CN113049227A - Laser wavelength modulation measuring device and measuring method and measuring system thereof - Google Patents

Laser wavelength modulation measuring device and measuring method and measuring system thereof Download PDF

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Publication number
CN113049227A
CN113049227A CN202110278736.5A CN202110278736A CN113049227A CN 113049227 A CN113049227 A CN 113049227A CN 202110278736 A CN202110278736 A CN 202110278736A CN 113049227 A CN113049227 A CN 113049227A
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laser
interferometer
wavelength modulation
laser beam
signal
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CN113049227B (en
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刘红弟
张梦影
黄治家
刘健
成学平
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Shenzhen JPT Optoelectronics Co Ltd
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Shenzhen JPT Optoelectronics Co Ltd
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01MTESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/02Testing optical properties
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere

Abstract

A laser wavelength modulation measuring device, a measuring method and a measuring system thereof relate to the technical field of laser. The laser wavelength modulation measuring device comprises a controller, a power supply, a waveform generator, a laser driving board, a laser to be measured, a single-mode fiber, an interferometer and a data acquisition unit; a power supply inputs a driving current signal to a laser driving board, and a waveform generator inputs a triangular wave modulation signal to the laser driving board; the laser driving board inputs a driving electric signal modulated by the triangular wave modulation signal to the laser to be tested so as to drive the laser to be tested to emit a laser beam and enter the interferometer through the single-mode optical fiber; the interferometer interferes the laser beam emitted by the laser to be tested; the data acquisition unit acquires and records interference signals of the interferometer; the controller processes and analyzes the interference signal. The laser wavelength modulation measuring device is high in measuring precision and low in cost, and can solve the problem that the measuring precision is limited when a spectrum analyzer is used for measuring the laser wavelength in the prior art.

Description

Laser wavelength modulation measuring device and measuring method and measuring system thereof
Technical Field
The invention relates to the technical field of laser, in particular to a laser wavelength modulation measuring device, a measuring method and a measuring system thereof.
Background
The semiconductor laser has the advantages of simple manufacture, easy mass production, low cost, wide wavelength coverage, small volume, long service life, low energy consumption, high electro-optical conversion efficiency and the like, and is widely applied to the technical fields of optical fiber communication, optical memories, laser printers, 3D sensing and the like. The measurement of wavelength modulation is a key technical index in the field of semiconductor laser manufacturing, and can be used for evaluating the optical performance of a semiconductor laser and guiding the processing and manufacturing process.
At present, the method for measuring the wavelength modulation of a laser light source is generally an LIV (spectral-power-volt-ampere characteristic) measurement method, and the principle of the method is shown in fig. 1, which is to apply a driving current from low to high to a laser, and respectively record and measure the spectral peak wavelengths under different currents by using a spectrum analyzer meeting the requirement of optical wavelength resolution, so as to obtain the variation relation of the laser wavelength along with the driving current. However, this measurement method requires the input of a plurality of discrete drive current values, and the measurement is very time-consuming; in addition, since the laser wavelength is measured by the spectrum analyzer, the accuracy of the wavelength measurement depends on the resolution and accuracy of the spectrum analyzer, and the higher the resolution and accuracy of the spectrum analyzer is, the higher the price thereof is.
Disclosure of Invention
The invention aims to provide a laser wavelength modulation measuring device, a measuring method and a measuring system thereof, which can provide the laser wavelength modulation measuring device with high measuring precision and low cost so as to solve the problem that the measuring precision is limited when a spectrum analyzer is used for measuring the laser wavelength in the prior art.
The embodiment of the invention is realized by the following steps:
in one aspect of the invention, a laser wavelength modulation measuring device is provided, which comprises a controller, a power supply, a waveform generator, a laser drive board, a laser to be measured, a single-mode fiber, an interferometer and a data collector; the controller is respectively electrically connected with a power supply, a waveform generator, an interferometer and a data collector, the power supply inputs a driving current signal to the laser driving board, and the waveform generator inputs a triangular wave modulation signal to the laser driving board; the laser driving board is used for inputting a driving electric signal modulated by the triangular wave modulation signal to the laser to be tested so as to drive the laser to be tested to emit a laser beam and enter the interferometer through the single-mode optical fiber; the interferometer is used for interfering the laser beam emitted by the laser to be tested; the data acquisition unit is used for acquiring and recording interference signals of the interferometer; the controller is used for processing and analyzing the interference signals collected by the data collector. This laser wavelength modulation measuring device can provide the laser wavelength modulation measuring device that measurement accuracy is high and the cost is lower to when adopting spectral analyser to measure the laser wavelength among the solution prior art, its measurement accuracy is restricted problem.
Optionally, the laser wavelength modulation measuring device further comprises an optical power meter electrically connected to the interferometer and the controller, respectively, and the optical power meter is configured to detect the light intensity of the laser beam coupled to the single-mode fiber and the efficiency of the laser beam coupled to the single-mode fiber, and transmit the light intensity and the efficiency to the controller.
Optionally, the laser wavelength modulation measuring apparatus further includes a collimating mirror disposed between the laser device to be measured and the input end of the single-mode fiber, and the collimating mirror is configured to collimate a laser beam emitted by the laser device to be measured.
Optionally, the laser wavelength modulation measuring apparatus further includes an objective lens disposed between the collimator lens and the input end of the single-mode fiber, and the objective lens is configured to focus a laser beam emitted from the laser device to be measured and couple the laser beam to the single-mode fiber.
Optionally, the laser under test is a semiconductor laser.
Optionally, the data acquisition device is a data acquisition card or an oscilloscope.
In another aspect of the present invention, there is provided a laser wavelength modulation measuring system including the above laser wavelength modulation measuring apparatus.
In another aspect of the present invention, there is provided a laser wavelength modulation measuring method using the laser wavelength modulation measuring apparatus described above, the measuring method including: respectively adjusting a driving current signal input by a power supply to a laser driving board and a triangular wave modulation signal input by a waveform generator to the laser driving board; inputting a driving current signal modulated by a triangular wave modulation signal to a laser to be tested through a laser driving board so as to drive the laser to be tested to emit a laser beam; performing interference treatment on a laser beam emitted by a laser device to be detected; collecting and recording interference signals of the laser beams; and processing and analyzing the interference signal to obtain the change condition of the wavelength of the laser beam along with the drive current value corresponding to the drive current signal.
Optionally, acquiring and recording interference signals of the interferometer comprises: at least two periods of interference signals of the interferometer are acquired and recorded.
Optionally, before performing the interference processing on the laser beam emitted by the laser device under test, the method further includes: the light intensity of the laser beam is detected.
The beneficial effects of the invention include:
the embodiment provides a laser wavelength modulation measuring device, which comprises a controller, a power supply, a waveform generator, a laser driving board, a laser to be measured, a single-mode fiber, an interferometer and a data acquisition unit. When the power supply is used, the controller can send out a command to control the waveform generator so that the waveform generator generates a triangular wave modulation signal with preset frequency and amplitude, and meanwhile, the controller sends out a command to control the power supply so that the power supply outputs a driving current signal with preset current and voltage. The driving current signal is modulated by the triangular wave modulation signal and then is output to the laser to be tested through the laser driving board, so that the laser to be tested is driven to emit laser beams. The laser beam emitted by the laser to be tested acts on the input end of the single mode fiber, is coupled into the single mode fiber and then enters the interferometer. The interferometer equally divides the input laser beam into two paths of light, wherein one path of light directly acts on a photoelectric detector of the interferometer, voltage signals are output after photoelectric conversion, and the signals are connected and detected by a second channel of the data acquisition unit. The other path is divided into two paths equally, the two paths of light form constant optical path difference through single-mode optical fibers with different lengths, the two paths of light are converged together to form interference, the interference is detected by the other photoelectric detector of the interferometer, and then a voltage signal is output and is connected and detected by the first channel of the data acquisition unit. Therefore, the data acquisition unit can acquire and record the interference signal of the interferometer and transmit the interference signal to the controller. The controller collects and stores the signals collected by the data collector, spectral peak wavelengths of the laser to be detected under different driving currents can be obtained through analysis and processing, and whether the optical performance of the laser to be detected meets the requirements or not can be judged through judging the obtained wavelength drift range. Compared with the prior art, the laser wavelength modulation measuring device provided by the application measures the laser wavelength along with the current variation result through the optical interference method, can effectively improve the measurement precision, and avoids the problem that the measurement precision is limited by the equipment precision when the laser wavelength is measured by adopting a spectrum analyzer in the prior art. Meanwhile, compared with the existing mode of measuring laser wavelength modulation, the method has the advantages that the measuring time is short, a plurality of discrete driving current values are not needed, and the wavelength responses under the driving currents are measured respectively.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings needed to be used in the embodiments will be briefly described below, it should be understood that the following drawings only illustrate some embodiments of the present invention and therefore should not be considered as limiting the scope, and for those skilled in the art, other related drawings can be obtained according to the drawings without inventive efforts.
FIG. 1 is a schematic diagram of a LIV measurement method provided in the prior art;
fig. 2 is a schematic structural diagram of a laser wavelength modulation measuring apparatus according to an embodiment of the present invention;
fig. 3 is a schematic diagram of an interferometer of a laser wavelength modulation measuring apparatus provided by an embodiment of the present invention;
fig. 4 is a schematic flowchart of a laser wavelength modulation measurement method according to an embodiment of the present invention.
Icon: 10-a controller; 20-a power supply; 30-a waveform generator; 40-laser drive board; 50-laser to be tested; 60-single mode fiber; 70-an interferometer; 80-a data collector; 90-optical power meter; 92-a collimating mirror; 93-objective lens.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are some, but not all, embodiments of the present invention. The components of embodiments of the present invention generally described and illustrated in the figures herein may be arranged and designed in a wide variety of different configurations.
Thus, the following detailed description of the embodiments of the present invention, presented in the figures, is not intended to limit the scope of the invention, as claimed, but is merely representative of selected embodiments of the invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
It should be noted that: like reference numbers and letters refer to like items in the following figures, and thus, once an item is defined in one figure, it need not be further defined and explained in subsequent figures.
In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings or the orientations or positional relationships that the products of the present invention are conventionally placed in use, and are only used for convenience in describing the present invention and simplifying the description, but do not indicate or imply that the devices or elements referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first," "second," "third," and the like are used solely to distinguish one from another and are not to be construed as indicating or implying relative importance.
Furthermore, the terms "horizontal", "vertical" and the like do not imply that the components are required to be absolutely horizontal or pendant, but rather may be slightly inclined. For example, "horizontal" merely means that the direction is more horizontal than "vertical" and does not mean that the structure must be perfectly horizontal, but may be slightly inclined.
In the description of the present invention, it should also be noted that, unless otherwise explicitly specified or limited, the terms "disposed," "mounted," "connected," and "connected" are to be construed broadly and may, for example, be fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.
The measurement of laser wavelength is a key technical index in the field of semiconductor laser manufacturing, and can be used for evaluating the optical performance of a semiconductor laser and reacting on the semiconductor laser, thereby providing guidance for the processing and manufacturing of the semiconductor laser. Currently, the commonly used laser wavelength modulation measurement method is generally the LIV (spectrum-power-volt-ampere characteristic) method. The principle of the method is shown in fig. 1, a power supply 20 is loaded on a driving circuit board, then a laser is driven by the driving circuit board to emit light, the laser enters an integrating sphere and is reflected for multiple times in the integrating sphere so that an optical signal is homogenized, then the optical signal irradiates an incident end face of an optical fiber and enters the optical fiber, the optical signal is transmitted to a spectrum analyzer by the optical fiber, and the wavelength of a light source is measured by the spectrum analyzer.
In order to obtain the change of the laser wavelength according to the drive current, it is necessary to repeat the measurement a plurality of times while changing the magnitude of the drive current.
As can be seen from the working principle of the LIV measurement method, the method has the problem of being time-consuming to measure; meanwhile, the laser wavelength is measured by a spectrum analyzer, so the measurement precision of the laser wavelength almost completely depends on the resolution and precision of the spectrum measuring instrument; correspondingly, the higher the resolution and accuracy of the spectrum analyzer, the higher the price. Therefore, the LIV measurement method also has a problem that its measurement accuracy is greatly limited by the accuracy and resolution of the spectrum analyzer.
Therefore, in order to solve at least one problem existing in the LIV measuring method for measuring the laser wavelength in the prior art, the application particularly provides a novel laser wavelength modulation measuring device, so that the measuring precision of the laser wavelength is improved, and the cost is reduced.
Referring to fig. 2, the present embodiment provides a laser wavelength modulation measuring apparatus, which includes a controller 10, a power supply 20, a waveform generator 30, a laser driver board 40, a laser 50 to be measured, a single-mode fiber 60, an interferometer 70, and a data collector 80; the controller 10 is respectively electrically connected with the power supply 20, the waveform generator 30, the interferometer 70 and the data collector 80, the power supply 20 inputs a driving current signal to the laser driving board 40, and the waveform generator 30 inputs a triangular wave modulation signal to the laser driving board 40; the laser driving board 40 is configured to input a driving electrical signal modulated by the triangular wave modulation signal to the laser 50 to be tested, so as to drive the laser 50 to be tested to emit a laser beam and enter the interferometer 70 through the single-mode fiber 60; the interferometer 70 is used for interfering the laser beam emitted by the laser 50 to be tested; the data acquisition unit 80 is used for acquiring and recording interference signals of the interferometer 70; the controller 10 is used for processing and analyzing the interference signals collected by the data collector 80.
The controller 10 is electrically connected to the power source 20, the waveform generator 30, the interferometer 70, and the data collector 80. Thus, the controller 10 can control the power supply 20, the waveform generator 30, the interferometer 70 and the data collector 80 to be turned on or off, so as to control whether the laser wavelength modulation measuring device is started or not.
The power supply 20 is for activation under the control of the controller 10 and is thus for providing a drive current signal to the laser drive board 40. The controller 10 may preset parameters corresponding to the driving current signal input from the power supply 20 to the laser driving board 40, such as a current value and a voltage value corresponding to the driving current signal.
The turning on and off of the waveform generator 30 is also controlled by the controller 10, and the frequency and amplitude of the triangular wave modulation signal input by the waveform generator 30 to the laser driving board 40 are also set by the controller 10. Thus, different driving current signals can be provided for the laser 50 to be tested, and corresponding spectrum peak wavelengths can be obtained according to the different input driving current signals, so that the optical performance of the laser 50 to be tested can be judged.
The driving current signal of the power supply 20 and the triangular wave modulation signal of the waveform generator 30 act on the laser driving board 40 together, and the laser driving board 40 can be used for loading the driving current signal modulated by the triangular wave modulation signal to the laser 50 to be tested, so that the laser 50 to be tested emits a laser beam.
Alternatively, the laser 50 to be tested may be a semiconductor laser. The wavelength of the semiconductor laser can be from ultraviolet to near infrared band wavelength.
In the present embodiment, the single mode fiber 60 is provided to ensure the single mode characteristic of the optical signal collected from the laser 50 under test, so as to avoid interference of optical signals of other modes.
The interferometer 70 is used for performing interference processing on a laser beam emitted by the laser 50 to be detected and outputting an electrical signal after photoelectric conversion to the data acquisition unit 80, so as to accurately detect the modulation characteristic of the wavelength of the laser beam by using an optical coherence technique. In the present embodiment, the interferometer 70 is a Mach-Zehnder interferometer 70.
For example, the data collector 80 may be a data acquisition card or an oscilloscope. The data acquisition card or oscilloscope is used for acquiring the interference signal of the interferometer 70 and transmitting the interference signal to the controller 10. In this way, the present application may acquire the interference signal of the interferometer 70 through the data acquisition card or the oscilloscope, and then acquire the data acquired by the data acquisition card or the oscilloscope through the controller 10, so as to analyze and process the interference signal.
The configuration parameters of the data collector 80 can also be set by the controller 10, so that the data collector 80 can record at least two interference signals of continuous periods.
Referring to fig. 3, fig. 3 is a schematic diagram of the interferometer 70. When the laser beam splitter is used, a laser beam emitted by a laser to be measured is coupled into the single-mode fiber 60, and then is split into two beams by the equal-ratio splitting fiber splitter, wherein a transmission fiber of one beam is longer than a transmission fiber of the other beam (i.e., as shown in fig. 3, the length of the transmission fiber corresponding to the upper optical path is longer than that of the transmission fiber corresponding to the lower optical path), so that a phase delay of phi (t-tau) is generated. Finally, the two light beams are respectively combined by the beam combiner after passing through the two paths, received and detected by the Photoelectric Detector (PD), and finally output to the data acquisition unit 80. The controller 10 can detect and evaluate the coherence characteristic of the interference light by analyzing and processing the interference signal of the interferometer 70 collected by the data collector 80.
How to obtain the wavelength variation trend of the laser 50 to be measured through the interferometer 70 is a physical basis for measuring the wavelength of the laser light source by an interferometry, and the working principle of the interferometer 70 belongs to the prior art, so that the present application does not make much explanation on the trend. The MZI interference method can be utilized to quickly measure the variation trend of the wavelength of the laser source along with the driving current by combining with specially developed data processing algorithms. The method has the advantages of relatively simple structure, higher precision of the measurement result, relatively lower cost and relatively wide application prospect.
In the present application, the power supply 20 and the waveform generator 30 are respectively connected to the laser driving board 40, and the laser driving board 40 is connected to the laser 50 to be tested. At the same time, the power source 20 and the waveform generator 30 should be electrically connected to the controller 10, so as to facilitate the control of the power source 20 and the waveform generator 30 by the controller 10.
The single-mode fiber 60 is located on the light outgoing path of the laser 50 to be measured, so that the laser beam emitted from the laser 50 to be measured can enter the single-mode fiber 60, the outgoing end of the single-mode fiber 60 is connected with the interferometer 70, the interferometer 70 is electrically connected with the data collector 80, and the data collector 80 is electrically connected with the controller 10.
In summary, the present embodiment provides a laser wavelength modulation measuring apparatus, which includes a controller 10, a power supply 20, a waveform generator 30, a laser driving board 40, a laser 50 to be measured, a single-mode fiber 60, an interferometer 70, and a data collector 80; the controller 10 is respectively electrically connected with the power supply 20, the waveform generator 30, the interferometer 70 and the data collector 80, the power supply 20 inputs a driving current signal to the laser driving board 40, and the waveform generator 30 inputs a triangular wave modulation signal to the laser driving board 40; the laser driving board 40 is configured to input a driving electrical signal modulated by the triangular wave modulation signal to the laser 50 to be tested, so as to drive the laser 50 to be tested to emit a laser beam and enter the interferometer 70 through the single-mode fiber 60; the interferometer 70 is used for interfering the laser beam emitted by the laser 50 to be tested; the data acquisition unit 80 is used for acquiring and recording interference signals of the interferometer 70; the controller 10 is used for processing and analyzing the interference signals collected by the data collector 80. Thus, in use, the controller 10 may issue instructions to control the waveform generator 30 such that the waveform generator 30 generates a triangular wave modulation signal of a predetermined frequency and amplitude, and at the same time, the controller 10 may issue instructions to control the power supply 20 such that the power supply 20 outputs a driving current signal having a predetermined current and voltage. The driving current signal is modulated by the triangular wave modulation signal and then output to the laser 50 to be tested through the laser driving board 40, so that the laser 50 to be tested is driven to emit a laser beam. The laser beam emitted by the laser 50 to be measured acts on the input end of the single mode fiber 60 and is coupled into the single mode fiber 60, and then enters the interferometer 70. The interferometer 70 equally divides the input laser beam into two paths of light, wherein one path of light directly acts on one photoelectric detector of the interferometer 70, and a voltage signal is output after photoelectric conversion, and the signal is connected and detected by a second channel of the data acquisition unit 80. The other path is divided into two paths, the two paths of light form a constant optical path difference through the single-mode fibers 60 with different lengths, then the two paths of light are converged together to form interference, the interference is detected by the other photoelectric detector of the interferometer 70, and then a voltage signal is output, and the signal is connected and detected by the first path of the data acquisition unit 80. In this manner, data acquisition unit 80 can acquire and record the interference signal of interferometer 70 and transmit the interference signal to controller 10. The controller 10 collects and stores the signals collected by the data collector 80, the spectral peak wavelengths of the laser 50 to be measured under different driving currents can be obtained through analysis and processing, and whether the optical performance of the laser 50 to be measured meets the requirements or not can be judged through the obtained wavelength modulation range. Compared with the prior art, the laser wavelength modulation measuring device provided by the application measures the laser wavelength along with the current variation result through the optical interference method, can effectively improve the measurement precision, and avoids the problem that the measurement precision is limited by the equipment precision when the laser wavelength is measured by adopting a spectrum analyzer in the prior art. Meanwhile, compared with the existing mode of measuring the laser wavelength, the method has the advantages that the measuring time is short, a plurality of discrete driving current values are not needed, and the wavelength response under the driving currents is measured respectively.
In addition, in the present embodiment, optionally, the laser wavelength modulation measuring apparatus further includes an optical power meter 90 electrically connected to the interferometer 70 and the controller 10, respectively, and the optical power meter 90 is configured to detect the light intensity of the laser beam coupled to the single-mode fiber 60 and to calculate the efficiency of the laser beam coupled to the single-mode fiber 60, and transmit the light intensity to the controller 10.
Thus, specifically, the laser beam input from the single mode fiber 60 into the interferometer 70 can be divided into two paths by the interferometer 70 according to a certain proportion, and the path with lower concentrated light power (for example, 5% to 10%) is measured by the light power meter 90, so as to be used for monitoring the light intensity coupled to the single mode fiber 60 in real time, and further guiding to manually adjust the coupling of the spatial light; the other path is equally divided into two paths as described above, wherein one path of light directly acts on one photodetector of the interferometer 70, and is subjected to photoelectric conversion to output a voltage signal. The other path is divided into two paths, and the two paths of light form a constant optical path difference through the single-mode fibers 60 with different lengths, and then are converged together to form interference, and the interference is detected by the other photodetector of the interferometer 70 to output a voltage signal.
Since the laser beam emitted by the laser 50 to be tested has a certain divergence angle, it needs to be collimated to be more convenient to couple it to the single-mode fiber 60 with high efficiency. Therefore, in this embodiment, the laser wavelength modulation measuring apparatus further includes a collimating mirror 92 disposed between the laser 50 to be measured and the input end of the single-mode fiber 60, and the collimating mirror 92 is configured to collimate the laser beam emitted by the laser 50 to be measured. Thus, the laser beam can output parallel light after being collimated by the collimator lens 92.
Further, to focus the laser beam into a smaller size for coupling into the single mode fiber 60. Optionally, the laser wavelength modulation measuring apparatus further includes an objective lens 93 disposed between the collimator 92 and the input end of the single mode fiber 60, and the objective lens 93 is configured to focus the laser beam emitted from the laser 50 to be measured and couple the laser beam into the single mode fiber 60.
By way of example, the practical use of the laser wavelength modulation measuring device will be exemplified below.
For example, the laser under test 50 may be a vertical cavity surface emitting laser of 850nm wavelength. During testing, the waveform of the waveform generator 30 is set to be triangular wave with a frequency of 10KHz, an offset voltage of 500mV, and a voltage amplitude of 750 mV. The triangular wave modulation signal of the waveform generator 30 is loaded on the laser driving board 40 together with the driving current signal of the power supply 20, and then drives the vertical cavity surface emitting laser.
The vertical cavity surface emitting laser is driven to generate a periodical brightness change according to the waveform output from the waveform generator 30. The optical signal emitted by the vertical cavity surface emitting laser passes through the aspheric collimating mirror 92 with the focal length of 11mm and the working distance of 7.5mm, and the light beam is changed into a parallel light beam.
The parallel light beam is collected by an objective lens 93 having a lens aperture ratio (i.e., NA) of 0.4 and a magnification of 20 times, so that the laser beam is focused on the end surface of the single-mode fiber 60, and the single-mode fiber 60 transmits the optical signal to the interferometer 70 for interference detection. The input power monitoring end of the interferometer 70 is connected to the optical power meter 90, and the power of the monitoring end can be measured to determine the magnitude of the optical power input to the interferometer 70 (for example, if the interferometer 70 with a splitting ratio of 5% is actually used, when the optical power of the monitoring end is higher than 2 μ W, it is indicated that the input signal is sufficient for the interference measurement). The signal is output through the output end after the interference of the interferometer 70, the interference signal output end is connected with the first channel of the data acquisition device 80, and the output signal monitoring end is connected with the second channel of the data acquisition device 80. The data acquisition unit 80 is used to acquire the interference signal output and the monitor signal output of the interferometer 70.
By setting the horizontal scale and the vertical scale of the data collector 80 and selecting a proper sampling rate, the data collector 80 can capture at least two complete cycles at one time. The computer captures the interference signal of the data acquisition unit 80 and stores the interference signal in the computer, so that the interference signal can be processed and analyzed by the controller 10, and the variation of the peak wavelength of the laser 50 to be tested with the driving current signal can be obtained (for example, the driving current signal can be set to be from 1.25mA to 2.35 mA).
The interference signal may be analyzed and processed by the controller 10 in the following manner, for example.
Firstly, the controller 10 acquires and stores the interference signal acquired from the data acquisition unit 80, and the data corresponding to the interference signal is stored; reading a stored data file, and drawing by taking time as a horizontal axis and voltage as a vertical axis to obtain a change curve of a signal along with time; scanning the data to obtain data of at least two triangular wave intervals, and extracting the outline envelope of the data by using a Hilbert algorithm; the slopes of the rising edge and the falling edge of the triangular wave can be obtained according to the outline envelope; according to the initial wavelength value of the laser 50 to be measured, a curve of the peak wavelength of the laser 50 to be measured changing with the drive current can be obtained, and then the drift characteristic of the laser wavelength is evaluated.
In another aspect of the present invention, there is provided a laser wavelength modulation measuring system including the above laser wavelength modulation measuring apparatus. Since the structure and the advantages of the laser wavelength modulation measuring apparatus have been described and illustrated in detail in the foregoing, further description is omitted here.
Referring to fig. 4, in another aspect of the present invention, a laser wavelength modulation measuring method is provided, which uses the laser wavelength modulation measuring apparatus described above, and the measuring method includes the following steps:
s100, respectively adjusting a driving current signal input from the power supply 20 to the laser driving board 40, and a triangular wave modulation signal input from the waveform generator 30 to the laser driving board 40.
The driving current signal inputted from the power source 20 to the laser driving board 40 can be set by the controller 10, and similarly, the corresponding parameter of the triangular wave modulation signal inputted from the waveform generator 30 to the laser driving board 40 can also be set by the controller 10.
And S200, inputting the driving current signal modulated by the triangular wave modulation signal to the laser 50 to be tested through the laser driving board 40 so as to drive the laser 50 to be tested to emit a laser beam.
The power source 20 and the waveform generator 30 are both connected to the laser driving board 40, and the laser driving board 40 is connected to the laser 50 to be tested, so that the electrical driving relationship between the power source and the laser is conveniently realized.
And S300, carrying out interference processing on the laser beam emitted by the laser 50 to be tested.
The interference processing of the laser beam emitted from the laser 50 to be measured can be realized by the interferometer 70.
S400, collecting and recording interference signals of the laser beams.
In addition, the acquisition and recording of the interference signal of the laser beam may be realized by the data acquisition unit 80, for example.
Optionally, in this embodiment, the acquiring and recording the interference signal of the interferometer 70 in step S400 includes:
at least two cycles of the interference signal of interferometer 70 are acquired and recorded. It should be understood that at least two periods refer to at least adjacent periods, and of course, interference signals of a plurality of consecutive periods may be collected and recorded, which is not limited herein.
In addition, before performing the interference processing on the laser beam emitted by the laser 50 to be tested in step S400, the method may further include:
the light intensity of the laser beam is detected.
Wherein the detection of the light intensity of the laser beam may be achieved by an optical power meter 90 electrically connected to the interferometer 70 and the controller 10, respectively.
Specifically, the laser beam input from the single-mode fiber 60 into the interferometer 70 may be divided into two paths by the interferometer 70 according to a certain proportion, and one path with lower concentrated light power (for example, 5% to 10%) is measured by the light power meter 90, so as to be used for monitoring the light intensity coupled to the single-mode fiber 60 in real time, and further guiding manual adjustment of the coupling of the spatial light.
And S500, processing and analyzing the interference signal to obtain the change situation of the wavelength of the laser beam along with the drive current value corresponding to the drive current signal.
The specific way for analyzing and processing the interference signal can be realized by the following ways:
firstly, the controller 10 acquires and stores the interference signal acquired from the data acquisition unit 80, and the data corresponding to the interference signal is stored; reading a stored data file, and drawing by taking time as a horizontal axis and voltage as a vertical axis to obtain a change curve of a signal along with time; scanning the data to obtain data of at least two triangular wave intervals, and extracting the outline envelope of the data by using a Hilbert algorithm; the slopes of the rising edge and the falling edge of the triangular wave can be obtained according to the outline envelope; according to the initial wavelength value of the laser 50 to be measured, a curve of the peak wavelength of the laser 50 to be measured changing with the drive current can be obtained, and then the modulation characteristic of the laser wavelength is evaluated.
The above description is only an alternative embodiment of the present invention and is not intended to limit the present invention, and various modifications and variations of the present invention may occur to those skilled in the art. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
It should be noted that the various technical features described in the above embodiments can be combined in any suitable manner without contradiction, and the invention is not described in any way for the possible combinations in order to avoid unnecessary repetition.

Claims (10)

1. A laser wavelength modulation measuring device is characterized by comprising a controller, a power supply, a waveform generator, a laser driving board, a laser to be measured, a single-mode fiber, an interferometer and a data acquisition unit;
the controller is respectively electrically connected with the power supply, the waveform generator, the interferometer and the data collector, the power supply inputs a driving current signal to the laser driving board, and the waveform generator inputs a triangular wave modulation signal to the laser driving board; the laser driving board is used for inputting a driving electric signal modulated by the triangular wave modulation signal to the laser to be tested so as to drive the laser to be tested to emit a laser beam and enter the interferometer through the single-mode optical fiber; the interferometer is used for interfering the laser beam emitted by the laser to be tested; the data acquisition unit is used for acquiring and recording interference signals of the interferometer; the controller is used for processing and analyzing the interference signals collected by the data collector.
2. The laser wavelength modulation measurement device according to claim 1, further comprising an optical power meter electrically connected to the interferometer connection and the controller, respectively, for detecting an optical intensity of the laser beam coupled to the single mode fiber and an efficiency of the laser beam coupled to the single mode fiber, and transmitting to the controller.
3. The laser wavelength modulation measuring device according to claim 1, further comprising a collimating mirror disposed between the laser under test and the input end of the single-mode fiber, wherein the collimating mirror is configured to collimate the laser beam emitted by the laser under test.
4. The laser wavelength modulation measuring device according to claim 3, further comprising an objective lens disposed between the collimator lens and the input end of the single mode fiber, the objective lens being configured to focus the laser beam emitted from the laser under test and couple the laser beam to the single mode fiber.
5. The laser wavelength modulation measurement device of claim 1, wherein the laser under test is a semiconductor laser.
6. The laser wavelength modulation measuring device according to claim 1, wherein the data collector is a data acquisition card or an oscilloscope.
7. A laser wavelength modulation measurement system comprising the laser wavelength modulation measurement apparatus according to any one of claims 1 to 6.
8. A laser wavelength modulation measuring method using the laser wavelength modulation measuring apparatus according to any one of claims 1 to 6, the measuring method comprising:
respectively adjusting a driving current signal input by a power supply to a laser driving board and a triangular wave modulation signal input by a waveform generator to the laser driving board;
inputting a driving current signal modulated by the triangular wave modulation signal to a laser to be tested through a laser driving board so as to drive the laser to be tested to emit a laser beam;
performing interference processing on the laser beam emitted by the laser to be detected;
collecting and recording interference signals of the laser beams;
and processing and analyzing the interference signal to obtain the change condition of the wavelength of the laser beam along with the drive current value corresponding to the drive current signal.
9. The laser wavelength modulation measurement method of claim 8, wherein the acquiring and recording interference signals of the interferometer comprises:
at least two periods of interference signals of the interferometer are acquired and recorded.
10. The laser wavelength modulation measurement method according to claim 8, wherein before the interference processing of the laser beam emitted by the laser under test, the method further comprises:
detecting the light intensity of the laser beam.
CN202110278736.5A 2021-03-15 2021-03-15 Laser wavelength modulation measuring device, measuring method and measuring system thereof Active CN113049227B (en)

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