CN118024056B - Main shaft assembly tool and main shaft assembly method for wafer grinding machine - Google Patents

Abstract

The application provides a main shaft assembly tool and a main shaft assembly method for a wafer grinding machine, which belong to the technical field of main shaft assembly and comprise the following steps: the mandrel comprises a mandrel, a front bearing and a rear bearing which are arranged on the mandrel, a linear guide rail mechanism, a mandrel adjusting system and a bearing adjusting system, wherein the mandrel adjusting system comprises a front center mechanism and a rear center mechanism, and the front center mechanism is arranged to drive the mandrel to deflect relative to the rear center mechanism so that the axis of the mandrel is parallel to the linear guide rail mechanism. Through setting up dabber governing system and bearing governing system, when assembling dabber and bearing, the axiality of calibration dabber and linear guide earlier, recalibration bearing and dabber, furthest's assurance bearing and dabber's assembly requirement, the space position with dabber, front bearing, rear bearing is adjusted earlier, makes it satisfy the assembly requirement, carries out the main shaft assembly through this frock, easy operation, assembly precision is high, can satisfy dabber and bearing's high accuracy assembly requirement.

Description

Main shaft assembly tool and main shaft assembly method for wafer grinding machine

Technical Field

The application relates to the technical field of main shaft assembly of a wafer grinding machine, in particular to a main shaft assembly tool and a main shaft assembly method for the wafer grinding machine.

Background

In the semiconductor processing industry, the thickness of a sliced wafer is thicker, the wafer needs to be thinned to a certain thickness through thinning equipment, the wafer is thinned through a grinding machine, a main shaft connected with a grinding wheel rotating at a high speed in the grinding machine is a core component of the grinding machine, the damage of the main shaft on a dynamic and static pressure bearing of the main shaft due to the inertia of the main shaft rotating at the high speed is very large, in the use process of the grinding machine, the main shaft is in direct contact with the bearing, and the main shaft rotates at a high speed to drive the rotation of other components, but the main shaft and the bearing are inevitably worn in the working process, so that the damage of the main shaft is caused, and the grinding precision of a product is affected. With the advent of the third generation of semiconductors, the hardness of new semiconductors such as SiC and other materials is higher and the precision requirement is more and more strict, the wafer is still subjected to unidirectional concentric grinding processing by adopting a traditional grinding machine, the concentric lines on the surface of the wafer are serious, the process layer is easy to cause the defects of microcracks, splinters, edge breakage, warping and the like of the materials, and the productivity and precision requirements of new material processing are severely restricted.

In order to meet the requirements of productivity and precision of new material processing such as third generation semiconductors, a grinder with a spindle is used in the related art to improve the surface quality of a wafer subjected to grinding and thinning Shi Jing. In the related art, the spindle mainly comprises a motor, a spindle and a bearing, the spindle is an integral spindle, the unit magnitude of the dimension of the spindle and the unit magnitude of the bearing are meters, and the unit magnitude of the clearance value between the spindle and the bearing is only micron, which is approximately millions of times different, so that an assembly fixture is needed to complete the assembly of the spindle.

Disclosure of Invention

The application aims to provide a main shaft assembly tool and a main shaft assembly method for a wafer grinding machine.

Additional aspects and advantages of the application will be set forth in part in the description which follows and, in part, will be obvious from the description, or may be learned by practice of the application.

According to a first aspect of the present application there is provided a spindle assembly tool for a wafer grinder, the spindle comprising a spindle and front and rear bearings mounted on the spindle; the main shaft assembly fixture comprises a linear guide rail mechanism, a mandrel adjusting system and a bearing adjusting system; wherein,

The mandrel adjusting system comprises a front center mechanism and a rear center mechanism, the front center mechanism is slidably mounted on the linear guide rail mechanism, the rear center mechanism is fixedly arranged with the linear guide rail mechanism, the front center mechanism and the rear center mechanism clamp the mandrel from front and rear ends, and the front center mechanism is arranged to drive the mandrel to deflect relative to the rear center mechanism so that the axis of the mandrel is parallel to the linear guide rail mechanism;

The bearing adjusting system comprises a front bearing adjusting mechanism and a rear bearing adjusting mechanism, wherein the front bearing adjusting mechanism and the rear bearing adjusting mechanism are both slidably mounted on the linear guide rail, and the front bearing adjusting mechanism is used for adjusting the position of the front bearing in space so as to enable the front bearing to be assembled with the mandrel and enable the front bearing to be coaxial with the mandrel; the rear bearing adjustment mechanism is configured to adjust a position of the rear bearing in space to assemble the rear bearing with the spindle and to coaxially align the rear bearing with the spindle.

In an exemplary embodiment of the present application, the front center mechanism includes:

The front center is used for fixing the front end of the mandrel and is used for clamping the mandrel with the rear center of the rear center mechanism from the front end and the rear end;

the front center fixing rod is used for fixing the front center;

The front center support piece is used for supporting the front center fixing rod and can slide along the linear guide rail;

The first adjusting component is arranged on the front center support piece and is arranged to be capable of adjusting the space position of the front center fixing rod so that the front center fixing rod drives the front center and the mandrel to deflect around the rear center;

and/or the number of the groups of groups,

The back center mechanism includes:

The back center is used for fixing the rear end of the mandrel and is used for clamping the mandrel with the front center of the front center mechanism from the rear end and the front end;

the back center fixing rod is used for fixing the back center;

And the back center support piece is used for supporting the back center fixing rod and is fixedly arranged on the linear guide rail mechanism.

In an exemplary embodiment of the application, the first adjustment assembly comprises:

The adjusting rods are circumferentially and uniformly arranged on the front center support, the adjusting ends of the adjusting rods extend into the front center support to support the front center fixing rod, and the extending lengths of the adjusting rods along the axial direction of the adjusting rods are adjustable; the spatial position of the front center fixing rod can be adjusted by controlling the extending lengths of the adjusting rods.

In one exemplary embodiment of the present application, the plurality of adjustment bars are arranged in at least two groups in the front-rear direction of the front center support; and/or the adjusting rod is in threaded fit with the front center support.

In an exemplary embodiment of the present application, the front center mechanism further includes:

The first guide rail locking piece is used for locking the linear guide rail so as to fix the front center mechanism and the linear guide rail;

the fixed plate is used for connecting the first guide rail locking piece and the front center support piece;

the anti-rotation fixing piece is used for locking the front center fixing rod after the space position of the mandrel is adjusted, so that the position of the mandrel is fixed;

And the axial limiting piece is used for applying axial force to the front center fixing rod towards the mandrel direction and limiting the front center fixing rod from axially moving in a serial manner.

In an exemplary embodiment of the application, the front bearing adjustment mechanism includes:

a front bearing support slidable along the linear guide rail;

A front bearing adjustment assembly arranged in a plurality of groups symmetrically arranged on the front bearing support for supporting the front bearing, the front bearing adjustment assembly being arranged to adjust the position of the front bearing in space to assemble the front bearing with the spindle and to coaxially align the front bearing with the spindle;

and/or the number of the groups of groups,

The rear bearing adjustment mechanism includes:

a rear bearing support slidable along the linear guide rail;

The rear bearing adjusting assemblies are arranged in a plurality of groups and symmetrically arranged on the rear bearing support piece and used for supporting the rear bearing, and the rear bearing adjusting assemblies are arranged for adjusting the position of the rear bearing in space so as to enable the rear bearing to be assembled with the mandrel and enable the rear bearing to be coaxial with the mandrel.

In an exemplary embodiment of the application, the front bearing adjustment assembly and the rear bearing adjustment assembly each comprise:

The coarse adjustment structure is used for supporting the front bearing or the rear bearing and coarse adjusting the space position of the front bearing or the rear bearing when the front bearing or the rear bearing is hoisted to the front bearing adjusting mechanism or the rear bearing adjusting mechanism;

and the fine adjustment structure is used for carrying out micron-sized adjustment on the space position of the front bearing or the rear bearing.

In an exemplary embodiment of the present application, the front bearing adjustment assembly is identical in structure to the rear bearing adjustment assembly, including:

The shaft sleeve upper fixing plate and the shaft sleeve lower fixing plate are respectively fixed on the inner wall and the outer wall of the front bearing support piece or the rear bearing support piece, and shaft sleeve mounting holes are formed in the shaft sleeve upper fixing plate and the shaft sleeve lower fixing plate;

The shaft sleeve is penetrated through the shaft sleeve mounting holes of the shaft sleeve upper fixing plate and the shaft sleeve lower fixing plate, the axial direction of the shaft sleeve faces to the front bearing or the rear bearing, and a pushing rod threaded hole is formed in the shaft sleeve;

The screw is arranged on the lower fixing plate of the shaft sleeve and is in threaded fit with the shaft sleeve, the shaft sleeve can be driven to axially move by rotating the screw, and the screw and the shaft sleeve form the fine adjustment structure;

the pushing rod is in threaded fit with the threaded hole of the pushing rod of the shaft sleeve, the screw pitch of the pushing rod is at least 2 times that of the threaded screw pitch of the shaft sleeve and the screw, and the pushing rod, the shaft sleeve and the screw form the coarse adjustment structure together.

In an exemplary embodiment of the present application, the front bearing adjustment assembly and the rear bearing adjustment assembly further include:

The pushing rod anti-rotation piece is arranged at the joint of the pushing rod and the shaft sleeve and is used for locking the rotation direction of the pushing rod after coarse adjustment is carried out on the space position of the front bearing or the rear bearing;

The shaft sleeve anti-rotation piece is arranged at the joint of the shaft sleeve and the upper fixing plate of the shaft sleeve and is used for locking the rotation direction of the shaft sleeve after the space position of the front bearing or the rear bearing is finely adjusted.

