CN117655513A - Laser processing device and laser adjustment method - Google Patents
Laser processing device and laser adjustment method Download PDFInfo
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- CN117655513A CN117655513A CN202311766585.3A CN202311766585A CN117655513A CN 117655513 A CN117655513 A CN 117655513A CN 202311766585 A CN202311766585 A CN 202311766585A CN 117655513 A CN117655513 A CN 117655513A
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Abstract
The application discloses a laser processing device and a laser adjusting method, wherein the laser processing device comprises a laser, a first dimming mechanism, a second adjusting mechanism and a controller, the laser is used for emitting laser beams, the first dimming mechanism comprises a first reflecting mirror component and a first four-quadrant sensor, and the second dimming mechanism comprises a second reflecting mirror component and a second four-quadrant sensor; the controller is electrically connected with the first four-quadrant sensor and the second four-quadrant sensor respectively, and is used for adjusting the position of the first reflecting mirror component based on the first coordinate detected by the first four-quadrant sensor to enable the first coordinate to be located in a first preset coordinate range, and is used for adjusting the position of the second reflecting mirror component based on the second coordinate detected by the second four-quadrant sensor to enable the second coordinate to be located in a second preset coordinate range. The laser automatic correction device can automatically correct the pointing stability and the position stability of laser so as to improve the machining precision of the whole machine.
Description
Technical Field
The application relates to the technical field of laser processing, in particular to a laser processing device and a laser adjusting method.
Background
With the continuous development of laser processing technology, the sharpest laser knife is deeply ploughed in the micro-nano processing field, the processing precision is higher and higher, and the requirements on the stability of an optical path and the stability of an incident angle of a transmission type device are higher and higher. For example, with an imaging objective, the imaging quality drops dramatically when the incident angle is shifted by 5mrad (milliradian) or when the incident point is shifted by 0.2mm (millimeter), and for planar lightwaves, there is a wavefront error when the angle varies by 0.1mrad, which produces an additional wavefront RMS. Such small magnitude angular resolutions often cannot be manually adjusted.
For high resolution laser processing devices, such as photolithography, drilling, exposure, etc., transmission optics are typically required to perform the processing steps based on optical imaging. The above-mentioned dimming precision problem exists, and in addition, the beam directivity of the laser is changed to a certain extent due to the fluctuation of the cavity temperature and the influence of the service life of the crystal. The directivity change and the superposition dimming error can cause further change of the processing precision and consistency, so that the laser processing equipment is difficult to accurately process for a long time, in a large range and with high consistency. Therefore, a module is needed to automatically correct the pointing stability and the position stability of the laser so as to improve the processing precision of the whole machine.
Disclosure of Invention
In order to overcome the problems of the prior art, a main object of the present application is to provide a laser processing apparatus capable of improving processing accuracy.
In order to achieve the above purpose, the present application specifically adopts the following technical scheme:
the application provides a laser processing device, laser processing device includes:
the laser is used for emitting laser beams;
the first dimming mechanism is arranged on the light path of the laser beam emitted by the laser, and comprises a first reflecting mirror component and a first four-quadrant sensor, wherein the first reflecting mirror component is used for adjusting first coordinates of the laser beam emitted by the laser, and the first four-quadrant sensor is used for detecting whether the first coordinates of the laser beam are in a first preset coordinate range;
the second dimming mechanism is arranged on a reflection light path of the first dimming mechanism, and comprises a second reflecting mirror assembly and a second four-quadrant sensor, wherein the second reflecting mirror assembly is used for adjusting second coordinates of laser beams emitted by the laser, and the second four-quadrant sensor is used for detecting whether the second coordinates of the laser beams are in a second preset coordinate range or not;
the controller is electrically connected with the first four-quadrant sensor and the second four-quadrant sensor respectively, and is used for adjusting the position of the first reflecting mirror component based on the first coordinate detected by the first four-quadrant sensor so that the first coordinate is located in a first preset coordinate range, and is used for adjusting the position of the second reflecting mirror component based on the second coordinate detected by the second four-quadrant sensor so that the second coordinate is located in a second preset coordinate range.
In some embodiments, the laser processing device further includes a first fixing base, the first mirror assembly includes a first piezoelectric screw and a first mirror, the first mirror is movably disposed on the first fixing base, the first piezoelectric screw is connected with the first mirror and is used for adjusting a position of the first mirror, and the first four-quadrant sensor is used for detecting a first coordinate of a laser beam reflected by the first mirror;
the controller is used for adjusting the displacement of the first piezoelectric screw based on the first coordinate detected by the first four-quadrant sensor so as to adjust the position of the first reflecting mirror, and the first coordinate is located in a first preset coordinate range.
In some embodiments, the first piezoelectric screws are provided in plurality, and at least one first piezoelectric screw is provided at each of two ends of the first reflecting mirror.
In some embodiments, the second mirror assembly includes a second piezoelectric screw and a second mirror, the second mirror is movably disposed on the first fixing seat, the second piezoelectric screw is connected with the second mirror, and is used for adjusting a position of the second mirror, and the second four-quadrant sensor is used for detecting a second coordinate of the laser beam reflected by the second mirror;
the controller is used for adjusting the displacement of the second piezoelectric screw based on the second coordinate detected by the second four-quadrant sensor so as to adjust the position of the second reflecting mirror, and the second coordinate is located in a second preset coordinate range.
In some embodiments, the first four-quadrant sensor is disposed on a transmission light path of the second mirror, and is configured to detect a first coordinate of the laser beam reflected by the first mirror based on the laser beam transmitted by the second mirror.
In some embodiments, the second piezoelectric screws are provided in plurality, and at least one second piezoelectric screw is provided at each of two ends of the second reflecting mirror.
In some embodiments, the laser processing device further includes a second fixing base, and the second reflecting mirror assembly further includes a fourth reflecting mirror, where the fourth reflecting mirror is disposed on the second fixing base, and is configured to reflect the laser beam reflected by the second reflecting mirror;
the second four-quadrant sensor is arranged on a transmission light path of the fourth reflector and is used for detecting second coordinates of the laser beam reflected by the second reflector based on the laser beam transmitted by the fourth reflector.
In some embodiments, the laser processing device further includes a second fixing base, and the second reflecting mirror assembly further includes a beam splitter, where the beam splitter is disposed on the second fixing base, and is configured to split the laser beam reflected by the second reflecting mirror;
the second four-quadrant sensor is arranged on a light splitting path of the spectroscope and is used for detecting second coordinates of the laser beam reflected by the second reflecting mirror based on the laser beam split by the spectroscope.
Correspondingly, the application also provides a laser adjusting method which is applied to the laser processing device according to any embodiment, and the laser adjusting method comprises the following steps:
detecting a first coordinate of the laser beam reflected by the first reflecting mirror assembly;
when the first coordinate is not in the first preset coordinate range, the position of the first reflecting mirror assembly is adjusted so that the first coordinate is in the first preset coordinate range;
detecting a second coordinate of the laser beam reflected by the second mirror assembly;
when the second coordinate is not in the second preset coordinate range, the position of the two-reflection dimming component is adjusted so that the second coordinate is in the second preset coordinate range.
In some embodiments, the detecting the first coordinate of the laser beam reflected by the first mirror assembly is specifically:
the first coordinate of the laser beam reflected by the first mirror assembly is detected by the first four-quadrant sensor based on the laser beam transmitted by the second mirror in the second mirror assembly.
In some embodiments, the adjusting the position of the first mirror assembly to position the first coordinate within a first predetermined coordinate range includes:
adjusting the displacement of a first piezoelectric screw connected with the first end of the first reflecting mirror to enable a first X coordinate of the first coordinate to be in a first preset X coordinate range;
and adjusting the displacement of a first piezoelectric screw connected with the second end of the first reflecting mirror to enable the first Y coordinate of the first coordinate to be in a first preset Y coordinate range.
In some embodiments, the detecting the second coordinate of the laser beam reflected by the second mirror assembly is specifically:
detecting a second coordinate of the laser beam reflected by the second mirror assembly by a second four-quadrant sensor based on the laser beam split by the beam splitter in the second mirror assembly; or (b)
The second coordinates of the laser beam reflected by the second mirror assembly are detected by a second four-quadrant sensor based on the laser beam transmitted by a fourth mirror in the second mirror assembly.
In some embodiments, adjusting the position of the two-reflection dimming component so that the second coordinate is within a second preset coordinate range includes:
adjusting the displacement of a second piezoelectric screw connected with the third end of the second reflecting mirror to enable a second X coordinate of the second coordinate to be in a second preset X coordinate range;
and adjusting the displacement of a second piezoelectric screw connected with the fourth end of the second reflecting mirror to enable a second Y coordinate of the second coordinate to be in a second preset Y coordinate range.
The laser processing device comprises a laser, a first dimming mechanism, a second dimming mechanism and a controller, wherein the first dimming mechanism comprises a first reflecting mirror component and a first four-quadrant sensor, the second dimming mechanism comprises a second reflecting mirror component and a second four-quadrant sensor, when dimming, the first coordinate of a laser beam emitted by the laser is detected through the first four-quadrant sensor, the second coordinate of the laser beam emitted by the laser is detected through the second four-quadrant sensor, the first reflecting mirror component and the second reflecting mirror component are adjusted through the controller based on detection results of the first four-quadrant sensor and the second four-quadrant sensor, the first coordinate is in a first preset coordinate range, the second coordinate is in a second preset coordinate range, and therefore automatic correction of pointing stability and position stability of laser is achieved, and processing accuracy of the whole laser is improved.
Drawings
Fig. 1 is a schematic structural diagram of a laser processing apparatus according to an embodiment of the present application.
Fig. 2 is a perspective view of a first mirror assembly and a second mirror assembly provided in an embodiment of the present application.
Fig. 3 is a schematic structural diagram of a first four-quadrant sensor according to an embodiment of the present application.
Fig. 4 is a flowchart of a laser adjustment method according to an embodiment of the present application.
Fig. 5 is another flowchart of a laser adjustment method according to an embodiment of the present application.
The attached drawings are identified:
1. a first dimming mechanism; 11. a first mirror assembly; 111. a first mirror; 111a, a first end; 111b, a second end; 112. a first piezoelectric screw; 113. a first frame; 12. a first four-quadrant sensor; 2. a second dimming mechanism; 21. a second mirror assembly; 211. a second mirror; 211a, a third end; 211b, fourth end; 212. a second piezoelectric screw; 213. a beam splitter; 214. a second frame; 22. a second four-quadrant sensor; 3. a third dimming mechanism; 4. a first fixing seat; 5. the second fixing seat; 6. a third fixing seat; 7. a laser; 100. a working table.
Detailed Description
In order to make the objects, technical solutions and advantages of the present application more apparent, the present application will be further described in detail with reference to the accompanying drawings and examples. It should be understood that the specific embodiments described herein are for purposes of illustration only and are not intended to limit the present application.
In the description of the present application, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying relative importance unless explicitly specified or limited otherwise; the term "plurality" means two or more, and the term "plurality" means two or more, unless specified or indicated otherwise; the terms "connected," "secured," and the like are to be construed broadly, and may be, for example, fixedly connected, detachably connected, integrally connected, or electrically connected; can be directly connected or indirectly connected through an intermediate medium. The specific meaning of the terms in this application will be understood by those of ordinary skill in the art as the case may be.
In the description of the present application, it should be understood that the terms "upper," "lower," and the like in the embodiments of the present application are described in terms of angles shown in the accompanying drawings, and should not be construed as limiting the embodiments of the present application. In the context of this document, it will also be understood that when an element is referred to as being "on" or "under" another element, it can be directly on the other element or be indirectly on the other element through intervening elements.
Referring to fig. 1 to 3, for the problems of difficult and frequent dimming and difficult high-precision reproduction of the existing laser processing equipment using optical imaging as a principle, a device is needed to precisely adjust the light path beam directivity of the processing equipment to achieve long-time reproducible dimming so as to solve the problems, and the existing automatic calibration device on the market has the problems of small adjustment range, large occupied space and difficult integration. The embodiment of the application discloses a laser processing device, can be applied to fields such as PCB board drilling and cutting for to place in the PCB board of workstation 100 and process. The laser processing device comprises a laser 7, a first dimming mechanism 1, a second dimming mechanism 2, a third dimming mechanism 3 and a controller, wherein the laser 7 is used for emitting laser beams which can be ultraviolet light or infrared light, and the wavelength of the laser beams is 190-1100 nm. The third dimming mechanism 3, the first dimming mechanism 1 and the second dimming mechanism 2 are respectively and sequentially arranged on the outgoing light path of the laser beam of the laser 7, and the controller is respectively and electrically connected with the first dimming mechanism 1 and the second dimming mechanism 2. The third dimming mechanism 3 is used for reflecting the laser beam emitted by the laser 7 to the first dimming mechanism 1, and the first dimming mechanism 1 is used for adjusting the first coordinate of the laser beam and reflecting the first coordinate to the second dimming mechanism 2 so that the first coordinate of the laser beam is within a first preset coordinate range; the second dimming mechanism 2 is configured to adjust a second coordinate of the laser beam, so that the second coordinate of the laser beam is within a second preset range, and the laser beam can be directed to the target position according to a preset incident angle. The controller is used for controlling the displacement of the first dimming mechanism 1 and the second dimming mechanism 2, so that the adjustment of the first coordinate and the second coordinate of the laser beam, namely, the adjustment of the directivity of the laser beam is realized. The embodiment can automatically correct the pointing stability and the position stability of the laser, thereby improving the processing precision of the whole machine.
