CN117968839A - Quick test device and test method for photoelectric detector - Google Patents
Quick test device and test method for photoelectric detector Download PDFInfo
- Publication number
- CN117968839A CN117968839A CN202410291025.5A CN202410291025A CN117968839A CN 117968839 A CN117968839 A CN 117968839A CN 202410291025 A CN202410291025 A CN 202410291025A CN 117968839 A CN117968839 A CN 117968839A
- Authority
- CN
- China
- Prior art keywords
- collimator
- photoelectric detector
- light
- optical
- array
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000012360 testing method Methods 0.000 title claims abstract description 101
- 238000010998 test method Methods 0.000 title claims abstract description 5
- 230000003287 optical effect Effects 0.000 claims abstract description 67
- 239000013307 optical fiber Substances 0.000 claims abstract description 32
- 238000006243 chemical reaction Methods 0.000 claims abstract description 27
- 238000006073 displacement reaction Methods 0.000 claims abstract description 21
- 238000003780 insertion Methods 0.000 claims description 14
- 230000037431 insertion Effects 0.000 claims description 14
- 230000035559 beat frequency Effects 0.000 claims description 7
- 230000000737 periodic effect Effects 0.000 claims description 4
- 238000000034 method Methods 0.000 description 9
- 238000012545 processing Methods 0.000 description 6
- 238000010586 diagram Methods 0.000 description 4
- 230000001678 irradiating effect Effects 0.000 description 3
- 239000000523 sample Substances 0.000 description 3
- KTXUOWUHFLBZPW-UHFFFAOYSA-N 1-chloro-3-(3-chlorophenyl)benzene Chemical compound ClC1=CC=CC(C=2C=C(Cl)C=CC=2)=C1 KTXUOWUHFLBZPW-UHFFFAOYSA-N 0.000 description 2
- 239000000835 fiber Substances 0.000 description 2
- 238000005070 sampling Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000001427 coherent effect Effects 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000005622 photoelectricity Effects 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000001931 thermography Methods 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
- 238000000844 transformation Methods 0.000 description 1
Landscapes
- Testing Of Individual Semiconductor Devices (AREA)
Abstract
The invention discloses a rapid test device and a test method of a photoelectric detector, wherein the rapid test device comprises a mechanical fixing device, a modulated light generating device, a light source fine adjustment fixing device and a readout circuit, wherein a light source of the modulated light generating device is connected to a collimator through two optical fiber couplers and two optical phase shifters, and a first optical phase shifter is connected with a digital-to-analog conversion module; the elastic pin contact pin array is positioned at the center of the mechanical table top, the displacement table is connected with the collimator clamp, the collimator is positioned right above the mechanical table top, the collimator vertically enters the photosensitive surface of the photoelectric detector, the photoelectric detector is connected with the elastic pin contact pin array on the PCB, the output of the PCB is matched with the readout circuit, and the test data are used as the basis of the quality classification of the photoelectric detector. The invention adopts modulated light to replace the traditional light source and adopts the collimator to irradiate the photosensitive surface, and has the advantages of high testing efficiency, low cost and strong practicability.
Description
Technical Field
The invention belongs to the technical field of photoelectricity, and particularly relates to a rapid and effective testing device and method of a photoelectric detector.
Background
The principle of the Photodetector (PD) is to use the photoelectric effect of a material, and the optical radiation generates weak photocurrent. Photodetectors are widely used in the military and civilian industries. The method can be used for optical sensing, coherent optical communication, laser radar, missile guidance, infrared thermal imaging, infrared remote sensing and the like.
The traditional detector test is implemented by loading linear reverse bias voltage, testing the magnitude of leakage current generated by PD in a dark environment and using dark current characteristics to represent the performance of PD chips, and the process is implemented by using a series of instruments including a microscope, a microprobe and professional testing instruments and software, and has the advantages of complex operation, high repetition times, lower efficiency and high cost. In addition, the dark current index cannot directly indicate whether the PD is operating normally, for example, the light entrance hole is blocked by debris. A simple, fast, low cost and simple test device is therefore necessary.
Disclosure of Invention
The invention aims to provide a testing device for a photoelectric detector, which solves the problems of high cost and complex operation of the existing device.
In order to achieve the object, the invention provides a rapid test device for a photoelectric detector, which is characterized in that: the light source fine adjustment device comprises a mechanical fixing device, a modulated light generating device, a light source fine adjustment fixing device and a reading circuit; the mechanical fixing device comprises a PCB, a mechanical table top and an elastic pin contact pin array, wherein the elastic pin contact pin array is connected to the PCB, and the PCB is fixed on the mechanical table top; the modulated light generating device comprises a light source, a first optical fiber coupler, a second optical fiber coupler, a first optical phase shifter, an insertion loss adjusting device, a digital-to-analog conversion module and a collimator, wherein the light source is configured to output light to the first optical fiber coupler, the light passes through the first optical phase shifter and the insertion loss adjusting device, then is combined by the second optical fiber coupler, and is connected to the collimator, and the digital-to-analog conversion module is connected with the first optical phase shifter; the light source fine adjustment fixing device comprises a displacement table and a collimator clamp, wherein the bottom of the displacement table is fixed on the mechanical table top, the upper part of the displacement table is connected with the collimator clamp, and the collimator clamp is matched with the mechanical table top so that the collimator is positioned right above the mechanical table top and aligned with the elastic pin contact pin array; the reading circuit comprises an adjustable potentiometer and an analog-to-digital conversion module connected with the adjustable potentiometer, wherein the output of the elastic pin contact pin array is connected to the corresponding adjustable potentiometer, and test data generated by the analog-to-digital conversion module are transmitted to an upper computer.
In some embodiments, the collimator is connected to the displacement stage by a collimator clamp, and the tail of the collimator is connected to the output end of the second fiber coupler.
In some embodiments, the collimator is configured to spread light provided by the light source through the optical fiber to spatial light of uniform optical power to cover the photosensitive surface of the photodetector.
In some embodiments, the elastic pin contact pin array disposed on the surface of the PCB board is a replaceable elastic array base, and the signal output of the PCB board for the elastic pin contact pin array is matched with the readout circuit.
In some embodiments, a test hole is further provided on a channel of the readout circuit, where the adjustable potentiometer is connected to the analog-to-digital conversion module, and the test hole is used for leading out a test signal or providing a voltage for a defined power pin.
In some embodiments, the adjustable potentiometer is a digital adjustable potentiometer or a mechanically adjustable potentiometer or a resistive element of fixed resistance.
In some embodiments, the photodetector is a packaged single pixel unit or an array photodetector structure including a linear array photodetector, an area array photodetector.
In some embodiments, the insertion loss adjustment device is a second optical phase shifter or a fiber-optic attenuator.
In some embodiments, the digital-to-analog conversion module is connected to the first optical phase shifter, and the digital-to-analog conversion module modulates a modulation signal of the optical phase shifter, wherein the modulation signal comprises a sine wave signal and a triangular wave signal.
In some embodiments, the readout circuitry is located on a separate circuit board, or on the PCB board.
In some embodiments, the light source is a wavelength, power tunable laser light source.
In some embodiments, the photodetector package form includes, but is not limited to, a PGA package.
In some embodiments, the displacement table is a three-dimensional adjustable displacement table, so that fine adjustment of the collimator position can be realized, and the emergent light spot can cover the photosensitive surface of the detector Fang Guangdian.
The working principle of the rapid testing device of the array photoelectric detector is that two paths of optical signals output by the first optical fiber coupler have coherence, the optical signals modulated by the modulated signals carry modulated signals with specific frequencies, such as sine wave signals, and the information of the modulated signals can be recovered after the beat frequency of the modulated signals with the other path of unmodulated equal-power optical signals. The displacement table adjusts the collimator to be above the optical window, and all channels in the photosensitive surface of the whole photoelectric detector can receive optical signals. And a power supply pin is selected in the reading circuit, and a loop is realized with the photoelectric detector to be detected. The dark current and the photocurrent are important parameters of the photoelectric detector, the quality of a channel in the photoelectric detector can be judged according to the magnitude of the dark current and the photocurrent, and the channel can be classified according to the magnitude order of the dark current and the photocurrent. The device can quickly judge whether each channel in the photoelectric detector and the photoelectric detector array is available or not, and the scene is very similar to the use scene of the detector. When the test is started, the collimator irradiates the whole photosensitive surface, after the beat frequency of the modulated sine wave signal, the modulated sine wave signal is detected by all photoelectric detector channels, and the photocurrent passes through the adjustable potentiometer to recover the sine wave signal, and the magnitude of the photocurrent can be estimated according to the peak-to-peak value of the sine wave signal; the dark current can be estimated according to the minimum sine wave, namely the direct current term, and all data are calculated by an upper computer and a test report is given. Because the analog-to-digital sampling process is extremely fast, the time required for testing one photoelectric detector, especially all channels of the array photoelectric detector is extremely short, and the photocurrent and dark current can be measured simultaneously, so that the testing efficiency is quite high.
Still further embodiments of the present invention provide a testing method using any one of the testing apparatuses described above, the method including: connecting pins of the photoelectric detector to be detected with the PCB by using the elastic pin contact pin array; modulating a sine wave signal to the optical phase shifter by using the digital-to-analog conversion module; the optical fiber insertion loss adjusting device is utilized to ensure that the two paths of optical power are the same; performing beam expansion output on the modulated optical signal by using the collimator; the three-dimensional adjustable displacement table is utilized to move the collimator to the position right above the photosensitive surface of the detector to be detected, so that the photosensitive surface of the photoelectric detector to be detected is irradiated by the modulated light output by the beam expansion; and performing beat frequency by using two paths of optical signals with equal power to perfectly recover the waveform of the sine wave signal, wherein the peak-to-peak value of the waveform of the recovered sine wave signal contains information representing the magnitude of photocurrent and the direct current term of the waveform of the recovered sine wave signal contains information representing the magnitude of dark current.
In some embodiments, the method includes first ensuring that pins of a to-be-tested photodetector are connected with an elastic pin contact pin array on a PCB board, and moving a collimator to a position right above a photosensitive surface of the to-be-tested photodetector by using a light source fine adjustment fixing device; the light of the light source is divided into a first light path and a second light path by a first optical fiber coupler, wherein the light of the light source is coupled to the first optical phase shifter and coupled to a modulation signal of the digital-to-analog conversion module, and the light of the light source is coupled to an insertion loss adjusting device, and the insertion loss adjusting device is configured to ensure that the optical power of the two paths is the same; combining two paths of light by using the second optical fiber coupler, wherein the output of the second optical fiber coupler is connected with the collimator; the PCB is connected with the reading circuit, and sine wave signals obtained by the reading circuit are output to the upper computer; after the steps are completed, the upper computer can evaluate the magnitude of the photocurrent according to the peak-to-peak value of the sine wave signal and evaluate the magnitude of the dark current according to the direct current item of the sine wave signal.
The rapid test device of the photoelectric detector has the following beneficial effects:
the rapid test device of the photoelectric detector can be in good contact with the array pins of the photoelectric detector by utilizing the elastic pin contact pin array, and each elastic contact pin corresponds to an independent output channel, so that the photoelectric detector can output light current and can define power supply pins. The need of single practical probe touch of the array foot of each channel during the test of the traditional array photoelectric detector is avoided. The dark current and the photocurrent of all channels of the array photoelectric detector can be estimated within the second order, and the quality of the array photoelectric detector can be judged. Therefore, the invention greatly improves the testing efficiency of the array photoelectric detector.
The elastic pin contact pin array of the array photoelectric detector of the rapid testing device of the photoelectric detector is a close-packed standard component, is suitable for testing a plurality of standard components, including but not limited to 2.54mm close-packed PGA and BGA, is customizable, is convenient to detach and replace, and is similar to drawing of a circuit board, and simple and rapid. The invention can be used for testing any array photoelectric detector, and has wide application and strong compatibility.
The rapid test device of the photoelectric detector of the invention uses the beat frequency of two paths of signal light with equal power to recover the modulation signal, and can perfectly recover the waveform of the modulation signal, such as the waveform of a sine wave signal. The photocurrent can only be generated by the beat beam, and the magnitude of the photocurrent can be estimated according to the peak-to-peak value of the sine wave signal amplified by the transimpedance amplifier, and the magnitude of the dark current can be estimated according to the direct current term of the sine wave signal caused by the dark current. The invention omits the complicated operation that the dark current and the photocurrent must be separately evaluated, and the dark current and the photocurrent can be simultaneously evaluated by irradiating light with corresponding wavelength by the collimator under the dark environment.
