CN118064843B - Double-mirror surface dissimilar material evaporation device - Google Patents
Double-mirror surface dissimilar material evaporation device Download PDFInfo
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- CN118064843B CN118064843B CN202410496873.XA CN202410496873A CN118064843B CN 118064843 B CN118064843 B CN 118064843B CN 202410496873 A CN202410496873 A CN 202410496873A CN 118064843 B CN118064843 B CN 118064843B
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- 238000001704 evaporation Methods 0.000 title claims abstract description 98
- 230000008020 evaporation Effects 0.000 title claims abstract description 89
- 239000000463 material Substances 0.000 title claims abstract description 46
- 238000000926 separation method Methods 0.000 claims abstract description 53
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 43
- 239000000741 silica gel Substances 0.000 claims description 43
- 229910002027 silica gel Inorganic materials 0.000 claims description 43
- 239000000758 substrate Substances 0.000 claims description 35
- 239000010410 layer Substances 0.000 claims description 32
- 238000000034 method Methods 0.000 claims description 21
- 230000008569 process Effects 0.000 claims description 16
- 239000007788 liquid Substances 0.000 claims description 15
- 238000005192 partition Methods 0.000 claims description 13
- 230000008859 change Effects 0.000 claims description 12
- 238000001802 infusion Methods 0.000 claims description 12
- 230000007246 mechanism Effects 0.000 claims description 10
- 239000000725 suspension Substances 0.000 claims description 10
- 230000005540 biological transmission Effects 0.000 claims description 9
- 239000011247 coating layer Substances 0.000 claims description 6
- 238000003825 pressing Methods 0.000 claims description 4
- 238000011217 control strategy Methods 0.000 claims 1
- 230000000149 penetrating effect Effects 0.000 claims 1
- 238000007738 vacuum evaporation Methods 0.000 abstract description 4
- 238000007747 plating Methods 0.000 description 33
- 238000007740 vapor deposition Methods 0.000 description 31
- 239000011248 coating agent Substances 0.000 description 10
- 238000000576 coating method Methods 0.000 description 10
- 230000009471 action Effects 0.000 description 8
- 210000001503 joint Anatomy 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- 238000005086 pumping Methods 0.000 description 3
- 239000007787 solid Substances 0.000 description 3
- 230000000903 blocking effect Effects 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 238000012546 transfer Methods 0.000 description 2
- 230000007306 turnover Effects 0.000 description 2
- 238000005019 vapor deposition process Methods 0.000 description 2
- 239000004677 Nylon Substances 0.000 description 1
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- 238000007906 compression Methods 0.000 description 1
- 238000009833 condensation Methods 0.000 description 1
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- 239000002184 metal Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
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- 238000012545 processing Methods 0.000 description 1
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Abstract
The invention discloses a double-mirror surface dissimilar material evaporation device, which relates to the field of vacuum evaporation equipment and comprises an evaporation device shell, wherein two crucibles for containing evaporation materials are arranged at the bottom of the inner side of the evaporation device shell, a concave arc jacking block is arranged between the two crucibles, the concave arc jacking block is fixedly connected with the evaporation device shell, the upper part of the evaporation device shell is in an arc jacking shape, and a separation component is arranged in the evaporation device shell.
Description
Technical Field
The invention relates to the field of vacuum evaporation equipment, in particular to a double-mirror dissimilar material evaporation device.
Background
In the vacuum evaporation, a plating material is heated to an evaporation state in a vacuum environment, steam flow formed by the plating material is incident on the surface of a substrate and is condensed to form a solid film, the current common vacuum evaporation mode is resistance heating evaporation, the solid plating material is placed in a crucible, and the crucible is heated through a resistance wire, so that the solid plating material is liquefied and evaporated. The vapor deposition of the substrate can be performed only after the vapor deposition of one surface of the substrate is completed, and then the vapor deposition of the other surface is performed. In order to ensure the speed of the substrate evaporation process, a structure capable of rotating and suspending the substrate is generally designed in the evaporation device, namely, after one surface of the substrate is evaporated, the substrate is directly driven to turn over in the evaporation device, so that the other surface of the substrate can be evaporated.
However, when the conventional vapor deposition device performs vapor deposition operation, vapor deposition processing of the same material can be performed on the substrate, if plating layers of different materials are required to be deposited on two end surfaces of the substrate (such as a wafer, a lens, a nylon plate, a resin plate, a metal plate and the like), the conventional vapor deposition device cannot perform vapor deposition of different material plating layers on two end surfaces of the substrate in the same vapor deposition process, and can only turn over the substrate after vapor deposition of one end surface of the substrate is completed, and then open the vapor deposition device to replace plating materials in a crucible, so that different materials can be deposited on the other end surface of the substrate.
Disclosure of Invention
The present invention is directed to a dual-mirror heterogeneous material vapor deposition device, which solves the problem that the conventional vapor deposition device proposed in the prior art cannot perform heterogeneous material vapor deposition on two mirrors of a substrate in a single vapor deposition process.
In order to achieve the above purpose, the present invention provides the following technical solutions: the utility model provides a two mirror abnormal material evaporation plating device, includes evaporation plating device casing, two crucibles that are used for holding evaporation plating material are settled to evaporation plating device casing's inboard bottom, two be provided with concave arc top support piece between the crucible, just concave arc top support piece with evaporation plating device casing is fixed connection, evaporation plating device casing's upper portion is circular arc top form, just evaporation plating device casing's inside is provided with the separation subassembly, the separation subassembly is used for separating the evaporation plating material of two crucibles;
the device also comprises a hanging unit, wherein the hanging unit is used for hanging two groups of substrates above the two crucibles respectively, and the hanging unit is arranged on the separation assembly;
The driving unit is used for driving the separation assembly to carry the suspension unit to carry out position adjustment, and the driving unit is arranged between the evaporation device shell and the separation assembly.
Preferably, the separation assembly comprises a first separation plate and a second separation plate, the first separation plate and the second separation plate are intersected and distributed in a perpendicular-to-center mode, the first separation plate and the second separation plate are fixedly connected, and form a cross structure, an extension cylinder column is fixedly installed on the front end face and the rear end face of the cross structure, the extension cylinder column rotates and penetrates through the evaporation device shell, silica gel wrapping layers are wrapped on the front end face, the rear end face, the upper end face, the lower end face, the left end face and the right end face of the cross structure, the intersection point of the extension cylinder column and the evaporation device shell is the center of an arc top of the evaporation device shell, the upper end cambered surface of the concave arc top supporting block is concentric with the arc top of the evaporation device shell, the first separation plate is transversely placed, the second separation plate is longitudinally placed, holes are not formed in the surface of the second separation plate, when the end face of the cross structure is in contact with the inner wall of the evaporation device shell and the concave arc top supporting block through the silica gel wrapping layers, the second separation plate can enable the inner part of the evaporation device shell to be a left cavity and a right cavity, and two inflating cylinders to be assembled inside the inflating cylinders respectively, and the inflating cylinders are arranged inside the inflating cylinders respectively.
Preferably, the hanging unit comprises two cavities which are arranged inside the first partition plate and are distributed alternately and oppositely, each cavity is internally provided with a rotary table in a rotary manner, two end faces of the rotary table are extended out of the first partition plate, an umbrella-shaped retainer is arranged on an internal fixing frame of the rotary table, a plurality of rotary sleeves which are distributed circumferentially and equidistantly are rotationally arranged inside the umbrella-shaped retainer, the rotary table is internally provided with placing notches, the number of the placing notches is consistent with that of the rotary sleeves, each placing notch is concentric with a plurality of the rotary sleeves respectively, the rotary sleeve is internally provided with a plurality of arc-shaped notches which are distributed circumferentially and equidistantly, and each placing notch is provided with straight notches with the same number, a clamping mechanism is arranged between the rotary sleeve and the straight notches, namely the rotary table can rotate inside the first partition plate, the rotary sleeve can rotate inside the rotary table, and the center of the rotary sleeve is hollow and concentric with the straight notches.
Preferably, the fixture includes sliding cartridge in each the inside locating lever of arc notch, just the both ends portion of locating lever still correspond the slip inlay in the inside of straight notch, every the locating hole has all been seted up to the tip of locating lever, just every the inside fixed stay bar that is provided with the locating hole gomphosis of straight notch, the locating lever is close to the one end fixed mounting of change cover centre of a circle has the sleeve, just telescopic inside transversely slides and is equipped with the push rod, the push rod stretches into the inside one end of sleeve with fixedly between the sleeve is provided with the second spring, just the other end of push rod is fixed and is provided with the spliced pole, every change the cover with all be provided with elastic pressure applying part between the umbrella-shaped holder, when changeing the cover rotatory, limit in time to the locating lever through arc notch and straight notch to the locating lever to and the spacing of stay bar to the locating hole can let the locating lever take the spliced pole to move towards the center of change the cover.
Preferably, the elastic pressing component comprises a right-angle shifting block fixedly installed on the outer wall of each rotating sleeve, one end of the right-angle shifting block, which is far away from the rotating sleeve, penetrates through the first partition plate, an arc-shaped sliding rod is fixedly installed on the side wall of the right-angle shifting block, the arc circle center of the arc-shaped sliding rod coincides with the circle center of the rotating sleeve, one end of the arc-shaped sliding rod, which is far away from the right-angle shifting block, is inserted into the umbrella-shaped retainer in a sliding manner, a first spring is sleeved on the outer surface of the arc-shaped sliding rod, and two ends of the first spring are respectively fixed with the right-angle shifting block and the umbrella-shaped retainer, namely, under the action of the first spring, a plurality of clamping columns are in an extending state, and when the positions of the rotating sleeves are deflected by the right-angle shifting block, the clamping columns can be opened.
Preferably, the driving unit comprises a driving motor fixedly installed on the outer wall of the evaporation device shell, a second gear is fixedly installed at the output end of the driving motor, a third gear which is movably meshed with the second gear is sleeved on the outer wall of one extension cylinder column, a bump is fixedly arranged on the outer surface of the extension cylinder column, and two clamping blocks for limiting the deflection angle of the bump are fixedly installed on the outer wall of the evaporation device shell;
The deflection angle of the extension cylinder is a, the limiting range of the two clamping blocks to the extension cylinder and the lug is more than or equal to 0 and less than or equal to 180 degrees, the deflection angle of the extension cylinder is limited by the cross structure, and if the deflection angle exceeds 180 degrees, the airflows of the two chambers are communicated;
the third gear is rotatably sleeved outside the extension cylinder column, and a transmission mechanism is arranged between the third gear and the two turntables.
Preferably, the transmission mechanism comprises a worm which rotates and penetrates through the two cavities and the two extending cylinder columns, two worm groove parts of the worm are respectively located at two positions, the two worm groove parts are respectively located at the inner sides of the two cavities, a worm wheel is rotatably arranged in each cavity, the worm wheel is meshed with the worm in a transmission mode, a toothed ring is fixedly sleeved on the outer surface of each rotating sleeve, two first gears which are meshed with each other are arranged between the worm wheel and the toothed ring, one first gear is concentrically and fixedly arranged at the top of the worm wheel, the other first gear is movably meshed with the toothed ring, the first gears which are not fixed with the worm wheel are rotatably assembled with the cavities, a fixing frame is fixedly arranged between the end part of the worm and the third gear, a clamping part is arranged between the third gear and the extending cylinder columns, the two cavities are separated, and the worm groove of the worm is also located in the inner parts of the cavities, namely, the two cavities are not in the vapor deposition operation under the blocking of the second partition plate.
Preferably, the clamping component comprises a plurality of concave arc grooves which are formed in the outer surface of the extension cylinder and distributed at equal intervals in circumference, a plurality of positioning pins which are distributed at equal intervals in circumference are embedded in the third gear in a sliding mode, the dome portion of each positioning pin movably extends out of the third gear, a third spring is fixedly arranged between one end, away from the extension cylinder, of each positioning pin and the third gear, the positioning pins are movably embedded with the concave arc grooves, and when the extension cylinder is clamped, the second gear can drive the third gear and the worm to idle in the inner portion and the outer portion of the extension cylinder.
Preferably, the inside of the evaporation device shell is fixedly provided with two heat conduction frame bodies, the two heat conduction frame bodies are respectively sleeved on the outer surfaces of the two crucibles, the inside of each heat conduction frame body is fixedly provided with a liquid storage cylinder, the inside of the extending cylinder column is hollow, the inside of the silica gel wrapping layer is uniformly distributed with an infusion runner, the head end and the tail end of the infusion runner are communicated with the inside of the extending cylinder column, and a conveying pipe is arranged between each liquid storage cylinder and the end of one of the extending cylinder columns;
the method for evaporating by the evaporating device comprises the following steps:
s1, conveying a medium in a liquid storage cylinder into an infusion flow passage of a silica gel coating layer through a conveying pipe by using heat of a crucible, and recording volume change of the silica gel coating layer;
s2, when the volume of the silica gel coating expands to a preset critical value, recording the change of the heat value Q of the heat conduction frame along with time and comparing with a preset heat threshold value:
S4, when the heat quantity value Q exceeds a preset heat quantity threshold range, a pressure relief module is arranged at one end of the extension cylinder far away from the conveying pipe, and pressure relief treatment is carried out on the silica gel coating layer, and a regulation strategy is obtained;
s4, starting a driving unit according to analysis and regulation strategy results, and driving the separation assembly to carry out position rotation adjustment with the suspension unit.
The regulation strategy and the analysis process thereof comprise the following steps:
Recording the pressure of the infusion flow passage through the pressure relief module Size and expansion volume of silica gel coating layer/>；
By the formulaCalculate the balance coefficient/>Wherein/>Starting time for pressure relief of pressure relief module,/>The time consumed for the whole process of pressure relief is completed; /(I)Is the standard expansion volume; /(I)、/>Are all preset weight coefficients, and/>、/>Are all greater than 0;
will balance coefficient And a preset balance coefficient threshold value/>And (3) performing comparison:
When (when) ∈/>When the silica gel coating is in the equilibrium state, the silica gel coating is in the vapor deposition state at present;
When (when) ＞/>When the silica gel coating is in an expanded state, the pressure relief treatment is carried out;
When (when) ＜/>And when the driving unit is started, judging that the silica gel wrapping layer is in a contracted state.
Compared with the prior art, the invention has the beneficial effects that:
According to the invention, the inside of the shell of the vapor deposition device is divided into two independent vapor deposition chambers through the separation component, and the two independent vapor deposition chambers are matched with the action of the suspension unit and the driving unit, so that after one surface of a substrate in the two independent vapor deposition chambers is subjected to vapor deposition, the position of the substrate in the suspension unit can be directly changed between the two independent vapor deposition chambers, and compared with the prior art, the substrate after the position is changed is subjected to overturning treatment, namely the other surface of the substrate can be directly subjected to vapor deposition.
Drawings
FIG. 1 is a schematic diagram of the overall structure of the present invention;
FIG. 2 is a schematic diagram of a driving motor according to the present invention;
FIG. 3 is a schematic view of the internal structure of the cavity of the present invention;
FIG. 4 is a schematic view of the internal structure of the turntable according to the present invention;
FIG. 5 is a schematic view of the sleeve and clamp column structure of the present invention;
FIG. 6 is a schematic diagram showing the distribution structure of the worm in two cavities;
FIG. 7 is an enlarged view of FIG. 6A in accordance with the present invention;
FIG. 8 is a schematic view of the bump and latch structure of the present invention;
FIG. 9 is a schematic view of the structure of the concave arc slot and the locating pin of the present invention;
FIG. 10 is a schematic view of the structure of the heat transfer frame, the liquid storage cylinder and the conveying pipe of the present invention.
In the figure: 1. a vapor deposition device housing; 2. a first partition plate; 3. a second partition plate; 4. a concave arc jacking block; 5. a crucible; 6. pumping and inflating the butt joint barrel; 7. a silica gel wrapping layer; 8. a worm; 9. a cavity; 10. a turntable; 11. umbrella-shaped retainer; 12. a rotating sleeve; 13. an arc-shaped notch; 14. a straight slot; 15. a right angle shifting block; 16. an arc slide bar; 17. a first spring; 18. a positioning rod; 19. a sleeve; 20. a push rod; 21. a second spring; 22. a clamping column; 23. positioning holes; 24. a toothed ring; 25. a worm wheel; 26. a first gear; 27. an extension cylinder; 28. a bump; 29. a clamping block; 30. a driving motor; 31. a second gear; 32. a third gear; 33. a fixing frame; 34. a concave arc groove; 35. a positioning pin; 36. a third spring; 37. a thermally conductive frame; 38. a liquid storage cylinder; 39. a conveying pipe.
Detailed Description
The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
Example 1: referring to fig. 1-5, the dual-mirror heterogeneous material evaporation device in the drawings comprises an evaporation device shell 1, wherein two crucibles 5 for containing evaporation materials are arranged at the bottom of the inner side of the evaporation device shell 1, a concave arc jacking block 4 is arranged between the two crucibles 5, the concave arc jacking block 4 is fixedly connected with the evaporation device shell 1, the upper part of the evaporation device shell 1 is in a circular arc jacking shape, a separation component is arranged in the evaporation device shell 1, and the separation component is used for separating the evaporation materials of the two crucibles 5;
the device also comprises a hanging unit, a separation assembly and a control unit, wherein the hanging unit is used for hanging two groups of substrates above the two crucibles 5 respectively;
And the driving unit is used for driving the separation assembly to carry the suspension unit to adjust the position, and is arranged between the evaporation device shell 1 and the separation assembly.
The separation assembly comprises a first separation plate 2 and a second separation plate 3, the first separation plate 2 and the second separation plate 3 are mutually distributed in a perpendicular bisector manner, the first separation plate 2 and the second separation plate 3 are fixedly connected, a cross structure is formed by the first separation plate 2 and the second separation plate 3, an extension cylinder column 27 is fixedly installed on the front end face and the rear end face of the cross structure, the extension cylinder column 27 rotates to penetrate through the evaporation device shell 1, silica gel wrapping layers 7 are wrapped on the front end face, the rear end face, the upper end face, the lower end face, the left end face and the right end face of the cross structure, the intersection point of the extension cylinder column 27 and the evaporation device shell 1 is the center of an arc top of the evaporation device shell 1, the upper end cambered surface of a concave arc top supporting block 4 is concentric with the arc top of the evaporation device shell 1, the first separation plate 2 is transversely placed, the second separation plate 3 is longitudinally placed, and holes are not formed on the surface of the second separation plate 3.
The hanging unit comprises two cavities 9 which are arranged inside the first partition plate 2 and are distributed alternately and oppositely, a turntable 10 is rotationally embedded in the inner part of each cavity 9, the first partition plate 2 extends out of two end faces of the turntable 10, an umbrella-shaped retainer 11 is arranged on an inner fixing frame of the turntable 10, a plurality of rotating sleeves 12 which are distributed circumferentially and equidistantly are rotationally assembled in the umbrella-shaped retainer 11, placing notches are further formed in the inner part of the turntable 10, the number of the placing notches is consistent with that of the rotating sleeves 12, each placing notch is concentric with the corresponding rotating sleeve 12, a plurality of arc-shaped notches 13 which are distributed circumferentially and equidistantly are formed in the rotating sleeve 12, straight notches 14 which are equal to the arc-shaped notches 13 are formed in the periphery of each placing notch, a clamping mechanism is arranged between the rotating sleeve 12 and the straight notches 14, namely the turntable 10 can rotate in the inner part of the first partition plate 2, the rotating sleeve 12 can rotate in the inner part of the turntable 10, and the center of the rotating sleeve 12 is hollow and is concentric with the straight notches 14.
The fixture comprises a positioning rod 18 which is inserted into each arc-shaped notch 13 in a sliding manner, two ends of the positioning rod 18 are correspondingly and slidably embedded into the straight notch 14, a positioning hole 23 is formed in each end of each positioning rod 18, a limiting rod which is embedded with the positioning hole 23 is fixedly arranged in each straight notch 14, a sleeve 19 is fixedly arranged at one end, close to the center of the rotating sleeve 12, of the positioning rod 18, a push rod 20 is transversely and slidably arranged in the sleeve 19, a second spring 21 is fixedly arranged between one end, extending into the sleeve 19, of the push rod 20 and the sleeve 19, a clamping column 22 is fixedly arranged at the other end of the push rod 20, an elastic pressing part is arranged between each rotating sleeve 12 and the umbrella-shaped retainer 11, and when the rotating sleeve 12 rotates, the positioning rod 18 is limited through the arc-shaped notch 13 and the straight notch 14 and the positioning rod 18, and the limiting rod is limited to the positioning hole 23, so that the positioning rod 18 can move towards the center of the rotating sleeve 12 with the clamping column 22.
The elastic pressing component comprises right-angle shifting blocks 15 fixedly arranged on the outer wall of each rotating sleeve 12, one ends of the right-angle shifting blocks 15 far away from the rotating sleeves 12 movably penetrate through the first separation plate 2, arc-shaped sliding rods 16 are fixedly arranged on the side walls of the right-angle shifting blocks 15, arc circle centers of the arc-shaped sliding rods 16 coincide with the circle centers of the rotating sleeves 12, one ends of the arc-shaped sliding rods 16 far away from the right-angle shifting blocks 15 are slidably inserted into the umbrella-shaped retainer 11, first springs 17 are sleeved on the outer surfaces of the arc-shaped sliding rods 16, two ends of the first springs 17 are respectively fixed with the right-angle shifting blocks 15 and the umbrella-shaped retainer 11, namely, under the action of the first springs 17, a plurality of clamping columns 22 are in an extending state, and when the positions of the rotating sleeves 12 are deflected through the right-angle shifting blocks 15, the clamping columns 22 can be opened.
The driving unit comprises a driving motor 30 fixedly arranged on the outer wall of the evaporation device shell 1, a second gear 31 is fixedly arranged at the output end of the driving motor 30, a third gear 32 which is movably meshed with the second gear 31 is sleeved on the outer wall of one extension cylinder column 27, a bump 28 is fixedly arranged on the outer surface of the extension cylinder column 27, and two clamping blocks 29 which limit the deflection angle of the bump 28 are fixedly arranged on the outer wall of the evaporation device shell 1;
The deflection angle of the extension cylinder column 27 is a, the limiting range of the two clamping blocks 29 to the extension cylinder column 27 and the protruding blocks 28 is 0-180 degrees, the deflection angle of the extension cylinder column 27 is limited by the cross structure, and if the deflection angle exceeds 180 degrees, the airflows of the two chambers are communicated.
The working principle of evaporating different materials on two mirror surfaces of a substrate in an evaporation device is as follows:
Firstly, assembling a substrate needing to be coated, enabling a worker to deflect a rotary sleeve 12 through pushing a right-angle shifting block 15, enabling a plurality of positioning rods 18 to be unfolded through limiting of an arc notch 13 and a straight notch 14 in the deflection process, enabling a plurality of clamping columns 22 to be unfolded, placing the substrate at a central hole of the rotary sleeve 12 at the moment, slowly releasing the right-angle shifting block 15, enabling the rotary sleeve 12 to elastically reset under the action of a first spring 17, enabling the rotary sleeve 12 to be in contact with a plurality of parts of the outer wall of the substrate in the resetting process and clamping the rotary sleeve through the clamping columns 22, and adjusting the extension condition of the clamping columns 22 through different compression degrees of a second spring 21 in the clamping process of the clamping columns 22, so as to ensure stable clamping of the substrate, after the substrate needing to be coated is assembled in two rotary discs 10, enabling the worker to respectively add two different coating materials needing to be coated into the interior of two crucibles 5, then enabling a vapor deposition device shell 1 to be in a butt joint mode, and enabling the interior of the two crucibles to be independently heated and a vacuum-evaporated and a vacuum chamber to be in the interior of the two crucibles 5 to be in the vacuum chamber, and enabling the interior of the two crucibles to be independently heated by the vacuum chamber to be in the vacuum chamber;
After the evaporation plating is completed on the lower end face of the substrate in the two independent evaporation plating chambers, a worker inflates the inside through the pumping butt joint cylinder 6, high temperature caused by evaporation plating materials in the independent evaporation plating chambers can be relieved after the pumping butt joint cylinder is inflated, steam flow in the independent evaporation plating chambers is scattered before after the temperature in the independent evaporation plating chambers is reduced, rapid condensation can be achieved, the cross structure can be rotated 180 degrees through the driving motor 30, the positions of the two first separation plates 2 after rotation are replaced, after the position replacement is carried out, the substrate is equivalent to being turned over once, the surface of the plating layer is not turned down before, at the moment, the inside of the two independent evaporation plating chambers is vacuumized again, the crucible 5 is heated, different plating layers can be evaporated on the other end face of the substrate, and therefore, in the process of installing and evaporating the substrate again, two mirror surfaces of the substrate are made of different materials simultaneously, and in the process, as the two independent evaporation plating chambers are relatively closed, confusion of evaporation plating materials cannot be caused.
Example 2: referring to fig. 6-9, in this embodiment, for further description of embodiment 1, the third gear 32 is rotatably sleeved on the outside of the extension cylinder 27, and a transmission mechanism is disposed between the third gear 32 and both turntables 10.
The transmission mechanism comprises a worm 8 which rotates to penetrate through two cavities 9 and two extension cylinder columns 27, two worm groove parts of the worm 8 are respectively located at two positions, the two worm groove parts are respectively located at the inner sides of the two cavities 9, a worm wheel 25 is rotatably arranged in each cavity 9, the worm wheel 25 is meshed with the worm 8 in a transmission mode, a toothed ring 24 is fixedly sleeved on the outer surface of each rotary sleeve 12, two first gears 26 meshed with the toothed ring 24 are assembled between the worm wheel 25 and the toothed ring 24, one first gear 26 is concentrically and fixedly arranged at the top of the worm wheel 25, the other first gear 26 is movably meshed with the toothed ring 24, the first gears 26 which are not fixedly meshed with the worm wheel 25 are rotatably assembled with the cavities 9, a fixing frame 33 is fixedly arranged between the end part of the worm 8 and a third gear 32, a clamping part is arranged between the third gear 32 and the extension cylinder columns 27, the two cavities 9 are separated, the worm groove parts of the worm 8 are located in the cavities 9, namely, and air flows of the two cavities cannot circulate in evaporation work under the blocking of the second partition plate 3.
The clamping component comprises a plurality of concave arc grooves 34 which are formed in the outer surface of the extension cylinder column 27 and distributed at equal intervals in circumference, a plurality of positioning pins 35 which are distributed at equal intervals in circumference are slidably embedded in the third gear 32, the dome parts of the positioning pins 35 movably extend out of the third gear 32, a third spring 36 is fixedly arranged between one end, away from the extension cylinder column 27, of the positioning pins 35 and the third gear 32, the positioning pins 35 are movably embedded in the concave arc grooves 34, and after the extension cylinder column 27 is clamped and fixed, the second gear 31 can drive the third gear 32 and the worm 8 to idle in the inner and outer parts of the extension cylinder column 27.
In this embodiment: the driving motor 30 can rotate the extension cylinder column 27 anticlockwise or clockwise by 180 degrees through the engagement of the second gear 31 and the third gear 32, and after the position adjustment of the extension cylinder column 27 is completed each time, the driving motor 30 can still continuously drive the third gear 32, and due to the clamping of the extension cylinder column 27, the positioning pin 35 can be pushed into the third gear 32 by the rotating force formed between the third gear 32 and the extension cylinder column 27, at the moment, the third gear 32 can idle with the worm 8 through the fixing frame 33, and the rotation of the worm 8 can rotate in the first partition plate 2 through the action of the worm wheel 25 and the first gear 26, so that the substrate can change in position along with the rotation of the turntable 10 in the evaporation process, and the uniformity of evaporation is ensured.
Example 3: referring to fig. 10, in this embodiment for further explanation of embodiments 1 and 2, two heat conduction frames 37 are fixedly installed inside the vapor deposition device housing 1, the two heat conduction frames 37 are respectively sleeved on the outer surfaces of the two crucibles 5, a liquid storage tube 38 is fixedly installed inside each heat conduction frame 37, the inside of the extending tube column 27 is hollow, the inside of the silica gel wrapping layer 7 is uniformly distributed with an infusion flow channel, the front end and the rear end of the infusion flow channel are communicated with the inside of the extending tube column 27, and a conveying tube 39 is arranged between each liquid storage tube 38 and the end of one extending tube column 27;
the method for evaporating by the evaporating device comprises the following steps:
S1, conveying a medium in a liquid storage cylinder 38 into a transfusion flow channel of a silica gel wrapping layer 7 through a conveying pipe 39 by using heat of a crucible 5, and recording volume change of the silica gel wrapping layer 7;
s2, when the volume of the silica gel wrapping layer 7 expands to a preset critical value, the change of the heat value Q of the heat conduction frame 37 along with time is recorded and compared with a preset heat threshold value:
S3, when the heat quantity value Q exceeds a preset heat quantity threshold range, a pressure relief module is arranged at one end of the extension cylinder column 27, which is far away from the conveying pipe 39, and the silica gel wrapping layer 7 is subjected to pressure relief treatment and a regulation strategy is obtained;
s4, starting a driving unit according to analysis and regulation strategy results, and driving the separation assembly to carry out position rotation adjustment with the suspension unit.
The regulation strategy and the analysis process thereof comprise the following steps:
Recording the pressure of the infusion flow passage through the pressure relief module Size and expansion volume of the silica gel coating 7-；
By the formulaCalculate the balance coefficient/>Wherein/>Starting time for pressure relief of pressure relief module,/>The time consumed for the whole process of pressure relief is completed; /(I)Is the standard expansion volume; /(I)、/>Are all preset weight coefficients, and/>、/>Are all greater than 0;
will balance coefficient And a preset balance coefficient threshold value/>And (3) performing comparison:
When (when) ∈/>When the silica gel coating 7 is in the equilibrium state, the silica gel coating is in the vapor deposition state at present;
When (when) ＞/>When the silica gel wrapping layer 7 is in an expansion state, the pressure relief treatment is carried out;
When (when) ＜/>And when the driving unit is started, judging that the silica gel wrapping layer 7 is in a contracted state.
In this embodiment: in the process of melting the plating material and evaporating the plating material by heating the crucible 5, the heat conduction frame 37 can transfer part of heat to the liquid storage barrel 38, and because the inside of the liquid storage barrel 38 is in a closed state, the medium in the liquid storage barrel is expanded due to high temperature and high pressure, so that the medium is conveyed into the infusion flow channel of the silica gel wrapping layer 7 through the conveying pipe 39, the silica gel wrapping layer 7 is expanded and deformed, and the temperature of the crucible 5 is in a state of melting the plating material and not reaching the temperature of evaporating the plating material, the pressure in the silica gel wrapping layer 7 is in an equilibrium state at the moment∈/>The small expansion of the silica gel coating 7 within this value can fill the gaps between the cross structure and the vapor deposition device shell 1 and the concave arc jacking block 4 to ensure the complete sealing of two independent vapor deposition chambers and ensure that no confusion of the flow of the plating material vapor occurs when two different materials are used for vapor deposition;
When the temperature of the crucible 5 reaches the temperature at which the melted plating material evaporates, then ＞/>In order to avoid the excessive expansion of the silica gel coating 7, a swelling and breaking situation occurs when/>＞/>The pressure release module is triggered to release pressure so as to ensure that the plating material is always maintained in the heating process of the crucible 5∈/>；
When the vapor deposition on one surface of the substrate is completed, the temperature of the crucible 5 also starts to decrease, and the vapor flow in the independent vapor deposition chamber starts to condense and condense at this time＜/>Then the medium in the infusion runner of the silica gel wrapping layer 7 starts to flow back into the liquid storage barrel 38, the silica gel wrapping layer 7 is in a shrunken state, and at the moment, a certain gap exists between the silica gel wrapping layer 7 and the evaporation device shell 1 as well as between the silica gel wrapping layer 7 and the concave arc jacking block 4, so that the driving unit can more conveniently turn the position of the cross structure.
It is noted that relational terms such as first and second, and the like are used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Moreover, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus.
Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made therein without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.
Claims (9)
1. A dual-mirror heterogeneous material evaporation device, comprising: the evaporation device comprises an evaporation device shell (1), wherein two crucibles (5) for containing evaporation materials are arranged at the bottom of the inner side of the evaporation device shell (1), a concave arc jacking block (4) is arranged between the two crucibles (5), the concave arc jacking block (4) is fixedly connected with the evaporation device shell (1), the upper part of the evaporation device shell (1) is in a circular arc jacking shape, and a separation component is arranged in the evaporation device shell (1) and is used for separating the evaporation materials of the two crucibles (5);
Further comprises:
A suspension unit for suspending two groups of substrates above two of the crucibles (5), respectively, the suspension unit being disposed on the partition member;
The driving unit is used for driving the separation assembly to carry the suspension unit to adjust the position, and is arranged between the evaporation device shell (1) and the separation assembly;
The separation assembly comprises a first separation plate (2) and a second separation plate (3), the first separation plate (2) and the second separation plate (3) are distributed in a manner of intersecting a perpendicular bisector, the first separation plate (2) and the second separation plate (3) are fixedly connected, a cross structure is formed by the first separation plate and the second separation plate, an extension cylinder column (27) is fixedly installed on the front end face and the rear end face of the cross structure, the extension cylinder column (27) rotates and penetrates through the evaporation device shell (1), silica gel wrapping layers (7) are wrapped on the front end face, the rear end face, the upper end face, the lower end face, the left end face and the right end face of the cross structure, the intersection point of the extension cylinder column (27) and the evaporation device shell (1) is the circle center of the arc top of the evaporation device shell (1), and the arc top arc surface of the upper end of the concave arc supporting block (4) and the arc top of the evaporation device shell (1) are concentric.
2. The dual-mirror heterogeneous material evaporation device according to claim 1, wherein: the utility model provides a novel structure of a rotary table, including hanging unit, including set up in inside two of first division board (2) are alternately cavity (9) of relative distribution, every the inside of cavity (9) is all rotated and is inlayed carousel (10), just the both ends face of carousel (10) all extends first division board (2), the inside mount of carousel (10) is equipped with umbrella-shaped holder (11), just the inside rotation of umbrella-shaped holder (11) is equipped with a plurality of and is changeing cover (12) that circumference equidistance distributes, the inside of carousel (10) still is provided with the placing notch, the quantity of placing notch with the quantity of changeing cover (12) is unanimous, and every place the notch respectively with a plurality of changeing cover (12) is concentric, a plurality of arc notch (13) that circumference equidistance distributes have been seted up to change the inside of cover (12), and every place the notch periphery set up with straight slot (14) that arc notch quantity equals, change cover (12) with be provided with clamping mechanism between straight slot (14).
3. The dual-mirror heterogeneous material evaporation device according to claim 2, wherein: the clamping mechanism comprises a positioning rod (18) which is inserted into each arc-shaped notch (13) in a sliding manner, two ends of the positioning rod (18) are correspondingly and slidably embedded into the straight notch (14), each positioning rod (18) is provided with a positioning hole (23) at the end, each straight notch (14) is fixedly provided with a limiting rod embedded with the positioning hole (23), one end of the positioning rod (18) close to the center of the rotating sleeve (12) is fixedly provided with a sleeve (19), a push rod (20) is transversely and slidably assembled in the sleeve (19), one end of the push rod (20) extending into the sleeve (19) is fixedly provided with a second spring (21) between the sleeve (19), the other end of the push rod (20) is fixedly provided with a clamping column (22), and each rotating sleeve (12) and the umbrella-shaped retainer (11) are fixedly provided with elastic components.
4. The dual-mirror heterogeneous material evaporation device according to claim 3, wherein: the elastic pressing component comprises right-angle shifting blocks (15) fixedly installed on the outer wall of each rotating sleeve (12), one ends of the right-angle shifting blocks (15) away from the rotating sleeves (12) movably penetrate through the first separation plates (2), arc-shaped sliding rods (16) are fixedly installed on the side walls of the right-angle shifting blocks (15), the arc circle centers of the arc-shaped sliding rods (16) coincide with the circle centers of the rotating sleeves (12), one ends of the arc-shaped sliding rods (16) away from the right-angle shifting blocks (15) are slidably inserted into the umbrella-shaped retainer (11), first springs (17) are sleeved on the outer surfaces of the arc-shaped sliding rods (16), and two ends of each first spring (17) are respectively fixed with the right-angle shifting blocks (15) and the umbrella-shaped retainer (11).
5. The dual-mirror heterogeneous material evaporation device according to claim 2, wherein: the driving unit comprises a driving motor (30) fixedly arranged on the outer wall of the evaporation device shell (1), a second gear (31) is fixedly arranged at the output end of the driving motor (30), a third gear (32) movably meshed with the second gear (31) is sleeved on the outer wall of one extension cylinder (27), a lug (28) is fixedly arranged on the outer surface of the extension cylinder (27), and two clamping blocks (29) for limiting the deflection angle of the lug (28) are fixedly arranged on the outer wall of the evaporation device shell (1);
the deflection angle of the extension cylinder (27) is a, and the limiting range of the two clamping blocks (29) on the extension cylinder (27) and the convex blocks (28) is more than or equal to 0 and less than or equal to 180 degrees;
the third gear (32) is rotatably sleeved outside the extension cylinder column (27), and a transmission mechanism is arranged between the third gear (32) and the two turntables (10).
6. The dual-mirror heterogeneous material evaporation device according to claim 5, wherein: the transmission mechanism comprises two worms (8) penetrating through the cavities (9) and the two extending cylinder columns (27), two worm groove parts of the worms (8) are respectively located at two positions, the two worm groove parts are respectively located at the inner sides of the cavities (9), each worm wheel (25) is rotatably arranged in each cavity (9), the worm wheels (25) are in transmission engagement with the worm (8), toothed rings (24) are fixedly sleeved on the outer surfaces of the rotating sleeves (12), two first gears (26) which are meshed with each other are assembled between the worm wheels (25) and the toothed rings (24), one first gear (26) is concentrically and fixedly installed at the top of the worm wheel (25), the other first gear (26) is movably meshed with the toothed rings (24), the first gears (26) which are not fixed with the worm wheels (25) are in rotation assembly, end parts of the worm wheels (8) are fixedly connected with the third gears (32) through clamping connection with the third fixing frames (32), and the extending cylinder columns (32) are fixedly arranged between the end parts of the worm wheels (8).
7. The dual-mirror heterogeneous material evaporation device according to claim 6, wherein: the clamping component comprises a plurality of concave arc grooves (34) which are formed in the outer surface of the extension cylinder column (27) and distributed at equal intervals in circumference, a plurality of positioning pins (35) which are distributed at equal intervals in circumference are embedded in the third gear (32) in a sliding mode, the dome portion of each positioning pin (35) is movably extended to the corresponding third gear (32), a third spring (36) is fixedly arranged between one end, away from the extension cylinder column (27), of each positioning pin (35) and the corresponding third gear (32), and the positioning pins (35) are movably embedded with the corresponding concave arc grooves (34).
8. The dual-mirror heterogeneous material evaporation device according to claim 7, wherein: the inside of the evaporation device shell (1) is fixedly provided with two heat conduction frame bodies (37), the two heat conduction frame bodies (37) are respectively sleeved on the outer surfaces of the two crucibles (5), the inside of each heat conduction frame body (37) is fixedly provided with a liquid storage cylinder (38), the inside of the extending cylinder column (27) is hollow, the inside of the silica gel coating layer (7) is uniformly distributed with an infusion runner, the head end and the tail end of the infusion runner are communicated with the inside of the extending cylinder column (27), and a conveying pipe (39) is arranged between each liquid storage cylinder (38) and one end of the extending cylinder columns (27);
The evaporation method of the evaporation device comprises the following steps:
s1, conveying a medium in a liquid storage cylinder (38) into a transfusion flow channel of a silica gel wrapping layer (7) through a conveying pipe (39) by using heat of a crucible (5), and recording volume change of the silica gel wrapping layer (7);
S2, when the volume of the silica gel wrapping layer (7) expands to a preset critical value, recording the change of the heat value Q of the heat conduction frame body (37) along with time and comparing with a preset heat threshold value:
S3, when the heat quantity value Q exceeds a preset heat quantity threshold range, a pressure relief module is arranged at one end of the extension cylinder (27) far away from the conveying pipe (39), and pressure relief treatment is carried out on the silica gel wrapping layer (7) and a regulation strategy is obtained;
s4, starting a driving unit according to analysis and regulation strategy results, and driving the separation assembly to carry out position rotation adjustment with the suspension unit.
9. The dual-mirror heterogeneous material evaporation device according to claim 8, wherein: the control strategy and the analysis process thereof comprise:
Recording the pressure of the infusion flow passage through the pressure relief module Size and expansion volume of the silica gel coating layer (7)/>；
By the formulaCalculate the balance coefficient/>Wherein/>Starting time for pressure relief of pressure relief module,/>The time consumed for the whole process of pressure relief is completed; /(I)Is the standard expansion volume; /(I)、/>Are all preset weight coefficients, and/>、/>Are all greater than 0;
will balance coefficient And a preset balance coefficient threshold value/>And (3) performing comparison:
When (when) ∈/>When the method is used, the silica gel wrapping layer (7) is judged to be in an equilibrium state and is in an evaporation state at present;
When (when) ＞/>When the pressure is released, judging that the silica gel wrapping layer (7) is in an expanded state, and performing pressure release treatment;
When (when) ＜/>And when the driving unit is started, judging that the silica gel wrapping layer (7) is in a contracted state.
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| KR20030092154A (en) * | 2002-05-27 | 2003-12-06 | 삼성전자주식회사 | Jig for supporting a wafer holder |
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| CN114574811A (en) * | 2020-11-30 | 2022-06-03 | 佳能特机株式会社 | Deposition apparatus, film forming method, and method for manufacturing electronic device |
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