CN118090165A - Defocus amount detection method, device, equipment and storage medium - Google Patents

Defocus amount detection method, device, equipment and storage medium Download PDF

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Publication number
CN118090165A
CN118090165A CN202410524059.4A CN202410524059A CN118090165A CN 118090165 A CN118090165 A CN 118090165A CN 202410524059 A CN202410524059 A CN 202410524059A CN 118090165 A CN118090165 A CN 118090165A
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laser
detected
line laser
screening
reflected
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CN118090165B (en
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姜涛
霍林锋
杨贤明
吴炜
李天博
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Yinpai Battery Technology Co ltd
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Yinpai Battery Technology Co ltd
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01MTESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/02Testing optical properties
    • G01M11/0242Testing optical properties by measuring geometrical properties or aberrations
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/20Bonding
    • B23K26/21Bonding by welding
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/70Auxiliary operations or equipment
    • B23K26/702Auxiliary equipment
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/02Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Optics & Photonics (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • General Physics & Mathematics (AREA)
  • Geometry (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)

Abstract

The application provides a defocus amount detection method, a defocus amount detection device, defocus amount detection equipment and a storage medium, and relates to the technical field of battery manufacturing processes, wherein the defocus amount detection method comprises the following steps: carrying out dynamic scanning of a laser dynamic surface on the surface of the object to be detected; carrying out optical filtration on the line laser reflected by the surface of the object to be detected; and carrying out data processing on the optically filtered line laser to obtain the defocus amount of the surface curvature of the object to be detected. The surface of the object to be detected is dynamically scanned by adopting a laser dynamic surface forming mode, and the light reflected by the surface is subjected to data processing after screening and filtering, so that the number of samples is large, various defects of single-point measurement are avoided, and the stability and accuracy of defocusing detection are improved through screening and filtering.

Description

Defocus amount detection method, device, equipment and storage medium
Technical Field
The application relates to the technical field of battery manufacturing processes, in particular to a defocus amount detection method, device and equipment and a storage medium.
Background
In the manufacturing process of the power battery, in order to ensure the stability of metallographic phase and appearance of the laser welding of the tab and the cover plate, defocusing amount detection is required to be carried out on the laser welding surface before laser welding so as to ensure that the welding requirement is met. The existing scheme is to detect the defocusing amount of the welding surface through a high-precision single-point laser range finder.
At present, the electrode lugs need to be compacted in an ultrasonic welding mode before laser welding, so that the defocusing amount detection surface is an ultrasonic welding printing surface with poor flatness. The existing defocusing amount detection mode only carries out single-point detection on a welding surface, on one hand, the sampling quantity is small, the detection result is greatly influenced by the tolerance of the detection surface, the detection result is not representative, and the deviation amount of the welding surface and the laser focusing surface cannot be truly reflected; on the other hand, the transmitting end only emits one distance measuring laser, and after the detection laser is influenced by multiple reflections of the high-reflection detection surface, partial noise points can be introduced to influence the laser detection accuracy.
Disclosure of Invention
In view of the above, an object of the embodiments of the present application is to provide a defocus amount detection method, apparatus, device, and storage medium, which can collect defocus amount data of a plurality of points on a laser line at one time by a line laser measurement method, and cooperate with a reflective prism directly driven by a scanning motor to realize linear surface formation, and then perform noise reduction and fitting on the collected multi-point defocus amount data by an algorithm, so as to obtain zone surface data that can more accurately reflect defocus amount of a welding surface.
In a first aspect, an embodiment of the present application provides a defocus amount detection method, including:
carrying out dynamic scanning of a laser dynamic surface on the surface of the object to be detected;
Carrying out optical filtration on the line laser reflected by the surface of the object to be detected;
and carrying out data processing on the optically filtered line laser to obtain the defocus amount of the surface curvature of the object to be detected.
In the implementation process, the surface of the object to be detected is dynamically scanned by adopting a laser dynamic surface forming mode, the light reflected by the surface is subjected to data processing after screening and filtering, the sampling quantity is large, various defects of single-point measurement are avoided, and the stability and the accuracy of defocusing quantity detection are improved through screening and filtering.
Optionally, the dynamic scanning of the laser dynamic surface on the surface of the object to be detected includes:
converting point laser emitted by an emission source into line laser;
and adjusting the angle of the line laser reflected to the surface of the object to be detected so as to dynamically scan the dynamic surface of the laser line on the surface of the object to be detected.
In the implementation process, point laser is converted into line laser, the incident angle of the line laser is adjusted to realize dynamic scanning of the dynamic surface of the laser, the light path is simplified, and the scanning efficiency of the transmitting end is improved.
Optionally, the dynamic scanning of the laser dynamic surface on the surface of the object to be detected further includes:
Transmitting point laser by adopting a point laser transmitter, wherein the point laser is converted into line laser through a cylindrical scattering mirror and a collimating mirror;
And adjusting the angle of a reflecting prism in front of the surface of the object to be detected through a micro scanning motor so as to adjust the angle reflected to the surface of the object to be detected.
