CN119301828A - 激光装置 - Google Patents

激光装置 Download PDF

Info

Publication number
CN119301828A
CN119301828A CN202380043994.2A CN202380043994A CN119301828A CN 119301828 A CN119301828 A CN 119301828A CN 202380043994 A CN202380043994 A CN 202380043994A CN 119301828 A CN119301828 A CN 119301828A
Authority
CN
China
Prior art keywords
frequency
laser
ceo
optical comb
light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202380043994.2A
Other languages
English (en)
Chinese (zh)
Inventor
中村将
冈本慎也
久田和也
稻田安寿
能泽克弥
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Intellectual Property Management Co Ltd
Original Assignee
Panasonic Intellectual Property Management Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Panasonic Intellectual Property Management Co Ltd filed Critical Panasonic Intellectual Property Management Co Ltd
Publication of CN119301828A publication Critical patent/CN119301828A/zh
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/10Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
    • H01S3/10038Amplitude control
    • H01S3/10046Pulse repetition rate control
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/24Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/2441Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00Measuring instruments characterised by the use of optical techniques
    • G01B9/02Interferometers
    • G01B9/02001Interferometers characterised by controlling or generating intrinsic radiation properties
    • G01B9/02007Two or more frequencies or sources used for interferometric measurement
    • G01B9/02008Two or more frequencies or sources used for interferometric measurement by using a frequency comb
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/005Optical devices external to the laser cavity, specially adapted for lasers, e.g. for homogenisation of the beam or for manipulating laser pulses, e.g. pulse shaping
    • H01S3/0057Temporal shaping, e.g. pulse compression, frequency chirping
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/10Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
    • H01S3/13Stabilisation of laser output parameters, e.g. frequency or amplitude
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/10Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
    • H01S3/13Stabilisation of laser output parameters, e.g. frequency or amplitude
    • H01S3/1305Feedback control systems
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/10Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
    • H01S3/13Stabilisation of laser output parameters, e.g. frequency or amplitude
    • H01S3/1307Stabilisation of the phase
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/10Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
    • H01S3/13Stabilisation of laser output parameters, e.g. frequency or amplitude
    • H01S3/136Stabilisation of laser output parameters, e.g. frequency or amplitude by controlling devices placed within the cavity
    • H01S3/137Stabilisation of laser output parameters, e.g. frequency or amplitude by controlling devices placed within the cavity for stabilising of frequency
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/23Arrangements of two or more lasers not provided for in groups H01S3/02 - H01S3/22, e.g. tandem arrangements of separate active media

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Automation & Control Theory (AREA)
  • General Physics & Mathematics (AREA)
  • Lasers (AREA)
CN202380043994.2A 2022-06-14 2023-05-26 激光装置 Pending CN119301828A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2022095868 2022-06-14
JP2022-095868 2022-06-14
PCT/JP2023/019655 WO2023243365A1 (ja) 2022-06-14 2023-05-26 レーザ装置

Publications (1)

Publication Number Publication Date
CN119301828A true CN119301828A (zh) 2025-01-10

Family

ID=89191184

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202380043994.2A Pending CN119301828A (zh) 2022-06-14 2023-05-26 激光装置

Country Status (5)

Country Link
US (1) US20250096516A1 (https=)
EP (1) EP4542796A4 (https=)
JP (1) JPWO2023243365A1 (https=)
CN (1) CN119301828A (https=)
WO (1) WO2023243365A1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPWO2023163018A1 (https=) * 2022-02-24 2023-08-31

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5687261A (en) * 1996-01-24 1997-11-11 California Institute Of Technology Fiber-optic delay-line stabilization of heterodyne optical signal generator and method using same
US8120778B2 (en) 2009-03-06 2012-02-21 Imra America, Inc. Optical scanning and imaging systems based on dual pulsed laser systems
JP5099696B2 (ja) * 2008-03-24 2012-12-19 国立大学法人電気通信大学 広帯域離散スペクトル発生装置、及び、その周波数制御方法
JP5764566B2 (ja) * 2009-10-02 2015-08-19 イムラ アメリカ インコーポレイテッド モード同期レーザによる光信号処理
JP6269213B2 (ja) * 2014-03-19 2018-01-31 アイシン精機株式会社 距離測定装置及び距離測定方法
KR101603909B1 (ko) * 2014-10-02 2016-03-16 광주과학기술원 위상잡음 보상 방법을 이용한 광혼합 방식의 연속파 테라헤르츠 발생 및 검출 장치
CN104316180B (zh) * 2014-11-02 2016-06-01 华东师范大学 基于连续稳频激光的双光学频率梳光学成像方法
US10753801B2 (en) * 2016-12-07 2020-08-25 UNIVERSITé LAVAL Methods for performing dual-comb interferometry using a frequency offset relation
WO2018159445A1 (ja) 2017-02-28 2018-09-07 国立大学法人電気通信大学 光コムの制御方法及び光コムの制御装置
EP3850335B1 (en) * 2018-09-14 2023-08-16 Max-Planck-Gesellschaft zur Förderung der Wissenschaften e.V. Particle analysis method and apparatus for a spectrometry-based particle analysis
US11686622B2 (en) * 2019-09-16 2023-06-27 The Regents Of The University Of Colorado, A Body Corporate Systems and methods for dual comb spectroscopy
EP4174569B1 (en) * 2020-06-26 2026-03-11 Panasonic Intellectual Property Management Co., Ltd. Dual optical frequency comb generation device and measurement device
CN113295106B (zh) * 2021-05-26 2022-07-15 清华大学 一种双光梳散斑干涉测量系统及测量方法

Also Published As

Publication number Publication date
EP4542796A4 (en) 2025-09-17
US20250096516A1 (en) 2025-03-20
WO2023243365A1 (ja) 2023-12-21
EP4542796A1 (en) 2025-04-23
JPWO2023243365A1 (https=) 2023-12-21

Similar Documents

Publication Publication Date Title
US8649023B2 (en) Film thickness measurement device and measurement method
EP4174569B1 (en) Dual optical frequency comb generation device and measurement device
TWI613521B (zh) 用於微影製程之包含光學距離量測系統的投影曝光設備
JP6693783B2 (ja) 距離測定装置およびその校正方法
JP2000205814A (ja) ヘテロダイン干渉計
WO2017216942A1 (ja) テラヘルツ波測定装置
JP2009300109A (ja) テラヘルツ波測定方法及びテラヘルツ分光装置
CN119301828A (zh) 激光装置
KR101398835B1 (ko) 콤 생성 및 검출 장치를 이용한 실시간 분광형 간섭 측정 장치 및 측정 방법
JP7128516B2 (ja) デュアルコム分光法における干渉信号の測定方法
US20250334679A1 (en) Measurement device and measurement method
US6462823B1 (en) Wavelength meter adapted for averaging multiple measurements
JP6774192B2 (ja) 距離測定装置および距離測定方法
CN203965129U (zh) 扫描共焦腔f-p干涉仪自由光谱范围测量系统
CN102066887B (zh) 用于减少光的条纹干涉的方法
US20250085102A1 (en) Measurement device and measurement method
JP2012132711A (ja) パルス間位相ズレ測定装置、オフセット周波数制御装置、パルス間位相ズレ測定方法、オフセット周波数制御方法
US20240402315A1 (en) Optical device for proximity sensing or absolute distance measurements
US12379494B2 (en) Optical distance measurement device and machining device
JP2018077169A (ja) 光周波数コムを使ったレーザ周波数測定装置
TW202100947A (zh) 非接觸式晶圓厚度測定裝置
US11281093B2 (en) Systems and methods using mask pattern measurements performed with compensated light signals
WO2025150355A1 (ja) 計測装置および計測方法
KR100523937B1 (ko) 광간섭계와 x선 간섭계를 이용한 lvdt의 교정장치
JP6748986B2 (ja) 群遅延時間差測定方法及び群遅延時間差測定装置

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination