CN118559279A - A high reliability lead-free solder alloy with thermal fatigue resistance and its application - Google Patents
A high reliability lead-free solder alloy with thermal fatigue resistance and its application Download PDFInfo
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- CN118559279A CN118559279A CN202410663556.2A CN202410663556A CN118559279A CN 118559279 A CN118559279 A CN 118559279A CN 202410663556 A CN202410663556 A CN 202410663556A CN 118559279 A CN118559279 A CN 118559279A
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- 230000003064 anti-oxidating effect Effects 0.000 description 2
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- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
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- 229910017944 Ag—Cu Inorganic materials 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
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- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 230000002427 irreversible effect Effects 0.000 description 1
- FZLIPJUXYLNCLC-UHFFFAOYSA-N lanthanum atom Chemical compound [La] FZLIPJUXYLNCLC-UHFFFAOYSA-N 0.000 description 1
- 238000007648 laser printing Methods 0.000 description 1
- 238000002386 leaching Methods 0.000 description 1
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- 150000004706 metal oxides Chemical class 0.000 description 1
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- QEFYFXOXNSNQGX-UHFFFAOYSA-N neodymium atom Chemical compound [Nd] QEFYFXOXNSNQGX-UHFFFAOYSA-N 0.000 description 1
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- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 1
- 229910001887 tin oxide Inorganic materials 0.000 description 1
- QUBMWJKTLKIJNN-UHFFFAOYSA-B tin(4+);tetraphosphate Chemical compound [Sn+4].[Sn+4].[Sn+4].[O-]P([O-])([O-])=O.[O-]P([O-])([O-])=O.[O-]P([O-])([O-])=O.[O-]P([O-])([O-])=O QUBMWJKTLKIJNN-UHFFFAOYSA-B 0.000 description 1
- 229910052727 yttrium Inorganic materials 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K35/00—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting
- B23K35/22—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by the composition or nature of the material
- B23K35/24—Selection of soldering or welding materials proper
- B23K35/26—Selection of soldering or welding materials proper with the principal constituent melting at less than 400 degrees C
- B23K35/262—Sn as the principal constituent
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K35/00—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting
- B23K35/40—Making wire or rods for soldering or welding
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Electric Connection Of Electric Components To Printed Circuits (AREA)
Abstract
Description
技术领域Technical Field
本发明涉及焊接材料技术领域,尤其涉及一种耐热疲劳的高可靠性无铅焊料合金及其应用。The invention relates to the technical field of welding materials, and in particular to a high-reliability lead-free solder alloy resistant to thermal fatigue and application thereof.
背景技术Background Art
高功率半导体激光器阵列具有体积小、质量轻、寿命长、效率高等优点,既可用作固体激光的泵浦源,又可直接作为光源用于材料处理,已广泛应用于军事、光纤通信、光传感、信息存储、医疗、激光打印、光计算等领域。高功率激光二极管或激光设备以大约10%-50%的效率将电能转换为光能。其余的都转变为废热。这些废热必须在短时间内散发出去,否则对激光二极管会产生热应力,最终对激光器造成不可逆的损坏,导致激光器的寿命降低。低效的冷却封装设计会导致产品质量不佳,因为器件核心的温度对输出波长和带隙有直接影响。实际情况证明,每3℃的温度变化,可导致二极管激光器近1nm的波长变化,激光器的输出功率也会随着温度的升高而降低。High-power semiconductor laser arrays have the advantages of small size, light weight, long life and high efficiency. They can be used as pump sources for solid lasers and directly as light sources for material processing. They have been widely used in military, fiber-optic communications, optical sensing, information storage, medical, laser printing, optical computing and other fields. High-power laser diodes or laser devices convert electrical energy into light energy with an efficiency of about 10%-50%. The rest is converted into waste heat. This waste heat must be dissipated in a short time, otherwise it will cause thermal stress to the laser diode, and eventually cause irreversible damage to the laser, resulting in a reduction in the life of the laser. Inefficient cooling and packaging design will lead to poor product quality because the temperature of the core of the device has a direct impact on the output wavelength and band gap. The actual situation has proved that every 3°C temperature change can cause a wavelength change of nearly 1nm for the diode laser, and the output power of the laser will also decrease with increasing temperature.
为了帮助散热,将半导体激光器芯片和热沉焊接到散热基板上。通常,使用的焊料是SAC305,因其具有良好的导热性、机械性能延展性,在中低功率的激光器封装中可以实现高精度、高可靠性的热沉与引脚焊接,确保光模块在高速数据传输过程中的稳定工作。随着技术的日益先进,许多激光器研发公司已经开发出更复杂的高功率和高性能激光器阵列。超过900W+的CW(连续波激光器)和QCW(准连续波激光器)功率已在不同的激光公司出现,例如Princeton Optronics。传统的SAC305焊料已经不能满足激光器操作中重复的开关循环或硬脉冲所产生的机械应力,从而导致焊接缝开裂、热阻升高、芯片失效,最终激光器的寿命减少。To help dissipate heat, the semiconductor laser chip and heat sink are soldered to the heat dissipation substrate. Typically, the solder used is SAC305, which has good thermal conductivity, mechanical ductility, and can achieve high-precision, high-reliability heat sink and pin welding in medium and low-power laser packages, ensuring the stable operation of the optical module during high-speed data transmission. With the increasing advancement of technology, many laser research and development companies have developed more complex high-power and high-performance laser arrays. CW (continuous wave laser) and QCW (quasi-continuous wave laser) powers exceeding 900W+ have appeared in different laser companies, such as Princeton Optronics. Traditional SAC305 solder can no longer meet the mechanical stress generated by repeated switching cycles or hard pulses in laser operation, resulting in cracking of the weld seam, increased thermal resistance, chip failure, and ultimately reduced laser life.
例如,中国专利CN103561903 A中公开了一种合金组成,其在Sn-Ag-Cu系软钎料合金中可含有Bi、Sb、In。该专利中公开的技术是,钎料合金中Cu含量远离共晶附近的组成导致温度循环特性下降:而Ag含量远离共晶附近的组成时温度循环特性的下降少于Cu远离共晶的组成;通过代替减少Ag的量而在Bi、Sb中添加In,会提高温度循环特性。然而,Ag量减少会导致不能形成足够的Ag3Sn的IMC,从而焊接缝的接合强度降低,同时焊料的润湿性下降,并且抗氧化性能没有改善。For example, Chinese patent CN103561903 A discloses an alloy composition, which may contain Bi, Sb, and In in a Sn-Ag-Cu solder alloy. The technology disclosed in the patent is that the composition of the solder alloy with a Cu content far from the eutectic leads to a decrease in temperature cycle characteristics: the decrease in temperature cycle characteristics when the Ag content is far from the eutectic is less than the composition of Cu far from the eutectic; by adding In to Bi and Sb instead of reducing the amount of Ag, the temperature cycle characteristics will be improved. However, the reduction in the amount of Ag will result in the inability to form sufficient IMC of Ag 3 Sn, thereby reducing the bonding strength of the solder joint, while the wettability of the solder is reduced, and the oxidation resistance is not improved.
另外,中国专利CN 115464299 A还公开了一种软钎料合金,在Sn-Ag-Cu-Sb系软钎料合金中添加微量Ge、P,用以改善焊料的抗氧化性,从而减少焊接空洞。该专利中公开的技术是,相比于锡、银、锑更容易和氧结合,一方面能迅速去除焊料内部的氧,使焊料的微观组分更均匀,另一方面能在无铅合金表面形成极致密的氧化层,阻止无铅合金进一步被氧化,因此能起到很好的除氧、抗氧作用。但缺少可以带来固溶强化作用的元素,所以焊料的机械性能改善并不明显。另外,焊料的高温可靠性也未进一步进行验证。In addition, Chinese patent CN 115464299 A also discloses a solder alloy, in which trace amounts of Ge and P are added to the Sn-Ag-Cu-Sb solder alloy to improve the oxidation resistance of the solder, thereby reducing solder voids. The technology disclosed in this patent is that it is easier to combine with oxygen than tin, silver, and antimony. On the one hand, it can quickly remove the oxygen inside the solder, making the microscopic components of the solder more uniform. On the other hand, it can form an extremely dense oxide layer on the surface of the lead-free alloy to prevent the lead-free alloy from being further oxidized, so it can play a good deoxidation and anti-oxidation role. However, there is a lack of elements that can bring about solid solution strengthening, so the improvement of the mechanical properties of the solder is not obvious. In addition, the high-temperature reliability of the solder has not been further verified.
发明内容Summary of the invention
为解决上述技术问题,本发明提供一种耐热疲劳的高可靠性无铅焊料合金及其应用,该焊料合金具有良好的润湿性、可靠性、抗氧化性、机械特性和耐热疲劳性能,以满足高功率半导体激光器、功率器件和微电子电路封装的要求。在其应用中,所公开的焊料合金特别适用但不限于形成高功率半导体激光器、功率器件和微电子电路封装领域的条、棒或药芯焊丝或呈预成型焊片、焊球、焊料粉末或焊膏(焊料粉末和助焊剂的混合物)形式的焊接缝。To solve the above technical problems, the present invention provides a high-reliability lead-free solder alloy with thermal fatigue resistance and its application, wherein the solder alloy has good wettability, reliability, oxidation resistance, mechanical properties and thermal fatigue resistance to meet the requirements of high-power semiconductor lasers, power devices and microelectronic circuit packaging. In its application, the disclosed solder alloy is particularly suitable for, but not limited to, forming a welding seam in the form of a strip, rod or flux-cored wire or a preformed solder sheet, solder ball, solder powder or solder paste (a mixture of solder powder and flux) in the field of high-power semiconductor lasers, power devices and microelectronic circuit packaging.
具体包括以下技术方案:The specific technical solutions include the following:
第一方面,提供一种耐热疲劳的高可靠性无铅焊料合金,包括以下质量百分比组分:In a first aspect, a high reliability lead-free solder alloy with thermal fatigue resistance is provided, comprising the following components in percentage by mass:
Ag(银)1.0-4.0%,Cu(铜)0.1-1.0%,Sb(锑)1.0-8.0%,Bi(铋)0.05-4.0%,In(铟)0.5-6.0%,Ni(镍)0.5-1.2%,Co(钴)0.001-0.2%,微量元素0.001-0.13%和/或RE(稀土元素)0.001-0.09%,余量为Sn(锡)及不可避免的杂质;Ag (silver) 1.0-4.0%, Cu (copper) 0.1-1.0%, Sb (antimony) 1.0-8.0%, Bi (bismuth) 0.05-4.0%, In (indium) 0.5-6.0%, Ni (nickel) 0.5-1.2%, Co (cobalt) 0.001-0.2%, trace elements 0.001-0.13% and/or RE (rare earth elements) 0.001-0.09%, the balance is Sn (tin) and unavoidable impurities;
其中,所述的微量元素由P(磷)和/或Ge(锗)组成,P占耐热疲劳的高可靠性无铅焊料合金的质量百分比为0.001-0.08%,Ge占耐热疲劳的高可靠性无铅焊料合金的质量百分比为0.001-0.05%;所述的RE选自Ce(铈)、La(镧)、Nd(钕)中的至少一种。Wherein, the trace elements are composed of P (phosphorus) and/or Ge (germanium), the mass percentage of P in the high-reliability lead-free solder alloy with heat fatigue resistance is 0.001-0.08%, and the mass percentage of Ge in the high-reliability lead-free solder alloy with heat fatigue resistance is 0.001-0.05%; the RE is selected from at least one of Ce (cerium), La (lanthanum), and Nd (neodymium).
进一步的,所述的Ag占耐热疲劳的高可靠性无铅焊料合金的质量百分比为2.0-3.5%。Furthermore, the mass percentage of Ag in the heat fatigue resistant high reliability lead-free solder alloy is 2.0-3.5%.
优选的,所述的Ag占耐热疲劳的高可靠性无铅焊料合金的质量百分比为2.5-3.5%。Preferably, the mass percentage of Ag in the thermal fatigue resistant high reliability lead-free solder alloy is 2.5-3.5%.
进一步的,所述的Cu占耐热疲劳的高可靠性无铅焊料合金的质量百分比为0.3-0.9%。Furthermore, the mass percentage of Cu in the heat fatigue resistant high reliability lead-free solder alloy is 0.3-0.9%.
优选的,所述的Cu占耐热疲劳的高可靠性无铅焊料合金的质量百分比为0.5-0.8%。Preferably, the mass percentage of Cu in the thermal fatigue resistant high reliability lead-free solder alloy is 0.5-0.8%.
进一步的,所述的Sb占耐热疲劳的高可靠性无铅焊料合金的质量百分比为2.0-6.0%。Furthermore, the mass percentage of Sb in the heat fatigue resistant high reliability lead-free solder alloy is 2.0-6.0%.
优选的,所述的Sb占耐热疲劳的高可靠性无铅焊料合金的质量百分比为3.0-5.0%。Preferably, the mass percentage of Sb in the thermal fatigue resistant high reliability lead-free solder alloy is 3.0-5.0%.
进一步的,所述的Bi占耐热疲劳的高可靠性无铅焊料合金的质量百分比为0.1-4.0%。Furthermore, the mass percentage of Bi in the heat fatigue resistant high reliability lead-free solder alloy is 0.1-4.0%.
优选的,所述的Bi占耐热疲劳的高可靠性无铅焊料合金的质量百分比为0.1-2.0%。Preferably, the mass percentage of Bi in the thermal fatigue resistant high reliability lead-free solder alloy is 0.1-2.0%.
进一步的,所述的In占耐热疲劳的高可靠性无铅焊料合金的质量百分比为0.5-4.0%。Furthermore, the mass percentage of In in the heat fatigue resistant high reliability lead-free solder alloy is 0.5-4.0%.
优选的,所述的In占耐热疲劳的高可靠性无铅焊料合金的质量百分比为0.7-3.0%。Preferably, the mass percentage of In in the thermal fatigue resistant high reliability lead-free solder alloy is 0.7-3.0%.
进一步的,所述的Ni占耐热疲劳的高可靠性无铅焊料合金的质量百分比为0.5-1.0%;所述的Co占耐热疲劳的高可靠性无铅焊料合金的质量百分比为0.01-0.1%。Furthermore, the mass percentage of Ni in the high-reliability lead-free solder alloy with thermal fatigue resistance is 0.5-1.0%; the mass percentage of Co in the high-reliability lead-free solder alloy with thermal fatigue resistance is 0.01-0.1%.
优选的,所述的Ni占耐热疲劳的高可靠性无铅焊料合金的质量百分比为0.5-0.7%。Preferably, the mass percentage of Ni in the heat fatigue resistant high reliability lead-free solder alloy is 0.5-0.7%.
优选的,所述的Co占耐热疲劳的高可靠性无铅焊料合金的质量百分比为0.01-0.08%。Preferably, the mass percentage of Co in the thermal fatigue resistant high reliability lead-free solder alloy is 0.01-0.08%.
进一步的,所述的P占耐热疲劳的高可靠性无铅焊料合金的质量百分比为0.001-0.05%,Ge占耐热疲劳的高可靠性无铅焊料合金的质量百分比为0.001-0.03%。优选的,所述的P占耐热疲劳的高可靠性无铅焊料合金的质量百分比为0.001-0.03%,Ge占耐热疲劳的高可靠性无铅焊料合金的质量百分比为0.001-0.015%。Further, the mass percentage of P in the high-reliability lead-free solder alloy with thermal fatigue resistance is 0.001-0.05%, and the mass percentage of Ge in the high-reliability lead-free solder alloy with thermal fatigue resistance is 0.001-0.03%. Preferably, the mass percentage of P in the high-reliability lead-free solder alloy with thermal fatigue resistance is 0.001-0.03%, and the mass percentage of Ge in the high-reliability lead-free solder alloy with thermal fatigue resistance is 0.001-0.015%.
优选的,所述的微量元素占耐热疲劳的高可靠性无铅焊料合金的质量百分比为0.005-0.03%。Preferably, the mass percentage of the trace elements in the heat fatigue resistant high reliability lead-free solder alloy is 0.005-0.03%.
进一步的,所述的RE占耐热疲劳的高可靠性无铅焊料合金的质量百分比为0.001-0.07%。Furthermore, the mass percentage of the RE in the heat fatigue resistant high reliability lead-free solder alloy is 0.001-0.07%.
优选的,所述的RE占耐热疲劳的高可靠性无铅焊料合金的质量百分比为0.001-0.05%。Preferably, the mass percentage of the RE in the thermal fatigue resistant high reliability lead-free solder alloy is 0.001-0.05%.
优选的,所述的RE为Ce、La和Nd的混合物。Preferably, the RE is a mixture of Ce, La and Nd.
优选的,所述的耐热疲劳的高可靠性无铅焊料合金的液相线温度≤220℃。Preferably, the liquidus temperature of the thermal fatigue resistant high reliability lead-free solder alloy is ≤220°C.
优选的,所述的耐热疲劳的高可靠性无铅焊料合金为以下形式:条、棒、药芯焊丝、箔、条带、膜、片预制件、粉末、糊状物、焊球、焊片。Preferably, the thermal fatigue resistant high reliability lead-free solder alloy is in the following forms: bars, rods, flux-cored wires, foils, strips, films, sheet preforms, powders, pastes, solder balls, and solder sheets.
第二方面,提供如第一方面所述的耐热疲劳的高可靠性无铅焊料合金的应用,将所述的耐热疲劳的高可靠性无铅焊料合金用在高功率半导体激光器、功率器件和微电子电路的模块焊接。In a second aspect, the application of the high-reliability lead-free solder alloy resistant to thermal fatigue as described in the first aspect is provided, and the high-reliability lead-free solder alloy resistant to thermal fatigue is used in module welding of high-power semiconductor lasers, power devices and microelectronic circuits.
本发明的有益效果在于:The beneficial effects of the present invention are:
本发明提供一种耐热疲劳的高可靠性无铅焊料合金及其应用,该焊料合金表现出适宜的机械可靠性和耐热疲劳性,即使在热时效后也显示出有所改善的剪切强度。该焊料合金作为焊接件长时间置于超过150℃的环境温度下也能获得良好的连接强度。与公知的SAC305焊料合金比较,该焊料合金显示出改良的高温机械性质,可广泛适用于高功率半导体激光器、功率器件和微电子电路的封装。The present invention provides a high-reliability lead-free solder alloy with heat fatigue resistance and its application. The solder alloy exhibits suitable mechanical reliability and heat fatigue resistance, and shows improved shear strength even after thermal aging. The solder alloy can also obtain good connection strength when placed in an ambient temperature exceeding 150° C. for a long time as a welding part. Compared with the known SAC305 solder alloy, the solder alloy shows improved high-temperature mechanical properties and can be widely used in the packaging of high-power semiconductor lasers, power devices and microelectronic circuits.
附图说明BRIEF DESCRIPTION OF THE DRAWINGS
为了更清楚地说明本发明实施例技术方案,下面将对实施例描述中所需要使用的附图作简单地介绍,显而易见地,下面描述中的附图是本发明的一些实施例,对于本领域普通技术人员来讲,在不付出创造性劳动的前提下,还可以根据这些附图获得其他的附图。In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the accompanying drawings required for use in the description of the embodiments will be briefly introduced below. Obviously, the accompanying drawings described below are some embodiments of the present invention. For ordinary technicians in this field, other accompanying drawings can be obtained based on these accompanying drawings without paying any creative work.
图1为本发明实施例21在高温老化试验后的焊接件横截面SEM图像;FIG1 is a cross-sectional SEM image of a welded part of Example 21 of the present invention after a high temperature aging test;
图2为本发明对比例15在高温老化试验后的焊接件横截面SEM图像。FIG. 2 is a cross-sectional SEM image of the welded part of comparative example 15 of the present invention after high temperature aging test.
具体实施方式DETAILED DESCRIPTION
下面将对本发明实施例中的技术方案进行清楚、完整地描述,显然,所描述的实施例是本发明一部分实施例,而不是全部的实施例。基于本发明中的实施例,本领域普通技术人员在没有做出创造性劳动前提下所获得的所有其他实施例,都属于本发明保护的范围。The technical solutions in the embodiments of the present invention are described clearly and completely below. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.
应当理解,在本发明说明书和所附权利要求书中使用的术语“和/或”是指相关联列出的项中的一个或多个的任何组合以及所有可能组合,并且包括这些组合。It should be understood that the term “and/or” used in the present description and the appended claims refers to and includes any and all possible combinations of one or more of the associated listed items.
为了更充分理解本发明的技术内容,下面结合具体实施例对本发明的技术方案进一步介绍和说明。In order to more fully understand the technical content of the present invention, the technical solution of the present invention is further introduced and illustrated in conjunction with specific embodiments below.
在下列段落中更详细地限定本发明的不同含量范围,描述本发明公开的焊料合金的组成范围的益处。除非明确相反地指出,可以将此限定的任意含量范围以及作为优选条件下而指出的任何特征与任何其他一个或多个特征进行组合。The different content ranges of the invention are defined in more detail in the following paragraphs describing the benefits of the compositional ranges of the solder alloys disclosed in the invention. Unless expressly stated to the contrary, any content range defined herein and any feature stated as being preferred may be combined with any other feature or features.
本发明描述的焊料合金具有相对低的熔点,具体指低液相线温度,典型地小于220℃、更典型地小于215℃、甚至更典型地小于210℃的液相线温度。这使得焊料合金能够用于低温回流工艺(如从215至235℃下的回流温度)中。与常规的回流工艺相比,这样的低温回流工艺可以降低对焊料元件损坏的风险。本说明中使用的用语“固相线”指低于该温度,所提供的物质完全为固态。本说明所使用的用语“液相线”指结晶可与熔融物质共存的最高温度。高于液相线温度时,该材料为均相并处于平衡状态的液体。低于液相线温度时,发生凝固形成越来越多的结晶。固相线和液相线温度并不排成直线或重叠。若在该固相线与液相线温度间存在有区间时,其称为“凝固范围”或“糊状区域(Mushy Zone)”,并且在该范围内,该物质由固液两相的混合物组成。本说明描述的无铅焊料合金“凝固范围”较小,通常在10-15℃之间。较窄的温度范围,其熔化或凝固的速度越快,构件的浸析、错位、再氧化、空隙的发生减少,越有利于钎焊操作,同时能量消耗也更小。The solder alloy described in the present invention has a relatively low melting point, specifically a low liquidus temperature, typically less than 220°C, more typically less than 215°C, and even more typically less than 210°C liquidus temperature. This enables the solder alloy to be used in a low temperature reflow process (such as a reflow temperature from 215 to 235°C). Compared with conventional reflow processes, such a low temperature reflow process can reduce the risk of damage to the solder components. The term "solidus" used in this description refers to the temperature below which the material provided is completely solid. The term "liquidus" used in this description refers to the highest temperature at which crystals can coexist with molten materials. Above the liquidus temperature, the material is a homogeneous liquid in equilibrium. Below the liquidus temperature, solidification occurs to form more and more crystals. The solidus and liquidus temperatures are not aligned or overlapped. If there is an interval between the solidus and liquidus temperatures, it is called the "solidification range" or "mushy zone", and within this range, the material consists of a mixture of solid and liquid phases. The "solidification range" of the lead-free solder alloy described in this specification is relatively small, usually between 10-15°C. The narrower the temperature range, the faster the melting or solidification speed, the less leaching, dislocation, reoxidation, and voids of the components, the more conducive to the soldering operation, and the less energy consumption.
本说明所描述的无铅焊料合金可表现出适宜的高温机械可靠性及耐热疲劳性,通常能耐受至少150℃的使用温度,例如,最高175℃。与公知的SAC305相比,该焊料合金可显示出改良的高温机械性能,更高的导电及导热率,并且该焊料合金展现出改进的热冲击性能。例如,该焊料合金经受得住10分钟的停留时间从-50℃的低温温度至+150℃高温温度的超过500次循环的热循环试验。该焊料合金可有利地使用在具有高使用温度的应用中,诸如高功率半导体激光器、功率器件和微电子电路。The lead-free solder alloy described in this specification can exhibit suitable high-temperature mechanical reliability and thermal fatigue resistance, and can generally withstand a use temperature of at least 150°C, for example, up to 175°C. Compared with the well-known SAC305, the solder alloy can show improved high-temperature mechanical properties, higher electrical and thermal conductivity, and the solder alloy exhibits improved thermal shock performance. For example, the solder alloy withstands a thermal cycle test of more than 500 cycles with a dwell time of 10 minutes from a low temperature of -50°C to a high temperature of +150°C. The solder alloy can be advantageously used in applications with high use temperatures, such as high-power semiconductor lasers, power devices, and microelectronic circuits.
本说明所述的用语“稀土元素(RE)”包括选自于由下列所组成的群组中的元素:Sc、Y、La、Ce、Pr、Nd、Pm、Sm、Eu、Gd、Tb、Dy、Ho、Er、Tm、Yb及Lu。The term “rare earth elements (RE)” as used herein includes elements selected from the group consisting of Sc, Y, La, Ce, Pr, Nd, Pm, Sm, Eu, Gd, Tb, Dy, Ho, Er, Tm, Yb and Lu.
本说明所述的用语“助焊剂”包括一种用来促进金属熔化特别是移除并防止金属氧化物形成的物质,经常是酸或碱。As used herein, the term "flux" includes a substance, usually an acid or base, used to promote the melting of metals, particularly to remove and prevent the formation of metal oxides.
本发明所述的无铅表示无故意加入的铅。因此,铅含量为零或在不超过偶然杂质范围之内。Lead-free as used herein means that there is no intentional addition of lead. Therefore, the lead content is zero or within the range of incidental impurities.
本说明书中,涉及焊料合金组成的“%”只要没有特别指定就是“质量%”。In this specification, "%" concerning the composition of a solder alloy means "mass %" unless otherwise specified.
其中,本发明的耐热疲劳的高可靠性无铅焊料合金包含1.0至4.0质量%的Ag。Ag可以在Sn基质中形成Ag3Sn金属间化合物(Intermetallic Compounds,IMC),实现焊料合金的析出强化,提高焊料合金的强度和耐循环特性。另外,Ag增加焊料合金的润湿和铺展,降低了液相线温度。若Ag含量少于1.0质量%,则不能提高钎焊时润湿性,析出的Ag3Sn变少,IMC的网络不会变得稳固,焊料合金的强度也不能提高。若Ag含量大于4.0质量%,将会导致焊料合金的液相线温度上升,锡焊性下降。粗大化的Ag3Sn会以板状形式析出,焊料合金脆化,耐冲击落下特性也会变差。优选的,所述焊料合金包括2.0到3.5质量%的Ag,更优选地包括2.5到3.5质量%的Ag,以及最优选地包括3.0到3.2质量%的Ag。The heat fatigue resistant high reliability lead-free solder alloy of the present invention contains 1.0 to 4.0 mass % of Ag. Ag can form Ag 3 Sn intermetallic compounds (IMC) in the Sn matrix to achieve precipitation strengthening of the solder alloy, and improve the strength and cycle resistance of the solder alloy. In addition, Ag increases the wetting and spreading of the solder alloy and reduces the liquidus temperature. If the Ag content is less than 1.0 mass %, the wettability during soldering cannot be improved, the precipitated Ag 3 Sn becomes less, the IMC network will not become stable, and the strength of the solder alloy cannot be improved. If the Ag content is greater than 4.0 mass %, the liquidus temperature of the solder alloy will rise and the solderability will decrease. Coarsened Ag 3 Sn will precipitate in a plate-like form, the solder alloy will become brittle, and the impact drop resistance will also deteriorate. Preferably, the solder alloy includes 2.0 to 3.5 mass % Ag, more preferably 2.5 to 3.5 mass % Ag, and most preferably 3.0 to 3.2 mass % Ag.
本发明的耐热疲劳的高可靠性无铅焊料合金包含0.1至1.0质量%的Cu。Cu可以降低熔点,防止Cu蚀。与Sn焊料形成Cu6Sn5和Cu3Sn的IMC,提高焊料合金的机械强度和抗蠕变性,抑制了在热循环环境中的强度劣化。若Cu含量低于0.1质量%,生成的Sn-Cu的IMC量少,焊料合金的机械强度不充分。即使后续添加2.0质量%的Bi,耐热循环特性也会劣化。若Cu含量超过1.0质量%,焊料合金的液相线温度上升,在通常的回流温度下焊料不能完全熔融或是熔融时产生浮渣,导致润湿性变差,空洞变多,最终耐热循环特性变差。另外,在焊接界面大量析出Cu6Sn5的IMC,因此耐落下冲击性变差。优选的,所述焊料合金包括从0.3到0.9质量%的Cu,更优选地包括0.5到0.8质量%的Cu,以及最优选地包括0.7到0.8质量%的Cu。The heat fatigue resistant high reliability lead-free solder alloy of the present invention contains 0.1 to 1.0 mass % Cu. Cu can lower the melting point and prevent Cu corrosion. It forms IMCs of Cu 6 Sn 5 and Cu 3 Sn with Sn solder, improves the mechanical strength and creep resistance of the solder alloy, and suppresses the strength degradation in a thermal cycle environment. If the Cu content is less than 0.1 mass %, the amount of Sn-Cu IMC generated is small, and the mechanical strength of the solder alloy is insufficient. Even if 2.0 mass % Bi is added later, the heat cycle resistance will deteriorate. If the Cu content exceeds 1.0 mass %, the liquidus temperature of the solder alloy rises, the solder cannot be completely melted at the usual reflow temperature or scum is generated when it is melted, resulting in poor wettability, more voids, and ultimately poor heat cycle resistance. In addition, a large amount of Cu 6 Sn 5 IMC is precipitated at the welding interface, so the drop impact resistance is poor. Preferably, the solder alloy comprises from 0.3 to 0.9 mass % Cu, more preferably 0.5 to 0.8 mass % Cu, and most preferably 0.7 to 0.8 mass % Cu.
本发明的耐热疲劳的高可靠性无铅焊料合金包含1.0至8.0质量%的Sb,当Sb含量小于1.0质量%时,表现不出Sb溶解于Sn基质中以形成Sn(Sb)固溶体中的固溶强化作用,焊接界面的剪切强度降低。如果在焊料合金中添加超过3.0质量%的Sb,SnSb的IMC相从过饱和Sn(Sb)固溶体中析出,可以改善焊料合金的强度,而不引起延展性的降低。此外,Sb还会进入原子排列的晶格与Sn发生置换,使原子排列的晶格发生应变,增强Sn基质,提高焊料合金的温度循环特性。基于此,本发明的焊料合金展现出优异的机械性能(高强度和高延展性两者)和耐热疲劳性。但是,Sb含量超过8.0质量%时,增加了焊料合金的固液相线温度,也凝固形成粗壮脆性的Sn3Sb2初生相,无法抑制焊料合金裂纹造成的元件失效。优选的,所述焊料合金包括从2.0到6.0质量%的Sb,更优选地包括3.0到5.0质量%的Sb,以及最优选地包括3.0到4.0质量%的Sb。The high reliability lead-free solder alloy resistant to heat fatigue of the present invention comprises 1.0 to 8.0 mass % of Sb. When the Sb content is less than 1.0 mass %, the solid solution strengthening effect of Sb dissolving in the Sn matrix to form the Sn (Sb) solid solution is not shown, and the shear strength of the welding interface is reduced. If more than 3.0 mass % of Sb is added to the solder alloy, the IMC phase of SnSb is precipitated from the supersaturated Sn (Sb) solid solution, which can improve the strength of the solder alloy without causing a decrease in ductility. In addition, Sb also enters the lattice of atomic arrangement and replaces Sn, causing the lattice of atomic arrangement to be strained, strengthening the Sn matrix, and improving the temperature cycle characteristics of the solder alloy. Based on this, the solder alloy of the present invention exhibits excellent mechanical properties (both high strength and high ductility) and heat fatigue resistance. However, when the Sb content exceeds 8.0 mass%, the solidus-liquidus temperature of the solder alloy is increased, and a coarse and brittle Sn 3 Sb 2 primary phase is solidified, which cannot suppress component failure caused by cracks in the solder alloy. Preferably, the solder alloy includes from 2.0 to 6.0 mass% Sb, more preferably includes 3.0 to 5.0 mass% Sb, and most preferably includes 3.0 to 4.0 mass% Sb.
本发明的耐热疲劳的高可靠性无铅焊料合金包含0.05至4.0质量%的Bi。Bi可以固溶在Sn基质中,提升焊料合金的强度。Bi还可以降低焊料合金熔融状态下的表面张力,从而提高了焊料合金润湿性和铺展性。Bi还能增加焊料合金的抗蠕变性。Bi的含量如果低于0.05质量%,则Bi的固溶量少,强度不能充分改善。另外。另一方面,Bi的含量如果超过4.0质量%,固相线温度会下降。Bi会在晶界中偏析,焊料合金的强度降低。同时焊料合金自身变得脆硬,延展性和耐热疲劳性也显著降低,焊接缝无法抑制由于振动或冲击造成的裂纹进一步扩展。优选的,所述焊料合金包括从0.1到4.0质量%的Bi,更优选地包括0.1到2.0质量%的Bi,以及最优选地包括0.5到1.0质量%的Bi。The heat fatigue resistant high reliability lead-free solder alloy of the present invention contains 0.05 to 4.0 mass % Bi. Bi can be dissolved in the Sn matrix to improve the strength of the solder alloy. Bi can also reduce the surface tension of the solder alloy in the molten state, thereby improving the wettability and spreadability of the solder alloy. Bi can also increase the creep resistance of the solder alloy. If the Bi content is less than 0.05 mass %, the solid solution amount of Bi is small and the strength cannot be fully improved. In addition. On the other hand, if the Bi content exceeds 4.0 mass %, the solidus temperature will drop. Bi will segregate in the grain boundaries and the strength of the solder alloy will decrease. At the same time, the solder alloy itself becomes brittle and hard, and the ductility and heat fatigue resistance are also significantly reduced, and the weld cannot suppress the further expansion of cracks caused by vibration or impact. Preferably, the solder alloy includes from 0.1 to 4.0 mass % Bi, more preferably includes 0.1 to 2.0 mass % Bi, and most preferably includes 0.5 to 1.0 mass % Bi.
本发明的耐热疲劳的高可靠性无铅焊料合金包含0.5至6.0质量%的In。In可以降低焊料合金的熔融温度,并通过固溶强化改善焊料合金的强度。In的含量如果低于0.5质量%,则In在Sn中的固溶量少,焊料合金的强度不会充分改善。另外,焊料合金的液相线温度不下降。In的含量如果超过6.0质量%,则熔融的焊料合金变得容易被氧化,无法抑制焊接缝中产生空洞。优选的,所述焊料合金包括从0.5到4.0质量%的In,更优选地包括0.7到3.0质量%的In,以及最优选地包括1.0到2.5质量%的In。The heat fatigue resistant high reliability lead-free solder alloy of the present invention contains 0.5 to 6.0 mass % In. In can lower the melting temperature of the solder alloy and improve the strength of the solder alloy by solid solution strengthening. If the In content is less than 0.5 mass %, the solid solution amount of In in Sn is small, and the strength of the solder alloy will not be fully improved. In addition, the liquidus temperature of the solder alloy does not decrease. If the In content exceeds 6.0 mass %, the molten solder alloy becomes easily oxidized and the generation of voids in the weld cannot be suppressed. Preferably, the solder alloy includes from 0.5 to 4.0 mass % In, more preferably includes 0.7 to 3.0 mass % In, and most preferably includes 1.0 to 2.5 mass % In.
本发明的耐热疲劳的高可靠性无铅焊料合金包含0.5至1.2质量%的Ni。均匀地分散于Cu6Sn5相中,使IMC的粒径微细,提高钎焊接头的接合强度、耐冲击性和耐热循环性。细微的粒径,使产生裂纹的应力得以分散在许多的粒径方向,减缓了裂纹的进一步扩展。Ni还可以抑制半导体元件、外部基板的镀层成分钎焊时向焊料合金中扩散、反应。Ni的含量如果低于0.5质量%,无法有效提高钎焊接头的接合强度。Ni的含量如果超过1.2质量%,焊料合金的润湿性变差,且液相线温度急剧增加,钎焊温度过高电子元件可能受到热损伤。优选的,所述焊料合金包括从0.5到1.0质量%的Ni,更优选地包括0.5到0.6质量%的Ni,以及最优选地包括0.1到0.3质量%的Ni。The heat fatigue resistant high reliability lead-free solder alloy of the present invention contains 0.5 to 1.2 mass % Ni. It is uniformly dispersed in the Cu 6 Sn 5 phase, making the particle size of IMC fine, improving the bonding strength, impact resistance and thermal cycle resistance of the solder joint. The fine particle size allows the stress that generates cracks to be dispersed in many particle size directions, slowing down the further expansion of the cracks. Ni can also inhibit the diffusion and reaction of the plating components of semiconductor components and external substrates into the solder alloy during soldering. If the Ni content is less than 0.5 mass %, the bonding strength of the solder joint cannot be effectively improved. If the Ni content exceeds 1.2 mass %, the wettability of the solder alloy deteriorates, and the liquidus temperature increases sharply. If the soldering temperature is too high, the electronic components may be thermally damaged. Preferably, the solder alloy includes from 0.5 to 1.0 mass % Ni, more preferably includes 0.5 to 0.6 mass % Ni, and most preferably includes 0.1 to 0.3 mass % Ni.
本发明的耐热疲劳的高可靠性无铅焊料合金包含0.001至0.2质量%的Co。添加微量Co与Ni一样可以细化晶粒,凝固时在焊料合金中生成大量Co的凝固核,周围析出的Sn相的生长被抑制,组织整体变得更加微细。Co的含量如果低于0.001质量%,不能发挥细化合金组织,提高接合强度的作用。Co的含量如果高于0.2质量%,焊料合金润湿性变差,熔点变高。优选的,所述焊料合金包括从0.001到0.1质量%的Co,更优选地包括0.01到0.08质量%的Co,以及最优选地包括0.01到0.03质量%的Co。The heat fatigue resistant high reliability lead-free solder alloy of the present invention contains 0.001 to 0.2 mass % Co. Adding a trace amount of Co can refine the grains just like Ni. During solidification, a large number of Co solidification nuclei are generated in the solder alloy, the growth of the Sn phase precipitated around is suppressed, and the overall structure becomes finer. If the content of Co is less than 0.001 mass %, it cannot play the role of refining the alloy structure and improving the bonding strength. If the content of Co is higher than 0.2 mass %, the wettability of the solder alloy deteriorates and the melting point becomes higher. Preferably, the solder alloy includes from 0.001 to 0.1 mass % Co, more preferably includes 0.01 to 0.08 mass % Co, and most preferably includes 0.01 to 0.03 mass % Co.
本发明的耐热疲劳的高可靠性无铅焊料合金还包括微量元素和/或RE(稀土元素)。The thermal fatigue resistant high reliability lead-free solder alloy of the present invention further comprises trace elements and/or RE (rare earth elements).
其中,微量元素由P和/或Ge组成。Among them, the trace elements consist of P and/or Ge.
本发明的耐热疲劳的高可靠性无铅焊料合金包含0.001至0.05质量%的Ge。Ge是能够抑制Sn的氧化且改善润湿性的任意元素。焊料合金熔融时,Ge在表面高度富集,形成致密的保护膜。Ge的含量如果小于0.001质量%,无明显的抗氧化作用。Ge的含量超过0.05质量%,熔融焊料合金的表面张力增加,焊料合金的流动性变差,焊接部产生更多的空洞。优选的,所述焊料合金包括从0.001到0.03质量%的Ge,更优选地包括0.001到0.015质量%的Ge,以及最优选地包括0.005到0.01质量%的Ge。The heat fatigue resistant high reliability lead-free solder alloy of the present invention contains 0.001 to 0.05 mass % Ge. Ge is any element that can inhibit the oxidation of Sn and improve wettability. When the solder alloy is melted, Ge is highly enriched on the surface to form a dense protective film. If the content of Ge is less than 0.001 mass %, there is no obvious antioxidant effect. If the content of Ge exceeds 0.05 mass %, the surface tension of the molten solder alloy increases, the fluidity of the solder alloy deteriorates, and more voids are generated in the welding part. Preferably, the solder alloy includes from 0.001 to 0.03 mass % Ge, more preferably includes 0.001 to 0.015 mass % Ge, and most preferably includes 0.005 to 0.01 mass % Ge.
本发明的耐热疲劳的高可靠性无铅焊料合金包含0.001至0.08质量%的P。P是能够抑制Sn的氧化且改善润湿性的元素。焊料合金熔融时,P在表面形成磷酸锡膜层,阻碍焊料合金直接与周围空气接触形成氧化锡。P的含量如果小于0.001质量%,这种防氧化作用就不明显。P的含量超过0.08质量%,熔融焊料合金的表面张力增加,焊料合金的流动性变差,焊接部产生更多的空洞。优选的,所述焊料合金包括从0.001到0.05质量%的P,更优选地包括0.001到0.03质量%的P,以及最优选地包括0.001到0.02质量%的P。另外,Ge、P的添加总量最优应满足0.005至0.03质量%的范围。The heat fatigue resistant high reliability lead-free solder alloy of the present invention contains 0.001 to 0.08 mass % of P. P is an element that can inhibit the oxidation of Sn and improve wettability. When the solder alloy is melted, P forms a tin phosphate film layer on the surface, which prevents the solder alloy from directly contacting the surrounding air to form tin oxide. If the content of P is less than 0.001 mass %, this anti-oxidation effect is not obvious. If the content of P exceeds 0.08 mass %, the surface tension of the molten solder alloy increases, the fluidity of the solder alloy deteriorates, and more voids are generated in the welding part. Preferably, the solder alloy includes from 0.001 to 0.05 mass % of P, more preferably includes 0.001 to 0.03 mass % of P, and most preferably includes 0.001 to 0.02 mass % of P. In addition, the total amount of Ge and P added should optimally meet the range of 0.005 to 0.03 mass %.
本发明的耐热疲劳的高可靠性无铅焊料合金除上述组分之外,还包含总量为0.09质量%以下的稀土元素(RE)中的至少一种。RE具有很强的亲“Sn”能力,微量的稀土优先与Sn化合,这些优先析出、分布均匀的化合物能够成为进一步结晶的非均质形核中心,使组织得到明显的细化且分布均匀,从而提高焊料合金的剪切强度、蠕变抗力以及焊点的抗电迁移性能。若RE添加总量小于0.001质量%,对于组织没有明显的细化作用。若RE添加总量大于0.09质量%,会生成脆性的稀土化合物。同时,由于原子半径较大,会破坏基体合金的晶格,导致焊缝的结合强度降低。RE元素的含量的总计优选0.07质量%以下、进一步优选0.05质量%以下、最优选0.02质量%以下。其中,优选的RE元素为Ce、Ld和Nd中的至少一种。The heat fatigue resistant high reliability lead-free solder alloy of the present invention contains at least one rare earth element (RE) with a total amount of less than 0.09 mass % in addition to the above components. RE has a strong affinity for "Sn". A trace amount of rare earth preferentially combines with Sn. These preferentially precipitated and evenly distributed compounds can become heterogeneous nucleation centers for further crystallization, so that the organization is significantly refined and evenly distributed, thereby improving the shear strength, creep resistance and anti-electromigration performance of the solder alloy. If the total amount of RE added is less than 0.001 mass %, there is no obvious refinement effect on the organization. If the total amount of RE added is greater than 0.09 mass %, brittle rare earth compounds will be generated. At the same time, due to the large atomic radius, the lattice of the matrix alloy will be destroyed, resulting in a decrease in the bonding strength of the weld. The total content of RE elements is preferably less than 0.07 mass %, more preferably less than 0.05 mass %, and most preferably less than 0.02 mass %. Among them, the preferred RE element is at least one of Ce, Ld and Nd.
本发明的耐热疲劳的高可靠性无铅焊料合金的余量为Sn。除前述元素之外,可能还含有不可避免的杂质。即使含有不可避免的杂质的情况下,也不对前述效果造成影响。The balance of the heat fatigue resistant high reliability lead-free solder alloy of the present invention is Sn. In addition to the aforementioned elements, it may also contain inevitable impurities. Even if it contains inevitable impurities, it does not affect the aforementioned effects.
现在,将通过这些焊料合金的多个非限制性实施例及其性能的总结进一步描述本发明,本发明不限定于以下的实施例。为了验证本发明的效果,实施例1~25和对比例1~15提供了一种耐热疲劳的高可靠性无铅焊料合金,其具体形式为预成型无铅焊片,所述无铅焊片的成分按重量百分数计,如表1和表2所示,并测定熔点、抗拉强度、剪切强度、氧化膜的厚度、温循结果和高温老化结果进行评价。Now, the present invention will be further described through a summary of multiple non-limiting examples of these solder alloys and their properties, and the present invention is not limited to the following examples. In order to verify the effect of the present invention, Examples 1 to 25 and Comparative Examples 1 to 15 provide a high reliability lead-free solder alloy with thermal fatigue resistance, which is in the form of a preformed lead-free solder sheet, the components of the lead-free solder sheet are calculated by weight percentage as shown in Table 1 and Table 2, and the melting point, tensile strength, shear strength, oxide film thickness, temperature cycle results and high temperature aging results are measured for evaluation.
性能评价测试:Performance evaluation test:
(1)熔点。对于表1和表2列出的实施例/对比例,测定其DSC曲线。根据ICTA标准化委员会的规定,DSC曲线前基线延长线与峰的前沿最大斜率处切线的交点代表熔点。实施例/对比例的DSC曲线是通过将40mg样品置于METTLER TOLEDO公司的DSC仪(型号:JL-DSC001)、在大气中、以10℃/分钟进行升温而得到的。熔点为214~217℃的情况下,评价为“◎”。熔点为217至220℃的情况下,是实用上没有问题的温度,因此,评价为“〇”。熔点低于214℃和超过220℃的情况下,评价为“×”。(1) Melting point. For the examples/comparative examples listed in Tables 1 and 2, their DSC curves were measured. According to the provisions of the ICTA Standardization Committee, the intersection of the extended line of the front baseline of the DSC curve and the tangent line at the maximum slope of the front edge of the peak represents the melting point. The DSC curves of the examples/comparative examples were obtained by placing 40 mg of the sample in a DSC instrument (model: JL-DSC001) from METTLER TOLEDO, heating it in the atmosphere at a rate of 10°C/minute. When the melting point is 214 to 217°C, it is evaluated as "◎". When the melting point is 217 to 220°C, it is a temperature that is not a problem in practical use, so it is evaluated as "0". When the melting point is lower than 214°C and higher than 220°C, it is evaluated as "×".
(2)抗拉强度。跟据JISZ3198-2标准而测定。对于表1和表2列出的实施例/对比例,熔炼注入模具中,制作标距长度为30mm、直径10mm的试验棒材。对于所制作的试验棒材,利用万能材料试验机(科准,KZ-50KN),在室温下、5mm/分钟的速度进行拉伸,测量5个试验棒材断裂时的平均强度(Rm)。本发明中,拉伸强度为56MPa以上的情况下,为充分的强度,因此,评价为“◎”。拉伸强度52MPa以上且低于56MPa的情况下,是实用上没有问题的强度,因此,评价为“〇”。拉伸强度低于52MPa的情况下,评价为“×”。(2) Tensile strength. Measured according to JISZ3198-2 standard. For the examples/comparative examples listed in Tables 1 and 2, melt and inject into a mold to make test bars with a gauge length of 30 mm and a diameter of 10 mm. The produced test bars were stretched at a speed of 5 mm/min at room temperature using a universal material testing machine (Kezhun, KZ-50KN), and the average strength (Rm) of 5 test bars when they broke was measured. In the present invention, when the tensile strength is 56 MPa or more, it is sufficient strength, so it is evaluated as "◎". When the tensile strength is 52 MPa or more and less than 56 MPa, it is a strength that is not a problem in practical use, so it is evaluated as "0". When the tensile strength is less than 52 MPa, it is evaluated as "×".
(3)剪切强度。制作尺寸为3×3×0.05mm的表1和表2列出的实施例/对比例。使用厚度1.0mm的4J29合金-镀Ni-镀Au板,在最高温度248℃、保温时间60秒、氮气的条件下进行软钎焊,每种实施例/对比例至少制作20个试验基板。利用剪切强度测定装置(科准公司制STR 1000),在6mm/分钟的条件下测定剪切强度(MPa)。20个试验基板的剪切强度平均值为35MPa以上的情况下,判断为得到充分的剪切强度的水平,评价为“◎”。超过28MPa且为35MPa以下的情况下,判断为可以实用上没有问题地使用的水平,评价为“〇”。低于28MPa的情况下,评价为“×”。(3) Shear strength. The examples/comparative examples listed in Table 1 and Table 2 were prepared with a size of 3×3×0.05 mm. A 4J29 alloy-Ni-plated-Au-plated plate with a thickness of 1.0 mm was used for soldering at a maximum temperature of 248°C, a holding time of 60 seconds, and nitrogen. At least 20 test substrates were prepared for each example/comparative example. The shear strength (MPa) was measured at 6 mm/min using a shear strength measuring device (STR 1000 manufactured by Kezhun Corporation). When the average shear strength of the 20 test substrates was above 35 MPa, it was judged to be a level of sufficient shear strength and was evaluated as "◎". When it exceeded 28 MPa and was below 35 MPa, it was judged to be a level that could be used practically without problems and was evaluated as "0". When it was below 28 MPa, it was evaluated as "×".
(4)氧化膜的厚度。将表1和表2列出的实施例/对比例加工成厚度为10×10×0.5mm的预成型料锭,在150℃的恒温槽中进行150分钟加热处理。根据ISO/TR 15969的方法,用场发射型俄歇电子能谱法(FE AES)测定氧化膜厚度。膜厚2.0nm以下,表示实施例/对比例的抗氧化性能较好,因此,评价为“◎”。膜厚超过2.0nm且为2.8nm以下的情况下,在实用上没有问题,因此,评价为“〇”。膜厚超过2.8nm的情况下,评价为“×”。(4) Thickness of oxide film. The examples/comparative examples listed in Table 1 and Table 2 were processed into preformed ingots with a thickness of 10×10×0.5 mm, and heat-treated in a constant temperature bath at 150°C for 150 minutes. The oxide film thickness was measured by field emission Auger electron spectroscopy (FE AES) according to the method of ISO/TR 15969. A film thickness of 2.0 nm or less indicates that the example/comparative example has good antioxidant properties, and therefore, it is evaluated as "◎". When the film thickness exceeds 2.0 nm and is less than 2.8 nm, there is no practical problem, and therefore, it is evaluated as "0". When the film thickness exceeds 2.8 nm, it is evaluated as "×".
(5)温循和高温老化结果。制作尺寸为3×3×0.05mm的表1和表2列出的实施例/对比例。使用厚度1.0mm的4J29合金-镀Ni-镀Au板,在最高温度248℃、保温时间60秒、氮气的条件下进行软钎焊,每种实施例/对比例至少制作20个试验基板。其中,根据JESD22-A104C标准的方法,将10个试验基板置于可程式冷热冲击箱(科准公司制,TSTC-80-DC)实施温度循环测试试验。设定低温-50℃、高温+150℃、停留时间10分钟,循环次数为500个循环。利用推力剪切机(科准公司制STR 1000),在6mm/分钟的条件下测定10个试验基板的剩余剪切强度(MPa)。将平均剩余剪切强度在15MPa以上,评价为“◎”。超过9且为15MPa以下的情况下,判断为可以实用上没有问题地使用的水平,评价为“〇”。低于9MPa的情况下,评价为“×”。将10个试验基板置于高温老化箱,在150℃下保温500小时。同样使用推力剪切机测定10个试验基板老化后的剩余剪切强度,剪切强度平均值为25MPa以上的情况下,判断为得到充分的剪切强度的水平,评价为“◎”。超过20MPa且为25MPa以下的情况下,判断为可以实用上没有问题地使用的水平,评价为“〇”。低于20MPa的情况下,评价为“×”。(5) Temperature cycle and high temperature aging results. The examples/comparative examples listed in Table 1 and Table 2 were prepared with a size of 3×3×0.05 mm. A 4J29 alloy-Ni-plated-Au-plated plate with a thickness of 1.0 mm was used for soldering at a maximum temperature of 248°C, a holding time of 60 seconds, and nitrogen. At least 20 test substrates were prepared for each example/comparative example. Among them, according to the method of JESD22-A104C standard, 10 test substrates were placed in a programmable hot and cold shock box (manufactured by Kezhun, TSTC-80-DC) for temperature cycle testing. The low temperature was set to -50°C, the high temperature was +150°C, the dwell time was 10 minutes, and the number of cycles was 500 cycles. Using a thrust shear machine (manufactured by Kezhun STR 1000), the residual shear strength (MPa) of 10 test substrates was measured at 6 mm/min. The average residual shear strength was above 15 MPa and was evaluated as "◎". When it exceeds 9 and is below 15MPa, it is judged to be a level that can be used practically without problems and is evaluated as "0". When it is below 9MPa, it is evaluated as "×". 10 test substrates are placed in a high-temperature aging box and kept warm at 150°C for 500 hours. Similarly, the residual shear strength of the 10 test substrates after aging is measured using a thrust shear machine. When the average shear strength is above 25MPa, it is judged to be a level that obtains sufficient shear strength and is evaluated as "◎". When it exceeds 20MPa and is below 25MPa, it is judged to be a level that can be used practically without problems and is evaluated as "0". When it is below 20MPa, it is evaluated as "×".
实施例1-25的耐热疲劳的高可靠性无铅焊料合金的具体组成如下表1所示:The specific compositions of the thermal fatigue resistant high reliability lead-free solder alloys of Examples 1-25 are shown in Table 1 below:
表1实施例1-25的耐热疲劳的高可靠性无铅焊料合金组成Table 1 Composition of thermal fatigue resistant high reliability lead-free solder alloys of Examples 1-25
注:Bal.为余量。Note: Bal. is the margin.
对比例1-15的耐热疲劳的高可靠性无铅焊料合金的具体组成如下表2所示:The specific compositions of the heat fatigue resistant high reliability lead-free solder alloys of Comparative Examples 1-15 are shown in Table 2 below:
表2对比例1-15的耐热疲劳的高可靠性无铅焊料合金组成Table 2 Composition of thermal fatigue resistant high reliability lead-free solder alloys of Comparative Examples 1-15
注:Bal.为余量。Note: Bal. is the margin.
对实施例1-25、对比例1-15的耐热疲劳的高可靠性无铅焊料合金进行性能评价测试,测试结果如下表3-4所示。Performance evaluation tests were conducted on the thermal fatigue resistant high reliability lead-free solder alloys of Examples 1-25 and Comparative Examples 1-15. The test results are shown in Tables 3-4 below.
表3实施例1-25的耐热疲劳的高可靠性无铅焊料合金性能评价测试结果Table 3 Performance evaluation test results of high reliability lead-free solder alloys resistant to thermal fatigue of Examples 1-25
表4对比例1-15的耐热疲劳的高可靠性无铅焊料合金性能评价测试结果Table 4 Performance evaluation test results of high reliability lead-free solder alloys resistant to thermal fatigue of comparative examples 1-15
表1、表2中所列出的各实施例和对比例的耐热疲劳的高可靠性无铅焊料合金,除金属铟外,均采用中间合金的熔炼方式进行制备。The heat fatigue resistant and high reliability lead-free solder alloys of the embodiments and comparative examples listed in Table 1 and Table 2, except for metal indium, are all prepared by melting the master alloy.
本发明实施例与对比例的耐热疲劳的高可靠性无铅焊料(具体形式为预成型无铅焊片)的制备方法包括:首先熔炼各中间合金(锡银合金、锡锑合金、锡磷合金、锡锗合金、锡铜合金、锡铋合金、锡镍合金、锡钴合金、稀土元素中间合金),将中间合金进行混合熔炼,待全部熔融搅拌均匀,降温至320℃后,浇铸、轧制、清洗、冲裁或分切成预成型无铅焊片。The preparation method of the heat fatigue-resistant high-reliability lead-free solder (specifically in the form of preformed lead-free solder sheets) of the embodiments of the present invention and the comparative examples includes: firstly, melting each intermediate alloy (tin-silver alloy, tin-antimony alloy, tin-phosphorus alloy, tin-germanium alloy, tin-copper alloy, tin-bismuth alloy, tin-nickel alloy, tin-cobalt alloy, rare earth element intermediate alloy), mixing and melting the intermediate alloys, stirring evenly after all are melted, cooling to 320°C, and then casting, rolling, cleaning, punching or cutting into preformed lead-free solder sheets.
锡银合金的制备方法包括:将锡银金属放在高真空熔炼炉中,通入氩保护气,加热至900℃,待全部熔融后,混匀,浇铸成锡锑合金。The preparation method of the tin-silver alloy comprises: placing the tin-silver metal in a high vacuum melting furnace, introducing argon protective gas, heating to 900° C., mixing and casting into a tin-antimony alloy after all the tin-silver metal is completely melted.
锡锑合金的制备方法包括:将锡锑金属放在高真空熔炼炉中,通入氩保护气,加热至700℃,待全部熔融后,混匀,浇铸成锡锑合金。The preparation method of the tin-antimony alloy comprises: placing the tin-antimony metal in a high vacuum melting furnace, introducing argon protective gas, heating to 700° C., mixing and casting the tin-antimony alloy after all the metal is melted.
锡磷合金的制备方法包括:将锡和磷混合,并在其上覆盖保护熔盐放入密封箱,然后放入马弗炉中加热至800℃,待全部熔融后,混合均匀,浇铸冷却成锡磷合金。The preparation method of tin-phosphorus alloy includes: mixing tin and phosphorus, covering them with protective molten salt and putting them into a sealed box, then putting them into a muffle furnace and heating them to 800°C, and after all of them are melted, mixing them evenly, casting and cooling them into tin-phosphorus alloy.
锡锗合金的制备方法包括:将锡锗金属放在高真空熔炼炉中,通入氩保护气,加热至1000℃,待全部熔融后,混匀,浇铸成锡锗合金。The preparation method of the tin-germanium alloy comprises: placing the tin-germanium metal in a high vacuum melting furnace, introducing argon protective gas, heating to 1000° C., mixing and casting the tin-germanium alloy after all the metal is melted.
锡铜合金的制备方法包括:将锡铜金属放在高真空熔炼炉中,通入氩保护气,加热至1050℃,待全部熔融后,混匀,浇铸成锡铜合金。The preparation method of the tin-copper alloy comprises: placing the tin-copper metal in a high vacuum melting furnace, introducing argon protective gas, heating to 1050° C., mixing and casting the tin-copper alloy after all the metal is melted.
锡铋合金的制备方法包括:将锡铋金属放在高真空熔炼炉中,通入氩保护气,加热至320℃,待全部熔融后,混匀,浇铸成锡铋合金。The preparation method of the tin-bismuth alloy comprises: placing the tin-bismuth metal in a high vacuum melting furnace, introducing argon protective gas, heating to 320° C., mixing and casting the tin-bismuth alloy after all the metal is melted.
锡镍合金的制备方法包括:将锡镍金属放在高真空熔炼炉中,通入氩保护气,加热至1100℃,待全部熔融后,混匀,浇铸成锡镍合金。The preparation method of the tin-nickel alloy comprises: placing the tin-nickel metal in a high vacuum melting furnace, introducing argon protective gas, heating to 1100° C., mixing and casting the tin-nickel alloy after all the metal is melted.
锡钴合金的制备方法包括:将锡钴金属放在高真空熔炼炉中,通入氩保护气,加热至1150℃,待全部熔融后,混匀,浇铸成锡钴合金。The preparation method of the tin-cobalt alloy comprises: placing the tin-cobalt metals in a high vacuum melting furnace, introducing argon protective gas, heating to 1150° C., mixing and casting the tin-cobalt alloy after all the metals are melted.
RE中间合金的制备方法包括:将锡和稀土金属放在高真空熔炼炉中,通入氩保护气,加热至1000℃,待全部熔融后,混匀,浇铸成RE中间合金。The preparation method of RE master alloy comprises: placing tin and rare earth metal in a high vacuum melting furnace, introducing argon protective gas, heating to 1000° C., mixing and casting into RE master alloy after all of them are melted.
由表1可知,实施例1~25的Ag、Cu、Bi、Sb、In、Ni、Co和RE的质量百分比含量均在本发明限定的范围内。因此可知,焊料合金的熔融温度不会过高,抗拉强度和剪切强度高,表面氧化膜的厚度变薄,且具有较优异的温度循环特性和耐热疲劳性能,满足高功率半导体激光器、功率器件和微电子电路在高使用温度中的应用。As shown in Table 1, the mass percentage contents of Ag, Cu, Bi, Sb, In, Ni, Co and RE in Examples 1 to 25 are all within the range defined by the present invention. Therefore, it can be seen that the melting temperature of the solder alloy is not too high, the tensile strength and shear strength are high, the thickness of the surface oxide film is thinner, and it has excellent temperature cycle characteristics and thermal fatigue resistance, which meets the application of high-power semiconductor lasers, power devices and microelectronic circuits in high operating temperatures.
另一方面,对比例1和对比例2与实施例1-4相比,区别之处在于对比例1和对比例2的Ag的含量不在本发明范围内,因此,对比例1的抗拉强度与剪切强度差、对比例2的熔融温度不在期望的范围内,且对比例1和对比例2均存在温循结果和老化结果差的问题。On the other hand, the difference between Comparative Examples 1 and 2 and Examples 1-4 is that the Ag content of Comparative Examples 1 and 2 is not within the scope of the present invention. Therefore, the tensile strength and shear strength of Comparative Example 1 are poor, the melting temperature of Comparative Example 2 is not within the expected range, and both Comparative Examples 1 and 2 have the problem of poor temperature cycling results and aging results.
对比例3与实施例5-7相比,区别之处在于对比例3的Cu的含量少,因此,熔点上升。对比例4与实施例5-7相比,区别之处在于对比例4的Cu的含量多,因此,剪切强度差。The difference between Comparative Example 3 and Examples 5-7 is that the content of Cu in Comparative Example 3 is small, so the melting point is increased. The difference between Comparative Example 4 and Examples 5-7 is that the content of Cu in Comparative Example 4 is large, so the shear strength is poor.
对比例5与实施例8-11相比,区别之处在于对比例5的Sb的含量少,因此,其剪切强度变差,温循结果和老化结果差。对比例6与实施例8-11相比,区别之处在于对比例6的Sb的含量多,熔点升高,温循结果和老化结果差。Compared with Examples 8-11, the difference between Comparative Example 5 is that the Sb content of Comparative Example 5 is small, so its shear strength is poor, and the temperature cycling results and aging results are poor. Compared with Examples 8-11, the difference between Comparative Example 6 is that the Sb content of Comparative Example 6 is large, the melting point is increased, and the temperature cycling results and aging results are poor.
对比例7与实施例12-14相比,区别之处在于对比例7的In的含量少,因此,熔点无法适当降低,抗拉和剪切强度变差。对比例8与实施例12-14相比,区别之处在于对比例8的In的含量多,熔点降低过多,且焊料合金容易被氧化。The difference between Comparative Example 7 and Examples 12-14 is that the content of In in Comparative Example 7 is small, so the melting point cannot be properly reduced, and the tensile and shear strengths are deteriorated. The difference between Comparative Example 8 and Examples 12-14 is that the content of In in Comparative Example 8 is large, the melting point is reduced too much, and the solder alloy is easily oxidized.
对比例9与实施例15-18相比,区别之处在于对比例9的Bi的含量少,因此,焊料合金的抗拉和剪切强度变差。对比例10与实施例15-18相比,区别之处在于对比例10的Bi的含量多,焊料合金变得脆硬,温循结果和老化结果变差。The difference between Comparative Example 9 and Examples 15-18 is that the Bi content of Comparative Example 9 is small, so the tensile and shear strengths of the solder alloy deteriorate. The difference between Comparative Example 10 and Examples 15-18 is that the Bi content of Comparative Example 10 is large, the solder alloy becomes brittle and hard, and the temperature cycling results and aging results deteriorate.
对比例11与实施例19-21相比,区别之处在于对比例11的Ni含量过多;The difference between Comparative Example 11 and Examples 19-21 is that the Ni content of Comparative Example 11 is too high;
对比例12与实施例22-24相比,区别之处在于对比例12的Co含量过多,因此,对比例11和对比例12的熔点变高且对比例11的温循结果和老化结果变差。The difference between Comparative Example 12 and Examples 22-24 is that the Co content of Comparative Example 12 is too high, so the melting points of Comparative Examples 11 and 12 become higher and the temperature cycle results and aging results of Comparative Example 11 become worse.
对比例13与实施例25相比,区别之处在于对比例13不含有微量元素Ge、P和RE元素,导致焊料合金的抗拉和剪切强度不高,容易发生氧化,且温循结果和老化结果变差。对比例14与实施例25相比,区别之处在于对比例14中Ge、P和RE元素的含量超过了上限值,导致焊料合金润湿变差和接合强度变低,温循结果和老化结果变差。Compared with Example 25, the difference between Comparative Example 13 is that Comparative Example 13 does not contain trace elements Ge, P and RE elements, resulting in low tensile and shear strengths of the solder alloy, easy oxidation, and poor temperature cycling results and aging results. Compared with Example 25, the difference between Comparative Example 14 is that the contents of Ge, P and RE elements in Comparative Example 14 exceed the upper limit, resulting in poor wetting of the solder alloy and low bonding strength, and poor temperature cycling results and aging results.
对比例15是Sn96.5Ag3.0Cu0.5,焊料合金强度不高,容易发生氧化,同时温循结果和老化结果不佳。Comparative Example 15 is Sn96.5Ag3.0Cu0.5, the solder alloy strength is not high, it is easy to oxidize, and the temperature cycle results and aging results are not good.
图1为本发明实施例21在高温老化试验后的焊接件横截面SEM图像。在150℃老化500h后,在实施例21中观察到IMC(白色)生长厚度较小,仅在焊缝边缘位置存在少量白色的(Au,Ni)Sn4化合物,焊接缝中间位置仍保留耐热疲劳的高可靠性无铅焊料合金成分。Figure 1 is a cross-sectional SEM image of the welded part after high temperature aging test of Example 21 of the present invention. After aging at 150°C for 500h, it was observed in Example 21 that the IMC (white) growth thickness was small, only a small amount of white (Au, Ni) Sn 4 compound existed at the edge of the weld, and the middle of the weld still retained the high reliability lead-free solder alloy component with thermal fatigue resistance.
图2为本发明对比例15在高温老化试验后的焊接件横截面SEM图像。在150℃老化500h后,在对比例15中观察到IMC(白色)生长速度较快,焊接缝中间位置也分布着许多白色的(Au,Ni)Sn4化合物,不能抑制焊缝处裂纹的扩展。Figure 2 is a cross-sectional SEM image of the welded part after high temperature aging test of Comparative Example 15 of the present invention. After aging at 150°C for 500h, it was observed that the IMC (white) growth rate was relatively fast in Comparative Example 15, and many white (Au, Ni) Sn 4 compounds were also distributed in the middle of the weld, which could not inhibit the expansion of cracks at the weld.
综上,与传统合金Sn96.5Ag3.0Cu0.5相比,本发明所述的耐热疲劳的高可靠性无铅焊料合金表现出更为优秀的熔点、抗氧化性、机械性能和高温可靠性。In summary, compared with the traditional alloy Sn96.5Ag3.0Cu0.5, the high-reliability lead-free solder alloy with thermal fatigue resistance described in the present invention exhibits better melting point, oxidation resistance, mechanical properties and high-temperature reliability.
以上所述,仅为本发明的具体实施方式,但本发明的保护范围并不局限于此,任何熟悉本技术领域的技术人员在本发明揭露的技术范围内,可轻易想到各种等效的修改或替换,这些修改或替换都应涵盖在本发明的保护范围之内。因此,本发明的保护范围应以权利要求的保护范围为准。The above is only a specific embodiment of the present invention, but the protection scope of the present invention is not limited thereto. Any person skilled in the art can easily think of various equivalent modifications or substitutions within the technical scope disclosed by the present invention, and these modifications or substitutions should be included in the protection scope of the present invention. Therefore, the protection scope of the present invention shall be based on the protection scope of the claims.
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