In an exemplary embodiment of the present application, the front bearing adjustment mechanism and the rear bearing adjustment mechanism further include:

And the locking assembly is mounted on the front bearing support or the rear bearing support and used for limiting the vertical position of the front bearing or the rear bearing from the upper part of the front bearing or the rear bearing.

In an exemplary embodiment of the present application, the locking assembly includes:

A locking bracket mounted on the front bearing support or the rear bearing support across the front bearing or the rear bearing support, the locking bracket comprising a cross bar located above the front bearing support or the rear bearing support;

The locking rod is slidably arranged on the cross rod, the locking rod and the cross rod can be locked, the sliding direction of the locking rod is perpendicular to the cross rod, and the end part of the locking rod is suitable for being abutted to the front bearing or the top of the rear bearing, and the front bearing adjusting assembly or the rear bearing adjusting assembly is matched and fixed at the position of the front bearing or the rear bearing.

In an exemplary embodiment of the present application, further comprising:

And the error detection component is used for detecting the parallelism error of the axis of the mandrel and the linear guide rail and/or the coaxiality error of the axis of the front bearing and the axis of the mandrel and/or the coaxiality error of the axis of the rear bearing and the axis of the mandrel.

In an exemplary embodiment of the application, the error detecting component is a lever dial gauge.

In an exemplary embodiment of the present application, the linear guide mechanism includes two linear guides and a base, the two linear guides are installed on the base in parallel, and a slider is disposed on the linear guides;

The front center mechanism, the front bearing adjusting mechanism and the rear bearing adjusting mechanism are all installed on the sliding block, and the rear center mechanism is fixed on the base station.

According to a second aspect of the present application, there is provided a spindle assembly method for a wafer grinder, the spindle comprising a spindle, a front bearing and a rear bearing; the spindle assembly method uses the spindle assembly tool for the wafer grinder to assemble the spindle, and comprises the following steps:

Placing the spindle, the front bearing and the rear bearing between the front center mechanism and the rear center mechanism, and on the front bearing adjusting mechanism and the rear bearing adjusting mechanism, respectively;

detecting the parallelism error of the mandrel and the linear guide rail mechanism, and driving the mandrel to deflect around the rear center mechanism through the front center mechanism if the detected parallelism error value exceeds a set threshold value until the parallelism error value of the axis of the mandrel and the linear guide rail mechanism is smaller than the set threshold value;

And detecting coaxiality errors of the axis of the front bearing or the axis of the rear bearing and the axis of the mandrel, and if the detected coaxiality error value exceeds a set threshold value, adjusting the position of the front bearing or the rear bearing in space through the front bearing adjusting mechanism or the rear bearing adjusting mechanism so that the coaxiality error is smaller than the set threshold value, and completing assembly of the front bearing or the rear bearing and the mandrel.

Exemplary embodiments of the present application may have some or all of the following advantages:

The main shaft assembly tool for the wafer grinding machine comprises a mandrel, a front bearing and a rear bearing, wherein the front bearing and the rear bearing are arranged on the mandrel, the main shaft assembly tool comprises a linear guide rail mechanism, a mandrel adjusting system and a bearing adjusting system, the mandrel adjusting system comprises a front center mechanism and a rear center mechanism, the front center mechanism is slidably arranged on the linear guide rail mechanism, the rear center mechanism is fixedly arranged with the linear guide rail mechanism, the front center mechanism and the rear center mechanism clamp the mandrel from the front end and the rear end, and the front center mechanism is arranged to drive the mandrel to deflect relative to the rear center mechanism so that the axis of the mandrel is parallel to the linear guide rail of the linear guide rail mechanism; the bearing adjusting system comprises a front bearing adjusting mechanism and a rear bearing adjusting mechanism, wherein the front bearing adjusting mechanism is arranged to adjust the position of the front bearing in space so as to enable the front bearing to be coaxial with the mandrel, and the front bearing is assembled with the mandrel; the rear bearing adjustment mechanism is configured to adjust the position of the rear bearing in space so that the rear bearing is coaxial with the spindle and so that the rear bearing is coaxial with the spindle. Through setting up dabber governing system and bearing governing system, when assembling dabber and bearing, the axiality of calibration dabber and linear guide earlier, recalibration bearing and dabber, furthest's assurance bearing and dabber's assembly requirement, the space position with dabber, front bearing, rear bearing is adjusted earlier, makes it satisfy the assembly requirement, carries out the main shaft assembly through this frock, easy operation, assembly precision is high, can satisfy dabber and bearing's high accuracy assembly requirement.

It is to be understood that both the foregoing general description and the following detailed description are exemplary and explanatory only and are not restrictive of the application as claimed.

Drawings

The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments consistent with the application and together with the description, serve to explain the principles of the application. It is evident that the drawings in the following description are only some embodiments of the present application and that other drawings may be obtained from these drawings without inventive effort for a person of ordinary skill in the art.

Fig. 1 shows a schematic structural diagram of a spindle assembly tool in embodiment 1 of the present application;

Fig. 2 is a schematic diagram showing the connection between the base station and the linear guide rail in embodiment 1 of the present application;

FIG. 3 is a schematic view showing the structure of a mandrel adjusting mechanism in embodiment 1 of the present application;

fig. 4 is a schematic view showing the structure of a front center mechanism in embodiment 1 of the present application;

FIG. 5 shows a cross-sectional view of the front tip mechanism of embodiment 1 of the present application;

FIG. 6 shows a side view of the front tip mechanism of embodiment 1 of the present application;

fig. 7 is a schematic view showing the structure of the rear center mechanism in embodiment 1 of the present application;

FIG. 8 is a schematic view showing the structure of a front bearing adjusting mechanism in embodiment 1 of the present application;

FIG. 9 is a schematic view showing the structure of a front bearing adjusting assembly in embodiment 1 of the present application;

FIG. 10 is a schematic view showing the structure of a locking assembly in embodiment 1 of the present application;

FIG. 11 is a schematic view showing the structure of an anti-rotation fixing member in embodiment 1 of the present application;

fig. 12 is a flow chart illustrating a spindle adjusting method based on a spindle assembly tool in embodiment 3 of the present application;

FIG. 13 is a diagram showing a space coordinate system of a mandrel assembly tool in embodiment 3 of the present application;

FIG. 14 shows a lever dial indicator representation of the normal axis of the spindle of example 3 of the present application;

FIG. 15 is a graph showing the deflection of the dial lever indicator with respect to the spindle axis in example 3 of the present application;

FIG. 16 shows a projection of the two planes of the mandrel axis in example 3 of the present application;

FIG. 17 is a schematic view showing a first case in which the first plane is deflected in embodiment 3 of the present application;

FIG. 18 is a schematic diagram showing a second case where the first plane is deflected in embodiment 3 of the present application;

FIG. 19 is a schematic view showing a first case in which the second plane is deflected in embodiment 3 of the present application;

FIG. 20 is a schematic diagram showing a second case where the second plane is deflected in embodiment 3 of the present application;

Fig. 21 is a sequence diagram showing an adjusting lever in embodiment 3 of the present application;

FIG. 22 is a schematic view showing the distance between the adjusting rods and the mandrel in embodiment 3 of the present application;

FIG. 23 is a schematic view showing the axial deflection of a front center fixing rod according to the embodiment 3 of the present application in which the first plane is deflected;

FIG. 24 is a schematic view showing the axial deflection of another front center fixing rod with deflection of the first plane in embodiment 3 of the present application;

FIG. 25 is a schematic illustration of a mandrel axis deflection in which the second plane is deflected in example 3 of the present application;

FIG. 26 is a schematic diagram showing another mandrel axis deflection in which the second plane is deflected in example 3 of the present application;

FIG. 27 is a view showing the improper axial movement of the first planar target adjustment lever in embodiment 3 of the present application;

FIG. 28 is a diagram showing improper axial movement of the second planar target adjustment lever in embodiment 3 of the present application;

FIG. 29 shows triangles in example 3 of the present application Is a geometric relationship diagram of (1);

FIG. 30 shows triangles in example 3 of the present application Is a geometric relationship diagram of (1);

FIG. 31 shows triangles in example 3 of the present application Is a geometric relationship diagram of (1).

Reference numerals illustrate:

1. A base station;

2. A bearing adjustment system; 21. a front bearing support; 22. a front bearing adjustment assembly; 221. a propulsion rod; 222. screwing the screw; 223. a shaft sleeve upper fixing plate; 224. a shaft sleeve; 225. a propulsion lever anti-rotation member; 226. an axle sleeve anti-rotation member; 23. a locking assembly; 231. locking the bracket; 232. a locking lever; 233. locking; 24. a second rail locking member;

3. A mandrel adjustment system; 31. a front center mechanism; 311. a front center support; 312. a front center; 313. an axial limiter; 314. an anti-rotation fixing member; 3141. locking the adjusting rod; 3142. a second bracket; 3143. locking the fixing piece; 315. a rotating wheel; 316. a first rail locking member; 317. a sleeve; 318. a hand wheel; 319. a front center fixing rod; 32. a rear center mechanism; 321. a rear center; 322. a rear center support; 323. a rear center fixing rod;

4. a mandrel;

5. a bearing;

6. a linear guide rail;

7. a slide block;

8. A first lever dial gauge 8;

9. A second lever dial gauge 9;

10. A third lever dial gauge 10;

11. Fourth lever dial 11.

Detailed Description

Example embodiments will now be described more fully with reference to the accompanying drawings. However, the exemplary embodiments can be embodied in many forms and should not be construed as limited to the embodiments set forth herein; rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the concept of the example embodiments to those skilled in the art. The same reference numerals in the drawings denote the same or similar structures, and thus detailed descriptions thereof will be omitted. Furthermore, the drawings are merely schematic illustrations of the present application and are not necessarily drawn to scale.

Although relative terms such as "upper" and "lower" are used in this specification to describe the relative relationship of one component of an icon to another component, these terms are used in this specification for convenience only, such as in terms of the orientation of the examples in the drawings. It will be appreciated that if the device of the icon is flipped upside down, the recited "up" component will become the "down" component. When a structure is "on" another structure, it may mean that the structure is integrally formed with the other structure, or that the structure is "directly" disposed on the other structure, or that the structure is "indirectly" disposed on the other structure through another structure.

The terms "a," "an," "the," and "at least one" are used to indicate the presence of one or more elements/components/etc.; the terms "comprising" and "having" are intended to be inclusive and mean that there may be additional elements/components/etc. in addition to the listed elements/components/etc.; the terms "first" and "second" are used merely as labels, and do not limit the number of their objects.

Example 1

The embodiment of the application provides a main shaft assembly tool for a wafer grinder, as shown in fig. 1, wherein a main shaft of the wafer grinder comprises a mandrel 4, and a front bearing and a rear bearing which are arranged on the mandrel 4.

The main shaft assembly fixture of the embodiment comprises a linear guide rail mechanism, a mandrel adjusting system 3 and a bearing adjusting system 2, wherein,

The linear guide mechanism comprises a linear guide 6 and a base 1, as shown in fig. 2, the linear guide 6 is installed on the base 1, a plurality of sliding blocks 7 are arranged on the linear guide 6, and the front center mechanism 31 and the bearing adjustment system 2 of the mandrel adjustment system 3 are installed on the corresponding sliding blocks 7, so that the front center mechanism 31 and the bearing adjustment system 2 can slide along the linear guide 6 to adjust positions.

As a preferred embodiment of the linear guide mechanism, the linear guide mechanism includes two linear guide rails 6, the two linear guide rails 6 are installed on the base 1 in parallel, each linear guide rail 6 is provided with a plurality of sliding blocks 7, and the front center mechanism 31 and the bearing adjustment system 2 are all spanned on the two linear guide rails 6 through the corresponding sliding blocks 7, and the base 1 is preferably made of marble. The number of the linear guides 6 is not particularly limited, and may be one, three, or more according to actual needs.

The mandrel adjusting system 3 comprises a front center mechanism 31 and a rear center mechanism 32, as shown in fig. 1 and 3, the front center mechanism 31 is slidably mounted on the linear guide mechanism, the rear center mechanism 32 is fixedly arranged with the linear guide mechanism, the front center mechanism 31 and the rear center mechanism 32 clamp the mandrel 4 from the front end and the rear end, and the front center mechanism 31 is arranged to drive the mandrel 4 to deflect relative to the rear center mechanism 32 so that the axis of the mandrel 4 is parallel to the linear guide mechanism; the bearing adjusting system 2 comprises a front bearing adjusting mechanism and a rear bearing adjusting mechanism, which are both slidably mounted on the linear guide rail 6, the front bearing adjusting mechanism being arranged to adjust the position of the front bearing in space to enable the front bearing to be assembled with the spindle 4 and to enable the front bearing to be coaxial with the spindle 4; the rear bearing adjustment mechanism is arranged to adjust the position of the rear bearing in space to assemble the rear bearing with the spindle 4 and to make the rear bearing coaxial with the spindle 4. Specifically, when the mandrel 4 is assembled by bearing, the mandrel 4 is adjusted by the front center mechanism 31 to deflect relative to the rear center mechanism 32 so that the axis of the mandrel 4 is parallel to the linear guide mechanism, before the bearing 5 is assembled, the front bearing is adjusted by the front bearing adjusting mechanism so that the axis of the front bearing is coaxial with the axis of the mandrel 4, the rear bearing is adjusted by the rear bearing adjusting mechanism so that the axis of the rear bearing is coaxial with the axis of the mandrel 4, so that the front bearing and the rear bearing are assembled on the mandrel 4, and the coaxiality of the mandrel 4 and the bearing 5 in the assembling process is ensured.

As shown in fig. 3,4, 5 and 6, the front center mechanism 31 includes a front center 312, a front center fixing rod 319, a front center support 311, and a first adjusting component, wherein the front center support 311 is slidably disposed on the linear guide mechanism, the front center fixing rod 319 is mounted on the front center support 311, the front center 312 is mounted on the front center fixing rod 319, the first adjusting component is mounted on the front center support 311, and the first adjusting component is configured to be capable of adjusting a spatial position of the front center fixing rod 319, so that the front center fixing rod 319 drives the front center 312 and the mandrel 4 to deflect around the rear center 321.

Specifically, the first adjusting assembly includes a plurality of adjusting rods which are circumferentially and uniformly arranged on the front center support 311, the adjusting ends of which extend into the front center support 311 to support the front center fixing rod 319, and the extending lengths of the adjusting rods in the axial direction thereof are set to be adjustable, and the adjustment of the spatial position of the front center fixing rod 319 can be achieved by controlling the extending lengths of the plurality of adjusting rods. Specifically, the upper end of the front center support 311 is provided with a sleeve 317, the front center support 311 is mounted in the sleeve 317, and the adjusting rods are uniformly circumferentially arranged on the sleeve 317.

The plurality of adjustment bars are provided in at least two groups in the front-rear direction of the front center support 311, and/or the adjustment bars are screw-fitted with the front center support 311. Specifically, the adjusting rod is in threaded fit with the front center support 311, the adjusting rod is a threaded rod with the length of M20 x 1.5, during the rotation process of the adjusting rod relative to the front center support 311, the adjusting rod can move axially, during the axial movement process of the adjusting rod, the adjustment of the spatial position of the front center fixing rod 319 can be achieved, and therefore the front center drives the mandrel 4 to deflect relative to the rear center 321, so that the axis of the mandrel 4 is parallel to the linear guide rail 6.

In this embodiment, at least four adjusting rods are taken, two adjusting rods are respectively arranged at two sides of the front center 312, the adjusting ends of the four adjusting rods support the front center 312 together, and in the process of adjusting the spatial position of the front center 312, the adjusting ends of the four adjusting rods can be respectively and independently adjusted, or two, three or all of the adjusting ends can be jointly adjusted; for example, adjusting one of the front apexes 312 can raise or lower one of the front apexes 312, adjusting two of the same sides can raise or lower one side of the front apexes 312, adjusting two of the different sides can twist or deflect the front apexes 312 in a vertical plane, and adjusting four of the front apexes can raise or lower the overall height of the front apexes 312.

In this embodiment, the front center mechanism 31 further includes a first rail locking member 316, a fixing plate, an anti-rotation fixing member 314, and an axial limiting member 313, where the fixing plate is used to connect the first rail locking member 316 with the front center support member 311, and the first rail locking member 316 is used to lock the linear rail 6 so as to fix the front center mechanism 31 with the linear rail 6, prevent the spindle 4 from moving during the process of marking, and also prevent the front center mechanism 31 from moving so as to drop the spindle 4; the anti-rotation fixing member 314 is used for locking the front center fixing rod 319 after adjusting the space position of the mandrel 4 so as to fix the position of the mandrel 4, and the axial limiting member 313 is used for applying an axial force to the front center fixing rod 319 towards the direction of the mandrel 4 to limit the front center fixing rod 319 from axially moving in a stringing manner. Specifically, the first rail locking member 316 may act on the slider 7 to fix the slider 7 on the linear rail 6, or the first rail locking member 316 may be directly locked on the linear rail 6, and the first rail locking member 316 may be a fastener, a thread, or the like, such as a fastener, and the first rail locking member 316 may be fastened to the linear rail 6 by a fastener.

Specifically, the axial limiting member 313 is a rod with threads on the surface, the rod is installed with the front center support member 311 through a nut and a gasket, a spring is sleeved on the axial limiting member 313, the spring can be arranged between the front center fixing rod 319 and the gasket, and by screwing the nut, the axial limiting member 313 applies a certain axial force to the center fixing rod to limit the axial movement of the front center fixing rod 319, so that the front center 312 only deflects and does not move axially in the adjusting process.

In this embodiment, the anti-rotation fixing member 314 includes a locking adjusting lever 3141 and a hand wheel 318 mounted on the locking adjusting lever 3141, and the locking adjusting lever 3141 is rotated by controlling the hand wheel 318 to axially move during rotation of the locking adjusting lever 3141, and when the locking adjusting lever 3141 axially moves, an end portion of the locking adjusting lever 3141 can abut against a surface of the front center fixing lever 319 to be matched with the adjusting lever to lock the front center fixing lever 319. The hand wheels 318 are also installed on the adjusting rods, and an operator can drive the adjusting rods and the locking adjusting rods 3141 to rotate relative to the front center support piece 311 by rotating the hand wheels 318, and the adjusting rods and the locking adjusting rods 3141 axially move in the rotating process so as to adjust the space position of the front center fixing rod 319 and fix the front center fixing rod 319.

In this embodiment, further, as shown in fig. 11, the anti-rotation fixing member 314 further includes a locking fixing member 3143 and a second bracket 3142, the second bracket 3142 is mounted on the front center support member 311, the locking fixing member 3143 is mounted on a locking adjusting rod 3141, the locking adjusting rod 3141 is connected to the second bracket 3142 through threaded engagement, the axial movement of the locking adjusting rod 3141 extends vertically, the end of the locking adjusting rod 3141 can vertically extend to abut against the surface of the front center fixing rod 319 to fix the position of the front center fixing rod 319 in cooperation with the adjusting rod, so that the position and angle of the front center fixing rod 319 driving the front center 312 are prevented from being changed in the assembling process of the spindle 4 and the bearing 5, and the assembling between the spindle 4 and the bearing 5 is affected. Specifically, as shown in fig. 11, the locking fixture 3143 is a clamping plate having an opening at one side, and the clamping plates at both sides of the opening are brought close to each other by rotation of the operation shaft to achieve fixation of the locking adjustment lever 3141. The end of the locking adjustment lever 3141 is provided with a rotating wheel 315, so that an operator can conveniently rotate the locking adjustment lever 3141 through the rotating wheel 315 to adjust the axial position of the locking adjustment lever 3141 on the second bracket 3142.

In this embodiment, an M10 screw is further disposed on the second bracket 3142, where the M10 screw passes through the second bracket 3142 and abuts against the upper surface of the front center fixing rod 319, so that the rotation of the center fixing rod can be limited when the mandrel 4 is rotated. Specifically, a groove may be formed on the surface of the front center fixing rod 319, and the end portion of the M10 screw extends into the groove to complete rotation limiting of the front center fixing rod 319, or the M10 screw abuts against the upper surface of the front center fixing rod 319 to limit through screwing force.

As shown in fig. 7, the back center mechanism 32 includes a back center 321, a back center fixing rod 323, and a back center support 322, the back center support 322 is fixedly mounted on the base 1 by a screw, the back center fixing rod 323 is mounted on the back center support 322 by a nut, the back center 321 is mounted on the back center fixing rod 323, and the back center 321 is used for clamping and fixing the mandrel 4 by matching with the front center 312.

In this embodiment, as shown in fig. 8, the front bearing adjusting mechanism includes a second rail locking member 24, a front bearing support member 21, and a front bearing adjusting assembly 22, the front bearing support member 21 is slidably mounted on the linear rail 6 by the second rail locking member 24, and the second rail locking member 24 can lock the position of the front bearing support member 21, so that the front bearing support member 21 is fixed on the linear rail 6, the front bearing adjusting assemblies 22 are arranged in a plurality of groups and symmetrically arranged on the front bearing support member 21, the front bearing adjusting assemblies 22 are used for supporting the front bearings, and the front bearing adjusting assemblies 22 can adjust the position of the front bearings in space so that the front bearings are coaxial with the spindle 4 and the front bearings are assembled with the spindle 4; and/or the rear bearing adjusting mechanism comprises a rear bearing support and a rear bearing adjusting assembly, wherein the rear bearing support is slidably arranged on the linear guide rail 6, the rear bearing adjusting assembly is provided with a plurality of groups and is symmetrically arranged on the rear bearing support and used for supporting the rear bearing, and the rear bearing adjusting assembly can adjust the position of the rear bearing in the space so as to enable the rear bearing to be coaxial with the mandrel 4 and enable the rear bearing to be assembled with the mandrel 4.

In this embodiment, the front bearing adjusting assembly 22 and the rear bearing adjusting assembly each include a coarse adjustment structure and a fine adjustment structure, where the coarse adjustment structure is used to support the front bearing and coarse adjust the spatial position of the front bearing when the front bearing is lifted to the front bearing adjusting mechanism, or is used to support the rear bearing and coarse adjust the spatial position of the rear bearing when the rear bearing is lifted to the rear bearing adjusting mechanism; the fine tuning structure is used for carrying out micron-sized adjustment on the space position of the front bearing or the rear bearing.

In this embodiment, the front bearing adjusting assembly 22 and the rear bearing adjusting assembly have the same structure, as shown in fig. 9, each include a shaft sleeve 224, an upper shaft sleeve fixing plate 223, a lower shaft sleeve fixing plate, a rotation adjusting screw 222, and a push rod 221, where the upper shaft sleeve fixing plate 223 and the lower shaft sleeve fixing plate are respectively fixed on the inner wall and the outer wall of the front bearing support 21 or the rear bearing support, the upper shaft sleeve fixing plate 223 and the lower shaft sleeve fixing plate are formed with shaft sleeve mounting holes, the shaft sleeve 224 is inserted into the shaft sleeve mounting holes of the upper shaft sleeve fixing plate 223 and the lower shaft sleeve fixing plate, and the shaft sleeve 224 is axially oriented to the front bearing or the rear bearing, the push rod screw hole is formed in the shaft sleeve 224, the push rod 221 is rotatably mounted on the shaft sleeve 224, the push rod 221 forms a coarse adjustment structure with the shaft sleeve 224, and the push rod 221 can adjust the length of the push rod 221 extending out of the shaft sleeve 224 in the rotation process of the shaft sleeve 224, where the pitch of the push rod 221 is at least 2 times that of the pitch of the rotation adjusting screw 222, the rotation adjusting screw 222 is mounted on the lower shaft sleeve fixing plate, and the rotation adjusting screw 222 is axially moved along the shaft sleeve 224 by the rotation adjusting screw 222 and the shaft sleeve 224 by the rotation adjusting screw 222.

Specifically, the end of the push rod 221 is provided with a cutting surface extending along the axial direction of the push rod, an operator can control the push rod 221 to rotate in the shaft sleeve 224 through clamping a tool on the cutting surface, and the length of the push rod extending out of the shaft sleeve 224 can be adjusted in the process of rotating the push rod 221 in the shaft sleeve 224, so that the end of the push rod 221 is abutted to the surface of the front bearing or the rear bearing, namely, the rough adjustment process.

After the rough adjustment is completed, an operator rotates the rotation screw 222, during the rotation process of the rotation screw 222, the rotation screw 222 can axially move, and when the rotation screw 222 axially moves, the shaft sleeve 224 and the pushing rod 221 are pushed to move together, so that the extension length of the pushing rod 221 is secondarily adjusted, namely, the fine adjustment process is performed.

Specifically, the pitch of the turning screw 222 is 1mm, that is, the shaft sleeve 224, that is, the thrust rod, moves axially by 0.0028mm every 1 ° of turning the turning screw 222, so as to meet the fine adjustment requirement of the front bearing or the rear bearing. The surface of the push rod 221 is a thread of M25, the pitch of the push rod 221 is 2mm, the push rod 221 is in threaded fit with the shaft sleeve 224, and the distance of the movement of the push rod 221 is twice as long as the distance of the movement of the push rod 221 after one rotation of the push rod 221 relative to one rotation of the rotation adjusting screw 222.

In this embodiment, the front bearing adjusting assembly 22 and the rear bearing adjusting assembly each further include a push rod anti-rotation member 225 and a shaft sleeve anti-rotation member 226, where the push rod anti-rotation member 225 is disposed at a connection position between the push rod 221 and the shaft sleeve, and the push rod anti-rotation member 225 can lock a rotation direction of the push rod 221 after coarse adjustment of a spatial position of the front bearing or the rear bearing, so as to prevent the position of the bearing from being moved in a serial manner during subsequent fine adjustment and assembly processes; the sleeve anti-rotation member 226 is disposed at the connection between the sleeve 224 and the upper sleeve fixing plate 223, and is used for locking the rotation direction of the sleeve 224 after the spatial position of the front bearing or the rear bearing is finely adjusted, so as to prevent the position of the bearing from moving in a stringing manner during the assembly and movement process.

In this embodiment, as shown in fig. 10, the front bearing adjusting mechanism and the rear bearing adjusting mechanism each further include a locking assembly 23, where the locking assembly 23 is mounted on the front bearing support 21 or the rear bearing support, and the locking assembly 23 is used to limit the vertical position of the front bearing from above the front bearing or limit the vertical position of the rear bearing from above the rear bearing, and the locking assembly 23 and the adjusting assembly form a three-point support together to lock the bearings.

Specifically, the locking assembly 23 includes a locking bracket 231 and a locking rod 232, the locking bracket 231 is erected on the front bearing support 21 or the rear bearing support across the front bearing or the rear bearing, and the locking bracket 231 includes a cross bar above the front bearing support 21 or the rear bearing support; the locking rod 232 is slidably disposed on the cross bar up and down, the sliding direction of the locking rod 232 is perpendicular to the cross bar, and the end of the locking rod 232 is used for abutting against the top of the front bearing or the rear bearing to be matched with the front bearing adjusting assembly 22 or the rear bearing adjusting assembly to fix the position of the front bearing or the rear bearing. Specifically, the locking assembly 23 further includes locking catches 233 provided at both sides of the locking bracket 231, and the locking bracket 231 is coupled to the front bearing support 21 or the rear bearing support by the locking catches 233.

Taking the front bearing adjusting mechanism as an example, the front bearing adjusting mechanism comprises a front bearing support 21, the front bearing support 21 is slidably mounted on the linear guide rail 6, the front bearing support 21 is used for supporting a front bearing, a front bearing adjusting component 22 is mounted on the front bearing support 21, the front bearing adjusting component 22 can adjust the spatial position of the front bearing, and after the micron-sized error detecting component detects the collineation error between the axis of the front bearing and the axis of the mandrel 4, the spatial position of the front bearing is adjusted through the front bearing adjusting component 22, namely, the axis of the bearing is collineated with the axis of the mandrel 4. Specifically, a certain assembly error exists between the axis of the bearing and the axis of the mandrel 4, and in the actual installation process, the assembly between the bearing and the mandrel 4 can be completed by meeting the assembly error.

In this embodiment, an error detecting means for detecting an error in parallelism of the axis of the spindle 4 with the linear guide 6 and/or an error in coaxiality of the axis of the front bearing with the axis of the spindle and/or an error in coaxiality of the axis of the rear bearing with the axis of the spindle 4 is further included. Specifically, the error detection component is a lever dial indicator, when the parallelism error of the axis of the mandrel 4 and the linear guide rail 6 is detected, the lever dial indicator is slidably mounted on the linear guide rail 6 through a meter frame, the detection end of the lever dial indicator is in contact with the surface of the mandrel 4, the lever dial indicator slides on the linear guide rail 6 for a distance, and whether the parallelism of the axis of the mandrel 4 and the linear guide rail 6 meets the requirement is judged through the change of the number of the lever dial indicator. When detecting the axiality error of the axis of the front bearing and the axis of the mandrel 4, the gauge stand of the lever dial indicator is sleeved on the mandrel 4, the detection ends of the lever dial indicator are respectively abutted against the end face and the inner wall of the front bearing, the lever dial indicator rotates along with the mandrel, and in the rotating process, whether the axiality error of the axis of the front bearing and the axis of the mandrel 4 accords with a set threshold value or not is detected, and the rear bearing is identical.

Working principle:

When the mandrel adjusting system 3 works, the front center mechanism 31 and the rear center mechanism 32 clamp the mandrel 4 from the front end and the rear end, the parallelism error of the mandrel 4 and the linear guide rail 6 is detected through the lever dial indicator, if the error value exceeds a set threshold value, the spatial position of the mandrel 4 is adjusted through the first adjusting component, and the mandrel 4 is driven to deflect relative to the rear center 321 through the axial movement of the adjusting rod, so that the mandrel 4 is parallel to the linear guide rail 6;

When the front bearing adjusting mechanism works, the space position of the axis of the front bearing is detected through the lever dial indicator, the deviation value of the axis of the front bearing and the axis of the mandrel 4 is confirmed, the space position of the front bearing is adjusted to be parallel to the axis of the mandrel 4 through the adjusting rod, the space position of the front bearing is adjusted to be collinear with the axis of the mandrel 4 through the adjusting rod, and the adjusting rod positioned on the same side of the front bearing needs to rotate for the same distance during the second step of adjustment;

When the rear bearing adjusting mechanism works, the space position of the axis of the rear bearing is detected through the lever dial indicator, the deviation value of the axis of the rear bearing and the axis of the mandrel 4 is confirmed, the space position of the rear bearing is adjusted to be parallel to the axis of the mandrel 4 through the adjusting rod, the space position of the rear bearing is adjusted to be collinear with the axis of the mandrel 4 through the adjusting rod, and the adjusting rod positioned on the same side of the rear bearing needs to rotate for the same distance during the second step of adjustment.

Example 2

An embodiment of the present application provides a spindle assembly method for a wafer grinder, the spindle including a spindle 4, a front bearing and a rear bearing, the spindle assembly method assembling the spindle using the spindle assembly tool for the wafer grinder of embodiment 1, the spindle assembly method including the steps of: the mandrel 4, the front bearing and the rear bearing are respectively arranged between the front center mechanism 31 and the rear center mechanism 32, and on the front bearing adjusting mechanism and the rear bearing adjusting mechanism;

detecting the parallelism error of the mandrel 4 and the linear guide rail 6 in the linear guide rail mechanism, and if the detected parallelism error exceeds a set threshold value, driving the mandrel 4 to deflect around the rear center mechanism 32 through the front center mechanism 31 until the parallelism error value of the axis of the mandrel 4 and the linear guide rail 6 in the linear guide rail mechanism is smaller than the set threshold value;

and detecting coaxiality errors of the axis of the front bearing or the axis of the rear bearing and the axis of the mandrel 4, and if the detected coaxiality error value exceeds a set threshold value, adjusting the position of the front bearing or the rear bearing in space by a front bearing adjusting mechanism or a rear bearing adjusting mechanism so that the coaxiality error value is smaller than the set threshold value, and finishing assembly of the front bearing or the rear bearing and the mandrel 4.

Specifically, in the above operation step, when the coaxiality of the axis of the front bearing or the axis of the rear bearing and the axis of the spindle 4 is detected, the front bearing and the rear bearing may be detected simultaneously or separately, for example, the coaxiality of the axis of the front bearing and the axis of the spindle 4 may be detected first, and the spatial position of the front bearing may be adjusted by the front bearing adjusting assembly 22, so that the coaxiality error value between the axis of the front bearing and the axis of the spindle 4 accords with the set threshold, and then the adjusted front bearing may be assembled onto the spindle 4 by the cooperation between the front bearing support 21 and the linear guide 6; and then the coaxiality of the axis of the rear bearing and the axis of the mandrel 4 is detected, the space position of the rear bearing is adjusted through the rear bearing adjusting assembly, so that the coaxiality error value between the axis of the rear bearing and the axis of the mandrel 4 accords with a set threshold value, and the adjusted rear bearing is assembled on the mandrel 4 through the cooperation between the rear bearing support piece and the linear guide rail 6. The detection of the coaxiality error value of the axis of the front bearing and the axis of the rear bearing and the axis of the mandrel 4 may be performed separately or simultaneously, and the assembly process may be performed simultaneously or separately after the spatial positions of the front bearing and the rear bearing are adjusted.

In this embodiment, a lever dial indicator is used to detect the parallelism error of the spindle 4 and the linear guide rail 6, and the coaxiality error of the axis of the front bearing or the axis of the rear bearing and the axis of the spindle 4.

Example 3

The embodiment of the application provides a mandrel adjusting method based on a spindle assembly tool, as shown in fig. 12, the method is executed by electronic equipment such as a computer or a server, and the like, and specifically comprises the following steps:

s1, performing surface marking measurement on two planes where the mandrel is located by utilizing two lever dial indicators which are slidably arranged on the linear guide rail. The lever dial indicator is used for detecting the parallelism of the axis of the mandrel and the linear guide rail, the lever dial indicator is slidably mounted on the linear guide rail through the indicator frame, the detection end of the lever dial indicator is in contact with the surface of the mandrel, the lever dial indicator slides on the linear guide rail for a certain distance, and the dial indicator number can change along with the mandrel.

Specifically, a lever dial indicator is respectively arranged on two linear guide rails on the base station, a space coordinate system is established as shown in fig. 13, the Y axis of the lever dial indicator is parallel to the linear guide rails, and the two dial indicators respectively perform dial indicator measurement on the YZ plane and the XY plane. As shown in fig. 14, when the YZ plane is measured, the detection ends of the two lever dial indicators are symmetrically arranged on the mandrel, and the movement from the position 1 to the position 2 (the lever dial indicator slides from the position 1 to the position 2 on the linear guide rail through the meter frame) completes the measurement of the YZ plane, the dial indicators of the YZ plane are denoted as a first lever dial indicator 8 and a second lever dial indicator 9, and the dial indicators of the XY plane are denoted as a third lever dial indicator 10 and a fourth lever dial indicator 11.

S2, acquiring a dial indicator number. The computer can obtain the indication numbers of the two lever dial indicators of the two planes through the sensor respectively.

S3, determining the axis deflection mode of the mandrel according to the dial indicator number. Specifically, the change of the number of the lever dial indicators can indicate the deflection condition of the mandrel, as shown in fig. 14, taking the YZ plane as an example, the number of the lever dial indicators will not change from the position 1 to the position 2 of the first lever dial indicator 8 and the second lever dial indicator 9 if the axis of the mandrel is horizontal; as shown in fig. 15, in the YZ plane, if the axis of the mandrel is deflected by a certain angle, the indication number of the dial indicator will change during the process of moving the lever dial indicator, so that the deflection condition of the mandrel can be determined by the indication number of the dial indicator.

S4, determining a target adjusting rod according to the mandrel axis deflection mode. According to the deflection condition of the mandrel, the position of the adjusting rod is determined to be problematic, and the position of the adjusting rod is determined to be the target adjusting rod to be corrected.

S5, calculating the rotation angle and the axial movement direction of the target adjusting rod according to the dial indicator number.

And S6, controlling the target adjusting rod to rotate according to the rotation angle and the axial movement direction, and driving the mandrel to deflect so that the axis of the mandrel is parallel to the linear guide rail of the linear guide rail mechanism. When the mandrel deflects in the YZ plane and the XY plane, the space position of the front center fixing rod is continuously adjusted according to the calculated angle and the rotation direction of the target adjusting rod, so that the front center drives the mandrel to deflect relative to the rear center, and the axis of the mandrel is parallel to the linear guide rail.

According to the embodiment, the two lever dial gauges which are slidably arranged on the linear guide rail are utilized to respectively perform the dial gauge measurement on the two planes where the mandrel is located, the deflection direction of the mandrel and the adjusting rod which is subjected to error adjustment can be determined according to the indication number of the dial gauges, the rotation direction and the rotation angle of the target adjusting rod which need to be corrected can be calculated according to the indication number of the dial gauges, the error generated by the deflection of the mandrel can be accurately corrected, micron-sized assembly can be performed among parts, and the efficiency of the mandrel assembly is improved.

In one embodiment, step S3 specifically includes:

S31, judging whether the indication numbers of the two lever dial indicators are zero, judging whether the indication numbers of the lever dial indicators of the YZ plane and the XZ plane are zero, and if the indication numbers of the two lever dial indicators are zero, indicating that the spindle axis of the YZ plane or the XZ plane is not deflected, executing the step S32; if the numbers of the two lever dial indicators are not zero, the spindle axis representing the YZ plane or the XZ plane deflects, step S33 is executed,

S32, judging that the spindle axis of the plane measured by the lever dial indicator is normal.

S33, the spindle axis deflection of the plane measured by the lever dial indicators is judged, and the spindle axis deflection direction is determined according to the positive and negative of the indication numbers of the two lever dial indicators.

Further, as shown in fig. 16, the first plane a is a projection of the mandrel on the XY plane, the second plane b is a projection of the mandrel on the YZ plane, and if the first plane is deflected, the mandrel is deflected with respect to the YZ plane, and if the second plane is deflected, the mandrel is deflected with respect to the XY plane.

In step S33, after the spindle axis deflection of the plane measured by the lever dial indicators is determined, the spindle axis deflection direction is determined according to the positive and negative of the numbers of the two lever dial indicators. Taking the YZ plane as an example, the rotation directions of the pointers of the first lever dial indicator 8 and the second lever dial indicator 9 which are oppositely arranged on the mandrel are opposite, one is clockwise, and the other is anticlockwise, so that the number of the lever dial indicators is positive and negative, if the thimble of the first lever dial indicator 8 is shortened from the position 1 to the position 2, the pointer of the lever dial indicator rotates clockwise, the number of the pointer is positive, and if the thimble extends, the pointer of the lever dial indicator rotates anticlockwise, and the number of the pointer is negative.

S331, for the first plane, if the indication number of the first lever dial indicator 8 is positive and the indication number of the second lever dial indicator 9 is negative, the axis of the mandrel is determined to be anticlockwise deflected.

Specifically, with respect to the YZ plane, the first plane deflects, if the number of the first lever dial indicator 8 is positive, and the number of the second lever dial indicator 9 is negative, as shown in fig. 17, the gauge needle of the first lever dial indicator 8 rotates clockwise, the thimble thereof shortens, the gauge needle of the second lever dial indicator 9 rotates counterclockwise, the thimble thereof extends, and thus the mandrel axis deflects counterclockwise with respect to the normal axis.

S332, for the first plane, if the indication number of the first lever dial indicator 8 is negative and the indication number of the second lever dial indicator 9 is positive, it is determined that the spindle axis is clockwise deflected.

Specifically, with respect to the YZ plane, if the number of the first lever dial indicator 8 is negative and the number of the second lever dial indicator 9 is positive, as shown in fig. 18, the pointer of the first lever dial indicator 8 rotates counterclockwise, the thimble thereof extends, the pointer of the second lever dial indicator 9 rotates clockwise, and the thimble thereof shortens, so that the spindle axis deflects clockwise with respect to the normal axis.

S333, for the second plane, if the indication number of the third lever dial gauge 10 is positive and the indication number of the fourth lever dial gauge 11 is negative, it is determined that the spindle axis is deflected counterclockwise.

Specifically, when the second plane is deflected with respect to the XY plane, if the number of the third dial indicator 10 is positive and the number of the fourth dial indicator 11 is negative, as shown in fig. 19, the pointer of the first dial indicator 8 rotates clockwise, the thimble thereof shortens, the pointer of the second dial indicator 9 rotates counterclockwise, the thimble thereof extends, and the spindle axis is deflected counterclockwise with respect to the normal axis.

S334, for the second plane, if the indication number of the third lever dial gauge 10 is negative and the indication number of the fourth lever dial gauge 11 is positive, it is determined that the spindle axis is clockwise deflected.

Specifically, when the second plane is deflected with respect to the XY plane, if the number of the third dial indicator 10 is negative and the number of the fourth dial indicator 11 is positive, as shown in fig. 20, the pointer of the first dial indicator 8 rotates counterclockwise, the thimble thereof extends, the pointer of the second dial indicator 9 rotates clockwise, and the thimble thereof shortens, so that the spindle axis is deflected clockwise with respect to the normal axis.

In the embodiment, the positive and negative indication of the indication number of the lever dial indicators indicate the mandrel deflection to drive the dial indicator test end to move, so that the mandrel axis deflection direction can be determined according to the positive and negative indication numbers of the two lever dial indicators, and the erroneously adjusted adjusting rod can be accurately determined according to the mandrel axis deflection direction.

In one embodiment, step S4 specifically includes:

S41, regarding the first plane, determining the adjusting rod on the deflection side as a target adjusting rod. As shown in fig. 21, the number of the adjustment rods is six, namely a first adjustment rod 1', a second adjustment rod 2', a third adjustment rod 3', a fourth adjustment rod 4', a fifth adjustment rod 5', and a sixth adjustment rod 6', and as shown in fig. 22, the distance from the axis of the second adjustment rod 2 'to the axis of the fifth adjustment rod 5' is The distance from the axis of the second adjusting rod 2' to the contact point of the front center and the core shaft.

Specifically, if the first plane deflects and the axis of the mandrel deflects anticlockwise, the axis deflection condition of the front center fixing rod is shown as 16, the front center fixing rod takes the side of the fifth adjusting rod as the vertex, and deflects upwards anticlockwise, and the second adjusting rod and the fifth adjusting rod are not adjusted, as shown in the figure, the fourth adjusting rod and the sixth adjusting rod are unchanged, so that the axis of the front center fixing rod deflects due to improper adjustment of the first adjusting rod and the third adjusting rod, and the axis of the mandrel deflects anticlockwise, and therefore the first adjusting rod and the third adjusting rod need to be determined as target adjusting rods for correction.

If the first plane deflects and the axis of the mandrel deflects clockwise, the axis deflection condition of the front center fixing rod is shown as 17, the front center fixing rod takes the side of the second adjusting rod as the vertex, and deflects clockwise upwards, and the second adjusting rod and the fifth adjusting rod are not adjusted, as shown in the figure, the first adjusting rod and the third adjusting rod are unchanged, so that the axis of the front center fixing rod deflects due to improper adjustment of the fourth adjusting rod and the sixth adjusting rod, and the axis of the mandrel deflects anticlockwise, and therefore the fourth adjusting rod and the sixth adjusting rod are required to be determined as target adjusting rods for correction.

S42, for the second plane, two groups of adjusting rods which are symmetrical on two sides of the front center fixing rod are determined to be target adjusting rods.

Specifically, if the second plane is deflected and the axis of the mandrel is deflected counterclockwise, as shown in fig. 18, the axis deflection of the mandrel is performed on the premise that the first plane is not deflected, and the second plane is deflected due to the simultaneous improper adjustment of two sets of adjustment rods respectively located on the same side, so that the first adjustment rod, the fourth adjustment rod, the third adjustment rod and the sixth adjustment rod need to be determined as target adjustment rods for correction.

Specifically, if the second plane is deflected and the axis of the mandrel is deflected clockwise, as shown in fig. 19, if the axis of the mandrel is deflected, and if the first plane is not deflected, the second plane is deflected due to the fact that two groups of adjusting rods respectively located on the same side are simultaneously improperly adjusted, so that the first adjusting rod, the fourth adjusting rod, the third adjusting rod and the sixth adjusting rod need to be determined as target adjusting rods for correction.

When the second plane deflects, the adjusting rods on the same side are adjusted simultaneously, so that the axis of the front center fixing rod can translate along the X axis, pitching motion is not generated (namely pitching of the first plane is not generated), the front center contact point is driven to translate along the X axis, the mandrel (taking the contact point of the rear center mechanism and the mandrel as the origin) is driven to generate deflection motion, and therefore the adjustment of the second plane is achieved.

In one embodiment, in step S5, calculating the rotation angle of the target adjustment lever according to the dial indicator number specifically includes:

s511, calculating the axial movement distance of the target adjusting rod by using the geometric relationship among the axis of the deflection mandrel, the target adjusting rod and the axis of the target mandrel parallel to the linear guide rail mechanism and the dial indicator.

S512, calculating the rotation angle of the target adjusting rod according to the axial movement distance.

First case: the first plane is deflected and the spindle axis is deflected counter-clockwise, as shown in FIG. 17, the distance that the first dial indicator 8 moves from position 1 to position 2 is noted asThe first lever dial gauge 8 rotates the scale/>, clockwise(Positive number) the second dial lever 9 rotates the scale counter clockwise/>(Negative number), as shown in FIG. 27, which is an axial movement diagram of the improper adjustment of the target adjusting lever, the first adjusting lever and the third adjusting lever are deflected by upward movement of the front center fixing lever due to the improper adjustment, and 1 is the contact point between the first adjusting lever and the center top rod,/>The point is that the first adjusting rod moves along the axial direction/>At the rear position, 3 points are the contact points of the third adjusting rod and the top ejector rod,/>The point is that the third adjusting rod moves along the axial direction/>A rear position. /(I)The point is the center of the projection of the top ejector rod on the XZ plane,/>The point is the position where the center of the top post rod changes after the adjusting rod moves. /(I)For/>Point and/>Distance of the points. /(I)The included angle between the axes of the first adjusting rod and the third adjusting rod is a known quantity. As can be taken from figure 27,

；

Because the adjusting rod is a screw with the thread pitch of 1mm, the front vertex fixing rod moves 0.0028mm axially when the screw rotates by 1 DEG, and the calculation formula is as follows:

；

Wherein, For adjusting the axial movement distance of the rod, the unit is mm,/>The unit is degree for adjusting the rotation angle of the screw of the rodIs pitch in mm, p=1 mm,/>Is the number of threads.

It is thus possible to obtain a solution,

；

Moving the first and third adjustment bars in FIG. 27 causes the point of contact of the front tip with the mandrel to move along the Z-axisAccording to FIG. 23, it is possible to obtain/>

；

The length of the mandrel is known asThe contact point of the mandrel moves/>, along the Z-axisBy using the principle of similar triangle, the method can obtain

；

The movement distance of the mandrel (the axial movement distance of the target adjusting rod) is obtained as

；

From the above formula

；

Therefore, the rotation angles of the first adjusting rod and the third adjusting rod are obtained as。

Second case: the first plane deflects and the spindle axis deflects clockwise, as shown in FIG. 18, and the distance that the first dial indicator 8 moves from position 1 to position 2 is recorded asThe first lever dial gauge 8 rotates the scale counter clockwise/>(Negative number) the second dial indicator 9 rotates the scale/>, clockwise(Positive number) as in the first case, the change in movement of the fourth adjustment lever and the sixth adjustment lever corresponds to the rule of fig. 27, and therefore the axial movement distance of the fourth adjustment lever and the sixth adjustment lever is also。

According to FIG. 24, the contact point of the front center and the mandrel is moved along the Z axis by moving the fourth adjusting lever and the sixth adjusting lever according to the rule of FIG. 27Then

；

The mandrel moving distance (axial moving distance of the target adjusting rod) obtained in the first case is known as

；

From the above formula

；

Therefore, the rotation angles of the fourth adjusting rod and the sixth adjusting rod are obtained as。

Third case: the second plane deflects and the spindle axis deflects counterclockwise, as shown in FIG. 26 for the third lever indicator 10 from position 1 to position 2It turns the scale clockwise/>(Positive number), the fourth lever dial gauge 11 rotates the scale counter clockwise/>(Negative number), as in FIG. 25, the mandrel length is known as/>The distance of deflection of the contact point of the front center mechanism and the mandrel is/>And is obtained according to the principle of similar triangle

；

Thereby can be obtained

；

As shown in fig. 28, the final distance of movement of the front center dead lever axis is also1 Point is the initial position of the first adjusting rod and the fourth adjusting rod,/>The point is the position of the first adjusting rod and the fourth adjusting rod after the extension (improper adjustment), the point 3 is the initial position of the third adjusting rod and the sixth adjusting rod,/>The point is the shortened (improperly adjusted) position of the third adjusting rod and the sixth adjusting rod,/>The point is the initial position of the front center and the center of the core shaft contact circle,/>The point is the moved position of the front center and the center of the core shaft. /(I)Point and/>The line of points is parallel to the X-axis. /(I)Point, 1 Point connection line/>Point,/>The point-connecting line intersects at point C, the straight line/>Length is/>Straight line/>Length of/>Straight line/>Length of/>。

As shown in FIG. 29, in a triangle shapeMiddle straight line/>Length of/>; Straight line/>The length of (a) is the radius R, the straight line/>, of the cross-sectional circle of the front center fixing bar 319 in FIG. 4Length of/>、/>，. Cross/>Dot straight line/>From which the following equation is derived

；

In FIG. 28, trianglesTriangle/>Similarly, straight line/>Length of/>Straight line/>Length of/>Straight line/>Length of/>According to the principle of similar triangle, the following equation is obtained

；

I.e.

；

In a triangle shapeMiddle through C point as straight line/>As shown in FIG. 30, the following equation relationship can be obtained；

As shown in fig. 31, in a triangleMiddle excess/>Dot straight line/>The following relation can be obtained from the perpendicular lines of (2)

；

Due to、/>、/>、/>R is a known quantity, and the/>, can be obtained according to the formulaFurther, the/>According to、/>Sum formula

；

Can be obtained

；

；

Therefore, the obtained spindle moving distance (axial moving distance of the target adjusting lever), that is, the axial moving distance of the third adjusting lever and the sixth adjusting lever isThe axial movement distance of the first adjusting rod and the fourth adjusting rod is/>The rotation angle of the third adjusting rod and the sixth adjusting rod is/>The rotation angle of the first adjusting rod and the fourth adjusting rod is/>。/>

Fourth case: the second plane deflects, the axis of the mandrel deflects clockwise, the calculation process is the same as that of the third condition, and the rotation angles of the third adjusting rod and the sixth adjusting rod can be calculated to beThe rotation angle of the first adjusting rod and the fourth adjusting rod is/>。

According to the embodiment, the axial rotation angle of the target adjusting rod is calculated, so that the axial distance of the adjusting rod can be accurately corrected, and the mandrel can be driven to deflect so that the axis of the mandrel is parallel to the linear guide rail of the linear guide rail mechanism, and the mandrel assembly work can be completed with high precision and high efficiency.

In one embodiment, calculating the axial movement direction of the target adjustment lever according to the dial indicator in step S5 specifically includes:

s521, determining the deflection direction of the mandrel according to the dial indicator number. Namely, the deflection direction of the mandrel is determined according to the positive and negative of the lever dial indicator in the step S33.

S522, determining the axial moving direction of the target adjusting rod according to the deflection direction of the mandrel. The axial moving direction can know the rotating direction of the adjusting rod, and the specific rotating direction can be determined according to the arrangement of the threads of the adjusting rod.

Further, step S522 specifically includes:

S5221, for the first plane, if the mandrel axis is deflected counterclockwise, it is determined that the target adjustment rod is axially shortened.

Specifically, the target adjusting rods are a first adjusting rod and a third adjusting rod, and the first adjusting rod and the third adjusting rod should be axially shortened so as to drive the mandrel to deflect to enable the axis of the mandrel to be parallel to the linear guide rail of the linear guide rail mechanism.

S5222, for the first plane, if the mandrel axis is deflected clockwise, it is determined that the target adjustment rod is axially shortened.

Specifically, the target adjusting rods are a fourth adjusting rod and a sixth adjusting rod, and the fourth adjusting rod and the sixth adjusting rod should be axially shortened so as to drive the mandrel to deflect so that the axis of the mandrel is parallel to the linear guide rail of the linear guide rail mechanism.

S5223, for the second plane, if the mandrel axis is deflected counterclockwise, it is determined that the first set of target adjustment rods axially shortens and the second set of target adjustment rods axially lengthens.

Specifically, the first group of target adjusting rods are a first adjusting rod and a fourth adjusting rod, the second group of target adjusting rods are a third adjusting rod and a sixth adjusting rod, the first adjusting rod and the fourth adjusting rod should be axially shortened, and meanwhile the third adjusting rod and the sixth adjusting rod should be axially extended, so that the mandrel can be driven to deflect, and the axis of the mandrel is parallel to the linear guide rail of the linear guide rail mechanism.

S5224, for the second plane, if the mandrel axis is deflected clockwise, it is determined that the first set of target adjustment rods axially extend and the second set of target adjustment rods axially shorten.

Specifically, the first group of target adjusting rods are a first adjusting rod and a fourth adjusting rod, the second group of target adjusting rods are a third adjusting rod and a sixth adjusting rod, the first adjusting rod and the fourth adjusting rod should be axially extended, and meanwhile the third adjusting rod and the sixth adjusting rod should be axially shortened, so that the mandrel can be driven to deflect, and the axis of the mandrel is parallel to the linear guide rail of the linear guide rail mechanism.

According to the embodiment, the axial moving direction of the target adjusting rod is determined, so that automatic adjustment and accurate adjustment of the axial distance of the adjusting rod can be realized, the axis of the mandrel is parallel to the linear guide rail of the linear guide rail mechanism, and the mandrel assembly work is completed with high precision.

In one embodiment, step S33 determines the spindle axis deflection of the plane measured by the lever dial indicators, and determines the spindle axis deflection direction according to the sign of the numbers of the two lever dial indicators, and further includes:

If the spindle axis of the plane measured by the lever dial indicators deflects, judging whether the indication numbers of the two lever dial indicators are within a threshold value;

if the indication numbers of the two lever dial indicators are within the threshold value, judging that the adjusting rod is not adjusted;

If the indication numbers of the two lever dial indicators are not in the threshold value, the axis deflection direction of the mandrel is determined according to the positive and negative of the indication numbers of the two lever dial indicators.

The mandrel cannot be parallel to the linear guide rail of the linear guide rail mechanism, so that when the indication number of the lever dial indicator is obtained, whether the indication number is in an error range is judged first, if the indication number is in the error range, an adjusting rod is not required to be adjusted, the calculated amount can be saved, the efficiency of mandrel assembly is improved, and if the indication number is not in the error range, the corresponding adjusting rod is required to be adjusted, the error caused by mandrel deflection can be reduced, and the accuracy of mandrel assembly is improved.

It will be appreciated by those skilled in the art that embodiments of the present invention may be provided as a method, system, or computer program product. Accordingly, the present invention may take the form of an entirely hardware embodiment, an entirely software embodiment or an embodiment combining software and hardware aspects. Furthermore, the present invention may take the form of a computer program product embodied on one or more computer-usable storage media (including, but not limited to, disk storage, CD-ROM, optical storage, and the like) having computer-usable program code embodied therein.

The present invention is described with reference to flowchart illustrations and/or block diagrams of methods, apparatus (systems) and computer program products according to embodiments of the invention. It will be understood that each flow and/or block of the flowchart illustrations and/or block diagrams, and combinations of flows and/or blocks in the flowchart illustrations and/or block diagrams, can be implemented by computer program instructions. These computer program instructions may be provided to a processor of a general purpose computer, special purpose computer, embedded processor, or other programmable data processing apparatus to produce a machine, such that the instructions, which execute via the processor of the computer or other programmable data processing apparatus, create means for implementing the functions specified in the flowchart flow or flows and/or block diagram block or blocks.

These computer program instructions may also be stored in a computer-readable memory that can direct a computer or other programmable data processing apparatus to function in a particular manner, such that the instructions stored in the computer-readable memory produce an article of manufacture including instruction means which implement the function specified in the flowchart flow or flows and/or block diagram block or blocks.

These computer program instructions may also be loaded onto a computer or other programmable data processing apparatus to cause a series of operational steps to be performed on the computer or other programmable apparatus to produce a computer implemented process such that the instructions which execute on the computer or other programmable apparatus provide steps for implementing the functions specified in the flowchart flow or flows and/or block diagram block or blocks.

