CN117697973A - Wire net detection device, multi-wire cutting machine and wire net detection method - Google Patents

Abstract

The invention relates to the technical field of material processing, in particular to a wire mesh detection device, a multi-wire cutting machine and a wire mesh detection method. The wire net detection device comprises a detection mechanism group, wherein the detection mechanism group comprises a reciprocating movement mechanism and at least two sensors, the at least two sensors are connected with the reciprocating movement mechanism, the at least two sensors are arranged at intervals in the width direction of the wire net, and the sensors are used for detecting cutting lines of the wire net; the reciprocating mechanism is used for enabling at least two sensors to reciprocate parallel to the width direction of the wire mesh. At least two sensors complete one-time full-once movement, and one detection of the wire net can be completed. The single sensor is used for detection, and the moving distance of the single sensor at least needs to reach the width distance of the wire net, so that the wire net detection device has the advantages of being shorter in time when detecting one side of the wire net, reducing the influence of cutting fluid on the acquisition precision, and being high in timeliness and precision.

Description

Wire net detection device, multi-wire cutting machine and wire net detection method

Technical Field

The invention relates to the technical field of material processing, in particular to a wire mesh detection device, a multi-wire cutting machine and a wire mesh detection method.

Background

The multi-wire cutting machine is a novel cutting and processing device which can bring abrasive materials into a semiconductor processing area for grinding through high-speed reciprocating motion of metal wires and simultaneously cut hard and brittle materials such as semiconductors into a plurality of thin slices at one time. The multi-wire saw can be applied to slicing silicon rods.

In the slicing process of the silicon rod, pressure exists between the silicon rod and a wire mesh of the multi-wire cutting machine, so that a wire bow is formed, the quality of a silicon wafer can be influenced due to the fact that the wire bow is too large, and wire breakage can occur in severe cases. In addition, in the high-speed operation of the wire net, the wire net is influenced by various factors such as cutting environment, main rollers and the like, and jumpers possibly occur, and the quality of the silicon wafer can be influenced by the jumpers; moreover, if the manual intervention is not timely performed after the jumper wire occurs, the wire breakage can be caused. The broken wire can interrupt the slicing process of the silicon rod, so that the cutting efficiency is affected, the quality of the silicon wafer is reduced, and silicon loss is caused when the quality of the silicon wafer is serious.

In the prior art, the wire bow and the wire jumper can be found through manual inspection, and the problems of low efficiency, untimely and low precision exist through manual inspection. The wire bow and the wire jumper can also be detected by inspection equipment, but the wire bow and the wire jumper have the problems of poor timeliness and low precision.

Disclosure of Invention

In view of the above, the invention aims to provide a wire mesh detection device, a multi-wire cutting machine and a wire mesh detection method, so as to solve the problems of poor timeliness and low precision of the existing detection wire bow and jumper.

In order to achieve the above purpose, the technical scheme of the invention is realized as follows:

in a first aspect, an embodiment of the present invention provides a wire net detection device for use in a multi-wire saw, where the wire net detection device includes a detection mechanism set, where the detection mechanism set includes a reciprocating mechanism and at least two sensors, the at least two sensors are connected to the reciprocating mechanism, and the at least two sensors are arranged at intervals in a width direction of the wire net, and the sensors are used to detect a cutting line of the wire net; the reciprocating mechanism is used for enabling the at least two sensors to reciprocate parallel to the width direction of the wire mesh.

Optionally, the reciprocating mechanism comprises a guide rail, a sliding block and a driving assembly; the guide rail is arranged parallel to the width direction of the wire net; the sliding block is connected with the sensor and is slidably arranged on the guide rail; the driving assembly is connected with the sliding block and used for driving the sliding block to slide on the guide rail.

Optionally, the reciprocating mechanism further comprises a connecting piece; the guide rail is positioned at one side of the wire net; the connecting piece is connected with the sliding block and is close to the other opposite side of the wire mesh, the sliding block is connected with one sensor, and the connecting rod is connected with the other sensors.

Optionally, the distance between two adjacent sensors is the ratio of the width of the wire mesh to the number of sensors; when the moving distance of the at least two sensors along the same direction is the ratio of the width of the wire net to the number of the sensors, the moving range of the at least two sensors covers the width of the wire net.

In a second aspect, an embodiment of the present invention further provides a multi-wire saw, where the multi-wire saw includes an apparatus main body and a wire mesh detection device as described above, and the wire mesh detection device is disposed in the apparatus main body.

In a third aspect, an embodiment of the present invention further provides a wire mesh detection method, applied to a multi-wire saw, where at least two sensors are spaced apart in a wire mesh width direction, the wire mesh detection method includes:

before cutting starts, basic data of the multi-wire cutting machine are obtained, and the horizontal distance from a sensor to the axis of the main roller of the adjacent wire is obtained, wherein the initial height from the sensor to the cutting wire is obtained;

After cutting starts, at least two sensors move in the same direction at the same time;

the sensor sends a detection signal, receives a feedback signal reflected by the cutting line, and obtains the actual height from the sensor to the cutting line according to the feedback signal reflected by the cutting line;

and calculating the height of the wire bow according to the basic data, the horizontal distance from the sensor to the axis of the main roller of the adjacent wire, the initial height and the actual height.

Optionally, the basic data includes a horizontal distance from an axis of the adjacent wire main roll to a center of the wire mesh.

Optionally, in the step of calculating the height of the wire bow according to the basic data, the horizontal distance from the sensor to the axis of the main roll of the adjacent wire, the initial height and the actual height, the calculation formula of the height of the wire bow is: h=l2/l1× (H2-H1); wherein H is the height of a wire bow, and L2 is the horizontal distance from the axis of the adjacent wire main roller to the center of the wire net; l1 is the horizontal distance from the signal emitting port of the sensor to the axis of the main roll of the adjacent net wire; h2 is the actual height; h1 is the initial height.

Optionally, in the step of moving at least two sensors in the same direction at the same time after the start of cutting, when at least two sensors are at the optimal acquisition time, at least two sensors move in the same direction at the same time.

Optionally, after the step of calculating the height of the wire bow according to the basic data, the horizontal distance from the sensor to the axis of the main roll of the adjacent wire, the initial height and the actual height, the method further comprises: judging whether the height of the wire bow is larger than the preset wire bow height or not; and when the height of the wire bow is larger than the preset wire bow height, determining that the wire bow height is abnormal.

