CN1181034A - Industrial module and a device for measuring movements relative to the said module - Google Patents

Industrial module and a device for measuring movements relative to the said module Download PDF

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Publication number
CN1181034A
CN1181034A CN 95197810 CN95197810A CN1181034A CN 1181034 A CN1181034 A CN 1181034A CN 95197810 CN95197810 CN 95197810 CN 95197810 A CN95197810 A CN 95197810A CN 1181034 A CN1181034 A CN 1181034A
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China
Prior art keywords
module
pedestal
mentioned
statement
guide rail
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Granted
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CN 95197810
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Chinese (zh)
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CN1045559C (en
Inventor
拉波捷夫·亚利山大·格里高里耶维奇
皮赫罗夫·奥列格·列奥尼德维奇
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LARPICK CO Ltd
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LARPICK CO Ltd
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Priority to CN95197810A priority Critical patent/CN1045559C/en
Publication of CN1181034A publication Critical patent/CN1181034A/en
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Publication of CN1045559C publication Critical patent/CN1045559C/en
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Abstract

The invention concerns an industrial module comprising a base on which is mounted a heavy-duty frame provided with linear displacement drives with linkage connected to a movable platform on which is sitated a measuring head. To the side of each drive, interferometers are fitted on the measuring frame and are optically connected to reflectors. The measuring frame is mounted on the base via a vibration-proofing insulator. The interferometer is optically connected to the reflectors by telescopic tubes. The device comprises a holder and a stand. The article undergoing machining is securely held by the holder which is mounted on the stand. The holder has a set of precision base measurement surface. A device for defining the working surfaces of the instrument is mounted on the stand. The invention facilifates precision machining of components by combining in a single system a machining station and a co-ordinate -measurement machine.

Description

Industrial module and the device that is used to measure the motion relevant with said module
The present invention relates to general engineering, and except the measurement of multi-coordinate precise measure or this measurement that are used for target to movable target travel, when the function of a numer center and a coordinate measuring set is circulated a single machining cell, can also in having the part of surfaces of complex shape, Precision Machining be applied.
The machinery processing apparatus of known a kind of prior art comprises a pedestal, pivot plate with a tool heads, six ends and pedestal and the hinged straight-line displacement drive unit of pivot plate, with one be used for there the universal stage of holding workpiece and (consult Soviet Union inventor certificate #1,296,401, IPC B25J11/00).
Yet because said apparatus neither one measuring system, it can not provide and obtain one reliably about the information of the position that presented by the workpiece in the work space of device, and this information is necessary to the Precision Machining of workpiece.This shortcoming is reality especially when processing should work in-process be relocated to the complex-shaped workpieces of another location.
Known another kind comprises a pedestal, a moving element and a displacement measuring device that links to each other with pedestal by the driver of band coupling arrangement to the steady arm (consulting Soviet Union inventor certificate #1,224,137) of the prior art of a movable executive component.
An intrinsic shortcoming belongs to owing to displacement is contrasted the mistake to the moving element location that such fact of the linear measure longimetry of coupling arrangement causes in this device, and coupling arrangement occupies power source loads in operating process.And used measurement mechanism has been ignored by the linear deformation and the torsional strain that act on the coupling arrangement that dynamic loading on moving element and the coupling arrangement and moment of torsion produce.
It is the most approaching on technical spirit that what advise the industrial module that adopts is a kind of precise localizer of movable executive component of device, above-mentioned steady arm comprises a heavy duty framework, the straight-line displacement driver has been installed on it, driver is used to settle the moving element of an operating system hinged with coupling arrangement and one, one has the device of measuring the moving element displacement and passes through the gage frame that the antivibration fixture links to each other with pedestal, and one be used for the anchor clamps that workpiece to be machined is clipped on the pedestal (are consulted Soviet Union inventor certificate #2,008,197).
A measuring system is set in said apparatus makes the locus of monitoring moving element (worktable) become possibility, thus, this device can merge the function of numer center and coordinate measuring set.
Yet even if the position of workpiece to be machined also can not accurately be controlled and monitor to device discussed above because lacking accurate mounting points, the position of mounting points can influence accurate monitoring.That is exactly that the accurate location and the reorientation of why workpiece to be machined proposed some technical difficulties.This shortcoming is especially real when the finishing surfaces of complex shape, and it can influence machining precision.
The device of known another kind of measurement moving element displacement (consult Soviet Union inventor certificate #1,291,821, IPC G05B 5/20) comprise that has an interferometer that is placed on the reverberator above the rectilinear motion object.An inherent defect of said apparatus is that its practical application is restricted, because the two-dimentional rectilinear motion that it can only measuring workpieces.
The most approaching device that is used to measure movable object displacement of advising adopting is a device that is used to measure the three-dimensional motion of object, comprise a pedestal, an abase frame that is fixed together with pedestal, at least three interferometers that are articulated and connected with abase frame, one has one and measures nib and be installed in the worktable that can move along the three axes direction on the pedestal, and with the reverberator of interferometer similar number, above-mentioned reverberator is movably mounted in the plane of worktable and with corresponding interferometer optic the contact is arranged, also have and the same number of telescopic tube of reverberator, they are placed between the corresponding reverberator and interferometer in the following manner: an end of sleeve pipe is fixed together with corresponding reverberator, and the other end is fixed together with corresponding interferometer.Abase frame is made (consult Soviet Union inventor certificate #1,427,170, IPC G01B 11/03) by the pipe that is full of the absorbing medium.
An intrinsic shortcoming of this device is that its application is restricted to the measurement of the moving element of object being carried out plane parallel motion along trilinear coordinates.Remain unchanged with respect to the position, angle of the object of coordinate axis motion under the situation of this motion and unaffected with respect to the mutual angular range of the reverberator of optic axis and interferometer, this is one of principal element of guaranteeing the device reliable operation when adopting prism as reverberator.
By providing one group to invent the fundamental purpose of the present invention that realizes and be included in the machining process according to multi-coordinate and accurately measure finishing that the workpiece of surfaces of complex shape is arranged.
Realize that above-mentioned purpose is based on this fact: in an industrial module, comprise that is fixed on the heavy duty framework on the pedestal, along six independent axes be set up with its on lay six straight-line displacement drivers of the hinged coupling arrangement of the moving element of operating system, a device that is used to measure the moving element displacement, said apparatus has been set up a measuring system by an antivibration fixture and pedestal mechanical connection, the attach most importance to pedestal of loading frame of this pedestal is common, one be used for processed and (or) measured workpiece is clamped in the clamping device on the pedestal, above-mentioned clamping device show as one be fixed on the pedestal along straight line with along angular movement and have the anchor clamps on reference measurement surface of locus that one group of its purpose is to work in coordination with measuring system and clearly determines to have the anchor clamps of workpiece to be machined.
For the shape of determining the instrument cutting edge and the mistake (comprising measurement axis) of considering an operating unit, the anchor clamps that are used for the clamping workpiece to be machined have been set up a tool work surface location processed sensor.
The reference measurement surface of anchor clamps may show as the face of cylinder of a sphere and a quilt and a coaxial arrangement of arbitrary axis of anchor clamps and one and the vertical plane of above-mentioned axle.Further talk, the reference measurement surface of anchor clamps can show as the not sphere on same straight line of three centre ofs sphere.In addition, the reference measurement surface of anchor clamps can also show as three intersecting planes.
The clamping device that is used for the clamping workpiece to be machined show as one be installed on the pedestal along straight line and be can to determine to have the reference measurement surface of locus of the anchor clamps of workpiece to be machined owing to match with the measuring system of this device along the anchor clamps of angular movement and one group of purpose, provide this clamping device make on the workpiece all surface finishing and in the location of workpiece and repositioning process, accurately determine the coordinate of workpiece to be machined, and can increase the machining precision on above-mentioned surface and the processing monitoring of processing characteristics becomes possibility.
Achieve the above object also is because be provided with a device that is used to measure the moving element displacement of industrial module.For this reason, at the above-mentioned device that is used for measuring above-mentioned moving element displacement, comprise a pedestal, a gage frame that is connected with said base, by mounted in pairs on the said frame top and the interferometer that the moving element of an operating system couples together is installed by a casing bit and on it, the same with the reverberator of the signal that produces by the above-mentioned interference instrument, show as a contact nib, be positioned on the moving element equally, above-mentioned reverberator on number identical with interferometer and each all with interferometer in one optically be connected by sleeve pipe, above-mentioned casing bit has on its internal part of same structure guide rail is arranged; This device also comprises and is adapted to the bearings with rolling contact that cooperates with above-mentioned guide rail, they are settled at least two rows by this way at the external component of casing bit: the bearing of symmetry on diametric(al) among corresponding another row of each bearing of a row wherein, reverberator links to each other with moving element (workpiece to be machined) by an articulated joint.
Wherein a row bearing can be set at this device on the external component internal part from this end that exposes, and the bearing among another row can be positioned in the center section of the external component of said apparatus.
In addition, the two ends place of guide rail on the casing bit parts all can be arranged to the movable length of length corresponding to related parts, and the guide rail of a component ends and the guide rail of the other end be symmetry on diametric(al).
May there be the various variations of guide rail, for example, with the form of plate or groove.
Following the present invention is illustrated in the accompanying drawings, and identical reference number is represented identical parts in its whole figure:
Fig. 1 is the full view of an industrial module, wherein:
The 1-pedestal;
2-heavy duty framework;
3-straight-line displacement driver;
The 4-coupling arrangement;
5-is used to lay the moving element of the flat type of operating unit;
The 6-measurement axis;
The 7-measuring head;
The 8-gage frame;
9-interferometer (being used to measure the surveying instrument of the device of moving element displacement);
The 10-reverberator;
11-antivibration fixture;
The 12-casing bit;
13-is used for the clamping device of clamping workpiece to be machined;
The 14-anchor clamps;
The 15-pillar;
The 16-workpiece to be machined;
17-is with the articulated joint of a guard ring;
The 18-spheroid;
The 19-right cylinder;
The 20-flat surfaces;
The 21-cutting tool;
22-is used for the device of the working surface of definite measuring head and cutting tool;
23-has the articulated joint of two freedoms of motion;
The 24-ball pivot;
Fig. 2 is the incomplete graph that is used to measure the device that shows as a casing bit of motion, wherein:
25,26, three three parts that show as pipe of 27-cannula system 12;
The 28-rolling bearing;
29-incident illumination beam;
30-reflected illumination light beam;
Fig. 3 is a view of the center section of casing bit, wherein:
The 31-guide rail;
Fig. 5 represents similar guide rail along the sectional view of B-B line intercepting among Fig. 1; And
Fig. 6 represents an embodiment who has the collar tube sub-assembly of channled rail.
Here the industrial module (Fig. 1) that suggestion is adopted comprises a pedestal 1 that has the heavy duty framework 2 of a hinged straight-line displacement driver 3 thereon, above-mentioned driver by coupling arrangement 4 with one that the movable flat board of an of measuring head 75 has been installed on it is hinged.
Hinged with the interferometer 9 that reverberator 10 optically is connected with the gage frame on each driver 3 one side.Gage frame 8 is installed on the pedestal 1 by an antivibration fixture 11.Optical coupled between interferometer 9 and the reverberator 10 realizes by sleeve pipe 12.Driver 3 and interferometer 9 are hinged on dull and stereotyped 5.Clamping device 13 comprises anchor clamps 14 and a pillar 15.
Workpiece to be machined 16 is placed in the appropriate location that is installed in the anchor clamps 14 on the pillar 15 by an articulated joint 17 that two degree of freedom are arranged.Have the method for attachment of another kind of anchor clamps and pillar, for example, a single-degree-of-freedom articulated joint perhaps combines with the rectilinear motion possibility of anchor clamps 14, perhaps both other connections of all having.
Anchor clamps 14 have one group of accurate reference measurement surface 18,19 and 20, that is, and and sphere 18, the face of cylinder 19 and flat surfaces 20.Anchor clamps 14 are the shapes of elongating in this specific embodiments, and workpiece 16 is sandwiched in an end, and spheroid 18 is at the other end.Right cylinder 19 is positioned in a side of holding workpiece 16 and as much as possible away from spheroid 18.The axle of the center of spheroid 18 and right cylinder 20 is arranged on anchor clamps 17 on the turning axle of articulated joint 17.In order to cooperate flat surfaces 20 that 4 faces and anchor clamps 17 rotating shaft parallel around articulated joint 17 can be arranged more easily with measuring system.Other embodiment of some of reference measurement surface also is possible, and for example, the centre of sphere is three spheres on same straight line not, perhaps an accurate pipe or other polyhedron.The reference measurement surface will be suitable for cooperating as the surface location sensor and be contained in measuring head 7 on dull and stereotyped 5.Sensor 7 is removed and cutting tool 21 is placed on this place when machine work.
Be used for determining that the device 22 of cutting tool 21 working surfaces is fixed on pillar 15.What be used as said apparatus can be the measuring head of known structure.Measurement mechanism (Fig. 2) comprises the framework 8 of fixing the interferometer that optically is coupled with the reverberator 10 that is installed in by ball pivot 24 on the moving element 5 on it.Interferometer 9 is connected in operation with reverberator 10 by being used as at the casing bit 12 of setting up optical coupled between above-mentioned interference instrument and the above-mentioned reverberator.
Comprise at this specific embodiments middle sleeve device 12 showing as that for example, three parts 25,26 and 27 of pipe are although the number of these parts may be other number.External component 25 quilts and interferometer 9, internal part 27 is rigidly connected with reverberator 10.Parts 25,26 and 27 are worked in coordination by rolling bearing 28.
Bearing 28 is loaded into parts 25 with 26 inside and become two rows to be positioned in each above-mentioned parts, with the mode of 3 bearings of every row make row's bearing along circumference with respect to 180 ° of another row's bearing displacements.
Parts 26 and 27 each 6 guide rails 31 that are suitable for fitted bearing 28 are all arranged.The length of guide rail 31 equals length that parts 26 and 27 move and to place along circumference with the bearing 28 identical modes that cooperate therewith, and the guide rail that cooperates with this row's bearing is placed on this end of parts, and the guide rail that cooperates with another row's bearing is positioned in the opposite end of parts.Guide rail 31 can show as, for example, and tabular (Fig. 4,5) or groove shape (Fig. 6).
Here the industrial module operation that suggestion is adopted is as described below.
The pillar 15 and the anchor clamps 14 that have articulated joint 17 are fixed on the pedestal 1.Workpiece to be machined 16 and reference measurement surface 18,19 and 20 are loaded into anchor clamps 14 then, be used for determining that the device 22 of working surface is installed in pillar 15, be moved to the position that needs processing by means of its workpiece to be machined 16, then articulated joint 17 is kept to a position, moves with respect to pedestal 1 to prevent workpiece to be machined 16.
Workpiece to be machined 16 is positioned then.Measuring head is installed on the moving element 5, and the latter by driver 3 in front always, matches with reference measurement surface 18,19 and 20 up to measuring head 7.Like this, when the coordinate of one group of spheroid 18 when selected arbitrarily point touches reference measurement surface 18,19 and 20, the coordinate of another group cylinder 19, and the coordinate of one group of flat surfaces 20 just is established again.Subsequently, the unit vector of the axle of the center of ball 18, cylinder 19 and the normal vector of flat surfaces 20 are calculated, and are set out by resulting data, and the coordinate system of a workpiece to be machined is drawn to come out, and promptly rotation and displacement vector matrix are determined.
Then, by be used for determining that the device 22 of working surface obtains the coordinate of one group of measuring head 7 and cutting tool 21 with measuring head 7 and cutting tool 21 Continuous Tracking.Be determined against the coupling between above-mentioned one group of measurement of coordinates head 7 and the cutting tool 21 just, it had both shown as the correction to the actual diameter of cutting tool 21, also showed as the displacement vector of workpieces coordinate system.This workpiece position fixing process that just is through with.
Then, when considering the total data of the position that workpiece 16 presents, workpiece is that predefined to be used for mach program processed from its easily approaching side according to one.Want the opposite side articulated joint 17 of further processing work to be released and workpiece 16 with anchor clamps 14 by along predetermined angle rotation, correspondingly, their positions are being fixed on reference measurement surface 18,19 and 20 rigidly.Afterwards, articulated joint 17 is positioned again.Repeat then with measuring head and cutting tool 21 location workpiece 16, and machining process restarts.Like this, workpiece to be machined 16 is rotated many times to process whole work-piece 16 required angles fully.Because workpiece 16 obviously keeps in the whole machining time of all finishing up to it and reference measurement surface 18,19 and the coupling of 20 rigidity, so workpieces coordinate system can both be determined by unique under any rotation situation of workpiece to be machined 16.Consider such fact promptly as reference measurement surface 18,19 and 20 be reference element, promptly having maximum shape error is sphere 18, the face of cylinder 19 and the flat surfaces 20 of 0.0001 millimeter feature, so the reproducibility of the coordinate system of workpiece to be machined 16 or (repeatability) are sufficiently high in it is located repeatedly.At any time, this monitoring becomes in case of necessity owing to tool damage or its cutting edge rust, is used for determining that the permanent use of the device 22 of working surface all can produce the possible processing monitoring to cutting workpiece 21 or its alternative.Consider this purpose, the machine work program implementation is ended and is followed the tracks of the program that is used for determining the device 22 of working surface and setting up one group of coordinate and be activated, and whereby, the actual diameter of cutting tool 21 is determined.Then, the machine work program is corrected, to draw actual tool diameter and shape.And machining process restarts.
This measurement mechanism function is as described below.
The displacement that has the moving element 5 of reverberator 10 causes the rotating shaft rotation of interferometer 9 around articulated joint 23, this is because being operatively connected by casing bit 12 realizations between reverberator 10 and the interferometer 9, and the element 25 of this device is followed interferometer 9 and carried out angular motion owing to being rigidly connected with interferometer 9.
The parts 26 of casing bit 12 match with the bearing 28 of parts 25 by its guide rail 31, therefore move along straight line with respect to above-mentioned parts, are prevented from simultaneously rotating around its axle.Parts 27 motion likes 26.This be because parts 27 by and reverberator 10 rigidity couplings connection, and the latter is held not around its optic axis rotation, so reverberator 10 just has been implemented with respect to the reorientation of incident illumination beam 29, thereby has kept the orientation of folded light beam 30.
Any displacement of moving element 5 all can change the distance between reverberator 10 and the interferometer 9, each interferometer can be measured the distance of coupled reverberator with respect to any straight line of the point of crossing of the turning axle of the interferometer in the articulated joint 23 9 by an optical signalling is converted to an electric signal.The displacement of like this, tested reverberator just makes determines that the coordinate with respect to the position of moving element and any service part disposed thereon becomes possibility.

Claims (9)

1. industrial module, comprise one have hinged thereon and be provided with its on installed the hinged coupling arrangement of a moving element of an operating system the straight-line displacement driver be installed in heavy duty framework on the pedestal, one has the measuring system that is connected by an antivibration fixture and pedestal in operation, be used to measure the device of moving element displacement, and one be used for processed element is clamped in clamping device on the pedestal, this module be characterised in that the above-mentioned clamping device that is used for the processed element of clamping show as one be fixed on the pedestal can be along straight line with along angular movement and have anchor clamps on reference measurement surface of the locus of the anchor clamps that are adapted to match and are adapted to clearly determine have workpiece to be machined with displacement measurement system.
2. a module of statement in claim 1 is characterized in that above-mentioned anchor clamps have been set up the processed sensor of an operating system working surface position.
3. a module of statement in claim 1 or 2, it is characterized in that said reference measurement face show as by with ball of the coaxial arrangement of the module longitudinal axis and cylinder and quilt and the vertically arranged plane of above-mentioned axle.
4. a module of statement in claim 1 or 2 is characterized in that said reference measurement face shows as not three balls on same straight line of center.
5. a module of statement in claim 1 or 2 is characterized in that said reference measurement face shows as three not parallel planes.
6. device that is used to measure the moving element displacement, comprise a pedestal, one and the interconnected hexahedral gage frame of said base, be placed in pairs said frame than on the minor face and by by a casing bit and the interferometer that the moving element of an operating system couples together is installed on it, show as one the contact nib and with pedestal the operation on link to each other, the contact nib is the same with the reverberator of the signal that the above-mentioned interference instrument produces, also be installed on the moving element, above-mentioned reverberator equates with interferometer on number, and in them each all optically links to each other by casing bit with interferometer.This measurement mechanism is characterised in that above-mentioned casing bit has identical structure that guide rail is promptly arranged on internal part; This device also comprises and is applicable to the bearing that matches with above-mentioned guide rail, they settled in the modes of at least two rows on the casing bit external component each bearing of making among the row corresponding among another row on diametric(al) the bearing of symmetry, and reverberator is linked to each other with workpiece to be machined by an articulated joint.
In claim 6 statement a device, it is characterized in that wherein internal part that a row bearing is set at the above-mentioned casing bit on the external component from this end that exposes, and the bearing among another row is positioned in the center section of the external component of said apparatus.
8. a device of statement in claim 6 or 7 is characterized in that the movable length of the rail length of place, the two ends setting on the casing bit parts corresponding to designed parts; The guide rail of a component ends and the guide rail of the other end be symmetry on diametric(al).
9. a device of statement in claim 6,7 or 8 is characterized in that guide rail shows as tabular.
10. in claim 6, a device of statement is characterized in that guide rail shows as the groove shape in 7,8 or 9.
CN95197810A 1995-03-15 1995-03-15 Industrial module and a device for measuring movements relative to the said module Expired - Fee Related CN1045559C (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN95197810A CN1045559C (en) 1995-03-15 1995-03-15 Industrial module and a device for measuring movements relative to the said module

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN95197810A CN1045559C (en) 1995-03-15 1995-03-15 Industrial module and a device for measuring movements relative to the said module

Publications (2)

Publication Number Publication Date
CN1181034A true CN1181034A (en) 1998-05-06
CN1045559C CN1045559C (en) 1999-10-13

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CN95197810A Expired - Fee Related CN1045559C (en) 1995-03-15 1995-03-15 Industrial module and a device for measuring movements relative to the said module

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100447523C (en) * 2004-06-28 2008-12-31 六边形度量衡股份公司 Measurement probe for use in coordinate measurng machines
CN106705838A (en) * 2016-12-03 2017-05-24 中国航空工业集团公司北京长城计量测试技术研究所 Fully-automatic large-size measurement equipment field calibration device

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Publication number Priority date Publication date Assignee Title
CN109015740B (en) * 2018-08-09 2021-07-23 哈尔滨工业大学 Tensioning floating type flexible joint and design method thereof

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3895729A (en) * 1969-09-25 1975-07-22 American Ass Cybernetics Sensor responsive cybernetics machine

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100447523C (en) * 2004-06-28 2008-12-31 六边形度量衡股份公司 Measurement probe for use in coordinate measurng machines
CN106705838A (en) * 2016-12-03 2017-05-24 中国航空工业集团公司北京长城计量测试技术研究所 Fully-automatic large-size measurement equipment field calibration device

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