periphery that is arranged in the above-mentioned image display area that comprises above-mentioned architrave zone, be used as with above-mentioned downside photomask and above-mentioned zone in photomask outside the same film formed zone of photomask.
According to the 3rd electro-optical device of the present invention, drawn from image display area such as wirings such as data line, sweep traces, be configured in the architrave zone.Perhaps, replace this method or added, the transistor or the circuit components such as TFT, TFD that constitute at least a portion of the peripheral circuit that is connected with derivative wiring are configured in the architrave zone.Like this,, utilize the conversion of pixel such as TFT with element or directly picture signal etc. is sent to pixel electrode etc. and show and use electrode,, can realize driven with active matrix and passive matrix driving etc. by said process by being located at wiring and the circuit component in this architrave zone.
Especially in the present invention, on substrate, form i.e. downside photomask, photomask in the zone, the outer photomask in zone all as same film formed three kinds of photomasks.Downside photomask wherein, above-mentioned the 1st electro-optical device and various pattern thereof are described if any closing, and can avoid through the light after the reflection in the drafting department, or the light by drafting department etc. are sneaked in the image.Like this, can reduce near the LO-pattern that mirrors the display image edge.
On the other hand, by photomask in the zone, can improve as the 2nd transistorized photostability of the image transitions that in image display area, forms with element.That is,, be formed, can prevent light incident, suppress the generation of light leak electric current wherein at this channel region according to the principle that covers the 2nd transistorized channel region at least from substrate side by photomask in the zone.Like this, can avoid in advance changing by the 2nd characteristics of transistor, or the image flicker that causes such as running shakiness etc.Like this, can further make the display image high quality.
In addition, in the present invention, the outer peripheral areas in the periphery that is arranged in image display area forms the outer photomask in zone.Photomask outside this zone, with the difference that comprises the above-mentioned resulting notion of downside photomask be that the formation zone of photomask is not limited in the architrave zone outside this zone.By the existence of photomask outside this zone, can cover propagation with the light of the main periphery (that is outer peripheral areas) by image display area.Like this, according to the present invention, as main effect, the state of affairs that can more effectively prevent to produce fuzzy light image around image takes place, and can demonstrate high-quality image attractive in appearance.
Under this external the present invention, because the outer photomask of photomask and zone is all as same film in downside photomask, the zone, promptly form simultaneously in the stage, thereby compare, can realize the simplification of manufacturing process or cheapization of manufacturing cost etc. with the occasion that forms these photomasks etc. respectively in manufacturing process.
Under a kind of pattern of the 3rd electro-optical device of the present invention, the outer photomask of above-mentioned zone is included in the zone in addition, formation zone of the above-mentioned drafting department above-mentioned architrave zone in, the 2nd downside photomask that is formed as the same film with above-mentioned downside photomask.
According to this pattern, the 2nd downside photomask of formation in the zone beyond the formation zone by drafting department in the architrave zone, only can prevent by above-mentioned downside photomask the passing through of the light that can not prevent fully.That is, can prevent in the zone that does not form by wiring and the drafting department that constitutes of circuit component unconditionally the passing through of incident light.Therefore,, can more effectively avoid in advance fuzzy light image around image, occurring, can demonstrate high-quality image attractive in appearance according to the present invention.
Under other pattern of the 3rd electro-optical device of the present invention, in above-mentioned outer peripheral areas, also be furnished be used for by with the peripheral circuit that above-mentioned demonstration is driven with electrode when above-mentioned drafting department is connected, the outer photomask of above-mentioned zone is formed between to each wiring that constitutes above-mentioned peripheral circuit and between each circuit component and in the zone beyond the formation zone of at least one group of the 2nd drafting department that is connected between wiring and the circuit component.
According to this pattern, between each wiring that connects and composes peripheral circuit and between each circuit component and in the zone beyond the formation zone of at least one group the 2nd drafting department between wiring and circuit component, form the outer photomask of above-mentioned zone.Main points are that the outer photomask in zone under this pattern in outer peripheral areas, comprises the part that is formed according to the form that the part " embedding " that does not form any key element is originally got up.Because the existence of photomask outside this zone, can more reduce the possibility of the light that generation " in statu quo " passes through.
In addition, under this pattern, in constituting the part that each connects up and each circuit component is formed of peripheral circuit, by this each wiring and each circuit component, originally, owing to the state of affairs that light " in statu quo " passes through does not take place (promptly, because these wirings and circuit component, the propagation of light is hindered by screening to a certain degree), thereby the related outer photomask in zone of this pattern, can on suitable and necessary position, be formed.Like this, narrowization relatively of the outer photomask area in zone can be realized, the internal stress effect of this photomask can be reduced.
In addition, under this pattern, though speak of the occasion that in " zone beyond the formation zone of the 2nd drafting department ", forms photomask outside the zone specially, but according to concrete occasion, even comprising this zone, in " the formation zone of the 2nd drafting department ", also can be used as the pattern that forms the outer photomask in zone.According to this pattern, if form the outer photomask in zone comprehensively, to produce the shortcoming make more obviousization of internal stress problem easily, but since in above-mentioned the 2nd drafting department above-mentioned relatively drafting department above-mentioned reflection of light also takes place or pass through etc., thereby we can say to have corresponding meaning.That is, avoid in the 2nd drafting department reflection in advance or the light that sees through is sneaked into meaning in the light of composing images, be in the formation zone of the 2nd drafting department, to form photomask outside the zone.Thereby has certain meaning.Like this, as more directly saying, above-mentioned occasion is said that becoming is that " the outer photomask in zone is formed according to the form that covers whole outer peripheral areas " is then comparatively appropriate.
Under other pattern of the of the present invention the 2nd or the 3rd electro-optical device, the outer photomask of above-mentioned zone is formed island.
According to this pattern because the outer photomask of above-mentioned zone is formed island, thereby as by with the contrast of the photomask that is formed comprehensive beta shape can find out, can reduce its internal stress.Like this, can avoid the outer photomask in zone in advance, because self internal stress such as damages at the state of affairs, and this stress is to the effect of other inscape of existence around the photomask this zone outside (such as, interlayer dielectric) etc., the states of affairs such as generation crackle.
Especially under this pattern, the distance between the adjacent island is below 4 microns.
Constitute according to this, mean that the distance between the outer photomask in zone that has been formed island can suitably be set.By hereinafter it being explained.At first, photomask forms under the occasion of island outside the zone, will produce the possibility that light passes through from the gap between this island.Such as, consider a kind of occasion of from this slit, passing through from the back light of substrate back incident.Under this occasion, should by after light by being in reflection such as behind architrave photomask and during once more by this slit, might sneaking in the light of composing images.Yet, under this pattern, because the distance between the island is below 4 microns, thereby hardly the above-mentioned state of affairs can take place.That is, narrower because the size in this gap is below 4 microns, thereby can take place hardly by the light behind this gap, by after being located at its key element reflection behind, pass through this gap once more.In addition, though also should consider the incident light of irrevocable light certainly, directly,,, thereby can be suppressed to Min. to the influence that image is produced because this gap has only less interval even under this occasion by the occasion in this gap.
Like this, under this pattern, can obtain the action effect that is produced that forms, the action effect that promptly so-called internal stress descends by above-mentioned island, simultaneously can also enjoy the action effect that photomask had originally almost not a halfpenny the worsely, promptly prevent from around image, to take place the action effect of light image.
In addition, according to above-mentioned condition, distance between the island of the photomask that the present invention relates to, if can for 2 microns with next better.
Under other pattern of the of the present invention the 2nd or the 3rd electro-optical device, also be furnished with: the mounting cup that when this electro-optical device is installed, has formed the display window corresponding with above-mentioned image display area, at least one side of the outer photomask of above-mentioned the 2nd downside photomask and above-mentioned zone, being formed to small part in regional between the edge of the edge of above-mentioned display window and above-mentioned image display area.
According to this pattern, be equipped with according to the mounting cup that the principle of image display area is equipped with display window from the exterior face of electro-optical device.That is, the zone that has the printing opacity possibility in fact is the display window part that comprises image display area, for part in addition, is covered the propagation of light by the material that constitutes this mounting cup (such as metal material such as magnesium or its alloy etc. preferably).This means, to the part beyond this display window, for by the light after the above-mentioned drafting department reflection, or the existence of the light by drafting department, or furtherly, the existence etc. that forms the light that passes through of zone beyond the zone from drafting department in statu quo not have necessity of special consideration.But, the part for beyond the image display area in the display window part still is necessary to do above-mentioned consideration.
