CN1199500A - Display panels using fibrous field emitters - Google Patents

Display panels using fibrous field emitters Download PDF

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Publication number
CN1199500A
CN1199500A CN96197589A CN96197589A CN1199500A CN 1199500 A CN1199500 A CN 1199500A CN 96197589 A CN96197589 A CN 96197589A CN 96197589 A CN96197589 A CN 96197589A CN 1199500 A CN1199500 A CN 1199500A
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CN
China
Prior art keywords
microns
groove
group
convex ridge
display floater
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CN96197589A
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Chinese (zh)
Inventor
A·米勒尔
D·J·贝赤斯
S·A·利普
J·P·约翰森
小D·I·阿梅
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EIDP Inc
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EI Du Pont de Nemours and Co
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Publication of CN1199500A publication Critical patent/CN1199500A/en
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B82NANOTECHNOLOGY
    • B82YSPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J1/00Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
    • H01J1/02Main electrodes
    • H01J1/30Cold cathodes, e.g. field-emissive cathode
    • H01J1/304Field-emissive cathodes
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J29/00Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
    • H01J29/02Electrodes; Screens; Mounting, supporting, spacing or insulating thereof
    • H01J29/04Cathodes
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J31/00Cathode ray tubes; Electron beam tubes
    • H01J31/08Cathode ray tubes; Electron beam tubes having a screen on or from which an image or pattern is formed, picked up, converted, or stored
    • H01J31/10Image or pattern display tubes, i.e. having electrical input and optical output; Flying-spot tubes for scanning purposes
    • H01J31/12Image or pattern display tubes, i.e. having electrical input and optical output; Flying-spot tubes for scanning purposes with luminescent screen
    • H01J31/123Flat display tubes
    • H01J31/125Flat display tubes provided with control means permitting the electron beam to reach selected parts of the screen, e.g. digital selection
    • H01J31/126Flat display tubes provided with control means permitting the electron beam to reach selected parts of the screen, e.g. digital selection using line sources
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2201/00Electrodes common to discharge tubes
    • H01J2201/30Cold cathodes
    • H01J2201/304Field emission cathodes
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2201/00Electrodes common to discharge tubes
    • H01J2201/30Cold cathodes
    • H01J2201/304Field emission cathodes
    • H01J2201/30446Field emission cathodes characterised by the emitter material
    • H01J2201/30453Carbon types
    • H01J2201/30457Diamond
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2329/00Electron emission display panels, e.g. field emission display panels

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  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Nanotechnology (AREA)
  • Physics & Mathematics (AREA)
  • Mathematical Physics (AREA)
  • Theoretical Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Cathode-Ray Tubes And Fluorescent Screens For Display (AREA)
  • Electrodes For Cathode-Ray Tubes (AREA)

Abstract

Display panels comprise at least one suspended fibrous cathode containing an electron field emitter. The fibrous cathode is supported by a substrate (10) containing two sets of parallel rows of crests and valleys. The first set of parallel crests (11) and valleys (12) provide the valleys along which the fibrous cathode is aligned. The second set of parallel crests (13) and valleys (14) is perpendicular to the first set. The valleys (14) provide the means for suspending the fibrous cathode.

Description

Utilize the display floater of fiber field launcher
Invention field
Present invention relates in general to display floater.Especially the display floater that has the fiber negative electrode of a suspension that comprises electron field emitters.
Background of invention
Display screen has extremely wide purposes, such as family and commercial large screen television, and kneetop computer and desktop computer, and indoor and outdoor advertisement and information demonstration.So-called flat-panel screens be only several inches thick, rather than the monitor of on general television set and desktop computer, using that dark cathode ray tube is arranged.Flat display floater is that kneetop computer is necessary, and provides it in the advantage aspect size and the weight in many other used.Present kneetop computer plane shows and utilizes and can be converted to a kind of liquid crystal of opaque state from a kind of pellucidity by the applying of the little signal of telecommunication.This is difficult to produce those the larger sized display screens greater than kneetop computer.
The recommended replacement liquid crystal display of Plasma Display.Plasma Display utilizes the small pixel of discharge gas to produce image, and requires bigger electric power to operate.
Have a negative electrode that utilizes field emission electron source, promptly the display floater of field emmision material or field emission device and fluorescer that can be luminous under field emission device electrons emitted bombardment is suggested.Such display floater has Visual Display to be better than the conventional cathode ray tube and the degree of depth, and weight and power consumption are better than the potentiality that the plane shows.U.S. Patent No. 4,857,799 and 5,015,912 disclose utilization by tungsten, and the matrix of miniature-tip cathode that molybdenum or silicon constituted-addressing plane shows.The plane that WO94-15352, WO94-15350 and WO94-28571 disclose the negative electrode that more flat emitting surface is arranged shows.
