CN1194426C - Thin film thermocouple with suspended temperature measuring node - Google Patents
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- CN1194426C CN1194426C CNB021213496A CN02121349A CN1194426C CN 1194426 C CN1194426 C CN 1194426C CN B021213496 A CNB021213496 A CN B021213496A CN 02121349 A CN02121349 A CN 02121349A CN 1194426 C CN1194426 C CN 1194426C
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- thermocouple
- film
- permanent substrate
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- temperature measurement
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- 239000010409 thin film Substances 0.000 title abstract description 11
- 239000000758 substrate Substances 0.000 claims abstract description 68
- 238000009529 body temperature measurement Methods 0.000 claims abstract description 36
- 239000000463 material Substances 0.000 claims abstract description 19
- 239000011521 glass Substances 0.000 claims abstract description 7
- 239000007787 solid Substances 0.000 claims abstract description 7
- 229910001006 Constantan Inorganic materials 0.000 claims abstract description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 4
- 239000011810 insulating material Substances 0.000 claims abstract description 4
- 229920000620 organic polymer Polymers 0.000 claims abstract description 4
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 4
- 239000010703 silicon Substances 0.000 claims abstract description 4
- 239000007769 metal material Substances 0.000 claims abstract 3
- 239000000725 suspension Substances 0.000 claims description 23
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical group [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims description 19
- 229910052697 platinum Inorganic materials 0.000 claims description 8
- 238000007747 plating Methods 0.000 claims description 5
- 210000005239 tubule Anatomy 0.000 claims description 4
- 229910018487 Ni—Cr Inorganic materials 0.000 claims description 3
- VNNRSPGTAMTISX-UHFFFAOYSA-N chromium nickel Chemical compound [Cr].[Ni] VNNRSPGTAMTISX-UHFFFAOYSA-N 0.000 claims description 3
- 239000010408 film Substances 0.000 abstract description 66
- 229910044991 metal oxide Inorganic materials 0.000 abstract description 5
- 150000004706 metal oxides Chemical class 0.000 abstract description 5
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 abstract description 4
- 239000004065 semiconductor Substances 0.000 abstract description 4
- 239000000919 ceramic Substances 0.000 abstract description 2
- 229910052759 nickel Inorganic materials 0.000 abstract description 2
- LIXXICXIKUPJBX-UHFFFAOYSA-N [Pt].[Rh].[Pt] Chemical compound [Pt].[Rh].[Pt] LIXXICXIKUPJBX-UHFFFAOYSA-N 0.000 abstract 1
- 235000012431 wafers Nutrition 0.000 abstract 1
- 238000004519 manufacturing process Methods 0.000 description 11
- 238000010586 diagram Methods 0.000 description 6
- 239000012530 fluid Substances 0.000 description 5
- 239000007788 liquid Substances 0.000 description 5
- 238000005259 measurement Methods 0.000 description 5
- 238000000034 method Methods 0.000 description 4
- 239000007772 electrode material Substances 0.000 description 3
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical group [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 3
- 229910052753 mercury Inorganic materials 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 238000013461 design Methods 0.000 description 2
- 238000009413 insulation Methods 0.000 description 2
- 230000001681 protective effect Effects 0.000 description 2
- 230000005855 radiation Effects 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 230000001154 acute effect Effects 0.000 description 1
- 230000003321 amplification Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000004090 dissolution Methods 0.000 description 1
- 235000013399 edible fruits Nutrition 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 239000011343 solid material Substances 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
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- Measuring Temperature Or Quantity Of Heat (AREA)
Abstract
The invention relates to a thin-film thermocouple with suspended temperature measurement nodes, which comprises a permanent substrate made of solid insulating materials, a thermocouple thin film and a thermocouple thin film, wherein the thermocouple thin film and the thermocouple thin film are respectively plated on the surface of the permanent substrate, and the overlapped temperature measurement nodes are not in contact with the surface of the permanent substrate and are in a suspended state; the temperature measuring node is suspended above or on one side of the permanent substrate, and the permanent substrate is made of ceramics, silicon wafers, glass or organic polymers; the shape is thin slice, thin tube or thin rod; the thickness of the thermocouple film is 1 nanometer-0.1 millimeter, and the material is matched metal material; the matching material is platinum rhodium-platinum, nickel chromium-constantan, semiconductor or metal oxide; the thin film thermocouple with the suspended temperature measuring nodes has a suspended or cantilever structure because the temperature measuring nodes are separated from the permanent substrate, so that the thermal inertia of the nodes can be obviously reduced, and the response rate to the temperature change of a measured object is improved.
Description
Technical field
The invention belongs to Engineering Thermophysics and measuring instrument field, particularly a kind of film thermocouple of temperature measurement node point suspension.
Background technology
The measurement of temperature, it is the corresponding relation that utilizes certain specific character temperature of living in of material or structure with it, variation of temperature is converted into the variation of this material or structure and corresponding certain physical quantity of temperature, and this physical quantity can be measured directly or show.
Common mercurial thermometer is a height of representing temperature with the change in volume (showing as the variation of mercury position in the capillary glass tube) that the mercury in the glass envelope of sealing produces with gradient of temperature; Resistance thermometer is a characteristic of utilizing the resistance value of some conductive materials such as platinum or copper to change with temperature, by measuring its resistance value and obtaining temperature value through converting; Thermocouple thermometer then is to constitute electric loop by two kinds of different materials, and the principle that produces thermoelectric potential with its binding site under different temperatures is measured temperature.
Above-described all temps meter is when measuring the temperature of fluid or solid, because thermometer itself has certain thermal capacity, influences the accuracy of measuring to I haven't seen you for ages from two aspects, produces temperature measurement error.The existence that at first is temperature element may produce interference to the temperature field of measured medium, and it is changed; Next is that the actual temperature of temperature element lags behind the measured medium variation of temperature.Particularly when the temperature field in little space and the acute variation was measured, the thermal capacity of temperature element (or claiming thermal inertia) can cause serious error, even makes measurement lose meaning.Therefore reduce the physical dimension and the thermal capacity of temperature element, be to reduce error always, improves a main striving direction of temperature measurement accuracy and response speed.
Count the liquid-filled thermometer of representative with mercury temperature, utilize the change in volume of liquid to measure temperature, the space such as the glass envelope that need a sealing are deposited thermometric liquid, and its typical dimensions is 2～5 millimeters of diameters.Do not make great change as fruit structure, the volume of liquid-filled thermometer temperature-sensitive part and thermal capacity are difficult to further reduce.
Typical resistance thermometer is with the superfine platinum filament platinum resistance that coiling forms on insulation framework, adds the ceramic protective sleeve of insulation usually.Minimum platinum resistance, only about 1 millimeter of external diameter, length is less than 10 millimeters.But because thermal resistance thermometer comprises resistance wire, winding bracket and protecting sheathing; its thermal capacity is the thermal capacity sum of each parts; in a lot of miniature scale or the fast-changing thermometric occasion of temperature; the thermal inertia of thermal resistance is still too big; its protecting sheathing has increased thermal conduction resistance in addition, and the temperature response of thermal resistance is further reduced.
The thermometric end of thermocouple thermometer is the contact that is formed by two kinds of different materials, intersect and weld the node of formation as nickel filament and constantan wire at its end, as long as use hairline, as the little filament of diameter to the 1-50 micron, the volume of temperature measurement node point can be done very for a short time, and its thermal capacity reaches the one thousandth of platinum resistance thermometer even littler, and thermal response speed also improves [Temperature fluctuation measurements with finethermocouples (superfine thermo-electric couple is used for temperature fluctuation and measures) greatly, Talby, R., Anselmet, F., Fulachier, L., Experiments in Fluids v 9, n1-2,1990, p115-118; ].
But owing to adopted superfine wire, the difficulty of production process such as surface treatment and point for measuring temperature welding is obviously strengthened, the fixing difficulty that also becomes at the thermometric place.Thermocouple is directly exposed in the measured medium being used for not being with protective sleeve usually when unstable state is measured in addition because the strength and stiffness of filament are minimum, be very easy to be subjected to measured medium such as fluid when flowing active force and produce displacement, distortion even damage.
Along with the progress of semiconductor fabrication process, the resistance and the thermocouple temperature measurement element of film shape appearred again.This is to adopt vacuum coating or other to make the method for film, on certain sheet form base, or directly treating that forming thickness on the component surface of thermometric only is micron dimension even thinner film like resistance or thermocouple (1.BernardFeldman, Thin film metal/metal oxide thermocouple, US Patent 6,072,165, June 6,2000, the metal/metal oxide film thermocouple; 2.Hermanshu D Bhatt, RamakrishnaVedula, Seshu B.Desu, Gustave C.Fralick, Thin film TiC/TaC thermocouples, Thin Solid Films, 342 (1999) 214-220, TiC/TaC film thermocouple).