Like this, under this pattern, be formed at least in part in the zone of at least one side (following abbreviate as sometimes " photomask that the present invention relates to ") between display window edge and image display area edge of the outer photomask of the 2nd downside photomask and zone, can implement to reflect the effective shading of above-mentioned mechanism thus.In addition, meanwhile, it means that a photomask area by necessity that the present invention relates to is suitably formed to get final product, and can realize narrowization relatively of this area.Therefore, the internal stress of this photomask inside can be further reduced, the reliability of device can be improved.
In addition, for the outer photomask of photomask or zone in the downside photomask in above-mentioned the present invention the 2nd or the 3rd electro-optical device, the 2nd downside photomask, the zone, can have with the 1st above-mentioned electro-optical device in the identical feature of various features that had of downside photomask.Promptly, form these photomasks on smooth substrate or underlayer insulating film, perhaps these photomasks are made up of light absorping film, especially contain at least one side in polysilicon film or the refractory metal film, or these photomasks are made up of conducting film, or have set potential or floating potential etc.Like this, in the of the present invention the 2nd or the 3rd electro-optical device, also can enjoy and above-mentioned same action effect.
Under other pattern of the of the present invention the 2nd or the 3rd electro-optical device, in above-mentioned architrave zone, also be furnished with the architrave photomask of the upside that is configured in above-mentioned drafting department, simultaneously, this architrave photomask is made of aluminium.
According to this pattern, can utilize by such as the built-in photomask that on substrate, forms and, form at the photomask that forms on by the opposed substrate of arranged opposite on the substrate by electrooptics materials such as liquid crystal, be configured in the architrave photomask of the upside of drafting department, regulation architrave zone.
In addition, especially under the present invention, because above-mentioned architrave photomask contains aluminium at least, thereby is easy to produce reflection of light, in electro-optical device inside heat storage does not take place.Like this, can guarantee such as image transitions with the stable running of the thin film transistor (TFT) of element etc. etc., can realize the utilization of longer stable electro-optical device.
But, constitute the architrave photomask by utilizing the strong material of above-mentioned luminous reflectanc, in the generation of the above-mentioned LO-pattern that around image, is mirrored, or near the generation that fuzzy light image occurs of image, will be more remarkable.
Yet under the present invention, the LO-pattern in that the outside of the display image that is taken place according to drafting department by the inner face reflected light of the inner face of this architrave photomask reflection is mirrored can reduce by the downside photomask that is configured in the drafting department downside.In addition, even at inner face reflected light,,, by being furnished with the 2nd downside photomask, or the outer photomask in zone, can suppress near the generation of the fuzzy light image of the appearance image border according to the present invention in statu quo by under the occasion of substrate by the reflection of the inner face of architrave photomask.
Electronic equipment of the present invention is furnished with the electro-optical device (also comprising its various patterns) of the invention described above for solving above-mentioned problem.
Electronic equipment of the present invention, owing to be furnished with the electro-optical device of the invention described above, thereby can not mirrored in display image by being set at the caused LO-pattern of drafting department that wiring in the architrave zone and circuit component form, can realize having projection type image display apparatus, LCD TV, portable phone, electronics account-book, word processor that high quality graphic shows, various electronic equipments such as find a view type or monitor direct viewing type video tape recorder, workstation, videophone, POS terminal, touch dish.
By the embodiment of following explanation, can understand above-mentioned effect of the present invention and other strong point.
Description of drawings
Fig. 1 watches the tft array substrate the electro-optical device of embodiment of the present invention 1 and the planimetric map of each inscape of forming thereon from opposed substrate side.
Fig. 2 is H-H ' sectional drawing of Fig. 1.
Fig. 3 is that expression constitutes the equivalent electrical circuit of various elements set in rectangular a plurality of pixels of the image display area in the electro-optical device of embodiment of the present invention 1, wiring etc. and the block scheme of peripheral circuit.
Fig. 4 amplifies near the part sectional drawing the CR part in the presentation graphs 2.
Fig. 5 be amplify in the expression comparative example with the CR part near the part sectional drawing of correspondence position.
Fig. 6 is that the part of architrave photomask in the position shown in Figure 4, data line lead-out wiring and downside photomask is plucked the part oblique view that selects diagrammatic sketch.
Fig. 7 is that the part of architrave photomask in the comparative example, data line lead-out wiring is plucked the part oblique view that selects diagrammatic sketch.
Fig. 8 is the planimetric map that has formed a plurality of adjacent pixels groups of the tft array substrate of data line, sweep trace, pixel electrode etc. in the electro-optical device of embodiment.
Fig. 9 is E-E ' sectional drawing of Fig. 8.
Figure 10 is the amplification view that constitutes the complementary transistor of the peripheral circuit under the embodiment of the present invention 2.
Figure 11 is A-A ' sectional drawing of Figure 10.
Figure 12 is the amplification view that constitutes the complementary transistor of the peripheral circuit under the embodiment of the present invention 3.
Figure 13 is B-B ' sectional drawing of Figure 12.
Figure 14 is the amplification view that constitutes the complementary transistor of the peripheral circuit under the embodiment of the present invention 4.
Figure 15 is C-C ' sectional drawing of Figure 14.
Figure 16 is the amplification view that constitutes the complementary transistor of the peripheral circuit under the embodiment of the present invention 5.
Figure 17 is D-D ' sectional drawing of Figure 16.
Figure 18 is near the planimetric map that amplifies the part of the symbol A that expression has 6 times Fig. 2 of embodiment of the present invention.
Figure 19 is near the planimetric map that amplifies the part of the symbol A that expression has Fig. 2 in the comparative example.
Figure 20 is near the part sectional drawing that amplifies the part of the symbol CR that expression has 6 times Fig. 2 of embodiment of the present invention.
Figure 21 is the sectional drawing of expression as the color liquid crystal projector of porjection type colour display device one example of the embodiment of electronic equipment of the present invention.
Symbol description
The 1a semiconductor layer
1a ' channel region
1b low concentration source area
1c low concentration drain region
1d high concentration source area
1e high concentration drain region
2 dielectric films
The 3a sweep trace
The 6a data line
The 9a pixel electrode
10 tft array substrates
11a downside photomask
12 underlayer insulating films
16 oriented films
20 opposed substrates
21 opposite electrodes
22 oriented films
30 TFT
50 liquid crystal layers
53 architrave photomasks
70 store electric capacity
71 relay layers
81,83,85 conduction holes
101 data line drive circuits
104 scan line drive circuits
114 sample circuit drive signal lines
115 image signal lines
116 lead-out wirings
202 TFT
202a～202d complementary type TFT
206 lead-out wirings
300 electric capacity lines
301 sample circuits
302 TFT
501 downside photomasks
Embodiment
Below, based on accompanying drawing embodiments of the present invention are explained.In the following embodiments, electro-optical device of the present invention is applicable to liquid-crystal apparatus.
At first, with reference to Fig. 1 and Fig. 2, the overall formation of the electro-optical device under the embodiment of the present invention 1 is explained.Here, be example with liquid-crystal apparatus as the driving circuit internally-arranged type tft active matrix type of drive of electro-optical device one example.
Fig. 1 watches the tft array substrate to reach the planimetric map of each inscape that forms thereon from opposed substrate side.Fig. 2 is H-H ' sectional drawing of Fig. 1.
In Fig. 1 and Fig. 2, in the electro-optical device that present embodiment relates to, tft array substrate 10 and opposed substrate 20 are by arranged opposite.Between tft array substrate 10 and opposed substrate 20, enclose liquid crystal layer 50, tft array substrate 10 and opposed substrate 20, bonding mutually by being arranged on the encapsulant 52 that is positioned at image display area 10a seal area on every side.
Inboard parallel with the sealing area that has disposed encapsulant 52, the light-proofness architrave photomask 53 that is used for specified image viewing area 10a is set at opposed substrate 20 sides.But part or all of this architrave photomask also can be used as built-in photomask setting in tft array substrate 10 sides.
Especially under present embodiment, at the downside of architrave photomask 53, downside photomask 501 is partly formed.Downside photomask 501 is partly formed at the downside from the periphery of image display area 10a to the architrave photomask 53 of peripheral side.The formation and the interception of relevant downside photomask 501 describe in detail below.
