CN1202283A - 在较低温下密封粘合氧化物材料的方法 - Google Patents
在较低温下密封粘合氧化物材料的方法 Download PDFInfo
- Publication number
- CN1202283A CN1202283A CN 96198351 CN96198351A CN1202283A CN 1202283 A CN1202283 A CN 1202283A CN 96198351 CN96198351 CN 96198351 CN 96198351 A CN96198351 A CN 96198351A CN 1202283 A CN1202283 A CN 1202283A
- Authority
- CN
- China
- Prior art keywords
- glass
- substrate
- aluminium
- fusing point
- transition zone
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Images
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
- H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
- H03H3/08—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of resonators or networks using surface acoustic waves
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DK1280/95 | 1995-11-16 | ||
DK128095A DK128095A (da) | 1995-11-16 | 1995-11-16 | Fremgangsmåde til hermetisk tæt sammenføjning af oxidmaterialer ved relativt lave temperaturer |
Publications (1)
Publication Number | Publication Date |
---|---|
CN1202283A true CN1202283A (zh) | 1998-12-16 |
Family
ID=8103067
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN 96198351 Pending CN1202283A (zh) | 1995-11-16 | 1996-11-15 | 在较低温下密封粘合氧化物材料的方法 |
Country Status (5)
Country | Link |
---|---|
EP (1) | EP0861521A1 (da) |
JP (1) | JP2000500111A (da) |
CN (1) | CN1202283A (da) |
DK (1) | DK128095A (da) |
WO (1) | WO1997018628A1 (da) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105784189A (zh) * | 2016-05-05 | 2016-07-20 | 厦门大学 | 硅-玻璃-硅结构声表面波温度和压力集成传感器及制备 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5594979A (en) * | 1984-09-13 | 1997-01-21 | Raytheon Company | Method for packaging a surface acoustic wave device |
US4995149A (en) * | 1990-03-26 | 1991-02-26 | At&T Bell Laboratories | Method for hermetically sealing electronic devices |
US5453652A (en) * | 1992-12-17 | 1995-09-26 | Matsushita Electric Industrial Co., Ltd. | Surface acoustic wave device with interdigital transducers formed on a holding substrate thereof and a method of producing the same |
DE69426789T2 (de) * | 1993-04-28 | 2001-08-02 | Matsushita Electric Industrial Co., Ltd. | Akustische Oberflächenwellenanordnung und Herstellungsverfahren dafür |
-
1995
- 1995-11-16 DK DK128095A patent/DK128095A/da not_active Application Discontinuation
-
1996
- 1996-11-15 EP EP96938027A patent/EP0861521A1/en not_active Ceased
- 1996-11-15 JP JP9518518A patent/JP2000500111A/ja active Pending
- 1996-11-15 CN CN 96198351 patent/CN1202283A/zh active Pending
- 1996-11-15 WO PCT/DK1996/000470 patent/WO1997018628A1/en not_active Application Discontinuation
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105784189A (zh) * | 2016-05-05 | 2016-07-20 | 厦门大学 | 硅-玻璃-硅结构声表面波温度和压力集成传感器及制备 |
CN105784189B (zh) * | 2016-05-05 | 2018-12-25 | 厦门纵能电子科技有限公司 | 硅-玻璃-硅结构声表面波温度和压力集成传感器及制备 |
Also Published As
Publication number | Publication date |
---|---|
WO1997018628A1 (en) | 1997-05-22 |
EP0861521A1 (en) | 1998-09-02 |
JP2000500111A (ja) | 2000-01-11 |
DK128095A (da) | 1997-05-17 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C01 | Deemed withdrawal of patent application (patent law 1993) | ||
WD01 | Invention patent application deemed withdrawn after publication |