Find that now the fiber negative electrode has the advantage of the emitting surface that can provide more smooth than negative electrode.The fiber negative electrode is by the substrate support, and is addressed when the part of fiber negative electrode, and the electronics emission takes place from here, and the fiber negative electrode is draped and when not contacting with substrate generation direct physical, can further improves performance.As a result, when needs, just require another kind of technology to be used for high-quality and effective and the large scale display floater of these purposes with manufacturing.Other object and advantage of the present invention will be familiar with the following accompanying drawing of this professional personage reference and detailed description back of the present invention come into plain view.
Summary of the invention
The invention provides a kind of display floater that comprises the formed fiber negative electrode of fiber of field emission material by at least a that comprises, conducting film is as anode, and and the fiber negative electrode between a gap is arranged, and can be when being bombarded luminous phosphor layer by fiber field emission material electrons emitted, and be configured with anode contiguous, the fiber negative electrode is by substrate support therein, said fiber cathode portion is addressed, therefrom produce electronics emission, and be draped and with substrate not direct physical contact.
An embodiment provides:
A. in suprabasil contoured surface clocklike, have on it first group of parallel convex ridge capable capable with groove and second group parallel convex ridge is capable and groove is capable, wherein capable the and groove of first group convex ridge is capable capable and groove is capable not parallel with convex ridge second group;
B. substantially be in line by the length direction of at least a formed fiber negative electrode of fiber that comprises field emission material along first group of each groove that parallel convex ridge is capable and groove is capable; With
C. the hanging element of placing along the length direction of second group of each groove that parallel convex ridge is capable and groove is capable, the Muller's fibers negative electrode.
Preferably, capable capable parallel convex ridge is capable and groove is capable perpendicular to second group with groove for first group of parallel convex ridge.Be preferably in substrate in addition in second group of groove that parallel convex ridge is capable and groove is capable and the side of groove, all be coated with layer of conductive material.This conductive coating is as gate electrode.Hanging element can comprise the non-emission fiber that the length direction of along second group of parallel convex ridge capable and groove each groove in capable is in line.The length direction of capable and groove each groove in capable is in line the second non-emission fiber along second group of parallel convex ridge on the top of fiber negative electrode, thereby fixing said fiber negative electrode.
Another embodiment provides
A. in suprabasil contoured surface clocklike, there is the capable and low basically flat convex ridge of parallel groove capable on it; And
B. the fiber negative electrode is arranged in parallel by regular intervals basically, and the fiber that comprises emissive material constitutes, and wherein fiber is by the low basically flat capable support of convex ridge of substrate, and be suspended in substrate groove above.
In this embodiment, preferably, in the groove that capable and low basically flat convex ridge is capable at one group of substrate parallel groove and the side of groove, all be coated with layer of conductive material, that is, make substrate along each row groove the capable rather than low basically flat capable continuous electric conducting material band of last layer that is coated with of convex ridge.Each said conductive coating band is as gate electrode.The surface energy that rises and falls forms by the level and smooth substrate of etching, hangs down the slight etched zone of flat convex ridge corresponding to substrate basically, and groove is corresponding to the zone of the deep etching of substrate simultaneously.(the present invention also can use other removing and make up the device that material forms groove and convex ridge).
Among described two embodiment, can provide an additional gate electrode at least in the above to control the emission of electronics better.More preferably the fiber negative electrode comprises at least a diamond, and by the diamond of non-diamond core, diamond type carbon or type of glass carbon constitute basically for diamond type carbon or type of glass carbon synthetic fibers, synthetic fibers.Be appreciated that the diamond that has described above, the synthetic fibers of diamond type carbon or type of glass carbon coating also can comprise the coating of above combination.
These embodiment are provided at the improvement of electronics emission control in the display floater.
The accompanying drawing summary
Fig. 1 (a) shows one embodiment of the present of invention, and it is capable capable with groove and perpendicular to second group of substrate that parallel convex ridge is capable and groove is capable promptly to comprise first group of parallel convex ridge.
The right angle face of Fig. 1 (b) and 1 (c) displayed map 1, show the convex ridge include a fiber negative electrode between hanging element and retaining element capable with capable parallel of groove.
Fig. 2 comprises Fig. 2 (a), and 2 (b) and 2 (c) illustrate another possible embodiment of the present invention, and wherein to be that parallel groove convex ridge capable and substantially flat is capable form with the diamond type lattice in substrate.