In the implementation process, the laser line dynamic surface is realized by utilizing the cooperation of the point laser emitter, the cylindrical surface scattering mirror, the collimating mirror and the scanning motor, so that the cost is low, and the quantitative production is facilitated.
Optionally, the optical filtering of the line laser reflected by the surface of the object to be detected includes:
Performing wavelength screening on the line laser reflected by the surface of the object to be detected;
and carrying out directional screening on the line laser subjected to wavelength screening to obtain polarized light which can reach the surface of the object to be detected through primary reflection.
In the implementation process, wavelength screening and direction screening are carried out on the light reflected by the detected surface, and most abnormal feedback is processed, so that the data processing amount of subsequent algorithm screening is reduced, and the detection accuracy is improved.
Optionally, the optical filtering of the line laser reflected by the surface of the object to be detected further includes:
The line laser reflected by the surface of the object to be detected is subjected to wavelength screening by adopting a film-coated filter;
and (3) carrying out directional screening on the line laser after wavelength screening by adopting a polarizer embedded with a cross grating.
In the implementation process, the two-time screening is realized through the coated filter and the polarizer, so that the light path is simplified, and the screening efficiency is improved.
Optionally, the data processing is performed on the line laser after optical filtering to obtain the defocus amount of the surface curvature of the object to be detected, including:
Receiving the optically filtered line laser by using an area array photosensitive element;
converting the line laser into a component analog voltage signal based on the monochromatic light component intensity of the reflected light;
Converting the component analog voltage signal into a component digital signal;
And carrying out reflected light color screening and reflected light intensity screening on the component digital signals, and carrying out defocusing amount conversion according to a preset relation to obtain the defocusing amount of the surface curvature of the object to be detected.
In the implementation process, the area array photosensitive element can record the component light intensity of the reflected light in the primary colors of red, green and blue, and when the area array photosensitive element is activated, all photosensitive pixels of the area array photosensitive element can sample the reflected light once, so that defocusing amount detection can be carried out on a plurality of points on one laser line at a time. The influence of the ambient light on the detection data can be removed through the wavelength screening of the reflected light color, and the abnormal noise points and blind points of multiple reflections can be removed through the screening of the reflected light intensity, so that the detection accuracy and efficiency are improved.
Optionally, after the filtering of the reflected light color and the reflected light intensity of the component digital signal, the data processing of the optically filtered line laser is performed to obtain the defocus amount of the surface curvature of the object to be detected, and the method further includes:
And carrying out average pooling on the component digital signals according to a preset multidimensional array.
In the implementation process, the data processing is performed through an average pooling algorithm, so that the accuracy of the defocus amount data is further improved.
In a second aspect, an embodiment of the present application provides a defocus amount detection apparatus, the apparatus comprising:
The dynamic scanning module is used for dynamically scanning the laser dynamic surface of the object to be detected;
the optical filtering module is used for optically filtering the line laser reflected by the surface of the object to be detected;
and the defocus amount detection module is used for carrying out data processing on the optically filtered line laser to obtain defocus amount of the surface curvature of the object to be detected.
In a third aspect, an embodiment of the present application further provides an electronic device, including: a processor, a memory storing machine-readable instructions executable by the processor, which when executed by the processor perform the steps of the method described above when the electronic device is run.
In a fourth aspect, embodiments of the present application provide a storage medium having stored thereon a computer program which, when executed by a processor, performs the steps of the method described above.
In order to make the above objects, features and advantages of the present application more comprehensible, embodiments accompanied with figures are described in detail below.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings that are needed in the embodiments of the present application will be briefly described below, it should be understood that the following drawings only illustrate some embodiments of the present application and should not be considered as limiting the scope, and other related drawings can be obtained according to these drawings without inventive effort for a person skilled in the art.
FIG. 1 is a flowchart of a defocus amount detection method according to an embodiment of the present application;
FIG. 2 is an overall light path diagram of defocus detection according to an embodiment of the present application;
FIG. 3 is a diagram of an optical lens assembly at an emission end for defocus amount detection according to an embodiment of the present application;
FIG. 4 is a diagram of a receiving-end optical lens set for defocus detection according to an embodiment of the present application;
FIG. 5 is a schematic diagram of an area array photosensitive element for defocus detection according to an embodiment of the present application;
FIG. 6 is a schematic diagram of laser reflection for defocus detection according to an embodiment of the present application;
FIG. 7 is a schematic diagram of data screening for defocus detection according to an embodiment of the present application;
FIG. 8 is an average pooling schematic diagram of defocus detection according to an embodiment of the present application;
fig. 9 is a schematic diagram of a functional module of a defocus amount detection apparatus according to an embodiment of the present application;
Fig. 10 is a block diagram of an electronic device provided with a defocus amount detection apparatus according to an embodiment of the present application.
