CN117739891A - A ballbar error correction method, device and medium - Google Patents

A ballbar error correction method, device and medium Download PDF

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CN117739891A
CN117739891A CN202311598488.8A CN202311598488A CN117739891A CN 117739891 A CN117739891 A CN 117739891A CN 202311598488 A CN202311598488 A CN 202311598488A CN 117739891 A CN117739891 A CN 117739891A
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ballbar
error
displacement sensor
temperature
correction method
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郑刚
单亚林
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Shanghai Institute of Technology
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Abstract

The invention relates to a method, a device and a medium for correcting an error of a ball arm instrument, which comprise the following steps: s1, calculating the error of a linear displacement sensor of a ball arm instrument; s2, constructing an installation error identification separation model, and solving the installation error of the club instrument; s3, correcting measurement data of the ball arm instrument according to the linear displacement sensor error of the ball arm instrument and the installation error of the ball arm instrument obtained in the step S1 and the step S2; and S4, counteracting the thermal expansion of the metal ball in the ball arm instrument by adopting a thermal compensation mode, and further improving the measurement accuracy of the ball arm instrument. Compared with the prior art, the invention can eliminate errors caused by a plurality of interference items and improve the precision of the club instrument.

Description

一种球杆仪误差的修正方法、装置及介质A ballbar error correction method, device and medium

技术领域Technical field

本发明属于球杆仪检测技术领域,尤其是涉及一种球杆仪误差的修正方法、装置及介质。The invention belongs to the technical field of ballbar detection, and in particular relates to a ballbar error correction method, device and medium.

背景技术Background technique

球杆仪作为校准机床等其他设备的仪器,其精准度除受金属球的球度、球座的圆度影响,通常还受线性位移传感器精度、球杆仪安装误差以及环境的影响。其中,线性位移传感器精度受位移传感器的线性误差和迟滞的影响,位移传感器的线性误差是指实际测量的位移值与理想位间的偏差,当被测物体的位移变化时,传感器输出的电流或电压也应随之线性变化,然而,由于传感器性能的限制和温度、湿度变化等因素的影响,传感器输出的电流或电压与其实际位移值之间往往存在一定程度偏差,导致了线性误差的产生;传感器迟滞是指传感器在测量物理量时,由于内部机械、电子等因素的影响,导致输出信号与输入信号之间存在一定的延迟。球杆仪主要由两个精密金属圆球和一个可伸缩连杆构成,在连杆内部有一个光栅尺传感器,在实际测量过程中,通过工作球与刀具球之间的协调配合,来完成机床圆精度测量工作,对机床的位移进行准确的检测,但就实际情况来看,实际测量所得的半径数据并不能够真实准确的反映出圆差补运动轨迹,球杆仪安装误差以及环境温度扰动造成的金属圆球发生热膨胀会对机床圆测试精度产生严重的影响,极易导致测量圆轨迹对于实际圆轨迹的轮廓和细节发生畸变,从而导致测量数据不能够准确的反映出机床圆运动的实际性能。因此,需要设计一种球杆仪误差的修正方法,最大程度上消除多项干扰因素对圆测试精度的影响。As an instrument for calibrating machine tools and other equipment, the accuracy of the ballbar is not only affected by the sphericity of the metal ball and the roundness of the ball seat, but is also usually affected by the accuracy of the linear displacement sensor, the installation error of the ballbar, and the environment. Among them, the accuracy of the linear displacement sensor is affected by the linear error and hysteresis of the displacement sensor. The linear error of the displacement sensor refers to the deviation between the actual measured displacement value and the ideal position. When the displacement of the measured object changes, the current output by the sensor or The voltage should also change linearly. However, due to the limitations of sensor performance and the influence of factors such as temperature and humidity changes, there is often a certain degree of deviation between the current or voltage output by the sensor and its actual displacement value, resulting in linear errors; Sensor hysteresis means that when the sensor measures physical quantities, due to the influence of internal mechanical, electronic and other factors, there is a certain delay between the output signal and the input signal. The ballbar is mainly composed of two precision metal balls and a telescopic connecting rod. There is a grating ruler sensor inside the connecting rod. During the actual measurement process, the machine tool is completed through the coordination between the working ball and the tool ball. Circular precision measurement work accurately detects the displacement of machine tools. However, as far as the actual situation is concerned, the actual measured radius data cannot truly and accurately reflect the circular difference compensation motion trajectory, ballbar installation error and ambient temperature disturbance. The resulting thermal expansion of the metal ball will have a serious impact on the accuracy of the machine tool circle test, which can easily cause the measured circle trajectory to distort the outline and details of the actual circle trajectory, resulting in the measurement data not being able to accurately reflect the actual circular motion of the machine tool. performance. Therefore, it is necessary to design a ballbar error correction method to eliminate the impact of multiple interference factors on the circle test accuracy to the greatest extent.

发明内容Contents of the invention

本发明的目的就是为了克服上述现有技术存在的缺陷而提供一种球杆仪误差的修正方法、装置及介质,在将安装误差控制在合理范围内的基础上,对机床圆测试数据进行科学化处理,最大程度上消除多项干扰因素,切实提高圆测试精度。The purpose of the present invention is to provide a ballbar error correction method, device and medium in order to overcome the above-mentioned shortcomings of the prior art. On the basis of controlling the installation error within a reasonable range, the machine tool circle test data can be scientifically tested. Optimized processing eliminates multiple interference factors to the greatest extent and effectively improves circle testing accuracy.

本发明的目的可以通过以下技术方案来实现:The object of the present invention can be achieved through the following technical solutions:

一种球杆仪误差的修正方法,包括以下步骤:A ballbar error correction method includes the following steps:

S1、求取球杆仪的线性位移传感器误差;S1. Find the linear displacement sensor error of the ballbar;

S2、构建安装误差辨识分离模型,求取球杆仪的安装误差;S2. Construct an installation error identification and separation model to obtain the installation error of the ballbar;

S3、根据步骤S1、步骤S2求取的球杆仪的线性位移传感器误差和球杆仪的安装误差,修正球杆仪的测量数据;S3. Correct the measurement data of the ballbar according to the linear displacement sensor error of the ballbar and the installation error of the ballbar obtained in steps S1 and S2;

S4、采用热补偿方式抵消球杆仪内金属球热膨胀,进一步提高球杆仪的测量精度。S4. Use thermal compensation to offset the thermal expansion of the metal ball inside the ballbar, further improving the measurement accuracy of the ballbar.

进一步地,步骤S1具体包括以下步骤:Further, step S1 specifically includes the following steps:

S101、启动球杆仪的线性位移传感器和高精度光栅位移传感器,输入直线电机的位移和移动速度;S101. Start the linear displacement sensor and high-precision grating displacement sensor of the ballbar, and input the displacement and moving speed of the linear motor;

S102、直线电机根据输入的位移和移动速度移动,采集线性位移传感器和高精度光栅位移传感器的检测信号;S102. The linear motor moves according to the input displacement and movement speed, and collects the detection signals of the linear displacement sensor and the high-precision grating displacement sensor;

S103、根据采集的检测信号绘制偏差时间曲线,并转换为球杆仪的线性位移传感器误差曲线,分析求取球杆仪的线性位移传感器误差。S103. Draw a deviation time curve based on the collected detection signal, convert it into a linear displacement sensor error curve of the ballbar, and analyze and obtain the linear displacement sensor error of the ballbar.

进一步地,所述高精度光栅位移传感器的选择过程如下:多次测量多个高精度光栅位移传感器的迟滞误差并计算平均值,选取迟滞误差平均值最小的高精度光栅位移传感器。Further, the selection process of the high-precision grating displacement sensor is as follows: measure the hysteresis errors of multiple high-precision grating displacement sensors multiple times and calculate the average value, and select the high-precision grating displacement sensor with the smallest average hysteresis error.

进一步地,所述迟滞误差为正反行程间输出的最大差值与满量程输出的百分比值。Further, the hysteresis error is the percentage of the maximum difference in output between forward and reverse strokes and the full-scale output.

进一步地,步骤S2具体包括以下步骤:Further, step S2 specifically includes the following steps:

S201、获取球杆仪原始测量数据,进行正弦拟合,获得正弦拟合曲线;S201. Obtain the original measurement data of the ballbar, perform sine fitting, and obtain a sine fitting curve;

S202、使用线性函数对正弦拟合曲线进一步拟合,建立安装误差辨识分离模型,输出安装误差。S202. Use a linear function to further fit the sinusoidal fitting curve, establish an installation error identification and separation model, and output the installation error.

进一步地,步骤S4中,所述热补偿方式为在球杆仪上安装温度控制器,所述温度控制器根据其测量获得的当前温度值与设定值之间的误差计算输出信号,启动加热或排风以保持球杆仪所处环境温度相对恒定。Further, in step S4, the thermal compensation method is to install a temperature controller on the ballbar. The temperature controller calculates an output signal based on the error between the current temperature value measured by it and the set value, and starts heating. Or exhaust air to keep the ambient temperature of the ballbar relatively constant.

进一步地,步骤S4中,所述热补偿方式为在球杆仪上安装温度传感器,通过所述温度传感器测量得到的温度数据,结合金属材料的热膨胀系数,计算出由于热膨胀引起的长度变化,对球杆仪的实际测量结果进行修正。Further, in step S4, the thermal compensation method is to install a temperature sensor on the ballbar. The temperature data measured by the temperature sensor is combined with the thermal expansion coefficient of the metal material to calculate the length change caused by thermal expansion. The actual measurement results of the ballbar are corrected.

进一步地,步骤S4中,所述热补偿方式为根据球杆仪金属球和球杆在不同温度下的直径和长度的变化情况,计算温度补偿系数,基于所述温度补偿系数对球杆仪的实际测量结果进行修正。Further, in step S4, the thermal compensation method is to calculate a temperature compensation coefficient based on the changes in diameter and length of the ballbar's metal ball and club at different temperatures, and calculate the temperature compensation coefficient of the ballbar based on the temperature compensation coefficient. Corrected based on actual measurement results.

本发明还提供一种电子设备,包括存储器、处理器,以及存储于所述存储器中的程序,所述处理器执行所述程序时实现上述方法。The present invention also provides an electronic device, including a memory, a processor, and a program stored in the memory. When the processor executes the program, the above method is implemented.

本发明还提供一种计算机可读存储介质,其上存储有计算机程序,所述程序被处理器执行时实现上述方法。The present invention also provides a computer-readable storage medium on which a computer program is stored, and when the program is executed by a processor, the above method is implemented.

与现有技术相比,本发明具有以下有益效果:Compared with the prior art, the present invention has the following beneficial effects:

1、本发明求取的球杆仪的线性位移传感器误差和球杆仪的安装误差,修正球杆仪的测量数据,并采用热补偿方式抵消球杆仪内金属球热膨胀,进一步提高球杆仪的测量精度,可以消除多个干扰项造成的误差,提高球杆仪精度。1. The present invention obtains the linear displacement sensor error of the ballbar and the installation error of the ballbar, corrects the measurement data of the ballbar, and uses thermal compensation to offset the thermal expansion of the metal ball in the ballbar, further improving the accuracy of the ballbar. The measurement accuracy can eliminate errors caused by multiple interference items and improve the accuracy of the ballbar.

2、本发明通过高精度光栅位移传感器对整个系统的测量精度进行校正和补偿,进一步减小了线性位移传感器误差的影响;本发明使用线性函数对原始测量数据的正弦拟合曲线进一步拟合,建立安装误差辨识分离模型,输出安装误差;本发明通过热补偿方式抵消球杆仪内金属球热膨胀,消除因环境变化引起的误差,减小了环境温度扰动造成的金属圆球发生热膨胀会对机床圆测试精度产生严重的影响,使球杆检测数据更加准确可信。2. The present invention corrects and compensates the measurement accuracy of the entire system through a high-precision grating displacement sensor, further reducing the impact of the error of the linear displacement sensor; the present invention uses a linear function to further fit the sinusoidal fitting curve of the original measurement data, An installation error identification and separation model is established to output the installation error; the invention offsets the thermal expansion of the metal ball in the ballbar through thermal compensation, eliminates errors caused by environmental changes, and reduces the thermal expansion of the metal ball caused by environmental temperature disturbances, which has a negative impact on the machine tool. Circle testing accuracy has a serious impact, making club testing data more accurate and trustworthy.

附图说明Description of drawings

图1为本发明的流程示意图。Figure 1 is a schematic flow diagram of the present invention.

具体实施方式Detailed ways

下面结合附图和具体实施例对本发明进行详细说明。本实施例以本发明技术方案为前提进行实施,给出了详细的实施方式和具体的操作过程,但本发明的保护范围不限于下述的实施例。The present invention will be described in detail below with reference to the accompanying drawings and specific embodiments. This embodiment is implemented based on the technical solution of the present invention and provides detailed implementation modes and specific operating procedures. However, the protection scope of the present invention is not limited to the following embodiments.

实施例:Example:

本实施例提供一种球杆仪误差的修正方法,如图1所示,包括以下步骤:This embodiment provides a ballbar error correction method, as shown in Figure 1, including the following steps:

S1、求取球杆仪的线性位移传感器误差,具体包括以下步骤:S1. Find the linear displacement sensor error of the ballbar, including the following steps:

S101、启动球杆仪的线性位移传感器和高精度光栅位移传感器,输入直线电机的位移和移动速度;S101. Start the linear displacement sensor and high-precision grating displacement sensor of the ballbar, and input the displacement and moving speed of the linear motor;

S102、直线电机根据输入的位移和移动速度移动,同时驱动检测探头相对于球杆仪的线性位移传感器或高精度光栅位移传感器的固定部移动,采集线性位移传感器和高精度光栅位移传感器的检测信号;S102. The linear motor moves according to the input displacement and movement speed, and at the same time drives the detection probe to move relative to the linear displacement sensor of the ballbar or the fixed part of the high-precision grating displacement sensor, and collects the detection signals of the linear displacement sensor and high-precision grating displacement sensor. ;

S103、根据采集的检测信号绘制偏差时间曲线,并转换为球杆仪的线性位移传感器误差曲线,分析求取球杆仪的线性位移传感器误差。S103. Draw a deviation time curve based on the collected detection signal, convert it into a linear displacement sensor error curve of the ballbar, and analyze and obtain the linear displacement sensor error of the ballbar.

高精度光栅位移传感器的选择过程如下:先用一个高精度光栅位移传感器执行步骤S101-步骤S103,再用一个更精确、更稳定的传感器替换继续重复S101-步骤S103,验证替换的传感器是否比高精度光栅位移传感器更精确,采用传感器迟滞误差进行定量分析的方法:多次测量替换的光栅位移传感器的迟滞误差,迟滞误差γH的计算公式为: The selection process of high-precision grating displacement sensor is as follows: first use a high-precision grating displacement sensor to perform steps S101-step S103, then replace it with a more accurate and stable sensor and continue to repeat S101-step S103 to verify whether the replaced sensor is higher than the high-precision grating displacement sensor. The precision grating displacement sensor is more accurate. The sensor hysteresis error is used for quantitative analysis: the hysteresis error of the replaced grating displacement sensor is measured multiple times. The calculation formula of the hysteresis error γ H is:

其中△Hmax为正反行程间输出的最大差值,yFS为满量程输出。本实施例中进行了三次测量:Among them, △H max is the maximum difference in output between forward and reverse strokes, and y FS is the full-scale output. Three measurements were made in this example:

第一次测量: First measurement:

第二次测量: Second measurement:

第三次测量: Third measurement:

如果替换的传感器的迟滞误差比高精度光栅位移传感器小,那么它的平均值应该更接近于零,而标准偏差也应该比高精度光栅位移传感器小。总之,要验证替换的传感器是否比高精度光栅位移传感器更精确,需要比较两个传感器的测量结果,并计算相关的统计指标以评估它们的性能。如果替换的传感器具有更高的精度和稳定性,那么它的测量结果应该更可靠。通过进行多组实验和数据分析以测得实际的线性位移传感器误差,根据所述检测信号描出偏差时间曲线并输出为球杆仪的线性位移传感器误差动态位移反馈误差曲线,通过传感器迟滞计算公式描述传感器迟滞的数学模型,可对传感器的迟滞进行定量分析和评估。If the replacement sensor has less hysteresis error than the high-precision grating displacement sensor, then its mean value should be closer to zero, and the standard deviation should also be smaller than the high-precision grating displacement sensor. In summary, to verify whether the replacement sensor is more accurate than the high-precision grating displacement sensor, it is necessary to compare the measurement results of the two sensors and calculate relevant statistical indicators to evaluate their performance. If the replacement sensor has higher accuracy and stability, its measurements should be more reliable. By conducting multiple sets of experiments and data analysis to measure the actual linear displacement sensor error, the deviation time curve is drawn based on the detection signal and output as the linear displacement sensor error dynamic displacement feedback error curve of the ballbar, which is described by the sensor hysteresis calculation formula The mathematical model of sensor hysteresis can quantitatively analyze and evaluate sensor hysteresis.

S2、构建安装误差辨识分离模型,求取球杆仪的安装误差,具体包括以下步骤:S2. Construct an installation error identification and separation model to obtain the installation error of the ballbar, which specifically includes the following steps:

S201、获取球杆仪原始测量数据,对相应的测量半径进行精准的计算,并将其绘制于坐标系下,当直角坐标系下存在安装误差时,测量数据的轮廓会呈现出正弦函数的特性,若此种情况下安装误差出现变化,其所展现出的正弦函数的特性也会呈现出一定程度的变化,对机床圆测量数据进行正弦拟合,并借助MATLAB来对拟合表达式进行精准的计算,以确保所拟合的相位与振幅数据能够具有高度统一性,从而切实保证对比分析的效果;由于安装误差具有一定的差异性,以安装误差角度横坐标,以拟合所得的正弦函数为纵坐标;S201. Obtain the original measurement data of the ballbar, accurately calculate the corresponding measurement radius, and draw it in the coordinate system. When there is an installation error in the rectangular coordinate system, the outline of the measurement data will show the characteristics of a sine function. , if the installation error changes in this case, the characteristics of the sine function displayed will also show a certain degree of change. Perform sine fitting on the machine tool circle measurement data, and use MATLAB to accurately calculate the fitting expression. Calculation to ensure that the fitted phase and amplitude data can have a high degree of unity, thereby effectively ensuring the effect of comparative analysis; because the installation error has a certain degree of difference, the abscissa of the installation error angle is used to fit the obtained sine function is the ordinate;

S202、球杆仪安装误差大小对轮廓正弦函数的影响较小,只有在安装误差过于小时,轮廓正弦函数特性不明显,从而在拟合过程中产生较大的误差,进而导致出现曲线偏离较大的情况,结合曲线的变化规律,通过线性函数来对拟合的正弦函数曲线进行拟合,以建立安装误差辨识分离模型,输出安装误差。S202. The installation error of the ballbar has little impact on the contour sine function. Only when the installation error is too small, the characteristics of the contour sine function are not obvious, resulting in a large error in the fitting process, which in turn leads to a large curve deviation. In this case, combined with the changing rules of the curve, the fitted sinusoidal function curve is fitted through a linear function to establish an installation error identification and separation model and output the installation error.

机床圆测试精度极易受到垂直度误差、比例误差以及反向间距误差等的影响,导致机床圆插补运动的精度受到不同程度的影响,螺距误差、振动误差以及反向跃冲误差等并不会对运动圆轨迹的整体轮廓造成影响,仅仅会导致局部出现低幅度的波动,而垂直误差、比例误差等会导致圆轨迹呈现椭圆形状,通过数学软件生成一组新的数据,作为实际圆插补运动的半径数据;The circular test accuracy of machine tools is easily affected by verticality error, proportion error, reverse spacing error, etc., causing the accuracy of machine tool circular interpolation motion to be affected to varying degrees. Pitch error, vibration error, and reverse jump error are not the same. It will affect the overall outline of the moving circular trajectory, only causing local low-amplitude fluctuations, while vertical errors, proportional errors, etc. will cause the circular trajectory to take on an elliptical shape. A new set of data is generated through mathematical software as the actual circular interpolation. Radius data of complementary motion;

球杆仪的安装误差极易导致机床测量圆轨迹出现变形,与实际圆插补轨迹相比,呈现一定的半径畸变和转角畸变,导致机床测量数据难以真实准确的反映出机床圆运动的实际精度,当安装误差存在时,测量数据在直角小标系下的轮廓会呈现周期为2π正弦曲线的特性,且当安装误差改变时该正弦曲线的特征也发生相应的改变,因此,通过仿真实验可以初步证明,所提出的方法可以高精度地辨识出球杆仪测量数据中包含的安装误差。The installation error of the ballbar can easily lead to deformation of the circular trajectory measured by the machine tool. Compared with the actual circular interpolation trajectory, there will be a certain degree of radius distortion and angle distortion, making it difficult for the machine tool measurement data to truly and accurately reflect the actual accuracy of the machine tool's circular motion. , when the installation error exists, the outline of the measurement data in the right-angle small scale system will show the characteristics of a sinusoid with a period of 2π, and when the installation error changes, the characteristics of the sinusoid will also change accordingly. Therefore, through simulation experiments, it can It was initially demonstrated that the proposed method can identify installation errors contained in ballbar measurement data with high accuracy.

S3、根据步骤S1、步骤S2求取的球杆仪的线性位移传感器误差和球杆仪的安装误差,修正球杆仪的测量数据。S3. Correct the measurement data of the ballbar according to the linear displacement sensor error of the ballbar and the installation error of the ballbar obtained in steps S1 and S2.

S4、采用热补偿方式抵消球杆仪内金属球热膨胀,进一步提高球杆仪的测量精度。热补偿方式可以为在球杆仪的上表面安装温度补偿控制器,温度控制器可以根据其测量获得的当前温度值与设定值之间的误差计算输出信号,启动加热或排风以保持球杆仪所处环境温度相对恒定。热补偿方式也可以为在球杆仪上安装温度传感器,通过所述温度传感器测量得到的温度数据,结合金属材料的热膨胀系数,计算出由于热膨胀引起的长度变化,对球杆仪的实际测量结果进行修正。热补偿方式还可以为根据球杆仪金属球和球杆在不同温度下的直径和长度的变化情况,计算温度补偿系数,基于所述温度补偿系数对球杆仪的实际测量结果进行修正。S4. Use thermal compensation to offset the thermal expansion of the metal ball inside the ballbar, further improving the measurement accuracy of the ballbar. The thermal compensation method can be to install a temperature compensation controller on the upper surface of the ballbar. The temperature controller can calculate the output signal based on the error between the current temperature value measured by it and the set value, and start heating or exhaust to maintain the ball. The ambient temperature of the pole instrument is relatively constant. Thermal compensation method can also be to install a temperature sensor on the ballbar. Through the temperature data measured by the temperature sensor, combined with the thermal expansion coefficient of the metal material, the length change caused by thermal expansion is calculated, and the actual measurement results of the ballbar are calculated. Make corrections. The thermal compensation method may also be to calculate a temperature compensation coefficient based on changes in diameter and length of the ballbar's metal ball and club at different temperatures, and correct the actual measurement results of the ballbar based on the temperature compensation coefficient.

在一优选实施方式中,可以同时采用软件获取补偿参数,通过设计金属球热膨胀修正模型实现。连接球杆仪和电脑,打开球杆仪检测软件Ballbar Trace,再打开XCal-View数据分析软件,快速检测和审查Ballbar Trace软件采集金属球热膨胀的数据,并通过MATLAB建立金属球热膨胀修正模型,可以采用现有的基于反向传播神经网络的补偿算法进行设计。将球杆放在球杆仪上,设置好相关参数,并在不同室温和湿度的环境下进行多组实验且进行对比。点击“调整补偿参数”按钮,进入补偿参数调整界面。在补偿参数调整界面上,按照提示进行参数调整,完成后保存参数,定期进行补偿参数的调整。In a preferred embodiment, software can be used to obtain the compensation parameters at the same time, which is achieved by designing a thermal expansion correction model of the metal ball. Connect the ballbar to the computer, open the ballbar detection software Ballbar Trace, then open the XCal-View data analysis software, quickly detect and review the thermal expansion data of the metal ball collected by the Ballbar Trace software, and establish a metal ball thermal expansion correction model through MATLAB. The existing compensation algorithm based on backpropagation neural network is used for design. Place the ball club on the ballbar, set the relevant parameters, and conduct multiple sets of experiments under different room temperature and humidity environments for comparison. Click the "Adjust Compensation Parameters" button to enter the compensation parameter adjustment interface. On the compensation parameter adjustment interface, follow the prompts to adjust the parameters, save the parameters after completion, and adjust the compensation parameters regularly.

上述方法如果以软件功能单元的形式实现并作为独立的产品销售或使用时,可以存储在一个计算机可读取存储介质中。基于这样的理解,本发明的技术方案本质上或者说对现有技术做出贡献的部分或者该技术方案的部分可以以软件产品的形式体现出来,该计算机软件产品存储在一个存储介质中,包括若干指令用以使得一台计算机设备(可以是个人计算机,服务器,或者网络设备等)执行本发明各个实施例所述方法的全部或部分步骤。而前述的存储介质包括:U盘、移动硬盘、只读存储器(ROM,Read-Only Memory)、随机存取存储器(RAM,Random Access Memory)、磁碟或者光盘等各种可以存储程序代码的介质。If the above method is implemented in the form of a software functional unit and sold or used as an independent product, it can be stored in a computer-readable storage medium. Based on this understanding, the technical solution of the present invention essentially or the part that contributes to the existing technology or the part of the technical solution can be embodied in the form of a software product. The computer software product is stored in a storage medium, including Several instructions are used to cause a computer device (which may be a personal computer, a server, or a network device, etc.) to execute all or part of the steps of the methods described in various embodiments of the present invention. The aforementioned storage media include: U disk, mobile hard disk, read-only memory (ROM, Read-Only Memory), random access memory (RAM, Random Access Memory), magnetic disk or optical disk and other media that can store program code. .

上述的对实施例的描述是为便于该技术领域的普通技术人员能理解和使用发明。熟悉本领域技术的人员显然可以容易地对这些实施例做出各种修改,并把在此说明的一般原理应用到其他实施例中而不必经过创造性的劳动。因此,本发明不限于上述实施例,本领域技术人员根据本发明的揭示,不脱离本发明范畴所做出的改进和修改都应该在本发明的保护范围之内。The above description of the embodiments is to facilitate those of ordinary skill in the technical field to understand and use the invention. It is obvious that those skilled in the art can easily make various modifications to these embodiments and apply the general principles described herein to other embodiments without inventive efforts. Therefore, the present invention is not limited to the above embodiments. Based on the disclosure of the present invention, improvements and modifications made by those skilled in the art without departing from the scope of the present invention should be within the protection scope of the present invention.

Claims (10)

1.一种球杆仪误差的修正方法,其特征在于,包括以下步骤:1. A ballbar error correction method, characterized in that it includes the following steps: S1、求取球杆仪的线性位移传感器误差;S1. Find the linear displacement sensor error of the ballbar; S2、构建安装误差辨识分离模型,求取球杆仪的安装误差;S2. Construct an installation error identification and separation model to obtain the installation error of the ballbar; S3、根据步骤S1、步骤S2求取的球杆仪的线性位移传感器误差和球杆仪的安装误差,修正球杆仪的测量数据;S3. Correct the measurement data of the ballbar according to the linear displacement sensor error of the ballbar and the installation error of the ballbar obtained in steps S1 and S2; S4、采用热补偿方式抵消球杆仪内金属球热膨胀,进一步提高球杆仪的测量精度。S4. Use thermal compensation to offset the thermal expansion of the metal ball inside the ballbar, further improving the measurement accuracy of the ballbar. 2.根据权利要求1所述的一种球杆仪误差的修正方法,其特征在于,步骤S1具体包括以下步骤:2. A ballbar error correction method according to claim 1, characterized in that step S1 specifically includes the following steps: S101、启动球杆仪的线性位移传感器和高精度光栅位移传感器,输入直线电机的位移和移动速度;S101. Start the linear displacement sensor and high-precision grating displacement sensor of the ballbar, and input the displacement and moving speed of the linear motor; S102、直线电机根据输入的位移和移动速度移动,采集线性位移传感器和高精度光栅位移传感器的检测信号;S102. The linear motor moves according to the input displacement and movement speed, and collects the detection signals of the linear displacement sensor and the high-precision grating displacement sensor; S103、根据采集的检测信号绘制偏差时间曲线,并转换为球杆仪的线性位移传感器误差曲线,分析求取球杆仪的线性位移传感器误差。S103. Draw a deviation time curve based on the collected detection signal, convert it into a linear displacement sensor error curve of the ballbar, and analyze and obtain the linear displacement sensor error of the ballbar. 3.根据权利要求2所述的一种球杆仪误差的修正方法,其特征在于,所述高精度光栅位移传感器的选择过程如下:多次测量多个高精度光栅位移传感器的迟滞误差并计算平均值,选取迟滞误差平均值最小的高精度光栅位移传感器。3. A ballbar error correction method according to claim 2, characterized in that the selection process of the high-precision grating displacement sensor is as follows: measure the hysteresis errors of multiple high-precision grating displacement sensors multiple times and calculate Average value, select the high-precision grating displacement sensor with the smallest average hysteresis error. 4.根据权利要求3所述的一种球杆仪误差的修正方法,其特征在于,所述迟滞误差为正反行程间输出的最大差值与满量程输出的百分比值。4. A ballbar error correction method according to claim 3, characterized in that the hysteresis error is the percentage of the maximum difference in output between forward and reverse strokes and the full-scale output. 5.根据权利要求1所述的一种球杆仪误差的修正方法,其特征在于,步骤S2具体包括以下步骤:5. A ballbar error correction method according to claim 1, characterized in that step S2 specifically includes the following steps: S201、获取球杆仪原始测量数据,进行正弦拟合,获得正弦拟合曲线;S201. Obtain the original measurement data of the ballbar, perform sine fitting, and obtain a sine fitting curve; S202、使用线性函数对正弦拟合曲线进一步拟合,建立安装误差辨识分离模型,输出安装误差。S202. Use a linear function to further fit the sinusoidal fitting curve, establish an installation error identification and separation model, and output the installation error. 6.根据权利要求1所述的一种球杆仪误差的修正方法,其特征在于,步骤S4中,所述热补偿方式为在球杆仪上安装温度控制器,所述温度控制器根据其测量获得的当前温度值与设定值之间的误差计算输出信号,启动加热或排风以保持球杆仪所处环境温度相对恒定。6. A ballbar error correction method according to claim 1, characterized in that, in step S4, the thermal compensation method is to install a temperature controller on the ballbar, and the temperature controller is based on its The error between the measured current temperature value and the set value is calculated to output a signal, and heating or exhaust is started to keep the ambient temperature of the ballbar relatively constant. 7.根据权利要求1所述的一种球杆仪误差的修正方法,其特征在于,步骤S4中,所述热补偿方式为在球杆仪上安装温度传感器,通过所述温度传感器测量得到的温度数据,结合金属材料的热膨胀系数,计算出由于热膨胀引起的长度变化,对球杆仪的实际测量结果进行修正。7. A ballbar error correction method according to claim 1, characterized in that, in step S4, the thermal compensation method is to install a temperature sensor on the ballbar, and measure the temperature obtained by the temperature sensor. The temperature data, combined with the thermal expansion coefficient of the metal material, is used to calculate the length change due to thermal expansion and correct the actual measurement results of the ballbar. 8.根据权利要求7所述的一种球杆仪误差的修正方法,其特征在于,步骤S4中,所述热补偿方式为根据球杆仪金属球和球杆在不同温度下的直径和长度的变化情况,计算温度补偿系数,基于所述温度补偿系数对球杆仪的实际测量结果进行修正。8. A ballbar error correction method according to claim 7, characterized in that, in step S4, the thermal compensation method is based on the diameter and length of the ballbar metal ball and the ball rod at different temperatures. changes, calculate the temperature compensation coefficient, and correct the actual measurement results of the ballbar based on the temperature compensation coefficient. 9.一种电子设备,包括存储器、处理器,以及存储于所述存储器中的程序,其特征在于,所述处理器执行所述程序时实现如权利要求1-8中任一所述的方法。9. An electronic device, including a memory, a processor, and a program stored in the memory, characterized in that when the processor executes the program, the method as claimed in any one of claims 1-8 is implemented. . 10.一种计算机可读存储介质,其上存储有计算机程序,其特征在于,所述程序被处理器执行时实现如权利要求1-8中任一所述的方法。10. A computer-readable storage medium with a computer program stored thereon, characterized in that when the program is executed by a processor, the method according to any one of claims 1-8 is implemented.
CN202311598488.8A 2023-11-27 2023-11-27 A ballbar error correction method, device and medium Pending CN117739891A (en)

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