The laser processing device further comprises a first fixing seat 4, a second fixing seat 5 and a third fixing seat 6, the first adjusting mechanism comprises a first reflecting mirror assembly 11 and a first four-quadrant sensor 12, and the second dimming mechanism 2 comprises a second reflecting mirror assembly 21 and a second four-quadrant sensor 22. The third dimming mechanism 3 is mounted on the third fixing base 6, and is configured to reflect the laser beam emitted by the laser 7 to the first mirror assembly 11. The first mirror assembly 11 is disposed on the first fixing base 4, and is used for adjusting the first coordinate of the laser beam reflected by the third light modulation mechanism 3 and reflecting the first coordinate to the second mirror assembly 21, and the first four-quadrant sensor 12 is used for detecting whether the first coordinate of the laser beam is within a first preset range. The second mirror assembly 21 is disposed on the first fixing base 4 and the second fixing base 5, and is used for adjusting the second coordinate of the laser beam reflected by the first mirror assembly 11 and reflecting the second coordinate, and the second four-quadrant sensor 22 is used for detecting whether the second coordinate of the laser beam is within a second preset range. The controller is electrically connected to the first four-quadrant sensor 12 and the second four-quadrant sensor 22, respectively, for adjusting the position of the first mirror assembly 11 based on the first coordinates detected by the first four-quadrant sensor 12 such that the first coordinates are within a first predetermined coordinate range, and for adjusting the position of the second mirror assembly 21 based on the second coordinates detected by the second four-quadrant sensor 22 such that the second coordinates are within a second predetermined coordinate range.
The third dimming mechanism 3 comprises a third mirror bracket and a third reflecting mirror, the third mirror bracket is arranged on the third fixing seat 6, and the third reflecting mirror is arranged on the third mirror bracket. The first reflecting mirror assembly 11 comprises a first reflecting mirror 111, a first piezoelectric screw 112 and a first mirror bracket 113, wherein the first mirror bracket 113 is arranged on the first fixing seat 4, the first reflecting mirror 111 is movably arranged on the first mirror bracket 113, and the first piezoelectric screw 112 is movably arranged on the first mirror bracket 113 and connected with the first reflecting mirror 111 for adjusting the position of the first reflecting mirror 111. The first four-quadrant sensor 12 is configured to detect a first coordinate of the laser beam reflected by the first mirror 111. The controller is configured to adjust the displacement of the first piezoelectric screw 112 based on the first coordinate detected by the first four-quadrant sensor 12 to adjust the position of the first mirror 111 such that the first coordinate is within a preset range.
The second mirror assembly 21 includes a second mirror 211, a beam splitter 213, a second piezoelectric screw 212, a second mirror holder 214, and a fourth mirror holder, where the second mirror holder 214 is disposed on the first fixing base 4, the fourth mirror holder is disposed on the second fixing base 5, the second mirror 211 is movably disposed on the second mirror holder 214, and the second piezoelectric screw 212 is movably disposed on the second mirror holder 214 and connected with the second mirror 211 for adjusting a position of the second mirror 211. The beam splitter 213 is disposed on the fourth frame, and the second four-quadrant sensor 22 is used for detecting the second coordinate of the laser beam reflected by the second mirror 211. The controller is configured to adjust the displacement of the second piezoelectric screw 212 based on the second coordinate detected by the second four-quadrant sensor 22 to adjust the position of the second mirror 211 such that the second coordinate is within a second preset coordinate range. The initial states of the first reflecting mirror 111 and the second reflecting mirror 211 are both 45 degrees with the horizontal plane, so that the collimation of the light beam is ensured, and the piezoelectric screw can be replaced by a piezoelectric deflection mirror.
