CN117824543A - Adjustable autocollimator light path system and light path debugging method - Google Patents

Adjustable autocollimator light path system and light path debugging method Download PDF

Info

Publication number
CN117824543A
CN117824543A CN202311860233.4A CN202311860233A CN117824543A CN 117824543 A CN117824543 A CN 117824543A CN 202311860233 A CN202311860233 A CN 202311860233A CN 117824543 A CN117824543 A CN 117824543A
Authority
CN
China
Prior art keywords
light
reflecting mirror
collimator
module
auto
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202311860233.4A
Other languages
Chinese (zh)
Inventor
颜永振
杨子星
刘备
申泽
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Suzhou Zhonghui Laser Technology Co ltd
Original Assignee
Suzhou Zhonghui Laser Technology Co ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Suzhou Zhonghui Laser Technology Co ltd filed Critical Suzhou Zhonghui Laser Technology Co ltd
Priority to CN202311860233.4A priority Critical patent/CN117824543A/en
Publication of CN117824543A publication Critical patent/CN117824543A/en
Pending legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)

Abstract

The invention relates to an adjustable auto-collimator light path system and a light path debugging method, wherein the system comprises an auto-collimator, a beam splitting prism, an aperture diaphragm, a reflecting mirror, a plane reflecting mirror, a CCD module, an imaging surface module and a camera, wherein the plane reflecting mirror is positioned on a reflecting light path of the reflecting mirror, the CCD module is arranged on the reflecting light path of the beam splitting prism, the imaging surface module is positioned on the back surface of the plane reflecting mirror, and the imaging surface module is positioned on the appearance of a light spot shot by the camera and judges the inclination angle of an emergent light source. According to the invention, on one hand, the integral structure of the auto-collimator is designed in a modularized manner by the debugging requirement and the function of the coaxial incident light path and the reflecting light path, so that the dynamic flatness measurement is realized, the adjusting process is simple and convenient, the debugging time is shortened, the debugging efficiency is improved, and meanwhile, the positions and the morphologies of the reflecting light spots and the emergent light spots are monitored by a computer, so that the measuring precision of the auto-collimator is improved; on the other hand, each module in the auto-collimator is convenient to install and debug, and the same modules can be mutually replaced, so that the auto-collimator is convenient to maintain.