In the periphery of image display area 10a in the bigger zone, in the outer peripheral areas that is positioned at the sealing area outside that has disposed encapsulant 52, data line drive circuit 101 and external circuit-connecting terminal 102 are provided with by the one side along tft array substrate 10, scan line drive circuit 104 is provided with along 2 limits with its one side adjacency.In addition, on residue one side of tft array substrate 10, be provided with many wirings 105 between the scan line drive circuit 104 that is used to connect the both sides that are set at image display area 10a.In addition as shown in Figure 1, in 4 corner portions of opposed substrate 20, configuration is as the conductive material up and down 106 of the Lead-through terminal up and down between two substrates.On the other hand, in tft array substrate 10, with opposed zone, these corners in be provided with up and down Lead-through terminal.By them, can between tft array substrate 10 and opposed substrate 20, realize conducting.
Especially under present embodiment, the sample circuit 301 to the picture signal that is provided by data line drive circuit 101 is taken a sample is configured in the architrave zone of being made up of architrave photomask 53.That is, the circuit components such as TFT described later of formation sample circuit 301 are configured in the architrave zone.In addition, from in image display area 10a by the data line that connected up to the wiring portion of sample circuit 301, from data line drive circuit 101 to sample circuit 301 wiring portion, the various wiring portion of wiring portion etc. from the sweep trace that in image display area 10a, connected up to scan line drive circuit 104, also be configured in the architrave zone.
In Fig. 2, on tft array substrate 10,, form oriented film forming on the pixel electrode 9a of pixel transitions after with wirings such as TFT and sweep trace, data lines.On the other hand, on opposed substrate 20, except opposite electrode 21, part also forms oriented film in the superiors.In addition, liquid crystal layer 50 between above-mentioned a pair of oriented film, has the directed state of regulation by constituting such as the mixed liquid crystal of one or more nematic liquid crystals.
In addition, on the tft array substrate 10 of Figure 1 and Figure 2, except these data line drive circuits 101, scan line drive circuit 104, sample circuit 301 etc., also can be formed on before the picture signal check circuit etc. that the pre-charge circuit of the precharging signal with assigned voltage level, the quality that is used for this electro-optical device of checking manufacture process and dispatching from the factory when and defective etc. are provided respectively to a plurality of data lines.
Followingly circuit in the electro-optical device with above-mentioned formation is constituted and be explained with reference to Fig. 3.Fig. 3 is that expression is according to the equivalent electrical circuit of the various elements in a plurality of pixels of the rectangular formation of the image display area that constitutes electro-optical device, wiring etc. and the block scheme of peripheral circuit.
In Fig. 3, in a plurality of pixels according to the rectangular formation of the image display area that constitutes the electro-optical device under the present embodiment, form image electrode 9a and be used for this image electrode 9a is implemented the TFT 30 of conversion and control, the data line 6a that is provided picture signal is electrically connected with the source electrode of this TFT 30.
In the outer peripheral areas in the outside that is arranged on image display area 10a, the end of data line 6a (lower end among Fig. 3) is connected by the drain electrode with the TFT 202 that constitutes sample circuit 301.On the other hand, image signal line 115 is connected by the source electrode of lead-out wiring 116 with the TFT 202 that constitutes sample circuit 301.The sample circuit drive signal line 114 that is connected with data line drive circuit 101 is connected by the grid with the TFT 202 that constitutes sample circuit 301.Like this, by the picture signal S1 that image signal line 115 is provided, S2 ... Sn according to the sample circuit drive signal that is provided by data line drive circuit 101 by sample circuit drive signal line 114, by sample circuit 301 samplings, is provided for each data line 6a.
Be written into the picture signal S1 in the data line 6a like this, S2 ... Sn can provide by circuit successively by this order, also can adjacent a plurality of data line 6a be provided by each group.
In addition, the grid of the TFT 30 that pixel transitions is used is electrically connected with sweep trace 3a, under predetermined timing, by scan line drive circuit 104, sweep signal G1, G2 ..., Gm is applied on the sweep trace 3a by circuit by this order successively with impulse form.Pixel electrode 9a by being electrically connected with the drain electrode of TFT 30, by closing the switch as the TFT 30 of conversion element in only during necessarily, writes the picture signal S1 that is provided by data line 6a, S2 in predetermined timing ... Sn.By the picture signal S1 that pixel electrode 9a writes in the liquid crystal as electrooptics material one example, S2 with specified level ... Sn, and between the opposite electrode 21 that forms on the opposed substrate 20, be saved certain hour.Liquid crystal can be modulated light, and show stage by stage by changed the orientation and the order of elements collection by the potential level that is applied.If normal white mode, according to the voltage that is applied by unit by each pixel, the transmitance corresponding with incident light descends, if often black pattern, according to the voltage that is applied by unit by each pixel, the transmitance corresponding with incident light increases, and as a whole, launched the light with contrast corresponding with picture signal by electro-optical device.Here, leak outside, and store electric capacity 70 in parallel the adding of the liquid crystal capacitance that forms between image electrode 9a and the opposite electrode 21 for preventing maintained picture signal.Be arranged in parallel one with sweep trace 3a and comprise the set potential lateral capacitance electrode that stores electric capacity 70, be fixed on the electric capacity line 300 on the constant potential simultaneously.
Next, to the architrave zone of the architrave photomask 53 that is provided with Figure 1 and Figure 2 and the detailed formation of the electro-optical device in the outer peripheral areas, with the formation and the interception that are set at the downside photomask 501 in the architrave zone is the center, is explained with reference to Fig. 4 to Fig. 7.Here Fig. 4 is near the part sectional drawing of the amplification the CR part among Fig. 2, Fig. 5 is near the part sectional drawing of the amplification of the correspondence position of CR part in the comparative example, Fig. 6 is that the lead-out wiring 206 of architrave photomask 53 in the position shown in Figure 4, data line 6a and the part of downside photomask 501 are plucked the part oblique view that selects diagrammatic sketch, and Fig. 7 is that the part of the lead-out wiring 206 of architrave photomask 53, data line 6a in the comparative example is plucked the part oblique view that selects diagrammatic sketch.
As shown in Figure 4, under present embodiment,,, be furnished with the various wirings such as lead-out wiring 206 of data line 6a and constitute the various circuit components such as TFT of sample circuit as an example of drafting department in the architrave zone that is positioned under the architrave photomask 53.Like this, the downside of lead-out wiring 206 grades in being set at this architrave zone is provided with downside photomask 501.
In comparative example shown in Figure 5, be not provided with this downside photomask 501.
Therefore, as shown in Figure 6, under present embodiment, especially in projector purposes etc. from figure the incident light L1 of upside incident more powerful and contain in a large number under the occasion of oblique composition, be formed pattern such as conducting films such as Al films, according to the reflectivity of lead-out wiring 206 grades, incident light L1 is reflected in its surface, and perhaps incident light L1 passes through from the gap of lead-out wiring 206 grades.Here, lead-out wiring 206 etc. are capped from tft array substrate 10 sides (downside the figure) by downside photomask 501.Therefore, near the architrave zone, be near the periphery of image display area 10a, by lead-out wiring 206 reflections such as grade, perhaps from the gap of lead-out wiring 206 grades by after incident light L1 in through inner face reflection back or final directly with show with the light quantity that penetrates the light L3 that light Lout mixes to have only by 501 absorptions of this downside photomask or the part that is reflected and significantly reduce.
More particularly, as Fig. 4 and shown in Figure 6, by the light after the reflection such as lead-out wiring 206 grades, be reflected by inner face by architrave photomask 53, even near architrave zone 53, propagate to tft array substrate 10 sides, have only the part that is absorbed or reflect by downside photomask 501, the light quantity that is mixed in the ejaculation light Lout that shows usefulness obtains reducing.For by the inner face reflected light of architrave photomask 53 reflection with the light after seeing through lead-out wiring 206 etc., the back side by tft array substrate 10, reflect the back back light L2 that form too with the polarized light piece of being adorned, phase difference film, dustproof glass etc. outward, have only the part that is absorbed or reflect by downside photomask 501, the light quantity that is mixed in the ejaculation light Lout that shows usefulness obtains reducing.In addition, for the back light L2 under the occasion of multiple-piece projector, further reflect the back inner face reflected light that forms too by lead-out wiring 206 and architrave photomask 53 etc., have only the part that is absorbed or reflect by downside photomask 501, the interior light quantity of ejaculation light Lout that is mixed in final demonstration usefulness obtains reducing.
In addition, electro-optical device is housed in the light-proofness mounting cup 800 that is formed by resin etc., for the light in the mounting cup 800 that bleeds, owing to absorbed by its inner face, thereby do not become special problem.