In the rapid test device of the photoelectric detector, the photoelectric detector of the array to be tested is irradiated by the modulated optical signal in the test process, the power distribution is uniform in the collimator light spot, and the relative responsivity of each channel, namely the responsivity consistency assessment of the array detector can be assessed according to the sine wave electric signal amplified by the potentiometer in the read-out circuit. The invention omits the repeated step of testing the responsivity of a single channel after the optical fiber irradiates the single channel, can realize the coverage of a photosensitive surface by using the collimator, has uniform optical power, does not conflict with the testing dark current and photocurrent, and can finish the testing of multiple indexes in one testing process.
The rapid test device of the photoelectric detector can directly test the packaged array detector, can realize the integral test of chips, substrates, gold wire bonding and tube shells, rapidly completes self-checking before going out, and eliminates defective products.
Drawings
Fig. 1 is a schematic structural diagram of a rapid test device of a photodetector according to an embodiment of the invention.
Fig. 2 is a schematic diagram of optical device connection of a rapid test apparatus of a photodetector according to an embodiment of the invention.
Fig. 3 is a schematic structural diagram of a readout circuit of a rapid test device of a photodetector according to an embodiment of the invention.
Detailed Description
In order to make the relevant structure of the present invention clearer, the following detailed description of the present embodiment with reference to the drawings, it should be emphasized that the present embodiment is described in detail for the purpose of describing the entire use of the present invention, and the present invention is not limited thereto.
As shown in fig. 1, a rapid test device of a photodetector comprises a mechanical fixing device 1, a modulated light generating device 2, a light source fine adjustment fixing device 3 and a readout circuit 4, wherein the mechanical fixing device 1 comprises a PCB board 11, a mechanical table top 12 and an elastic pin contact pin array 13, the elastic pin contact pin array 13 is connected to the PCB board 11, and the PCB board is fixed on the mechanical table top 12. As shown in fig. 2, the modulated light generating device 2 includes a light source 21, a first optical fiber coupler 22A, a second optical fiber coupler 22B, a first optical phase shifter 23A, an insertion loss adjusting device 23B, a digital-to-analog conversion module 24 and a collimator 25, wherein the light output by the light source 21 is split after reaching the first optical fiber coupler 22A, one path of the split light passes through the first optical phase shifter 23A, the other path of the split light passes through the insertion loss adjusting device 23B and is combined by the second optical fiber coupler 22B to form the modulated light, the modulated light is coupled to the collimator 25 to be expanded, and the digital-to-analog conversion module 24 is connected with the first optical phase shifter 23A; the light source fine adjustment fixing device 3 comprises a displacement table 31 and a collimator clamp 32, wherein the bottom of the displacement table 31 is fixed on the mechanical table top 12, the upper part of the displacement table is connected with the collimator clamp 32, and the collimator clamp 32 enables the collimator 25 to be positioned right above the mechanical table top 12 and aligned with the elastic pin contact pin array 13. As shown in fig. 3, in the embodiment, the readout circuit 4 includes an adjustable potentiometer 41, a test hole 42 and an analog-to-digital conversion module 43, the photodetector 5 is placed on the elastic pin contact pin array 13, the output of the elastic pin contact pin array 13 is connected to the corresponding adjustable potentiometer 41, the adjustable potentiometer 41 is connected to the analog-to-digital conversion module 43 through the test hole 42, and the test data generated by the analog-to-digital conversion module 43 is transmitted to the upper computer 6. The upper computer 6 evaluates the quality of each channel of the photoelectric detector 5 according to the test data, and the test data transmitted to the upper computer 6 by the analog-to-digital conversion module 43 is used as the basis of the quality of each channel of the photoelectric detector 5.
It should be understood that in other embodiments, the following transformations may also be performed.
In the above rapid test device, the collimator 25 is disposed above the elastic pin contact pin array 13, and is connected to the displacement table 31 through the collimator fixture 32, and the tail of the collimator 25 is connected to the output end of the second optical fiber coupler 22B.
In the above rapid test device, the collimator 25 is configured to expand the modulated light output from the light source 21 through the second fiber coupler to the spatial light with uniform optical power, so as to cover the photosensitive surface of the photodetector 5.
In the above rapid test device, the elastic pin contact pin array 13 disposed on the surface of the PCB 11 is a replaceable elastic array base, and the signal output of the PCB 11 for the elastic pin contact pin array 13 is matched with the readout circuit 4.
In the rapid test device, the readout circuit 4 includes the adjustable potentiometer 41 and the analog-to-digital conversion module 43 which are connected to each other, and does not include the test hole 42. Or the readout circuit 4 includes the adjustable potentiometer 41 and the test hole 42 on the output side of the adjustable potentiometer 41 without the analog-to-digital conversion module 43.
In the above-mentioned rapid test device, the test hole 42 provided in each channel of the readout circuit 4 may be used for testing signals, or may be used for providing voltages to defined power pins in opposite directions.
In the above-mentioned rapid test device, the adjustable potentiometer 41 of the readout circuit 4 may be a digital or mechanical adjustable potentiometer or a resistive element with a fixed resistance value.
In the rapid test device, the photoelectric detector can be a packaged single pixel unit or an array photoelectric detector structure comprising a linear array photoelectric detector and an area array photoelectric detector.
In the above rapid test device, the insertion loss adjusting device is a second optical phase shifter or an optical fiber type attenuator.
In the rapid test device, the digital-to-analog conversion module is connected to the first optical phase shifter, and modulates the light input to the first optical phase shifter by using a modulating signal, wherein the modulating signal is a periodic signal, and the periodic signal comprises but is not limited to a sine wave signal and a triangular wave signal.
In the rapid test device, the light source is a laser light source with tunable wavelength and power.
In the rapid test device, the package form of the photodetector includes, but is not limited to, a PGA package.
In the rapid testing device, the displacement table is a three-dimensional adjustable displacement table, so that fine adjustment of the position of the collimator can be realized, and the emergent light spots can cover the photosensitive surface of the lower Fang Guangdian detector.
In the rapid test device described above, the readout circuitry 4 may be located on a separate circuit board or on the PCB board 11.
The working principle of the rapid testing device of the array photoelectric detector of the invention is as follows: the two paths of optical signals split by the first optical fiber coupler have coherence, the modulated first path of optical signals carry sine wave signals with specific frequencies, and the modulated information can be recovered through beat frequency of the modulated first path of optical signals with the same power as the other path of unmodulated optical signals. The displacement stage 31 adjusts the collimator 25 over the optical window and all channels in the photosensitive surface of the entire photodetector 5 can receive the optical signal. The optional power supply pin in the readout circuit 4 is in loop with the photodetector to be tested. The dark current and the photocurrent are important parameters of the photoelectric detector, and the quality of a channel in the photoelectric detector can be judged according to the magnitude of the dark current and the photocurrent, and the channel can be classified according to the magnitude order of the dark current and the photocurrent. The device can quickly judge whether each channel in the photoelectric detector and the photoelectric detector array is available or not, and the scene is very similar to the use scene of the detector. When the test is started, the collimator irradiates the whole photosensitive surface, the modulated sine wave signal is detected by all photoelectric detector channels after beat frequency, the photocurrent is recovered to be a sine wave signal through the adjustable potentiometer, and the magnitude of the photocurrent can be estimated according to the peak value of the waveform of the recovered sine wave signal; the magnitude of dark current can be estimated from the minimum signal value of the sine wave signal, i.e. the direct current term, and can be obtained by an oscilloscope, and in the embodiment comprising an analog-to-digital conversion module, all data are calculated by a host computer and a test report is given. Because the analog-to-digital sampling process is extremely fast, the time required for testing one photoelectric detector, especially all channels of the array photoelectric detector is extremely short, and the photocurrent and dark current can be measured simultaneously, so that the testing efficiency is quite high.
[ Example 1]
Fig. 1 is a schematic diagram of a rapid testing device for array photodetectors according to this embodiment, including a mechanical fixing device 1, a test light source generating device 2, a light source fine tuning fixing device 3 and a readout circuit 4, wherein the mechanical fixing device 1 includes a detector fixing module 11 and a mechanical table top 12, a replaceable elastic array base 13 is disposed on the mechanical fixing device 1, a photodetector chip is disposed on the elastic array base 13, the mechanical fixing device 1 is located in the center of the mechanical table top 12, a downward-illuminated laser source 21 is directly above the mechanical table top 12, and the light source fine tuning fixing device 3 includes a collimator fixture 32 and a long arm displacement table 31; the test light source generating device 2 comprises a laser source 21, a first optical fiber coupler 22A, a second optical fiber coupler 22B, a digital-to-analog conversion module 24, a first optical phase shifter 23A, a second optical phase shifter 23B and a collimator 25 which form a link, wherein a sine wave signal is modulated on the first optical phase shifter 23A, and the second optical phase shifter 23B is used as an insertion loss adjusting device; the photoelectric detector chip to be measured is fixed on the elastic array base and is connected with the reading circuit 4, the reading circuit 4 reads data to the upper computer 6 to measure the current of each channel, and the photoelectric detector chip to be measured is classified according to the test data.
When the rapid testing device of the array photoelectric detector works, the photoelectric detector chip to be tested is fixed on the elastic array base and is connected with the reading circuit 4, a reverse bias 5V power supply pin is defined, a 5V reverse bias voltage is provided at a testing hole of the circuit board, and a loop is formed between the photoelectric detector chip to be tested and the photoelectric detector chip to be tested. Dark current and photo current are important parameters of the photoelectric detector, and the quality of the detector can be judged according to the magnitude of the photo current and the dark current. The rapid test device is a device for testing the dark current and the photocurrent of the packaged photoelectric detector, particularly the array photoelectric detector, and can judge the channel quality of the array detector, thereby determining the overall quality of the detector.
During testing, a 1550nm laser source is used, modulated light is obtained through two couplers and two optical phase shifters to a collimator, sine waves are modulated on a first optical phase shifter, and the optical power of two paths is guaranteed to be equivalent through a second optical phase shifter; the modulated light is expanded through a collimator and irradiates on the surface of a photosensitive surface of the photoelectric detector to be detected; the photocurrent is finally transmitted to an upper computer for recording data through the processing of the reading circuit 4, the quality of the to-be-detected photoelectric detector is classified according to the waveform parameters of the waveform of the recovered sine wave signal, for example, the peak-to-peak value of the sine wave reflects the magnitude of the photocurrent, the minimum value of the sine wave represents the magnitude of dark current, and the quality of the to-be-detected photoelectric detector is classified according to the requirement index photocurrent of 10 -5-10-7 A and the dark current of less than 10 -9 A.
[ Example 2]
In a second embodiment of the present application, the same hardware configuration as the first embodiment is employed, and a triangular wave signal is coupled as a modulation signal only on the first optical phase shifter; and measuring the current of each channel by a photocurrent processing device, and classifying the chips to be tested according to the test data. The photocurrent processing device may be an oscilloscope.
When the rapid testing device of the array photoelectric detector works, the detector to be tested is fixed on the elastic array base and is connected with the photocurrent processing board, a reverse bias 5V power supply pin is defined, a 5V reverse bias voltage is provided at a testing hole of the circuit board, and a loop is formed between the detector to be tested and the chip to be tested. Dark current and photo current are important parameters of the photoelectric detector, and the quality of the detector can be judged according to the magnitude of the photo current and the dark current. The rapid testing device is a device for testing dark current and photocurrent of the array photoelectric detector, and can judge the channel quality of the array detector, thereby determining the overall quality of the detector.
During testing, a 1550nm laser source is used, the laser source reaches a collimator through two couplers and two optical phase shifters, triangular waves are modulated on the first optical phase shifter, and the optical power of two paths is guaranteed to be equivalent; and (3) expanding the modulated light through a collimator, irradiating the modulated light on the surface of the photosensitive surface of the photoelectric detector to be detected, clicking a reserved hole of each channel by using a probe of an oscilloscope serving as a photocurrent processing device, and confirming that the channel is normal according to whether the triangular waveform displayed by the oscilloscope is normal or not, if the triangular waveform is displayed completely and the triangular waveform has no larger direct current item.
[ Example 3]
The rapid test device of the photodetector in embodiment 3 of the present application is different from embodiment 2 in that a sine wave signal is used as the modulation signal.
During testing, a 1550nm laser source is used, the laser source passes through two couplers and two optical phase shifters to reach a collimator, wherein sine waves are modulated on a first optical phase shifter, and the second optical phase shifter is used for guaranteeing that the optical power of two paths is equivalent; and (3) expanding the modulated light through a collimator, irradiating the modulated light on the surface of the photosensitive surface of the photoelectric detector to be detected, clicking a preformed hole of each channel by using an oscilloscope probe serving as a photocurrent processing device, and confirming that the channel is normal according to whether the sine wave shape displayed by the oscilloscope is normal or not, if the sine wave shape is displayed completely and the sine wave has no larger direct current item.
The above embodiments describe the novel aspects of the present invention, and the scope of the present invention is not limited thereto, and any equivalent changes made in the solution, including changes in components and layout, etc., still fall within the scope of the present invention.
Claims (10)
1. A rapid test device of a photoelectric detector is characterized in that: the light source fine adjustment device comprises a mechanical fixing device, a modulated light generating device, a light source fine adjustment fixing device and a reading circuit; wherein,
The mechanical fixing device comprises a PCB, a mechanical table top and an elastic pin contact pin array, wherein the elastic pin contact pin array is connected to the PCB, and the PCB is fixed on the mechanical table top;
The modulated light generating device comprises a light source, a first optical fiber coupler, a second optical fiber coupler, a first optical phase shifter, an insertion loss adjusting device, a digital-to-analog conversion module and a collimator, wherein the light source is configured to output light to the first optical fiber coupler, the light is split by the first optical fiber coupler and then is respectively coupled into the first optical phase shifter and the insertion loss adjusting device, and then is combined by the second optical fiber coupler, the output of the second optical fiber coupler is coupled to the collimator, and the digital-to-analog conversion module is connected with the first optical phase shifter to couple modulated signals;
the light source fine adjustment fixing device comprises a displacement table and a collimator clamp, wherein the bottom of the displacement table is fixed on the mechanical table top, the upper part of the displacement table is connected with the collimator clamp, and the collimator clamp is matched with the mechanical table top so that the collimator is positioned right above the mechanical table top and aligned with the elastic pin contact pin array;
the reading circuit comprises an adjustable potentiometer and an analog-to-digital conversion module connected with the adjustable potentiometer, and the output of the elastic pin contact pin array is connected to the corresponding adjustable potentiometer.
2. The rapid test device for photodetectors according to claim 1, wherein: the collimator is configured to spread light provided by the light source through the optical fiber to spatial light of uniform optical power to cover the photosensitive surface of the photodetector.
3. The rapid test device for photodetectors according to claim 1, wherein: the elastic pin contact pin array arranged on the surface of the PCB is a replaceable elastic array base, and the signal output of the PCB aiming at the elastic pin contact pin array is matched with the readout circuit.
4. The rapid test device for photodetectors according to claim 1, wherein: and a test hole is further formed in a channel, connected with the analog-digital conversion module, of the adjustable potentiometer of the reading circuit, and the test hole is used for introducing test signals or providing voltage for defined power supply pins.
5. The rapid test device for photodetectors according to claim 1, wherein: the adjustable potentiometer is a digital adjustable potentiometer or a mechanical adjustable potentiometer or a resistance element with fixed resistance.
6. The rapid test device for photodetectors according to claim 1, wherein: the photoelectric detector is a packaged single pixel unit or an array photoelectric detector structure comprising a linear array photoelectric detector and an area array photoelectric detector.
7. The rapid test device for photodetectors according to claim 1, wherein: the insertion loss adjusting device is a second optical phase shifter or an optical fiber type attenuator.
8. The rapid test device for photodetectors according to claim 1, wherein: the digital-to-analog conversion module is connected to the first optical phase shifter and is configured to modulate light entering the first optical phase shifter with a modulation signal, wherein the modulation signal is a periodic signal, and the periodic signal comprises a sine wave signal and a triangular wave signal.
9. A test method using the rapid test device for photodetectors according to any one of claims 1 to 8, characterized in that: comprising
Connecting pins of the photoelectric detector to be detected with the PCB by utilizing the elastic pin contact pin array;
The light of the light source is divided into a first light path and a second light path by the first optical fiber coupler, and a modulation signal is applied to the first optical phase shifter by the digital-to-analog conversion module in the first light path;
in the first optical path, the optical power of the two optical paths is ensured to be the same by using the optical fiber insertion loss adjusting device;
combining the two paths of light by using the second optical fiber coupler to form modulated light;
the collimator is utilized to expand and output the modulated light;
The three-dimensional adjustable displacement table is utilized to move the collimator to the position right above the photosensitive surface of the detector to be detected, so that the photosensitive surface of the photoelectric detector to be detected is irradiated by the modulated light output by the beam expansion; using the beat frequency of two paths of equal-power modulated optical signals to recover the waveform of the modulated signals;
And evaluating the magnitude of photocurrent according to the peak-to-peak value of the waveform of the recovered modulation signal, and evaluating the magnitude of dark current according to a direct current term.
10. The test method according to claim 9, wherein: moving the collimator to the position right above the photosensitive surface of the detector to be detected by utilizing the light source fine adjustment fixing device; and outputting the recovered waveform obtained by the reading circuit to an upper computer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202410291025.5A CN117968839B (en) | 2024-03-14 | 2024-03-14 | Quick test device and test method for photoelectric detector |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202410291025.5A CN117968839B (en) | 2024-03-14 | 2024-03-14 | Quick test device and test method for photoelectric detector |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN117968839A true CN117968839A (en) | 2024-05-03 |
| CN117968839B CN117968839B (en) | 2024-06-28 |
Family
ID=90849826
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202410291025.5A Active CN117968839B (en) | 2024-03-14 | 2024-03-14 | Quick test device and test method for photoelectric detector |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN117968839B (en) |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103257032A (en) * | 2012-02-21 | 2013-08-21 | 洛克威尔自动控制技术股份有限公司 | System to test performance of pixels in sensor array |
| CN112985487A (en) * | 2021-02-08 | 2021-06-18 | 中国科学院半导体研究所 | Array type photoelectric detector test system |
| CN217605118U (en) * | 2022-05-11 | 2022-10-18 | 复旦大学 | Photoelectric testing device based on PCB board |
| CN115856848A (en) * | 2023-01-07 | 2023-03-28 | 浙江光特科技有限公司 | Automatic testing device for optical current of flat window TO |
-
2024
- 2024-03-14 CN CN202410291025.5A patent/CN117968839B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103257032A (en) * | 2012-02-21 | 2013-08-21 | 洛克威尔自动控制技术股份有限公司 | System to test performance of pixels in sensor array |
| US20130214167A1 (en) * | 2012-02-21 | 2013-08-22 | Anatoly G. Grinberg | System to Test Performance of Pixels in a Sensor Array |
| CN112985487A (en) * | 2021-02-08 | 2021-06-18 | 中国科学院半导体研究所 | Array type photoelectric detector test system |
| CN217605118U (en) * | 2022-05-11 | 2022-10-18 | 复旦大学 | Photoelectric testing device based on PCB board |
| CN115856848A (en) * | 2023-01-07 | 2023-03-28 | 浙江光特科技有限公司 | Automatic testing device for optical current of flat window TO |
Also Published As
| Publication number | Publication date |
|---|---|
| CN117968839B (en) | 2024-06-28 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US11187613B2 (en) | Opto electrical test measurement system for integrated photonic devices and circuits | |
| CN110187177B (en) | All-in-one photoelectronic device frequency response testing device and method | |
| JP5993909B2 (en) | System for laser voltage imaging state mapping | |
| US9791512B2 (en) | Test apparatus, test method, calibration device, and calibration method | |
| Cai et al. | Electro Optical Terahertz Pulse Reflectometry—an innovative fault isolation tool | |
| US8654331B2 (en) | Electromagnetic field measurement apparatus | |
| US7616312B2 (en) | Apparatus and method for probing integrated circuits using laser illumination | |
| JP2007064975A (en) | Modulation map display system and method | |
| CN108474821A (en) | Detecting system | |
| CN107966172B (en) | Broadband photoelectric detector responsivity tester and testing method thereof | |
| WO2020059440A1 (en) | Search method and search system | |
| CN117968839B (en) | Quick test device and test method for photoelectric detector | |
| KR20150054673A (en) | Apparatus for frequency analyzing a measurement target and method of frequency analyzing a measurement target | |
| US4850225A (en) | Measuring vibrational frequency of vibratable pins | |
| CN219392211U (en) | Broadband photoelectronic integrated chip tester based on self heterodyne | |
| CN219304837U (en) | 3dB bandwidth testing device | |
| CN117870574B (en) | Laser optical device capable of correcting in real time and correction method thereof | |
| CN215894850U (en) | Test system of TOF chip | |
| JP2004028645A (en) | Optical device measuring apparatus and light receiving unit for measuring optical device | |
| CN115001575A (en) | Device and method for measuring chip-level optical transmission performance parameters | |
| CN116046162A (en) | Single-point detector imaging performance characterization system | |
| Meister et al. | New methods for RF-characterisation of PDIC-photo diodes for DVD applications | |
| CN113049227A (en) | Laser wavelength modulation measuring device and measuring method and measuring system thereof | |
| US6914237B2 (en) | Auto-alignment system with focused light beam | |
| JPH02136765A (en) | Optical probing device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant |