CN117950119A - Optical fiber super-surface and preparation method thereof - Google Patents
Optical fiber super-surface and preparation method thereof Download PDFInfo
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- CN117950119A CN117950119A CN202410069971.5A CN202410069971A CN117950119A CN 117950119 A CN117950119 A CN 117950119A CN 202410069971 A CN202410069971 A CN 202410069971A CN 117950119 A CN117950119 A CN 117950119A
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- 239000013307 optical fiber Substances 0.000 title claims abstract description 96
- 238000002360 preparation method Methods 0.000 title abstract description 14
- 238000005253 cladding Methods 0.000 claims abstract description 15
- 239000012790 adhesive layer Substances 0.000 claims abstract description 11
- 230000001681 protective effect Effects 0.000 claims abstract description 9
- 239000000758 substrate Substances 0.000 claims description 41
- 238000005530 etching Methods 0.000 claims description 18
- 238000000151 deposition Methods 0.000 claims description 14
- 239000010410 layer Substances 0.000 claims description 14
- 239000000463 material Substances 0.000 claims description 12
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- 238000009826 distribution Methods 0.000 claims description 9
- 230000000149 penetrating effect Effects 0.000 claims description 9
- CLOMYZFHNHFSIQ-UHFFFAOYSA-N clonixin Chemical compound CC1=C(Cl)C=CC=C1NC1=NC=CC=C1C(O)=O CLOMYZFHNHFSIQ-UHFFFAOYSA-N 0.000 claims description 6
- 239000002131 composite material Substances 0.000 claims description 6
- 208000013201 Stress fracture Diseases 0.000 claims description 4
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- 239000000835 fiber Substances 0.000 claims description 4
- 238000004528 spin coating Methods 0.000 claims description 4
- 238000001259 photo etching Methods 0.000 claims description 3
- 230000001902 propagating effect Effects 0.000 claims 1
- 230000000694 effects Effects 0.000 abstract description 6
- 230000010354 integration Effects 0.000 abstract description 4
- 239000010408 film Substances 0.000 description 18
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 6
- 206010028980 Neoplasm Diseases 0.000 description 5
- 239000011253 protective coating Substances 0.000 description 4
- 238000002560 therapeutic procedure Methods 0.000 description 4
- 229910021417 amorphous silicon Inorganic materials 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 239000003814 drug Substances 0.000 description 3
- 239000000377 silicon dioxide Substances 0.000 description 3
- 235000012239 silicon dioxide Nutrition 0.000 description 3
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- 229940079593 drug Drugs 0.000 description 2
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- 238000002834 transmittance Methods 0.000 description 1
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Abstract
The invention discloses an optical fiber super-surface and a preparation method thereof, and relates to the technical field of micro-nano photonics. The optical fiber super surface comprises: the optical fiber and the super surface fixed at the tail end of the optical fiber through the adhesive layer; the super surface comprises a film, a micro-nano unit structure and a protective cladding which are arranged in sequence from bottom to top, wherein the micro-nano unit structure is periodically and tightly arranged; one side of the film without the micro-nano unit structure is connected with the adhesive layer. The invention directly integrates the super surface at the tail end of the optical fiber, thereby not only improving the irradiation range of emergent light in the optical fiber, but also realizing the effects of small volume, high integration level and high flexibility.
Description
Technical Field
The invention relates to the technical field of micro-nano photonics, in particular to an optical fiber super-surface and a preparation method thereof.
Background
The photo-thermal-immune combined therapy is a potential minimally invasive therapy means in tumor therapy, and has the advantages of accurate therapy, high killing rate, small side effect and short therapy time. In the treatment, the optical fiber can be used as a micro drug delivery tool, the near infrared laser commonly used in medical use is used as an external light source, the photo-thermal drug is accurately delivered to the tumor part through the optical fiber, the optical energy is converted into heat energy, and the nano photo-thermal drug is heated to thermally ablate tumor tissues and kill cancer cells. The optical fiber endoscopic laser scheme of the traditional lens has large integrated volume and weight, but the divergence angle of the emergent light is small, so that the radiation range of the photo-thermal medicament is limited, and the tumor tissue is difficult to radiate effectively and treat efficiently.
Disclosure of Invention
The invention aims to provide an optical fiber super-surface and a preparation method thereof, which can solve the problems of long rigid length, insufficient integration level and inflexible operation of the tip of the optical fiber endoscope at present.
In order to achieve the above object, the present invention provides the following solutions:
An optical fiber supersurface and a method of making the same, comprising: the optical fiber and the super surface fixed at the tail end of the optical fiber through the adhesive layer; the super surface comprises a film, a micro-nano unit structure and a protective cladding which are arranged in sequence from bottom to top, wherein the micro-nano unit structure is periodically and tightly arranged; one side of the film without the micro-nano unit structure is connected with the adhesive layer.
Optionally, the total coverage of the micro-nano unit structure is greater than or equal to the area range of the fiber core of the optical fiber, and the center of the micro-nano unit structure is aligned with the center of the fiber core of the optical fiber.
Optionally, the supersurface has a thickness of 1-20 microns.
Optionally, the micro-nano unit structure adopts a propagation phase type super-surface, a geometric phase type super-surface or a composite phase super-surface; wherein the propagation phase type super surface is obtained by setting the structure size; the geometric phase type super surface is obtained by designing the rotation direction of the structure; the composite phase subsurface includes a propagation phase type subsurface and a geometric phase type subsurface.
Optionally, the micro-nano unit structure is in a shape of a central symmetrical pattern.
Alternatively, the central symmetrical pattern may be one or more of a circle, square, and ring or other pattern.
Optionally, the phase distribution of the micro-nano unit structure is 0-2 pi.
The invention also provides a preparation method of the optical fiber super-surface, which is used for preparing the optical fiber super-surface and comprises the following steps:
Depositing a film on a substrate, photoetching and etching the film to obtain a micro-nano unit structure of the super surface, depositing and leveling a protective cladding, etching a hole for aligning an optical fiber on the back of the substrate, etching a cantilever structure on the front of the substrate, spin-coating ultraviolet curing glue on the back of the substrate or depositing an adhesive material which is not limited by the ultraviolet curing glue by adopting other deposition methods to form a glue layer, aligning the super surface with the optical fiber through the hole on the back of the substrate, penetrating the optical fiber through the substrate along the hole, and transferring the super surface to the optical fiber by stress fracture of the cantilever structure outside the super surface in the penetrating process.
Optionally, when a hole for optical fiber alignment is etched on the back of the substrate, the hole is aligned with the micro-nano unit structure center.
Optionally, the etching process of the cantilever structure is as follows: etching the cantilever beam structure at a position which is away from the center R+Deltar of the micro-nano unit structure of the super surface; and R is the radius of the hole, and Deltar is greater than or equal to zero.
According to the specific embodiment provided by the invention, the invention discloses the following technical effects:
the invention discloses an optical fiber super-surface and a preparation method thereof, wherein the optical fiber super-surface comprises an optical fiber and a super-surface fixed at the tail end of the optical fiber through an adhesive layer; the super surface comprises a film, a micro-nano unit structure and a protective cladding which are arranged in sequence from bottom to top, wherein the micro-nano unit structure is periodically and tightly arranged; one side of the film without the micro-nano unit structure is connected with the adhesive layer. The invention directly integrates the super surface at the tail end of the optical fiber, thereby not only improving the irradiation range of emergent light in the optical fiber, but also realizing the effects of small volume, high integration level and high flexibility.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions of the prior art, the drawings that are needed in the embodiments will be briefly described below, it being obvious that the drawings in the following description are only some embodiments of the present invention, and that other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
FIG. 1 is a schematic cross-sectional view of a fiber optic supersurface according to the invention;
FIG. 2 is a schematic cross-sectional view of the super surface of the multilayer optical fiber according to the present embodiment;
FIG. 3 is a schematic cross-sectional view of a multi-layered film on a substrate according to the present embodiment;
FIG. 4 is a flowchart showing a specific preparation method in this embodiment;
FIG. 5 is a schematic illustration of the method of making use of cantilever beams to transfer a supersurface from a substrate to an optical fiber in the present example;
FIG. 6 is a top view of a specific cantilever structure of the present embodiment in the case of no cantilever structure outside the subsurface and in the case of a cantilever;
FIG. 7 is a schematic diagram of a micro-nano unit structure of the super surface in the present embodiment; fig. 7 (a) is a three-dimensional schematic diagram; FIG. 7 (b) is a top view of a different micro-nano cell pattern;
FIG. 8 is a graph showing a target phase profile of the subsurface in this embodiment;
FIG. 9 is a graph showing the energy distribution of the propagation direction of light incident from the optical fiber through the super surface according to the present embodiment;
Fig. 10 is a far field energy distribution diagram of light incident from an optical fiber after passing through a super surface in this embodiment.
Reference numerals:
1. an optical fiber; 2. a glue layer; 3. a film; 4. a micro-nano unit structure; 5. a protective cladding; 6. cantilever beam structure.
Detailed Description
The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
The invention aims to provide an optical fiber super-surface and a preparation method thereof, which can solve the problems of long rigid length, insufficient integration level and inflexible operation of the tip of the optical fiber endoscope at present.
In order that the above-recited objects, features and advantages of the present invention will become more readily apparent, a more particular description of the invention will be rendered by reference to the appended drawings and appended detailed description.
As shown in fig. 1, the present invention provides an optical fiber super-surface comprising: the optical fiber 1 and the super surface fixed at the tail end of the optical fiber 1 through an adhesive layer; the super surface comprises a film 3, a micro-nano unit structure 4 and a protective coating 5 which are arranged in sequence from bottom to top; one side of the film 3 without the micro-nano unit structure 4 is connected with the adhesive layer 2. Wherein the thickness of the super surface is 1-20 micrometers, and the phase distribution of the micro-nano unit structure 4 is 0-2 pi.
As a specific embodiment, the total coverage of the micro-nano unit structure 4 is greater than or equal to the area range of the core of the optical fiber 1, and the center of the micro-nano unit structure 4 is aligned with the center of the core of the optical fiber 1.
As a specific embodiment, the micro-nano unit structure 4 adopts a propagation phase type super-surface, a geometric phase type super-surface or a composite phase super-surface; wherein the propagation phase type super surface is obtained by setting the structure size; the geometric phase type super surface is obtained by designing the rotation direction of the structure; the composite phase subsurface includes a propagation phase type subsurface and a geometric phase type subsurface.
As a specific embodiment, the micro-nano unit structure 4 is in a central symmetrical pattern, and the central symmetrical pattern adopts one or more of a circular shape, a square shape and a ring shape or other patterns.
Based on the design of the above-described optical fiber 1 supersurface, the following embodiments are provided.
In this embodiment, the super surface is a planar structure composed of all-dielectric sub-wavelength nano units capable of causing phase mutation, and the incident light can be flexibly regulated and controlled by changing the materials, shapes and arrangement modes of the sub-wavelength nano units, so that different functions are realized. The preparation method designed by the invention directly integrates the super surface at the tail end of the optical fiber 1, can realize the large-scale irradiation of the emergent light in the optical fiber 1, and can also be used for realizing other functions such as focusing, beam shaping, polarization control and the like. Compared with the optical fiber 1 endoscopic laser proposal of the traditional lens with larger integrated volume and weight, the design uses the light and thin super surface, thereby reducing the hard length of the tip, ensuring the whole thickness of the super surface part to be only 1-20 micrometers, improving the operation flexibility, and the super surface optical fiber 1 system has the characteristics of small volume, high integrated level and simple assembly, and can precisely go deep into the focus to carry out minimally invasive treatment.
Thus, an optical fiber 1 supersurface as shown in fig. 1 is provided, consisting essentially of an optical fiber 1 for transmitting laser light and a supersurface for modulating the laser light and a glue layer 2 for connecting the two. The super surface is positioned at the tail end of the optical fiber 1, and is integrated with the optical fiber 1 through the adhesive layer 2, and laser transmitted in the optical fiber 1 is modulated by a super surface unit, so that a large-angle beam expanding effect is realized. Wherein the super surface is composed of a film 3 as a substrate, a micro-nano unit structure 4 which is periodically and closely arranged, and a protective coating 5.
As shown in fig. 2, the micro-nano unit structure 4 of the super surface may be one or more layers, each layer of micro-nano unit structure 4 has at least one layer of protective cladding 5, and the materials of each layer of micro-nano unit structure 4 and the cladding may be the same or different. As shown in fig. 3, the substrate front surface film 3 may be one or more layers, and the materials of the respective layers of film 3 may be the same or different.
In addition, the invention also provides a preparation method of the optical fiber 1 super surface, which is used for preparing the optical fiber 1 super surface and comprises the following steps:
Depositing a film 3 on a substrate, photoetching and etching the film 3 to obtain a micro-nano unit structure 4 of the super surface, depositing and leveling a protective coating 5, etching a hole for aligning the optical fiber 1 on the back of the substrate, etching a cantilever beam structure 6 on the front of the substrate, spin-coating ultraviolet curing glue on the back of the substrate or depositing an adhesive material which is not limited by the ultraviolet curing glue by adopting other deposition methods to form a glue layer 2, aligning the super surface with the optical fiber 1 through the hole on the back of the substrate, penetrating the optical fiber through the substrate along the hole, and carrying out stress fracture on the cantilever beam structure 6 in the penetrating process to transfer the super surface onto the optical fiber 1. Wherein, when a hole for aligning the optical fiber 1 is etched on the back of the substrate, the hole is aligned with the center of the micro-nano unit structure 4.
As a specific embodiment, the etching process of the cantilever structure 6 is as follows: etching the cantilever beam structure 6 at a position R+Deltar away from the center of the micro-nano unit structure 4 of the super surface; and R is the radius of the hole, and Deltar is greater than or equal to zero.
Based on the design considerations of the above-described preparation schemes, the following examples are provided.
As shown in fig. 4, first, depositing a film 3A and a film 3B on a substrate, performing photolithography and etching on the film 3B to obtain a micro-nano unit structure 4 on the super surface, performing deposition and planarization of a protective cladding 5, etching a hole for aligning an optical fiber 1 on the back of the substrate, etching a cantilever beam structure 6 on the front of the substrate, spin-coating ultraviolet curing adhesive on the back of the substrate, finally aligning the super surface structure with the optical fiber 1 through the hole on the back of the substrate, penetrating the optical fiber through the substrate along the hole, and performing stress fracture on the cantilever beam structure 6 in the penetrating process to transfer the super surface structure onto the optical fiber 1.
As shown in fig. 5, the optical fiber 1 is inserted from the back hole of the substrate to align with the super surface, and the optical fiber penetrates the substrate along the hole, and the cantilever structure 6 outside the super surface is broken under force during the penetration process, so that the super surface is transferred from the substrate to the optical fiber 1.
As shown in fig. 6, the back hole of the substrate is aligned with the center of the front-side supersurface structure, and the cantilever structure 6 is at a distance r+Δr from the center of the supersurface structure, where Δr is greater than or equal to zero. The cantilever structures 6 may be of any shape and number, and may be zero in special cases.
As shown in fig. 7, the micro-nano unit structure 4 of this example adopts a single-layer square periodically arranged compact super-surface micro-nano unit structure 4, and the micro-nano unit patterns can be selected from any patterns with central symmetry such as circles, squares, circular rings and the like, and the shapes and the sizes can be the same or different. Wherein P represents the period of the micro-nano unit of the super surface, H represents the height of the super surface structure, and theta represents the size of the beam expansion angle of the emergent light of the super surface (theta is defined as the angle corresponding to the energy when the energy is reduced to 1-1/e 2).
In the embodiment, near infrared 940nm wavelength is selected as incident light, and the super surface of the optical fiber 1 is used for realizing a divergence function. The silicon dioxide which is commonly used in the wave band and has lower cost is selected as an underlayment material layer, the amorphous silicon with larger refractive index is used as an ultra-surface micro-nano unit material, the amorphous silicon and the ultra-surface micro-nano unit material have lower extinction coefficients in the selected wave band, and the cladding layer which plays a role in protection above the ultra-surface is also selected as the silicon dioxide material. It should be noted that the silicon dioxide and amorphous silicon materials used herein should not be construed as the only limitations of the present invention, and that the present invention may also be designed and fabricated using any other band transparent dielectric material as the substrate, the ultra-surface micro-nano-cells, and the cladding material.
The designed super surface has a diameter of 125 μm, a unit period of 400nm, the micro-nano unit structure 4 is a nano-pillar structure with a diameter ranging from 100nm to 300nm, the height is 620nm, and the thickness of the super surface protection cladding 5 is 800nm. The optical fiber 1 adopts a multimode optical fiber 1 with a core diameter of 105 μm and a cladding diameter of 125 μm.
Numerical simulation is carried out on the ultra-surface micro-nano units, the corresponding relation between the shape and the geometric dimension of the ultra-surface pattern and the transmission phase is established, the ultra-surface units which meet the 0-2 pi phase distribution and have the highest transmittance are selected to form the ultra-surface, and the numerical simulation result of the whole ultra-surface is close to or equal to the target phase shown in figure 8.
According to the simulation result, when 940nm light is incident, the light intensity distribution in the propagation direction is as shown in fig. 9, and the θ spread angle is 60 degrees. The far field light intensity distribution is shown in fig. 10, and the light energy distribution is nearly the whole plane, which shows that the device has good beam expansion function.
Therefore, the optical fiber super-surface described in the above embodiment has the following beneficial effects:
(1) The optical fiber super surface has an ultrathin substrate, the whole thickness of the super surface (except the optical fiber) is only 1-20 microns, the light and thin property of the super surface greatly reduces the hard length of the tip, the operation flexibility is greatly improved, and smaller wounds are generated in minimally invasive treatment.
(2) The micro-nano unit structure of the optical fiber super surface has a cladding layer to play a role in protecting, so that external liquid or impurities can be prevented from entering the micro-nano gap, and the optical field regulation and control characteristics of the micro-nano gap are influenced.
(3) The super surface can achieve the anti-reflection effect by adjusting the materials and the thickness of the protective coating and the thin film on the substrate.
(4) According to the preparation method, the cantilever structure is etched outside the super-surface structure, the optical fiber is aligned with the super-surface from the hole on the back of the substrate, the optical fiber penetrates through the substrate along the hole, and the cantilever structure outside the super-surface is broken under stress in the penetrating process, so that the super-surface is transferred onto the optical fiber from the substrate, and the preparation is convenient.
In the present specification, each embodiment is described in a progressive manner, and each embodiment is mainly described in a different point from other embodiments, and identical and similar parts between the embodiments are all enough to refer to each other.
The principles and embodiments of the present invention have been described herein with reference to specific examples, the description of which is intended only to assist in understanding the core concept of the invention; also, it is within the scope of the present invention to be modified by those of ordinary skill in the art in light of the present teachings. In view of the foregoing, this description should not be construed as limiting the invention.
Claims (10)
1. An optical fiber subsurface, comprising: the optical fiber and the super surface fixed at the tail end of the optical fiber through the adhesive layer; the super surface comprises a film, a micro-nano unit structure and a protective cladding which are arranged in sequence from bottom to top, wherein the micro-nano unit structure is periodically and tightly arranged; one side of the film without the micro-nano unit structure is connected with the adhesive layer.
2. The optical fiber supersurface of claim 1 wherein the total coverage of said micro-nano cell structures is greater than or equal to the core area range of said optical fiber and the center of said micro-nano cell structures is aligned with the core center of said optical fiber.
3. The optical fiber supersurface of claim 1 wherein said supersurface has a thickness of 1 to 20 microns.
4. The optical fiber supersurface of claim 1 wherein said micro-nano unit structure employs a propagating phase supersurface, a geometric phase supersurface or a composite phase supersurface; wherein the propagation phase type super surface is obtained by setting the structure size; the geometric phase type super surface is obtained by designing the rotation direction of the structure; the composite phase subsurface includes a propagation phase type subsurface and a geometric phase type subsurface.
5. The optical fiber supersurface of claim 1 wherein said micro-nano cell structure is shaped in a centrally symmetric pattern.
6. The fiber optic super surface according to claim 5, wherein said central symmetrical pattern is one or more of circular, square and annular or other patterns.
7. The optical fiber supersurface of claim 1 wherein said micro-nano unit structure has a phase distribution of 0-2 pi.
8. A method of preparing an optical fiber supersurface, for use in preparing an optical fiber supersurface according to any one of claims 1 to 7, comprising:
Depositing a film on a substrate, photoetching and etching the film to obtain a micro-nano unit structure of the super surface, depositing and leveling a protective cladding, etching holes for optical fiber alignment on the back of the substrate, etching a cantilever structure on the front of the substrate, spin-coating ultraviolet curing glue on the back of the substrate or depositing an adhesive material which is not limited by the ultraviolet curing glue by adopting other deposition methods to form a glue layer, aligning the super surface with the optical fiber through the holes on the back of the substrate, penetrating the optical fiber through the substrate along the holes, and carrying out stress fracture on the cantilever structure outside the super surface in the penetrating process to transfer the super surface onto the optical fiber.
9. The method of claim 8, wherein the holes are aligned with the micro-nano unit structure center when holes for optical fiber alignment are etched on the back of the substrate.
10. The method for preparing an optical fiber super-surface according to claim 8, wherein the etching process of the cantilever structure is as follows: etching the cantilever beam structure at a position which is away from the center R+Deltar of the micro-nano unit structure of the super surface; and R is the radius of the hole, and Deltar is greater than or equal to zero.
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| Application Number | Priority Date | Filing Date | Title |
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| CN202410069971.5A CN117950119A (en) | 2024-01-17 | 2024-01-17 | Optical fiber super-surface and preparation method thereof |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202410069971.5A CN117950119A (en) | 2024-01-17 | 2024-01-17 | Optical fiber super-surface and preparation method thereof |
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