Corresponding therewith, as Fig. 5 and shown in Figure 7, under the occasion of the comparative example that is not provided with downside photomask 501, be near the periphery of image display area 10a near the architrave zone, by lead-out wiring 206 reflections such as grade, among the incident light L1 that perhaps from the gap of lead-out wiring 206 grades, passes through through inner face reflection back or final directly with show with penetrating the light quantity that light Lout mixes, compare with the occasion of the present embodiment of being furnished with downside photomask 501, significantly increase.In addition, under the occasion of this comparative example, be near the periphery of image display area 10a near the architrave zone, L2 is same for back light, by lead-out wiring 206 reflections such as grade, perhaps from the gap of lead-out wiring 206 grades, pass through, and through the inner face reflection back of architrave photomask etc. final with show the light quantity that mixes with ejaculation light Lout, compare with the occasion of the present embodiment of being furnished with downside photomask 501, significantly increase.
According to present embodiment, because the downside at the drafting department that is formed by lead-out wiring 206 etc. is furnished with downside photomask 501, thus can reduce near have image display area 10a peripheral demonstration with ejaculation light Lout in owing to the generation of the light of the light and shade of drafting department and the LO-pattern that interference of light produced.Therefore, can prevent the generation of the LO-pattern that causes by near the drafting department the display image outside effectively.
Be preferably under the present embodiment, downside photomask 501 directly on the flat surfaces of tft array substrate 10, or is being formed on by the smooth underlayer insulating film of film forming on the smooth tft array substrate 10.Like this, can produce hardly on the surface of downside photomask 501 concavo-convex.Therefore, Fig. 5 and incident light L1 shown in Figure 7 and the part of back light L2, if after 501 reflections of downside photomask, show with penetrating in the light Lout even finally sneak into, because light by 501 reflections of smooth downside photomask, follow interference hardly, thereby can significantly reduce by the caused LO-pattern of interference effect.
In addition, downside photomask 501 is by such as containing metal monomer at least a in Ti (titanium), Cr (chromium), W (tungsten), Ta (tantalum), the contour melting point metal of Mo (molybdenum), alloy, metal silicide, multi-crystal silicification thing, stacked their formations such as material.Therefore, this downside photomask 501 is formed by the same film of downside photomask of the channel region of the TFT 30 that uses with the pixel transitions in downside overlay image viewing area 10a preferably as mentioned above.Like this, the shading that can in same manufacturing process, form the TFT 30 that uses at pixel transitions simultaneously with the downside photomask and, be used for preventing the downside photomask 501 of the LO-pattern in architrave zone, can realize the lit-par-lit structure on the tft array substrate 10 and the simplification of manufacture process.
Best in addition downside photomask 501 with the unit of suitable size, is pressed the island disjunction and is formed.Press the island disjunction and form by this, especially compare, can relax the stress that existence produced by downside photomask 501 with the occasion that in whole architrave zone, forms the downside photomask.
Under this external present embodiment, as shown in Figure 4, on the overlapping width Delta W in the zone from the periphery of image display area 10a to peripheral side, form downside photomask 501.This overlapping width Delta W can be made as suitable value in advance according to the incident angle that is irradiated to the incident light L2 in the architrave zone.When being used for the projector of enlarging projection, this incident angle is generally bigger, and is relative therewith, is necessary to increase overlapping width Delta W for above-mentioned LO-pattern does not take place.This Rack, according to the actual device specification, can be by experiment, experience, simulation etc. set one by one particularly.
Next, with reference to Fig. 8 and Fig. 9, the formation in the image display area of the electro-optical device under the embodiment of the present invention is explained.Fig. 8 is the planimetric map of a plurality of pixel groups adjacent with the tft array substrate that has formed data line, sweep trace, pixel electrode etc.Fig. 9 is E-E ' sectional drawing of Fig. 8.Among this external Fig. 9, for the size that makes each layer and each parts can be seen clearly on figure, the scale of each layer and each parts is all different.
In 8, on the tft array substrate of electro-optical device, with the rectangular a plurality of transparent pixels electrode 9a (representing with the profile form) that are provided with by dotted line 9a ', along pixel electrode 9a each in length and breadth the border data line 6a and sweep trace 3a are set.
In addition, according to semiconductor layer 1a in the opposed principle configuration of the channel region 1a ' sweep trace 3a that represents by upper right oblique line district among the figure, sweep trace 3a has the function of gate electrode.Like this, on the position that sweep trace 3a and data line 6a intersect, be provided with the TFT 30 that the pixel transitions that is used as the gate electrode arranged opposite at the middle sweep trace 3a of channel region 1a ' is used.
As Fig. 8 and shown in Figure 9, the formation state that stores electric capacity 70 is, relay layer 71 as the pixel current potential lateral capacitance electrode that is connected with high concentration drain region 1e and the pixel electrode 9a of TFT 30, with a part as the electric capacity line 300 of set potential lateral capacitance electrode, by dielectric film 75 by arranged opposite.
Especially under present embodiment, electric capacity line 300 by in the overlay region of plane sweep trace 3a and data line 6a electric capacity being set, can increase the capacity that stores electric capacity 70 owing to stacked between sweep trace 3a and data line 6a.
On the other hand, the downside of the TFT 30 on tft array substrate 10, downside photomask 11a is configured to trellis.Downside photomask 11a is by containing such as at least a metal monomer in Ti (titanium), Cr (chromium), W (tungsten), Ta (tantalum), the contour melting point metal of Mo (molybdenum), alloy, metal silicide, multi-crystal silicification thing, stacked their formations such as material.
Like this, by the downside photomask 11a that intersects and form and form by trellis along the electric capacity line 300 of horizontal expansion among the data line 6a that extends longitudinally among Fig. 8 and Fig. 8, the open area of stipulating each pixel.
As Fig. 8 and shown in Figure 9, data line 6a by conduction hole 81, and is electrically connected by the semiconductor layer 1a middle and high concentration source area 1d that constitutes such as polysilicon film.In addition, also can form the relay layer that constitutes by same film,, data line 6a and high concentration source area 1d are electrically connected by this relay layer and 2 conduction holes with above-mentioned relay layer 71.
Pixel electrode 9a by being relaying with relay layer 71, is electrically connected with high concentration drain region 1e among the semiconductor layer 1a by conduction hole 83 and 85.
In Fig. 8 and Fig. 9, electro-optical device is furnished with transparent tft array substrate 10, the transparent opposed substrate 20 of arranged opposite therewith.Tft array substrate 10, by constituting such as quartz substrate, glass substrate, silicon chip, opposed substrate 20 is by constituting such as glass substrate and quartz substrate.
As shown in Figure 9, on tft array substrate 10, be provided with pixel electrode 9a, side thereon is provided with the oriented film 16 of the directional process that has been implemented regulations such as friction treatment.Pixel electrode 9a is made of the transparent and electrically conductive film such as ITO film etc.Oriented film 16 is by constituting such as transparent organic membrane such as polyimide films in addition.
On the other hand, on opposed substrate 20, opposite electrode 21 is set on whole surface,, the oriented film 22 of the directional process that has been implemented regulations such as friction treatment is set at its downside.Opposite electrode 21 is by constituting such as nesa coatings such as ITO films.Oriented film 22 is made of transparent organic membrane such as polyimide films in addition.
On opposed substrate 20, can be corresponding with the non-open area of each pixel, trellis or strip photomask are set.By adopting this formation, electric capacity line 300 by stipulating above-mentioned non-open area and the photomask on data line 6a and this opposed substrate 20 can stop more reliably from the incident light of opposed substrate 20 sides and invade channel region 1a ' and low concentration source area 1b and low concentration drain region 1c.In addition, the photomask on this opposed substrate 20 forms the surface of being shone by incident light at least by utilizing highly reflecting films, can prevent that the temperature of electro-optical device from rising.In addition, the photomask on this opposed substrate 20 preferably according to the form that because of the applying deviation of two substrates the open area of each pixel is not dwindled, forms in the inboard of non-open area meticulously.Form meticulously by this, also can be when implementing abundant shading, performance prevents because the effect that the electro-optical device temperature inside that incident light caused rises.
And the tft array substrate 10 and opposed substrate 20 of the pixel electrode 9a of above-mentioned formation and opposite electrode 21 arranged opposite between, in the space that surrounds by encapsulant 52 (with reference to Fig. 1 and Fig. 2), enclose liquid crystal, form liquid crystal layer 50 as electrooptics material one example.
In addition, with under the TFT 30, be provided with underlayer insulating film 12 in pixel transitions.Underlayer insulating film 12, except having the function that makes downside photomask 11a and TFT 30 layer insulations, by on whole TFT substrate 10, forming, also have the residue that surface grinding produced that prevents by tft array substrate 10, and clean pixel transitions that the residual dirt in back etc. causes function with the characteristic variations of TFT 30.