Specifically, the first four-quadrant sensor 12 is disposed on the transmission light path of the second mirror 211, and the second four-quadrant sensor 22 is disposed on the spectroscopic light path of the spectroscope 213. During laser processing, the laser 7 emits a laser beam, the laser beam is reflected by the third mirror to the first mirror 111, then reflected by the first mirror 111 to the second mirror 211, then reflected by the second mirror 211 to the beam splitter 213, and then the laser beam for processing is split by the beam splitter 213. When adjusting the coordinates of the laser beam, the first four-quadrant sensor 12 detects the first coordinates of the laser beam reflected by the first mirror 111 based on the laser beam transmitted by the second mirror 211, and when the first coordinates are out of a first preset coordinate range, the controller controls the first piezoelectric screw 112 to move so as to drive the first mirror 111 to move, thereby adjusting the first coordinates of the laser beam reflected by the first mirror 111 to be located within the first preset sitting range. The second four-quadrant sensor 22 detects the second coordinate of the laser beam reflected by the second mirror 211 based on the laser beam split by the beam splitter 213, and when the second coordinate is out of the second preset coordinate range, the controller controls the second piezoelectric screw 212 to move so as to drive the second mirror 211 to move, thereby adjusting the second coordinate of the laser beam reflected by the second mirror 211 to be located in the first preset sitting range.
In the prior art, the deflection degree of freedom of the reflecting mirror is regulated by adopting a traditional mechanical hand regulating screw, the regulating mode is manual operation, the efficiency is low, the deflection degree of freedom of the reflecting mirror is regulated by adopting a piezoelectric screw in the embodiment, the regulating mode is automatic, the efficiency is high, and the regulating precision is high. Meanwhile, the distance between the first four-quadrant sensor 12 and the first reflecting mirror 111 is less than or equal to 200mm, and the distance between the second four-quadrant sensor 22 and the second reflecting mirror 211 is less than or equal to 1000mm, so that wide-range and high-precision dimming is ensured. Specifically, since the receiving range of the four-quadrant sensor can be converted into a deflection angle value of the laser beam, the distance between the first four-quadrant sensor 12 and the first mirror 111 and the distance between the second four-quadrant sensor 22 and the second mirror 211 can be adjusted by the formula w=arctan (Z/L), where W is the deflection angle value of the laser beam, Z is a spatial X coordinate value or Y coordinate value read by the four-quadrant sensor, and L is the distance between the four-quadrant sensor and the mirror.
In addition, the pointing of the reflective detection beam is usually needed in the prior art, which requires a large space and is not easy to integrate, and the pointing of the transmissive detection beam is adopted in the present application, so that the four-quadrant sensor can be located at the rear side of the spectroscope 213 or the reflecting mirror, so as to realize compact and easy integration of the device.
Further, the first piezoelectric screw 112 and the second piezoelectric screw 212 are provided in plurality, the first mirror 111 has a first end 111a and a second end 111b, the second mirror 211 has a third end 211a and a fourth end 211b, at least one first piezoelectric screw 112 is connected to the first end 111a and the second end 111b of the first mirror 111, and at least one second piezoelectric screw 212 is connected to the third end 211a and the fourth end 211b of the second mirror 211. In adjusting the coordinates of the laser beam, the X-axis coordinates of the first coordinates can be adjusted by adjusting the displacement of the first piezoelectric screw 112 connected to the first end 111a of the first mirror 111, and the Y-axis coordinates of the first coordinates can be adjusted by adjusting the displacement of the first piezoelectric screw 112 connected to the second end 111b of the first mirror 111; the X-axis coordinate of the second coordinate can be adjusted by adjusting the displacement of the second piezoelectric screw 212 connected to the third end 211a of the second mirror 211, and the Y-axis coordinate of the second coordinate can be adjusted by adjusting the displacement of the second piezoelectric screw 212 connected to the second end 111b of the second mirror 211.
In some embodiments, the second mirror assembly 21 may also include a second mirror 211, a fourth mirror, a second piezoelectric screw 212, a second mirror holder 214, and a fourth mirror holder, where the second mirror holder 214 is disposed on the first fixing base 4, the fourth mirror holder is disposed on the second fixing base 5, the second mirror 211 is movably disposed on the second mirror holder 214, the second piezoelectric screw 212 is movably disposed on the second mirror holder 214 and connected to the second mirror 211, for adjusting a position of the second mirror 211, and the fourth mirror is disposed on the fourth mirror holder. The second four-quadrant sensor 22 is disposed on the transmission light path of the fourth mirror, and is configured to detect the second coordinate of the laser beam reflected by the second mirror 211. When adjusting the second coordinate of the laser beam, the second four-quadrant sensor 22 detects the second coordinate of the laser beam reflected by the second mirror 211 based on the laser beam transmitted by the fourth mirror, and when the second coordinate is out of the second preset coordinate range, the controller controls the displacement of the second piezoelectric screw 212 connected to the third end 211a of the second mirror 211 to adjust the X-axis coordinate of the second coordinate, while the controller also controls the displacement of the second piezoelectric screw 212 connected to the fourth end 211b of the second mirror 211 to adjust the Y-axis coordinate of the second coordinate so that the second coordinate is within the second preset range.
The embodiment has the following technical effects that a, the high-precision beam positioning and calibration are realized, the micro displacement of an optical element is realized through a piezoelectric screw technology, and the position change of a laser beam in four quadrants is accurately measured through a four-quadrant sensor, so that the position positioning and calibration of the beam can reach the level of ten micrometers/mu rad, and the high-precision beam control and calibration capability is provided; b. the automatic optical adjustment is realized, the position of the optical element can be automatically identified and adjusted based on the real-time feedback of the four-quadrant sensor, so that the stable and accurate transmission path of the light beam is maintained, the requirement of manual adjustment is greatly reduced, and the production efficiency and the operation simplicity are improved; c. and (3) micro-feature processing: in the fields of PCB manufacture, microelectronic manufacture and the like, the processing requirements of micro features of 30-70 mu m are very strict, and the high-precision and automatic correction capability of the embodiment ensures that the micro features are processed more accurately and reliably, thereby improving the product quality and the production yield; d. the production efficiency is improved, and the embodiment can be rapidly adapted to different working conditions through automatic light beam calibration and position adjustment, so that the downtime in production is reduced, the production efficiency is obviously improved, and the production cost is reduced; e. the cost is saved, a large amount of manual intervention and equipment adjustment are needed for traditional light beam calibration, time and resources are consumed, the automation characteristic of the embodiment reduces the labor cost, and meanwhile, unnecessary equipment maintenance and debugging cost is reduced; f. while the compact design, the traditional reflective detection method requires additional components and space in the light path, resulting in a larger overall system, the transmissive design of the present embodiment allows the detection device to be closely placed in the light path, minimizing the volume of the system, making it more compact; g. while the integration is easy, the conventional reflective detection method may be difficult when integrated into the existing system, and the optical path and structure need to be redesigned, the embodiment is based on the transmission design, and the detection device is relatively simple to add and can be more easily integrated into various optical systems.
Correspondingly, as shown in fig. 4, the embodiment of the present application also discloses a laser adjustment method, where the laser adjustment method is applied to the laser processing apparatus described in the above embodiment, and the laser adjustment method includes the following steps:
s11, detecting first coordinates of the laser beam reflected by the first reflecting mirror assembly.
Specifically, the first coordinate of the laser beam reflected by the first mirror assembly 11 may be detected by the first four-quadrant sensor 12 based on the laser beam transmitted by the second mirror 211 in the second mirror assembly 21.
And S12, when the first coordinate is not in the first preset coordinate range, adjusting the position of the first reflecting mirror assembly to enable the first coordinate to be in the first preset coordinate range.
Specifically, when the first coordinate is not within the first preset coordinate range, the displacement of the first piezoelectric screw 112 connected to the first end 111a of the first mirror 111 is adjusted so that the first X coordinate of the first coordinate is within the first preset X coordinate range; and adjusts the displacement of the first piezoelectric screw 112 connected to the second end 111b of the first mirror 111 such that the first Y-coordinate of the first coordinate is within a first preset Y-coordinate range, thereby locating the first coordinate within the first preset range.
S13, detecting second coordinates of the laser beam reflected by the second reflecting mirror assembly.
Specifically, when the second mirror assembly 21 includes the beam splitter 213, the second coordinates of the laser beam reflected by the second mirror assembly 21 can be detected by the second four-quadrant sensor 22 based on the laser beam split by the beam splitter 213 in the second mirror assembly 21. Or when the second mirror assembly 21 includes the fourth mirror, the second coordinates of the laser beam reflected by the second mirror assembly 21 may be detected by the second four-quadrant sensor 22 based on the laser beam transmitted by the fourth mirror in the second mirror assembly 21.
And S14, when the second coordinate is not in the second preset range, the second coordinate is positioned in the second preset coordinate range by adjusting the position of the second reflecting mirror assembly.
Specifically, when the second coordinate is not within the second preset range, the displacement of the second piezoelectric screw 212 connected to the third end 211a of the second mirror 211 may be adjusted so that the second X coordinate of the second coordinate is within the second preset X coordinate range; and adjusts the displacement of the second piezoelectric screw 212 connected to the fourth end 211b of the second mirror 211 such that the second Y-coordinate of the second coordinate is within a second preset Y-coordinate range, thereby locating the second coordinate within the second coordinate range.
Referring to fig. 5, the laser adjustment method specifically includes the steps of:
s101, judging whether a first X coordinate in first coordinates of the laser beam is in a first preset X coordinate range, if so, executing a step S103, and if not, executing a step S102.
S102, adjusting the displacement of a first piezoelectric screw connected with the first end of the first reflector to adjust the position of the first reflector, and then continuing to step S101.
S103, judging whether a first Y coordinate in the first coordinates of the laser beam is in a first preset Y coordinate range, if so, executing a step S105, and if not, executing a step S104.
S104, adjusting the displacement of a first piezoelectric screw connected with the second end of the first reflector to adjust the position of the first reflector, and then continuing to step S103.
S105, judging whether a second X coordinate in the second coordinate of the laser beam is in a second preset X coordinate range, if so, performing step S107, and if not, performing step S106.
And S106, adjusting the displacement of a second piezoelectric screw connected with the third end of the second reflector to adjust the position of the second reflector, and then continuing to step S105.
And S107, judging whether a second Y coordinate in the second coordinates of the laser beam is in a second preset Y coordinate range, finishing adjustment when the judgment result is yes, and performing step S108 when the judgment result is no.
And S108, adjusting the displacement of a second piezoelectric screw connected with the fourth end of the second reflector to adjust the position of the second reflector, and then continuing to step S107.
According to the embodiment, the position of the reflecting mirror is adjusted through the high-resolution piezoelectric screw, and the coordinates of the laser beam are fed back in real time through the four-quadrant sensor, so that automatic position calibration and angle calibration of the laser beam are realized, the incident angle stability of the beam is ensured, and the processing precision and stability of the laser processing device are improved.
The foregoing is merely a preferred embodiment of the present application, but the scope of the present application is not limited thereto, and any changes or substitutions easily contemplated by those skilled in the art within the technical scope of the present application should be covered by the scope of the present application. Therefore, the protection scope of the present application shall be subject to the protection scope of the claims.
Claims (13)
1. A laser processing apparatus, comprising:
the laser is used for emitting laser beams;
the first dimming mechanism is arranged on the light path of the laser beam emitted by the laser, and comprises a first reflecting mirror component and a first four-quadrant sensor, wherein the first reflecting mirror component is used for adjusting first coordinates of the laser beam emitted by the laser, and the first four-quadrant sensor is used for detecting whether the first coordinates of the laser beam are in a first preset coordinate range;
the second dimming mechanism is arranged on a reflection light path of the first dimming mechanism, and comprises a second reflecting mirror assembly and a second four-quadrant sensor, wherein the second reflecting mirror assembly is used for adjusting second coordinates of laser beams emitted by the laser, and the second four-quadrant sensor is used for detecting whether the second coordinates of the laser beams are in a second preset coordinate range or not;
the controller is electrically connected with the first four-quadrant sensor and the second four-quadrant sensor respectively, and is used for adjusting the position of the first reflecting mirror component based on the first coordinate detected by the first four-quadrant sensor so that the first coordinate is located in a first preset coordinate range, and is used for adjusting the position of the second reflecting mirror component based on the second coordinate detected by the second four-quadrant sensor so that the second coordinate is located in a second preset coordinate range.
2. The laser machining device of claim 1, further comprising a first mount, the first mirror assembly comprising a first piezoelectric screw and a first mirror, the first mirror movably disposed on the first mount, the first piezoelectric screw coupled to the first mirror for adjusting a position of the first mirror, the first four-quadrant sensor for detecting a first coordinate of a laser beam reflected by the first mirror;
the controller is used for adjusting the displacement of the first piezoelectric screw based on the first coordinate detected by the first four-quadrant sensor so as to adjust the position of the first reflecting mirror, and the first coordinate is located in a first preset coordinate range.
3. The laser processing apparatus according to claim 2, wherein a plurality of the first piezoelectric screws are provided, and both ends of the first reflecting mirror are provided with at least one of the first piezoelectric screws, respectively.
4. A laser processing apparatus according to claim 2 or 3, wherein the second mirror assembly comprises a second piezoelectric screw and a second mirror, the second mirror is movably disposed on the first fixing base, the second piezoelectric screw is connected to the second mirror for adjusting a position of the second mirror, and the second four-quadrant sensor is used for detecting a second coordinate of the laser beam reflected by the second mirror;
the controller is used for adjusting the displacement of the second piezoelectric screw based on the second coordinate detected by the second four-quadrant sensor so as to adjust the position of the second reflecting mirror, and the second coordinate is located in a second preset coordinate range.
5. The laser processing apparatus according to claim 4, wherein the first four-quadrant sensor is disposed on a transmission optical path of the second mirror for detecting a first coordinate of the laser beam reflected by the first mirror based on the laser beam transmitted by the second mirror.
6. The laser processing apparatus according to claim 4, wherein a plurality of the second piezoelectric screws are provided, and at least one of the second piezoelectric screws is provided at each of both ends of the second reflecting mirror.
7. The laser processing device of claim 4, further comprising a second mount, the second mirror assembly further comprising a fourth mirror disposed on the second mount for reflecting the laser beam reflected from the second mirror;
the second four-quadrant sensor is arranged on a transmission light path of the fourth reflector and is used for detecting second coordinates of the laser beam reflected by the second reflector based on the laser beam transmitted by the fourth reflector.
8. The laser processing device of claim 4, further comprising a second mount, wherein the second mirror assembly further comprises a beam splitter, the beam splitter being disposed on the second mount for splitting the laser beam reflected by the second mirror;
the second four-quadrant sensor is arranged on a light splitting path of the spectroscope and is used for detecting second coordinates of the laser beam reflected by the second reflecting mirror based on the laser beam split by the spectroscope.
9. A laser adjustment method applied to the laser processing apparatus according to any one of claims 1 to 8, comprising:
detecting a first coordinate of the laser beam reflected by the first reflecting mirror assembly;
when the first coordinate is not in the first preset coordinate range, the position of the first reflecting mirror assembly is adjusted so that the first coordinate is in the first preset coordinate range;
detecting a second coordinate of the laser beam reflected by the second mirror assembly;
when the second coordinate is not in the second preset coordinate range, the position of the two-reflection dimming component is adjusted so that the second coordinate is in the second preset coordinate range.
10. The laser light modulation method according to claim 9, wherein the detecting the first coordinates of the laser light beam reflected by the first mirror assembly is specifically:
the first coordinate of the laser beam reflected by the first mirror assembly is detected by the first four-quadrant sensor based on the laser beam transmitted by the second mirror in the second mirror assembly.
11. The laser light modification method according to claim 10, wherein said adjusting the position of the first mirror assembly to bring the first coordinate within a first preset coordinate range comprises:
adjusting the displacement of a first piezoelectric screw connected with the first end of the first reflecting mirror to enable a first X coordinate of the first coordinate to be in a first preset X coordinate range;
and adjusting the displacement of a first piezoelectric screw connected with the second end of the first reflecting mirror to enable the first Y coordinate of the first coordinate to be in a first preset Y coordinate range.
12. The laser light conditioning method according to claim 9, wherein the detecting the second coordinates of the laser light beam reflected by the second mirror assembly is specifically:
detecting a second coordinate of the laser beam reflected by the second mirror assembly by a second four-quadrant sensor based on the laser beam split by the beam splitter in the second mirror assembly; or (b)
The second coordinates of the laser beam reflected by the second mirror assembly are detected by a second four-quadrant sensor based on the laser beam transmitted by a fourth mirror in the second mirror assembly.
13. The method of claim 12, wherein adjusting the position of the two-reflection dimming component such that the second coordinate is within a second predetermined coordinate range comprises:
adjusting the displacement of a second piezoelectric screw connected with the third end of the second reflecting mirror to enable a second X coordinate of the second coordinate to be in a second preset X coordinate range;
and adjusting the displacement of a second piezoelectric screw connected with the fourth end of the second reflecting mirror to enable a second Y coordinate of the second coordinate to be in a second preset Y coordinate range.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311766585.3A CN117655513A (en) | 2023-12-20 | 2023-12-20 | Laser processing device and laser adjustment method |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202311766585.3A CN117655513A (en) | 2023-12-20 | 2023-12-20 | Laser processing device and laser adjustment method |
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| CN202311766585.3A Pending CN117655513A (en) | 2023-12-20 | 2023-12-20 | Laser processing device and laser adjustment method |
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| CN (1) | CN117655513A (en) |
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