Other embodiments of the application will be apparent to those skilled in the art from consideration of the specification and practice of the application disclosed herein. This application is intended to cover any variations, uses, or adaptations of the application following, in general, the principles of the application and including such departures from the present disclosure as come within known or customary practice within the art to which the application pertains. It is intended that the specification and examples be considered as exemplary only, with a true scope and spirit of the application being indicated by the following claims.

Claims (12)

1. The main shaft assembly tool for the wafer grinder is characterized by comprising a mandrel, a front bearing and a rear bearing, wherein the front bearing and the rear bearing are arranged on the mandrel; the main shaft assembly fixture comprises a linear guide rail mechanism, a mandrel adjusting system and a bearing adjusting system; the mandrel adjusting system comprises a front center mechanism and a rear center mechanism, wherein the front center mechanism is slidably arranged on the linear guide rail mechanism, the rear center mechanism is fixedly arranged with the linear guide rail mechanism, the front center mechanism and the rear center mechanism clamp the mandrel from front and rear ends, and the front center mechanism is arranged to drive the mandrel to deflect relative to the rear center mechanism so that the axis of the mandrel is parallel to the linear guide rail of the linear guide rail mechanism; the bearing adjusting system comprises a front bearing adjusting mechanism and a rear bearing adjusting mechanism, wherein the front bearing adjusting mechanism and the rear bearing adjusting mechanism are both slidably mounted on the linear guide rail, and the front bearing adjusting mechanism is used for adjusting the position of the front bearing in space so as to enable the front bearing to be assembled with the mandrel and enable the front bearing to be coaxial with the mandrel; the rear bearing adjustment mechanism is configured to adjust a position of the rear bearing in space to assemble the rear bearing with the spindle and to coaxially align the rear bearing with the spindle; the front bearing adjustment mechanism includes: a front bearing support slidable along the linear guide rail; a front bearing adjustment assembly arranged in a plurality of groups symmetrically arranged on the front bearing support for supporting the front bearing, the front bearing adjustment assembly being arranged to adjust the position of the front bearing in space to assemble the front bearing with the spindle and to coaxially align the front bearing with the spindle; and/or, the rear bearing adjustment mechanism comprises: a rear bearing support slidable along the linear guide rail; a rear bearing adjustment assembly arranged in a plurality of groups symmetrically arranged on the rear bearing support for supporting the rear bearing, the rear bearing adjustment assembly being arranged to adjust the position of the rear bearing in space to assemble the rear bearing with the spindle and to coaxially align the rear bearing with the spindle; the front bearing adjustment assembly and the rear bearing adjustment assembly each include: the coarse adjustment structure is used for supporting the front bearing or the rear bearing and coarse adjusting the space position of the front bearing or the rear bearing when the front bearing or the rear bearing is hoisted to the front bearing adjusting mechanism or the rear bearing adjusting mechanism; the fine adjustment structure is used for carrying out micron-level adjustment on the space position of the front bearing or the rear bearing; the front bearing adjustment assembly is identical in structure to the rear bearing adjustment assembly, and includes: the shaft sleeve upper fixing plate and the shaft sleeve lower fixing plate are respectively fixed on the inner wall and the outer wall of the front bearing support piece or the rear bearing support piece, and shaft sleeve mounting holes are formed in the shaft sleeve upper fixing plate and the shaft sleeve lower fixing plate; the shaft sleeve is penetrated through the shaft sleeve mounting holes of the shaft sleeve upper fixing plate and the shaft sleeve lower fixing plate, the axial direction of the shaft sleeve faces to the front bearing or the rear bearing, and a pushing rod threaded hole is formed in the shaft sleeve; the screw is arranged on the lower fixing plate of the shaft sleeve and is in threaded fit with the shaft sleeve, the shaft sleeve can be driven to axially move by rotating the screw, and the screw and the shaft sleeve form the fine adjustment structure; the pushing rod is in threaded fit with the threaded hole of the pushing rod of the shaft sleeve, the screw pitch of the pushing rod is at least 2 times that of the threaded screw pitch of the shaft sleeve and the screw, and the pushing rod, the shaft sleeve and the screw form the coarse adjustment structure together.

2. The spindle assembly tool for a wafer grinder of claim 1, wherein the front center mechanism comprises:

The front center is used for fixing the front end of the mandrel and is used for clamping the mandrel with the rear center of the rear center mechanism from the front end and the rear end;

the front center fixing rod is used for fixing the front center;

The front center support piece is used for supporting the front center fixing rod and can slide along the linear guide rail;

The first adjusting component is arranged on the front center support piece and is arranged to be capable of adjusting the space position of the front center fixing rod so that the front center fixing rod drives the front center and the mandrel to deflect around the rear center;

and/or the number of the groups of groups,

The back center mechanism includes:

The back center is used for fixing the rear end of the mandrel and is used for clamping the mandrel with the front center of the front center mechanism from the rear end and the front end;

the back center fixing rod is used for fixing the back center;

And the back center support piece is used for supporting the back center fixing rod and is fixedly arranged on the linear guide rail mechanism.

3. The spindle assembly tool for a wafer grinder of claim 2, wherein the first adjustment assembly comprises:

The adjusting rods are circumferentially and uniformly arranged on the front center support, the adjusting ends of the adjusting rods extend into the front center support to support the front center fixing rod, and the extending lengths of the adjusting rods along the axial direction of the adjusting rods are adjustable; the spatial position of the front center fixing rod can be adjusted by controlling the extending lengths of the adjusting rods.

4. The spindle assembly tool for a wafer grinder of claim 3, wherein the plurality of adjustment bars are arranged in at least two groups in a front-rear direction of the front center support; and/or the adjusting rod is in threaded fit with the front center support.

5. The spindle assembly tool for a wafer grinder of claim 2, wherein the front center mechanism further comprises:

The first guide rail locking piece is used for locking the linear guide rail so as to fix the front center mechanism and the linear guide rail;

the fixed plate is used for connecting the first guide rail locking piece and the front center support piece;

the anti-rotation fixing piece is used for locking the front center fixing rod after the space position of the mandrel is adjusted, so that the position of the mandrel is fixed;

And the axial limiting piece is used for applying axial force to the front center fixing rod towards the mandrel direction and limiting the front center fixing rod from axially moving in a serial manner.

6. The spindle assembly tool for a wafer grinder of claim 1, wherein the front bearing adjustment assembly and the rear bearing adjustment assembly further comprise:

The pushing rod anti-rotation piece is arranged at the joint of the pushing rod and the shaft sleeve and is used for locking the rotation direction of the pushing rod after coarse adjustment is carried out on the space position of the front bearing or the rear bearing;

The shaft sleeve anti-rotation piece is arranged at the joint of the shaft sleeve and the upper fixing plate of the shaft sleeve and is used for locking the rotation direction of the shaft sleeve after the space position of the front bearing or the rear bearing is finely adjusted.

7. The spindle assembly tool for a wafer grinder of claim 1, wherein the front bearing adjustment mechanism and the rear bearing adjustment mechanism further comprise:

And the locking assembly is mounted on the front bearing support or the rear bearing support and used for limiting the vertical position of the front bearing or the rear bearing from the upper part of the front bearing or the rear bearing.

8. The spindle assembly tool for a wafer grinder of claim 7, wherein the locking assembly comprises:

A locking bracket mounted on the front bearing support or the rear bearing support across the front bearing or the rear bearing support, the locking bracket comprising a cross bar located above the front bearing support or the rear bearing support;

The locking rod is slidably arranged on the cross rod, the locking rod and the cross rod can be locked, the sliding direction of the locking rod is perpendicular to the cross rod, and the end part of the locking rod is suitable for being abutted to the front bearing or the top of the rear bearing, and the front bearing adjusting assembly or the rear bearing adjusting assembly is matched and fixed at the position of the front bearing or the rear bearing.

9. The spindle assembly tool for a wafer grinder as set forth in any one of claims 1-8, further comprising:

And the error detection component is used for detecting the parallelism error of the axis of the mandrel and the linear guide rail and/or the coaxiality error of the axis of the front bearing and the axis of the mandrel and/or the coaxiality error of the axis of the rear bearing and the axis of the mandrel.

10. The spindle assembly tool for a wafer grinder of claim 9, wherein the error detecting component is a lever dial gauge.

11. The spindle assembly tool for a wafer grinder as set forth in any one of claims 1-8, wherein the linear guide mechanism includes two linear guides and a base, the two linear guides being mounted in parallel on the base, the linear guides being provided with sliders;

The front center mechanism, the front bearing adjusting mechanism and the rear bearing adjusting mechanism are all installed on the sliding block, and the rear center mechanism is fixed on the base station.

12. A spindle assembly method for a wafer grinder, the spindle comprising a spindle, a front bearing and a rear bearing; the spindle assembly method for assembling the spindle using the spindle assembly tool for a wafer grinder as set forth in any one of claims 1 to 11, the spindle assembly method comprising the steps of:

Placing the spindle, the front bearing and the rear bearing between the front center mechanism and the rear center mechanism, and on the front bearing adjusting mechanism and the rear bearing adjusting mechanism, respectively;

detecting the parallelism error of the mandrel and the linear guide rail mechanism, and driving the mandrel to deflect around the rear center mechanism through the front center mechanism if the detected parallelism error value exceeds a set threshold value until the parallelism error value of the axis of the mandrel and the linear guide rail mechanism is smaller than the set threshold value;

And detecting coaxiality errors of the axis of the front bearing or the axis of the rear bearing and the axis of the mandrel, and if the detected coaxiality error value exceeds a set threshold value, adjusting the position of the front bearing or the rear bearing in space through the front bearing adjusting mechanism or the rear bearing adjusting mechanism so that the coaxiality error is smaller than the set threshold value, and completing assembly of the front bearing or the rear bearing and the mandrel.