Preferred embodiment describes in detail
The invention provides the display floater that comprises the fiber negative electrode, the fiber cathode portion that electronics emission wherein takes place is addressed, and is draped and does not have direct physics to contact with substrate.
Preferably include by display floater provided by the present invention: (a) the formed fiber negative electrode of fiber that constitutes by a plurality of field emission materials; (b) one has lattice, and transparent conducting film is as anode, and a space is arranged between the fiber negative electrode; (C) phosphor layer simultaneously is positioned in the position of next-door neighbour's anode, the emitting electrons bombardment of the fiber by the fiber negative electrode and photoluminescence.
Not departing from the anode of spirit of the present invention and the arrangement and the placement of phosphor layer is fine.For example, phosphor layer can be configured between anode and the negative electrode or, in addition, anode can be configured between phosphor layer and the negative electrode.Typical display floater also can comprise one or more gate electrodes between anode and fiber negative electrode.Gate electrode usually comprises a kind of lattice structure that is arranged to the conduction pathway that is basically perpendicular to anode lattice film.Each bar conduction pathway is selectively, operationally is connected with power supply.
The plane show why cry like this be because of they only several inches thick.They generally are the planes, but can be crooked or other structure arranged by special purpose.Like this, as the application here, term " display floater " or " two-d display panel " comprise the plane, curved surface and other possible geometry face.
Anode is the conducting film on supporting bracket.Typically supporting bracket must be a kind of light transmissive material such as glass, simultaneously conducting film must be indium-tin-oxide.The sun that conducting film is placed on faces cathode is established the side of supporting bracket.Conducting film can be a lattice, and in such embodiments, the lattice conductive membranes preferably is made up of the conductive material of embarking on journey.Though although the surface can be configured can carry out the surface of field emission performance more perfectly, typical negative electrode and anode are planar structures.The plane of anode basically with the plane parallel of negative electrode.Typically negative electrode and anode keep certain space mutually by a mechanical positioning device.Phosphor layer is by the light of the electron bombard emission wavelength that requires of fiber cathode emission.The example of such fluorescer comprises zinc oxide, zinc sulphide, zinc sulphide coating and or the like this type of material.Preferably, the very contiguous anode of phosphor layer; Simultaneously, for easily manufactured, can directly be deposited on the conducting film.
When using, gate electrode typically comprises a kind of electric conducting material of lattice, it and the fiber negative electrode and the anodized insulation that comprise phosphor layer.By the electric conducting material of lattice being deposited between negative electrode and the phosphor layer or on the insulating material of negative electrode back, thereby make cathode arrangement between gate electrode and anode, this is easy to finish.When (for example can be flat or contoured surface), gate electrode can be formed in the substrate of Muller's fibers negative electrode when this substrate has suitable molded surface.The material that is suitable for gate electrode comprise generally be used as film conductor such as copper, gold, aluminium, indium-tin-oxide, tungsten, molybdenum, chromium and similar any metallic conductor.Lattice material can form by the form of row or band.
Between negative electrode and phosphor layer, if when perhaps anode is between negative electrode and phosphor layer then the zone between negative electrode and anode should provide a kind of suitable vacuum.All materials that are used to form the contact of display floater or are exposed to vacuum must be suitable for a kind of like this vacuum.
The field launcher or the field emission material that are used for fiber negative electrode of the present invention are field emission source.Various fibers or fibroid geometric form material can be used for forming the fiber negative electrode that comprises at least a such fiber." fiber " means a size, and two kinds of sizes than other are bigger utterly." fiber-like " means the structure of any like fibrous, even the sort of structure can be unmovable, and can not support its weight.For example, certain " fiber-like " structure, typically its diameter can directly be produced in substrate less than 10 microns.If not of the restriction (for example, the design of wire drawing die or spinning head) of manufacturing means, can use the fiber of Any shape to the fibre section.In addition, the variant of spinning head shape can produce the interior molecules microstructure of desirable fiber own.Fiber can be banded in together in the mode of some filaments.
These fibers can be made separately by field emission device, or are equipped with the non-field emission device core of a thin layer and coat a kind of synthetic fibers of the circumnuclear field emission device of skim.Preferably, core material should be conductor or semiconductor.In another embodiment, fiber can be made up of a kind of more complicated structure, and for example, the non-conductor core that is centered on is coated skim conductor or semi-conducting material, on the coating again around being coated with the last layer field emission material.
The present invention can use, for example, diamond, diamond type carbon or type of glass carbon are as field emission material.The fiber negative electrode can comprise diamond, the synthetic fibers of diamond type carbon or type of glass carbon, and these synthetic fibers are included in the diamond on the non-diamond core fiber, diamond type carbon, and type of glass carbon.Core material can be, for example, conductor carbon such as graphite or metal be such as tungsten, copper, and titanium or molybdenum, also semiconductor, for example, silicon or silicon carbide.In another embodiment, core a kind of metallized insulator such as on tungsten, being coated with one deck non-conductor polyester, nylon or KevLar fiber (KevLar is PontNemours and company E.1.du, Wilmington, the trade mark of the registration of DE).In other embodiments, with one deck diamond, the precursor of diamond type carbon or type of glass carbon is applied on the non-diamond core, the while diamond, and diamond type carbon or type of glass carbon form by the suitable processing to precursor.
Diamond fiber and fibers gold hard rock synthetic, be coated with last layer graphite or diamond-be coated with last layer carbon such as diamond, preferably include diamond sub-micron scale crystalloid structure, that is, adamantine crystal size is tieed up to a kind of crystalline size being arranged less than 1 micron a crystallization at least.In the diamond crystal of submicron-scale, such diamond crystal comprises that at least some expose the directed crystal face of 111-, and some are exposed to the directed crystal face of 100-, and perhaps the both has.Another diamond form that is fit to submicron-scale is generally known as the cauliflower diamond, and this diamond has the fine grain ball with respect to cone structure.
Comprise the diamond type carbon of being furnished with a suitable short range order, that is, the fiber of suitable sp2 and the combination of sp3 can provide the field emmision material with high current density." short range order " means that generally the orderly arrangement of atom on virtually any size is less than 10 nanometers (nm).Also may be to utilize fiber, for example, carbon fiber, via Davanloo etc. at J.Mater.Res., Vol.5, the laser ablation of the last description of Nov.1990. is coated with the last layer amorphous diamond.
Comprise type of glass carbon, a kind of Raman's of demonstration convex ridge is also useful at the fiber that is used as the field emission device material of the unbodied material of about 1380 centimetres and 1598 centimetres." diamond type carbon " is used for specifying diamond type carbon and type of glass carbon in the text here and comprises the carbon of the little alloy of type of glass carbon, and all these materials performance as the fiber field emission material time all is a diamond type carbon.
Usually, total diameter range of synthetic fibers is preferably from about 3 microns to about 15 microns from about 1 micron to 100 microns.Emissive material layer in the synthetic fibers or coating generally from about 50 dusts (5 nanometer) to about 50,000 dusts (5 microns), be preferably from about 1000 dusts (0.1 micron) to 20,000 dust (2 microns), preferably from 1,000 dust (0.1 micron) to about 5,000 dusts (0.5 micron).
Typically, diamond has the facet of some low indexes low or negative electron affinity, for example, have a kind of 100-facet diamond of low electron affinity, and 111-facet diamond has a kind of negative electron affinity.Diamond type carbon or type of glass carbon are preferably and have n-type alloy, and for example, nitrogen or phosphorus so that more polyelectron to be provided, and reduce the work functions of material.
A kind of like this diamond or diamond type carbon-coating preferably have thick jagged edge, make a series of convex ridges and groove be provided for diamond or diamond type carbon-coating.In diamond coatings, this configuration of surface is the microstructure generation by diamond.Trace graphite is configured between at least a portion of the diamond crystal in the said diamond coatings can obtain better result.Because the slight alignment error between the crystal growing preferably also can be via the mode growing diamond of chemical vapor deposition (CVD) with column.This alignment error also can promote the development of the jagged edge of diamond form.
A kind of mode that the diamond synthetic fibers are provided is via the plasma CVD process inflow to be comprised that a small amount of carbonaceous gas is such as methane, ethene, the admixture of gas of carbon monoxide etc. and a large amount of hydrogen, use microwave-excitation, radio frequency line excites or heated filament excites in the substrate of fiber shape and is coated with one deck diamond.When graphite is the core of the synthetic core of diamond, the diamond CVD coating procedure is by slightly modified, because well-known graphite is a kind ofly very difficultly to be coated with the adamantine material of last layer via CVD, this is because graphite base is fallen in the hydrogen atom ablation in plasma.Therefore, preliminary treatment graphite preferably is so that be that the diamond on graphite fibre surface increases nuclear location density.Graphite fibre can be blended in the liquid medium with bortz powder or grit, preferably stirs in organic solvent such as the methyl alcohol, and then melts the erosion surface, and embed the bortz powder particulate in graphite.
Show the substrate 10 that is used for embodiments of the invention in Fig. 1 (a), substrate therein comprises two groups, and parallel convex ridge is capable and groove is capable.First group of parallel convex ridge 11 and groove 12 (first group) provide these grooves, are arranged in delegation along these groove fiber negative electrodes (must comprise the fiber that at least one comprises field emission material).Second group of parallel convex ridge 13 is vertical with first group with groove 14 (second group) demonstration, and this is preferred configuration.Capable and the groove of two groups of convex ridges is capable to be shown and is attended by the perpendicular walls of the capable and groove of convex ridge between capable, but tilts or bending section also can be used.Show regularly between the parallel row that convex ridge is capable and groove is capable and separate, that is, and the distance between the center of two adjacent convex ridges or in each group, all be identical in the distance between the center of two adjacent grooves.In addition, (for example, three kinds of fluorescers can be used to provide colored the demonstration) size in first group can change so that the difference of the efficient of different fluorescers is compensated when some fluorescers are utilized.Under the sort of situation, each triad, that is, one group of the capable and groove behavior of per three pairs of convex ridges will separate regularly.
Show that in figure (1) typically, the groove of second group groove than first group is narrower and more shallow.Usually, first group of groove be about deeply 25 microns to about 250 microns dark, be preferably from about 100 microns to about 150 microns dark, about 10 microns to about 350 microns wide, be preferably from about 150 microns to 250 microns wide, and first group of convex ridge is preferably from about 50 microns to about 150 microns wide from about 25 microns to about 250 microns wide.Usually, second group groove about 10 microns to about 150 microns dark, be preferably from about 20 microns to about 50 microns dark, about 50 microns to about 125 microns wide, about 600 microns wide of second group convex ridge to 700 microns.Substrate can be by insulator such as sodium bicarbonate soda lime glass, heat resistant glass, and glass ceramics manufacturing.
Though aforementioned dimensions typically is used for high density television, those are proficient in this professional personage and will understand, size will change according to the type of other lower or higher pixel size or difform display floater.
On these base materials, form such two groups of typical methods that parallel convex ridge is capable and groove is capable and comprise etching, utilize the GREENTAPE of pottery TM(can be by E.I.du Pont de Nemousand Company, Wilmington, DE buys), sandblast, the thick film sequential aggradation, laser ablation and forging, however the present invention does not get rid of other possible method yet.
Second group groove provides the device that is used to hang the fiber negative electrode.The fiber negative electrode can be placed along the length of each groove of first group, and when second group of groove is shallow than first group of groove, surface suspension that can close second group of groove.Preferably, hanging element is placed so that support the fiber negative electrode along the length of each groove of second group.Hanging element is a kind of continuous structure, and for example, non-emission fiber is in line along the length of each groove, and the fiber negative electrode is shelved on it.Also available along the film that the length of each groove is extended.Shown among Fig. 1 (b) and 1 (c) that a use arranges along each groove length direction, as the embodiment of the non-emission fiber of hanging element, Fig. 1 (b) and 1 (c) be two orthogonal views of substrate shown in Fig. 1 (a).Before the fiber cathode arrangement is on substrate, preferably make substrate coat layer of conductive material, be used to apply a voltage to provide one, and produce the device of the required electric field of emission.Shown such electric conducting material 15 at Fig. 1 (b) with (c).Layer of conductive material is coated in substrate, except that the side of second group of groove and groove, thereby coats the parallel array of a continuous conduction material band for substrate.Each band of this parallel array is used as gate electrode.Fiber negative electrode 16 is shown as on the non-emission fiber 17 that is laid in each groove by second group.Shown that also the second non-emission fiber 18 is in line along the length direction of second group of each groove, and the top that is positioned at said fiber negative electrode is fixed on the original place with the fiber negative electrode.When hanging is not when realizing by non-emission fiber, can use along the length of second group of each groove to be in line, and the top that is positioned at said fiber negative electrode is fixed on the fiber negative electrode the non-emission fiber in original place yet.
In addition, hanging element can be a kind of discontinuous structure, comprises a series of pedestals in each intersection or the film of a groove of each groove of being positioned at second group and first group.When second group groove is the same or darker than it with first group groove, need to use hanging element.
One or more additional gate electrodes can further be controlled the emission of electronics better.