Among Fig. 9, pixel transitions TFT 30, have LDD (Lightly Doped drain: trace doped drain electrode) structure, the electric field that be furnished with sweep trace 3a, produces by this sweep trace 3a forms the semiconductor layer 1a of raceway groove channel region 1a ', comprise the dielectric film 2, the low concentration source area 1b of semiconductor layer 1a and high concentration source area 1d and the high concentration drain region 1e of low concentration drain region 1c, semiconductor layer 1a that make the gate insulating film that sweep trace 3a and semiconductor layer 1a insulate.
On sweep trace 3a, form and offer the 1st interlayer dielectric 41 that reaches the conduction hole 83 that leads to high concentration drain region 1e towards the conduction hole 81 of high concentration source area 1d respectively.
On the 1st interlayer dielectric 41, form relay layer 71 and electric capacity line 300, in the above, form and offer the 2nd interlayer dielectric 42 that reaches the conduction hole 85 that leads to relay layer 71 towards the conduction hole 81 of high concentration source area 1d respectively.
On the 2nd interlayer dielectric 42, form data line 6a, in the above, form the planarization that formed the conduction hole 85 that leads to relay layer 71 the 3rd interlayer dielectric 43.Pixel electrode 9a, be set at formation like this 3rd interlayer dielectric 43 above.
Under present embodiment, the surface of the 3rd interlayer dielectric 43, (Chemicalmechanical Polishing: cmp) processing waits and realizes planarization, can reduce because the liquid crystal aligning in the liquid crystal layer that jump caused 50 that the various wirings of its below existence and element cause is bad by CMP.
In addition according to embodiment 1, because downside photomask 501, not only in whole architrave zone, with the opposed part of forming by various circuit components such as various wirings that are set at data line lead-out wiring 206 grades in the architrave zone and TFT 202 of drafting department in also be set up, thereby compare with the occasion that in whole architrave zone, forms, can reduce the generation of stress.
Under the embodiment of this external above explanation, by stacked a plurality of conductive layers shown in Figure 9, flattening surface by the 3rd interlayer dielectric 43, though the round floor that can alleviate pixel electrode 9a (promptly, the surface of the 3rd interlayer dielectric 43) at jump along generation in the zone of data line 6a and sweep trace 3a, but also can be replaced or replenished: at tft array substrate 10 with following content, underlayer insulating film 12, the 1st interlayer dielectric 41, groove is put in pick on the 2nd interlayer dielectric 42 or the 3rd interlayer dielectric 43, in wirings such as data line 6a and TFT 30 etc. are embedded in, implement planarization, also can grind the jumps above the 2nd interlayer dielectric 42 by utilizing CMP to handle etc., perhaps, implement this planarization by utilizing organic or inorganic SOG to form flat surfaces.
Next, to related the 2nd being explained to embodiment 4 and mode of texturing thereof of the various concrete example of the flat shape of downside photomask 501 with above-mentioned formation.In these embodiments, downside photomask 501 is made up of conductive light shielding film such as refractory metal films.Therefore, these embodiments, relate to electricity condition or potential change in the downside photomask 501 that is suitable for reducing to be configured in the architrave zone, to the concrete shape of the downside photomask 501 of the adverse effect that running produced that is configured in TFT 202 circuit components such as grade in the same architrave zone.
With reference to Figure 10 and Figure 11, the electro-optical device under the embodiments of the present invention 2 is explained.Here Figure 10 is that Figure 11 is its A-A ' sectional drawing as the amplification view of the complementary type TFT of circuit component one example that forms in the architrave zone under embodiment 2.In addition, in Figure 10 and Figure 11, with the 1 identical inscape from Fig. 1 to embodiment shown in Figure 9 additional phase with reference marks, omit its explanation.
As Figure 10 and shown in Figure 11, complementary type TFT 202a, is furnished with the semiconductor layer 320 that comprises P channel region 320p and N channel region 320n, wiring 316 leading section as gate electrode (input side), the leading section of electronegative potential wiring 321 and noble potential wiring 322 as source electrode, as drain electrode (outgoing side), P channel-type TFT 202p and N channel-type TFT 202n are combined and form the leading section of wiring 306.In addition, this P channel-type TFT 202p and N channel-type TFT 202n, can have with pixel transitions with the identical LDD structure of TFT 30.Especially embodiment 2 times, the downside photomask 501a by conducting films such as refractory metal film are formed is formed by disjunction, covers the island part of complementary type TFT 202a at least from downside, has floating potential.Other constitutes identical with the occasion of the embodiment 1 that illustrates referring to figs. 1 through Fig. 9.
Like this, according to embodiment 2,, thereby can prevent the adverse effect of its potential change effectively to the characteristic of complementary type TFT 202a because the potential change of downside photomask 501a has floating potential.
In addition, embodiment 2 times, following formation can be arranged: for except with downside photomask 501a in the island part of complementary type TFT 202a arranged opposite other parts, can be supplied set potential equally with the occasion of downside photomask 11a in the image display area 10a.
With reference to Figure 12 and Figure 13, the electro-optical device under the embodiment of the present invention 3 is explained.Here Figure 12 is that Figure 13 is its B-B ' sectional drawing as the amplification view of the complementary type TFT of circuit component one example that forms in the architrave zone under the embodiment 3.In addition, in Figure 12 and Figure 13, with additional phase from Fig. 1 to embodiment 1 shown in Figure 9 and the identical inscape of Figure 10 and embodiment shown in Figure 11 2 with reference marks, omit its explanation.
As Figure 12 and shown in Figure 13, especially embodiment 3 times, the downside photomask 501b by conducting films such as refractory metal film are formed is formed by disjunction unlike embodiment 2, but, two slits are set respectively along two grid potential utmost points of complementary type TFT 202b.Constitute for other, identical with the occasion of the embodiment 2 of reference Figure 10 and Figure 11 explanation.
Therefore, according to embodiment 3, based on the stray capacitance between the stray capacitance between downside photomask 501b and the source electrode and downside photomask 501b and the drain electrode, source electrode and the capacitive coupling between the drain electrode among the complementary type TFT 202b can reduce, thereby can prevent the potential change of downside photomask 501b effectively, to the adverse effect of the characteristic of complementary type TFT 202b.
As the slit of this downside photomask 501b, such as being 1 micron width.Even form this slit, owing to, have light absorption to a certain degree such as the gate electrode itself that forms by electric conductivity polysilicon film etc., thereby owing to the LO-pattern that existence produced in slit can be less.
In addition, embodiment 3 times, following formation can be arranged: the downside photomask 501b with above-mentioned slit is provided set potential by its extension 502 equally with the occasion that is present in the downside photomask 11a in the image display area 10a.
Embodiment 4
With reference to Figure 14 and Figure 15, the electro-optical device under the embodiment of the present invention 4 is explained.Here Figure 14 is that Figure 15 is its C-C ' sectional drawing as the amplification view of the complementary type TFT of circuit component one example that forms in the architrave zone under the embodiment 4.In addition, in Figure 14 and Figure 15, with additional phase from Fig. 1 to embodiment 1 shown in Figure 9 and the identical inscape of Figure 10 and embodiment shown in Figure 11 2 with reference marks, omit its explanation.
As Figure 14 and shown in Figure 15, especially embodiment 4 times, the downside photomask 501c that forms by conducting films such as refractory metal films, unlike embodiment 1, the semiconductor layer 320 of complementary type TFT is formed bigger island as a unit disjunction, but the source area in the semiconductor layer 320 of complementary type TFT 202c and drain region each as a unit, disjunction forms littler island.Constitute for other, identical with the occasion of the embodiment 2 of reference Figure 10 and Figure 11 explanation.
Therefore, according to embodiment 4, based on the stray capacitance between the stray capacitance between downside photomask 501c and the source electrode and downside photomask 501c and the drain electrode, source electrode and the capacitive coupling between the drain electrode among the complementary type TFT 202c can reduce, thereby can prevent the potential change of downside photomask 501c effectively, to the adverse effect of the characteristic of complementary type TFT 202c.
As the slit of this downside photomask 501c, such as being 1 micron width.Even there is this slit, owing to have to a certain degree light absorption such as the gate electrode itself that forms by electric conductivity polysilicon film etc., thereby owing to the LO-pattern that existence produced in slit can be less.
In addition, embodiment 4 times, following formation can be arranged: for except with downside photomask 501c in the island part of complementary type TFT 202c arranged opposite other parts, can be supplied set potential equally with the occasion of downside photomask 11a in the image display area 10a.
With reference to Figure 16 and Figure 17, the electro-optical device under the embodiment of the present invention 5 is explained.Here Figure 16 is that Figure 17 is its D-D ' sectional drawing as the amplification view of the complementary type TFT of circuit component one example that forms in the architrave zone under the embodiment 5.In addition, in Figure 16 and Figure 17, with additional phase from Fig. 1 to embodiment 1 shown in Figure 9 and the identical inscape of Figure 10 and embodiment shown in Figure 11 2 with reference marks, omit its explanation.
As Figure 16 and shown in Figure 17, especially embodiment 5 times, the downside photomask 501d that forms by conducting films such as refractory metal films, unlike embodiment 2, the semiconductor layer 320 of complementary type TFT partly had floating potential as the bigger island that a unit disjunction forms, but be connected with the gate electrode (input side) of the leading section that is in wiring 316 by conduction hole 503, have same potential with gate electrode.Constitute for other, identical with the occasion of the embodiment 2 of reference Figure 10 and Figure 11 explanation.
Therefore, according to embodiment 5, owing to can partly form back of the body raceway groove by the island of downside photomask 501d, thereby can improve the transistor characteristic among the complementary type TFT 202d.
In addition, embodiment 5 times, following formation can be arranged: for except with downside photomask 501d in the island part of complementary type TFT 202d arranged opposite other parts, can be supplied set potential equally with the occasion of downside photomask 11a in the image display area 10a.
Under each embodiment with reference to above-mentioned Fig. 1 to Figure 17 explanation, also data line drive circuit 101 and scan line drive circuit 104 can be set on tft array substrate 10, and be installed in such as the on-chip driving of TAB (Tape Automated bonding) with LSI on, the anisotropic conductive film of the outer part by being set at tft array substrate 10 is carried out electric and mechanical connection.In addition, emitting side at the ejaculation light of the projection light light incident side of each opposed substrate 20 and tft array substrate 10, according to such as operating mode such as TN (Twisted Nematic) formula, VA (Vertically Aligned) formula, PDLC (Polymer Dispersed LiquidCrystal) formula and normal white mode/the often difference of black pattern, direction configuration polarization film, phase retardation film, polarized light piece etc. in accordance with regulations.
With reference to Figure 18 to Figure 20, the electro-optical device under the embodiment of the present invention 6 is explained.Here Figure 18 is near the amplification view of part that has the symbol A of 6 times Fig. 1 of embodiment of the present invention, and Figure 19 is near the amplification view of part that has the symbol A of the Fig. 1 in the comparative example.Figure 20 is near the amplifier section sectional drawing of part that has the symbol CR of 6 times Fig. 2 of embodiment.In addition, in Figure 18 to Figure 20, with additional phase from Fig. 1 to embodiment 1 shown in Figure 9 and the identical inscape of Figure 10 and embodiment shown in Figure 11 2 with reference marks, omit its explanation.
At first in Figure 18, on tft array substrate 10, as illustrated in the above-mentioned embodiment 1, the lead-out wiring 206 of data line 6a is formed, and connects and composes the TFT 202a of the illustrated sample circuit of Fig. 3 301 at an end of this lead-out wiring 206.In addition, in the figure, the lead-out wiring 208 of sweep trace 3a (being equivalent to " drafting department " example among the present invention) is formed.On the not shown extended end of this lead-out wiring 208, scan line drive circuit (with reference to Fig. 1) is connected.In addition, in the figure, the various wirings 210 and 212 that provide purposes such as regulation current potential to be set up according to the opposite electrode that is used on opposed substrate 20 are formed (with reference to the conductive material up and down 106 of Fig. 1).In addition, for above-mentioned lead-out wiring 206, or TFT 202a, same with above-mentioned various embodiments, the downside photomask 501 and the 501a that cover their part from tft array substrate 10 sides at least are formed (with reference to Fig. 4 or Fig. 6 or Figure 10 or Figure 11 etc.).In addition, above-mentioned wiring 210 and 212 embodiment 6 times, is equivalent to " the 2nd drafting department " example.
Like this, especially embodiment 6 times, except above-mentioned downside photomask 501 and 501a, still cover as the pixel transitions that in image display area 10a, forms with the downside photomask 11a of the TFT 30 of element (with reference to Fig. 9 etc.) from tft array substrate 10 sides, and be positioned at the outer photomask 501A in zone that the principle of whole outer peripheral areas of the periphery of image display area 10a forms according to covering and be formed.Above-mentioned three kinds of photomasks all as same film, are promptly formed in manufacturing process's stage simultaneously.
Observe Figure 18 in detail, the outer photomask 501A in zone wherein etc. are constructed as follows.
At first, in the upper left of this figure, form downside photomask 501 (with reference to Fig. 4 or Fig. 6) according to the principle that covers lead-out wiring 206.In addition, in Figure 18 below, form downside photomask 501a (with reference to Figure 10 or Figure 11) according to the principle of the TFT 202a that cover to constitute sample circuit 301.In addition, in the figure, downside photomask 501z is set according to the principle that covers the lead-out wiring 208 of drawing from sweep trace 3a.They have with above-mentioned various embodiments under the identical purpose of various downside photomasks, and bring into play identical effect.
Like this, the outer photomask 501A in zone that embodiment 6 relates at above-mentioned downside photomask 501, in the region R 1 beyond the formation zone of 501a and 501z, comprises the 2nd downside photomask 501Aa integrally formed with them.That is, the 2nd downside photomask 501Aa, the above-mentioned lead-out wiring 206 in architrave zone (with reference to the thick line among Figure 18), or also be formed in the region R 1 beyond the formation zone of TFT 202a etc.In addition, the outer photomask 501A in zone is included in the outer photomask 501Ab in very zone that is formed in the gap between the wiring 210 and 212 that is arranged in the extra-regional region R 2 of architrave.In addition, below wiring 210, and 212 the below of connecting up, also can not form the very outer photomask 501Ab in zone.That is, very the outer photomask 501Ab in zone is formed by disjunction.
Above main points are, embodiment 6 times, as relevant wiring 210 or 212 etc., even under the occasion that in the zone that various wirings or circuit component are formed, does not form, the outer photomask 501A in zone also is formed according to the principle that almost all covers tft array substrate 10.
Among the photomask 501A, as shown in figure 18, be provided with in position and cut the hole outside this zone, that is, photomask 501A is formed island by disjunction outside this zone.Like this, embodiment 6 times, be formed that distance is below 2 microns between the island of the outer photomask 501A in zone of island, this shape if implement suitable pattern formation processing when forming the outer photomask 501A in this zone, then can form simply.
Because the existence of photomask 501A can have following action effect outside this zone.That is, shown in Figure 19 as a comparative example be not outside forming the zone that embodiment 6 relates under the occasion of photomask 501A, the surface of the tft array substrate 10 of this part is so-called bare exposed state (certainly, various interlayer dielectrics 12,41,42 and 43 etc. are formed certainly).Therefore, for this part, incident light has the possibility that " in statu quo " passes through, and this light has the possibility that demonstration exerts an influence to image after sneaking into the light Lout of composing images (with reference to Fig. 4 or Fig. 6).Such as, at aforesaid back light, by 53 reflections of architrave photomask, and then by under the occasions such as region R 1, it is higher that this light is sneaked into the probability of light Lout of composing images by region R 1 back, therefore has near the possibility that occurs fuzzy light image the image border.
But, embodiment 6 times, as mentioned above, because in the zone that comprises region R 1 and R2, form and comprise the 2nd downside photomask 501Aa and the true regional outer photomask 501A of the outer photomask 501Ab in zone, thereby hardly the above-mentioned state of affairs can take place.Therefore,, the possibility of fuzzy light image etc. can be avoided near the image border, taking place in advance, high-quality image attractive in appearance can be demonstrated embodiment 6 times.
In addition, the outer photomask 501A in zone under the embodiment 6, formed by above-mentioned form disjunction, perhaps according to the form of photomask 501Ab outside the very zone that in wiring 210 and the gap between 212 of connecting up, forms, formed bigger shape according to the position by disjunction, by above process, compare with the occasion that forms this photomask by the beta shape, can reduce its internal stress relatively.Like this, photomask 501A outside this zone can take place hardly because the destruction that internal stress produced of self, perhaps since around the states of affairs such as crackle that produced of formation (such as, underlayer insulating film 12 etc.), can provide reliability higher electro-optical device.
In addition, because under the occasion that the outer photomask 501A in zone in region R 1 grade is formed by disjunction, being spaced apart below 2 microns between each island, thereby the light after can taking place hardly to pass through from this gap, after being positioned at its reflection such as architrave photomask 53 grades behind, pass through the possibility in this gap once more.Therefore, the possibility that this light is sneaked in the light Lout of composing images is minimum, and this gap shows that to image the influence that is produced is minimum.Like this, embodiment 6 times, also can obtain the action effect that formation produced of above-mentioned island, the promptly so-called action effect that reduces internal stress, also can enjoy the original action effect of the outer photomask 501A in zone simultaneously not a halfpenny the worsely, promptly prevent from around image, to produce the action effect of light image.
In addition, the outer photomask 501A in zone that relevant this embodiment 6 is related, though what recorded and narrated in above-mentioned is, form by " almost covering tft array substrate 10 " principle comprehensively, but according to viewpoint of the present invention, photomask 501A outside this zone according to its word meaning, there is no need " comprehensively " formation on tft array substrate 10 certainly.In fact, as Figure 18 and shown in Figure 19, the outer photomask 501A in zone goes up by disjunction in position and forms, on this point, also as can be seen should the zone outside photomask 501A there is no need to be formed by " comprehensively ".
If on positive meaning, the outer photomask in zone that the present invention relates to can only form in such as WW subregion shown in Figure 20 in addition.In the figure, this WW partly is the marginal portion 801a of the display window of formation in mounting cup 800, and the part between the marginal portion of downside photomask 501.This is because in the part beyond this WW part, because the existence of mounting cup 800 is covered the propagation of light, thereby as mentioned above, can think and in fact only take place the state of affairs that light " in statu quo " passes through in this WW part.Therefore, the outer photomask in zone only needs in this WW part as shown in figure 20 formation just enough (reference marks 501B, and with reference to the propagation of light LA).
Like this, according to this formation pattern, can realize shading effectively, in addition, because the outer photomask 501B in zone under this occasion only gets final product by suitable and necessary area formation, thereby can further suppress the generation of the caused above-mentioned abnormality of internal stress of this photomask inside.
Electro-optical device under the embodiment of above-mentioned explanation adopts 3 light valves that electro-optical device is used as RGB for being used for projector, and in each light valve, the light that decomposes each color that is decomposed with dichroic mirror by each RGB look is used as projection light incident.Like this, under each embodiment, on opposed substrate 20, color filter is not set.Yet, with the opposed regulation of pixel electrode 9a zone in, on opposed substrate 20, can form RGB color filter and diaphragm thereof.Like this, direct viewing type and reflection-type technicolo optics device for beyond the projector can adopt the electro-optical device under each embodiment.In addition, on opposed substrate 20, also can form micro lens according to the form of corresponding 1 of 1 pixel.Perhaps, also can with tft array substrate 10 on the opposed pixel electrode 9a of RGB below form colour filter by the film of anti-look the etc.Like this, by improving the collection efficiency of incident light, can realize distinct electro-optical device.In addition, by on opposed substrate 20, the interfering layer that its refractive index of stacked several layers is different can utilize interference of light, and formation can produce the double-colored color filter of RGB look.Utilization is provided with the opposed substrate of this double-colored color filter, can realize more distinct technicolo optics device.
The embodiment of electronic equipment
Below, to being explained as the electro-optical device of above-mentioned detailed description is constituted as overall formation, particularly optics under the embodiment of the porjection type colour display device of electronic equipment one example of light valve use.Here Figure 21 is the sectional drawing of porjection type colour display device.
In Figure 21, liquid crystal projection apparatus 1100 as porjection type colour display device one example under the present embodiment, be furnished with 3 Liquid Crystal Modules that are included on the tft array substrate liquid-crystal apparatus that carries driving circuit, be used as light valve 100R, the 100G that RGB uses separately, the projector that 100B uses constitutes.In liquid crystal projection apparatus 1100, after being issued from the projection light of the lamp unit 1102 of white light sources such as metal halide lamp, by 3 catoptrons 1106 and 2 dichroic mirrors 1108, be divided into light component R, G, the B corresponding with the RGB three primary colors, be imported into respectively with corresponding light valve 100R, 100G of all kinds, 100B in.The B light of this moment is to prevent the light loss that caused by long light path, by by incident lens 1122, relay lens 1123 and penetrate the relay lens system 1121 that lens 1124 constitute and conducted.Like this,,, after synthetic once again, be projected onto on the panel 1120 as coloured image by the corresponding light component of three primary colors after light valve 100R, 100G, the 100B modulation with respectively by projection lens 1114 by dichroic prism 1112.
In addition, electro-optical device of the present invention is also applicable to electrophoretic apparatus, EL device etc.
The present invention is not limited to above-mentioned embodiment, can do suitable change in the scope of not violating invention aim that accessory rights claimed range and instructions integral body reads or thought, the electro-optical device and the electronic equipment that are accompanied by this change also are included in the technical scope of the present invention.
Claims (27)
1. an electro-optical device is characterized in that: be furnished with
Be configured in the demonstration electrode of on-chip image display area;
Stipulate the architrave photomask on every side of above-mentioned image display area;
By pixel transitions with element or be directly connected in above-mentioned demonstration distribution with electrode;
Formation provides the circuit component of the peripheral circuit that picture signal uses with electrode to above-mentioned demonstration; Between above-mentioned architrave photomask and above-mentioned substrate, be arranged in the drafting department zone, that constitute by at least one side of above-mentioned distribution and foregoing circuit element of above-mentioned architrave photomask;
In the zone of above-mentioned architrave photomask, overlapping with above-mentioned drafting department, the downside photomask that buries the regional interior of above-mentioned architrave photomask and cover from above-mentioned substrate side.
In the claim 1 record electro-optical device, it is characterized in that:
Above-mentioned downside photomask directly or by smooth underlayer insulating film is formed on the flat surfaces of above-mentioned substrate.
In the claim 1 record electro-optical device, it is characterized in that:
The foregoing circuit element comprises the 1st transistor,
Above-mentioned demonstration is made of pixel electrode with electrode,
This electro-optical device also is furnished with as 2nd transistor that with pixel electrodes be connected of above-mentioned pixel transitions with element,
Above-mentioned distribution is connected with above-mentioned the 2nd transistor.
In the claim 3 record electro-optical device, it is characterized in that:
At the downside of the above-mentioned the 2nd transistorized channel region at least, be provided with and the same film of above-mentioned downside photomask.
In the claim 1 record electro-optical device, it is characterized in that:
Above-mentioned downside photomask is made of light absorping film.
In the claim 5 record electro-optical device, it is characterized in that:
Above-mentioned light absorping film comprises at least one side in polysilicon film and the refractory metal film.
In the claim 1 record electro-optical device, it is characterized in that:
Above-mentioned downside photomask is formed island.
In the claim 1 record electro-optical device, it is characterized in that:
Above-mentioned downside photomask is made of conducting film.
In the claim 8 record electro-optical device, it is characterized in that:
Above-mentioned downside photomask is provided with set potential at least in part.
In the claim 8 record electro-optical device, it is characterized in that:
At least in the stacked part of the above-mentioned the 1st transistorized downside, has floating potential in the above-mentioned downside photomask.
11. the electro-optical device of record in the claim 10 is characterized in that:
In the above-mentioned downside photomask at least in the stacked part of the above-mentioned the 1st transistorized downside, comprise the part that is configured to island so that with above-mentioned downside photomask in the opposed part of the above-mentioned the 1st transistorized source electrode and with above-mentioned downside photomask in the part of above-mentioned the 1st transistor drain electrode contraposition disconnected from each other.
12. the electro-optical device of record in the claim 8 is characterized in that:
In the above-mentioned downside photomask at least in the stacked part of the above-mentioned the 1st transistorized downside, the slit is set so that with above-mentioned downside photomask in the opposed part of the above-mentioned the 1st transistorized source electrode with separate with the part of above-mentioned the 1st transistor drain electrode contraposition in the above-mentioned downside photomask.
13. the electro-optical device of record in the claim 8 is characterized in that:
Above-mentioned downside photomask, not stacked at the above-mentioned the 1st transistorized channel region downside.
14. the electro-optical device of record in the claim 8 is characterized in that:
At least be laminated in the part of the above-mentioned the 1st transistorized channel region downside in the above-mentioned downside photomask, have the above-mentioned the 1st transistorized grid potential.
15. an electro-optical device is characterized in that:
Be furnished with
Be configured in the demonstration electrode of on-chip image display area;
By by pixel transitions with element or be directly connected in this demonstration be set in electrode the above-mentioned image display area of regulation around the architrave zone in distribution and the drafting department that constitutes of at least one side in the circuit component;
In the part in above-mentioned architrave zone, cover the downside photomask of above-mentioned drafting department from above-mentioned substrate side to small part,
Above-mentioned downside photomask is to be formed in the architrave zone of the outer thoughtful peripheral side of above-mentioned image display area by predefined Rack according to the incident angle of the incident light part that is irradiated to above-mentioned architrave zone.
16. an electro-optical device is characterized in that:
Be furnished with
Be configured in the demonstration electrode of on-chip image display area;
Stipulate the architrave photomask on every side of above-mentioned image display area;
By pixel transitions with element or be directly connected in above-mentioned demonstration distribution with electrode;
Formation provides the circuit component of the peripheral circuit that picture signal uses with electrode to above-mentioned demonstration;
Between above-mentioned architrave photomask and above-mentioned substrate, be arranged in the drafting department zone, that constitute by at least one side of above-mentioned distribution and foregoing circuit element of above-mentioned architrave photomask;
In the zone of above-mentioned architrave photomask, overlapping with above-mentioned drafting department, bury in the zone of above-mentioned architrave photomask and from above-mentioned substrate side cover by the downside photomask of the island of a plurality of separation.
17. the electro-optical device of record in the claim 16 is characterized in that:
The 2nd downside photomask of the island that also comprises zone beyond the formation zone of above-mentioned drafting department in the zone that is formed on above-mentioned architrave photomask, is formed as same film with above-mentioned downside photomask.
18. the electro-optical device of record in the claim 17 is characterized in that:
Distance between the adjacent island of above-mentioned the 2nd downside photomask is below 4 microns.
19. the electro-optical device of record in the claim 16 is characterized in that:
Also be furnished with
When being installed, this electro-optical device formed the mounting cup of the display window corresponding with the above-mentioned image display area of being stipulated by above-mentioned architrave photomask,
At least one side of above-mentioned downside photomask and above-mentioned the 2nd downside photomask, zone to the small part between the edge of the edge of above-mentioned display window and above-mentioned image display area is formed.
20. the electro-optical device of record in the claim 16 is characterized in that:
In the zone of above-mentioned architrave photomask, also is furnished with the architrave photomask of the upside that is configured in above-mentioned drafting department, simultaneously
This architrave photomask contains aluminium at least.
21. an electro-optical device is characterized in that: be furnished with
Be configured in the demonstration electrode of on-chip image display area;
Stipulate the architrave photomask on every side of above-mentioned image display area;
By pixel transitions with element or be directly connected in above-mentioned demonstration distribution with electrode;
Formation provides the circuit component of the peripheral circuit that picture signal uses with electrode to above-mentioned demonstration;
Between above-mentioned architrave photomask and above-mentioned substrate, be arranged in the drafting department zone, that constitute by at least one side of above-mentioned distribution and foregoing circuit element of above-mentioned architrave photomask;
In the zone of above-mentioned architrave photomask, overlapping with above-mentioned drafting department, the downside photomask that buries the regional interior of above-mentioned architrave photomask and cover from above-mentioned substrate side;
Cover as the 2nd transistorized at least channel region of above-mentioned pixel transitions from above-mentioned substrate side, as photomask in the zone that is formed with the same film of above-mentioned downside photomask with element;
In the zone that comprises above-mentioned architrave photomask, be positioned at least a portion of outer peripheral areas of the periphery of above-mentioned image display area, as with above-mentioned downside photomask and above-mentioned zone in the 2nd downside photomask that is formed of the same film of photomask.
22. the electro-optical device of record in the claim 21 is characterized in that:
In above-mentioned outer peripheral areas, also be furnished with the peripheral circuit that is connected and is used for above-mentioned demonstration is driven with electrode with above-mentioned drafting department,
Above-mentioned the 2nd downside photomask is formed on the zone in addition, formation zone that reaches the 2nd drafting department that forms each circuit component between each distribution that constitutes above-mentioned peripheral circuit.
23. the electro-optical device of record in the claim 21 is characterized in that:
Above-mentioned the 2nd downside photomask is formed island.
24. the electro-optical device of record in the claim 23 is characterized in that:
Distance between the adjacent island of above-mentioned the 2nd downside photomask is below 4 microns.
25. the electro-optical device of record in the claim 21 is characterized in that:
Also be furnished with
When being installed, this electro-optical device formed the mounting cup of the display window corresponding with the above-mentioned image display area of being stipulated by above-mentioned architrave photomask,
At least one side of above-mentioned downside photomask and above-mentioned the 2nd downside photomask, zone to the small part between the edge of the edge of above-mentioned display window and above-mentioned image display area is formed.
26. the electro-optical device of record in the claim 21 is characterized in that:
Above-mentioned architrave photomask contains aluminium at least.
27. an electronic equipment is characterized in that: possess following electro-optical device, this electro-optical device comprises
Be configured in the demonstration electrode of on-chip image display area;
Stipulate the architrave photomask on every side of above-mentioned image display area;
By pixel transitions with element or be directly connected in above-mentioned demonstration distribution with electrode;
Formation provides the circuit component of the peripheral circuit that picture signal uses with electrode to above-mentioned demonstration;
Between above-mentioned architrave photomask and above-mentioned substrate, be arranged in the drafting department zone, that constitute by at least one side of above-mentioned distribution and foregoing circuit element of above-mentioned architrave photomask;
In the zone of above-mentioned architrave photomask, overlapping with above-mentioned drafting department, the downside photomask that buries the regional interior of above-mentioned architrave photomask and cover from above-mentioned substrate side.
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001309103 | 2001-10-04 | ||
| JP309103/2001 | 2001-10-04 | ||
| JP2002264521A JP3669351B2 (en) | 2001-10-04 | 2002-09-10 | Electro-optical device and electronic apparatus |
| JP264521/2002 | 2002-09-10 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1410805A CN1410805A (en) | 2003-04-16 |
| CN1207613C true CN1207613C (en) | 2005-06-22 |
Family
ID=26623723
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB02144496XA Expired - Fee Related CN1207613C (en) | 2001-10-04 | 2002-09-30 | Electrooptics device and electronic apparatus |
Country Status (7)
| Country | Link |
|---|---|
| US (4) | US7061567B2 (en) |
| EP (1) | EP1306716B1 (en) |
| JP (1) | JP3669351B2 (en) |
| KR (3) | KR100504293B1 (en) |
| CN (1) | CN1207613C (en) |
| DE (1) | DE60237342D1 (en) |
| TW (1) | TWI266135B (en) |
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- 2002-09-30 US US10/259,390 patent/US7061567B2/en not_active Expired - Lifetime
- 2002-09-30 CN CNB02144496XA patent/CN1207613C/en not_active Expired - Fee Related
- 2002-10-04 DE DE60237342T patent/DE60237342D1/en not_active Expired - Lifetime
- 2002-10-04 EP EP02256969A patent/EP1306716B1/en not_active Expired - Lifetime
- 2002-10-04 KR KR10-2002-0060553A patent/KR100504293B1/en not_active IP Right Cessation
-
2005
- 2005-04-22 KR KR20050033540A patent/KR100538600B1/en active IP Right Grant
- 2005-09-06 KR KR1020050082613A patent/KR100662966B1/en active IP Right Grant
-
2006
- 2006-03-13 US US11/373,285 patent/US7233372B2/en not_active Expired - Lifetime
-
2007
- 2007-05-08 US US11/797,838 patent/US7362397B2/en not_active Expired - Lifetime
-
2008
- 2008-03-04 US US12/073,344 patent/US20080198314A1/en not_active Abandoned
Also Published As
| Publication number | Publication date |
|---|---|
| KR20030029037A (en) | 2003-04-11 |
| KR20050048562A (en) | 2005-05-24 |
| KR100662966B1 (en) | 2006-12-28 |
| US7233372B2 (en) | 2007-06-19 |
| US20030076459A1 (en) | 2003-04-24 |
| EP1306716A2 (en) | 2003-05-02 |
| JP3669351B2 (en) | 2005-07-06 |
| KR20050094387A (en) | 2005-09-27 |
| EP1306716A3 (en) | 2004-01-21 |
| JP2003177427A (en) | 2003-06-27 |
| US7061567B2 (en) | 2006-06-13 |
| US20070206147A1 (en) | 2007-09-06 |
| EP1306716B1 (en) | 2010-08-18 |
| KR100504293B1 (en) | 2005-07-28 |
| US7362397B2 (en) | 2008-04-22 |
| KR100538600B1 (en) | 2005-12-22 |
| TWI266135B (en) | 2006-11-11 |
| CN1410805A (en) | 2003-04-16 |
| DE60237342D1 (en) | 2010-09-30 |
| US20080198314A1 (en) | 2008-08-21 |
| US20060152665A1 (en) | 2006-07-13 |
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