CN117677460A - 激光加工方法、光学片的制造方法及激光加工装置 - Google Patents

激光加工方法、光学片的制造方法及激光加工装置 Download PDF

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Publication number
CN117677460A
CN117677460A CN202280051459.7A CN202280051459A CN117677460A CN 117677460 A CN117677460 A CN 117677460A CN 202280051459 A CN202280051459 A CN 202280051459A CN 117677460 A CN117677460 A CN 117677460A
Authority
CN
China
Prior art keywords
sheet
laser
polygon scanner
regions
optical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202280051459.7A
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English (en)
Chinese (zh)
Inventor
若山峻哉
松尾直之
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nitto Denko Corp
Original Assignee
Nitto Denko Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nitto Denko Corp filed Critical Nitto Denko Corp
Publication of CN117677460A publication Critical patent/CN117677460A/zh
Pending legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B23K26/082—Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B23K26/083—Devices involving movement of the workpiece in at least one axial direction
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/352—Working by laser beam, e.g. welding, cutting or boring for surface treatment
    • B23K26/354—Working by laser beam, e.g. welding, cutting or boring for surface treatment by melting
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/12—Scanning systems using multifaceted mirrors

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • General Physics & Mathematics (AREA)
  • Laser Beam Processing (AREA)
CN202280051459.7A 2021-09-30 2022-09-07 激光加工方法、光学片的制造方法及激光加工装置 Pending CN117677460A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2021-162148 2021-09-30
JP2021162148 2021-09-30
PCT/JP2022/033602 WO2023053879A1 (ja) 2021-09-30 2022-09-07 レーザ加工方法、光学シートの製造方法およびレーザ加工装置

Publications (1)

Publication Number Publication Date
CN117677460A true CN117677460A (zh) 2024-03-08

Family

ID=85782395

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202280051459.7A Pending CN117677460A (zh) 2021-09-30 2022-09-07 激光加工方法、光学片的制造方法及激光加工装置

Country Status (5)

Country Link
JP (1) JPWO2023053879A1 (https=)
KR (1) KR20240066243A (https=)
CN (1) CN117677460A (https=)
TW (1) TW202320952A (https=)
WO (1) WO2023053879A1 (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN118091932A (zh) * 2024-04-28 2024-05-28 深圳活力激光技术有限公司 一种激光扫描装置

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5841102A (en) * 1996-11-08 1998-11-24 W. L. Gore & Associates, Inc. Multiple pulse space processing to enhance via entrance formation at 355 nm
JP2014048575A (ja) * 2012-09-03 2014-03-17 Opcell Co Ltd 薄膜に多数の微少孔を高速に作成する方法とそれを用いた装置
JP6422182B2 (ja) 2014-12-04 2018-11-14 大阪シーリング印刷株式会社 レーザー加工装置
WO2018066285A1 (ja) * 2016-10-04 2018-04-12 株式会社ニコン ビーム走査装置、パターン描画装置、およびパターン描画装置の精度検査方法
WO2018175193A2 (en) * 2017-03-22 2018-09-27 Corning Incorporated Methods of separating a glass web

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN118091932A (zh) * 2024-04-28 2024-05-28 深圳活力激光技术有限公司 一种激光扫描装置
CN118091932B (zh) * 2024-04-28 2024-06-28 深圳活力激光技术有限公司 一种激光扫描装置

Also Published As

Publication number Publication date
TW202320952A (zh) 2023-06-01
KR20240066243A (ko) 2024-05-14
WO2023053879A1 (ja) 2023-04-06
JPWO2023053879A1 (https=) 2023-04-06

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