CN206470432U - Ion exchange optical waveguide with alignment function - Google Patents
Ion exchange optical waveguide with alignment function Download PDFInfo
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- CN206470432U CN206470432U CN201621144711.7U CN201621144711U CN206470432U CN 206470432 U CN206470432 U CN 206470432U CN 201621144711 U CN201621144711 U CN 201621144711U CN 206470432 U CN206470432 U CN 206470432U
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- fiber waveguide
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- ion exchange
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Abstract
The utility model belongs to optical communication technology field, is related to a kind of ion exchange optical waveguide with alignment function, including fiber waveguide and is arranged on the input of the fiber waveguide and/or the GRIN Lens with self-focusing function of output end.The GRIN Lens is arranged on the input of fiber waveguide, and its focus is located at the boundary of GRIN Lens and fiber waveguide, is inputted with the collimation for realizing fiber waveguide.The GRIN Lens is arranged on the output end of fiber waveguide, and its nearly directional light keeps section length to be more than its maximum gradual change section length, is exported with the nearly collimation for realizing fiber waveguide.The utility model also provides a kind of preparation method of the ion exchange optical waveguide with alignment function.Compared with prior art, the utility model easily realizes that multiport is collimated by integrated；Reduce the coupling accuracy requirement of integrated light guide；Compact, beneficial to the system integration；According to design requirement, can be integrated in the length and core diameter of the GRIN Lens of fiber waveguide can adjust.
Description
Technical field
The utility model belongs to optical communication technology field, more particularly, to a kind of ion exchange light wave with alignment function
Lead.
Background technology
In fibre system, the direct docking of optical fiber can not be realized, it is necessary to be realized by optical fiber collimator in some cases
Docking on space length.Traditional optical fiber collimator easily realizes the collimating effect of single pair of list, but if to realize multiport
Between collimate, system complexity will be greatly improved, and space-consuming is larger.
A kind of typical structure of optical fiber collimator be GRIN Lens docked with fiber array, fiber array by tail optical fiber again
Incoming fiber optic system.If can realize that optical fiber collimator is docked with the direct of fiber waveguide, the integrated level of system will further improve.
From the point of view of integrated optics fiber waveguide angle, although existing integrated optics fiber waveguide has compact, performance is steady
The advantages of determining, it require that by fiber array couple incoming fiber optic system, to be coupled and aligned require it is higher, its integrated level by
It is limited to the size of fiber array.
Chinese patent (application number：201410842767.9) a kind of lens planar optical waveguide of end face is disclosed, including：
One planar optical waveguide array, includes multiple planar optical waveguides be arrangeding in parallel, and the plurality of planar optical waveguide have it is lens
Spherical mirror end face, the spherical mirror end face has collimation or focusing function；And a coupler, put down for supporting and fixing this
Face optical waveguide array.The invention realizes the integration by lens and planar optical waveguide, overcomes the light caused because lens are discrete
Road is unstable, the problems such as optical axis center alignment difficulties, simplifies coupled structure.But the invention remains unchanged and there is following defect：The hair
Bright focusing and collimating effect is not good, it is impossible to reaches the degree of collimation input and nearly collimation output, furthermore in optical waveguide structure one
In the case of fixed, spherical mirror end face only has a kind of structure type, and application is narrow, finally due to the technique essence of spherical mirror end face
Degree requires higher, and production equipment is difficult to meet design requirement.
The content of the invention
The purpose of this utility model is exactly the defect in order to overcome above-mentioned prior art presence and provides a kind of band collimation work(
The ion exchange optical waveguide of energy, one side multiport collimation can be realized by the topological structure of fiber waveguide, improve the collection of system
Cheng Du；The coupling of another aspect fiber waveguide can increase tolerance by collimater, reduce system alignment required precision.
The purpose of this utility model can be achieved through the following technical solutions：
A kind of ion exchange optical waveguide with alignment function, including fiber waveguide and the input for being arranged on the fiber waveguide
And/or the GRIN Lens with self-focusing function of output end.
Preferably, the GRIN Lens is arranged on the input of fiber waveguide, its focus is located at GRIN Lens and light
The boundary of waveguide, is inputted with the collimation for realizing fiber waveguide.
Preferably, the GRIN Lens is arranged on the output end of fiber waveguide, its nearly directional light keeps section length to be more than
Its maximum gradual change section length, is exported with the nearly collimation for realizing fiber waveguide；
Nearly directional light holding area：The region for collecting angle≤0.2 ° of light；
Maximum transition region：From the boundary of fiber waveguide and GRIN Lens to light first in the area of GRIN Lens inner focusing
Domain.
Preferably, the length of the GRIN Lens is a quarter pitch or integral multiple pitch；
The length of GRIN Lens is designated as Z, and the pitch of GRIN Lens is designated as P, and positive integer is designated as N, then Z=0.25P or
Z=N (0.25P).
Preferably, the core diameter of the GRIN Lens is at least 2 times of the core diameter of fiber waveguide.
Preferably, the equivalent refractive index of the GRIN Lens it is poor≤equivalent refractive index of the fiber waveguide is poor.
The above-mentioned ion exchange optical waveguide with alignment function is made by the following method, and this method comprises the following steps：
(1) fiber waveguide is formed on glass wafer by plated film, a photoetching, a thermal ion exchange, then passes through electric field
Assisting ion exchanges and matches fiber waveguide with optical fiber；
(2) in glass wafer surface second plated film, minute surface reflexed light film, i.e. mask are formed；
(3) the minute surface reflexed light film above the GRIN Lens area of glass wafer is removed by secondary photoetching；
(4) ion exchange optical waveguide with alignment function is made using heat radiation ion diffusion technique.
Preferably, the heat radiation ion diffusion technique is：Minute surface reflexed light film is coated with by what secondary photoetching was completed
Glass wafer is positioned on black substrate base station, and glass wafer is heated in surface by the way of infra-red radiation, no mask regions
Fiber waveguide is quickly spread composition GRIN Lens area by infrared emanation, and the fiber waveguide of mask regions due to mirror-reflection it is heated compared with
Slowly, fiber waveguide area is constituted.
Preferably, the material of the minute surface reflexed light film of the step (2) is one kind in aluminium, titanium, chromium, gold.
Preferably, a photoetching in the step (1) is specially：By being spin-coated on shape on a plated film institute film plating layer
Solidify photoresist film into one layer of photoresist film, then using heated baking mode, then using exposed and developed technology by photolithography plate
On wave guide pattern be transferred on photoresist film, and then again heated baking complete photoresist film resolidification, then will
Glass wafer with photoresist film is positioned in the corrosive liquid of heating, the selection by corrosive liquid to a plated film institute film plating layer
Property corrosion the wave guide pattern of photoresist film is transferred on a plated film institute film plating layer, finally by photoresist film from glass wafer
It is upper to remove.
Compared with prior art, the utility model has advantages below：
1st, by integrated, easily realize that multiport is collimated.Light can always be collimated when being inputted from GRIN Lens enters light
Waveguide, then realizes light beam splitting by the beam splitting or wavelength-division multiplex function of fiber waveguide, saturating again by self-focusing after beam splitting
Mirror collimation output, realizes one-to-many or multi-to-multi light collimation.
2nd, the coupling accuracy requirement of reduction integrated light guide.Traditional integrated light guide, optical fiber is needed during with fiber coupling
Fitted with the complete alignment of light wave guiding center, to realize maximum coupling efficiency；And only need to meet coupling using the technical program
Coupling distance in the transmission direction of optical fiber and fiber waveguide can be achieved with autohemagglutination no more than 1/2nd pitches of GRIN Lens
Complete reception of the focus lens to fiber exit light, and collimate into fiber waveguide, realize efficient coupling.
3rd, compact, beneficial to the system integration.Integrated one-to-many or multi-to-multi light is realized using the technical program
Alignment function, and identical function is realized by the scheme of Space Collimation then to be needed to use mutual collimation pair between multiple filter plates
Standard, system complexity is higher.In contrast, the technical program is effectively improved the integrated level of system.
4th, according to design requirement, can be integrated in the length and core diameter of the GRIN Lens of fiber waveguide can adjust.For
For different fibre systems, the core diameter of optical fiber difference.Pass through the line thickness and ion exchange work of mask blank
The control of skill parameter can realize the fiber waveguide with alignment function for adapting to different fibre systems.
Brief description of the drawings
Fig. 1 is the structural representation of embodiment；
Fig. 2 is the close-up schematic view of embodiment input part；
Fig. 3 is the close-up schematic view of embodiment outlet end part；
In accompanying drawing：1- input GRIN Lens, 2- fiber waveguides, 3- light, the nearly directional light holding areas of 4-, 5- maximum gradual changes
Area, 6- output end GRIN Lens.
Embodiment
The utility model is described in detail with specific embodiment below in conjunction with the accompanying drawings.The present embodiment is with the utility model
Implemented premised on technical scheme, give detailed embodiment and specific operating process, but guarantor of the present utility model
Shield scope is not limited to following embodiments.
Embodiment 1：
The present embodiment primary structure is referred to Fig. 1 to 3, and this embodiment offers a kind of ion exchange with alignment function
Fiber waveguide, including fiber waveguide 2 and the input GRIN Lens 1 with self-focusing function for being arranged on the two ends of fiber waveguide 2
With output end GRIN Lens 6.
The focus of input GRIN Lens 1 is located at its boundary with fiber waveguide 2, is inputted with the collimation for realizing fiber waveguide 2.
The nearly length of directional light holding area 4 of output end GRIN Lens 6 is more than its maximum length of transition region 5, to realize light
The nearly collimation output of waveguide 2；
Nearly directional light holding area 4：The region for collecting angle≤0.2 ° of light 3；
Maximum transition region 5：Boundary from fiber waveguide 2 and output end GRIN Lens 6 is to light 3 first in output end autohemagglutination
The region of the inner focusing of focus lens 6.
The length of input GRIN Lens 1 and output end GRIN Lens 6 is a quarter pitch.GRIN Lens
Length is designated as Z, and the pitch of GRIN Lens is designated as P, then Z=0.25P.
The core diameter of input GRIN Lens 1 and output end GRIN Lens 6 is 6 times of the core diameter of fiber waveguide 2.
The equivalent refractive index difference of input GRIN Lens 1 and output end GRIN Lens 6 is equal to the equivalent folding of fiber waveguide 2
Penetrate rate poor.
The present embodiment also provides a kind of preparation method of the ion exchange optical waveguide with alignment function, main to include once plating
Film, a photoetching, thermal ion exchange, field assisted ion-exchange, secondary film coating, secondary photoetching and the diffusion of heat radiation ion etc.
Technique, this method is comprised the following steps that：
One layer of chromium film is deposited using electron beam evaporation in (1) plated film, and a photoetching is formed on chromium film with 1 point 4
Wave guide pattern is transferred on glass wafer by the wave guide pattern of function, thermal ion exchange, and field assisted ion-exchange is by light
Waveguide pattern is improved to optical fiber and matched；
(2) secondary film coating technique institute plated film layer material is aluminium, forms minute surface reflexed light film, i.e. aluminium mask；
(3) secondary photoetching is removed the aluminium mask above the GRIN Lens area of glass wafer by way of overlay alignment
Remove；
(4) glass wafer for being coated with minute surface reflexed light film after secondary photoetching is positioned over black by heat radiation ion diffusion technique
On color substrate base station, heating glass wafer is irradiated in surface by the way of infra-red radiation, and it is 240 DEG C to keep radiation area temperature.
Fiber waveguide without aluminium mask regions is quickly spread by infrared emanation, and the glass wafer of aluminium mask regions is heated due to mirror-reflection
It is slower.After irradiation time 2 hours, the fiber waveguide diffusion below no aluminium mask regions is constituted below GRIN Lens area, aluminium mask regions
Fiber waveguide constitute fiber waveguide area.
A photoetching in step (1) is specially：By being spin-coated on one layer of photoresist film of formation on chromium film, then using heating
Roasting mode solidifies photoresist film, and the wave guide pattern on photolithography plate then is transferred into photoresist using exposed and developed technology
On film, and then heated baking completes the resolidification of photoresist film again, then places the glass wafer with photoresist film
In the corrosive liquid of heating, the wave guide pattern of photoresist film is transferred to by chromium film to the selective corrosion of chromium film by corrosive liquid
On, finally photoresist film is removed from glass wafer.
Embodiment 2：
The present embodiment primary structure can also be with reference to such as Fig. 1 to 3, and this embodiment offers a kind of ion with alignment function
Exchange fiber waveguide, including fiber waveguide 2 and be arranged on the two ends of fiber waveguide 2 the input self-focusing with self-focusing function it is saturating
Mirror 1 and output end GRIN Lens 6.
Nearly directional light holding area 4 collects region of the angle less than 0.05 ° for light 3.
The length of input GRIN Lens 1 and output end GRIN Lens 6 is 2 times of pitches.
The core diameter of input GRIN Lens 1 and output end GRIN Lens 6 is 2 times of the core diameter of fiber waveguide 2.
The equivalent refractive index difference of input GRIN Lens 1 and output end GRIN Lens 6 is less than the equivalent folding of fiber waveguide 2
Penetrate rate poor.
The other structures of the ion exchange optical waveguide with alignment function are substantially the same manner as Example 1.
The present embodiment also provides a kind of preparation method of the ion exchange optical waveguide with alignment function, main to include once plating
Film, a photoetching, thermal ion exchange, field assisted ion-exchange, secondary film coating, secondary photoetching and the diffusion of heat radiation ion etc.
Technique, this method is comprised the following steps that：
One layer of titanium film is deposited using electron beam evaporation in (1) plated film, and a photoetching is formed on titanium film with 2 ratios
Wave guide pattern is transferred on glass wafer by the wave guide pattern of 98 non-equal distribution functions, thermal ion exchange, electric-field-assisted ion
Exchange, which improves wave guide pattern to optical fiber, to be matched.
(2) secondary film coating technique institute plated film layer material is gold, forms minute surface reflexed light film, i.e. gold mast；
(3) secondary photoetching is removed the gold mast above the GRIN Lens area of glass wafer by way of overlay alignment
Remove；
(4) glass wafer for being coated with minute surface reflexed light film after secondary photoetching is positioned over black by heat radiation ion diffusion technique
On color substrate base station, heating glass wafer is irradiated in surface by the way of infra-red radiation, and it is 280 DEG C to keep radiation area temperature.
Fiber waveguide without gold mast area is quickly spread by infrared emanation, and the glass wafer in gold mast area is heated due to mirror-reflection
It is slower.After irradiation time 1 hour, the fiber waveguide diffusion in no gold mast area constitutes the light below GRIN Lens area, gold mast area
Waveguide constitutes fiber waveguide area.
Other step process of the preparation method of the ion exchange optical waveguide with alignment function and the basic phase of embodiment 1
Together.
Embodiment 3：
The structure and step process of the embodiment are substantially the same manner as Example 1, and its difference is：Secondary film coating technique
Institute's plated film layer material is titanium, forms minute surface reflexed light film, i.e. titanium mask.
Embodiment 4：
The structure and step process of the embodiment are substantially the same manner as Example 1, and its difference is：Secondary film coating technique
Institute's plated film layer material is chromium, forms minute surface reflexed light film, i.e. chromium mask.
Claims (5)
1. a kind of ion exchange optical waveguide with alignment function, it is characterised in that：Including fiber waveguide and it is arranged on the fiber waveguide
Input and/or output end the GRIN Lens with self-focusing function；
The length of the GRIN Lens is a quarter pitch or integral multiple pitch；
The length of GRIN Lens is designated as Z, and the pitch of GRIN Lens is designated as P, and positive integer is designated as N, then Z=0.25P or Z=
N·(0.25P)。
2. a kind of ion exchange optical waveguide with alignment function according to claim 1, it is characterised in that：The self-focusing
Lens are arranged on the input of fiber waveguide, and its focus is located at the boundary of GRIN Lens and fiber waveguide, to realize the standard of fiber waveguide
Straight input.
3. a kind of ion exchange optical waveguide with alignment function according to claim 1, it is characterised in that：The self-focusing
Lens are arranged on the output end of fiber waveguide, and its nearly directional light keeps section length to be more than its maximum gradual change section length, to realize light wave
The nearly collimation output led；
Nearly directional light holding area：The region for collecting angle≤0.2 ° of light；
Maximum transition region：From the boundary of fiber waveguide and GRIN Lens to light first in the region of GRIN Lens inner focusing.
4. a kind of ion exchange optical waveguide with alignment function according to claim 1, it is characterised in that：The self-focusing
The core diameter of lens is at least 2 times of the core diameter of fiber waveguide.
5. a kind of ion exchange optical waveguide with alignment function according to claim 1, it is characterised in that：The self-focusing
The equivalent refractive indexs of lens is poor≤and the equivalent refractive index of the fiber waveguide is poor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621144711.7U CN206470432U (en) | 2016-10-21 | 2016-10-21 | Ion exchange optical waveguide with alignment function |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621144711.7U CN206470432U (en) | 2016-10-21 | 2016-10-21 | Ion exchange optical waveguide with alignment function |
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| CN206470432U true CN206470432U (en) | 2017-09-05 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106353854A (en) * | 2016-10-21 | 2017-01-25 | 上海光芯集成光学股份有限公司 | Ion-exchange optic waveguide with collimation function and preparation method thereof |
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2016
- 2016-10-21 CN CN201621144711.7U patent/CN206470432U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106353854A (en) * | 2016-10-21 | 2017-01-25 | 上海光芯集成光学股份有限公司 | Ion-exchange optic waveguide with collimation function and preparation method thereof |
| CN106353854B (en) * | 2016-10-21 | 2023-01-31 | 常州光芯集成光学有限公司 | Ion exchange optical waveguide with collimation function and preparation method thereof |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20180507 Address after: 215400 38 Qingdao West Road, Taicang Economic Development Zone, Suzhou, Jiangsu Patentee after: Suzhou light mantle integrated optics Co., Ltd. Address before: 200072 Room 102, 14 Lane 777, Guang Zhong Road, Zhabei District, Shanghai. Patentee before: Shanghai Guangxin Integrated Optical Co., Ltd. Co., Ltd. |
|
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20200529 Address after: 213000 Jiangsu province west of the city of Changzhou Taihu science and Technology Industrial Park Dragon Road No. 2 Patentee after: Changzhou optical core integrated optics Co.,Ltd. Address before: 215400 Taicang Economic Development Zone, Jiangsu, Qingdao West Road, No. 38, No. Patentee before: SUZHOU OPTICORE INTEGRATED OPTICAL Co.,Ltd. |