Description

Adjustable autocollimator light path system and light path debugging method
Technical Field
The invention belongs to the technical field of optics, and particularly relates to an adjustable auto-collimator light path system and a light path debugging method of the adjustable auto-collimator.
Background
With rapid development of scientific technology and production technology, it is very important to realize rapid, high-precision, non-contact, easy-to-operate, stable and reliable detection on small angle measurement such as workpiece inclination measurement, flat plate flatness measurement, shafting angle shaking measurement, guide rail straightness measurement, etc., for example: the angle measurement of the prism surface, the flatness measurement of the plane mirror surface, the measurement of the movement condition of the machine tool carriage on the machine tool body, the measurement of the vertical angle between the machine tool main shaft and the workbench, and the like are often processed or used on an automatic production line, the improvement of the processing level is often closely connected with the continuous improvement of the measuring technology, and the product quality is determined by the precision of a monitoring instrument to a great extent.
However, with the conventional optical measurement, due to the problems of the precision of the instrument and errors generated by human eyes, the measurement precision is low, the measurement time is long, and dynamic measurement cannot be realized. Therefore, the research and development of the precise test instrument for measuring the micro angle with high precision, high detection speed, reliable and stable performance and easy operation has important significance.
Disclosure of Invention
The invention aims to overcome the defects of the prior art and provide an improved adjustable auto-collimator optical path system.
Meanwhile, the invention also relates to a light path debugging method of the adjustable auto-collimator.
In order to solve the technical problems, the invention adopts the following technical scheme:
the adjustable auto-collimator optical path system comprises an auto-collimator, a reflecting mirror and a plane reflecting mirror, wherein the plane reflecting mirror is positioned on a reflecting optical path of the reflecting mirror, and particularly, the adjustable auto-collimator optical path system further comprises a beam splitting prism and an aperture diaphragm which are positioned between the auto-collimator and the reflecting mirror, a CCD module arranged on the reflecting optical path of the beam splitting prism, an imaging surface module positioned on the back surface of the plane reflecting mirror and a camera for receiving the appearance of a light spot, wherein the inclination angle of an emergent light source is judged according to the appearance of the light spot obtained by the camera, and the inclination angle of the reflecting mirror is 4-45 degrees.
Preferably, a collimating lens module is further arranged between the beam splitting prism and the aperture diaphragm.
According to a specific implementation and preferred aspect of the present invention, the center lines of the light source light-emitting surfaces of the collimating lens module, the beam-splitting prism and the autocollimator are on the same straight line.
Specifically, the aperture of the aperture diaphragm is set to be 10+/-2 mm; and/or the collimating lens module selects a plano-convex lens with a focal length of 60+/-2 mm and a caliber of 40+/-2 mm for collimating fiber laser and imaging a diaphragm; and/or the light source is positioned at the focal point of the lens, and the emergent light is parallel light beams. The center lines of the collimating lens module, the beam splitting prism and the light source light-emitting surface are positioned on the same straight line, and the CCD module and the center of the beam splitting prism are positioned on the same straight line and on the reflected light path; and/or the inclination angle of the reflecting mirror is 4-45 degrees (further preferably 6-40 degrees), and the parallel light beam passing through the collimating lens returns along the original path after passing through the reflecting mirror and the plane reflecting mirror; the curvature radius of the plane reflecting mirror is infinite, and the caliber is 2+/-0.1 mm.
The other technical scheme of the invention is as follows: the light path debugging method of the adjustable auto-collimator light path system is characterized by comprising the following steps of:
1) The method comprises the steps of placing a leveling auto-collimator optical path system on an optical platform, vertically placing a functional modularized auto-collimator on the optical platform, and sequentially building the optical path system according to an emergent optical path, wherein the optical path system comprises the auto-collimator, a beam splitting prism, a collimating lens module, an aperture diaphragm, a reflecting mirror, a plane reflecting mirror, a CCD module, an imaging surface module and a camera;
2) Opening a laser light source, adjusting a collimating lens module to enable outgoing light to be parallel light, and keeping the outgoing light to pass through the center of an aperture diaphragm;
3) The method comprises the steps of performing imaging debugging on an aperture diaphragm, axially adjusting the aperture diaphragm, observing an image of an emergent beam passing through the aperture diaphragm in an autocollimator through a CCD module, and fixing the aperture diaphragm on an autocollimator shell after the aperture diaphragm image is clear;
4) Adjusting the optical axis of an emergent light path, adjusting the inclination angle of a light source, observing light spots on an imaging surface module through a camera, zeroing the inclination angle of the light source, and fixing the light source on a base of the auto-collimator through a fixing screw;
5) And (3) debugging the optical axis of the reflection light path, properly adjusting the inclination angle of the reflecting mirror, observing the position of the reflection light spot on the image surface of the diaphragm through the CCD module, and fixing the reflecting mirror when the reflection light spot is positioned at the right center of the diaphragm.
Preferably, the light source uses fiber laser, the beam splitter prism is arranged on an emergent light path of the light source module, and the CCD module is arranged on a reflecting light path of the beam splitter prism; the collimating lens module is arranged on the emergent light path of the beam-splitting prism, the collimating lens module is tightly matched with the bottom end of the device shell, and an aperture diaphragm for transmitting light is further arranged between the beam-splitting prism and the collimating lens module.
According to a specific implementation and preferred aspect of the present invention, the aperture diameter of the aperture stop is set to 10±2mm; and/or the collimating lens module selects a plano-convex lens with the focal length of 60+/-2 mm and the caliber of 40+/-2 mm for collimating fiber laser and imaging a diaphragm; and/or the light source is positioned at the focal point of the lens, and the emergent light is parallel light beams.
Preferably, the center lines of the collimation lens module, the beam splitting prism and the light source light-emitting surface are positioned on the same straight line, and the CCD module and the center of the beam splitting prism are positioned on the same straight line and positioned on the reflection light path; and/or the inclination angle of the reflecting mirror is 4-45 degrees, and the light path returns along the original path after the parallel light beam passing through the collimating lens passes through the reflecting mirror and the plane reflecting mirror; the curvature radius of the plane reflecting mirror is infinite, and the caliber is 2+/-0.1 mm.
In some embodiments, the position of the aperture stop and the position of the CCD conform to the gaussian formula of geometrical optics:
wherein L' and L are the image distance and the object distance, namely the distance from the CCD detector to the main plane of the collimating lens and the distance from the diaphragm to the main plane of the collimating lens; f' is the focal length of the collimating lens.
In addition, in step 4), the light spot diagram on the imaging surface is observed through a camera, and the light source is fixed on the base of the auto-collimator by a fixing screw until the light spot intensity distribution is the same, namely the included angle theta between the emergent light path and the vertical direction is 0; in short, the emergent light path of the light source is vertical to and concentric with the autocollimator and the collimating lens module, the inclination angle of the light source is properly adjusted, the included angle theta of the emergent light path in the vertical direction, the included angle alpha of the reflecting light path and the horizontal axis, the inclination angle of the reflecting mirror is 4-45 degrees, the light spot diagram on the imaging surface is observed through a camera, and when the light spot intensity distribution is the same, namely, the included angle theta of the emergent light path and the vertical direction is 0, the light source is fixed on the base of the autocollimator by using a fixing screw.
In step 5), the inclination angle alpha of the plane mirror is adjusted, the distance L between the reflecting light spot and the center of the aperture diaphragm is observed through the CCD module, and the distance d between the CCD module and the mirror is measured, wherein the included angle beta between the reflecting light path and the horizontal direction is twice the inclination angle alpha of the plane mirror, and the included angle can be calculated through the following formula:the light spot to be reflected is positioned at the right center of the diaphragm by adjusting the inclination angle of the plane reflector, and the reflector is fixed by a fixing screw.
Due to the implementation of the technical scheme, compared with the prior art, the invention has the following advantages:
the existing optical measurement has the defects of lower measurement precision, longer measurement time, incapability of realizing dynamic measurement and the like due to the problems of precision of an instrument, errors generated by human eyes and the like, and the invention skillfully solves various defects in the prior art by carrying out integral design on an adjustable auto-collimator optical path system. After the adjustable auto-collimator optical path system is adopted, laser incident from an incident optical path sequentially passes through a beam splitting prism, an aperture diaphragm and a reflecting mirror, and then the optical path returns along an original path after being reflected by the reflecting mirror and a plane reflecting mirror, and as the caliber of the reflecting mirror is smaller than the size of a light beam, other light beams can be continuously received by an imaging surface through the edge of the reflecting mirror and can be received by a camera, and then the inclination degree of an emergent light source can be judged through the appearance of a light spot received by the camera, so that the integral structure of the auto-collimator is in a debugging requirement and function modularized design coaxial with the incident optical path and the reflecting optical path, dynamic flatness measurement is realized, the adjusting process is simple and convenient, the debugging time is shortened, the debugging efficiency is improved, and meanwhile, the positions and the appearance of the reflecting light spot and the emergent light spot are monitored by a computer, and the measuring precision of the auto-collimator is improved; on the other hand, each module in the auto-collimator is convenient to install and debug, and the same modules can be mutually replaced, so that the auto-collimator is convenient to maintain.
Drawings
Fig. 1 is a schematic diagram of the optical path principle of the optical path system of the auto-collimator of the present embodiment;
fig. 2 is a schematic diagram of the optical path principle of the optical axis adjustment of the outgoing optical path in the present embodiment;
fig. 3 is a schematic diagram of the optical path principle of the optical axis adjustment of the reflection optical path in the present embodiment;
wherein: 1. an autocollimator; 2. a beam-splitting prism; 3. a CCD module; 4. a collimating lens module; 5. an aperture stop; 6. a reflecting mirror; 7. a planar mirror; 8. an imaging surface module; 9. and a camera.
Detailed Description
The present invention will be described in detail with reference to the drawings and the detailed description, so that the above objects, features and advantages of the present invention can be more clearly understood. In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present invention. The present invention may be embodied in many other forms than described herein and similarly modified by those skilled in the art without departing from the spirit of the invention, whereby the invention is not limited to the specific embodiments disclosed below.
In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings are merely for convenience in describing the present invention and simplifying the description, and do not indicate or imply that the device or element being referred to must have a specific orientation, be configured and operated in a specific orientation, and therefore should not be construed as limiting the present invention.
Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include at least one such feature. In the description of the present invention, the meaning of "plurality" means at least two, for example, two, three, etc., unless specifically defined otherwise.
In the present invention, unless explicitly specified and limited otherwise, the terms "mounted," "connected," "secured," and the like are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally formed; can be mechanically or electrically connected; either directly or indirectly, through intermediaries, or both, may be in communication with each other or in interaction with each other, unless expressly defined otherwise. The specific meaning of the above terms in the present invention can be understood by those of ordinary skill in the art according to the specific circumstances.
In the invention, unless expressly stated or limited otherwise, a first feature "up" or "down" a second feature may be the first and second features in direct contact, or the first and second features in indirect contact through an intervening medium. Moreover, a first feature being "above," "over" and "on" a second feature may be a first feature being directly above or obliquely above the second feature, or simply indicating that the first feature is level higher than the second feature. The first feature being "under", "below" and "beneath" the second feature may be the first feature being directly under or obliquely below the second feature, or simply indicating that the first feature is less level than the second feature.
It will be understood that when an element is referred to as being "fixed" or "disposed" on another element, it can be directly on the other element or intervening elements may also be present. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may also be present. The terms "vertical," "horizontal," "upper," "lower," "left," "right," and the like are used herein for illustrative purposes only and are not meant to be the only embodiment.
As shown in fig. 1, the adjustable auto-collimator optical path system of this embodiment includes an auto-collimator 1, a beam splitting prism 2, a CCD module 3, a collimating lens module 4, an aperture diaphragm 5, a reflecting mirror 6, a plane reflecting mirror 7, an imaging surface module 8 and a camera 9, wherein the auto-collimator 1, the beam splitting prism 2, the collimating lens module 4, the aperture diaphragm 5 and the reflecting mirror 6 are sequentially arranged from top to bottom, the CCD module 3 is disposed on a reflection optical path of the beam splitting prism, the plane reflecting mirror 7 is disposed on a reflection optical path of the reflecting mirror 6, the imaging surface module 8 is disposed on a back (left side) of the plane reflecting mirror 7, the camera 9 receives a light spot morphology, and an inclination angle of an emergent light source is determined according to the light spot morphology of the camera 9.
In some embodiments, the light source is located at the focal point of the lens and the outgoing light is a parallel beam. The center lines of the collimation lens module 4, the beam splitting prism 2 and the light source light-emitting surface are positioned on the same straight line, and the CCD module 3 and the center of the beam splitting prism 2 are positioned on the same straight line and on a reflected light path; the inclination angle of the reflecting mirror is 4-45 degrees (generally 6-40 degrees), and the parallel light beam passing through the collimating lens returns along the original path after passing through the reflecting mirror and the plane reflecting mirror; the curvature radius of the plane reflecting mirror is infinite, and the caliber is 2+/-0.1 mm. The aperture of the aperture diaphragm 5 is set to be 10+/-2 mm; the collimating lens module 4 selects a plano-convex lens with a focal length of 60+/-2 mm and a caliber of 40+/-2 mm for collimation of fiber laser and imaging of a diaphragm.
In addition, the large target area array CCD of 2048 x 2048 is adopted, and the large target area array CCD is connected and matched with a computer for use, so that the image acquisition range and the image processing speed are greatly improved, meanwhile, compared with the existing linear array CCD, the area array CCD is adopted to better measure and process dynamic images, the measuring precision and the measuring efficiency of products are further improved, the products can be better adapted to the requirements of users, and the application range of the products is greatly improved.
The optical path debugging method of the embodiment comprises the following steps:
1) Placing a leveling auto-collimator optical path system on an optical platform, vertically placing a functional modularized auto-collimator on the optical platform, and sequentially building an optical path system (an optical path shown in fig. 1) according to an emergent optical path, wherein the optical path system comprises an auto-collimator 1, a beam splitting prism 2, a collimating lens module 4, an aperture diaphragm 5, a reflecting mirror 6, a plane reflecting mirror 7, a CCD module 3, an imaging surface module 8 and a camera 9;
2) Opening a laser light source, adjusting a collimating lens module to enable outgoing light to be parallel light, and keeping the outgoing light to pass through the center of an aperture diaphragm;
3) The method comprises the steps of performing imaging debugging on an aperture diaphragm, axially adjusting the aperture diaphragm, observing an image of an emergent beam passing through the aperture diaphragm in an autocollimator through a CCD module, and fixing the aperture diaphragm on an autocollimator shell after the aperture diaphragm image is clear;
4) Adjusting the optical axis of an emergent light path, adjusting the inclination angle of a light source, observing light spots on an imaging surface module through a camera, zeroing the inclination angle of the light source, and fixing the light source on a base of the auto-collimator through a fixing screw;
5) And (3) debugging the optical axis of the reflection light path, properly adjusting the inclination angle of the reflecting mirror, observing the position of the reflection light spot on the image surface of the diaphragm through the CCD module, and fixing the reflecting mirror when the reflection light spot is positioned at the right center of the diaphragm.
In some embodiments, the position of the aperture stop in step 3) and the position of the CCD conform to the gaussian formula for geometrical optics:
wherein L' and L are the image distance and the object distance, namely the distance from the CCD detector to the main plane of the collimating lens and the distance from the diaphragm to the main plane of the collimating lens; f' is the focal length of the collimating lens.
In step 4), as shown in fig. 2, the light spot diagram on the imaging surface is observed through a camera, and when the light spot intensity distribution is the same, that is, the included angle θ between the emergent light path and the vertical direction is 0, the light source is fixed on the base of the auto-collimator by using a fixing screw; in short, the emergent light path of the light source is vertical and concentric with the autocollimator and the collimating lens module, the inclined angle theta of the light source is properly adjusted, the inclined angle alpha of the reflecting light path and the horizontal axis is adjusted, the inclined angle of the reflecting mirror 6 is 4-45 degrees, the light spot diagram on the imaging surface is observed through a camera, and when the light spot intensity distribution is the same, namely the inclined angle theta of the emergent light path and the vertical direction is 0, the light source is fixed on the base of the autocollimator through a fixing screw.
In step 5), referring to fig. 3, the tilt angle α of the plane mirror is adjusted, the distance L between the reflected light spot and the center of the aperture stop is observed by the CCD module, and the distance d between the CCD module and the mirror is measured, wherein the angle β between the reflected light path and the horizontal direction is twice the tilt angle α of the plane mirror, and the angle β can be calculated by the following formula:by adjusting the inclination angle of the plane reflecting mirror, the inclination of the plane reflecting mirror is opposite to the inclination of the plane reflecting mirror according to the included angle between the incident light and the normal line of the plane reflecting mirror and the included angle between the reflecting light path and the vertical light pathThe light-emitting path deflects, the light spot to be reflected is positioned at the center of the diaphragm, and the reflector is fixed by a fixing screw.
In summary, after the adjustable auto-collimator optical path system is adopted, laser incident from an incident optical path sequentially passes through a beam splitting prism, an aperture diaphragm and a reflecting mirror, and then the optical path returns along an original path by the reflecting mirror and a plane reflecting mirror, and as the caliber of the reflecting mirror is smaller than the size of the light beam, other light beams can be continuously received by an imaging surface through the edge of the reflecting mirror and can be received by a camera, and then the inclination degree of an emergent light source can be judged through the appearance of a light spot received by the camera, therefore, on one hand, the integral structure of the auto-collimator is designed in a modularized manner by the debugging requirement and the function of coaxial incident optical path and reflecting optical path, the dynamic flatness measurement is realized, the adjusting process is simple and convenient, the debugging time is shortened, the debugging efficiency is improved, and meanwhile, the positions and the appearance of the reflecting light spot and the emergent light spot are monitored by a computer, and the measuring precision of the auto-collimator is improved; on the other hand, each module in the auto-collimator is convenient to install and debug, and the same modules can be mutually replaced, so that the auto-collimator is convenient to maintain; in the third aspect, accurate monitoring results are obtained through diaphragm imaging debugging, emergent light path optical axis debugging and reflection light path optical axis debugging.
The present invention has been described in detail with the purpose of enabling those skilled in the art to understand the contents of the present invention and to implement the same, but not to limit the scope of the present invention, and all equivalent changes or modifications made according to the spirit of the present invention should be included in the scope of the present invention.

Claims (10)

1. An adjustable autocollimator light path system, comprising an autocollimator, a reflecting mirror and a plane reflecting mirror, wherein the plane reflecting mirror is positioned on a reflecting light path of the reflecting mirror, and the adjustable autocollimator light path system is characterized in that: the adjustable autocollimator light path system also comprises a beam splitting prism and an aperture diaphragm which are positioned between the autocollimator and a reflecting mirror, a CCD module which is arranged on a reflecting light path of the beam splitting prism, an imaging surface module which is positioned on the back of the plane reflecting mirror and a camera which receives the appearance of light spots, wherein the inclination angle of an emergent light source is judged according to the appearance of the light spots obtained by the camera, and the inclination angle of the reflecting mirror is 4-45 degrees.
2. The adjustable auto-collimator optical path system of claim 1, wherein a collimating lens module is further disposed between the beam splitting prism and the aperture stop.
3. The adjustable auto-collimator optical path system of claim 2, wherein the center lines of the light source light-emitting surface of the collimating lens module, the beam-splitting prism and the auto-collimator are on the same straight line.
4. The adjustable auto-collimator optical path system of claim 1 wherein the CCD module is collinear with the center of the splitting prism and on the reflected light path.
5. The light path debugging method of the adjustable auto-collimator light path system is characterized by comprising the following steps of:
1) The auto-collimator optical path system is placed on the optical platform for leveling, and an optical path system is built, wherein the optical path system comprises an auto-collimator, a beam splitting prism, a collimating lens module, an aperture diaphragm, a reflecting mirror, a plane reflecting mirror, a CCD module, an imaging surface module and a camera;
2) Opening a laser light source, adjusting a collimating lens module to enable outgoing light to be parallel light, and keeping the outgoing light to pass through the center of an aperture diaphragm;
3) The method comprises the steps of performing imaging debugging on an aperture diaphragm, axially adjusting the aperture diaphragm, observing an image of an emergent beam passing through the aperture diaphragm in an autocollimator through a CCD module, and fixing the aperture diaphragm on an autocollimator shell after the aperture diaphragm image is clear;
4) Adjusting the optical axis of an emergent light path, adjusting the inclination angle of a light source, observing light spots on an imaging surface module through a camera, zeroing the inclination angle of the light source, and fixing the light source on a base of the auto-collimator through a fixing screw;
5) And (3) debugging the optical axis of the reflection light path, properly adjusting the inclination angle of the reflecting mirror, observing the position of the reflection light spot on the aperture diaphragm image surface through the CCD module, and fixing the reflecting mirror when the reflection light spot is positioned at the center of the aperture diaphragm.
6. The method for adjusting the optical path of the optical path system of the adjustable auto-collimator according to claim 5, wherein the light source uses fiber laser, the beam-splitting prism is arranged on the outgoing optical path of the light source module, and the CCD module is arranged on the reflection optical path of the beam-splitting prism; the collimating lens module is arranged on the emergent light path of the beam-splitting prism, the collimating lens module is tightly matched with the bottom end of the device shell, and an aperture diaphragm for transmitting light is further arranged between the beam-splitting prism and the collimating lens module.
7. The method for adjusting the optical path of the optical path system of the adjustable auto-collimator according to claim 6, wherein the aperture of the aperture diaphragm is set to be 10+ -2 mm; and/or the collimating lens module selects a plano-convex lens with a focal length of 60+/-2 mm and a caliber of 40+/-2 mm for collimating fiber laser and imaging a diaphragm; and/or the light source is positioned at the focal point of the lens, and the emergent light is parallel light beams.
8. The method for adjusting the optical path of the optical path system of the adjustable auto-collimator according to claim 7, wherein the center lines of the collimating lens module, the beam splitting prism and the light source light-emitting surface are on the same straight line, and the center of the CCD module and the beam splitting prism are on the same straight line and on the reflected light path; and/or the inclination angle of the reflecting mirror is 4-45 degrees, and the light path returns along the original path after the parallel light beam passing through the collimating lens passes through the reflecting mirror and the plane reflecting mirror; the curvature radius of the plane reflecting mirror is infinite, and the caliber is 2+/-0.1 mm.
9. The method for adjusting the optical path of the optical path system of the adjustable auto-collimator according to claim 6, wherein the position of the aperture stop and the position of the CCD module conform to a gaussian formula of geometrical optics:
l' and L are the image distance and the object distance, namely the distance from the CCD module detector to the main plane of the collimating lens and the distance from the aperture diaphragm to the main plane of the collimating lens; f' is the focal length of the collimating lens.
10. The method for adjusting the optical path of the optical path system of the adjustable auto-collimator according to claim 5, wherein in the step 4), the light spot diagram on the imaging surface is observed by a camera, and the light source is fixed on the base of the auto-collimator by a fixing screw when the light spot intensity distribution is the same, i.e. the included angle θ between the outgoing optical path and the vertical direction is 0; and/or in step 5), adjusting the inclination angle alpha of the plane mirror, observing the distance L between the reflecting light spot and the center of the aperture diaphragm through the CCD module, and measuring the distance d between the CCD module and the mirror, wherein the included angle beta between the reflecting light path and the horizontal direction is twice the inclination angle alpha of the plane mirror, and the included angle can be calculated by the following formula:the light spot to be reflected is positioned at the right center of the diaphragm by adjusting the inclination angle of the plane reflector, and the reflector is fixed by a fixing screw.
CN202311860233.4A 2023-12-31 2023-12-31 Adjustable autocollimator light path system and light path debugging method Pending CN117824543A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202311860233.4A CN117824543A (en) 2023-12-31 2023-12-31 Adjustable autocollimator light path system and light path debugging method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202311860233.4A CN117824543A (en) 2023-12-31 2023-12-31 Adjustable autocollimator light path system and light path debugging method

Publications (1)

Publication Number Publication Date
CN117824543A true CN117824543A (en) 2024-04-05

Family

ID=90512941

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202311860233.4A Pending CN117824543A (en) 2023-12-31 2023-12-31 Adjustable autocollimator light path system and light path debugging method

Country Status (1)

Country Link
CN (1) CN117824543A (en)

Similar Documents

Publication Publication Date Title
CN107843213B (en) Confocal auto-collimation center deviation and curvature radius measuring method and device
EP2181317B1 (en) Broad-range spectrometer
CN101140196A (en) Measurement mechanism of lens focal length, measurement method and thereof and optical quality evaluation method
CN106767545A (en) A kind of high accuracy high-space resolution angel measuring instrument and angle measurement method
CN112556990A (en) Lens refractive index measuring device and measuring method thereof
CN112556991A (en) Lens refractive index measuring device and measuring method thereof
CN111238408A (en) Device and method for rapidly measuring parallelism of parallel flat plate
CN112284984B (en) Solid surface energy measuring device and method based on light reflection
CN113607091A (en) Optical measurement system and method for included angle between optical axis and mounting surface of off-axis aspherical mirror
CN210863101U (en) Lens refractive index measuring device
CN117824543A (en) Adjustable autocollimator light path system and light path debugging method
CN114815284B (en) Method for eliminating optical interval adjustment error by using optical lens with folded light path
CN116105638A (en) U-shaped turntable coaxiality detection system and detection method
CN111220095B (en) Method and device for detecting verticality of optical axis of divergent light beam with high precision
CN112114436B (en) Method for assembling and adjusting long-focal-depth laser cutting head
CN112197714B (en) Free-form surface measuring device and detection method based on differential color confocal technology
CN111238409A (en) Device and method for measuring large-angle optical wedge angle with high precision
CN210863100U (en) Lens refractive index measuring device
CN109506899B (en) Non-contact detection method and device for curved surface prism
CN110702378B (en) Optical axis pointing detection device and detection method
CN113721346B (en) Lens subassembly and have its laser displacement sensor
CN213812819U (en) Lens on-line measuring device
CN113092075B (en) Variable-angle high-precision calibration light source system
CN213812182U (en) Dual-mode center deviation measuring system
CN212620587U (en) Long-distance angle focusing device suitable for optical and similar measurement systems

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination