CN118149717B - Integrated multi-point film thickness measurement system and method - Google Patents
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- 239000010408 film Substances 0.000 description 77
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- 238000004556 laser interferometry Methods 0.000 description 3
- 239000010409 thin film Substances 0.000 description 3
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- 101100012902 Saccharomyces cerevisiae (strain ATCC 204508 / S288c) FIG2 gene Proteins 0.000 description 2
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- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
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Abstract
本发明提供了一种集成式多点位膜厚测量系统及方法，属于膜厚测量技术领域，其系统包括：数据处理模块，用于发送控制指令，并接收传输数据，基于传输数据得到待测样品膜厚，同步电机控制模块，与数据处理模块通信连接，用于基于控制指令控制光纤复用器和探头单元同步运行，得到多点位测量的传输数据，并将多点位测量的传输数据发送至数据处理模块，光谱成像模块，与数据处理模块通信连接，用于采集待测样本表面形成的干涉光，基于干涉光生成二维图像的传输数据，并将二维图像的传输数据发送至数据处理模块。本发明提高了对大尺寸物体测量和非均匀薄膜厚度分布测量的测量精度。
The present invention provides an integrated multi-point film thickness measurement system and method, belonging to the field of film thickness measurement technology, and the system includes: a data processing module, which is used to send control instructions and receive transmission data, and obtain the film thickness of the sample to be measured based on the transmission data; a synchronous motor control module, which is connected to the data processing module in communication, and is used to control the fiber optic multiplexer and the probe unit to run synchronously based on the control instructions, obtain the transmission data of the multi-point measurement, and send the transmission data of the multi-point measurement to the data processing module; a spectral imaging module, which is connected to the data processing module in communication, and is used to collect the interference light formed on the surface of the sample to be measured, and generate the transmission data of the two-dimensional image based on the interference light, and send the transmission data of the two-dimensional image to the data processing module. The present invention improves the measurement accuracy of large-sized object measurement and non-uniform film thickness distribution measurement.
Description
技术领域Technical Field
本发明涉及膜厚测量技术领域，具体涉及一种集成式多点位膜厚测量系统及方法。The present invention relates to the technical field of film thickness measurement, and in particular to an integrated multi-point film thickness measurement system and method.
背景技术Background Art
在光学、电子、纳米科学和材料科学等领域中，对于薄膜的精确测量是非常重要的。薄膜的厚度分布信息对于确保产品质量、研究材料特性以及优化工艺参数都具有关键意义。在传统的薄膜厚度测量方法中，单点测量技术被广泛应用，其中包括激光干涉测量和白光干涉测量。然而，这些方法在测量大尺寸物体或高精度测量方面存在一定的局限性。In the fields of optics, electronics, nanoscience and materials science, accurate measurement of thin films is very important. The thickness distribution information of thin films is critical to ensure product quality, study material properties and optimize process parameters. Among the traditional thin film thickness measurement methods, single-point measurement techniques are widely used, including laser interferometry and white light interferometry. However, these methods have certain limitations in measuring large objects or high-precision measurements.
激光干涉测量方法由于相位包裹问题，当薄膜厚度超过一定范围时，无法准确测量薄膜厚度。这限制了激光干涉测量在大尺寸物体上的应用。白光干涉测量方法的解算误差会随着被测样品表面高度的增加而增大，无法满足高精度要求。传统的膜厚测量方法对于具有复杂表面形貌的样品也存在一定的局限性。Due to the phase wrapping problem, the laser interferometry method cannot accurately measure the film thickness when the film thickness exceeds a certain range. This limits the application of laser interferometry on large-scale objects. The solution error of the white light interferometry method will increase with the increase of the surface height of the measured sample, and it cannot meet the high-precision requirements. The traditional film thickness measurement method also has certain limitations for samples with complex surface morphology.
因此，现有技术中对大尺寸物体测量和非均匀薄膜厚度分布测量存在测量精度不高的技术问题。Therefore, in the prior art, there is a technical problem of low measurement accuracy in measuring large-sized objects and measuring non-uniform film thickness distribution.
发明内容Summary of the invention
有鉴于此，有必要提供一种集成式多点位膜厚测量系统及方法，用以解决对大尺寸物体测量和非均匀薄膜厚度分布测量存在测量精度不高的技术问题。In view of this, it is necessary to provide an integrated multi-point film thickness measurement system and method to solve the technical problem of low measurement accuracy in measuring large-sized objects and non-uniform film thickness distribution.
为了解决上述技术问题，一方面，本发明提供了一种集成式多点位膜厚测量系统及方法，包括：In order to solve the above technical problems, on the one hand, the present invention provides an integrated multi-point film thickness measurement system and method, comprising:
数据处理模块，用于发送控制指令，并接收传输数据，基于传输数据得到待测样品膜厚；A data processing module is used to send control instructions, receive transmission data, and obtain the film thickness of the sample to be tested based on the transmission data;
同步电机控制模块，与数据处理模块通信连接，用于基于控制指令控制光纤复用器和探头单元同步运行，得到多点位测量的传输数据，并将多点位测量的传输数据发送至数据处理模块；The synchronous motor control module is connected to the data processing module for controlling the synchronous operation of the optical fiber multiplexer and the probe unit based on the control instruction, obtaining the transmission data of the multi-point position measurement, and sending the transmission data of the multi-point position measurement to the data processing module;
光谱成像模块，与数据处理模块通信连接，用于采集待测样本表面形成的干涉光，基于干涉光生成二维图像的传输数据，并将二维图像的传输数据发送至数据处理模块。The spectral imaging module is connected to the data processing module for collecting interference light formed on the surface of the sample to be tested, generating transmission data of a two-dimensional image based on the interference light, and sending the transmission data of the two-dimensional image to the data processing module.
在一种可能的实现方式中，所述基于传输数据得到待测样品膜厚，包括：In a possible implementation, obtaining the film thickness of the sample to be measured based on the transmission data includes:
基于传输数据进行傅里叶变换和数据拟合，得到待测样品膜厚。Based on the transmission data, Fourier transform and data fitting are performed to obtain the film thickness of the sample to be tested.
在一种可能的实现方式中，所述系统，还包括：白光光源模块，用于产生所需波长范围内的入射光信号，并将入射光信号发送至光纤复用器；In a possible implementation, the system further includes: a white light source module, configured to generate an incident light signal within a desired wavelength range and send the incident light signal to the optical fiber multiplexer;
光纤复用器，与白光光源模块通信连接，用于基于入射光信号进行分解，得到多个通道信号，并将多个通道信号发送至光谱成像模块。The optical fiber multiplexer is communicatively connected with the white light source module, and is used for decomposing the incident light signal to obtain multiple channel signals, and sending the multiple channel signals to the spectral imaging module.
在一种可能的实现方式中，所述光谱成像模块，还与光纤复用器通信连接，用于基于多个通道信号和干涉光生成二维图像的传输数据。In a possible implementation, the spectral imaging module is further communicatively connected to a fiber optic multiplexer to generate transmission data of a two-dimensional image based on multiple channel signals and interference light.
在一种可能的实现方式中，所述白光光源模块，包括：白光光源，用于提供带宽光源，基于带宽光源产生所需波长范围内的入射光信号。In a possible implementation, the white light source module includes: a white light source, which is used to provide a broadband light source and generate an incident light signal within a required wavelength range based on the broadband light source.
在一种可能的实现方式中，所述白光光源模块，还包括：准直单元，与白光光源通信连接，用于对所需波长范围内的入射光信号进行准直处理。In a possible implementation, the white light source module further includes: a collimation unit, which is communicatively connected to the white light source and is used to collimate an incident light signal within a required wavelength range.
在一种可能的实现方式中，所述基于控制指令控制光纤复用器和探头单元同步运行，得到多点位测量的传输数据，包括：In a possible implementation, the step of controlling the optical fiber multiplexer and the probe unit to operate synchronously based on the control instruction to obtain transmission data for multi-point position measurement includes:
基于控制指令控制光纤复用器的通道与探头单元的同步运行，并同时控制光纤复用器的出射信号与探头单元中的探头相互对应，得到多点测量的传输数据。Based on the control instruction, the channels of the optical fiber multiplexer and the probe unit are controlled to run synchronously, and at the same time, the output signal of the optical fiber multiplexer is controlled to correspond to the probe in the probe unit, so as to obtain the transmission data of multi-point measurement.
在一种可能的实现方式中，所述系统，还包括：分束器，用于将入射光信号聚焦在待测样品表面处的光线分解为反射部分光信号和透射部分光信号；In a possible implementation, the system further includes: a beam splitter, which is used to decompose the light of the incident light signal focused on the surface of the sample to be tested into a reflected light signal and a transmitted light signal;
探头单元，用于接收待测样品表面的反射部分光信号和透射部分光信号，并将反射部分光信号和透射部分光信号发送至光纤复用器。The probe unit is used to receive the reflected light signal and the transmitted light signal on the surface of the sample to be tested, and send the reflected light signal and the transmitted light signal to the optical fiber multiplexer.
在一种可能的实现方式中，所述光纤复用器，用于将反射部分光信号和透射部分光信号发送至光谱成像模块；In a possible implementation, the optical fiber multiplexer is used to send the reflected part of the optical signal and the transmitted part of the optical signal to the spectral imaging module;
光谱成像模块，与光纤复用器通信连接，用于基于多个通道信号、干涉光、反射部分光信号及透射部分光信号生成二维图像的传输数据。The spectral imaging module is communicatively connected with the optical fiber multiplexer and is used for generating transmission data of a two-dimensional image based on multiple channel signals, interference light, reflected partial light signals and transmitted partial light signals.
另一方面，本发明还提供了一种集成式多点位膜厚测量方法，包括：On the other hand, the present invention also provides an integrated multi-point film thickness measurement method, comprising:
通过数据处理模块发送控制指令，并接收传输数据，基于传输数据得到待测样品膜厚；Sending control instructions through the data processing module, receiving transmission data, and obtaining the film thickness of the sample to be measured based on the transmission data;
通过同步电机控制模块基于控制指令控制光纤复用器和探头单元同步运行，得到多点位测量的传输数据，并将多点位测量的传输数据发送至数据处理模块；The synchronous motor control module controls the optical fiber multiplexer and the probe unit to operate synchronously based on the control instructions, obtains the transmission data of the multi-point position measurement, and sends the transmission data of the multi-point position measurement to the data processing module;
通过光谱成像模块采集待测样本表面形成的干涉光，基于干涉光生成二维图像的传输数据，并将二维图像的传输数据发送至数据处理模块。The interference light formed on the surface of the sample to be tested is collected by the spectral imaging module, the transmission data of the two-dimensional image is generated based on the interference light, and the transmission data of the two-dimensional image is sent to the data processing module.
本发明的有益效果是：本发明提供的集成式多点位膜厚测量系统，包括：数据处理模块、同步电机控制模块及光谱成像模块，数据处理模块，用于发送控制指令，并接收传输数据，基于传输数据得到待测样品膜厚，同步电机控制模块，与数据处理模块通信连接，用于基于控制指令控制光纤复用器和探头单元同步运行，得到多点位测量的传输数据，并将多点位测量的传输数据发送至数据处理模块，光谱成像模块，与数据处理模块通信连接，用于采集待测样本表面形成的干涉光，基于干涉光生成二维图像的传输数据，并将二维图像的传输数据发送至数据处理模块。进一步地，本申请通过利用同步电机控制光纤复用器和探头单元同步运行，控制入射光信号与出射光信号一一对应，实现多点位测量，克服了膜厚传统测量方法的局限性，解决对大尺寸物体测量和非均匀薄膜厚度分布测量存在测量精度不高的技术问题。The beneficial effects of the present invention are as follows: the integrated multi-point film thickness measurement system provided by the present invention includes: a data processing module, a synchronous motor control module and a spectral imaging module, the data processing module is used to send control instructions, receive transmission data, and obtain the film thickness of the sample to be measured based on the transmission data, the synchronous motor control module is connected to the data processing module for communication, and is used to control the fiber optic multiplexer and the probe unit to operate synchronously based on the control instructions, obtain the transmission data of the multi-point measurement, and send the transmission data of the multi-point measurement to the data processing module, and the spectral imaging module is connected to the data processing module for communication, and is used to collect the interference light formed on the surface of the sample to be measured, generate the transmission data of the two-dimensional image based on the interference light, and send the transmission data of the two-dimensional image to the data processing module. Further, the present application realizes multi-point measurement by controlling the synchronous operation of the fiber optic multiplexer and the probe unit using a synchronous motor, controlling the one-to-one correspondence between the incident light signal and the outgoing light signal, thereby overcoming the limitations of the traditional film thickness measurement method and solving the technical problem of low measurement accuracy in the measurement of large-sized objects and the measurement of non-uniform film thickness distribution.
附图说明BRIEF DESCRIPTION OF THE DRAWINGS
为了更清楚地说明本发明实施例中的技术方案，下面将对实施例描述中所需要使用的附图作简单地介绍，显而易见地，下面描述中的附图仅仅是本发明的一些实施例，对于本领域技术人员来讲，在不付出创造性劳动的前提下，还可以根据这些附图获得其他的附图。In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the following briefly introduces the drawings required for use in the description of the embodiments. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative work.
图1为本发明提供的集成式多点位膜厚测量系统的一个实施例结构示意图；FIG1 is a schematic structural diagram of an embodiment of an integrated multi-point film thickness measurement system provided by the present invention;
图2为本发明提供的集成式多点位膜厚测量系统的一个实施例白光光源模块结构示意图；FIG2 is a schematic structural diagram of a white light source module of an embodiment of an integrated multi-point film thickness measurement system provided by the present invention;
图3为本发明提供的集成式多点位膜厚测量系统的一个实施例的光纤复用器结构示意图；FIG3 is a schematic diagram of the structure of an optical fiber multiplexer of an embodiment of an integrated multi-point film thickness measurement system provided by the present invention;
图4为本发明提供的集成式多点位膜厚测量系统的一个实施例的分束器结构示意图；FIG4 is a schematic diagram of a beam splitter structure of an embodiment of an integrated multi-point film thickness measurement system provided by the present invention;
图5本为发明提供的集成式多点位膜厚测量系统的一个实施例的探头单元结构示意图；FIG5 is a schematic diagram of the structure of a probe unit of an embodiment of an integrated multi-point film thickness measurement system provided by the present invention;
图6本为发明提供的集成式多点位膜厚测量系统的一个实施例的反射探头的端面示意图；FIG6 is a schematic diagram of the end face of a reflection probe of an embodiment of an integrated multi-point film thickness measurement system provided by the present invention;
图7本为发明提供的集成式多点位膜厚测量系统的一个实施例的待测样品表面成像光路图；FIG7 is a light path diagram of the imaging surface of a sample to be measured according to an embodiment of an integrated multi-point film thickness measurement system provided by the present invention;
图8为本发明提供的集成式多点位膜厚测量方法的一个实施例结构示意图。FIG8 is a schematic structural diagram of an embodiment of an integrated multi-point film thickness measurement method provided by the present invention.
具体实施方式DETAILED DESCRIPTION
下面将结合本发明实施例中的附图，对本发明实施例中的技术方案进行清楚、完整地描述。显然，所描述的实施例仅仅是本发明一部分实施例，而不是全部的实施例。基于本发明中的实施例，本领域技术人员在没有做出创造性劳动前提下所获得的所有其他实施例，都属于本发明保护的范围。The technical solutions in the embodiments of the present invention will be described clearly and completely below in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative work are within the scope of protection of the present invention.
在本发明实施例的描述中，除非另有说明， “多个”的含义是两个或两个以上。“和/或”，描述关联对象的关联关系，表示可以存在三种关系，例如：A和/或B，可以表示：单独存在A，同时存在A和B，单独存在B这三种情况。In the description of the embodiments of the present invention, unless otherwise specified, "multiple" means two or more than two. "And/or" describes the association relationship of associated objects, indicating that three relationships may exist. For example, "A and/or B" may mean: A exists alone, A and B exist at the same time, and B exists alone.
本发明实施例中所涉及到的“第一”、 “第二”等描述仅用于描述目的，而不能理解为指示或者暗示其相对重要性或者隐含指明所指示的技术特征的数量。因此，限定有“第一”、 “第二”的技术特征可以明示或者隐含的包括至少一个该特征。The descriptions of "first", "second", etc. involved in the embodiments of the present invention are only for descriptive purposes and cannot be understood as indicating or implying their relative importance or implicitly indicating the number of the indicated technical features. Therefore, the technical features defined as "first" and "second" may explicitly or implicitly include at least one of the features.
在本文中提及“实施例”意味着，结合实施例描述的特定特征、结构或特性可以包含在本发明的至少一个实施例中。在说明书中的各个位置出现该短语并不一定均是指相同的实施例，也不是与其它实施例互斥的独立的或备选的实施例。本领域技术人员显式地和隐式地理解的是，本文所描述的实施例可以与其它实施例相结合。Reference to "embodiments" herein means that a particular feature, structure, or characteristic described in conjunction with the embodiments may be included in at least one embodiment of the present invention. The appearance of the phrase in various places in the specification does not necessarily refer to the same embodiment, nor is it an independent or alternative embodiment that is mutually exclusive of other embodiments. It is explicitly and implicitly understood by those skilled in the art that the embodiments described herein may be combined with other embodiments.
本发明提供了一种集成式多点位膜厚测量系统及方法，以下分别进行说明。The present invention provides an integrated multi-point film thickness measurement system and method, which are described below respectively.
图1为本发明提供的集成式多点位膜厚测量系统的一个实施例结构示意图，如图1所示，集成式多点位膜厚测量系统包括：FIG. 1 is a schematic structural diagram of an embodiment of an integrated multi-point film thickness measurement system provided by the present invention. As shown in FIG. 1 , the integrated multi-point film thickness measurement system includes:
数据处理模块110，用于发送控制指令，并接收传输数据，基于传输数据得到待测样品膜厚；The data processing module 110 is used to send control instructions, receive transmission data, and obtain the film thickness of the sample to be measured based on the transmission data;
同步电机控制模块120，与数据处理模块110通信连接，用于基于控制指令控制光纤复用器和探头单元同步运行，得到多点位测量的传输数据，并将多点位测量的传输数据发送至数据处理模块110；The synchronous motor control module 120 is connected to the data processing module 110 for controlling the synchronous operation of the optical fiber multiplexer and the probe unit based on the control instruction, obtaining the transmission data of the multi-point position measurement, and sending the transmission data of the multi-point position measurement to the data processing module 110;
光谱成像模块130，与数据处理模块110通信连接，用于采集待测样本表面形成的干涉光，基于干涉光生成二维图像的传输数据，并将二维图像的传输数据发送至数据处理模块110。The spectral imaging module 130 is in communication with the data processing module 110 , and is used to collect interference light formed on the surface of the sample to be tested, generate transmission data of a two-dimensional image based on the interference light, and send the transmission data of the two-dimensional image to the data processing module 110 .
需要说明的是，本发明实施例提供的集成式多点位膜厚测量系统包括：白光光源模块、光学干涉模块、同步电机控制模块120、光谱成像模块130以及数据处理模块110；It should be noted that the integrated multi-point film thickness measurement system provided in the embodiment of the present invention includes: a white light source module, an optical interference module, a synchronous motor control module 120, a spectral imaging module 130 and a data processing module 110;
白光光源模块210，用于提供宽带光源，产生所需波长范围内的入射光信号进入光学干涉模块；The white light source module 210 is used to provide a broadband light source to generate an incident light signal within a required wavelength range to enter the optical interference module;
光学干涉模块，用于将入射光信号传输至待测样品，还用于根据入射光信号得到反射光与透射光，并将出射的光信号传输至光谱成像模块；An optical interference module is used to transmit the incident light signal to the sample to be tested, and is also used to obtain reflected light and transmitted light according to the incident light signal, and transmit the emitted light signal to the spectral imaging module;
同步电机控制模块120，用于控制光纤复用器与探头单元的同步运行，实现多点位测量；The synchronous motor control module 120 is used to control the synchronous operation of the optical fiber multiplexer and the probe unit to achieve multi-point measurement;
光谱成像模块130，用于采集反射光和透射光的位置信息图像与强度信息图像；Spectral imaging module 130, used to collect position information images and intensity information images of reflected light and transmitted light;
数据处理模块110，用于处理光谱成像模块得到的图像，并根据处理结果计算待测样品的膜厚值。The data processing module 110 is used to process the image obtained by the spectral imaging module and calculate the film thickness value of the sample to be tested according to the processing result.
可以理解的是，本申请实施例提供的集成式多点位膜厚测量系统，通过设置集成式多点位膜厚测量系统中的光学干涉模块和同步电机控制模块120，可实现在同一个膜厚测量系统中实现待测样品多点位膜厚测量，克服了膜厚测量中只能对单点进行测量的局限性，达到了同一个集成式多点位膜厚测量系统可实现样品不同点位的膜厚测量的技术效果，即：可实现同一膜厚测量系统的多点位高精度膜厚测量，提高了膜厚测量系统的适用性。It can be understood that the integrated multi-point film thickness measurement system provided in the embodiment of the present application can realize multi-point film thickness measurement of the sample to be measured in the same film thickness measurement system by setting the optical interference module and the synchronous motor control module 120 in the integrated multi-point film thickness measurement system, thereby overcoming the limitation that only a single point can be measured in film thickness measurement, and achieving the technical effect that the same integrated multi-point film thickness measurement system can realize film thickness measurement at different points of the sample, that is: multi-point high-precision film thickness measurement can be realized in the same film thickness measurement system, thereby improving the applicability of the film thickness measurement system.
进一步可以理解的是，数据处理模块110包括pc（Personal Computer）机，本申请公开了一种集成式多点位膜厚测量系统，包括白光光源模块、光学干涉模块、同步电机控制模块120、光谱成像模块130以及数据处理模块110；白光光源模块用于提供宽带光源，产生所需波长范围内的入射光信号；光学干涉模块用于将入射光信号聚焦在待测样品表面不同位置处，形成反射光和透射光；同步电机控制模块120用于控制光纤复用器与探头单元同步运行，并实现多点位测量；光谱成像模块130用于采集待测样品表面形成的干涉光，生成具有位置维度和强度维度的二维图像；数据处理模块110用于控制同步电机控制模块，并对二维图像进行分析，根据数据处理得到待测样品膜厚，实现多点位测量，克服了膜厚传统测量方法的局限性，解决对大尺寸物体测量和非均匀薄膜厚度分布测量存在测量精度不高的技术问题。It can be further understood that the data processing module 110 includes a PC (Personal Computer). The present application discloses an integrated multi-point film thickness measurement system, including a white light source module, an optical interference module, a synchronous motor control module 120, a spectral imaging module 130 and a data processing module 110; the white light source module is used to provide a broadband light source to generate an incident light signal within a required wavelength range; the optical interference module is used to focus the incident light signal at different positions on the surface of the sample to be measured to form reflected light and transmitted light; the synchronous motor control module 120 is used to control the synchronous operation of the optical fiber multiplexer and the probe unit, and realize multi-point measurement; the spectral imaging module 130 is used to collect the interference light formed on the surface of the sample to be measured, and generate a two-dimensional image with a position dimension and an intensity dimension; the data processing module 110 is used to control the synchronous motor control module and analyze the two-dimensional image, obtain the film thickness of the sample to be measured according to data processing, realize multi-point measurement, overcome the limitations of traditional film thickness measurement methods, and solve the technical problem of low measurement accuracy in measuring large-sized objects and non-uniform film thickness distribution.
在本发明的一些实施例中，所述基于传输数据得到待测样品膜厚，包括：In some embodiments of the present invention, obtaining the film thickness of the sample to be measured based on the transmission data includes:
基于传输数据进行傅里叶变换和数据拟合，得到待测样品膜厚。Based on the transmission data, Fourier transform and data fitting are performed to obtain the film thickness of the sample to be tested.
需要说明的是，数据处理模块110用于处理光谱成像模块得到的图像，并根据处理结果计算待测样品的膜厚值，根据处理结果计算待测样品的膜厚值时，可利用傅里叶变换法及数学拟合法等方法求出待测样品的膜厚。It should be noted that the data processing module 110 is used to process the image obtained by the spectral imaging module and calculate the film thickness value of the sample to be tested based on the processing results. When calculating the film thickness value of the sample to be tested based on the processing results, the film thickness of the sample to be tested can be calculated using methods such as Fourier transform method and mathematical fitting method.
图2为本发明提供的集成式多点位膜厚测量系统的一个实施例白光光源模块结构示意图，包括：白光光源模块210，用于产生所需波长范围内的入射光信号，并将入射光信号发送至光纤复用器；FIG2 is a schematic diagram of the structure of a white light source module of an embodiment of an integrated multi-point film thickness measurement system provided by the present invention, comprising: a white light source module 210, which is used to generate an incident light signal within a required wavelength range and send the incident light signal to a fiber optic multiplexer;
光纤复用器，与白光光源模块210通信连接，用于基于入射光信号进行分解，得到多个通道信号，并将多个通道信号发送至光谱成像模块130。The optical fiber multiplexer is communicatively connected with the white light source module 210 , and is used for decomposing the incident light signal to obtain a plurality of channel signals, and sending the plurality of channel signals to the spectral imaging module 130 .
需要说明的是，为了增加采样点的数量，光学干涉模块包括光纤复用器、分束器及探头单元。It should be noted that, in order to increase the number of sampling points, the optical interference module includes a fiber optic multiplexer, a beam splitter and a probe unit.
其中，光纤复用器，用于将入射光信号分解成多个通道信号，并连接光学干涉模块与光谱成像模块。Among them, the fiber optic multiplexer is used to decompose the incident light signal into multiple channel signals and connect the optical interference module with the spectral imaging module.
图3为本发明提供的集成式多点位膜厚测量系统的一个实施例的光纤复用器结构示意图，包括：FIG3 is a schematic diagram of the structure of an optical fiber multiplexer of an embodiment of an integrated multi-point film thickness measurement system provided by the present invention, comprising:
所述光谱成像模块130，还与光纤复用器通信连接，用于基于多个通道信号和干涉光生成二维图像的传输数据。The spectral imaging module 130 is also connected to the optical fiber multiplexer for communication, and is used to generate transmission data of a two-dimensional image based on multiple channel signals and interference light.
需要说明的是，光谱成像模块130包括像光路与光谱仪，入射光信号在待测样品表面产生反射与透射信号；光谱仪，用于采集待测样品表面的干涉光，生成具有位置维度和强度维度的二维图像。It should be noted that the spectral imaging module 130 includes an imaging optical path and a spectrometer. The incident light signal generates reflection and transmission signals on the surface of the sample to be tested; the spectrometer is used to collect interference light on the surface of the sample to be tested and generate a two-dimensional image with position dimension and intensity dimension.
在本发明的一些实施例中，所述白光光源模块210，包括：白光光源211，用于提供带宽光源，基于带宽光源产生所需波长范围内的入射光信号。In some embodiments of the present invention, the white light source module 210 includes: a white light source 211 for providing a broadband light source, and generating an incident light signal within a required wavelength range based on the broadband light source.
需要说明的是，为了避免集成式多点位膜厚测量系统的测量精度较差，在本申请的一些实施例中采用白光光源211提供带宽光源，产生所需波长范围内的入射光信号。It should be noted that, in order to avoid the poor measurement accuracy of the integrated multi-point film thickness measurement system, in some embodiments of the present application, a white light source 211 is used to provide a broadband light source to generate an incident light signal within a required wavelength range.
在本发明的一些实施例中，所述白光光源模块210，还包括：准直单元212，与白光光源211通信连接，用于对所需波长范围内的入射光信号进行准直处理。In some embodiments of the present invention, the white light source module 210 further includes: a collimating unit 212, which is in communication with the white light source 211 and is used to collimate the incident light signal within a required wavelength range.
需要说明的是，通过对白光光源211产生的入射光信号进行准直处理，可提高入射光的平行度和均匀性，从而可提高光谱成像的清晰度和准确度，进而提高待测样品的膜厚精度。It should be noted that by collimating the incident light signal generated by the white light source 211, the parallelism and uniformity of the incident light can be improved, thereby improving the clarity and accuracy of spectral imaging, and further improving the film thickness accuracy of the sample to be measured.
在本发明的一些实施例中，所述基于控制指令控制光纤复用器310和探头单元同步运行，得到多点位测量的传输数据，包括：In some embodiments of the present invention, the control of the optical fiber multiplexer 310 and the probe unit to operate synchronously based on the control instruction to obtain the transmission data of the multi-point measurement includes:
基于控制指令控制光纤复用器310的通道与探头单元的同步运行，并同时控制光纤复用器310的出射信号与探头单元中的探头相互对应，得到多点测量的传输数据。Based on the control instruction, the channels of the optical fiber multiplexer 310 and the probe unit are controlled to operate synchronously, and at the same time, the output signal of the optical fiber multiplexer 310 and the probe in the probe unit are controlled to correspond to each other, so as to obtain the transmission data of multi-point measurement.
需要说明的是，同步电机控制模块120用于控制光纤复用器310通道与探头单元一一对应，同时控制出射信号的光纤复用器310与探头一一对应，使待测样本能实现多点位测量。It should be noted that the synchronous motor control module 120 is used to control the one-to-one correspondence between the fiber optic multiplexer 310 channels and the probe units, and at the same time control the one-to-one correspondence between the fiber optic multiplexer 310 and the probe of the output signal, so that the sample to be tested can achieve multi-point measurement.
可以理解的是，本申请实施例通过同步电机控制模块120选择成像的光路，可使入射信号打到待测样品的不同表面位置处，实现了多点位测量。It can be understood that, in the embodiment of the present application, the synchronous motor control module 120 selects the imaging optical path, so that the incident signal can hit different surface positions of the sample to be measured, thereby realizing multi-point measurement.
图4为本发明提供的集成式多点位膜厚测量系统的一个实施例的分束器结构示意图，图5本为发明提供的集成式多点位膜厚测量系统的一个实施例的探头单元结构示意图及图6本为发明提供的集成式多点位膜厚测量系统的一个实施例的反射探头的端面示意图，包括：FIG4 is a schematic diagram of the structure of a beam splitter of an embodiment of an integrated multi-point film thickness measurement system provided by the present invention, FIG5 is a schematic diagram of the structure of a probe unit of an embodiment of an integrated multi-point film thickness measurement system provided by the present invention, and FIG6 is a schematic diagram of the end face of a reflection probe of an embodiment of an integrated multi-point film thickness measurement system provided by the present invention, including:
分束器410，用于将入射光信号聚焦在待测样品表面处的光线分解为反射部分光信号和透射部分光信号；A beam splitter 410 is used to decompose the incident light signal focused on the surface of the sample to be tested into a reflected light signal and a transmitted light signal;
探头单元510，用于接收待测样品表面的反射部分光信号和透射部分光信号，并将反射部分光信号和透射部分光信号发送至光纤复用器310。The probe unit 510 is used to receive the reflected light signal and the transmitted light signal on the surface of the sample to be tested, and send the reflected light signal and the transmitted light signal to the optical fiber multiplexer 310 .
需要说明的是，分束器410，用于将光线分解为反射部分和透射部分；探头单元，用于接收样品表面反射或透射的光信号；探头为带有参考脚的可见光-近红外反射探头，其端面示意图如图所示，中心为反射探头，外围为照明单元。It should be noted that the beam splitter 410 is used to decompose the light into a reflected part and a transmitted part; the probe unit is used to receive the light signal reflected or transmitted from the sample surface; the probe is a visible light-near infrared reflection probe with a reference foot, and its end face schematic is shown in the figure, with the reflection probe in the center and the lighting unit on the periphery.
图7本为发明提供的集成式多点位膜厚测量系统的一个实施例的待测样品表面成像光路图，包括：FIG7 is a light path diagram of the imaging surface of a sample to be measured according to an embodiment of the integrated multi-point film thickness measurement system provided by the present invention, comprising:
所述光纤复用器310，用于将反射部分光信号和透射部分光信号发送至光谱成像模块130；The optical fiber multiplexer 310 is used to send the reflected part of the optical signal and the transmitted part of the optical signal to the spectral imaging module 130;
光谱成像模块130，与光纤复用器310通信连接，用于基于多个通道信号、干涉光、反射部分光信号及透射部分光信号生成二维图像的传输数据。The spectral imaging module 130 is connected to the optical fiber multiplexer 310 for generating transmission data of a two-dimensional image based on a plurality of channel signals, interference light, reflected light signals and transmitted light signals.
需要说明的是，为了验证本发明提出的集成式多点位膜厚测量系统的有效性，通过集成式多点位膜厚测量系统对典型的物体进行了测量，均可实现多点位测量，并在误差范围内准确测得膜厚。验证了本发明实施例的集成式多点位膜厚测量系统的可用性和有效性。It should be noted that in order to verify the effectiveness of the integrated multi-point film thickness measurement system proposed in the present invention, typical objects were measured using the integrated multi-point film thickness measurement system, and multi-point measurement can be achieved, and the film thickness can be accurately measured within the error range. The availability and effectiveness of the integrated multi-point film thickness measurement system of the embodiment of the present invention are verified.
可以理解的是，入射光信号在待测样本表面产生反射与透射信号，如图8所示。It can be understood that the incident light signal generates reflection and transmission signals on the surface of the sample to be tested, as shown in FIG8 .
综上所述，本发明实施例通过结合光学干涉测量技术和膜厚测量技术，利用同步电机控制入射光信号与出射光信号的一一对应，实现多点位测量，克服了膜厚测量存在单点位局限性、传统测量方法局限性等问题；利用光学干涉测量技术中的一系列处理方法处理光谱图像，计算待测样品的膜厚，实现了实现纳米至毫米结构器件的高精度膜厚测量，提高了膜厚测量系统的适用性。In summary, the embodiments of the present invention combine the optical interference measurement technology and the film thickness measurement technology, and use a synchronous motor to control the one-to-one correspondence between the incident light signal and the outgoing light signal to achieve multi-point measurement, thereby overcoming the problems of single-point limitations of film thickness measurement and limitations of traditional measurement methods. A series of processing methods in the optical interference measurement technology are used to process the spectral image and calculate the film thickness of the sample to be measured, thereby achieving high-precision film thickness measurement of nanometer to millimeter structure devices, and improving the applicability of the film thickness measurement system.
图8为本发明提供的集成式多点位膜厚测量方法的一个实施例结构示意图，包括：FIG8 is a schematic structural diagram of an embodiment of an integrated multi-point film thickness measurement method provided by the present invention, comprising:
S801、通过数据处理模块发送控制指令，并接收传输数据，基于传输数据得到待测样品膜厚；S801, sending a control instruction through a data processing module, receiving transmission data, and obtaining a film thickness of a sample to be measured based on the transmission data;
S802、通过同步电机控制模块基于控制指令控制光纤复用器和探头单元同步运行，得到多点位测量的传输数据，并将多点位测量的传输数据发送至数据处理模块；S802, controlling the optical fiber multiplexer and the probe unit to operate synchronously based on the control instruction through the synchronous motor control module, obtaining transmission data of multi-point position measurement, and sending the transmission data of the multi-point position measurement to the data processing module;
S803、通过光谱成像模块采集待测样本表面形成的干涉光，基于干涉光生成二维图像的传输数据，并将二维图像的传输数据发送至数据处理模块。S803 , collecting interference light formed on the surface of the sample to be tested through the spectral imaging module, generating transmission data of a two-dimensional image based on the interference light, and sending the transmission data of the two-dimensional image to the data processing module.
本发明提供的一种集成式多点位膜厚测量系统及方法，通关数据处理模块，用于发送控制指令，并接收传输数据，基于传输数据得到待测样品膜厚，同步电机控制模块，与数据处理模块通信连接，用于基于控制指令控制光纤复用器和探头单元同步运行，得到多点位测量的传输数据，并将多点位测量的传输数据发送至数据处理模块，光谱成像模块，与数据处理模块通信连接，用于采集待测样本表面形成的干涉光，基于干涉光生成二维图像的传输数据，并将二维图像的传输数据发送至数据处理模块。本发明通过结合光学干涉测量技术和膜厚测量技术，利用同步电机控制入射光信号与出射光信号的一一对应，实现多点位测量，克服了膜厚测量存在单点位局限性、传统测量方法局限性等问题；利用光学干涉测量技术中的一系列处理方法处理光谱图像，计算待测样品的膜厚，实现了实现纳米至毫米结构器件的高精度膜厚测量，提高了膜厚测量系统的适用性。The present invention provides an integrated multi-point film thickness measurement system and method, a customs clearance data processing module, which is used to send control instructions and receive transmission data, and obtain the film thickness of the sample to be measured based on the transmission data; a synchronous motor control module, which is connected to the data processing module in communication, and is used to control the synchronous operation of the optical fiber multiplexer and the probe unit based on the control instructions, obtain the transmission data of the multi-point measurement, and send the transmission data of the multi-point measurement to the data processing module; a spectral imaging module, which is connected to the data processing module in communication, is used to collect the interference light formed on the surface of the sample to be measured, and generate the transmission data of the two-dimensional image based on the interference light, and send the transmission data of the two-dimensional image to the data processing module. The present invention combines the optical interference measurement technology and the film thickness measurement technology, uses the synchronous motor to control the one-to-one correspondence between the incident light signal and the outgoing light signal, realizes multi-point measurement, overcomes the problems of single-point limitations and traditional measurement methods in film thickness measurement; uses a series of processing methods in the optical interference measurement technology to process the spectral image, calculates the film thickness of the sample to be measured, realizes the high-precision film thickness measurement of nanometer to millimeter structure devices, and improves the applicability of the film thickness measurement system.
以上实施例仅用于说明本发明的设计思想和特点，其目的在于使本领域内的技术人员能够了解本发明的内容并据以实施，本发明的保护范围不限于上述实施例。所以，凡依据本发明所揭示的原理、设计思路所做的等同变化或装饰，均在本发明的保护范围之内。The above embodiments are only used to illustrate the design ideas and features of the present invention, and their purpose is to enable those skilled in the art to understand the content of the present invention and implement it accordingly. The protection scope of the present invention is not limited to the above embodiments. Therefore, any equivalent changes or decorations made according to the principles and design ideas disclosed by the present invention are within the protection scope of the present invention.
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