The thermal resistance of this film shape or thermocouple, the rigidity of its structure depend on the material and the size of substrate, thereby not fragile.Under some service condition, suitably select the thermocouple material, can also make clear films thermocouple (Kenneth G.Kreider, Moshe Yust, Transparent thin film thermocouple, US Patent #4,969,956 1990; The transparent membrane thermocouple, United States Patent (USP) #4,969,956 1990).
The resistance of film shape or thermocouple temperature measurement element, thickness of himself and thermal capacity are very little, if be attached directly to the surface of testee, are used to measure the temperature of the surface of solids, and is minimum to the temperature field interference of object, is very desirable.But if be used to measure the temperature of liquid or gas, then because the accompanying base material of film has the thickness more much bigger than thin-film component self, quality and thermal capacity usually, thermocouple is obviously reduced the response speed of variations in temperature, even may be lower than some filament type thermocouple.Bigger in addition substrate motion of meeting convection cell when inserting fluid produces to be disturbed, and influences the temperature field and the certainty of measurement of fluid.For overcoming this defective, United States Patent (USP) (RISGIN O., Method of Fabricating Film-Type Sensing Structures, USPatent #3715288, the manufacture method of membranaceous sensing arrangement, 1973) adopt the substrate of aluminum oxide film as the thermocouple film, be used for thermal radiation sensor, can reduce contact thermal capacity, but still need the substrate support.
Summary of the invention
The objective of the invention is to: the film thermocouple that a kind of temperature measurement node point suspension that is made of film or superfine metal silk is provided, the film at this thermocouple temperature sensitive node place no longer depends on the base material when completing, but be suspended state, can significantly reduce the thermal inertia of node, improve the speed of response that measured object temperature is changed.
Technical scheme of the present invention is as follows:
The film thermocouple of temperature measurement node point suspension provided by the invention, comprise the permanent substrate of making by solid insulating material 1, thermocouple film 3 and thermocouple film 4, described thermocouple film 3 and thermocouple film 4 difference plating are on the surface of permanent substrate 1, its equitant temperature measurement node point 5 does not contact with permanent substrate 1 surface, is suspension; Temperature measurement node point 5 is suspended in the top or a side of permanent substrate 1; The material of permanent substrate 1 is pottery, silicon chip, glass or organic polymer; Be shaped as thin slice, tubule or thin rod-shape; The thickness of thermocouple film 3 and thermocouple film 4 is 1 nanometer-0.1 millimeter, adopts the thermocouple material of pairing, and the thermocouple material of this pairing is platinum Pt Rh, nickel chromium triangle-constantan, semiconductor or metal oxide.
The film thermocouple of temperature measurement node point suspension of the present invention because the node 5 of thermometric is separated with permanent substrate 1, forms unsettled or cantilever design, therefore can significantly reduce the thermal inertia of node, improves the speed of response that measured object temperature is changed.
Description of drawings
Fig. 1 is a structural representation of the present invention;
Fig. 2-1 is one embodiment of the invention scheme to accompanying drawing 2-3, and for the purpose of clarity, the thickness direction of film has tangible amplification than practical structures among the figure; Fig. 3-1 is manufacturing process schematic diagram of the present invention to scheming-5;
Fig. 2-1 is for removing impermanency substrate 2 schematic diagram before;
Fig. 2-2 is the vertical view of Fig. 2-1;
Fig. 2-3 is for removing after the impermanency substrate 2, and node is the schematic diagram of suspended state;
Fig. 3-1 is the structural representation of permanent substrate 1
Fig. 3-2 is attached to the schematic diagram of permanent substrate 1 end for impermanency substrate 2;
Fig. 3-3 is for thermocouple film 3 and thermocouple film 4 are attached on the surface of permanent substrate 1, and with impermanency substrate 2 front end overlaids, form the schematic diagram of temperature measurement node point 5 of the film thermocouple of temperature measurement node point suspension of the present invention;
Fig. 3-the 4th, the view of (being the length direction of permanent substrate 1) half-twist from Fig. 3-3 along its axis;
Fig. 3-5 is a structural representation of the present invention, impermanency substrate 2 is removed among the figure, and its node is suspended state;
Wherein, permanent substrate 1 impermanency substrate 2 thermocouple films 3
Thermocouple film 4 temperature measurement node points 5
Embodiment
Further describe the present invention below in conjunction with the drawings and specific embodiments:
As seen from the figure, the film thermocouple of temperature measurement node point suspension provided by the invention, comprise the permanent substrate of making by solid insulating material 1, thermocouple film 3 and thermocouple film 4, described thermocouple film 3 and thermocouple film 4 difference plating are on the surface of permanent substrate 1, its equitant temperature measurement node point 5 does not contact with permanent substrate 1 surface, is suspension; Temperature measurement node point 5 is suspended in the top or a side of permanent substrate 1; The material of permanent substrate 1 is pottery, silicon chip, glass or organic polymer; Be shaped as thin slice, tubule or thin rod-shape; The thickness of thermocouple film 3 and thermocouple film 4 is 1 nanometer-0.1 millimeter, adopts the thermocouple material of pairing, and the thermocouple material of this pairing is platinum Pt Rh, nickel chromium triangle-constantan, semiconductor or metal oxide.
Owing to temperature measurement node point suspension, can significantly reduce the thermal inertia of node, improve its speed of response to the measuring object variations in temperature; The response of its thermometric is only by extraneous heat transfer boundary condition and the thermal capacity of self decision, and with the material of substrate, structure, shape or thickness are irrelevant.
Embodiment 1: Fig. 3-1 to Fig. 3-5 be manufacturing process schematic diagram of the present invention;
Shown in Fig. 3-1: permanent substrate 1 is depended on thereon the thermocouple film, and lead contact is provided as the architecture basics of the film thermocouple of the temperature measurement node point suspension of this embodiment;
Shown in Fig. 3-2: terminal or other privileged sites in permanent substrate 1, adhere to a littler impermanency substrate 2 of size;
Shown in Fig. 3-3: the two kinds of thermocouple films 3 and 4 that constitute the film thermocouple of this temperature measurement node point suspension are plated on respectively on the surface of permanent substrate 1, and two kinds of equitant intersections of thermocouple film are the temperature measurement node point 5 of this thermocouple;
Fig. 3-the 4th, Fig. 3-3 is along the view of its axis (being the length direction of permanent substrate 1) half-twist; Fig. 3-5 is a structural representation of the present invention, impermanency substrate 2 is removed among the figure, and its node is suspended state; Volatile substrate 2 is to be used for adhesion heat galvanic couple film 3 and 4 in the manufacturing process of the film thermocouple of this temperature measurement node point suspension, and at the bottom of the adherance as two kinds of thermocouple films 3 of thermocouple and 4 tie points; After electrode material and node thereof complete, volatile substrate 2 will be removed by rights, thereby the temperature measurement node point of the film thermocouple of temperature measurement node point suspension of the present invention is not contacted with permanent substrate 1, be suspended state; The temperature measurement node point 5 of present embodiment is suspended in the right-hand member of nonvolatil substrate 1.
Impermanency substrate 2 just in the manufacturing process of thermocouple attached in the permanent substrate 1, and at the bottom of the adherance as two kinds of electrode material tie points of thermocouple; After the completing of electrode material and node thereof, impermanency substrate 2 will be removed as organic dissolution with solvents by rights, thereby make the temperature measurement node point place of thermocouple be vacant state, impermanency substrate 2 can be selected the plastics that are soluble in organic solvent or can be by the solid material of chemical corrosion for use.
Suitably be provided with thickness, the suspension section of plated film shape, length, width and with the proportionate relationship of thickness, can make the suspension node both have enough intensity, have minimum quality and thermal capacity again.By careful design plated film mode and program, the thickness of suspension node place film can be different from the thickness of other position films, even unsettled section length, width and the thickness from root to the top node also can change gradually, to realize guaranteeing that structural strength cooperates with the optimization that reduces node thermal capacity.
Embodiment 2:
Film thermocouple provided by the invention can have various ways, the another embodiment that Fig. 2-1 provides, be that a kind of substrate is the hanging type film thermocouple of flat sheet type, Fig. 2-2 is for removing impermanency substrate 2 vertical view before, Fig. 2-3 is for after removing impermanency substrate 2, and node is the situation of suspended state.
Its manufacturing process is:
1. adhere to small-sized impermanency substrate 2 at the middle part of the permanent substrate 1 of flat sheet type,
2. in the permanent substrate 1 of flat sheet type, with impermanency substrate 2 be overlapping point respectively to two ends plating thermocouple film 3 and thermocouple film 4, thermocouple film 3 and thermocouple film 4 are overlapping in impermanency substrate 2;
3. remove impermanency substrate 2, promptly finish the making of the film thermocouple that the temperature measurement node point 5 of present embodiment suspends.
Embodiment 3:
The manufacturing process of present embodiment is:
1. make a call to a hole at the middle part of flat sheet type, tubule or the carefully permanent substrate 1 of rod-shape, adhere to impermanency substrate 2 in the hole;
2. in permanent substrate 1, with the impermanency substrate 2 of adhering in the hole for overlapping point respectively to two ends plating thermocouple film 3 and thermocouple film 4, thermocouple film 3 and thermocouple film 4 are overlapping on impermanency substrate 2;
3. remove the impermanency substrate 2 of adhering in the hole, promptly finish the making of film thermocouple of the temperature measurement node point suspension of present embodiment.
Unsettled thinking according to the service condition of reality, can be designed various structure and manufacture craft route thereof according to the present invention's proposition making film thermocouple break away from substrate at the node place, and is not limited to the concrete scheme that embodiments of the invention propose.Same method also can be used to make the thermoelectric pile that is formed by a plurality of free standing structure film thermocouple series connection, to obtain higher thermoelectric force value, as temperature or hot radiation measurement device.
Claims (4)
1. the film thermocouple of a temperature measurement node point suspension, comprise permanent substrate (1) and the thermocouple film (3 manufactured by solid insulating material, 4), it is characterized in that, described thermocouple film (3,4) plating is on the surface of permanent substrate (1) respectively, and its equitant temperature measurement node point (5) does not contact with permanent substrate (1) surface, is suspension.
2. by the film thermocouple of the described temperature measurement node point suspension of claim 1, it is characterized in that the material of described permanent substrate (1) is pottery, silicon chip, glass or organic polymer.
3. by the film thermocouple of the described temperature measurement node point suspension of claim 1, it is characterized in that, described permanent substrate (1) be shaped as thin slice, tubule or thin rod-shape.
4. by the film thermocouple of the described temperature measurement node point suspension of claim 1, it is characterized in that the thickness of described thermocouple film (3,4) is 1 nanometer-0.1 millimeter, its material be the metal material that matches mutually; The described metal material of pairing mutually is platinum Pt Rh, nickel chromium triangle-constantan.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB021213496A CN1194426C (en) | 2002-06-14 | 2002-06-14 | Thin film thermocouple with suspended temperature measuring node |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB021213496A CN1194426C (en) | 2002-06-14 | 2002-06-14 | Thin film thermocouple with suspended temperature measuring node |
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| Publication Number | Publication Date |
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| CN1464292A CN1464292A (en) | 2003-12-31 |
| CN1194426C true CN1194426C (en) | 2005-03-23 |
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| CNB021213496A Expired - Fee Related CN1194426C (en) | 2002-06-14 | 2002-06-14 | Thin film thermocouple with suspended temperature measuring node |
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Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102680126B (en) * | 2012-05-15 | 2014-02-26 | 苏州大学 | Non-fixed contact type thermocouple |
| CN102661815B (en) * | 2012-05-15 | 2014-04-30 | 苏州大学 | Non-fixed contact type thermocouple |
| CN107340080A (en) * | 2017-06-13 | 2017-11-10 | 北京卫星环境工程研究所 | Needle-like film thermocouple verification experimental verification system and its application based on surface temperature measurement method |
| CN108007595B (en) * | 2017-11-21 | 2020-01-14 | 西北工业大学 | Probe type film thermocouple temperature sensor and manufacturing method thereof |
| CN111141401B (en) | 2019-12-12 | 2020-10-27 | 西安交通大学 | Probe type thin film thermocouple and preparation method thereof |
| CN111525022A (en) * | 2020-04-22 | 2020-08-11 | 华东师范大学 | Thin film thermocouple and preparation method thereof |
| CN112880871A (en) * | 2021-01-18 | 2021-06-01 | 深圳市迈泰生物医疗有限公司 | Low-power-consumption multifunctional digital thermometer |
| CN113406143A (en) * | 2021-07-20 | 2021-09-17 | 山东大学 | Micron-sized single-cell photo-thermal evaluation system based on suspended thermocouple array |
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