In another embodiment of the present invention, the surface that display floater rises and falls in substrate regularly, and that substrate comprises the capable and flat substantially convex ridge of parallel groove is capable.In this embodiment, the fiber negative electrode is to be made up of the rule space parallel array of fiber basically, and fiber support and is suspended on the groove of substrate on the low basically flat convex ridge of substrate therein.For example, can form the surface of fluctuating by the level and smooth substrate of etching, make flat substantially convex ridge corresponding to the slight etched zone of substrate, groove is corresponding to the zone of the deep etching of substrate simultaneously.The method that the substrate of this kinds of structures also can be provided with first embodiment in the above forms, and comprises laser ablation.Preferably, the fiber of fiber negative electrode and the parallel capable and capable perpendicular of convex ridge of groove.More preferably, be substrate to be coated with on the side and flat substantially convex ridge of the continuous electric conducting material band of last layer capable in parallel groove of groove (that is be coated with the continuous electric conducting material band of last layer on the capable but not low substantially flat convex ridge of each the parallel groove that, makes substrate is capable.And then, providing one deck electric conducting material band continuously to substrate like this, each such band is capable along each groove.This parallel array provides many gate electrodes (that is, each said band is as a gate electrode), and it is horizontally through these grooves along the direction of the fiber of fiber negative electrode.
The modification of this embodiment, better electronics emission control can be provided, but being these grooves becomes delegation is discontinuous with low flat convex ridge basically, promptly, the zone of this substrate is the contoured surface that successional groove and low basically flat convex ridge constitute, in this regional side is the zone of hanging down plane surface basically, is other continuous recess and basic surface of hanging down the fluctuating of flat convex ridge formation at these two another sides that hang down flat zone.Like this, according to this variant embodiment, still there are parallel groove and low basically flat convex ridge capable here; Yet they are not continuous row, and still, during (1) groove was capable, groove was configured along each well-regulated interval of row; And (2) low basically flat convex ridge is configured along each well-regulated interval of row.Such embodiment is shown in Fig. 2.Fig. 2 (a) is presented at a kind of possible etched pattern on the surface of substrate.This pattern can be used for forming groove and low basically flat convex ridge.Fig. 2 (b) show substrate with etched zone, and Fig. 2 (c) shows along the profile depth of the 21-22 circuit of Fig. 2 (b).The fiber of fiber negative electrode will be in line along the 21-22 circuit of Fig. 2 (b) and Fig. 2 (c).
The axle center that should be noted that each fiber of forming the fiber negative electrode in an embodiment of the present invention is located substantially on the cathode plane.Like this, launching from the electronics of these fibers is to launch along used fibre length direction, rather than from fibre tip or terminal emission.
To notice that as above substrate can be by insulator such as sodium bicarbonate soda lime glass, heat resistant glass (borosilicate glass) and glass ceramics manufacturing.Groove and low basically flat convex ridge can form with well-known etching technique.In an example, substrate of glass is cleaned (can by the Sparkleen  that fishery science provided) with detergent, and good with deionized water rinsing.Remove moisture with the isopropyl alcohol evaporator.The side of the glass of etched and pattern-making is coated with the thick chromium of last layer 50nm with the electron beam coater, is coated with the gold layer of last layer 200nm again.Positive photoresist (the EPA 914E2-30 that can be bought by Hoechst Celanese) gathers on the gold surface, and at 100 degree by baking 30 minutes.The exposure of photoresist is finished with Colight vacuum contact printer, and image develops with Ultramac MF 96 developing machines simultaneously.The gold image that exposes is by the etching of I2/KI solution, and is then etched in KTI Chrome Etch again in the chromium by this engraving method exposure.The glass that is exposed is etched in HF solution, so that obtain the suitable etch depth in glass.
Though described specific embodiments of the invention in the description in front, be familiar with this professional personage and will understand the many corrections that do not deviate from spirit of the present invention or important attribute, replace and rearrange and allow.Can be with reference in the additional claim in back, but not aforementioned specification, as scope of the present invention.

Claims (34)

1. comprise at least a display floater by the formed fiber negative electrode of the fiber that comprises field emission material, conducting film is as between anode and the fiber negative electrode gap being arranged, and can be the time luminous phosphor layer by the bombardment of fiber field emission material electrons emitted, and be configured with anode contiguous, the fiber negative electrode is by substrate support therein, said fiber cathode portion is addressed, therefrom produce the electronics emission, and be draped and with substrate not direct physical contact, the display floater here also comprises:
A. contoured surface clocklike in said substrate, have on it first group of parallel convex ridge capable capable with groove and second group parallel convex ridge is capable and groove is capable, wherein capable the and groove of first group convex ridge is capable capable and groove is capable not parallel with convex ridge second group;
B. be in line by the length direction of at least a fibroplastic fiber negative electrode that comprises field emission material along first group of each groove that parallel convex ridge is capable and groove is capable; And
C. hanging element is placed along the length direction of second group of each groove that parallel convex ridge is capable and groove is capable, and supports said fiber negative electrode.
2. the display floater of claim 1, wherein said substrate except in groove with the side of groove during capable at second group of parallel convex ridge of groove is capable, all be coated with layer of conductive material, thereby offering substrate one deck electric conducting material band continuously, each said band all is used as gate electrode.
3. the display floater of claim 2, wherein said fiber negative electrode comprises at least a diamond, diamond type carbon or type of glass carbon synthetic fibers, synthetic fibers are basically by the diamond on the non-diamond core, and diamond type carbon or type of glass carbon are formed.
4. the display floater of claim 1, wherein said hanging element comprise the non-emission fiber that the length direction of along said second group of parallel convex ridge capable and groove each groove in capable is in line.
5. the display floater of claim 4, wherein the second non-emission fiber that the length direction of capable and groove each groove in capable is in line along said second group of parallel convex ridge is on the top of said fiber negative electrode, thereby fixing said fiber negative electrode is in the original place.
6. any one display floater of claim 2-5 further comprises at least one additional gate electrode.
7. any one display floater of claim 2-5, wherein said first group of parallel convex ridge is capable, and capable parallel convex ridge is capable and groove is capable perpendicular to second group with groove.
8. the display floater of claim 7 further comprises at least one additional gate electrode.
9. the display floater of claim 7, wherein said first group of groove be about deeply 25 microns dark to 250 microns, about 10 microns wide to 350 microns, about 25 microns wide of said first group convex ridge to 250 microns, said second group groove about 10 microns dark to 150 microns, about 50 microns to 125 microns wide, about 600 microns wide of said second group convex ridge to 700 microns.
10. the display floater of claim 9, wherein said first group of groove be about deeply 100 microns dark to 150 microns, about 150 microns to 250 microns wide, about 50 microns to 150 microns wide of said first group convex ridge, said second group groove about 20 microns dark to 50 microns.
11. the display floater of claim 1 further comprises at least one gate electrode, wherein said first group of parallel convex ridge is capable, and capable parallel convex ridge is capable and groove is capable perpendicular to second group with groove.
12. the display floater of claim 11, wherein said first group of groove be about deeply 25 microns dark to 250 microns, about 10 microns wide to 350 microns, about 25 microns wide of said first group convex ridge to 250 microns, said second group groove about 10 microns dark to 150 microns, about 50 microns to 125 microns wide, about 600 microns wide of said second group convex ridge to 700 microns.
13. the display floater of claim 12, wherein said first group of groove be about deeply 100 microns dark to 150 microns, about 150 microns to 250 microns wide, about 50 microns to 150 microns wide of said first group convex ridge, said second group groove about 20 microns dark to 50 microns.
14. the display floater of any of claim 1 or 11-13, wherein said fiber negative electrode comprises at least a diamond, diamond type carbon or type of glass carbon synthetic fibers, synthetic fibers are basically by the diamond on the non-diamond core, and diamond type carbon or type of glass carbon are formed.
15. comprise at least a display floater by the fibroplastic fiber negative electrode that comprises field emission material, conducting film is as between anode and the fiber negative electrode gap being arranged, and can be the time luminous phosphor layer by the bombardment of fiber field emission material electrons emitted, and be configured with anode contiguous, wherein the fiber negative electrode is by substrate support, said fiber cathode portion is addressed, therefrom produce the electronics emission, and be draped and with substrate not direct physical contact, the display floater here also comprises:
A. said suprabasil contoured surface clocklike, have on it first group of parallel convex ridge capable capable with groove and second group parallel convex ridge is capable and groove is capable, wherein the capable and groove of first group convex ridge is capable capable and groove is capable not parallel with convex ridge second group, and second group groove is dark not as first group of groove.
B. the fiber negative electrode that comprises at least one fiber substantially is in line along the length direction of first group of each groove that parallel convex ridge is capable and groove is capable, and is suspended in the surface of second group of groove that parallel convex ridge is capable and groove is capable.
16. the display floater of claim 15, wherein said substrate is in second group of groove that parallel convex ridge is capable and groove is capable and the side of groove, all be coated with layer of conductive material, thereby offering the parallel array of substrate one deck continuous conduction band, each said band is all as a gate electrode.
17. the display floater of claim 16, wherein said fiber negative electrode comprises at least a diamond, by the diamond of non-diamond core, diamond type carbon or type of glass carbon constitute basically for diamond type carbon or type of glass carbon synthetic fibers, synthetic fibers.
18. the length of capable and groove each groove in capable is in line along said second group of parallel convex ridge on the top of said fiber negative electrode for the display floater of claim 17, wherein non-emission fiber, thereby fixing said fiber negative electrode.
19. any one display floater among the claim 16-18 further comprises the gate electrode that at least one is additional.
20. any one display floater among the claim 16-18, wherein said first group of parallel convex ridge is capable, and capable parallel convex ridge is capable and groove is capable perpendicular to second group with groove.
21. the display floater of claim 20, wherein, said first group of groove be about deeply 25 microns dark to 250 microns, about 10 microns wide to 350 microns, about 25 microns wide of said first group convex ridge to 250 microns, said second group groove about 10 microns to 150 microns dark, about 50 microns to 125 microns wide, about 600 microns wide of said second group convex ridge to 700 microns.
22. the display floater of claim 21, wherein, said first group of groove be about deeply 100 microns to 150 microns dark, about 150 microns wide to 250 microns, about 50 microns to 150 microns wide of said first group convex ridge, said second group groove about 20 microns dark to 50 microns.
23. the display floater of claim 15 further comprises at least one additional gate electrode, and wherein said first group of parallel convex ridge is capable, and capable parallel convex ridge is capable and groove is capable perpendicular to second group with groove.
24. the display floater of claim 23, wherein, said first group of groove be about deeply 25 microns dark to 250 microns, about 10 microns wide to 350 microns, about 25 microns wide of said first group convex ridge to 250 microns, said second group groove about 10 microns to 150 microns dark, about 50 microns to 125 microns wide, about 600 microns wide of said second group convex ridge to 700 microns.
25. the display floater of claim 24, wherein, said first group of groove be about deeply 100 microns to 150 microns dark, about 150 microns wide to 250 microns, about 50 microns to 150 microns wide of said first group convex ridge, said second group groove about 20 microns dark to 50 microns.
26. any one display floater among claim 15 or the 23-25, wherein said fiber negative electrode comprises at least a diamond, diamond type carbon or type of glass carbon synthetic fibers, basically by the diamond of non-diamond core, diamond type carbon or type of glass carbon constitute synthetic fibers.
27. comprise the display floater that comprises the formed fiber negative electrode of fiber of field emission material by at least a, conducting film also and between the fiber negative electrode has a gap as anode, and can be the time luminous phosphor layer by the bombardment of fiber field emission material electrons emitted, and be configured with anode contiguous, wherein the fiber negative electrode is by substrate support, said fiber cathode portion is addressed, therefrom produce the electronics emission, and be draped and with substrate not direct physical contact, the display floater here also comprises:
A. said suprabasil contoured surface clocklike, it is capable to comprise the capable and low basically flat convex ridge of parallel groove on it.
B. said fiber negative electrode basically by regular intervals be arranged in parallel fibrous, wherein said fiber is by the low basically flat capable support of convex ridge of substrate, and be suspended in substrate groove above.
28. the display floater of claim 27, in the wherein said substrate groove that capable and low basically flat convex ridge is capable except one group of parallel groove and the side of groove, all be coated with layer of conductive material, thereby offer the parallel array of substrate one deck continuous conduction band, a band is capable along a groove, and each said band is as a gate electrode.
29. the display floater of claim 28, wherein said fiber negative electrode comprises at least a diamond, by the diamond of non-diamond core, diamond type carbon or type of glass carbon constitute basically for diamond type carbon or type of glass carbon synthetic fibers, synthetic fibers.
30. the display floater of claim 29, wherein the surface energy of said fluctuating forms by the level and smooth substrate of etching, hangs down the slight etched zone of flat convex ridge corresponding to substrate so basically, and groove is corresponding to the zone of the deep etching of substrate simultaneously.
31. the display floater of claim 27, wherein said fiber negative electrode comprises at least a diamond, by the diamond of non-diamond core, diamond type carbon or type of glass carbon are formed basically for diamond type carbon or type of glass carbon synthetic fibers, synthetic fibers.
32. it is capable that any one display floater among the claim 27-31, the fiber of wherein said fiber negative electrode are substantially perpendicular to the capable and low basically flat convex ridge of said parallel groove.
33. any one display floater among the claim 28-31 further comprises at least one additional gate electrode.
34. it is capable that the display floater of claim 33, the fiber of wherein said fiber negative electrode are substantially perpendicular to the capable and low basically flat convex ridge of said parallel groove.
CN96197589A 1995-08-14 1996-08-06 Display panels using fibrous field emitters Pending CN1199500A (en)

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US60/002278 1995-08-14

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US6097140A (en) 2000-08-01
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EP0845150A1 (en) 1998-06-03
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DE69608284T2 (en) 2000-12-21
JPH11510949A (en) 1999-09-21
WO1997007524A1 (en) 1997-02-27
TW333635B (en) 1998-06-11
EP0845150B1 (en) 2000-05-10
KR100397714B1 (en) 2003-10-17

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