CN117782373A - Elastomer assembly for pressure sensor, pressure detection device and method - Google Patents
Elastomer assembly for pressure sensor, pressure detection device and method Download PDFInfo
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Abstract
The invention provides an elastomer component for a pressure sensor, a pressure detection device and a pressure detection method. The amorphous alloy pressure sensor can obtain higher precision, strength and measuring range and more stable performance under the same size structure on one hand; on the other hand, the qualified target performance can be obtained under a smaller structural size, and the installation space and the production cost are greatly reduced; and the elastomer material performance required by the use scene can be quickly matched through component screening without subsequent heat treatment and performance detection. The pressure detection device has the characteristics of simple structure, high acquisition frequency, high acquisition precision and stable and reliable performance, solves the difficult problems of low measurement precision and small measuring range of the strain resistance sensor in the aspect of miniature size, and simultaneously, the analog output transmitter and the programmable logic controller can be further integrated on a circuit board through electronic technology to realize further miniaturization of the pressure detection device.
Description
Technical Field
The invention belongs to the field of novel sensors, and particularly relates to an elastomer component for a pressure sensor, a pressure detection device and a pressure detection method.
Background
A pressure sensor is a device that detects a pressing force. Through the circuit, the pressure sensor converts pressure change into electric signal output, which is the most common sensor in automation equipment. Pressure sensors are classified into various types according to the structure, shape, principle and use scene of the pressure sensor, and common types include strain type, piezoresistive type, capacitive type, piezoelectric type and vibration frequency type pressure sensors. The miniature pressure sensor is intended to be applied to a system with limited space or compact gap, has the characteristics of small volume, quick response, high precision, stable performance and the like, and has application in the fields of medical appliances, environmental monitoring, automatic robots and the like.
One type of miniature pressure sensor adopts the principle of resistance strain, and under the action of pressure, an elastomer deforms, and a strain resistor film arranged on the elastomer deforms, so that the resistance value of a built-in resistor grid is changed. The change of the resistance value can be accurately acquired through the Wheatstone bridge, and the pressure is further reflected. The elastic body is used as a core component of the pressure sensor, and the performance of the elastic body directly determines the size, the measuring range and the precision of the sensor, so that the use of a material with excellent performance as the elastic body for preparing the miniature pressure sensor has important significance. Currently, the elastomer of the pressure sensor mainly adopts 17-4PH stainless steel, 316 stainless steel, 630 stainless steel, 7075-T6 aluminum alloy and the like. However, the materials are limited by low strength and high elastic modulus, and the micro pressure sensor prepared by using the materials has low sensitivity, poor precision and small measuring range. Although the performance of these materials can be improved by complex heat treatment and trace element doping, the processing difficulty and the production cost are high, and the requirements of the micro pressure sensor are still difficult to meet, so that special elastomer materials are required to be developed for the characteristics of the micro pressure sensor.
Amorphous alloys, also known as metallic glasses, have a disordered internal atomic arrangement and do not have the periodicity of long range order in crystalline materials. The amorphous alloy has excellent mechanical properties of far-reaching super-crystalline materials, such as high strength, low modulus, high hardness, good wear resistance and the like, is quite suitable for being used as an elastomer material of a miniature pressure sensor, and can solve a series of problems of low sensitivity, small measuring range and the like of the traditional miniature pressure sensor; meanwhile, the amorphous alloy system is more, the component range in the same system is wide, and the requirements of different sensors on the elastomer materials can be met. Amorphous alloy film pressure sensors prepared by vacuum coating processes have been reported in the prior art. Although the sensitivity of the sensor is obviously improved, the preparation process is complex, the sensor is limited by the thickness of the micron order of the film, only small force can be measured, the range is limited, and large-scale industrial application is difficult to realize. Compared with an amorphous alloy film sensor, the sensor has the characteristics of high sensitivity, wide range and the like by using the bulk amorphous alloy as an elastomer material, and has wider application range; however, the preparation and processing processes of the amorphous alloy and the film are different, and no report on using the amorphous alloy as the elastomer material of the miniature pressure sensor exists at present.
Disclosure of Invention
It is therefore an object of the present invention to overcome the drawbacks of the prior art and to provide an elastomeric component for miniature pressure sensors, a pressure sensing device and a method based on bulk amorphous alloys. The amorphous alloy miniature pressure sensor can greatly improve the comprehensive performance of the sensor: compared with other miniature pressure sensors, the accuracy of the sensor provided by the invention can reach 0.5 level for the same elastomer structure, the size is at least 400% optimized, and the testing range is at least 66% improved. Meanwhile, the invention adopts the elastomer die casting technology and the strain resistance sputtering technology, so that the manufacturing process is automatic, the production cost is lower, and the production period of the miniature pressure sensor is greatly reduced.
The pressure detection device has the characteristics of simple structure, high acquisition frequency, high acquisition precision and stable and reliable performance, solves the difficult problems of low measurement precision and small measuring range of the strain resistance sensor in the aspect of miniature size, and simultaneously, the analog output transmitter and the programmable logic controller can be further integrated on a circuit board through electronic technology to realize further miniaturization of the pressure detection device.
Before explaining the present invention, the terms used herein are defined as follows:
the term "amorphous alloy" refers to: the super-quenching solidification ensures that atoms are not ordered and crystallized when the alloy is solidified, the obtained solid alloy has a long-range disordered structure, molecules (or atoms and ions) composing substances of the solid alloy do not have regular periodicity in space, and crystal grains and crystal boundaries of the crystalline alloy do not exist.
To achieve the above object, a first aspect of the present invention provides an elastomer component for a pressure sensor, the material of the elastomer component being an amorphous alloy or a composite of amorphous alloys selected from one or more of the following: zirconium-based amorphous alloy, titanium-based amorphous alloy, yttrium-based amorphous alloy, iridium-based amorphous alloy, copper-based amorphous alloy, palladium-based amorphous alloy, platinum-based amorphous alloy, gold-based amorphous alloy, aluminum-based amorphous alloy, iron-based amorphous alloy, lanthanum-based amorphous alloy, cerium-based amorphous alloy; preferably selected from one or more of the following: zirconium-based amorphous alloy, titanium-based amorphous alloy, yttrium-based amorphous alloy, iridium-based amorphous alloy, copper-based amorphous alloy, palladium-based amorphous alloy, gold-based amorphous alloy, iron-based amorphous alloy; more preferably selected from one or more of the following: zirconium-based amorphous alloy, titanium-based amorphous alloy, yttrium-based amorphous alloy, iridium-based amorphous alloy, copper-based amorphous alloy, palladium-based amorphous alloy, and iron-based amorphous alloy;
Preferably, the zirconium based amorphous alloy is selected from one or more of the following: zrCoAl, zrCoAlY, zrCuNiAl, zrTiCuNiAl, zrTiCuNiBe, zrCuPdAgAl, zrCuBeAgAl, zrNiCuAlAg, zrAuCuAlAg, zrCuAlAg, zrFeCuAlAg, zrNbCuNiBe, zrTiCuAlAg;
preferably, the titanium-based amorphous alloy is selected from one or more of the following: tiZrBeNiCu, tiZrBeNi, tiZrBeCr, tiCuZr, tiPdZrHfCuNiSiSn, tiZrCuPd, tiZrBe;
preferably, the yttrium-based amorphous alloy is YScAlCo or YScAlCoNi;
preferably, the iridium-based amorphous alloy is IrNiTa or IrNiTaNb;
preferably, the copper-based amorphous alloy is selected from one or more of the following: cuZrAlAg, cuZrAlEr, cuZrAlGd, cuZrAlY, cuZrAlNb, cuZrAgTi, cuZrTiSnSi, cuHfTi, cuZrTi;
preferably, the palladium-based amorphous alloy is selected from one or more of the following: pdCuNiP, pdZrCuAlAg, pdNiP, pdCuAgSiP;
preferably, the iron-based amorphous alloy is selected from one or more of the following: feCoCrMoCBY, feCrMoWCBY, feCrMoCBErA, feMnCrMoErCB; and/or
Preferably, the pressure sensor is selected from one or more of the following: strain-type pressure sensors, piezoresistive pressure sensors, capacitive pressure sensors, piezoelectric pressure sensors, vibration-frequency type pressure sensors; more preferably selected from one or more of the following: strain-type pressure sensors, piezoresistive pressure sensors, capacitive pressure sensors.
The elastomeric component according to the first aspect of the present invention, wherein,
the elastic modulus of the amorphous alloy is 40 GPa-150 GPa, preferably 60 GPa-150 GPa, more preferably 60 GPa-100 GPa;
the yield strength of the amorphous alloy is 600 MPa-3400 MPa, preferably 1000 MPa-2500 MPa;
the hardness of the amorphous alloy is 500 HV-1400 HV, preferably 500 HV-650 HV;
the elastomeric component has a three-dimensional structure selected from one or more of the following: cylinder, diaphragm type, flat box type; preferably a cartridge or flat cartridge;
the thickness of the elastomeric component is 1.0mm to 40.0mm, more preferably 1.0mm to 20.0mm; and/or
The elastomeric component has a cross-sectional area of 1.0mm 2 ～400.0mm 2 More preferably 1.0mm 2 ～100.0mm 2 。
A second aspect of the present invention provides a pressure detection device including: a pressure sensor, an analog output transducer and a programmable logic controller; wherein, pressure sensor does not include the roof beam that strains, and from bottom to top includes in proper order:
a fixing region for securing rigidity of the elastic body assembly;
an elastomeric component according to the first aspect;
the strain resistance film is used for acquiring a measurable strain signal and converting the measurable strain signal into an analog signal; and
A loading zone, a structure for applying external pressure to the pressure sensor;
wherein the strain resistance film is arranged on the surface of the elastomer component;
preferably, the pressure sensor is selected from one or more of the following: strain-type pressure sensors, piezoresistive pressure sensors, capacitive pressure sensors, piezoelectric pressure sensors, vibration-frequency type pressure sensors; more preferably selected from one or more of the following: strain-type pressure sensors, piezoresistive pressure sensors, capacitive pressure sensors; and/or
Preferably, the pressure detection device further comprises a data line, and the analog output transmitter is connected with the pressure sensor to amplify and collect analog signals, and then the amplified analog signals are input into the programmable logic controller through the data line in a voltage or current mode.
The pressure detecting device according to the second aspect of the present invention, wherein,
the shape of the loading zone is selected from one or more of the following: cuboid, cube, cylinder, prism, cone, pyramid, round table, pyramid, sphere; preferably selected from one or more of the following: cuboid, cube, cylinder, round table;
The steric structure of the loading region is selected from one or more of the following: column type, flange type, cantilever type, shell type and pyramid type;
the steric structure of the immobilization region is selected from one or more of the following: column, flange, cantilever, shell;
the ratio of the cross-sectional area to the height of the loading zone is 1.0-400.0: 0.5 to 40.0, preferably 1.0 to 100.0:0.5 to 20.0; and/or
The ratio of the cross-sectional area to the height of the fixing area is 1.0-400.0: 0.5 to 40.0, preferably 1.0 to 100.0:0.5 to 20.0;
preferably, the resistive gate material of the strained resistive film is selected from one or more of the following: constantan alloy, kama alloy, amorphous alloy; and/or
Preferably, the mechanical arm to which the pressure detection device is connected is selected from one or more of the following: the automatic feeding and discharging device comprises a tail end mechanical arm, a stamping mechanical arm, a lathe feeding and discharging mechanical arm, a carrying mechanical arm, a clamping mechanical arm, a polishing mechanical arm, a welding mechanical arm, a cutting mechanical arm and a medical mechanical arm.
The pressure detecting device according to the second aspect of the present invention, wherein,
the analog output transmitter is selected from one or more of the following: the current output transducer, the voltage output transducer and the resistance output transducer are preferably current output transducers or voltage output transducers;
The programmable logic controller is selected from one or more of the following: monolithic, modular, stacked, preferably monolithic or modular;
the structure of the strain resistance film is selected from one or more of the following: circular structure, T-shaped structure, V-shaped structure, double bridge structure, tri-gate structure, full bridge structure, preferably selected from one or more of the following: circular structure, double bridge structure, full bridge structure; and/or
Preferably, when the number of the strain resistance films is 1 sheet, the structure of the strain resistance film is a full bridge structure; and/or
Preferably, the surface of the elastomeric component on which the strain resistive film is disposed is selected from one or more of the following: a surface with a large strain amount, a surface with a uniform strain distribution, a surface with a flat thickness, and most preferably a surface with a uniform strain distribution.
According to the pressure detection device of the second aspect of the present invention, the pressure sensor further comprises a signal wire, which is used for electrically connecting the strain resistance film and the analog output transmitter and converting the strain resistance film into an analog signal; and/or
The sensitivity of the pressure sensor is 1.0mV/V to 2.0mV/V, more preferably 1.0mV/V to 1.5mV/V, and most preferably 1.0mV/V.
A third aspect of the present invention provides a pressure detection method based on a bulk amorphous alloy material, the pressure detection method being detected using the pressure detection device of the second aspect.
The pressure detection method according to the third aspect of the present invention, wherein the pressure detection method includes the steps of:
(1) Preparing and detecting a pressure sensor according to a target range; the pressure of the target range is preferably 0N to 4000N, more preferably 20N to 4000N, and even more preferably 100N to 4000N;
(2) Integrating the pressure sensor prepared and checked in the step (1) into the pressure detection device;
(3) Performing a pressure test by a pressure detection device;
preferably, in the step (3), the method of pressure testing is selected from one or more of the following: the method comprises the steps of installing a pressure detection device to the tail end of a mechanical arm to perform pressure detection and motion feedback, installing the pressure detection device to a clamping mechanical arm to perform clamping force detection, installing the pressure detection device to a polishing mechanical arm to perform pressure dynamic monitoring, and installing the pressure detection device to a balance to perform weight measurement.
The pressure detection method according to the third aspect of the present invention, wherein the step (1) further includes the operations of:
(a) Preparing an amorphous alloy elastomer, and preparing a fixed area, a strain resistance film and a loading area on the surface of the amorphous alloy elastomer to obtain the pressure sensor;
(b) The pressure sensor is connected with the analog output transmitter and is fixed on pressure sensor calibration equipment, and the pressure sensor calibration equipment applies pressure to a loading area of the pressure sensor through a loading weight; under the condition that no pressure is applied, obtaining a zero output signal of the pressure sensor; after standing, manually zeroing the analog quantity output transmitter, applying the weight, increasing the pressure from 0N to a target range to a pressure sensor loading area, gradually unloading to 0N, and calculating the obtained pressure-analog signal data by the programmable logic controller after calibration to obtain a sensitivity index, a nonlinear index, a repeatability index and a hysteresis index; and/or
In the step (2), the method for integrating the pressure detection device includes: the programmable logic controller, the analog output transducer and the strain resistance film on the pressure sensor are connected through the signal wire so as to amplify and collect analog signals; the analog output transmitter is connected with one or more pressure sensors in series; the analog output transmitter is preferably connected to the programmable logic controller through the signal line to store the acquired analog signals or to perform operations according to specific logic.
The pressure detection method according to the third aspect of the present invention, wherein in the step (1):
in the step (a): the preparation method of the amorphous alloy elastomer is selected from one or more of the following: die casting, suction casting, blow molding, injection molding, CNC milling, turning, drilling, boring, water jet machining, wire cutting, casting, forging and powder machining; the preparation method of the strain resistance film is selected from one or more of the following: magnetron sputtering, ion beam sputtering, printing, vapor deposition and mounting an integrated resistance strain gauge; and/or
In the step (b):
the nonlinear index has a nonlinear range of 0f.s. to 1.5% f.s., preferably 0.01% f.s. to 0.8% f.s., more preferably 0.05% f.s. to 0.5% f.s.;
the repeatability index has a repeatability range of 0f.s. to 0.5% f.s., preferably 0f.s. to 0.3% f.s., more preferably 0f.s. to 0.1% f.s.;
the hysteresis of the hysteresis index ranges from 0f.s. to 0.5% f.s., preferably from 0f.s. to 0.3% f.s., more preferably from 0f.s. to 0.1% f.s.;
the zero output signal has an output range of 0mV to 0.01mV, preferably 0mV to 0.001mV, more preferably 0mV to 0.0001mV; and/or
The contact mode of the weight and the loading area is selected from one or more of the following: surface contact, line contact, point contact, most preferably point contact.
According to a specific embodiment of the present invention, there is provided an elastomeric component for a miniature pressure sensor, the elastomeric component being of a material of an amorphous alloy selected from one or more of the following: zirconium-based amorphous alloy, titanium-based amorphous alloy, yttrium-based amorphous alloy, iridium-based amorphous alloy, copper-based amorphous alloy, palladium-based amorphous alloy, platinum-based amorphous alloy, gold-based amorphous alloy, aluminum-based amorphous alloy, iron-based amorphous alloy, lanthanum-based amorphous alloy, cerium-based amorphous alloy, amorphous alloy composite material; preferably selected from one or more of the following: zirconium-based amorphous alloy, titanium-based amorphous alloy, yttrium-based amorphous alloy, iridium-based amorphous alloy, gold-based amorphous alloy, copper-based amorphous alloy, palladium-based amorphous alloy, iron-based amorphous alloy, amorphous alloy composite material; more preferably selected from one or more of the following: zirconium-based amorphous alloy, titanium-based amorphous alloy, yttrium-based amorphous alloy, iridium-based amorphous alloy, copper-based amorphous alloy, palladium-based amorphous alloy, iron-based amorphous alloy, amorphous alloy composite material;
more preferably, the zirconium based amorphous alloy is selected from one or more of the following: zrCoAl, zrCoAlY, zrCuNiAl, zrTiCuNiAl, zrTiCuNiBe, zrCuPdAgAl, zrCuBeAgAl, zrNiCuAlAg, zrAuCuAlAg, zrCuAlAg, zrFeCuAlAg, zrNbCuNiBe, zrTiCuAlAg;
More preferably, the titanium-based amorphous alloy is selected from one or more of the following: tiZrBeNiCu, tiZrBeNi, tiZrBeCr, tiCuZr, tiPdZrHfCuNiSiSn, tiZrCuPd, tiZrBe;
more preferably, the yttrium-based amorphous alloy is selected from one or more of the following: YScAlCo, YScAlCoNi;
more preferably, the iridium-based amorphous alloy is selected from one or more of the following: irNiTa, irNiTaNb;
more preferably, the copper-based amorphous alloy is selected from one or more of the following: cuZrAlAg, cuZrAlEr, cuZrAlGd, cuZrAlY, cuZrAlNb, cuZrAgTi, cuZrTiSnSi, cuHfTi, cuZrTi;
more preferably, the palladium-based amorphous alloy is selected from one or more of the following: pdCuNiP, pdZrCuAlAg, pdNiP, pdCuAgSiP;
preferably, the iron-based amorphous alloy is selected from one or more of the following: feCoCrMoCBY, feCrMoWCBY, feCrMoCBErA, feMnCrMoErCB;
the elastic modulus of the amorphous alloy is 40 GPa-150 GPa, preferably 60 GPa-150 GPa, more preferably 60 GPa-100 GPa, and when the elastic modulus is smaller than 200GPa, the sensor can obtain better sensitivity and faster response speed, and the elastic modulus of the amorphous alloy is lower than that of the crystalline rigid elastomer due to the performance superiority of the amorphous alloy;
the yield strength of the amorphous alloy is 600-3400 MPa, preferably 1000-2500 MPa, and the pressure born by the pressure sensor is more than tens of times of the self weight, so that the higher yield strength can ensure the rigidity of the sensor and improve the measuring range of the sensor;
The hardness of the amorphous alloy is 500-1400 HV, preferably 500-650 HV, and the too high hardness can increase the processing difficulty, and the amorphous alloy with the hardness above 1400HV is not suitable to be processed in the prior art due to the small volume of the elastomer component;
the elastomeric component has a structure selected from one or more of the following: cylinder, diaphragm type, flat box type; preferably selected from one or more of the following: cylinder type, flat box type;
the thickness of the elastomeric component is 1.0mm to 40.0mm, more preferably 1.0mm to 20.0mm; and/or
The elastomeric component has a cross-sectional area of 1.0mm 2 ～400.0mm 2 More preferably 1.0mm 2 ～100.0mm 2 。
The invention also provides a pressure detection device which comprises a miniature pressure sensor, an analog output transmitter and a programmable logic controller. The miniature pressure sensor outputs mV signals, the signals are amplified into standard analog signals (0-5V and 0-10V) through an analog quantity output transmitter, and the standard analog signals are finally input into the programmable logic controller. The analog output transmitter can be connected with one or more miniature pressure sensors in series to realize rapid acquisition of pressure data; the programmable logic controller is used for storing and executing instructions such as operation according to specific logic, can calculate the performance index of the pressure sensor and can control various types of machines or production processes through digital output;
Preferably, the miniature pressure sensor does not include a strain beam, and includes, in order from bottom to top:
a fixed region, a structure ensuring the rigidity of the elastomer component;
an elastomeric component;
the strain resistance film is used for acquiring a measurable strain signal according to the principle that the resistance value of the built-in resistance grid changes when the strain is generated and converting the measurable strain signal into an analog signal; and
the loading area is used for applying external pressure to the structure of the miniature pressure sensor;
wherein the strain resistive film is disposed on a specific surface of the elastomeric component.
The shape of the loading zone is selected from one or more of the following: cuboid, cube, cylinder, prism, cone, pyramid, round table, pyramid, sphere; preferably selected from one or more of the following: cuboid, cube, cylinder, round table;
the structure of the loading area is selected from one or more of the following: column type, flange type, cantilever type, shell type and pyramid type;
the structure of the fixing region is selected from one or more of the following: column type, flange type, cantilever type and shell type
The ratio of the cross-sectional area to the height of the loading zone is 1.0-400.0: 0.5 to 40.0, preferably 1.0 to 100.0:0.5 to 20.0;
the ratio of the cross-sectional area to the height of the fixing area is 1.0-400.0: 0.5 to 40.0, preferably 1.0 to 100.0:0.5 to 20.0;
Preferably, the strain resistance film is processed in one or more of the following ways: magnetron sputtering, ion beam sputtering, printing, vapor deposition and mounting an integrated resistance strain gauge;
preferably, the resistive gate material of the strained resistive film is selected from one or more of the following: constantan alloy, kama alloy, amorphous alloy;
preferably, the amorphous alloy elastomer of the amorphous alloy pressure sensor is prepared by different processes, and is selected from one or more of the following: die casting, suction casting, blow molding, injection molding, CNC milling, turning, drilling, boring, water jet machining, wire cutting, casting, forging and powder machining;
preferably, the mechanism to which the pressure detection device is attached is selected from one or more of the following: the automatic feeding and discharging device comprises a tail end mechanical arm, a stamping mechanical arm, a lathe feeding and discharging mechanical arm, a carrying mechanical arm, a clamping mechanical arm, a polishing mechanical arm, a welding mechanical arm, a cutting mechanical arm and a medical mechanical arm.
The structure of the strain resistance film is selected from one or more of the following: circular structure, T-shaped structure, V-shaped structure, double bridge structure, tri-gate structure, full bridge structure, preferably selected from one or more of the following: circular structure, double bridge structure, full bridge structure;
When the number of the strain resistance films is 1, the structure of the strain resistance films is a full bridge structure;
preferably, the surface of the elastomeric component on which the strain resistive film is disposed is selected from one or more of the following: the surface with the greatest strain, the surface with the most uniform strain distribution, and the surface with a flat thickness are most preferably the surface with the most uniform strain distribution.
The miniature pressure sensor also comprises a signal wire, which is used for electrically connecting the strain resistance film and the analog output transducer and converting the strain resistance film into an analog signal;
the sensitivity of the miniature pressure sensor is 1.0 mV/V-2.0 mV/V, more preferably 1.0 mV/V-1.5 mV/V, and most preferably 1.0mV/V;
the pressure of the target measuring range is 0N-4000N, preferably 20N-4000N, more preferably 100N-4000N;
the nonlinear index has a nonlinear range of 0f.s. to 1.5% f.s., preferably 0.01% f.s. to 0.8% f.s., more preferably 0.05% f.s. to 0.5% f.s.;
the repeatability index has a repeatability range of 0f.s. to 0.5% f.s., preferably 0f.s. to 0.3% f.s., more preferably 0f.s. to 0.1% f.s.;
the hysteresis of the hysteresis index ranges from 0f.s. to 0.5% f.s., preferably from 0f.s. to 0.3% f.s., more preferably from 0f.s. to 0.1% f.s.;
The zero output range of the zero output index is 0mV to 0.01mV, preferably 0mV to 0.001mV, more preferably 0mV to 0.0001mV;
the working temperature range of the working temperature index is-20 ℃ to 200 ℃, and is preferably-20 ℃ to 100 ℃; and/or
The contact mode of the force application workpiece and the loading area is selected from one or more of the following: surface contact, line contact, point contact, most preferably point contact.
The invention also provides a pressure detection method based on the bulk amorphous alloy material, which uses a pressure detection device for detection.
The pressure detection method comprises the following steps:
(1) Designing and processing a miniature pressure sensor according to a target measuring range;
(2) Checking the miniature pressure sensor device;
(3) Integrating a miniature pressure sensor device into a pressure detection device;
(4) The pressure test is performed by a pressure detection device.
Said step (1) further comprises the operations of: the amorphous alloy with good forming capability, excellent mechanical property and wider supercooling liquid phase region is selected, the structure, specific size and other requirements of an amorphous alloy elastomer component are determined by combining finite element analysis according to the performance parameters such as modulus, strength, hardness, poisson ratio, density and the like of the amorphous alloy and the sensitivity requirements and the size requirements of a miniature pressure sensor, the amorphous alloy elastomer is obtained by combining a die casting device, a hot pressing technology, a quick cooling technology and a die integrated molding, and a strain resistor is prepared on the specific surface of the amorphous alloy elastomer by a sputtering device or a mode of installing an integrated resistance strain gauge so as to obtain a measurable strain signal and convert the measurable strain signal into an analog signal. The amorphous alloy elastomer component prepared by the processing mode does not need an additional heat treatment mode to improve the performance, and the strain resistance film and the amorphous alloy elastomer have good adhesive force. Compared with the processing method of the traditional miniature pressure sensor, the invention can realize automatic production, ensure and even improve the product performance, and greatly reduce the production period and the cost; the method comprises the steps of carrying out a first treatment on the surface of the
In the step (2), the factory inspection steps of the miniature pressure sensor are as follows: the miniature pressure sensor is fixedly connected to pressure sensor calibration equipment through threads, and the equipment applies pressure to a loading area of the pressure sensor through loading standard weights; under the condition of no loading pressure, obtaining a zero output signal of the pressure sensor, and manually zeroing the analog quantity output transmitter after standing for one minute; the pressure is increased to a target measuring range from 0N to a miniature pressure sensor loading area in a fixed step length by applying standard weights, and then gradually unloaded to 0N in the same step length, and 5-10 calibration points are set in the whole process to record analog quantity under certain pressure and output analog signals on a transmitter; the whole process is repeated for 3-5 times, and the obtained pressure-analog signal data is calculated by a programmable logic controller to obtain sensitivity index, nonlinear index, repeatability index and hysteresis index.
Compared with the prior art, the miniature pressure sensor and the pressure detection device can have the following beneficial effects:
1. the novel miniature pressure sensor adopts amorphous alloy as an elastomer component material. The amorphous alloy has high strength, large elastic limit, small Young modulus and stable performance, is quite compatible with the requirement of the micro pressure sensor elastomer on materials, and can be used under extreme conditions of high temperature, high pressure, strong acid and alkali and the like. Meanwhile, the amorphous alloy system is more, the component range in the same system is wide, and the requirements of different sensors on the elastomer materials can be met.
2. The amorphous alloy elastomer component of the novel miniature pressure sensor has unique machinability, and can be subjected to high-precision rapid forming by combining hot pressing technology, rapid cooling technology, die integrated forming and the like through die casting equipment. The preparation technology not only ensures the processing precision, but also can realize the automatic production of the sensor after being matched with the strain resistor film deposition technology, thereby greatly reducing the production cost and the production period.
3. The amorphous alloy miniature pressure sensor prepared by the invention has the characteristics of high sensitivity, high accuracy, wide range and small size, and compared with the existing pressure sensor, the volume of the amorphous alloy miniature pressure sensor is reduced by at least 50%, and the amorphous alloy miniature pressure sensor can meet the use scenes of small installation space, wide applicable range and high test precision.
4. The pressure detection device has the characteristics of simple structure, high acquisition frequency, high acquisition precision and stable and reliable performance, solves the difficult problems of low measurement precision and small measuring range of the strain resistance sensor in the aspect of miniature size, and simultaneously, the analog output transmitter and the programmable logic controller can be further integrated on a circuit board through electronic technology to realize further miniaturization of the pressure detection device.
Drawings
Embodiments of the present invention are described in detail below with reference to the attached drawing figures, wherein:
fig. 1 shows a schematic structural diagram of an amorphous alloy pressure sensor of the present invention.
Fig. 2 shows a schematic diagram of the calibration and use process of the amorphous alloy pressure sensor of the present invention.
FIG. 3 shows a schematic diagram of elastomer components of a Zr-Ti-Cu-Ni-Al amorphous alloy micro pressure sensor of example 1 and a Zr-Co-Al amorphous alloy micro pressure sensor of example 2 of the present invention; wherein, FIG. 3a is a schematic structural diagram of an amorphous alloy of zirconium titanium copper nickel aluminum elastomer component of example 1; fig. 3b is a schematic structural diagram of the zirconium cobalt aluminum amorphous alloy elastomer component of example 2.
FIG. 4 shows X-ray diffraction patterns of the zirconium titanium copper nickel aluminum amorphous alloy elastomer component of example 1 and the zirconium cobalt aluminum amorphous alloy elastomer component of example 2 of the present invention; wherein FIG. 4a is an X-ray diffraction pattern of a zirconium titanium copper nickel aluminum amorphous alloy; fig. 4b is an X-ray diffraction pattern of a zirconium cobalt aluminum amorphous alloy.
Fig. 5 shows a schematic view of the pressure detection device of the present invention.
Fig. 6 shows a graph of test data of a micro-pressure detection device of zirconium titanium copper nickel aluminum amorphous alloy of example 1 of the present invention.
Reference numerals illustrate:
1. a loading area; 2. a strain resistance film; 3. an elastomeric component; 4. a signal line; 5. a fixed zone; 6. an analog output transducer; 7. a programmable logic controller.
Detailed Description
The invention is further illustrated by the following specific examples, which are, however, to be understood only for the purpose of more detailed description and are not to be construed as limiting the invention in any way.
This section generally describes the materials used in the test of the present invention and the test method. Although many materials and methods of operation are known in the art for accomplishing the objectives of the present invention, the present invention will be described in as much detail herein. It will be apparent to those skilled in the art that in this context, the materials and methods of operation used in the present invention are well known in the art, if not specifically described.
Fig. 1 shows a schematic structural diagram of an amorphous alloy pressure sensor of the present invention. As shown in fig. 1, the amorphous alloy pressure sensor of the present invention includes: 1. the device comprises a loading area 2, a strain resistance film 3, an elastomer component 4, a signal wire 5 and a fixing area; the loading area 1 and the fixing area 5 are usually arranged on the elastomer component 3, and the elastomer component 3 is obtained by die casting equipment and combining a hot pressing technology, a quick cooling technology and a die; the preparation of the elastomer component 3 is to determine the amorphous alloy composition, structure and specific size of the elastomer component 3 and the sizes of the loading area 1 and the fixing area 5 according to the performance parameters such as modulus, strength, hardness, poisson ratio, density and the like of different amorphous alloys and the sensitivity requirement and the size requirement of the miniature pressure sensor by combining finite element analysis; according to the stress direction and the stress distribution, one or more strain resistance films 2 in specific directions are arranged at specific positions on the surface of the elastomer component 3 by means of sputtering equipment or an integrated resistance strain gauge, and each strain resistance film 2 is connected through a signal wire 4 and transmits an analog signal.
Fig. 2 shows a schematic diagram of the calibration and use process of the amorphous alloy pressure sensor of the present invention. As shown in fig. 2, an amorphous alloy pressure sensor and an analog output transmitter 6 are connected, wherein the amorphous alloy pressure sensor is fixed on pressure sensor calibration equipment through threaded connection, and the equipment applies pressure to a loading area 1 of the pressure sensor through loading standard weights; under the condition of no loading pressure, obtaining zero output performance of the pressure sensor; after the analog output transmitter is manually zeroed, pressure is applied to the amorphous alloy pressure sensor in a mode of applying standard weights, the amorphous alloy pressure sensor is increased from 0N to a target measuring range in a fixed step length (1/10-1/5 of the target measuring range), and then the amorphous alloy pressure sensor is gradually unloaded to 0N in the same step length; when the elastomer component loading area 1 is stressed, the elastomer component 3 and the loading area 1 have interaction force, the loading area 1 deforms, the strain resistance film 2 arranged on the elastomer component 3 synchronously acquires a measurable strain signal, the converted analog signal is output to the analog output transmitter 6 through the signal wire 4, 5-10 calibration points are set in the whole process and used for recording the analog signal under certain pressure, the steps are repeated for 3-5 times, and the obtained pressure-analog signal data are calculated to obtain a sensitivity index, a nonlinear index, a repeatability index and a hysteresis index, so that the amorphous alloy miniature pressure sensor with the target measuring range is obtained. The amorphous alloy miniature pressure sensor is connected with the analog output transmitter 6, and pressure in a target range under a certain frequency is applied to the sensor, so that the analog output transmitter 6 can display and record corresponding analog signals, and the numerical quantification of the pressure can be realized according to the numerical value and frequency distribution of the analog signals.
The elastomeric component has different compositions, preferably selected from one or more of the following: zirconium-based amorphous alloy, titanium-based amorphous alloy, iridium-based amorphous alloy, gold-based amorphous alloy, copper-based amorphous alloy, palladium-based amorphous alloy, platinum-based amorphous alloy, iron-based amorphous alloy, amorphous alloy composite, more preferably selected from one or more of the following: zirconium-based amorphous alloy, titanium-based amorphous alloy, iridium-based amorphous alloy, copper-based amorphous alloy, palladium-based amorphous alloy, iron-based amorphous alloy, amorphous alloy composite material; the amorphous alloy with the components has good forming capability, high yield strength, low elastic modulus and good processing performance, is favorable for preparing a wide-range and high-precision pressure sensor elastomer, can meet the requirements of different types of sensors, and has wide application range;
the sensitivity of the amorphous alloy miniature pressure sensor has different requirements, preferably the sensitivity range is 1.0 mV/V-1.5 mV/V, most preferably 1.0mV/V, and the effective output of test data and the allowable range of control errors can be met;
the elastomeric component has a different structure, preferably selected from one or more of the following: the structure can improve the rigidity of the elastomer, reduce the demolding difficulty of the die-casting molding of the amorphous alloy elastomer, and facilitate the processing of the elastomer and the cost of the product;
The whole thickness of the elastomer component has different sizes, preferably the size is 1.0 mm-40.0 mm, more preferably 1.0 mm-20.0 mm, so that the requirements of the applicable scene and economy of the miniature pressure sensor can be met;
the elastomeric components have different dimensions in cross-sectional area, preferably 1.0mm in size 2 ～400.0mm 2 More preferably 1.0mm 2 ～100.0mm 2 Thus, the requirements of the use scenes of the miniature pressure sensors of different types can be met;
the loading zone has a different structure, preferably selected from one or more of the following: column type, flange type, cantilever type, shell type, pyramid type and their constituent bodies, these shapes are favorable for elastomer processing, raise elastomer processing precision, guarantee the unidirectional stress and can meet the requirement of different assembly environments on the structural size of the pressure sensor at the same time, the application range is wide;
the ratio of the cross-sectional area to the height of the loading zone has a different range, preferably from 1.0 to 100.0: 0.5-20.0, so that the ratio range of the length to the diameter of a common sample in compression can be satisfied, and the elastic behavior in the compression process is better;
the shape of the fixation region includes, but is not limited to, one or more of the following: the column type, flange type, cantilever type, shell type and the components thereof are beneficial to the processing of the elastomer, so that the rigidity of the pressure sensor is improved, and the requirement of the assembly environment on the structural size of the pressure sensor can be met;
The method for preparing the elastomer component of the amorphous alloy pressure sensor consists of different processes, and is preferably selected from one or more of the following: the die casting, suction casting, blow molding, injection molding, CNC milling, turning, drilling, boring, water jet machining, wire cutting, casting, forging and powder machining can be effectively combined in various modes, so that the production period can be shortened, the production cost can be reduced, the material loss can be reduced, and the product quality can be ensured;
the processing mode of the strain resistance film is different according to the use situation, and is preferably selected from one or more of the following: the strain resistance film prepared by special processing effectively improves the adhesive force with an elastomer component, realizes automatic production, reduces errors caused by human factors and improves the performance of a sensor; the integrated resistance strain gauge has the advantages of high sensitivity, good stability, high response speed and low cost;
the built-in resistive grids of the strain resistive film are of different materials, preferably selected from one or more of the following: constantan alloy, kama alloy, amorphous alloy, these alloys have excellent force-induced resistance change performance and elastic performance;
The strain resistance film has different structures according to the stress direction, and is preferably selected from one or more of the following: the strain resistance thin film structure is selected according to different deformation modes of the loading area, so that the measurement of harmful strain can be eliminated, and the accurate measurement of pressure is realized;
preferably, when the number of the strain resistance films is 1, the structure of the strain resistance films is a full bridge structure, so that the installation space of the strain resistance films in the miniature pressure sensor is more easily satisfied;
the patch of the strain resistance film has different methods, and is preferably fixed on the surface of the elastic component, which has the largest strain amount, the surface of the elastic component, which has the most uniform strain distribution, and the surface of the elastic component, which has even thickness, and is most preferably fixed on the surface of the elastic component, which has the most uniform strain distribution, so that the accurate measurement of pressure can be realized, and the fatigue life of the strain resistance film is ensured.
The target range has different pressure ranges, preferably 20N-4000N, so as to meet the requirements of different scenes on the miniature pressure sensor;
The nonlinearity index has a required range, preferably, nonlinearity is 0.01-0.8% F.S., more preferably, 0.05-0.5% F.S., so that the accuracy of output data can be ensured, and the output signal and the force application pressure of the amorphous alloy pressure sensor can be matched quickly;
the repeatability index has a required range, preferably, the repeatability is 0F.S. to 0.3% F.S., more preferably, 0F.S. to 0.1% F.S., so as to ensure the stability of the performance of the amorphous alloy pressure sensor and the data reliability;
the hysteresis index has a required range, preferably, the hysteresis is 0F.S. to 0.3% F.S., more preferably 0F.S. to 0.1% F.S., so as to ensure the quick rebound resilience of the pressure sensor, control the error range of the pressure sensor in the loading and unloading processes and improve the fatigue resistance of the amorphous alloy pressure sensor;
the zero output range of the zero output index has requirements, preferably 0 mV-0.0001 mV, so that the human error and the equipment error of data measurement can be reduced, and the reliability of data test is improved;
the force-exerting workpiece is in contact with the loading zone in a different manner, preferably in a point contact.
Example 1
This example uses a zirconium titanium copper nickel aluminum amorphous alloy as a material to prepare the 200N miniature pressure sensor elastomer component of the present invention.
FIG. 3 (a) shows a schematic structural diagram of an Zr-Ti-Cu-Ni-Al amorphous alloy miniature pressure sensor elastomer component of the present invention. As shown, the amorphous alloy elastomer component of the present invention includes: load area 1, fixed area 5. Wherein the loading zone 1 and the fastening zone 5 are part of an elastomeric assembly 3.
The preparation method of the zirconium titanium copper nickel aluminum amorphous alloy elastomer component comprises the following steps: the specific component Zr52.5Cu17.9Ni14.6Al10Ti5 with good internal forming capability, excellent mechanical property and wider supercooled liquid phase region of the zirconium titanium copper nickel aluminum amorphous alloy system is selected, and the cylindrical bar with the diameter of 8mm and the height of 7mm is prepared by a suction casting technology and a quick cooling technology. According to the amorphous alloy elastomer of the embodiment, the yield strength is 1700MPa, the hardness is 520HV, the Young modulus is 88.7GPa, the Poisson ratio is 0.36, and the requirements of the structure of the elastomer component 3, the size of the loading area 1, the size of the fixing area 5 and the like are determined by combining finite element analysis according to the material performances and the requirement that the sensitivity of the miniature pressure sensor is below 2 mV/V. Placing the bar in vacuum die casting equipment, heating to melt under induction heating, and integrally forming by combining a hot pressing technology, a quick cooling technology and a die to obtain the zirconium titanium copper nickel aluminum elastomer component 3 with the overall thickness of 5.2 mm.
Fig. 4 (a) shows an X-ray diffraction pattern of the zirco-titanium copper nickel aluminum elastomer assembly 3 of the present invention. After the molded zircaloy-nickel-aluminum elastomer assembly 3 was obtained, the surface of the elastomer was subjected to X-ray diffraction in a diffraction range of 20 ° to 80 ° using an X-ray diffractometer equipped with a Cu-K a radiation source. The prepared zirconium titanium copper nickel aluminum amorphous alloy elastomer component 3 is ensured to be in a completely amorphous structure. The zirconium titanium copper nickel aluminum amorphous alloy elastomer obtained by the preparation method does not need annealing and other heat treatment methods to improve the strength, hardness and other performances, and the mechanical properties of the amorphous alloy elastomer component 3 prepared by die casting and integral molding are consistent with those of a raw material zirconium titanium copper nickel aluminum amorphous alloy cylinder bar.
Example 2
This example uses a zirconium cobalt aluminum amorphous alloy as the material to make the 900N miniature pressure sensor elastomer component of the present invention.
Fig. 3 (b) shows a schematic structural diagram of the zirconium cobalt aluminum amorphous alloy miniature pressure sensor elastomer component of the present invention. As shown, the amorphous alloy elastomer component of the present invention includes: load area 1, fixed area 5. Wherein the loading zone 1 and the fastening zone 5 are part of an elastomeric assembly 3.
The preparation method of the zirconium cobalt aluminum amorphous alloy elastomer component comprises the following steps: the specific components with good internal forming capability, excellent mechanical property and wider supercooling liquid phase region of the zirconium cobalt aluminum amorphous alloy system are selected, and the cylindrical bar with the diameter of 8mm and the height of 7mm is prepared by a suction casting technology and a quick cooling technology. According to the amorphous alloy elastomer with the yield strength of 1900MPa, the hardness of 530HV, the Young modulus of 92GPa and the Poisson's ratio of 0.3, the requirements of the structure of the elastomer component 3, the size of the loading area 1, the size of the fixing area 5 and the like are determined by combining finite element analysis according to the material performances and the requirement that the sensitivity of the miniature pressure sensor is below 2 mV/V. The bar is placed in vacuum die casting equipment, heated into melt under induction heating, and integrally molded by combining a hot pressing technology, a quick cooling technology and a die to obtain the zirconium-cobalt-aluminum elastomer component 3 with the overall thickness of 6.0 mm.
Fig. 4 (b) shows an X-ray diffraction pattern of the zirconium cobalt aluminum amorphous alloy elastomer component 3 of the present invention. After the molded zirconium cobalt aluminum amorphous alloy elastomer component 3 was obtained, the surface of the elastomer was subjected to X-ray diffraction in a diffraction range of 20 ° to 80 ° using an X-ray diffractometer equipped with a Cu-K a radiation source. Ensuring that the elastomeric component 3 prepared is of a completely amorphous structure. The zirconium cobalt aluminum amorphous alloy elastomer component 3 obtained by the preparation method does not need annealing and other heat treatment methods to improve the strength, hardness and other performances, and the mechanical properties of the amorphous alloy elastomer component 3 prepared by die casting and integral molding are consistent with those of a raw material zirconium cobalt aluminum amorphous alloy cylinder bar.
Example 3
This example uses lanthanum aluminum copper nickel cobalt amorphous alloy as the material to make the miniature pressure sensor elastomer component of the present invention.
The lanthanum-aluminum-copper-nickel-cobalt amorphous alloy provided by the invention comprises the following elements in atomic proportion: la 55%, al 25%, cu 10%, ni 5%, co 5%, the amorphous alloy elastomer of this example has a yield strength of 850MPa, a hardness of 306.12HV, a Young's modulus of 41.9GPa, and a Poisson's ratio of 0.342.
According to the above material properties, the structure and the manufacturing method for manufacturing the micro pressure sensor elastomer assembly are referred to example 1.
Example 4
This example uses copper zirconium titanium amorphous alloy as a material to prepare the miniature pressure sensor elastomer component of the present invention.
The copper zirconium titanium amorphous alloy of the invention is composed of the following elements in atomic proportion: 50% of Cu, 42.5% of Zr and 7.5% of Ti, wherein the amorphous alloy elastomer of the embodiment has the yield strength of 1810MPa, the hardness of 660HV, the Young's modulus of 86GPa and the Poisson's ratio of 0.3.
According to the above material properties, the structure and the manufacturing method for manufacturing the micro pressure sensor elastomer assembly are referred to example 1.
Example 5
This example uses a zirconium copper silver aluminum amorphous alloy as a material to prepare the miniature pressure sensor elastomer component of the present invention.
The zirconium copper silver aluminum amorphous alloy provided by the invention comprises the following elements in atomic ratio: 46% of Zr, 37.6% of Cu, 8.4% of Ag and 8% of Al, wherein the yield strength of the amorphous alloy elastomer of the embodiment is 1910MPa, the hardness 554HV, the Young's modulus is 92GPa and the Poisson's ratio is 0.3.
According to the above material properties, the structure and the manufacturing method for manufacturing the micro pressure sensor elastomer assembly are referred to example 1.
Example 6
This example uses a copper hafnium titanium amorphous alloy as a material to prepare the miniature pressure sensor elastomer assembly of the present invention.
The copper hafnium titanium amorphous alloy of the invention is composed of the following elements in atomic proportion: cu 60%, hf 30%, ti 10%, the amorphous alloy elastomer of this example has a yield strength of 2160MPa, a Young's modulus of 124GPa, and a Poisson's ratio of 0.37.
According to the above material properties, the structure and the manufacturing method for manufacturing the micro pressure sensor elastomer assembly are referred to example 1.
Example 7
This example uses amorphous alloy ZrCoAlY as a material to prepare the miniature pressure sensor elastomer component of the present invention.
The copper hafnium titanium amorphous alloy of the invention is composed of the following elements in atomic proportion: 49% of Zr, 28% of Co, 16% of Al and 7% of Y, wherein the amorphous alloy elastomer of the embodiment has the yield strength of 2000MPa, the hardness of 540HV, the Young's modulus of 100GPa and the Poisson's ratio of 0.34.
According to the above material properties, the structure and the manufacturing method for manufacturing the micro pressure sensor elastomer assembly are referred to example 1.
Table 1 shows the amorphous alloy yield strength, young's modulus, and poisson's ratio index selected for examples 1, 3-7, and the sensitivity magnitudes of the same-sized miniature pressure sensor elastomer assemblies prepared by finite element simulation prediction. Table 1 also shows the index of the 17-4PH stainless steel of comparative example 1 and the 7075-T6 aluminum alloy of comparative example 2.
TABLE 1 yield strength, young's modulus and Poisson's ratio index for specific Components under amorphous alloy fraction System
As can be seen from Table 1, 17-4PH stainless steel, 7075-T6 aluminum alloy, la55Al25Cu10Ni5Co5 amorphous alloy, cu50Zr42.5Ti7.5 amorphous alloy, zr46Cu37.6Ag8.4Al8 amorphous alloy, cu60Hf30Ti10 amorphous alloy, zr52.5Cu17.9Ni14.6Al10Ti5 amorphous alloy, zr49Co28Al16Y7 amorphous alloy were used as the elastomer component materials. The amorphous alloy system is more, the component range in the same system is wide, and the requirements of different sensors on the elastomer materials can be met. The amorphous alloy can be used for preparing the elastomer with the sensitivity of 17-4PH stainless steel elastomer being twice or more, which shows that compared with the traditional alloy steel material, the amorphous alloy can be used as an elastomer component of the miniature pressure sensor to obtain higher response speed; meanwhile, compared with the alloy with smaller modulus such as 7075-T6 aluminum alloy, the amorphous alloy can select a system with low Young modulus and high yield strength, so that the rigidity of the sensor is ensured, and meanwhile, the sensitivity of the sensor is further improved, which indicates that the amorphous alloy elastomer can be used for preparing a micro pressure sensor with a large range and a small size.
By combining the embodiment 1 and the embodiment 2, the Young modulus of the amorphous alloy miniature pressure sensor elastomer component prepared by the invention is only 40 percent of that of the conventional elastic steel, and the sensitivity is improved by 3 times; the mechanical strength of the pressure sensor is more than 1.5 times of that of the conventional elastic steel, so that the volume can be reduced by at least 50% when the pressure sensor with the same measuring range is manufactured. Meanwhile, the amorphous alloy elastomer component prepared by the invention can be integrally molded through die casting, subsequent heat treatment and performance detection are not needed, the production period is greatly reduced, and the production cost is reduced.
Example 8
The 200N pressure detection device and the detection method of the invention are prepared by using zirconium titanium copper nickel aluminum amorphous alloy as an elastomer component in the example.
Fig. 5 shows a pressure detection device of the present invention. As shown in fig. 5, the pressure detecting device of the present invention includes: a miniature pressure sensor, an analog output transmitter 6 and a programmable logic controller 7. The miniature pressure sensor includes: a loading area 1, a strain resistance film 2, an elastomer component 3 and a signal wire 4. The elastomer assembly prepared in example 1 was used in this example.
Fig. 6 shows the test data of the zirconium titanium copper nickel aluminum amorphous alloy miniature pressure sensor of the present invention at 200N range.
The pressure detection method comprises the following steps:
(1) Designing and processing a miniature pressure sensor according to a target measuring range;
(2) Checking the miniature pressure sensor device;
(3) Integrating a miniature pressure sensor device into a pressure detection device;
(4) The pressure test is performed by a pressure detection device.
The preparation method of the zirconium titanium copper nickel aluminum amorphous alloy miniature pressure detection device comprises the following steps: according to the stress direction and stress distribution, 1 full-bridge strain resistance film 2 is arranged on the specific surface of the zirconium titanium copper nickel aluminum elastomer component 3 through a magnetron sputtering device, the strain resistance film 2 and an analog output transmitter 6 are connected through a signal wire 4 and transmit analog signals, and the analog output transmitter 6 is connected with a programmable logic controller 7 through the signal wire 4 and is used for processing analog signal data.
The method for testing the zirconium titanium copper nickel aluminum amorphous alloy miniature pressure detection device comprises the following steps of: the amorphous alloy pressure sensor is fixed on pressure sensor calibration equipment through threaded connection, and the equipment applies pressure to a loading area 1 of the pressure sensor through loading standard weights; under the condition of no loading pressure, obtaining zero output performance of the pressure sensor; after the analog output transmitter 6 is manually zeroed, pressure is applied to the amorphous alloy pressure sensor in a mode of applying standard weights, the amorphous alloy pressure sensor is increased from 0N to a target measuring range 200N in a fixed step length 20N, and then the amorphous alloy pressure sensor is gradually unloaded to 0N in the same step length 20N; when the loading area 1 of the zirconium titanium copper nickel aluminum amorphous alloy elastic component is stressed, the strain resistance film 2 arranged on the zirconium titanium copper nickel aluminum elastic component 3 synchronously acquires a measurable strain signal, the converted analog signal is output to the analog output transmitter 6 through the signal wire 4, 10 calibration points are set in the whole process, the steps are repeated for 5 times, the obtained pressure-analog signal data are calculated by the programmable logic controller 7 to obtain the sensitivity index 1.5mV/V, the nonlinear index 0.067% F.S., the repeatability index 0.1705% F.S., and the hysteresis index 0.1060% F.S., and the zirconium titanium copper nickel aluminum amorphous alloy miniature pressure detection device with 200N measuring range is obtained.
Example 9
The 900N pressure detection device and the detection method of the invention are prepared by using zirconium cobalt aluminum amorphous alloy as an elastomer component in the embodiment.
The pressure detection device of the present invention includes: miniature pressure sensor, analog output transmitter, programmable logic controller. The miniature pressure sensor includes: load zone, strain resistance film, elastomeric component, signal 4. The elastomer assembly prepared in example 2 was used in this example.
The pressure detection method comprises the following steps:
(1) Designing and processing a miniature pressure sensor according to a target measuring range;
(2) Checking the miniature pressure sensor device;
(3) Integrating a miniature pressure sensor device into a pressure detection device;
(4) The pressure test is performed by a pressure detection device.
The preparation method of the zirconium cobalt aluminum amorphous alloy miniature pressure detection device comprises the following steps: according to the stress direction and the stress distribution, 1 full-bridge strain resistance film is arranged on the specific surface of the zirconium-cobalt-aluminum amorphous alloy elastomer component through a magnetron sputtering device, the strain resistance film and an analog output transmitter are connected through a signal wire and transmit analog signals, and the analog output transmitter is connected with a programmable logic controller through the signal wire and is used for processing analog signal data.
The step of carrying out factory inspection on the zirconium cobalt aluminum amorphous alloy miniature pressure detection device is as follows: the amorphous alloy pressure sensor is fixed on pressure sensor calibration equipment through threaded connection, and the equipment applies pressure to a loading area of the pressure sensor through loading standard weights; under the condition of no loading pressure, obtaining zero output performance of the pressure sensor; after the analog output transmitter 6 is manually zeroed, pressure is applied to the amorphous alloy pressure sensor in a mode of applying standard weights, the amorphous alloy pressure sensor is increased from 0N to a target measuring range 900N by a fixed step length 100N, and then the amorphous alloy pressure sensor is gradually unloaded to 0N by the same step length 100N; when the loading area of the zirconium cobalt aluminum amorphous alloy elastomer component is stressed, the strain resistance film arranged on the zirconium cobalt aluminum amorphous alloy elastomer component synchronously acquires a measurable strain signal, the converted analog signal is output to an analog output transmitter through a signal wire, 10 calibration points are set in the whole process, the steps are repeated for 5 times, the obtained pressure-analog signal data are calculated by a programmable logic controller to obtain a sensitivity index of 2.0mV/V, a nonlinearity index of 0.1033% F.S., a repeatability index of 0.1815% F.S., and a hysteresis index of 0.3506% F.S., and the zirconium titanium copper nickel aluminum amorphous alloy miniature pressure detection device with 900N measuring range is obtained.
The step of performing a pressure test by the pressure detection device includes: the method comprises the steps of installing a pressure detection device to the tail end of a mechanical arm for pressure detection and motion feedback, installing the pressure detection device to a clamping mechanical arm for clamping force detection, installing the pressure detection device to a polishing mechanical arm for pressure dynamic monitoring, and installing the pressure detection device to a balance for weight measurement.
Although the present invention has been described to a certain extent, it is apparent that appropriate changes may be made in the individual conditions without departing from the spirit and scope of the invention. It is to be understood that the invention is not to be limited to the described embodiments, but is to be given the full breadth of the claims, including equivalents of each of the elements described.
Claims (10)
1. An elastomeric assembly for a pressure sensor, characterized by:
the material of the elastomer component is amorphous alloy or composite material of amorphous alloy, and the amorphous alloy is selected from one or more of the following: zirconium-based amorphous alloy, titanium-based amorphous alloy, yttrium-based amorphous alloy, iridium-based amorphous alloy, copper-based amorphous alloy, palladium-based amorphous alloy, platinum-based amorphous alloy, gold-based amorphous alloy, aluminum-based amorphous alloy, iron-based amorphous alloy, lanthanum-based amorphous alloy, cerium-based amorphous alloy; preferably selected from one or more of the following: zirconium-based amorphous alloy, titanium-based amorphous alloy, yttrium-based amorphous alloy, iridium-based amorphous alloy, copper-based amorphous alloy, palladium-based amorphous alloy, gold-based amorphous alloy, iron-based amorphous alloy; more preferably selected from one or more of the following: zirconium-based amorphous alloy, titanium-based amorphous alloy, yttrium-based amorphous alloy, iridium-based amorphous alloy, copper-based amorphous alloy, palladium-based amorphous alloy, and iron-based amorphous alloy;
Preferably, the zirconium based amorphous alloy is selected from one or more of the following: zrCoAl, zrCoAlY, zrCuNiAl, zrTiCuNiAl, zrTiCuNiBe, zrCuPdAgAl, zrCuBeAgAl, zrNiCuAlAg, zrAuCuAlAg, zrCuAlAg, zrFeCuAlAg, zrNbCuNiBe, zrTiCuAlAg;
preferably, the titanium-based amorphous alloy is selected from one or more of the following: tiZrBeNiCu, tiZrBeNi, tiZrBeCr, tiCuZr, tiPdZrHfCuNiSiSn, tiZrCuPd, tiZrBe;
preferably, the yttrium-based amorphous alloy is YScAlCo or YScAlCoNi;
preferably, the iridium-based amorphous alloy is IrNiTa or IrNiTaNb;
preferably, the copper-based amorphous alloy is selected from one or more of the following: cuZrAlAg, cuZrAlEr, cuZrAlGd, cuZrAlY, cuZrAlNb, cuZrAgTi, cuZrTiSnSi, cuHfTi, cuZrTi;
preferably, the palladium-based amorphous alloy is selected from one or more of the following: pdCuNiP, pdZrCuAlAg, pdNiP, pdCuAgSiP;
preferably, the iron-based amorphous alloy is selected from one or more of the following: feCoCrMoCBY, feCrMoWCBY, feCrMoCBErA, feMnCrMoErCB; and/or
Preferably, the pressure sensor is selected from one or more of the following: strain-type pressure sensors, piezoresistive pressure sensors, capacitive pressure sensors, piezoelectric pressure sensors, vibration-frequency type pressure sensors; more preferably selected from one or more of the following: strain-type pressure sensors, piezoresistive pressure sensors, capacitive pressure sensors.
2. The elastomeric assembly of claim 1, wherein:
the elastic modulus of the amorphous alloy is 40 GPa-150 GPa, preferably 60 GPa-150 GPa, more preferably 60 GPa-100 GPa;
the yield strength of the amorphous alloy is 600 MPa-3400 MPa, preferably 1000 MPa-2500 MPa;
the hardness of the amorphous alloy is 500 HV-1400 HV, preferably 500 HV-650 HV; the elastomeric component has a three-dimensional structure selected from one or more of the following: cylinder, diaphragm type, flat box type; preferably a cartridge or flat cartridge;
the thickness of the elastomeric component is 1.0mm to 40.0mm, more preferably 1.0mm to 20.0mm; and/or
The elastomeric component has a cross-sectional area of 1.0mm 2 ～400.0mm 2 More preferably 1.0mm 2 ～100.0mm 2 。
3. A pressure detection device, characterized in that the pressure detection device comprises: a pressure sensor, an analog output transducer and a programmable logic controller; wherein, pressure sensor does not include the roof beam that strains, and from bottom to top includes in proper order:
a fixing region for securing rigidity of the elastic body assembly;
the elastomeric assembly of claim 1 or 2;
the strain resistance film is used for acquiring a measurable strain signal and converting the measurable strain signal into an analog signal; and
A loading zone, a structure for applying external pressure to the pressure sensor;
wherein the strain resistance film is arranged on the surface of the elastomer component;
preferably, the pressure sensor is selected from one or more of the following: strain-type pressure sensors, piezoresistive pressure sensors, capacitive pressure sensors, piezoelectric pressure sensors, vibration-frequency type pressure sensors; more preferably selected from one or more of the following: strain-type pressure sensors, piezoresistive pressure sensors, capacitive pressure sensors; and/or
Preferably, the pressure detection device further comprises a data line, and the analog output transmitter is connected with the pressure sensor to amplify and collect analog signals, and then the amplified analog signals are input into the programmable logic controller through the data line in a voltage or current mode.
4. A pressure detection apparatus according to claim 3, wherein:
the shape of the loading zone is selected from one or more of the following: cuboid, cube, cylinder, prism, cone, pyramid, round table, pyramid, sphere; preferably selected from one or more of the following: cuboid, cube, cylinder, round table;
The steric structure of the loading region is selected from one or more of the following: column type, flange type, cantilever type, shell type and pyramid type;
the steric structure of the immobilization region is selected from one or more of the following: column, flange, cantilever, shell;
the ratio of the cross-sectional area to the height of the loading zone is 1.0-400.0: 0.5 to 40.0, preferably 1.0 to 100.0:0.5 to 20.0; and/or
The ratio of the cross-sectional area to the height of the fixing area is 1.0-400.0: 0.5 to 40.0, preferably 1.0 to 100.0:0.5 to 20.0;
preferably, the resistive gate material of the strained resistive film is selected from one or more of the following: constantan alloy, kama alloy, amorphous alloy; and/or
Preferably, the mechanical arm to which the pressure detection device is connected is selected from one or more of the following: the automatic feeding and discharging device comprises a tail end mechanical arm, a stamping mechanical arm, a lathe feeding and discharging mechanical arm, a carrying mechanical arm, a clamping mechanical arm, a polishing mechanical arm, a welding mechanical arm, a cutting mechanical arm and a medical mechanical arm.
5. The pressure detection apparatus according to claim 3 or 4, wherein:
the analog output transmitter is selected from one or more of the following: the current output transducer, the voltage output transducer and the resistance output transducer are preferably current output transducers or voltage output transducers;
The programmable logic controller is selected from one or more of the following: monolithic, modular, stacked, preferably monolithic or modular;
the structure of the strain resistance film is selected from one or more of the following: circular structure, T-shaped structure, V-shaped structure, double bridge structure, tri-gate structure, full bridge structure, preferably selected from one or more of the following: circular structure, double bridge structure, full bridge structure; and/or
Preferably, when the number of the strain resistance films is 1 sheet, the structure of the strain resistance film is a full bridge structure; and/or
Preferably, the surface of the elastomeric component on which the strain resistive film is disposed is selected from one or more of the following: a surface with a large strain amount, a surface with a uniform strain distribution, a surface with a flat thickness, and most preferably a surface with a uniform strain distribution.
6. The pressure sensing device of any one of claims 3 to 5, wherein the pressure sensor further comprises a signal line for electrically connecting the strain resistive film to the analog output transducer and converting it to an analog signal; and/or
The sensitivity of the pressure sensor is 1.0mV/V to 2.0mV/V, more preferably 1.0mV/V to 1.5mV/V, and most preferably 1.0mV/V.
7. A pressure detection method based on a bulk amorphous alloy material, characterized in that the pressure detection method is detected using the pressure detection device according to any one of claims 3 to 6.
8. The pressure detection method according to claim 7, characterized in that the pressure detection method comprises the steps of:
(1) Preparing and detecting a pressure sensor according to a target range; the pressure of the target range is preferably 0N to 4000N, more preferably 20N to 4000N, and even more preferably 100N to 4000N;
(2) Integrating the pressure sensor prepared and checked in the step (1) into the pressure detection device;
(3) Performing a pressure test by a pressure detection device;
preferably, in the step (3), the method of pressure testing is selected from one or more of the following: the method comprises the steps of installing a pressure detection device to the tail end of a mechanical arm to perform pressure detection and motion feedback, installing the pressure detection device to a clamping mechanical arm to perform clamping force detection, installing the pressure detection device to a polishing mechanical arm to perform pressure dynamic monitoring, and installing the pressure detection device to a balance to perform weight measurement.
9. The pressure detection method according to claim 8, wherein:
Said step (1) further comprises the operations of:
(a) Preparing an amorphous alloy elastomer, and preparing a fixed area, a strain resistance film and a loading area on the surface of the amorphous alloy elastomer to obtain the pressure sensor;
(b) The pressure sensor is connected with the analog output transmitter and is fixed on pressure sensor calibration equipment, and the pressure sensor calibration equipment applies pressure to a loading area of the pressure sensor through a loading weight; under the condition that no pressure is applied, obtaining a zero output signal of the pressure sensor; after standing, manually zeroing the analog quantity output transmitter, applying the weight, increasing the pressure from 0N to a target range to a pressure sensor loading area, gradually unloading to 0N, and calculating the obtained pressure-analog signal data by the programmable logic controller after calibration to obtain a sensitivity index, a nonlinear index, a repeatability index and a hysteresis index; and/or
In the step (2), the method for integrating the pressure detection device includes: the programmable logic controller, the analog output transducer and the strain resistance film on the pressure sensor are connected through the signal wire so as to amplify and collect analog signals; the analog output transmitter is connected with one or more pressure sensors in series; the analog output transmitter is preferably connected to the programmable logic controller through the signal line to store the acquired analog signals or to perform operations according to specific logic.
10. The pressure detection method according to claim 9, wherein in the step (1):
in the step (a): the preparation method of the amorphous alloy elastomer is selected from one or more of the following: die casting, suction casting, blow molding, injection molding, CNC milling, turning, drilling, boring, water jet machining, wire cutting, casting, forging and powder machining; the preparation method of the strain resistance film is selected from one or more of the following: magnetron sputtering, ion beam sputtering, printing, vapor deposition and mounting an integrated resistance strain gauge; and/or
In the step (b):
the nonlinear index has a nonlinear range of 0f.s. to 1.5% f.s., preferably 0.01% f.s. to 0.8% f.s., more preferably 0.05% f.s. to 0.5% f.s.;
the repeatability index has a repeatability range of 0f.s. to 0.5% f.s., preferably 0f.s. to 0.3% f.s., more preferably 0f.s. to 0.1% f.s.;
the hysteresis of the hysteresis index ranges from 0f.s. to 0.5% f.s., preferably from 0f.s. to 0.3% f.s., more preferably from 0f.s. to 0.1% f.s.;
the zero output signal has an output range of 0mV to 0.01mV, preferably 0mV to 0.001mV, more preferably 0mV to 0.0001mV; and/or
The contact mode of the weight and the loading area is selected from one or more of the following: surface contact, line contact, point contact, most preferably point contact.
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