CN118367075A - Display panel and method for manufacturing display panel - Google Patents
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Abstract
本公开涉及显示技术领域,特别涉及一种显示面板以及显示面板的制备方法。其中,显示面板包括:驱动基板、保护层以及像素单元,像素单元通过保护层键合在驱动基板上;像素单元包括电子传输层、发光层和空穴传输层;电子传输层包括第一半球结构,第一半球结构包括曲面区域和平面区域,平面区域朝向显示面板的出光侧;在垂直于平面区域的方向上,曲面区域中与平面区域的距离大于或者等于距离阈值的区域为预设区域,发光层包覆预设区域,空穴传输层位于发光层远离预设区域的一侧。本公开的技术方案,可改善由于发光层中电子‑空穴密度不均造成像素单元外量子效率下降的问题,有利于提高显示面板的显示效果。
The present disclosure relates to the field of display technology, and in particular to a display panel and a method for preparing the display panel. The display panel includes: a driving substrate, a protective layer and a pixel unit, wherein the pixel unit is bonded to the driving substrate through the protective layer; the pixel unit includes an electron transport layer, a light-emitting layer and a hole transport layer; the electron transport layer includes a first hemispherical structure, and the first hemispherical structure includes a curved surface area and a plane area, and the plane area faces the light-emitting side of the display panel; in the direction perpendicular to the plane area, the area in the curved surface area whose distance from the plane area is greater than or equal to a distance threshold is a preset area, the light-emitting layer covers the preset area, and the hole transport layer is located on the side of the light-emitting layer away from the preset area. The technical solution disclosed in the present disclosure can improve the problem of decreased external quantum efficiency of the pixel unit due to uneven electron-hole density in the light-emitting layer, which is beneficial to improving the display effect of the display panel.
Description
技术领域Technical Field
本公开涉及显示技术领域,特别涉及一种显示面板以及显示面板的制备方法。The present disclosure relates to the field of display technology, and in particular to a display panel and a method for preparing the display panel.
背景技术Background technique
微发光二极管(Micro light emitting diodes,Micro LED)显示芯片具有尺寸小、集成度高和自发光等特点,在亮度、分辨率、对比度、能耗、使用寿命、响应速度和热稳定性等方面具有更大的优势。近年来,随着车灯、投影、照明、通信等新应用场景发展,用户对于高电流密度的高亮度Micro LED显示芯片需求不断增加。Micro light emitting diodes (Micro LED) display chips have the characteristics of small size, high integration and self-luminescence, and have greater advantages in brightness, resolution, contrast, energy consumption, service life, response speed and thermal stability. In recent years, with the development of new application scenarios such as automotive lighting, projection, lighting, and communications, users' demand for high-current density and high-brightness Micro LED display chips has continued to increase.
相关技术中,对于LED器件来说,在大电流密度下工作时存在严重的外量子效率下降问题,从而影响显示面板的显示效果。这主要是由以下原因导致:LED器件中电子迁移率远大于空穴迁移率,造成大量的电子来不及与空穴复合就直接穿过量子阱外延层(发光层)泄露出去;大电流密度注入,电子和空穴等载流子浓度增大,载流子间俄歇复合增强,使发光效率下降。In the related art, for LED devices, there is a serious problem of external quantum efficiency decline when working at high current density, which affects the display effect of the display panel. This is mainly caused by the following reasons: the electron mobility in LED devices is much greater than the hole mobility, causing a large number of electrons to leak directly through the quantum well epitaxial layer (light-emitting layer) before they can recombine with holes; when high current density is injected, the concentration of carriers such as electrons and holes increases, and the Auger recombination between carriers is enhanced, which reduces the luminous efficiency.
发明内容Summary of the invention
为了解决上述技术问题或者至少部分地解决上述技术问题,本公开提供了一种显示面板以及显示面板的制备方法,可改善由于发光层中电子-空穴密度不均造成像素单元外量子效率下降的问题,有利于提高显示面板的显示效果。In order to solve the above technical problems or at least partially solve the above technical problems, the present disclosure provides a display panel and a method for preparing a display panel, which can improve the problem of decreased external quantum efficiency of pixel units due to uneven electron-hole density in the light-emitting layer, and is beneficial to improving the display effect of the display panel.
第一方面,本公开提供了一种显示面板,包括:In a first aspect, the present disclosure provides a display panel, comprising:
驱动基板、保护层以及像素单元,所述像素单元通过所述保护层键合在所述驱动基板上;A driving substrate, a protective layer and a pixel unit, wherein the pixel unit is bonded to the driving substrate through the protective layer;
所述像素单元包括电子传输层、发光层和空穴传输层;所述电子传输层包括第一半球结构,所述第一半球结构包括曲面区域和平面区域,所述平面区域朝向所述显示面板的出光侧;The pixel unit includes an electron transport layer, a light-emitting layer and a hole transport layer; the electron transport layer includes a first hemispherical structure, the first hemispherical structure includes a curved surface area and a flat surface area, and the flat surface area faces the light-emitting side of the display panel;
在垂直于所述平面区域的方向上,所述曲面区域中与所述平面区域的距离大于或者等于距离阈值的区域为预设区域,所述发光层包覆所述预设区域,所述空穴传输层位于所述发光层远离所述预设区域的一侧。In the direction perpendicular to the planar area, an area in the curved area whose distance from the planar area is greater than or equal to a distance threshold is a preset area, the light-emitting layer covers the preset area, and the hole transport layer is located on a side of the light-emitting layer away from the preset area.
在一些实施例中,所述显示面板还包括:In some embodiments, the display panel further comprises:
电子阻挡层,位于所述空穴传输层和所述发光层之间;An electron blocking layer, located between the hole transport layer and the light emitting layer;
所述电子阻挡层包覆所述发光层远离所述预设区域的一侧,所述空穴传输层包覆所述电子阻挡层远离所述发光层的一侧。The electron blocking layer covers a side of the light-emitting layer away from the preset area, and the hole transport layer covers a side of the electron blocking layer away from the light-emitting layer.
在一些实施例中,所述像素单元的阳极包覆所述空穴传输层远离所述发光层的一侧;In some embodiments, the anode of the pixel unit covers a side of the hole transport layer away from the light-emitting layer;
在一些实施例中,所述保护层上设置有第一通孔,所述第一通孔内填充第一导电结构;In some embodiments, a first through hole is provided on the protection layer, and a first conductive structure is filled in the first through hole;
所述像素单元的阳极通过所述第一导电结构与所述驱动基板的键合电极电连接。The anode of the pixel unit is electrically connected to the bonding electrode of the driving substrate through the first conductive structure.
在一些实施例中,所述电子传输层还包括位于所述第一半球结构上方的第二半球结构;In some embodiments, the electron transport layer further includes a second hemispherical structure located above the first hemispherical structure;
所述第二半球结构的平面区域与所述第一半球结构的平面区域相对。The plane area of the second hemispherical structure is opposite to the plane area of the first hemispherical structure.
在一些实施例中,所述显示面板还包括:互联阴极;In some embodiments, the display panel further comprises: interconnected cathodes;
所述第二半球结构的平面区域且远离所述第一半球结构的边缘位置与所述互联阴极电连接。A planar region of the second hemispherical structure and an edge position away from the first hemispherical structure are electrically connected to the interconnected cathode.
在一些实施例中,所述互联阴极包括公共区域;所述保护层上设置有第二通孔,所述第二通孔内填充第二导电结构;In some embodiments, the interconnected cathodes include a common area; a second through hole is provided on the protective layer, and a second conductive structure is filled in the second through hole;
所述公共区域通过所述第二导电结构与所述驱动基板的键合电极电连接。The common area is electrically connected to the bonding electrode of the driving substrate through the second conductive structure.
第二方面,本公开提供了一种显示面板的制备方法,包括:In a second aspect, the present disclosure provides a method for preparing a display panel, comprising:
制备显示面板;所述显示面板包括:驱动基板、保护层以及像素单元,所述像素单元通过所述保护层键合在所述驱动基板上;Prepare a display panel; the display panel comprises: a driving substrate, a protective layer and a pixel unit, and the pixel unit is bonded to the driving substrate through the protective layer;
所述像素单元包括电子传输层、发光层和空穴传输层;所述电子传输层包括第一半球结构,所述第一半球结构包括曲面区域和平面区域,所述平面区域朝向所述显示面板的出光侧;The pixel unit includes an electron transport layer, a light-emitting layer and a hole transport layer; the electron transport layer includes a first hemispherical structure, the first hemispherical structure includes a curved surface area and a flat surface area, and the flat surface area faces the light-emitting side of the display panel;
在垂直于所述平面区域的方向上,所述曲面区域中与所述平面区域的距离大于或者等于距离阈值的区域为预设区域,所述发光层包覆所述预设区域,所述空穴传输层位于所述发光层远离所述预设区域的一侧。In the direction perpendicular to the planar area, an area in the curved area whose distance from the planar area is greater than or equal to a distance threshold is a preset area, the light-emitting layer covers the preset area, and the hole transport layer is located on a side of the light-emitting layer away from the preset area.
在一些实施例中,所述制备显示面板,包括:In some embodiments, the step of preparing a display panel includes:
在衬底的一侧依次层叠缓冲层和电子传输预制层,刻蚀所述电子传输预制层远离所述衬底的一侧,并在所述电子传输预制层上形成多个所述第一半球结构;stacking a buffer layer and an electron transport prefabricated layer in sequence on one side of a substrate, etching a side of the electron transport prefabricated layer away from the substrate, and forming a plurality of the first hemispherical structures on the electron transport prefabricated layer;
在所述电子传输预制层形成有所述第一半球结构的一侧覆盖所述保护层,去除部分所述保护层,保留相邻所述第一半球结构之间的所述电子传输预制层上的所述保护层;Covering the protective layer on the side of the electron transport prefabricated layer where the first hemispherical structure is formed, removing part of the protective layer, and retaining the protective layer on the electron transport prefabricated layer between adjacent first hemispherical structures;
在所述第一半球结构的表面依次形成所述发光层和所述空穴传输层;Sequentially forming the light-emitting layer and the hole transport layer on the surface of the first hemispherical structure;
刻蚀部分所述保护层形成阴极图形化区域;Etching a portion of the protective layer to form a cathode patterned area;
向所述阴极图形化区域沉积金属以形成互联阴极,并在所述空穴传输层上沉积金属以形成所述像素单元的阳极;其中,所述互联阴极包括公共区域;Depositing metal on the cathode patterned area to form an interconnected cathode, and depositing metal on the hole transport layer to form an anode of the pixel unit; wherein the interconnected cathode includes a common area;
向所述阳极所在侧整面覆盖所述保护层,并在所述保护层上形成贯穿至所述阳极的第一通孔以及贯穿至所述公共区域的第二通孔,以及向所述第一通孔和所述第二通孔内填充金属分别形成第一导电结构和第二导电结构;The protective layer is entirely covered on the side where the anode is located, and a first through hole penetrating to the anode and a second through hole penetrating to the common area are formed on the protective layer, and metal is filled into the first through hole and the second through hole to form a first conductive structure and a second conductive structure respectively;
将所述保护层形成有所述第一导电结构和所述第二导电结构所在侧与所述驱动基板键合,并剥离所述衬底和所述缓冲层;Bonding the side of the protective layer where the first conductive structure and the second conductive structure are formed to the driving substrate, and peeling off the substrate and the buffer layer;
刻蚀所述电子传输预制层远离所述驱动基板的一侧,并形成第二半球结构,所述第二半球结构覆盖所述第一半球结构,所述第二半球结构与所述第一半球结构形成所述电子传输层。The side of the electron transport prefabricated layer away from the driving substrate is etched to form a second hemispherical structure, wherein the second hemispherical structure covers the first hemispherical structure, and the second hemispherical structure and the first hemispherical structure form the electron transport layer.
在一些实施例中,所述制备显示面板包括:In some embodiments, preparing the display panel includes:
在衬底的一侧依次层叠缓冲层和电子传输预制层,刻蚀所述电子传输预制层远离所述衬底的一侧,并在所述电子传输预制层上形成多个所述第一半球结构;stacking a buffer layer and an electron transport prefabricated layer in sequence on one side of a substrate, etching a side of the electron transport prefabricated layer away from the substrate, and forming a plurality of the first hemispherical structures on the electron transport prefabricated layer;
在所述电子传输预制层形成有所述第一半球结构的一侧覆盖所述保护层,去除部分所述保护层,保留相邻所述第一半球结构之间的所述电子传输预制层上的所述保护层;Covering the protective layer on the side of the electron transport prefabricated layer where the first hemispherical structure is formed, removing part of the protective layer, and retaining the protective layer on the electron transport prefabricated layer between adjacent first hemispherical structures;
在所述第一半球结构的表面依次形成所述发光层、电子阻挡层和所述空穴传输层;Sequentially forming the light-emitting layer, the electron blocking layer and the hole transport layer on the surface of the first hemispherical structure;
刻蚀部分所述保护层形成阴极图形化区域;Etching a portion of the protective layer to form a cathode patterned area;
向所述阴极图形化区域沉积金属以形成互联阴极,并在所述空穴传输层上沉积金属以形成所述像素单元的阳极;其中,所述互联阴极包括公共区域;Depositing metal on the cathode patterned area to form an interconnected cathode, and depositing metal on the hole transport layer to form an anode of the pixel unit; wherein the interconnected cathode includes a common area;
向所述阳极所在侧整面覆盖所述保护层,并在所述保护层上形成贯穿至所述阳极的第一通孔以及贯穿至所述公共区域的第二通孔,以及向所述第一通孔和所述第二通孔内填充金属分别形成第一导电结构和第二导电结构;The protective layer is entirely covered on the side where the anode is located, and a first through hole penetrating to the anode and a second through hole penetrating to the common area are formed on the protective layer, and metal is filled into the first through hole and the second through hole to form a first conductive structure and a second conductive structure respectively;
将所述保护层形成有所述第一导电结构和所述第二导电结构所在侧与所述驱动基板键合,并剥离所述衬底和所述缓冲层;Bonding the side of the protective layer where the first conductive structure and the second conductive structure are formed to the driving substrate, and peeling off the substrate and the buffer layer;
刻蚀所述电子传输预制层远离所述驱动基板的一侧,并形成第二半球结构,所述第二半球结构覆盖所述第一半球结构,所述第二半球结构与所述第一半球结构形成所述电子传输层。The side of the electron transport prefabricated layer away from the driving substrate is etched to form a second hemispherical structure, wherein the second hemispherical structure covers the first hemispherical structure, and the second hemispherical structure and the first hemispherical structure form the electron transport layer.
本公开实施例提供的显示面板包括:驱动基板、保护层以及像素单元,像素单元通过保护层键合在驱动基板上;像素单元包括电子传输层、发光层和空穴传输层;电子传输层包括第一半球结构,第一半球结构包括曲面区域和平面区域,平面区域朝向显示面板的出光侧;在垂直于平面区域的方向上,曲面区域中与平面区域的距离大于或者等于距离阈值的区域为预设区域,发光层包覆预设区域,空穴传输层位于发光层远离预设区域的一侧。由此,在第一半球结构的预设区域设置包覆的发光层,可实现将发光层设置为半球空心结构。半球空心结构的内表面即与第一半球结构的接触面为电子注入面,半球空心结构的外表面即内表面的相对面为空穴注入面。由于半球空心结构的外表面面积大于内表面面积,相当于增大了发光层的电子注入面积,以及减小了发光层的空穴注入面积,有利于向发光层注入空穴,从而可改善由于电子迁移率远大于空穴迁移率导致发光层中电子-空穴密度不均,从而造成像素单元外量子效率下降的问题,有利于提高显示面板的显示效果。The display panel provided by the embodiment of the present disclosure includes: a driving substrate, a protective layer and a pixel unit, the pixel unit is bonded to the driving substrate through the protective layer; the pixel unit includes an electron transport layer, a light-emitting layer and a hole transport layer; the electron transport layer includes a first hemispherical structure, the first hemispherical structure includes a curved surface area and a plane area, the plane area faces the light-emitting side of the display panel; in the direction perpendicular to the plane area, the area in the curved surface area whose distance from the plane area is greater than or equal to the distance threshold is a preset area, the light-emitting layer covers the preset area, and the hole transport layer is located on the side of the light-emitting layer away from the preset area. Therefore, the light-emitting layer is provided in the preset area of the first hemispherical structure, so that the light-emitting layer can be provided as a hemispherical hollow structure. The inner surface of the hemispherical hollow structure, that is, the contact surface with the first hemispherical structure, is the electron injection surface, and the outer surface of the hemispherical hollow structure, that is, the opposite surface of the inner surface, is the hole injection surface. Since the outer surface area of the hemispherical hollow structure is larger than the inner surface area, it is equivalent to increasing the electron injection area of the light-emitting layer and reducing the hole injection area of the light-emitting layer, which is beneficial to injecting holes into the light-emitting layer, thereby improving the problem of uneven electron-hole density in the light-emitting layer due to the electron mobility being much greater than the hole mobility, thereby causing a decrease in the external quantum efficiency of the pixel unit, which is beneficial to improving the display effect of the display panel.
附图说明BRIEF DESCRIPTION OF THE DRAWINGS
此处的附图被并入说明书中并构成本说明书的一部分,示出了符合本公开的实施例,并与说明书一起用于解释本公开的原理。The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments consistent with the present disclosure and, together with the description, serve to explain the principles of the present disclosure.
为了更清楚地说明本公开实施例或现有技术中的技术方案,下面将对实施例或现有技术描述中所需要使用的附图作简单地介绍,显而易见地,对于本领域普通技术人员而言,在不付出创造性劳动性的前提下,还可以根据这些附图获得其他的附图。In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, for ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative labor.
图1为本公开实施例提供的一种显示面板的俯视图;FIG1 is a top view of a display panel provided by an embodiment of the present disclosure;
图2为本公开实施例提供的一种显示面板的膜层结构示意图;FIG2 is a schematic diagram of a film layer structure of a display panel provided in an embodiment of the present disclosure;
图3为本公开实施例提供的另一种显示面板的膜层结构示意图;FIG3 is a schematic diagram of a film layer structure of another display panel provided in an embodiment of the present disclosure;
图4为本公开实施例提供的一种显示面板的制备方法的具体流程示意图;FIG4 is a schematic diagram of a specific process of a method for manufacturing a display panel provided in an embodiment of the present disclosure;
图5为本公开实施例提供的一种显示面板的制备方法的具体工艺示意图;FIG5 is a schematic diagram of a specific process of a method for manufacturing a display panel provided by an embodiment of the present disclosure;
图6为本公开实施例提供的一种对应S504所示结构的俯视图;FIG6 is a top view of a structure corresponding to S504 provided in an embodiment of the present disclosure;
图7为本公开实施例提供的一种对应S505所示结构的俯视图;FIG7 is a top view of a structure corresponding to S505 provided in an embodiment of the present disclosure;
图8为本公开实施例提供的另一种显示面板的制备方法的具体工艺示意图。FIG. 8 is a schematic diagram of a specific process of another method for preparing a display panel provided in an embodiment of the present disclosure.
具体实施方式Detailed ways
为了能够更清楚地理解本公开的上述目的、特征和优点,下面将对本公开的方案进行进一步描述。需要说明的是,在不冲突的情况下,本公开的实施例及实施例中的特征可以相互组合。In order to more clearly understand the above-mentioned objectives, features and advantages of the present disclosure, the scheme of the present disclosure will be further described below. It should be noted that the embodiments of the present disclosure and the features in the embodiments can be combined with each other without conflict.
在下面的描述中阐述了很多具体细节以便于充分理解本公开,但本公开还可以采用其他不同于在此描述的方式来实施;显然,说明书中的实施例只是本公开的一部分实施例,而不是全部的实施例。In the following description, many specific details are set forth to facilitate a full understanding of the present disclosure, but the present disclosure may also be implemented in other ways different from those described herein; it is obvious that the embodiments in the specification are only part of the embodiments of the present disclosure, rather than all of the embodiments.
本公开实施例提供的显示面板,通过在第一半球结构的预设区域设置包覆的发光层,可实现将发光层设置为半球空心结构。半球空心结构的内表面即与第一半球结构的接触面为电子注入面,半球空心结构的外表面即内表面的相对面为空穴注入面。由于半球空心结构的外表面面积大于内表面面积,相当于增大了发光层的电子注入面积,以及减小了发光层的空穴注入面积,有利于向发光层注入空穴,从而可改善由于电子迁移率远大于空穴迁移率导致发光层中电子-空穴密度不均,从而造成像素单元外量子效率下降的问题,有利于提高显示面板的显示效果。The display panel provided by the embodiment of the present disclosure can realize setting the light-emitting layer as a hemispherical hollow structure by setting a coated light-emitting layer in a preset area of the first hemispherical structure. The inner surface of the hemispherical hollow structure, that is, the contact surface with the first hemispherical structure, is the electron injection surface, and the outer surface of the hemispherical hollow structure, that is, the opposite surface of the inner surface, is the hole injection surface. Since the outer surface area of the hemispherical hollow structure is larger than the inner surface area, it is equivalent to increasing the electron injection area of the light-emitting layer and reducing the hole injection area of the light-emitting layer, which is conducive to injecting holes into the light-emitting layer, thereby improving the problem of uneven electron-hole density in the light-emitting layer due to the electron mobility being much larger than the hole mobility, thereby causing the external quantum efficiency of the pixel unit to decrease, which is conducive to improving the display effect of the display panel.
下面结合附图,对本公开实施例提供的显示面板以及显示面板的制备方法进行示例性说明。The display panel and the method for manufacturing the display panel provided in the embodiments of the present disclosure are exemplarily described below with reference to the accompanying drawings.
图1为本公开实施例提供的一种显示面板的俯视图,图2为本公开实施例提供的一种显示面板的膜层结构示意图。其中,图2为沿图1中AA’得到的截面图。结合图1和图2所示,显示面板包括:驱动基板11、保护层21以及像素单元13,像素单元13通过保护层21键合在驱动基板11上;像素单元13包括电子传输层14、发光层15和空穴传输层16;电子传输层14包括第一半球结构141,第一半球结构141包括曲面区域和平面区域,平面区域朝向显示面板的出光侧;在垂直于平面区域的方向上,曲面区域中与平面区域的距离大于或者等于距离阈值的区域为预设区域;发光层15包覆预设区域,空穴传输层16位于发光层15远离预设区域的一侧。FIG1 is a top view of a display panel provided by an embodiment of the present disclosure, and FIG2 is a schematic diagram of a film structure of a display panel provided by an embodiment of the present disclosure. FIG2 is a cross-sectional view obtained along AA' in FIG1. As shown in FIG1 and FIG2, the display panel includes: a driving substrate 11, a protective layer 21 and a pixel unit 13, wherein the pixel unit 13 is bonded to the driving substrate 11 through the protective layer 21; the pixel unit 13 includes an electron transport layer 14, a light-emitting layer 15 and a hole transport layer 16; the electron transport layer 14 includes a first hemispherical structure 141, and the first hemispherical structure 141 includes a curved surface area and a plane area, and the plane area faces the light-emitting side of the display panel; in a direction perpendicular to the plane area, the area in the curved surface area whose distance from the plane area is greater than or equal to the distance threshold is a preset area; the light-emitting layer 15 covers the preset area, and the hole transport layer 16 is located on the side of the light-emitting layer 15 away from the preset area.
其中,电子传输层14包括第一半球结构141,第一半球结构141包括曲面区域和平面区域,曲面区域朝向驱动基板11,平面区域朝向显示面板的出光侧。为了便于理解,平面区域以灰色线条01示出,第一半球结构141的表面除平面区域以外均为曲面区域。The electron transport layer 14 includes a first hemispherical structure 141, and the first hemispherical structure 141 includes a curved surface area and a flat surface area, the curved surface area faces the drive substrate 11, and the flat surface area faces the light-emitting side of the display panel. For ease of understanding, the flat surface area is shown by a gray line 01, and the surface of the first hemispherical structure 141 is a curved surface area except for the flat surface area.
在垂直于平面区域的方向YY’上,预设区域为曲面区域中与平面区域的距离大于或者等于距离阈值的区域。为了便于理解,预设区域以灰色虚线框02示出。In the direction YY' perpendicular to the plane area, the preset area is an area in the curved area where the distance from the plane area is greater than or equal to the distance threshold. For ease of understanding, the preset area is shown in a gray dotted frame 02.
具体地,在第一半球结构141的预设区域设置包覆的发光层15,可实现将发光层15设置为半球空心结构。发光层15的内表面即与第一半球结构141的接触面为电子注入面,发光层15的外表面即内表面的相对面为空穴注入面。由于半球空心结构的发光层15的外表面面积大于内表面面积,相当于增大了发光层15的电子注入面积,以及减小了发光层15的空穴注入面积。Specifically, the light-emitting layer 15 is provided in a preset area of the first hemispherical structure 141, so that the light-emitting layer 15 can be provided as a hemispherical hollow structure. The inner surface of the light-emitting layer 15, i.e., the contact surface with the first hemispherical structure 141, is the electron injection surface, and the outer surface of the light-emitting layer 15, i.e., the surface opposite to the inner surface, is the hole injection surface. Since the outer surface area of the light-emitting layer 15 of the hemispherical hollow structure is larger than the inner surface area, it is equivalent to increasing the electron injection area of the light-emitting layer 15 and reducing the hole injection area of the light-emitting layer 15.
示例性地,如图2所示,将发光层15设置为半球空心结构,可增大发光层15与空穴传输层16的接触面积,以及减小发光层15与电子传输层14的接触面积。示例性地,如图3所示,将发光层15设置为半球空心结构,可增大发光层15与电子阻挡层18的接触面积,由于空穴传输层16中的空穴通过电子阻挡层18传输至发光层15,相当于增大了发光层15与空穴传输层16的接触面积,以及减小发光层15与电子传输层14的接触面积。Exemplarily, as shown in FIG2 , the light-emitting layer 15 is set to a hemispherical hollow structure, which can increase the contact area between the light-emitting layer 15 and the hole transport layer 16, and reduce the contact area between the light-emitting layer 15 and the electron transport layer 14. Exemplarily, as shown in FIG3 , the light-emitting layer 15 is set to a hemispherical hollow structure, which can increase the contact area between the light-emitting layer 15 and the electron blocking layer 18. Since the holes in the hole transport layer 16 are transferred to the light-emitting layer 15 through the electron blocking layer 18, it is equivalent to increasing the contact area between the light-emitting layer 15 and the hole transport layer 16, and reducing the contact area between the light-emitting layer 15 and the electron transport layer 14.
由此,有利于向发光层15注入空穴,从而可改善由于电子迁移率远大于空穴迁移率导致发光层15中电子-空穴密度不均,从而造成像素单元13外量子效率下降的问题,有利于提高显示面板的显示效果。This is beneficial for injecting holes into the light-emitting layer 15, thereby improving the problem of uneven electron-hole density in the light-emitting layer 15 due to the electron mobility being much greater than the hole mobility, thereby causing the external quantum efficiency of the pixel unit 13 to decrease, which is beneficial for improving the display effect of the display panel.
本公开实施例提供的显示面板包括:驱动基板、保护层以及像素单元,像素单元通过保护层键合在驱动基板上;像素单元包括电子传输层、发光层和空穴传输层;电子传输层包括第一半球结构,第一半球结构包括曲面区域和平面区域,平面区域朝向显示面板的出光侧;在垂直于平面区域的方向上,曲面区域中与平面区域的距离大于或者等于距离阈值的区域为预设区域,发光层包覆预设区域,空穴传输层包覆发光层远离预设区域的一侧。由此,在第一半球结构的预设区域设置包覆的发光层,可实现将发光层设置为半球空心结构。半球空心结构的内表面即与第一半球结构的接触面为电子注入面,半球空心结构的外表面即内表面的相对面为空穴注入面。由于半球空心结构的外表面面积大于内表面面积,相当于增大了发光层的电子注入面积,以及减小了发光层的空穴注入面积,有利于向发光层注入空穴,从而可改善由于电子迁移率远大于空穴迁移率导致发光层中电子-空穴密度不均,从而造成像素单元外量子效率下降的问题,有利于提高显示面板的显示效果。The display panel provided by the embodiment of the present disclosure includes: a driving substrate, a protective layer and a pixel unit, the pixel unit is bonded to the driving substrate through the protective layer; the pixel unit includes an electron transport layer, a light-emitting layer and a hole transport layer; the electron transport layer includes a first hemispherical structure, the first hemispherical structure includes a curved surface area and a plane area, the plane area faces the light-emitting side of the display panel; in the direction perpendicular to the plane area, the area in the curved surface area whose distance from the plane area is greater than or equal to the distance threshold is a preset area, the light-emitting layer covers the preset area, and the hole transport layer covers the side of the light-emitting layer away from the preset area. Thus, the light-emitting layer is provided in the preset area of the first hemispherical structure, so that the light-emitting layer can be provided as a hemispherical hollow structure. The inner surface of the hemispherical hollow structure, that is, the contact surface with the first hemispherical structure, is the electron injection surface, and the outer surface of the hemispherical hollow structure, that is, the opposite surface of the inner surface, is the hole injection surface. Since the outer surface area of the hemispherical hollow structure is larger than the inner surface area, it is equivalent to increasing the electron injection area of the light-emitting layer and reducing the hole injection area of the light-emitting layer, which is beneficial to injecting holes into the light-emitting layer, thereby improving the problem of uneven electron-hole density in the light-emitting layer due to the electron mobility being much greater than the hole mobility, thereby causing a decrease in the external quantum efficiency of the pixel unit, which is beneficial to improving the display effect of the display panel.
继续如图2所示,将发光层15设置为半球空心结构,相较于现有技术中将发光层设置为长条状,本公开有利于使发光层15中电子和空穴等载流子分布更均匀,从而有利于改善发光层15中的载流子发生俄歇复合的情况。Continuing with FIG. 2 , the light-emitting layer 15 is configured as a hemispherical hollow structure. Compared with the prior art in which the light-emitting layer is configured as a long strip, the present disclosure is beneficial for making the distribution of carriers such as electrons and holes in the light-emitting layer 15 more uniform, thereby facilitating improving the situation in which Auger recombination of carriers in the light-emitting layer 15 occurs.
在一些实施例中,图3为本公开实施例提供的另一种显示面板的膜层结构示意图。如图3所示,显示面板还包括:电子阻挡层18,位于空穴传输层16和发光层15之间;电子阻挡层18包覆发光层15远离预设区域的一侧,空穴传输层16包覆电子阻挡层18远离发光层15的一侧。In some embodiments, FIG3 is a schematic diagram of a film structure of another display panel provided in an embodiment of the present disclosure. As shown in FIG3, the display panel further includes: an electron blocking layer 18, located between the hole transport layer 16 and the light-emitting layer 15; the electron blocking layer 18 covers the side of the light-emitting layer 15 away from the preset area, and the hole transport layer 16 covers the side of the electron blocking layer 18 away from the light-emitting layer 15.
具体地,通过在空穴传输层16和发光层15之间设置电子阻挡层18,可阻挡注入至发光层15的电子直接穿过发光层15发生泄露。Specifically, by providing the electron blocking layer 18 between the hole transport layer 16 and the light emitting layer 15 , it is possible to prevent the electrons injected into the light emitting layer 15 from directly passing through the light emitting layer 15 and leaking.
在一些实施例中,参照图2或图3,像素单元13的阳极19包覆空穴传输层16远离发光层15的一侧。In some embodiments, referring to FIG. 2 or FIG. 3 , the anode 19 of the pixel unit 13 covers a side of the hole transport layer 16 away from the light emitting layer 15 .
具体地,通过设置像素单元13的阳极19包覆空穴传输层16远离发光层15的一侧,可提高阳极19与空穴传输层16的接触面积,有利于实现显示面板的快速导热和大电流注入。另外,提高阳极19与空穴传输层16的接触面积,有利于提高空穴向发光层15的注入密度,可改善发光层15中注入的电子-空穴密度不均的问题。Specifically, by setting the anode 19 of the pixel unit 13 to cover the side of the hole transport layer 16 away from the light-emitting layer 15, the contact area between the anode 19 and the hole transport layer 16 can be increased, which is conducive to achieving rapid heat conduction and large current injection of the display panel. In addition, increasing the contact area between the anode 19 and the hole transport layer 16 is conducive to increasing the injection density of holes into the light-emitting layer 15, which can improve the problem of uneven density of electrons and holes injected into the light-emitting layer 15.
继续参照图2或图3,通过设置像素单元的阳极19包覆空穴传输层16远离发光层的一侧,可实现将阳极19设置半球空心结构,半球空心结构的阳极19可启到准直和反射光的作用,可提高像素单元13的外量子效率,有利于提高显示面板的显示效果。Continuing with reference to FIG. 2 or FIG. 3 , by setting the anode 19 of the pixel unit to cover the side of the hole transport layer 16 away from the light-emitting layer, it is possible to set the anode 19 to a hemispherical hollow structure. The anode 19 with the hemispherical hollow structure can collimate and reflect light, thereby improving the external quantum efficiency of the pixel unit 13 and helping to improve the display effect of the display panel.
示例性地,如图2所示,发光层15发出的光入射至阳极19时,可在阳极19上发生反射至出光侧,有利于提高光线的出射效果。Exemplarily, as shown in FIG. 2 , when the light emitted by the light-emitting layer 15 is incident on the anode 19 , it may be reflected on the anode 19 to the light-emitting side, which is beneficial to improving the light emission effect.
在一些实施例中,参照图2或图3,保护层21上设置有第一通孔221,第一通孔221内填充第一导电结构231;像素单元13的阳极19通过第一导电结构231与驱动基板11的键合电极(图中未示出)电连接。由此,可实现驱动基板11向像素单元13输出驱动信号。In some embodiments, referring to FIG. 2 or FIG. 3 , a first through hole 221 is provided on the protective layer 21, and a first conductive structure 231 is filled in the first through hole 221; the anode 19 of the pixel unit 13 is electrically connected to a bonding electrode (not shown in the figure) of the driving substrate 11 through the first conductive structure 231. Thus, the driving substrate 11 can output a driving signal to the pixel unit 13.
在一些实施例中,参照图2或图3,电子传输层14还包括位于第一半球结构141上方的第二半球结构142;第二半球结构142的平面区域与第一半球结构141的平面区域相对。In some embodiments, referring to FIG. 2 or FIG. 3 , the electron transport layer 14 further includes a second hemispherical structure 142 located above the first hemispherical structure 141 ; a plane area of the second hemispherical structure 142 is opposite to a plane area of the first hemispherical structure 141 .
具体地,发光层15发出的光线经过第二半球结构142的表面出射时,可使出光面的入射角小于全发射的临界角,有利于提高光线提取率以及显示面板的可视角。Specifically, when the light emitted by the light emitting layer 15 is emitted through the surface of the second hemispherical structure 142 , the incident angle of the light emitting surface can be smaller than the critical angle of full emission, which is beneficial to improving the light extraction rate and the viewing angle of the display panel.
继续参照图2或图3,设置阳极19在驱动基板11上的投影位于第二半球结构142在驱动基板11上的投影内,可进一步提高显示面板的可视角。2 or 3 , setting the projection of the anode 19 on the driving substrate 11 to be within the projection of the second hemispherical structure 142 on the driving substrate 11 can further improve the viewing angle of the display panel.
在一些实施例中,参照图1-图3,显示面板还包括:互联阴极17;第二半球结构142的平面区域的边缘位置与互联阴极17电连接。具体地,设置第二半球结构142的平面区域的边缘位置与互联阴极17电连接,可增大电子在电子传输层14中的迁移路径,从而可降低发光层15中电子的注入率。1 to 3, the display panel further includes: an interconnected cathode 17; and an edge position of the planar region of the second hemispherical structure 142 is electrically connected to the interconnected cathode 17. Specifically, the edge position of the planar region of the second hemispherical structure 142 is electrically connected to the interconnected cathode 17, which can increase the migration path of electrons in the electron transport layer 14, thereby reducing the injection rate of electrons in the light-emitting layer 15.
示例性地,结合图1-图3,设置第二半球结构142为大半球,第一半球结构141为小半球,大半球的左侧与小半球连接,大半球的右侧边缘位置与互联阴极17连接。另外,在水平方向XX’上,互联阴极17与第一半球结构141之间设置有保护层21,电子无法直接穿越保护层21迁移至第一半球结构141,而是通过第二半球结构142迁移至第一半球结构141,从而增大电子在电子传输层14中的传递路径,从而改善因电子迁移率过快带来电子泄露的问题。Exemplarily, in combination with FIG. 1 to FIG. 3 , the second hemispherical structure 142 is set as a large hemisphere, the first hemispherical structure 141 is set as a small hemisphere, the left side of the large hemisphere is connected to the small hemisphere, and the right edge of the large hemisphere is connected to the interconnected cathode 17. In addition, in the horizontal direction XX', a protective layer 21 is provided between the interconnected cathode 17 and the first hemispherical structure 141, and the electrons cannot directly pass through the protective layer 21 to migrate to the first hemispherical structure 141, but migrate to the first hemispherical structure 141 through the second hemispherical structure 142, thereby increasing the transfer path of the electrons in the electron transport layer 14, thereby improving the problem of electron leakage caused by the excessively fast electron mobility.
在一些实施例中,参照图1-3,互联阴极包括公共区域20;保护层21上设置有第二通孔222,第二通孔222内填充第二导电结构232;In some embodiments, referring to FIGS. 1-3 , the interconnected cathode includes a common region 20 ; a second through hole 222 is provided on the protective layer 21 , and a second conductive structure 232 is filled in the second through hole 222 ;
公共区域20通过第二导电结构232与驱动基板11的键合电极(图中未示出)电连接。由此,可实现驱动基板11向像素单元13输出驱动信号。The common region 20 is electrically connected to the bonding electrode (not shown in the figure) of the driving substrate 11 through the second conductive structure 232 , so that the driving substrate 11 can output a driving signal to the pixel unit 13 .
在上述实施例的基础上,本公开实施例提供了一种显示面板的制备方法。显示面板的制备方法包括:制备显示面板。Based on the above embodiments, the present disclosure provides a method for preparing a display panel. The method for preparing a display panel includes: preparing a display panel.
具体地,如图1和图2所示,显示面板包括:驱动基板11、保护层21以及像素单元13,像素单元13通过保护层21键合在驱动基板11上;像素单元13包括电子传输层14、发光层15和空穴传输层16;电子传输层14包括第一半球结构141,第一半球结构141包括曲面区域和平面区域,平面区域朝向显示面板的出光侧;在垂直于平面区域的方向上,曲面区域中与平面区域的距离大于或者等于距离阈值的区域为预设区域,发光层15包覆预设区域,空穴传输层16位于发光层15远离预设区域的一侧。Specifically, as shown in Figures 1 and 2, the display panel includes: a driving substrate 11, a protective layer 21 and a pixel unit 13, the pixel unit 13 is bonded to the driving substrate 11 through the protective layer 21; the pixel unit 13 includes an electron transport layer 14, a light-emitting layer 15 and a hole transport layer 16; the electron transport layer 14 includes a first hemispherical structure 141, the first hemispherical structure 141 includes a curved surface area and a plane area, and the plane area faces the light-emitting side of the display panel; in a direction perpendicular to the plane area, an area in the curved surface area whose distance from the plane area is greater than or equal to a distance threshold is a preset area, the light-emitting layer 15 covers the preset area, and the hole transport layer 16 is located on the side of the light-emitting layer 15 away from the preset area.
由此,在第一半球结构的预设区域设置包覆的发光层,可实现将发光层设置为半球空心结构。半球空心结构的内表面即与第一半球结构的接触面为电子注入面,半球空心结构的外表面即内表面的相对面为空穴注入面。由于半球空心结构的外表面面积大于内表面面积,相当于增大了发光层的电子注入面积,以及减小了发光层的空穴注入面积,有利于向发光层注入空穴,从而可改善由于电子迁移率远大于空穴迁移率导致发光层中电子-空穴密度不均,从而造成像素单元外量子效率下降的问题,有利于提高显示面板的显示效果。Thus, the light-emitting layer is provided in the preset area of the first hemispherical structure, so that the light-emitting layer can be provided as a hemispherical hollow structure. The inner surface of the hemispherical hollow structure, i.e., the contact surface with the first hemispherical structure, is the electron injection surface, and the outer surface of the hemispherical hollow structure, i.e., the surface opposite to the inner surface, is the hole injection surface. Since the outer surface area of the hemispherical hollow structure is larger than the inner surface area, it is equivalent to increasing the electron injection area of the light-emitting layer and reducing the hole injection area of the light-emitting layer, which is conducive to injecting holes into the light-emitting layer, thereby improving the problem of uneven electron-hole density in the light-emitting layer due to the electron mobility being much larger than the hole mobility, thereby causing the external quantum efficiency of the pixel unit to decrease, and is conducive to improving the display effect of the display panel.
在一些实施例中,图4为本公开实施例提供的一种显示面板的制备方法的具体流程示意图。如图4所示,显示面板的制备方法具体包括如下步骤:In some embodiments, FIG4 is a schematic diagram of a specific process of a method for preparing a display panel provided by an embodiment of the present disclosure. As shown in FIG4, the method for preparing a display panel specifically includes the following steps:
S401、在衬底的一侧依次层叠缓冲层和电子传输预制层,刻蚀电子传输预制层远离衬底的一侧,并在电子传输预制层上形成多个第一半球结构。S401 , stacking a buffer layer and an electron transport prefabricated layer in sequence on one side of a substrate, etching a side of the electron transport prefabricated layer away from the substrate, and forming a plurality of first hemispherical structures on the electron transport prefabricated layer.
具体地,图5为本公开实施例提供的一种显示面板的制备方法的具体工艺示意图。在本步骤中,如图5的S501所示,在衬底24的一侧依次层叠缓冲层25和电子传输预制26,刻蚀电子传输预制层26远离衬底24的一侧,并在电子传输预制层26上形成多个第一半球结构141。Specifically, FIG5 is a schematic diagram of a specific process of a method for manufacturing a display panel provided by an embodiment of the present disclosure. In this step, as shown in S501 of FIG5 , a buffer layer 25 and an electron transport prefabricated layer 26 are sequentially stacked on one side of a substrate 24, a side of the electron transport prefabricated layer 26 away from the substrate 24 is etched, and a plurality of first hemispherical structures 141 are formed on the electron transport prefabricated layer 26.
示例性地,可结合光刻以及湿法刻蚀工艺制备出第一半球结构141。其中,第一半球结构141的直径例如可为1um-2um。For example, the first hemispherical structure 141 may be manufactured by combining photolithography and wet etching processes, wherein the diameter of the first hemispherical structure 141 may be, for example, 1 um to 2 um.
S402、在电子传输预制层形成有第一半球结构的一侧覆盖保护层,去除部分保护层,保留相邻第一半球结构之间的电子传输预制层上的保护层。S402, covering the side of the electron transport prefabricated layer where the first hemispherical structure is formed with a protective layer, removing part of the protective layer, and retaining the protective layer on the electron transport prefabricated layer between adjacent first hemispherical structures.
在本步骤中,如图5的S502所示,在电子传输预制层26形成有多个第一半球结构141的一侧表面沉积一层保护层21,并通过例如光刻工艺将第一半球结构141表面的保护层21去除,且保留相邻第一半球结构141之间的电子传输预制层26上的保护层21。其中,保护层21例如可为氧化硅,保护层21的厚度可为100nm-200nm。In this step, as shown in S502 of FIG5 , a protective layer 21 is deposited on the surface of one side of the electron transport prefabricated layer 26 where a plurality of first hemispherical structures 141 are formed, and the protective layer 21 on the surface of the first hemispherical structures 141 is removed by, for example, a photolithography process, and the protective layer 21 on the electron transport prefabricated layer 26 between adjacent first hemispherical structures 141 is retained. The protective layer 21 may be, for example, silicon oxide, and the thickness of the protective layer 21 may be 100 nm-200 nm.
S403、在第一半球结构的表面依次形成发光层和空穴传输层。S403 , forming a light-emitting layer and a hole transport layer in sequence on the surface of the first hemispherical structure.
在本步骤中,如图5的S503所示,在第一半球结构141的表面外延生长发光层15,之后在发光层15的表面外延生长空穴传输层16。In this step, as shown in S503 of FIG. 5 , the light emitting layer 15 is epitaxially grown on the surface of the first hemispherical structure 141 , and then the hole transport layer 16 is epitaxially grown on the surface of the light emitting layer 15 .
由于相邻第一半球结构141之间的电子传输预制层26上设置有保护层21,发光层15和空穴传输层16只能在第一半球结构141的表面依次生长,实现了选取生长,可直接实现像素单元的分割,无需用刻蚀工艺实现独立的像素单元,可以有效避免刻蚀损伤。Since the protective layer 21 is provided on the electron transport prefabricated layer 26 between adjacent first hemispherical structures 141, the light-emitting layer 15 and the hole transport layer 16 can only grow sequentially on the surface of the first hemispherical structure 141, thereby realizing selective growth and directly realizing the segmentation of pixel units. There is no need to use etching process to realize independent pixel units, thus effectively avoiding etching damage.
另外,通过上述选取生长的发光层15和空穴传输层16具有较低的缺陷及极化电场,能够降低注入电流的缺陷淬灭及量子限制斯塔克效应(Quantum Confined StarkEffect,QCSE),有利于提高像素单元的外量子效率。In addition, the light-emitting layer 15 and the hole transport layer 16 grown by the above selection have lower defects and polarization electric fields, which can reduce defect quenching and quantum confined Stark effect (QCSE) of the injected current, and are beneficial to improving the external quantum efficiency of the pixel unit.
S404、刻蚀部分保护层形成阴极图形化区域。S404, etching a portion of the protective layer to form a cathode patterning area.
示例性地,图6为本公开实施例提供的一种对应S504所示结构的俯视图。在本步骤中,结合图5的S504和图6,选择性刻蚀保护层21,形成阴极图形化区域017。For example, Fig. 6 is a top view of a structure corresponding to S504 provided in an embodiment of the present disclosure. In this step, in combination with S504 of Fig. 5 and Fig. 6 , the protective layer 21 is selectively etched to form a cathode patterned region 017 .
S405、向阴极图形化区域沉积金属以形成互联阴极,并在空穴传输层上沉积金属以形成像素单元的阳极;其中,互联阴极包括公共区域。S405, depositing metal on the cathode patterning area to form an interconnected cathode, and depositing metal on the hole transport layer to form an anode of the pixel unit; wherein the interconnected cathode includes a common area.
示例性地,图7为本公开实施例的提供一种对应S505所示结构的俯视图。具体地,在本步骤中,结合图5的S505、图6和图7所示,向阴极图形化区域017沉积金属以形成互联阴极17,并在空穴传输层上16沉积金属以形成像素单元的阳极19。其中,互联阴极17包括公共区域20。Exemplarily, FIG7 is a top view of a structure corresponding to S505 of an embodiment of the present disclosure. Specifically, in this step, in combination with S505 of FIG5 , FIG6 and FIG7 , metal is deposited on the cathode patterning area 017 to form an interconnected cathode 17, and metal is deposited on the hole transport layer 16 to form an anode 19 of the pixel unit. The interconnected cathode 17 includes a common area 20.
S406、向阳极所在侧整面覆盖保护层,并在保护层上形成贯穿至阳极的第一通孔以及贯穿至公共区域的第二通孔,以及向第一通孔和第二通孔内填充金属分别形成第一导电结构和第二导电结构。S406, covering the entire surface of the anode side with a protective layer, forming a first through hole penetrating to the anode and a second through hole penetrating to the common area on the protective layer, and filling the first through hole and the second through hole with metal to form a first conductive structure and a second conductive structure respectively.
具体地,在本步骤中,如图5的S506所示,向阳极所在侧整面覆盖保护层21对其进行平坦化,并在保护层21上形成贯穿至阳极19的第一通孔221以及贯穿至公共区域20的第二通孔222;向第一通孔221和第二通孔222内填充金属例如金属铜或钨分别形成第一导电结构231和第二导电结构232。Specifically, in this step, as shown in S506 of Figure 5, the protective layer 21 is entirely covered on the side where the anode is located to flatten it, and a first through hole 221 penetrating to the anode 19 and a second through hole 222 penetrating to the common area 20 are formed on the protective layer 21; metals such as copper or tungsten are filled into the first through hole 221 and the second through hole 222 to form a first conductive structure 231 and a second conductive structure 232, respectively.
S407、将保护层形成有第一导电结构和第二导电结构所在侧与驱动基板键合,并剥离衬底和缓冲层。S407 , bonding the side of the protective layer where the first conductive structure and the second conductive structure are formed to the driving substrate, and peeling off the substrate and the buffer layer.
具体地,在本步骤中,如图5的S507所示,将保护层21与驱动基板11键合,并剥离衬底24和缓冲层25。Specifically, in this step, as shown in S507 of FIG. 5 , the protective layer 21 is bonded to the driving substrate 11 , and the substrate 24 and the buffer layer 25 are peeled off.
S408、刻蚀电子传输预制层远离驱动基板的一侧,并形成第二半球结构,第二半球结构覆盖第一半球结构,第二半球结构与第一半球结构形成电子传输层。S408 , etching the side of the electron transport prefabricated layer away from the driving substrate to form a second hemispherical structure, the second hemispherical structure covers the first hemispherical structure, and the second hemispherical structure and the first hemispherical structure form an electron transport layer.
具体地,在本步骤中,如图5的S508所示,刻蚀S507所示的电子传输预制层26,对应第一半球结构141制备形成第二半球结构142,第一半球结构141和第二半球结构142形成电子传输层14。Specifically, in this step, as shown in S508 of FIG. 5 , the electron transport prefabricated layer 26 shown in S507 is etched to form a second hemispherical structure 142 corresponding to the first hemispherical structure 141 , and the first hemispherical structure 141 and the second hemispherical structure 142 form the electron transport layer 14 .
示例性地,图8为本公开实施例提供的另一种显示面板的制备方法的具体工艺示意图。For example, FIG8 is a schematic diagram of a specific process of another method for preparing a display panel provided in an embodiment of the present disclosure.
如图8所示,S801中,在衬底24的一侧依次层叠缓冲层25和电子传输预制层26,刻蚀电子传输预制层26远离衬底24的一侧,并在电子传输预制层26上形成多个第一半球结构141。As shown in FIG. 8 , in S801 , a buffer layer 25 and an electron transport prefabricated layer 26 are sequentially stacked on one side of a substrate 24 , a side of the electron transport prefabricated layer 26 away from the substrate 24 is etched, and a plurality of first hemispherical structures 141 are formed on the electron transport prefabricated layer 26 .
S802中,在电子传输预制层26形成有第一半球结构141的一侧覆盖保护层21,去除部分保护层21,保留相邻第一半球结构141之间的电子传输预制层26上的保护层21。In S802 , the protective layer 21 is covered on one side of the electron transport prefabricated layer 26 where the first hemispherical structure 141 is formed, and a portion of the protective layer 21 is removed, and the protective layer 21 on the electron transport prefabricated layer 26 between adjacent first hemispherical structures 141 is retained.
S803中,在第一半球结构141的表面依次形成发光层15、电子阻挡层18和空穴传输层16。In S803 , a light emitting layer 15 , an electron blocking layer 18 and a hole transport layer 16 are sequentially formed on the surface of the first hemispherical structure 141 .
S804中,刻蚀部分保护层21形成阴极图形化区域017。In S804 , a portion of the protection layer 21 is etched to form a cathode patterned region 017 .
S805中,向阴极图形化区域017沉积金属以形成互联阴极17,并在空穴传输层16上沉积金属以形成像素单元的阳极19;其中,互联阴极17包括公共区域20。In S805 , metal is deposited on the cathode patterning region 017 to form an interconnected cathode 17 , and metal is deposited on the hole transport layer 16 to form an anode 19 of the pixel unit; wherein the interconnected cathode 17 includes a common region 20 .
S806中,向阳极19所在侧整面覆盖保护层21,并在保护层21上形成贯穿至阳极19的第一通孔221以及贯穿至公共区域20的第二通孔222,以及向第一通孔221和第二通孔222内填充金属分别形成第一导电结构231和第二导电结构232。In S806, the protective layer 21 is entirely covered on the side where the anode 19 is located, and a first through hole 221 penetrating to the anode 19 and a second through hole 222 penetrating to the common area 20 are formed on the protective layer 21, and metal is filled into the first through hole 221 and the second through hole 222 to form a first conductive structure 231 and a second conductive structure 232, respectively.
S807中,将保护层21形成有第一导电结构231和第二导电结构232所在侧与驱动基板11键合,并剥离衬底24和缓冲层25。In S807 , the side of the protection layer 21 where the first conductive structure 231 and the second conductive structure 232 are formed is bonded to the driving substrate 11 , and the substrate 24 and the buffer layer 25 are peeled off.
S807中,刻蚀电子传输预制层26远离驱动基板11的一侧,并形成第二半球结构142,第二半球结构142覆盖第一半球结构141,第二半球结构142与第一半球结构141形成电子传输层14。In S807 , the side of the electron transport prefabricated layer 26 away from the driving substrate 11 is etched to form a second hemispherical structure 142 . The second hemispherical structure 142 covers the first hemispherical structure 141 . The second hemispherical structure 142 and the first hemispherical structure 141 form an electron transport layer 14 .
图5与图8的区别在于:图5中S803,在第一半球结构的表面依次形成发光层和空穴传输层,对应图5所示的步骤可形成图2所示的显示面板;图6中S803,在第一半球结构的表面依次形成发光层、电子阻挡层和空穴传输层,对应图8所示的步骤可形成图3所示的显示面板。The difference between Figure 5 and Figure 8 is that: in Figure 5 S803, a light-emitting layer and a hole transport layer are formed in sequence on the surface of the first hemispherical structure, and the display panel shown in Figure 2 can be formed corresponding to the steps shown in Figure 5; in Figure 6 S803, a light-emitting layer, an electron blocking layer and a hole transport layer are formed in sequence on the surface of the first hemispherical structure, and the display panel shown in Figure 3 can be formed corresponding to the steps shown in Figure 8.
在上述实施例的基础上,本公开还提供了一种显示装置,包括如上述实施例所述的显示面板,因此具有相同或相似的有益效果,在此不赘述。On the basis of the above embodiments, the present disclosure further provides a display device, including the display panel as described in the above embodiments, and thus has the same or similar beneficial effects, which will not be described in detail herein.
需要说明的是,在本文中,诸如“第一”和“第二”等之类的关系术语仅仅用来将一个实体或者操作与另一个实体或操作区分开来,而不一定要求或者暗示这些实体或操作之间存在任何这种实际的关系或者顺序。而且,术语“包括”、“包含”或者其任何其他变体意在涵盖非排他性的包含,从而使得包括一系列要素的过程、方法、物品或者设备不仅包括那些要素,而且还包括没有明确列出的其他要素,或者是还包括为这种过程、方法、物品或者设备所固有的要素。在没有更多限制的情况下,由语句“包括一个……”限定的要素,并不排除在包括要素的过程、方法、物品或者设备中还存在另外的相同要素。It should be noted that, in this article, relational terms such as "first" and "second" are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device. In the absence of further restrictions, the elements defined by the sentence "comprise a ..." do not exclude the existence of other identical elements in the process, method, article or device including the elements.
以上仅是本公开的具体实施方式,使本领域技术人员能够理解或实现本公开。对这些实施例的多种修改对本领域的技术人员来说将是显而易见的,本文中所定义的一般原理可以在不脱离本公开的精神或范围的情况下,在其它实施例中实现。因此,本公开将不会被限制于本文的这些实施例,而是要符合与本文所公开的原理和新颖特点相一致的最宽的范围。The above are only specific embodiments of the present disclosure, so that those skilled in the art can understand or implement the present disclosure. Various modifications to these embodiments will be apparent to those skilled in the art, and the general principles defined herein can be implemented in other embodiments without departing from the spirit or scope of the present disclosure. Therefore, the present disclosure will not be limited to these embodiments herein, but will conform to the widest scope consistent with the principles and novel features disclosed herein.
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