CN120051352A - 测量系统、机床、光学装置、测量方法、计算机程序及记录介质 - Google Patents

测量系统、机床、光学装置、测量方法、计算机程序及记录介质 Download PDF

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Publication number
CN120051352A
CN120051352A CN202280101103.XA CN202280101103A CN120051352A CN 120051352 A CN120051352 A CN 120051352A CN 202280101103 A CN202280101103 A CN 202280101103A CN 120051352 A CN120051352 A CN 120051352A
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CN
China
Prior art keywords
measurement
stage
light
optical device
workpiece
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202280101103.XA
Other languages
English (en)
Chinese (zh)
Inventor
增井仁
井上裕彦
石川贵悠
中俊介
菅原一真
花岛悠一
谷泽优介
茂庭博明
山本幸三
亀井祐希
森田乔之
根岸武利
早川宗汰
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nikon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corp filed Critical Nikon Corp
Publication of CN120051352A publication Critical patent/CN120051352A/zh
Pending legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q17/00—Arrangements for observing, indicating or measuring on machine tools
    • B23Q17/24—Arrangements for observing, indicating or measuring on machine tools using optics or electromagnetic waves
    • B23Q17/2428—Arrangements for observing, indicating or measuring on machine tools using optics or electromagnetic waves for measuring existing positions of tools or workpieces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q17/00—Arrangements for observing, indicating or measuring on machine tools
    • B23Q17/22—Arrangements for observing, indicating or measuring on machine tools for indicating or measuring existing or desired position of tool or work
    • B23Q17/2233—Arrangements for observing, indicating or measuring on machine tools for indicating or measuring existing or desired position of tool or work for adjusting the tool relative to the workpiece
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q17/00—Arrangements for observing, indicating or measuring on machine tools
    • B23Q17/24—Arrangements for observing, indicating or measuring on machine tools using optics or electromagnetic waves
    • B23Q17/248—Arrangements for observing, indicating or measuring on machine tools using optics or electromagnetic waves using special electromagnetic means or methods
    • B23Q17/2495—Arrangements for observing, indicating or measuring on machine tools using optics or electromagnetic waves using special electromagnetic means or methods using interferometers

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Electromagnetism (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Machine Tool Sensing Apparatuses (AREA)
CN202280101103.XA 2022-11-07 2022-11-07 测量系统、机床、光学装置、测量方法、计算机程序及记录介质 Pending CN120051352A (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2022/041449 WO2024100738A1 (ja) 2022-11-07 2022-11-07 計測システム、工作機械、光学装置、計測方法、コンピュータプログラム及び記録媒体

Publications (1)

Publication Number Publication Date
CN120051352A true CN120051352A (zh) 2025-05-27

Family

ID=91032283

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202280101103.XA Pending CN120051352A (zh) 2022-11-07 2022-11-07 测量系统、机床、光学装置、测量方法、计算机程序及记录介质

Country Status (4)

Country Link
EP (1) EP4616996A1 (enExample)
JP (1) JPWO2024100738A1 (enExample)
CN (1) CN120051352A (enExample)
WO (1) WO2024100738A1 (enExample)

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0768451A (ja) * 1993-06-30 1995-03-14 Nikon Corp 形状測定方法および装置
JP2006005137A (ja) * 2004-06-17 2006-01-05 Canon Inc 位置決めステージ装置
JP5428538B2 (ja) 2008-06-20 2014-02-26 株式会社ニコン 干渉装置
US8619265B2 (en) * 2011-03-14 2013-12-31 Faro Technologies, Inc. Automatic measurement of dimensional data with a laser tracker
US9036134B2 (en) 2013-02-12 2015-05-19 Faro Technologies, Inc. Multi-mode optical measurement device and method of operation
JP2015072137A (ja) 2013-10-01 2015-04-16 株式会社 光コム 光学式計測装置
JP6619823B2 (ja) 2015-06-04 2019-12-11 ルーミンコード エーエス 自由空間位置ファインダー
JP2017067704A (ja) * 2015-10-01 2017-04-06 トヨタ紡織株式会社 ３次元形状データ作成方法及びそれを用いた部品検査方法、並びに３次元形状データ作成装置及び部品検査プログラム
JP2020085633A (ja) 2018-11-22 2020-06-04 株式会社キーエンス 変位測定システム、変位測定装置、変位測定方法
JP7346775B2 (ja) 2018-12-25 2023-09-20 株式会社Xtia 光学測定機器及びそのデータ生成方法
WO2022162893A1 (ja) * 2021-01-29 2022-08-04 株式会社ニコン 工作機械、光学系及び計測装置

Also Published As

Publication number Publication date
JPWO2024100738A1 (enExample) 2024-05-16
EP4616996A1 (en) 2025-09-17
WO2024100738A1 (ja) 2024-05-16

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