Optionally, the multi-wire saw further comprises a mounting plate, the surface of the mounting plate is connected with the piece to be cut, and the basic data further comprises the height H0 of the piece to be cut; the wire mesh detection method further comprises the following steps: acquiring the height H3 from the end surface of the piece to be cut, which is inserted into the wire mesh, to the cutting start position; calculating the depth delta H of the wire mesh cut into the mounting plate according to the formula delta H = H3-H0-H; wherein H is the height of a wire bow at the center of the wire mesh; judging whether the depth of the wire mesh cut into the mounting plate is greater than zero and smaller than a preset depth; and when the depth of the wire mesh cut into the mounting plate is greater than or equal to the preset depth, determining that the piece to be cut is cut through.

In a fourth aspect, an embodiment of the present invention further provides a wire net detection method, applied to a multi-wire saw, where at least two sensors are spaced apart in a width direction of a wire net, the wire net detection method includes:

Acquiring a theoretical distance between two adjacent cutting lines and a preset moving speed V1 of a reciprocating mechanism;

after cutting starts, at least two sensors move along the same initial direction at the same time;

the sensor sends a detection signal, receives a feedback signal reflected by the cutting line and acquires the interval time t1 of two adjacent feedback signals;

calculating the actual distance D1 between two adjacent cutting lines according to the formula D1=V1×t1;

calculating the difference value between the theoretical spacing and the actual spacing, and judging whether the difference value between the theoretical spacing and the actual spacing exceeds the allowable fluctuation tolerance range;

and when the difference between the theoretical spacing and the actual spacing exceeds the allowable fluctuation tolerance range, determining that the wire mesh is abnormal.

Optionally, when the difference between the theoretical pitch and the actual pitch exceeds the allowable fluctuation tolerance, the method further comprises the following steps:

in a preset time, the reciprocating mechanism enables the sensor to reciprocate at an abnormal position of the online network, and calculates an actual distance D1 between two adjacent cutting lines at the abnormal position;

if the difference between the actual distance D1 and the theoretical distance calculated in the preset time exceeds the fluctuation tolerance range, determining that the wire mesh is jumped.

Optionally, when the difference between the theoretical pitch and the actual pitch exceeds the allowable fluctuation tolerance, the method further comprises the following steps:

the timer starts to count;

judging whether the time of the timer is smaller than the preset time or not;

when the time of the timer is smaller than the preset time, the reciprocating movement mechanism enables the sensor to reciprocate at the abnormal position of the online network;

the sensor sends a detection signal, receives a feedback signal reflected by the cutting line and acquires the interval time t1 of two adjacent feedback signals;

calculating the actual distance D1 between two adjacent cutting lines according to the formula D1=V1×t1;

calculating the difference value between the theoretical spacing and the actual spacing, and judging whether the difference value between the theoretical spacing and the actual spacing exceeds the allowable fluctuation tolerance range;

when the difference value between the theoretical spacing and the actual spacing exceeds the allowable fluctuation tolerance range, determining that the wire net is abnormal, and continuing to count by a timer;

when the difference value between the theoretical spacing and the actual spacing is within the allowable fluctuation tolerance range, determining that the wire net is normal, stopping timing by the timer, and resetting the timing by the timer, wherein the reciprocating mechanism enables at least two sensors to continuously move along the initial direction;

And when the time of the timer is greater than or equal to the preset time, determining that the wire net generates the jumper.

The invention discloses a wire net detection device, wherein at least two sensors complete one-time full-once movement, so that one-time detection of a wire net can be completed. The wire net detection device has the advantages that the wire net detection device is shorter in time for detecting one side of the wire net, the wire net detection device can collect whole wire net data in the optimal collecting time, the influence of cutting fluid on collecting precision is reduced, and the wire net detection device has the advantages of being high in timeliness and high in precision.

The foregoing description is only an overview of the present invention, and is intended to be implemented in accordance with the teachings of the present invention in order that the same may be more clearly understood and to make the same and other objects, features and advantages of the present invention more readily apparent.

Drawings

In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments will be briefly described below.

FIG. 1 is a schematic diagram of a wire mesh detection device according to an embodiment of the present invention;

FIG. 2 is a schematic diagram of a second embodiment of a wire mesh detection device;

FIG. 3 is a schematic view of a reciprocating mechanism according to an embodiment of the present invention;

FIG. 4 is a schematic view of the working state of the sensor according to the embodiment of the present invention;

fig. 5 is a schematic view of a part of a multi-wire saw according to an embodiment of the present invention during operation;

fig. 6 is a schematic diagram of a part of a multi-wire saw in operation according to an embodiment of the present invention;

FIG. 7 is a schematic diagram illustrating the interval time between two adjacent feedback signals according to an embodiment of the present invention;

FIG. 8 is a flowchart of a method for detecting a net according to an embodiment of the present invention;

FIG. 9 is a flowchart of a method for detecting a net according to a second embodiment of the present invention;

FIG. 10 is a flowchart of a method for detecting a net according to a third embodiment of the present invention;

FIG. 11 is a flowchart of a method for detecting a net according to a fourth embodiment of the present invention.

Reference numerals illustrate:

10-a main roll of the net wire; 11-cutting lines; 12-a reciprocating mechanism; 13-a sensor; 14-a guide rail; 15-a drive assembly; 16-a connector; 17-a third wire main roll; 18-a piece to be cut; 19-wire mesh; 20-wire web laser beam; 21-a mounting plate; 22-a signal emitting port; 23-signal receiving port; 24-cutting start position; 25-slider.

Detailed Description

Exemplary embodiments of the present invention will be described in more detail below with reference to the accompanying drawings. While exemplary embodiments of the present invention are shown in the drawings, it should be understood that the present invention may be embodied in various forms and should not be limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the invention to those skilled in the art.

In the photovoltaic and semiconductor fields, wafer materials, such as silicon wafers and sapphire wafers, are often used, and are obtained by sawing a wafer rod through repeated movement of a cutting line 11 driven by a multi-wire sawing machine.

Referring to fig. 1, a schematic view of a portion of a multi-wire saw is shown. The multi-wire cutting machine comprises a cutting wire 11 and two wire main rollers 10, wherein the two wire main rollers 10 are arranged in parallel and at intervals, the cutting wire 11 is wound on the two wire main rollers 10 in a plurality of circles, the cutting wire 11 is arranged at intervals along the axial direction of the wire main rollers 10 and forms a wire net 19, and the part of the cutting wire 11 which is not contacted with the wire main rollers 10 and is tensioned and straightened by the two wire main rollers 10 is used for cutting a piece 18 to be cut.

Optionally, in an embodiment, referring to fig. 1, the multi-wire cutting machine further includes a third wire main roller 17, where the third wire main roller 17 and the two wire main rollers 10 are disposed in parallel and spaced apart, and the third wire main roller 17 and the two wire main rollers 10 are disposed in three edges of a triangular prism structure. The cutting line 11 is wound around the third wire main roller 17 and the two wire main rollers 10 in a plurality of turns.

Further, the multi-wire saw further includes a mounting plate 21 and a feeding device, and referring to fig. 6, the mounting plate 21 is connected to the workpiece 18, wherein the surface of the mounting plate 21 is connected to the workpiece 18. The feeding device is connected with the mounting plate 21, and drives the mounting plate 21 to move relative to the wire mesh 19 in the direction perpendicular to the interval arrangement direction of the two wire main rollers 10, namely, the feeding device drives the mounting plate 21 to move towards the wire mesh 19 in the positive direction of an arrow A, so that the workpiece 18 to be cut is driven to move into an interval area between the two wire main rollers 10, and the cutting line 11 between the wire main rollers 10 cuts the workpiece 18 to be cut.

The material of the mounting plate 21 is selected according to the requirement, for example, a resin plate is selected for the mounting plate 21. When the piece to be cut 18 is cut, the mounting plate 21 is partially cut by the cutting line 11.

In the process of moving the workpiece 18 to be cut into the spaced area of the wire main roller 10, contact pressure is generated between the workpiece 18 to be cut and the cutting line 11, and the cutting line 11 is driven by the wire main roller 10, so that the cutting line 11 gradually extends into the workpiece 18 to be cut by friction with the workpiece 18 to be cut until the workpiece 18 to be cut is cut into a plurality of wafers along the axial direction of the wire main roller 10.

When the multi-wire cutting machine cuts the workpiece 18 to be cut, cutting fluid is also used, and the cutting fluid can perform various functions such as lubrication, cooling, cleaning and maintenance, so that the cutting wire 11 can smoothly cut the workpiece 18 to be cut.

The cutting line 11 in the multi-wire cutting machine is selected according to the use requirement, which is not particularly limited in the embodiment of the present application. For example, the cutting line 11 is a diamond line.

Before cutting starts, the piece 18 to be cut is not contacted with the cutting line 11, at this time, the positions of the cutting lines 11 tensioned and straightened by the two main rolls 10 are initial positions, and the plurality of cutting lines 11 tensioned and straightened by the two main rolls 10 are all straight line segments which are parallel to each other and are distributed at intervals along the axial direction of the main rolls 10. After cutting starts, the feeding device drives the mounting plate 21 to drive the piece 18 to be cut to be in contact with the cutting line 11 at the initial position, in the process that the feeding device drives the mounting plate 21 to drive the piece 18 to be cut to be deep into the space between the two net wire main rollers 10, the cutting line 11 positioned between the two net wire main rollers 10 saw the piece 18 to be cut, and because pressure exists between the piece 18 to be cut and the cutting line 11, the cutting line 11 bends towards the area between the two net wire main rollers 10, the bending direction of the cutting line 11 is the same as the feeding direction of the piece 18 to be cut, and the deformation of the net 19 becomes a wire bow.

The multi-wire saw allows a slight bow when cutting the workpiece 18 to be cut, and when the bow is too large, a rough cut mark is easily formed on the section of the cut wafer, so that the quality of the silicon wafer is affected, when the bow is too large, the wire breakage occurs, the slicing process of the workpiece to be cut is interrupted, the cutting efficiency is affected, the quality of the silicon wafer is reduced, and when the bow is too large, the silicon wafer is damaged.

The embodiment of the invention discloses a wire net detection device, and referring to fig. 1, a schematic structural diagram of the wire net detection device provided by the embodiment of the invention is shown. The wire mesh detection device is applied to a multi-wire saw and can be used for detecting the state of the wire mesh 19. Such as wire bow, jumper, and cut through, of wire mesh 19.

Referring to FIG. 1, the width of wire web 19 refers to the total width of wire web 19 covered in the axial direction of wire main roll 10, as shown in the front-to-back direction of FIG. 1; the sensor 13 is used for detecting the cutting line of the wire mesh 19; the reciprocating mechanism 12 is used for reciprocating at least two sensors 13 parallel to the axial direction of the wire main roller 10, and when the moving distance of the at least two sensors 13 along the same direction is the ratio of the width of the wire net 19 to the number of the sensors 13, the full stroke moving range of the at least two sensors 13 can cover the width of the wire net 19. The width of wire net 19 is the coverage of wire net 19 in the axial direction of wire main roll 10, and referring specifically to fig. 1, the width of wire net 19 is the coverage of wire net 19 in the front-rear direction.

With further reference to fig. 1, a schematic structural view of two sensors 13 and a reciprocating mechanism 12 for a wire mesh 19 between a piece 18 to be cut and one wire main roll 10 is shown, i.e. the two sensors 13 and the reciprocating mechanism 12 are located between the piece 18 to be cut and the wire main roll 10 and on the left side of the piece 18 to be cut. Of course, in the wire detecting device, at least two sensors 13 and the reciprocating mechanism 12 may also be provided corresponding to the wire web 19 between the piece to be cut 18 and the other wire main roller 10, i.e., at least two sensors 13 and the reciprocating mechanism 12 are provided on the right side of the piece to be cut 18. In the wire net detecting device, it is also possible that at least two sensors 13 and a reciprocating mechanism 12 are used for corresponding to the wire net 19 between the piece to be cut 18 and one wire main roller 10, and at the same time, at least two sensors 13 and a reciprocating mechanism 12 are used for corresponding to the wire net 19 between the piece to be cut 18 and the other wire main roller 10, that is, at least two sensors 13 and a reciprocating mechanism 12 are provided on the left side and the right side of the piece to be cut 18, and at this time, the wire net detecting device includes at least four sensors 13.

The sensor 13 is used for detecting the wire of the wire web 19, in particular for transmitting a detection signal and receiving a feedback signal reflected by the wire 1. The mechanism of the sensor 13 in the embodiment of the present application is not particularly limited. For example, as shown with reference to fig. 4. The sensor 13 includes a signal emitting port 22 and a signal receiving port 23, the signal emitting port 22 of the sensor 13 is used for emitting a detection signal, and the signal receiving port 23 of the sensor 13 is used for receiving a feedback signal reflected by the cutting line 11. The paths of the detection signal emitted by the signal emitting port 22 and the feedback signal reflected by the cutting line 11 are also shown with reference to fig. 3.

In the wire net detection device of the embodiment of the application, at least two sensors 13 complete one-time full-single-pass movement, and one detection of the wire net 19 can be completed. The wire net detection device of the application is shorter when detecting one side of the wire net 19, the wire net detection device can collect data of the whole wire net 19 in the optimal collection time, influence of cutting fluid on collection precision is reduced, and the wire net detection device of the embodiment of the application has the advantages of high timeliness and high precision.

Further, taking the case that the sensor 13 is disposed at the left side of the workpiece 18 to be cut as an example, as shown in fig. 1 and 2, the optimal collection time of the sensor 13 means that when the wire main roller 10 rotates clockwise, the cutting wire 11 moves from one side of the workpiece 18 to the other side of the workpiece 18 to be cut, the reciprocating mechanism 12 disposed at one side of the workpiece 18 reciprocates at least two sensors 13 parallel to the axial direction of the wire main roller 10, and the sensors 13 send detection signals and receive feedback signals reflected by the cutting wire 11. In a specific embodiment, referring to fig. 2, when the cutting line 11 rotates clockwise, the flow of cutting fluid flows and splashes clockwise, at this time, the sensor 13 and the reciprocating mechanism 12 positioned on the left side of the workpiece 18 to be cut are started, and at the left side of the workpiece 18 to be cut, the air is basically free of splashed fluid and dust, so that the detection environment is good, the detection is started at this time, the time is good, and the sensor 13 is not easily affected by pollution of splashed fluid and dust. When the cutting line 11 rotates anticlockwise, the cutting fluid water flow also flows anticlockwise and is sputtered, at this time, the sensor 13 on the left side of the piece to be cut 18 is affected by the cutting fluid, the sensor 13 on the left side of the piece to be cut 18 stops working, and the sensor 13 on the left side of the piece to be cut 18 can be cleaned in time by means of blowing and the like before being started next time; when the sensor 13 is provided on the right side of the workpiece 18, the sensor 13 and the reciprocating mechanism 12 located on the right side of the workpiece 18 may be activated at this time. The wire mesh detection device completes the acquisition of the data of the whole wire mesh 19 in the optimal acquisition time, and can avoid the influence of the flowing and sputtering of cutting fluid in the reciprocating operation process of the multi-wire cutting machine on the detection precision of the sensor 13.

According to the above principle, the sensor 13 may also be disposed on the right side of the workpiece 18 to be cut, and the optimal acquisition time of the sensor 13 means that when the wire main roller 10 rotates counterclockwise, and when the wire main roller 10 rotates clockwise, the similar stop operation processing manner is adopted.

It will be appreciated that the sensor 13 in the embodiments of the present application is selected according to the needs of the application. For example, the sensor 13 is a point laser sensor which can measure the distance between the workpiece 18 to be cut and the probe of the point laser sensor, has an advantage of high accuracy, and is suitable for detecting the cutting line 11 having a small line.

Alternatively, the distance between two adjacent sensors 13 is the ratio of the width of the wire web 19 to the number of sensors 13; the moving range of the at least two sensors 13 covers the width of the wire net 19 when the moving distance of the at least two sensors 13 in the same direction is the ratio of the width of the wire net 19 to the number of the sensors 13. Obviously, the net inspection device of the present application is shorter to complete inspection of one side of net 19.

Optionally, the wire mesh detection device further comprises a controller, wherein the controller is connected with the sensor 13 and the reciprocating mechanism 12, and is used for controlling the sensor 13 to send detection signals and controlling the reciprocating mechanism 12 to move. And the controller can also detect the condition of wire web 19 based on the feedback signal reflected from wire 11 received by sensor 13. For example, the controller can detect wire bow, jumper, cut through status, etc. of wire mesh 19.

Alternatively, referring to FIG. 3, the shuttle 12 includes a guide rail 14, a slider 25, and a drive assembly 15; the guide rail 14 is arranged parallel to the width direction of the wire net 19; the sliding block 25 is connected with the sensor 13, and the sliding block 25 is slidably arranged on the guide rail 14; the driving assembly 15 is connected with the sliding block 25, and the driving assembly 15 is used for driving the sliding block 25 to slide on the guide rail 14. And the sliding block 25 drives the sensor 13 to move in the process of sliding on the guide rail 14.

Alternatively, the driving assembly 15 includes a driving motor and a screw, the driving motor is connected with a screw of the screw, a nut of the screw is connected with the slider 25, and the slider 25 is connected with the guide rail 14. The nut and slide 25 reciprocate along the guide rail 14 as the drive motor drives the screw in rotation.

Alternatively, the rail 14 is a linear rail 14. The linear guide rail 14 is used for high-precision or high-speed linear reciprocating motion occasions, can bear a certain torque, can realize high-precision linear motion under the condition of high load, and is suitable for the wire mesh detection device of the embodiment of the application.

Alternatively, the drive assembly 15 may be a linear motor drive.

Optionally, the reciprocating mechanism 12 further comprises a connecting member 16; the guide rail 14 is positioned at one side of the wire mesh 19; the connecting piece 16 is connected to the slider 25 and is close to the opposite side of the wire mesh 19, the slider 25 is connected to one sensor 13, and the connecting rod is connected to the remaining sensors 13.

In the above structure of the embodiment of the present application, when the reciprocating mechanism 12 makes the moving distance of the sensors 13 be the ratio of the width of the wire net 19 to the number of the sensors 13, at least two sensors 13 can complete one detection of the wire net 19. Therefore, when the slider 25 is connected to one sensor 13, the slider 25 needs a shorter moving range, the guide rail 14 can be set to one side of the wire net 19, so that the installation space occupied by the guide rail 14 and the slider 25 is saved, and the installation space occupied by the connecting piece 16 is smaller than the installation space occupied by the guide rail 14 and the slider 25, so that the space occupied by the wire net detecting device can be saved.

In the wire mesh detection device of the embodiment of the present application, as shown in fig. 1, two sensors 13 and a reciprocating mechanism 12 are disposed on the left side of a workpiece 18 to be cut. Wherein the guide rail 14 corresponds to the front half of the wire web 19 and the slider 25 reciprocates on the guide rail 14. The connecting piece 16 is located at the rear side of the slider 25, the connecting piece 16 is connected with the slider 25, the slider 25 is connected with one sensor 13, and the connecting piece 16 is connected with the other sensor 13.

When the cutting line 11 of the multi-wire cutting machine rotates clockwise, the cutting fluid water flow flows and splashes clockwise, and at the moment, the two sensors 13 and the reciprocating mechanism 12 positioned on the left side of the piece 18 to be cut are started. The driving assembly 15 drives the sliding block 25 to move upwards, the sliding block 25 drives the sensor 13 connected with the sliding block 25 and the connecting piece 16 to move upwards, and the connecting piece 16 drives the sensor 13 connected with the connecting piece 16 to move upwards. When the two sensors 13 move one half of the width of the net 19 in the front-rear direction, the data acquisition of the whole net 19 is completed, and the method has the advantage of high timeliness; and can avoid the influence of the detection precision of the sensor 13 caused by the flowing and sputtering of the cutting fluid in the reciprocating operation process of the multi-wire saw, and has the advantage of high precision.

The embodiment of the invention also discloses a multi-wire cutting machine, which comprises an equipment main body and the wire net detection device, wherein the wire net detection device is arranged in the equipment main body.

Because the wire mesh detection device has the advantages of high timeliness and high precision, the multi-wire cutting machine can timely find out the faults of the wire mesh 19, so that the cutting efficiency of the piece 18 to be cut and the quality of wafers can be ensured, and silicon loss is avoided.

The embodiment of the invention also discloses a wire net detection method, which is applied to the multi-wire cutting machine, at least two sensors 13 are arranged at intervals in the width direction of a wire net 19, and the wire net 19 between a piece 18 to be cut and a wire net main roller 10 corresponding to the at least two sensors 13 is taken as an example, the wire net detection method comprises the following steps, and referring to fig. 8:

s01, before cutting starts, basic data of the multi-wire cutting machine are acquired, the horizontal distance from the sensor 13 to the axis of the adjacent wire main roller 10 is acquired, and the initial height from the sensor 13 to the cutting wire 11 is acquired.

In this step, when used to calculate the height of the wire bow, the underlying data includes the horizontal distance of the axis of the adjacent wire main roll 10 to the center of wire mesh 19.

Taking any one of the sensors 13 on the left side of the workpiece 18 to be cut as an example, referring to fig. 1, the sensor 13 moves in the front-rear direction, and the left-right position is fixed by the restriction of the guide rail 14. When the position of the guide rail 14 is not adjusted, the left and right positions of the sensor 13 are kept unchanged, and the horizontal distance L1 of the signal emitting port 22 of the sensor 13 from the axis of the left wire main roller 10 can be measured. In practical use, as shown in fig. 5, the L1 can be manually measured after the guide rail 14 and the sensor 13 are mounted.

Before the start of the cut, the vertical initial height H1 of the signal emitting opening 22 thereof from the initial wire web 19 can be automatically measured by the sensor 13.

The distance between the two wire main rolls 10 is L0, and L0 can be measured after the two wire main rolls 10 are installed.

The diameter of the left wire main roll 10 is R1, the diameter of the right wire main roll 10 is R3, and the diameter of the wire main roll 10 is measured at the time of its processing.

The calculation formula of the horizontal distance from the axis of the left main roll 10 to the center of the wire 19 is:

L2＝(L0+(R1/2+R3/2))/2。

the horizontal distance from the axis of the adjacent wire main roll 10 to the center of the wire 19 can be calculated according to the above formula.

In this step, the signal emitting port 22 of the sensor 13 sends a detection signal to the wire net 19 at the initial position vertically, and at this time, the initial height from the sensor 13 to the cutting line 11 before the start of cutting is specifically the vertical height from the signal emitting port 22 of the sensor 13 to the initial wire net 19.

S02, after cutting starts, at least two sensors move in the same direction at the same time.

In this step, at least two of the sensors are simultaneously moved in the same direction when at least two of the sensors are at an optimal acquisition time.

Referring to fig. 5, when the cutting line 11 moves from the left wire main roller 10 to the right wire main roller 10, the cutting line 11 rotates clockwise, and the flow of cutting fluid flows and splashes clockwise, so that the sensor 13 positioned at the left side of the workpiece 18 to be cut is at the optimal acquisition time, and the detection precision of the sensor 13 positioned at the left side of the workpiece 18 to be cut is not affected due to the flowing and splashing of the cutting fluid in the running process of the multi-wire cutting machine.

When the cutting line 11 moves from the right net wire main roller 10 to the left net wire main roller 10, the cutting line 11 rotates anticlockwise, the cutting fluid flows and splashes anticlockwise, at this time, the sensor 13 positioned on the right side of the workpiece 18 to be cut is in the optimal acquisition time, and the reverse potential flow and the splash of the cutting fluid caused in the operation process of the multi-wire cutting machine can not influence the detection precision of the sensor 13 on the right side of the workpiece 18 to be cut.

S03, the sensor 13 sends a detection signal and receives a feedback signal reflected by the cutting line 11, and obtains the actual height from the sensor 13 to the cutting line 11 based on the feedback signal reflected by the cutting line 11.

When the detection signal sent by the sensor 13 irradiates the gap between two adjacent cutting lines 11, the sensor 13 will not receive the feedback signal.

In this step, the actual height of the sensor 13 to the cutting line 11 is obtained from the feedback signal reflected by the cutting line 11 as the actual height between the signal emitting port 22 of the sensor 13 and the cutting line 11.

Alternatively, in one embodiment, the sensor 13 is a spot laser sensor, and in this case, referring to fig. 4, the signal emitting port 22 of the spot laser sensor emits the wire-net laser beam 20 at a set frequency, for example, 1kHz. The wire net laser beam 20 emitted from the signal emitting port 22 is irradiated onto the cutting line 11, and at the same time, the signal receiving port 23 of the spot laser sensor receives the wire net laser beam 20 reflected from the cutting line 11 at a high speed; the point laser sensor can calculate the vertical distance of the cutting line 11 in the current wire web 19 from the sensor 13 based on the time difference between the emitted wire web laser beam 20 and the received wire web laser beam 20.

S04, calculating the height of the wire bow from the horizontal distance of the sensor 13 to the axis of the adjacent wire main roller 10, the initial height of the sensor 13 to the cutting wire 11 before the start of cutting, and the actual height of the sensor 13 to the cutting wire 11 measured by the sensor 13 after the start of cutting, based on the basic data of the multi-wire cutting machine.

In this step, the calculation formula of the height of the wire bow is:

H＝L2/L1×(H2－H1)；

where H is the height of the wire bow at the center of wire web 19 and L2 is the horizontal distance from the axis of wire main roll 10 adjacent sensor 13 to the center of wire web 19; l1 is the horizontal distance from the signal emitting port 22 of the sensor 13 to the axis of the adjacent wire main roller 10; h2 is the actual height from the signal emitting port 22 of the sensor 13 to the cutting line 11 measured by the sensor 13 after the cutting is started; h1 is the initial height of the signal emitting port 22 of the sensor 13 to the cutting line 11 before the start of cutting.

According to the wire mesh detection method, before cutting starts, the horizontal distance from the sensor 13 to the axis of the adjacent wire mesh main roller 10 and the initial height from the sensor 13 to the cutting line 11 are obtained by obtaining basic data of the multi-wire cutting machine; after cutting starts, at least two sensors move along the same direction at the same time; the sensor 13 sends a detection signal and receives a feedback signal reflected by the cutting line 11 in the moving process, and the actual height from the sensor 13 to the cutting line 11 is obtained according to the feedback signal reflected by the cutting line 11; the height of the wire bow is calculated from the horizontal distance of the sensor 13 to the axis of the adjacent wire main roll 10, the initial height of the sensor 13 to the cutting wire 11 before the start of cutting, and the actual height of the sensor 13 to the cutting wire 11 measured by the sensor 13 after the start of cutting, based on the basic data of the multi-wire saw. Only the actual height of the sensor 13 to the cutting line 11 need be measured when calculating the height of the wire bow, making the wire net detection method relatively simple. Moreover, when the reciprocating mechanism 12 is started and at least two sensors 13 move along the same direction at the same time, and the reciprocating mechanism 12 enables the moving distance of the sensors 13 to be the ratio of the width of the wire net 19 to the number of the sensors 13, the at least two sensors 13 can complete one-time detection of the wire net 19, the detection time is relatively short, the wire net detection device can complete the collection of the data of the whole wire net 19 in the optimal collection time, and the influence of cutting fluid on the collection precision is reduced, so that the device has the advantages of high timeliness and high precision.

Optionally, the wire mesh detection method of the embodiment of the application can also determine whether the wire bow is abnormal according to the height of the wire bow.

At this time, after the step of calculating the height of the wire bow from the basic data, the horizontal distance of the sensor to the axis of the adjacent wire main roller, the initial height, the actual height, the steps of referring to fig. 9 are further included as follows:

s05, judging whether the height of the wire bow is larger than the preset wire bow height.

In this step, the preset wire bow height is set according to the use requirements. For example, the preset wire bow height is a critical value that requires correction of the wire bow.

S06, when the height of the wire bow is larger than the preset wire bow height, determining that the wire bow height is abnormal.

In this step, there may be a variety of ways of processing after determining that the wire bow is abnormal in height. For example, alarm software may provide alarm prompts. For another example, a jump to a program preset by the user automatically corrects the wire bow. Even if necessary, the multi-wire cutting machine can be controlled to stop.

S07, when the height of the wire bow is smaller than or equal to the preset wire bow height, determining that the wire bow height is normal.

Optionally, the wire mesh detection method of the embodiment of the application can also be used for determining whether the piece to be cut is cut through.

At this time, the basic data also includes the height of the piece 18 to be cut. The height of the piece 18 to be cut can be obtained by measurement.

Further, the wire mesh detection method further includes the following steps, referring to fig. 10:

s08, the height H3 from the end surface of the piece 18 to be cut inserted into the wire net 19 to the cutting start position 24 is obtained.

In this step, the cutting start position 24 is a common position in a multi-wire saw, and the workpiece 18 to be cut is located at the cutting start position 24 to avoid contacting the cutting wire 11 when the workpiece 18 to be cut is not cut, thereby affecting the cutting effect of the workpiece 18 to be cut.

Further, the cutting start position 24 is set according to the requirement, which is not specifically limited in the embodiment of the present application.

S09, calculate the depth Δh of net 19 cut into mounting plate 21 according to the formula Δh=h3-h0-H; where ΔH is the depth of wire mesh 19 cut into mounting plate 21; h3 is the height from the lower surface of the piece 18 to be cut to the cutting start position 24, and H3 is automatically read by the system; h0 is the height of the piece 18 to be cut; h is the height of the wire bow at the center of wire mesh 19.

S10, judging whether the depth of the wire mesh 19 cut into the mounting plate 21 is larger than zero and smaller than a preset depth.

In this step, the preset depth is a numerical value set by the user.

S11, when the depth of the wire mesh 19 cut into the mounting plate 21 is greater than or equal to a preset depth, determining that the piece to be cut is cut through.

S12, when the depth of the wire mesh 19 cut into the mounting plate 21 is greater than zero and smaller than the preset depth, the cutting line 11 is determined to cut into the mounting plate 21, but the piece 18 to be cut is not cut through.

S13, when the depth of the wire mesh 19 cut into the mounting plate 21 is less than or equal to zero, the cutting line 11 does not cut into the mounting plate 21.

According to the wire mesh detection method, the height of the wire bow can be calculated efficiently and with high precision, whether the wire bow is abnormal or not is determined according to the height of the wire bow, and whether a piece to be cut is cut through or not is determined. So that the multi-wire cutting machine can timely and accurately detect the abnormality of the wire bow, take corresponding measures to remove the abnormality, and the like, ensure the cutting efficiency of the piece 18 to be cut, the quality of the wafer, and avoid silicon loss.

The embodiment of the invention also discloses another wire net detection method which is also applied to the multi-wire cutting machine, at least two sensors 13 are arranged at intervals in the width direction of a wire net 19, and the wire net detection method comprises the following steps, referring to FIG. 11:

s21, acquiring the theoretical distance between two adjacent cutting lines 11 and the preset moving speed of the reciprocating mechanism 12.

In this step, the theoretical spacing between two adjacent cutting lines 11 can be obtained from the groove spacing of the wire main roll 10. The preset moving speed of the reciprocating mechanism 12 is also set according to the use requirement.

S22, after the start of cutting, at least two sensors 13 are simultaneously moved in the same initial direction.

In this step, at least two of the sensors are simultaneously moved in the same initial direction when at least two of the sensors are at the optimal acquisition time

Referring to fig. 5, the cutting line 11 rotates clockwise, the water flow of the cutting fluid flows and sputters clockwise, and at this time, the sensor 13 located at the left side of the workpiece 18 to be cut is at the optimal collecting time, so that the flowing and sputters of the cutting fluid in the running process of the multi-wire cutting machine will not affect the detection accuracy of the sensor 13 located at the left side of the workpiece 18 to be cut.

When the cutting line 11 rotates anticlockwise, the cutting fluid water flows and splashes anticlockwise, at the moment, the sensor 13 positioned on the right side of the workpiece 18 to be cut is in the optimal acquisition time, and the reverse potential flow and the splash of the cutting fluid are caused in the operation process of the multi-wire cutting machine, so that the detection precision of the sensor 13 on the right side of the workpiece 18 to be cut is not affected.

S23, the sensor 13 sends a detection signal and receives a feedback signal reflected by the cutting line 11, and obtains an interval time between two adjacent feedback signals.

When the detection signal sent by the sensor 13 irradiates the gap between two adjacent cutting lines 11, the sensor 13 will not receive the feedback signal.

In this step, the interval time between the adjacent two feedback signals is the time during which the detection signal transmitted by the sensor 13 irradiates the gap between the adjacent two cutting lines 11, and the sensor 13 does not receive the duration of the feedback signal reflected by the cutting line 11.

Referring to fig. 7, the time interval between two adjacent feedback signals is longer than T1, or the time interval between two adjacent feedback signals is shorter than T1, both are abnormal states, i.e. both a and B in fig. 7 are abnormal time intervals.

S24, calculating the actual distance D1 between two adjacent cutting lines 11 according to the formula d1=v1×t1, where V1 is the preset moving speed of the reciprocating mechanism 12, and t1 is the interval time.

S25, calculating the difference value between the theoretical spacing and the actual spacing, and judging whether the difference value between the theoretical spacing and the actual spacing exceeds the allowable fluctuation tolerance range;

in this step, the allowable fluctuation tolerance range, which is a tolerance of fluctuation allowed by the gap between the adjacent two cutting lines 11, is set according to the use requirement.

S26, determining wire mesh abnormality when the difference between the theoretical spacing and the actual spacing exceeds the allowable fluctuation tolerance range.

S27, determining that the wire mesh 19 is normal when the difference between the theoretical spacing and the actual spacing is within the allowable fluctuation tolerance.

According to the wire mesh detection method, the theoretical distance between two adjacent cutting wires 11 and the preset moving speed of the reciprocating mechanism 12 are obtained; after the start of the cut, at least two sensors 13 are simultaneously moved in the same initial direction; meanwhile, the sensor 13 sends a detection signal and receives a feedback signal reflected by the cutting line 11, and obtains the interval time of two adjacent feedback signals; according to the formula d1=v1×t1, calculating the actual distance D1 between two adjacent cut lines 11; calculating the difference value between the theoretical spacing and the actual spacing, and judging whether the difference value between the theoretical spacing and the actual spacing exceeds the allowable fluctuation tolerance range; when the difference between the theoretical spacing and the actual spacing exceeds the allowable fluctuation tolerance, the wire net 19 is determined to be abnormal. The sensor 13 is only used for acquiring the interval time of two adjacent feedback signals, so that whether the network cable is abnormal or not can be determined, and the detection method for the network cable abnormality is relatively simple. Moreover, the reciprocating mechanism 12 is started and enables at least two sensors 13 to move along the same initial direction at the same time, at least two sensors 13 complete one-way movement once, one-time detection of the wire net 19 can be completed, the detection time is relatively short, the wire net detection device can complete data acquisition of the whole wire net 19 in the optimal acquisition time, and influence of cutting fluid on acquisition precision is reduced, so that the device has the advantages of high timeliness and high precision.

The instantaneous disturbance of wire web 19 can cause a change in the gap between adjacent cut lines 11, resulting in a difference between the theoretical and actual spacing that is outside of the allowable fluctuation tolerance. In order to avoid false alarms due to transient disturbances of net 19, after determining that net 19 is abnormal when the difference between the theoretical and actual pitches exceeds the allowable fluctuation tolerance, the steps of:

the reciprocating mechanism 12 makes the sensor 13 reciprocate at the abnormal position of the wire net 19 within the preset time, and calculates the actual distance D1 between two adjacent cutting lines 11 at the abnormal position;

if the difference between the actual distance D1 and the theoretical distance calculated in the preset time exceeds the fluctuation tolerance range, determining that the wire mesh is jumped.

Optionally, after determining that wire net 19 is abnormal when the difference between the theoretical pitch and the actual pitch exceeds the allowable fluctuation tolerance, the steps of:

s28, starting to count by a timer.

S29, judging whether the time of the timer is smaller than the preset time.

In this step, the preset time is set for the user.

S30, when the time of the timer is smaller than the preset time, the reciprocating mechanism 12 enables the sensor 13 to reciprocate at the abnormal position of the wire net 19.

In this step, the reciprocation mechanism 12 reciprocates the sensor 13 at the wire-net abnormal position to detect the abnormal position again.

S31, the sensor sends a detection signal, receives a feedback signal reflected by the cutting line, and acquires the interval time t1 of two adjacent feedback signals.

S32, calculating the actual distance D1 between two adjacent cutting lines according to the formula d1=v1×t1.

S33, calculating the difference value between the theoretical spacing and the actual spacing, and judging whether the difference value between the theoretical spacing and the actual spacing exceeds the allowable fluctuation tolerance range.

S34, when the difference between the theoretical spacing and the actual spacing exceeds the allowable fluctuation tolerance range, the wire mesh 19 is determined to be abnormal, and the timer continues to count.

S35, when the difference between the theoretical spacing and the actual spacing is within the allowable fluctuation tolerance range, the wire mesh 19 is determined to be normal, the timer stops timing, the timer is cleared, and the reciprocating mechanism 12 enables the at least two sensors 13 to continue to move along the initial direction.

S36, when the time of the timer is greater than or equal to the preset time, determining that the wire net generates the jumper.

The above steps of embodiments of the present application can avoid false alarms due to transient disturbances of net 19.

It is noted that relational terms such as first and second, and the like are used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Moreover, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising one … …" does not exclude the presence of other like elements in a process, method, article, or apparatus that comprises the element.

In this specification, each embodiment is described in a related manner, and identical and similar parts of each embodiment are all referred to each other, and each embodiment mainly describes differences from other embodiments. For embodiments of an apparatus, an electronic device, a computer-readable storage medium, and a computer program product containing instructions, the description is relatively simple, as it is substantially similar to method embodiments, with reference to the section of the method embodiments being relevant.

The foregoing description is only of the preferred embodiments of the present invention and is not intended to limit the scope of the present invention. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention are included in the protection scope of the present invention.

Claims (14)

1. The wire mesh detection device is used in a multi-wire cutting machine and is characterized by comprising a detection mechanism group, wherein the detection mechanism group comprises a reciprocating mechanism and at least two sensors, the at least two sensors are connected with the reciprocating mechanism, the at least two sensors are arranged at intervals in the width direction of the wire mesh, and the sensors are used for detecting cutting lines of the wire mesh;

The reciprocating mechanism is used for enabling the at least two sensors to reciprocate parallel to the width direction of the wire mesh.

2. The wire mesh inspection device of claim 1 wherein the shuttle mechanism comprises a rail, a slider, and a drive assembly; the guide rail is arranged parallel to the width direction of the wire net; the sliding block is connected with the sensor and is slidably arranged on the guide rail;

the driving assembly is connected with the sliding block and used for driving the sliding block to slide on the guide rail.

3. The wire mesh inspection device of claim 2 wherein the shuttle mechanism further comprises a connector; the guide rail is positioned at one side of the wire net; the connecting piece is connected with the sliding block and is close to the other opposite side of the wire mesh, the sliding block is connected with one sensor, and the connecting rod is connected with the other sensors.

4. The wire mesh detection device of claim 1, wherein a distance between two adjacent sensors is a ratio of a width of the wire mesh to the number of sensors; when the moving distance of the at least two sensors along the same direction is the ratio of the width of the wire net to the number of the sensors, the moving range of the at least two sensors covers the width of the wire net.

5. A multi-wire cutting machine, characterized by comprising an equipment main body and the wire net detection device according to any one of claims 1-4, wherein the wire net detection device is arranged in the equipment main body.

6. The wire net detection method is characterized by being applied to a multi-wire cutting machine, wherein at least two sensors are arranged at intervals in the width direction of a wire net, and the wire net detection method comprises the following steps:

before cutting starts, basic data of the multi-wire cutting machine are obtained, and the horizontal distance from a sensor to the axis of the main roller of the adjacent wire is obtained, wherein the initial height from the sensor to the cutting wire is obtained;

after cutting starts, the at least two sensors move in the same direction at the same time;

the sensor sends a detection signal, receives a feedback signal reflected by the cutting line, and obtains the actual height from the sensor to the cutting line according to the feedback signal reflected by the cutting line;

and calculating the height of the wire bow according to the basic data, the horizontal distance from the sensor to the axis of the main roller of the adjacent wire, the initial height and the actual height.

7. The wire net inspection method of claim 6, wherein the base data includes a horizontal distance from an axis of the adjacent wire main roll to a center of the wire net.

8. The wire net inspection method of claim 6, wherein in the step of calculating the height of the wire bow based on the basic data, the horizontal distance from the sensor to the axis of the adjacent wire main roll, the initial height, the actual height, the calculation formula of the height of the wire bow is:

H＝L2/L1×(H2－H1)；

wherein H is the height of a wire bow, and L2 is the horizontal distance from the axis of the adjacent wire main roller to the center of the wire net; l1 is the horizontal distance from the signal emitting port of the sensor to the axis of the main roll of the adjacent net wire; h2 is the actual height; h1 is the initial height.

9. The wire net inspection method of claim 6, wherein, after the start of the cutting, the at least two sensors are simultaneously moved in the same direction,

when the at least two sensors are at the optimal acquisition time, the at least two sensors move in the same direction at the same time.

10. The wire net inspection method of claim 6, further comprising, after the step of calculating the height of the wire bow based on the base data, the horizontal distance of the sensor to the axis of the adjacent wire main roll, the initial height, the actual height:

Judging whether the height of the wire bow is larger than the preset wire bow height or not;

and when the height of the wire bow is larger than the preset wire bow height, determining that the wire bow height is abnormal.

11. The wire mesh inspection method of claim 6, the multi-wire saw further comprising a mounting plate, a surface of the mounting plate being connected to the piece to be cut, wherein the base data further comprises a height H0 of the piece to be cut; the wire mesh detection method further comprises the following steps:

acquiring the height H3 from the end surface of the piece to be cut, which is inserted into the wire mesh, to the cutting start position;

calculating the depth delta H of the wire mesh cut into the mounting plate according to the formula delta H = H3-H0-H; wherein H is the height of a wire bow at the center of the wire mesh;

judging whether the depth of the wire mesh cut into the mounting plate is greater than zero and smaller than a preset depth;

and when the depth of the wire mesh cut into the mounting plate is greater than or equal to the preset depth, determining that the piece to be cut is cut through.

12. The wire net detection method is characterized by being applied to a multi-wire cutting machine, wherein at least two sensors are arranged at intervals in the width direction of a wire net, and the wire net detection method comprises the following steps:

acquiring a theoretical distance between two adjacent cutting lines and a preset moving speed V1 of a reciprocating mechanism;

After cutting starts, the at least two sensors move along the same initial direction at the same time;

the sensor sends a detection signal, receives a feedback signal reflected by the cutting line and acquires the interval time t1 of two adjacent feedback signals;

calculating the actual distance D1 between two adjacent cutting lines according to the formula D1=V1×t1;

calculating the difference value between the theoretical spacing and the actual spacing, and judging whether the difference value between the theoretical spacing and the actual spacing exceeds the allowable fluctuation tolerance range;

and when the difference between the theoretical spacing and the actual spacing exceeds the allowable fluctuation tolerance range, determining that the wire mesh is abnormal.

13. The wire net inspection method of claim 12, wherein after determining wire net anomalies when the difference between the theoretical spacing and the actual spacing exceeds the allowable fluctuation tolerance, further comprising the steps of:

in a preset time, the reciprocating mechanism enables the sensor to reciprocate at an abnormal position of the online network, and calculates an actual distance D1 between two adjacent cutting lines at the abnormal position;

if the difference between the actual distance D1 and the theoretical distance calculated in the preset time exceeds the fluctuation tolerance range, determining that the wire mesh is jumped.

14. The wire net inspection method of claim 12, wherein after determining wire net anomalies when the difference between the theoretical spacing and the actual spacing exceeds the allowable fluctuation tolerance, further comprising the steps of:

the timer starts to count;

judging whether the time of the timer is smaller than the preset time or not;

when the time of the timer is smaller than the preset time, the reciprocating movement mechanism enables the sensor to reciprocate at the abnormal position of the online network;

the sensor sends a detection signal, receives a feedback signal reflected by the cutting line and acquires the interval time t1 of two adjacent feedback signals;

calculating the actual distance D1 between two adjacent cutting lines according to the formula D1=V1×t1;

calculating the difference value between the theoretical spacing and the actual spacing, and judging whether the difference value between the theoretical spacing and the actual spacing exceeds the allowable fluctuation tolerance range;

when the difference value between the theoretical spacing and the actual spacing exceeds the allowable fluctuation tolerance range, determining that the wire net is abnormal, and continuing to count by a timer;

when the difference value between the theoretical spacing and the actual spacing is within the allowable fluctuation tolerance range, determining that the wire net is normal, stopping timing by the timer, and resetting the timing by the timer, wherein the reciprocating mechanism enables the at least two sensors to continuously move along the initial direction;

And when the time of the timer is greater than or equal to the preset time, determining that the wire net generates the jumper.