Icon: 210-a dynamic scanning module; 220-an optical filtration module; 230-a defocus amount detection module; 300-an electronic device; 311-memory; 312-a storage controller; 313-processor; 314-peripheral interface; 315-an input-output unit; 316-display unit.
Detailed Description
The following description of the embodiments of the present application will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present application, but not all embodiments. The components of the embodiments of the present application generally described and illustrated in the figures herein may be arranged and designed in a wide variety of different configurations. Thus, the following detailed description of the embodiments of the application, as presented in the figures, is not intended to limit the scope of the application, as claimed, but is merely representative of selected embodiments of the application. All other embodiments, which can be made by a person skilled in the art without making any inventive effort, are intended to be within the scope of the present application.
It should be noted that: like reference numerals and letters denote like items in the following figures, and thus once an item is defined in one figure, no further definition or explanation thereof is necessary in the following figures. The terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising one … …" does not exclude the presence of other like elements in a process, method, article, or apparatus that comprises the element. The terms "first," "second," and the like are used merely to distinguish between descriptions and are not to be construed as indicating or implying relative importance.
The inventors of the present application have noted that since the tab is compacted by ultrasonic welding before laser welding, the defocus amount detection surface is an ultrasonic welding surface having poor flatness. The existing defocus amount detection mode has the following defects of performing defocus amount detection on a welding surface with poor flatness: 1) Because the flatness of the defocusing amount detection surface is poor, the existing defocusing amount detection mode only carries out single-point detection on the welding printing surface, the sampling quantity is small, the detection result is greatly influenced by the tolerance of the detection surface, the detection result is not representative, and the deviation amount of the welding surface and the laser focusing surface cannot be truly reflected. 2) The actual welding surface is an uneven curved surface, and the single-point defocus amount detection mode is used for equivalently converting the welding surface into a plane based on defocus amount sampling point data fitting, so that the defocus amount cannot be adjusted by the welding system according to curved surface changes. 3) The welding materials of the positive/negative electrode lug cover plates for laser welding are aluminum alloy/copper alloy respectively, and are high-reflection materials; the existing scheme detects through a single-point laser range finder, a transmitting end only emits one ranging laser, and partial noise is introduced after the detection laser is influenced by multiple reflections of a high-reflection detection surface, so that the laser detection accuracy is influenced. In view of this, the embodiments of the present application provide a defocus amount detection method, apparatus, device and storage medium as described below.
Referring to fig. 1, fig. 1 is a flowchart of a defocus amount detection method according to an embodiment of the present application. The embodiments of the present application will be explained in detail below. The method comprises the following steps: step 100, step 120 and step 140.
Step 100: carrying out dynamic scanning of a laser dynamic surface on the surface of the object to be detected;
step 120: carrying out optical filtration on the line laser reflected by the surface of the object to be detected;
Step 140: and (5) carrying out data processing on the optically filtered line laser to obtain the defocus of the surface curvature of the object to be detected.
Illustratively, the laser linear facet may be: converting an input signal into an electric signal, controlling the output of a laser beam through a laser modulator, and driving the laser beam to scan after the scanner receives the control signal to form a dynamic picture effect; the method can be used for converting the emitted point laser into the line laser in the specific embodiment of the application, and dynamically adjusting the angle of the line laser irradiated to the surface of the object to be detected, thereby realizing the effect of dynamic scanning; the scanner plays a key role in the laser linear imaging process, and can rapidly and accurately project laser beams to different positions, so that the laser beams move in space, and the speed and the direction of the scanner are controlled, so that the line laser can scan in the vertical and horizontal directions, and a continuous picture effect is formed. The optical filtering may be: light with certain wavelengths is selectively transmitted or blocked based on color absorption and dispersion effects, wherein color absorption refers to that the absorptivity of certain molecules in a material to light with specific wavelengths is higher than that of other wavelengths, and dispersion effects refer to that the refractive indexes of the material to light with different wavelengths are different, so that the light can be filtered by a method of refracting the light; for example, the optical filter can achieve the purpose of filtering light by utilizing the absorption and transmission effects of specific materials on light with specific wavelengths, and when the light passes through the filter, one wavelength of light can pass through the filter, and the other wavelengths of light can be filtered out by the filter. The data processing may be: and converting the optical signals subjected to optical filtering into electric signals, performing data processing such as noise reduction, fitting and the like, and finally obtaining zone surface data capable of more accurately reflecting the defocusing amount of the welding surface.
Alternatively, in the field of laser welding, defocus refers to the distance between the focal point of the laser and the active substance. Laser welding generally requires a certain amount of defocus because the power density at the center of the spot at the laser focus is too high, holes are easily vaporized, and the power density distribution is relatively uniform across the planes away from the laser focus. The surface of the object to be detected can be an ultrasonic welding printing surface with poor flatness, defocusing amount detection can be carried out on the welding surface with poor flatness by adopting a laser dynamic surface multipoint sampling mode in the embodiment of the application, defocusing amount data of a plurality of points on a laser line can be collected at one time, the effect of dynamic surface formation can be realized by matching with a reflecting prism directly driven by a scanning motor, scanning light rays are screened and filtered, noise reduction and fitting are carried out on the collected multipoint defocusing amount data through an algorithm, and finally area surface data capable of more accurately reflecting the defocusing amount of the welding surface is obtained.
In one embodiment, step 100 may include: step 101 and step 102.
Step 101: converting point laser emitted by an emission source into line laser;
step 102: and adjusting the angle of the line laser reflected to the surface of the object to be detected so as to dynamically scan the dynamic surface of the laser line on the surface of the object to be detected.
The mode of converting the point laser light emitted from the emission source into the line laser light may be a cylindrical scattering mirror (CYLINDRICAL LENS) method, a Diffractive Optical Element (DOE) method, an optical fiber method, a scanning method, a multi-lens combination method, or the like, for example. For example: the diffraction optical element modulates the incident point laser by utilizing the diffraction principle of light and through the microstructure on the surface of the diffraction optical element, so that the incident point laser is converted into line laser, the design of the DOE is very flexible, and the line laser with a specific beam shape and a specific divergence angle can be customized. Fiber optic methods, which can utilize specially designed fibers to convert point laser light into line laser light, typically involve coupling the laser light into a special fiber bundle, where each fiber transmits a small portion of the laser light, ultimately forming a line-shaped laser output. The mode of adjusting the angle of the line laser reflected to the surface of the object to be detected can be a motor drive system method, a focusing lens method and the like. For example: the motor driving system drives the laser transmitter to carry out accurate angle adjustment by using a servo motor or a stepping motor, and changes the position and the angle of the motor in real time so as to realize dynamic adjustment of line laser. The adjustable lens method can change the focal length of the laser beam by adjusting the adjustable lens in front of the linear laser transmitter, thereby changing the angle and the range of the laser beam projected onto the surface of the object to be detected.
In one embodiment, step 100 may further comprise: step 1011 and step 1012.
Step 1011: transmitting point laser by adopting a point laser transmitter, and converting the point laser into line laser by a cylindrical surface scattering mirror and a collimating mirror;
step 1012: the angle of the reflecting prism in front of the surface of the object to be detected is adjusted by the miniature scanning motor so as to adjust the angle reflected to the surface of the object to be detected.
Illustratively, the overall optical path diagram as shown in fig. 2 includes a transmitting end (an optical path system constituted by optical elements such as a, b, c, d, e) and a receiving end (an optical path system constituted by optical elements such as g, h, i). The point laser transmitter a emits laser to be converted into line laser through the cylindrical scattering mirror b, the line laser is converted into collimated light through the collimating mirror c, the scanning light is refracted to the side surface f of the object to be detected through the reflecting prism e, the collimated light reaches the receiving end after being reflected by the detected surface, the filter g can be arranged to screen measuring light with specific wavelength for the first time, the polarizer h is arranged to screen measuring light with specific direction for the second time, and the reflected light is received by the area array photosensitive element i. As shown in fig. 3, the laser emitted from the point laser emitter a forms a line laser via the cylindrical scattering mirror b and the collimator mirror c. The angle of the reflecting prism e is adjusted clockwise or anticlockwise by the micro scanning motor d, so that dynamic scanning of the laser scanning line is realized. The cylindrical scattering mirror b is a special optical element, one surface of which is curved and the other surface of which is flat, and when a spot laser beam passes through the cylindrical scattering mirror b, it is diffused in one direction while maintaining focus in the other direction, thereby forming a linear laser beam.
In one embodiment, step 120 may include: step 121 and step 122.
Step 121: performing wavelength screening on line laser reflected by the surface of the object to be detected;
step 122: and carrying out directional screening on the line laser subjected to wavelength screening to obtain polarized light which can reach the surface of the object to be detected through primary reflection.
For example, the manner of wavelength screening of the line laser reflected by the surface of the object to be detected may be: filtering by a filter, filtering by a tunable filter, screening by a spectrometer, screening by optical interference, and the like. For example: for applications requiring screening of multiple wavelengths or variable wavelengths, tunable filters may be used, which may be tuned as needed to filter wavelengths, thereby enabling screening of line lasers of different wavelengths. By introducing the line laser reflected by the surface of the object to be detected into the spectrometer, each wavelength component in the laser can be accurately measured, and screening is performed through software or a control system. The method for carrying out directional screening on the line laser can be as follows: multiple modes such as a specially designed reflecting mirror or prism, grating screening, polarization screening and the like are used. For example: the grating is an optical element with a periodic structure, can be screened according to the incident angle and wavelength of light, and can selectively allow line laser in a specific direction to pass through and block laser in other directions.
In one embodiment, step 120 may further comprise: step 1211 and step 1212.
Step 1211: the method comprises the steps of performing wavelength screening on line laser reflected by the surface of an object to be detected through a film-coated filter;
Step 1212: and (3) carrying out directional screening on the line laser after wavelength screening by adopting a polarizer embedded with a cross grating.
Illustratively, as shown in fig. 4, the left side is a receiving-end optical lens group formed by optical elements such as a filter g, a polarizer h, an area array photosensitive element i, and the like, and the right side is a light path trend diagram embedded in the polarizer h of the cross grating, a side view of the area array photosensitive element i, and a grating distribution diagram of the polarizer h embedded in the cross grating, respectively; the detection line laser of the object to be detected reflected by the side surface is received by the area array photosensitive element i after passing through the wavelength screening of the filter plate g and the directional screening of the polarizer h. The reflected light enters the receiving end and then is subjected to optical filtering, and most abnormal feedback is processed, so that the data processing amount of subsequent algorithm screening is reduced. The optical filtering is carried out by a filter plate g, the filter plate g is a common optical element, light rays with specific wavelength can be selectively transmitted or blocked, and line laser with specific wavelength can be screened out by selecting the filter plate g matched with the required wavelength. The film coating on the surface of the filter plate can increase the transmissivity of the light waves with the specific wave band on one hand, and can absorb the light waves with other wave bands on the other hand, so that only the reflected light with the same wavelength as the laser of the transmitting end passes through the filter plate, and the influence of the ambient light on detection is reduced. The monochromatic light filtered by the filter plate g is directionally filtered by the polarizer h, and the polarization direction of the reflected light can be changed along with the reflection angle and the reflection times, so that the polarizer h can be used for filtering the polarized light which is reflected once and the reflection angle accords with the position relation between the side face and the emitting end. And finally is received by the area array photosensitive element i.
The receiving end lens group is provided with a polarizer h with a cross grating embedded therein near the side of the area array photosensitive element i, the cross grating in the lens is a filtering film capable of absorbing the laser passing through, and as the cross grating has a certain height in the thickness direction of the lens, a plurality of light path channels with small size and vertical to the photosensitive element (see the light path trend diagram embedded in the polarizer h of the cross grating in fig. 4) are formed, the cross section of the light path channel is a square area formed by the cross gratings in the grating distribution diagram in fig. 4, so that only the laser vertical to the receiving surface of the area array photosensitive element i can vertically enter the surface of the area array photosensitive element i through the polarizer h, and the laser entering the polarizer h at other angles (incident obliquely or not vertical to the receiving surface of the photosensitive element) can be absorbed by the grating wall (see gray arrow light rays in the light path trend diagram embedded in the polarizer h of the cross grating in fig. 4). By using such a polarizer h, a linear laser light having a specific polarization direction and reflection direction can be selectively screened.
In one embodiment, step 140 may include: step 141, step 142, step 143, and step 144.
Step 141: receiving the optically filtered line laser by using an area array photosensitive element;
Step 142: converting the line laser into a component analog voltage signal based on the monochromatic light component intensity of the reflected light;
step 143: converting the component analog voltage signal into a component digital signal;
Step 144: and (3) carrying out reflected light color screening and reflected light intensity screening on the component digital signals, and carrying out defocusing amount conversion according to a preset relation to obtain the defocusing amount of the surface curvature of the object to be detected.
For example, the area array photosensitive element may be an area array CMOS chip, as shown in fig. 5, and the target surface of the area array CMOS chip has a plurality of photosensitive pixels distributed in an array, each of the photosensitive pixels is composed of three photosensitive sensors, and RGB filters are respectively added at the front ends of the three photosensitive sensors, so that the component light intensities of the reflected light in the three primary colors of red (R), green (G) and blue (B) can be recorded. When the CMOS chip is activated, all the photosensitive pixels sample the reflected light once. Each row of pixels corresponds to one path of reflection light path, defocusing amount data of one point on a laser line is collected, a plurality of rows of photosensitive pixels are triggered and sampled, and defocusing amount detection is carried out on a plurality of points on one laser line at a time. The reflection prism driven by the scanning motor can enable the laser line to scan the whole detection surface and cooperate with the repeated triggering and acquisition of the CMOS chip, so that the defocusing quantity detection of a plurality of points distributed in an array on the detection surface is realized.
As shown in fig. 6, based on the principle of triangular reflection, when the measured surface (uneven height) of the object to be measured is different from the area array photosensitive element i, the reflected light is received by the photosensitive pixels of different rows in the same column on the CMOS chip. The defocus amount detection value from the collection surface can be obtained by converting the following relational expressions, which are already known as θ1, θ2, θ3, and X1 (collection reference surface height), and X2:
-/>
Wherein, theta 1 and theta 2 are any two angles of the surface of the object to be measured, the light emitted by the emitting end is incident to different heights of the surface of the object to be measured, theta 3 is the reflection angle of the reflected light received by the area array photosensitive element i, X1 is the height between the emitting surface and the reference surface established by the laser focusing object to be measured, and X2 is the variable displacement amount corresponding to the change of the height of the light of the scanning angles theta 1 and theta 2 on the receiving end surface array photosensitive element i. Since the reflected light is diffusely reflected, but only the light rays on the receiving surface of the vertical plane array photosensitive element i can pass through the polarizer, the mounting relationship between the vertical plane array photosensitive element i and the surface to be measured of the object is known, so that θ3 is known, and the reflection angles of all the reflected light received by the vertical plane array photosensitive element i are θ3.
Meanwhile, the area array photosensitive element i can be composed of a photosensitive element, a signal amplifier and an analog-to-digital conversion module. When the reflected light is received by the area array photosensitive element i through the receiving end optical lens group, the photosensitive element firstly converts the optical signal into a component analog voltage signal based on the RGB component intensity of the reflected light through the photoelectric effect, and then converts the component analog voltage signal into a component digital signal through the analog-to-digital conversion module, so that the color information of the reflected light is recorded, and the sum of the light intensities of all the components is the reflected light intensity. The light signals received and collected by the mode mainly comprise the dimension data such as the reflected light color wavelength, the reflected light intensity and the position of the receiving pixel on the target surface. As shown in fig. 7, the influence of the ambient light on the detection data can be removed by the screening of the color wavelength of the reflected light, and the light with the same wavelength as the light emitted by the emitting end is obtained by screening; abnormal noise points and blind points of multiple reflections can be removed through reflected light intensity screening, and light vertically incident from the transmitting end is obtained through screening, wherein the light intensity value is maximum. In physics, different colors correspond to different wavelengths, whereas in computer vision, typically processing a representation of colors in RGB or other color space converts acquired spectral data into a computer-processable format, such as an array or list of representative wavelengths and corresponding intensities, determines the wavelength range to be screened, traverses the converted spectral data, and retains only data points within the selected wavelength range. The calculation of the intensity of reflected light generally depends on a number of factors, such as the intensity of the incident light, the reflectivity of the object, the distance between the light source and the object, the angle of the light source, and the angle of observation, which need to be taken into account to estimate the intensity of the reflected light. The noise reduction algorithm sets a preset threshold value based on the wavelength and the intensity of the emitted light, so that data screening and noise reduction are performed, and point cloud data (effective data area) capable of truly reflecting the curvature of the detected surface is obtained.
In one embodiment, after step 144, it may further include: step 145.
Step 145: the component digital signals are averaged and pooled according to a preset multidimensional array.
Illustratively, the average pooling (Average Pooling) is a pooling operation in a Convolutional Neural Network (CNN) that reduces the number of parameters and the amount of computation by reducing the spatial size (i.e., downsampling) of the data, while preserving important characteristic information. The basic idea of the averaging pooling operation is to calculate the average of all values in a particular region (e.g. 2x 2,3 x 3, etc.), and take this average as the new value for that region. As shown in fig. 8, the point cloud data filtered by the optical filtering and algorithm can be processed by an average pooling algorithm, wherein the average value of the data in 3*3 sets is used to represent the defocus amount of the area, and for a specific area (pooling window) of the point cloud data in the effective area of fig. 7, the average value of all elements in the area is calculated, and then the average value is used to represent the whole area; the process can be performed in a sliding manner on all positions of the point cloud data subjected to optical filtering and algorithm screening to generate an output result, so that passivated data is more beneficial to closed-loop adjustment of a subsequent laser processing execution end. The array size can be adjusted according to actual requirements. The accuracy of defocus detection is further improved through the average pooling operation.
Referring to fig. 9, fig. 9 is a schematic functional block diagram of a defocus amount detection apparatus according to an embodiment of the present application, where the apparatus includes:
the dynamic scanning module 210 is configured to dynamically scan the laser dynamic surface on the surface of the object to be detected;
An optical filtering module 220, configured to optically filter the line laser reflected by the surface of the object to be detected;
And the defocus amount detection module 230 is used for performing data processing on the optically filtered line laser to obtain defocus amount of the surface curvature of the object to be detected.
Alternatively, the dynamic scanning module 210 may be configured to:
converting point laser emitted by an emission source into line laser;
and adjusting the angle of the line laser reflected to the surface of the object to be detected so as to dynamically scan the dynamic surface of the laser line on the surface of the object to be detected.
Alternatively, the dynamic scanning module 210 may be configured to:
Transmitting point laser by adopting a point laser transmitter, wherein the point laser is converted into line laser through a cylindrical scattering mirror and a collimating mirror;
And adjusting the angle of a reflecting prism in front of the surface of the object to be detected through a micro scanning motor so as to adjust the angle reflected to the surface of the object to be detected.
Alternatively, the optical filter module 220 may be configured to:
Performing wavelength screening on the line laser reflected by the surface of the object to be detected;
and carrying out directional screening on the line laser subjected to wavelength screening to obtain polarized light which can reach the surface of the object to be detected through primary reflection.
Alternatively, the optical filter module 220 may be configured to:
The line laser reflected by the surface of the object to be detected is subjected to wavelength screening by adopting a film-coated filter;
and (3) carrying out directional screening on the line laser after wavelength screening by adopting a polarizer embedded with a cross grating.
Alternatively, the optical filter module 220 may be configured to:
Receiving the optically filtered line laser by using an area array photosensitive element;
converting the line laser into a component analog voltage signal based on the monochromatic light component intensity of the reflected light;
Converting the component analog voltage signal into a component digital signal;
And carrying out reflected light color screening and reflected light intensity screening on the component digital signals, and carrying out defocusing amount conversion according to a preset relation to obtain the defocusing amount of the surface curvature of the object to be detected.
Alternatively, the defocus amount detection module 230 may be configured to:
And carrying out average pooling on the component digital signals according to a preset multidimensional array.
Referring to fig. 10, fig. 10 is a block schematic diagram of an electronic device. The electronic device 300 may include a memory 311, a memory controller 312, a processor 313, a peripheral interface 314, an input output unit 315, a display unit 316. It will be appreciated by those of ordinary skill in the art that the configuration shown in fig. 10 is merely illustrative and is not intended to limit the configuration of the electronic device 300. For example, electronic device 300 may also include more or fewer components than shown in FIG. 10, or have a different configuration than shown in FIG. 10.
The above-mentioned memory 311, memory controller 312, processor 313, peripheral interface 314, input/output unit 315, and display unit 316 are electrically connected directly or indirectly to each other to realize data transmission or interaction. For example, the components may be electrically connected to each other via one or more communication buses or signal lines. The processor 313 is used to execute executable modules stored in the memory.
The Memory 311 may be, but is not limited to, a random access Memory (Random Access Memory, RAM), a Read Only Memory (ROM), a programmable Read Only Memory (Programmable Read-Only Memory, PROM), an erasable Read Only Memory (Erasable Programmable Read-Only Memory, EPROM), an electrically erasable Read Only Memory (Electric Erasable Programmable Read-Only Memory, EEPROM), etc. The memory 311 is configured to store a program, and the processor 313 executes the program after receiving an execution instruction, and a method executed by the electronic device 300 defined by the process disclosed in any embodiment of the present application may be applied to the processor 313 or implemented by the processor 313.
The processor 313 may be an integrated circuit chip having signal processing capabilities. The processor 313 may be a general-purpose processor, including a central processing unit (Central Processing Unit, CPU for short), a network processor (Network Processor, NP for short), and the like; but may also be a digital signal processor (DIGITAL SIGNAL processor, DSP for short), application SPECIFIC INTEGRATED Circuit (ASIC for short), field Programmable Gate Array (FPGA) or other programmable logic device, discrete gate or transistor logic device, discrete hardware components. The disclosed methods, steps, and logic blocks in the embodiments of the present application may be implemented or performed. A general purpose processor may be a microprocessor or the processor may be any conventional processor or the like.
The peripheral interface 314 couples various input/output devices to the processor 313 and the memory 311. In some embodiments, the peripheral interface 314, the processor 313, and the memory controller 312 may be implemented in a single chip. In other examples, they may be implemented by separate chips.
The input/output unit 315 is used for providing input data to a user. The input/output unit 315 may be, but is not limited to, a mouse, a keyboard, and the like.
The display unit 316 provides an interactive interface (e.g., a user interface) between the electronic device 300 and a user for reference. In this embodiment, the display unit 316 may be a liquid crystal display or a touch display. The liquid crystal display or the touch display may display a process of executing the program by the processor.
The electronic device 300 in this embodiment may be used to perform each step in each method provided in the embodiment of the present application.
Furthermore, the embodiment of the application also provides a storage medium, and a computer program is stored on the storage medium, and the computer program executes the steps in the embodiment of the method when being executed by a processor.
The computer program product of the above method according to the embodiment of the present application includes a storage medium storing program codes, where the instructions included in the program codes may be used to execute the steps in the above method embodiment, and specifically, reference may be made to the above method embodiment, which is not repeated herein.
In the embodiments provided in the present application, it should be understood that the disclosed apparatus and method may be implemented in other manners. The above-described apparatus embodiments are merely illustrative, and the division of the modules is merely a logical function division, and there may be additional divisions when actually implemented, and for example, multiple units or components may be combined or integrated into another system, or some features may be omitted or not performed. Alternatively, the coupling or direct coupling or communication connection shown or discussed with each other may be through some communication interface, device or unit indirect coupling or communication connection, which may be in electrical, mechanical or other form. The functional modules in the embodiment of the application can be integrated together to form a single part, or each module can exist alone, or two or more modules can be integrated to form a single part.
It should be noted that the functions, if implemented in the form of software functional modules and sold or used as a stand-alone product, may be stored in a computer-readable storage medium. Based on this understanding, the technical solution of the present application may be embodied essentially or in a part contributing to the prior art or in a part of the technical solution, in the form of a software product stored in a storage medium, comprising several instructions for causing a computer device (which may be a personal computer, a server, a network device, etc.) to perform all or part of the steps of the method according to the embodiments of the present application. And the aforementioned storage medium includes: a U-disk, a removable hard disk, a Read-Only Memory (ROM) random access Memory (Random Access Memory, RAM), a magnetic disk, or an optical disk, or other various media capable of storing program codes.
In this document, relational terms such as first and second, and the like may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions.
The above description is only an example of the present application and is not intended to limit the scope of the present application, and various modifications and variations will be apparent to those skilled in the art. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application should be included in the protection scope of the present application.

Claims (9)

1. A defocus amount detection method, the method comprising:
carrying out dynamic scanning of a laser dynamic surface on the surface of the object to be detected;
Carrying out optical filtration on the line laser reflected by the surface of the object to be detected;
Performing data processing on the optically filtered line laser to obtain the defocus of the surface curvature of the object to be detected;
the data processing is performed on the line laser after optical filtering to obtain the defocus amount of the surface curvature of the object to be detected, including:
Receiving the optically filtered line laser by using an area array photosensitive element; converting the line laser into a component analog voltage signal based on the monochromatic light component intensity of the reflected light; converting the component analog voltage signal into a component digital signal; and carrying out reflected light color screening and reflected light intensity screening on the component digital signals, and carrying out defocusing amount conversion according to a preset relation to obtain the defocusing amount of the surface curvature of the object to be detected.
2. The method of claim 1, wherein the dynamically scanning the laser active surface of the object to be inspected comprises:
converting point laser emitted by an emission source into line laser;
and adjusting the angle of the line laser reflected to the surface of the object to be detected so as to dynamically scan the dynamic surface of the laser line on the surface of the object to be detected.
3. The method of claim 2, wherein the dynamic scanning of the laser active surface of the object to be inspected further comprises:
Transmitting point laser by adopting a point laser transmitter, wherein the point laser is converted into line laser through a cylindrical scattering mirror and a collimating mirror;
And adjusting the angle of a reflecting prism in front of the surface of the object to be detected through a micro scanning motor so as to adjust the angle reflected to the surface of the object to be detected.
4. The method of claim 1, wherein optically filtering the line laser light reflected from the surface of the object to be inspected comprises:
Performing wavelength screening on the line laser reflected by the surface of the object to be detected;
and carrying out directional screening on the line laser subjected to wavelength screening to obtain polarized light which can reach the surface of the object to be detected through primary reflection.
5. The method of claim 4, wherein the optically filtering the line laser light reflected from the surface of the object to be inspected further comprises:
The line laser reflected by the surface of the object to be detected is subjected to wavelength screening by adopting a film-coated filter;
and (3) carrying out directional screening on the line laser after wavelength screening by adopting a polarizer embedded with a cross grating.
6. The method according to claim 1, wherein after the filtering of the reflected light color and the reflected light intensity of the component digital signal, the data processing is performed on the optically filtered line laser to obtain the defocus amount of the surface curvature of the object to be detected, further comprising:
And carrying out average pooling on the component digital signals according to a preset multidimensional array.
7. A defocus amount detection apparatus, comprising:
The dynamic scanning module is used for dynamically scanning the laser dynamic surface of the object to be detected;
the optical filtering module is used for optically filtering the line laser reflected by the surface of the object to be detected;
The defocus amount detection module is used for carrying out data processing on the optically filtered line laser to obtain defocus amount of the surface curvature of the object to be detected; the defocus amount detection module is specifically used for: receiving the optically filtered line laser by using an area array photosensitive element; converting the line laser into a component analog voltage signal based on the monochromatic light component intensity of the reflected light; converting the component analog voltage signal into a component digital signal; and carrying out reflected light color screening and reflected light intensity screening on the component digital signals, and carrying out defocusing amount conversion according to a preset relation to obtain the defocusing amount of the surface curvature of the object to be detected.
8. An electronic device, comprising: a processor, a memory storing machine-readable instructions executable by the processor, which when executed by the processor perform the steps of the method of any of claims 1 to 6 when the electronic device is run.
9. A storage medium having stored thereon a computer program which, when executed by a processor, performs the steps of the method according to any of claims 1 to 6.
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Publication number Priority date Publication date Assignee Title
CN102889980A (en) * 2012-10-15 2013-01-23 中国科学院光电技术研究所 Microlens fixed-focus detection method based on grating shearing interference detection system
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CN117007286A (en) * 2022-04-27 2023-11-07 上海微电子装备(集团)股份有限公司 Focal plane measuring device

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102889980A (en) * 2012-10-15 2013-01-23 中国科学院光电技术研究所 Microlens fixed-focus detection method based on grating shearing interference detection system
CN107621356A (en) * 2017-10-31 2018-01-23 中国科学院苏州生物医学工程技术研究所 A kind of microscope focal shift measuring apparatus
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