CN116538910A - Automatic adjusting device and adjusting method for laser interferometer - Google Patents
Automatic adjusting device and adjusting method for laser interferometer Download PDFInfo
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
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Abstract
The application discloses an adjusting device and an adjusting method of a laser interferometer, wherein an adjusting mechanism is arranged by designing the laser interferometer, and the manual adjusting and automatic adjusting mechanisms are combined to provide a hardware solution for the automatic adjustment of the laser interferometer; and the first PSD position sensor and the second PSD position sensor are combined to detect a laser light path, so that the rapid installation and calibration between the laser interferometer and the interference mirror are realized. And the optimal direction vector of the emergent light of the laser interferometer in space is solved by carrying out least square fitting analysis on the multi-point position detection result, so that the system error of the laser measurement system is eliminated, and the influence of Abbe error and cosine error on the laser measurement system is reduced.
Description
Technical Field
The present disclosure relates to the field of machine manufacturing, and in particular, to an automatic adjustment device and an adjustment method for a laser interferometer.
Background
The laser interferometer measuring system is used as one of precision instruments for detecting the precision of the numerical control machine tool, and plays an important role in detecting and compensating the precision of the numerical control machine tool such as positioning precision, repeated positioning precision, straightness, verticality and the like of the numerical control machine tool. The rapid installation and high-precision automatic collimation of the laser interferometer measurement system are realized, so that the method has important practical significance for improving the inspection precision of the numerical control machine tool, improving the inspection and compensation efficiency of the machine tool precision, reducing the influence of Abbe errors and cosine errors on the detection result in the detection process and shortening the downtime of the machine tool during detection. The collimation method of the existing laser interferometer mainly comprises the following steps: adjusting the mounting position of the laser interferometer and the position of the target mirror (pyramid mirror) according to experience; the space angle of the laser light path propagation is finely adjusted by installing a collimating lens, such as a collimating lens developed by Renisshaw for matched products; the auxiliary adjusting mechanical structure of the reflector is additionally arranged to perform collimation adjustment on laser rays; the light line is sensed by adding a light position sensor (such as a CCD sensor and a PSD position sensor) in the laser light path, so that the collimation of the laser measuring light path is realized.
The grant publication number disclosed in the chinese patent document is: the invention patent of CN109141223B discloses a PSD-based laser interferometer optical path efficient and accurate calibration method, and specifically discloses: firstly, a system light path is established, then, a laser interferometer light path is roughly adjusted, finally, coordinate values of all calibration points are obtained according to a PSD two-dimensional photosensitive position sensor, the offset of measuring light relative to reference reflected light is calculated, and the laser interferometer light path is accurately adjusted according to the offset. The invention realizes automatic calibration of the laser interferometer light path through the coordinates measured in the PSD two-dimensional photosensitive position sensor, but the invention can not realize the pose identification and solution of the light path in space.
Disclosure of Invention
The main aim of the application is to provide an adjusting device of a laser interferometer, which aims to solve the technical problems existing in the rapid and automatic collimation process of the existing laser interferometer measuring system.
In order to achieve the above objective, the present application provides an adjusting device of a laser interferometer, including an adjusting mechanism, an adjusting platform, a first PSD position sensor, a second PSD position sensor, a first spectroscope, a second spectroscope, a first pyramid reflector and a second pyramid reflector;
the adjusting platform is movably arranged on the adjusting mechanism and is provided with four degrees of freedom and is used for installing a laser interferometer host;
the first PSD position sensor, the second PSD position sensor, the first spectroscope, the second spectroscope, the first pyramid reflector and the second pyramid reflector are all installed on the adjustment platform, so that when the laser interferometer host is installed on the adjustment platform, the first PSD position sensor, the second PSD position sensor, the first spectroscope, the second spectroscope, the first pyramid reflector and the second pyramid reflector can be in an ideal collimation state after adjustment.
Optionally, in some embodiments of the present invention, the method further includes a manual fine tuning head, the manual fine tuning head being mounted on top of the adjustment platform, the laser interferometer host being mounted on top of the manual fine tuning head.
Optionally, in some embodiments of the present invention, the manual fine tuning holder is connected to the adjustment platform through a quick-change connector.
Optionally, in some embodiments of the present invention, the adjusting mechanism includes a two-degree-of-freedom plane adjusting mechanism and a two-degree-of-freedom swing angle adjusting mechanism;
the two-degree-of-freedom swing angle adjusting mechanism is arranged on the two-degree-of-freedom plane adjusting mechanism, and the adjusting platform is arranged on the two-degree-of-freedom swing angle adjusting mechanism.
In addition, in order to achieve the above object, the present application further provides an adjustment method of an adjustment device of a laser interferometer, including obtaining a first detection signal of a first PSD position sensor in response to a collimation start signal, calculating a yaw angle deviation between a host machine of the laser interferometer and a first pyramid mirror according to the first detection signal, and completing calibration of the yaw angle deviation according to the yaw angle deviation;
the first detection signal comprises a first position signal of the laser when the first PSD position sensor is positioned at a first position and a second position signal of the laser when the first PSD position sensor is positioned at a second position;
responding to the collimation starting signal, obtaining a second detection signal of the first PSD position sensor, calculating the pitching angle deviation between the host machine of the laser interferometer and the first angular cone reflector according to the second detection signal, and completing the calibration of the pitching angle deviation according to the pitching angle deviation;
the second detection signal comprises a third position signal of the laser when the first PSD position sensor is positioned at a third position and a fourth position signal of the laser when the first PSD position sensor is positioned at a fourth position;
after the first PSD position sensor is controlled to reset, the first PSD position sensor is moved along the laser ray direction, so that the numerical value of the distance between the laser and the quadrant axis of the first PSD position sensor parallel to the laser ray direction and the numerical value of the distance between the laser and the quadrant axis perpendicular to the laser ray direction are obtained;
performing least square fitting on a plurality of groups of corresponding horizontal distance values and vertical distance values to obtain a target space vector direction of emergent light of the laser interferometer;
and obtaining the offset deviation of the target space vector direction and the laser emission direction based on the target space vector direction, and adjusting the laser emission direction according to the offset deviation.
Optionally, in some embodiments of the invention, the method comprises:
acquiring a distance P1 between a detection signal and a coordinate axis perpendicular to the first PSD position sensor based on a first position signal of a laser position detected when the first PSD position sensor is positioned at a first position;
controlling the first PSD position sensor to move to a second position along the axial direction far away from the adjustment platform, and recording the moving distance of the first PSD position sensor as a first moving distance D;
acquiring a distance P2 between the detection signal and a coordinate axis perpendicular to the first PSD position sensor based on a second position signal of the laser position detected when the first PSD position sensor is positioned at a second position;
and calculating the deflection angle deviation between the laser interferometer host and the first angle cone reflector based on the distance P1, the distance P2 and the first moving distance D.
Optionally, in some embodiments of the invention, the method comprises:
calculating deflection angle deviation between a laser interferometer host and a first angle cone reflector according to the distance P1, the distance P2 and the first moving distance D based on the following equation set;
wherein P1 is the distance between the first position signal of the laser position detected when the first PSD position sensor is positioned at the first position and the coordinate axis perpendicular to the first PSD position sensor;
p2 is the distance between the second position signal of the laser position detected when the first PSD position sensor is positioned at the second position and the coordinate axis perpendicular to the first PSD position sensor;
d is a first moving distance when the first PSD position sensor moves from a first position to a second position;
θ is the yaw angle deviation.
Optionally, in some embodiments of the invention, the method comprises:
acquiring a distance P3 between the detection signal and a coordinate axis perpendicular to the first PSD position sensor based on a third position signal of the laser position detected when the first PSD position sensor is positioned at a third position;
controlling the first PSD position sensor to move to a fourth position along the normal vector direction of the laser measuring plane, and recording the moving distance of the first PSD position sensor as a second moving distance T;
acquiring a distance P4 between the fourth position signal and a coordinate axis perpendicular to the first PSD position sensor based on a fourth position signal of the laser position detected when the first PSD position sensor is positioned at the fourth position;
and calculating the pitching angle deviation between the laser interferometer host and the first angular cone reflector based on the distance P3, the distance P4 and the second moving distance T.
Optionally, in some embodiments of the invention, the method comprises: calculating the pitching angle deviation between the host machine of the laser interferometer and the first angular cone reflector according to the distance P3, the distance P4 and the second moving distance T based on the following equation;
wherein, P3 is the distance between the third position signal of the laser position detected when the first PSD position sensor is positioned at the third position and the coordinate axis perpendicular to the first PSD position sensor;
p4 is the distance between the fourth position signal of the laser position detected when the first PSD position sensor is positioned at the fourth position and the coordinate axis perpendicular to the first PSD position sensor;
t is a first moving distance when the first PSD position sensor moves from the third position to the fourth position;
phi is the pitch angle deviation.
Optionally, in some embodiments of the invention, the method comprises:
a coordinate system is established with the center of the first PSD position sensor plane,
controlling the first PSD position sensor to move along the laser ray direction, and selecting n points in the moving process to obtain third detection signals of the laser positioned at each point of the first PSD position sensor;
based on the plurality of third detection signals, arranging the vertical distances between the plurality of third detection signals and the quadrant axes of the parallel laser ray directions in sequence to obtain the plurality of third detection signals and the parallel laser ray directionsThe vertical distance between the quadrant axes of the directions has a value H 1 、H 2 、H 3 、…、H n ；
Based on the fourth detection signals, arranging the vertical distances between the fourth detection signals and the quadrant axes in the parallel laser ray direction in sequence to obtain a value V of the vertical distance between the third detection signals and the quadrant axes in the parallel laser ray direction 1 、V 2 、V 3 、…、V n 。
Compared with the prior art, the embodiment of the invention has at least the following advantages or beneficial effects:
according to the adjusting device and the adjusting method of the laser interferometer, the adjusting mechanism is installed through the design of the laser interferometer, and the manual adjusting and automatic adjusting mechanism is combined, so that a hardware solution is provided for automatic adjustment of the laser interferometer;
and the first PSD position sensor and the second PSD position sensor are combined to detect a laser light path, so that the rapid installation and calibration between the laser interferometer and the interference mirror are realized.
By running a preset detection path and combining the light path position information of the first PSD position sensor and the second PSD position sensor, the spatial position posture of a laser light path is calculated through identification, and corresponding adjustment parameters are given.
And the optimal direction vector of the emergent light of the laser interferometer in space is solved by carrying out least square fitting analysis on the multi-point position detection result, so that the system error of the laser measurement system is eliminated, and the influence of Abbe error and cosine error on the laser measurement system is reduced.
Drawings
FIG. 1 is a flow chart of collimation adjustment of a measurement system of a laser interferometer according to an embodiment of the present invention;
FIG. 2 is a schematic diagram of an automatic collimation adjustment mechanism of a measurement system of a laser interferometer according to an embodiment of the present invention;
FIG. 3 is a schematic diagram of host adjustment and calibration of a laser interferometer according to an embodiment of the present invention;
fig. 4 is a schematic diagram of adjustment of movement errors of a laser interferometer according to an embodiment of the present invention;
FIG. 5 is a diagram illustrating the yaw error adjustment of the laser interferometer according to the embodiment of the present invention;
fig. 6 is a schematic diagram of pitch error adjustment of a laser interferometer according to an embodiment of the present invention.
Icon: the system comprises a 1-two-degree-of-freedom plane adjusting mechanism, a 2-two-degree-of-freedom swing angle adjusting mechanism, a 3-adjusting platform, a 4-manual fine adjustment cradle head, a 5-laser interferometer host, a 6-first PSD position sensor, a 7-second PSD position sensor, an 8-first spectroscope, a 9-second spectroscope, a 10-first pyramid reflector and an 11-second pyramid reflector.
The realization, functional characteristics and advantages of the present application will be further described with reference to the embodiments, referring to the attached drawings.
Detailed Description
The following description of the embodiments of the present invention will be made clearly and fully with reference to the accompanying drawings, in which it is evident that the embodiments described are only some, but not all embodiments of the invention. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
It should be noted that all directional indicators (such as up, down, left, right, front, and rear … …) in the embodiments of the present invention are merely used to explain the relative positional relationship, movement, etc. between the components in a particular posture (as shown in the drawings), and if the particular posture is changed, the directional indicator is changed accordingly.
In the present invention, unless specifically stated and limited otherwise, the terms "connected," "affixed," and the like are to be construed broadly, and for example, "affixed" may be a fixed connection, a removable connection, or an integral body; can be mechanically or electrically connected; either directly or indirectly, through intermediaries, or both, may be in communication with each other or in interaction with each other, unless expressly defined otherwise. The specific meaning of the above terms in the present invention can be understood by those of ordinary skill in the art according to the specific circumstances.
In addition, if there is a description of "first", "second", etc. in the embodiments of the present invention, the description of "first", "second", etc. is for descriptive purposes only and is not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include at least one such feature. In addition, the meaning of "and/or" as it appears throughout includes three parallel schemes, for example "A and/or B", including the A scheme, or the B scheme, or the scheme where A and B are satisfied simultaneously. In addition, the technical solutions of the embodiments may be combined with each other, but it is necessary to base that the technical solutions can be realized by those skilled in the art, and when the technical solutions are contradictory or cannot be realized, the combination of the technical solutions should be considered to be absent and not within the scope of protection claimed in the present invention.
Referring to fig. 2, a first embodiment of the present invention provides an adjusting device of a laser interferometer, which includes an adjusting mechanism, an adjusting platform 3, a first PSD position sensor 6, a second PSD position sensor 7, a first spectroscope 8, a second spectroscope 9, a first pyramid reflector 10, and a second pyramid reflector 11;
the laser interferometer comprises a laser interferometer host 5, a manual fine tuning platform 4, a laser interferometer host and a laser interferometer, wherein the laser interferometer host is arranged on the top of the manual fine tuning platform 4;
the adjusting mechanism comprises a two-degree-of-freedom plane adjusting mechanism 1 and a two-degree-of-freedom swing angle adjusting mechanism 2
The two-degree-of-freedom plane adjusting mechanism 1 of the embodiment is placed on the bottom surface or other platforms, the two-degree-of-freedom swinging angle adjusting mechanism 2 is fixedly installed at the top of the two-degree-of-freedom plane adjusting mechanism 1, the adjusting platform 3 is installed at the top of the two-degree-of-freedom swinging angle adjusting mechanism 2, the laser interferometer host 5 is fixedly installed at the top of the adjusting platform 3, the adjusting platform 3 is controlled by the two-degree-of-freedom plane adjusting mechanism 1 to drive the laser interferometer host 5 to calibrate deflection deviation, and the adjusting platform 3 is controlled by the two-degree-of-freedom swinging angle adjusting mechanism 2 to drive the laser interferometer host 5 to calibrate pitching deviation;
the first spectroscope 8 and the second spectroscope 9 are also installed at adjustment platform 3 top, first spectroscope 8 and first angular cone speculum 10 set gradually along the direction that laser interferometer host computer 5 launched laser, first angular cone speculum 10 is installed on the lathe and can be along the direction removal of laser that laser interferometer host computer 5 sent, second spectroscope 9 is installed in first spectroscope 8 top, second PSD position sensor 7 is installed in second spectroscope 9 top, first PSD position sensor 6 is installed in first spectroscope 8 below.
The first PSD position sensor 6, the second PSD position sensor 7, the first spectroscope 8, the second spectroscope 9, the first pyramid reflector 10 and the second pyramid reflector 11 can be in an ideal alignment state after being adjusted, that is, the position signal collected by the first PSD position sensor 6 is at the origin position of the optical target of the first PSD position sensor 6 and the position signal collected by the second PSD position sensor 7 is at the origin position of the optical target of the second PSD position sensor 7.
Optionally, the included angle of the pyramid reflector in this embodiment is 90 °, and the installation position of the spectroscope forms an included angle of 45 ° with the ideal laser light path, so that the propagation path of the laser light path and the light path position information detected by the first PSD position sensor 6 and the second PSD position sensor 7 can be calculated according to the angle parameter of the laser interferometer lens group.
As an alternative embodiment, referring to fig. 2, a second embodiment of the present invention provides a specific structure of an adjusting device of a laser interferometer, including:
the manual cradle head is arranged on the adjusting platform 3, the manual fine-tuning cradle head 4 is connected with the adjusting platform 3 through a quick-change connector, the quick-connection of the manual fine-tuning cradle head 4 is realized through the quick-change connector, and the installation and the positioning of the manual fine-tuning cradle head 4 are realized by utilizing a positioning surface on the quick-change connector.
Quick-change connectors are a broad industrial product accessory noun and are divided into hydraulic pipeline quick-change connectors and excavator quick-change connectors. The quick-change connector of the excavator is also called a quick connector and a quick connector, and can quickly install various configuration parts (a bucket, a scarifier, a breaking hammer, a hydraulic shear and the like) on the excavator, so that the application range of the excavator can be enlarged, the time can be saved, and the work efficiency can be improved.
Based on the hardware environment of the foregoing embodiment, an embodiment of the present application provides an adjustment method of an adjustment device of a laser interferometer, as shown in fig. 1, including:
firstly, an automatic adjustment platform 3 of a fixed laser interferometer is installed, and after the installation and calibration of a laser interferometer host 5 are completed, a second fixed pyramid reflector is installed and fixed on the end face of a machine tool spindle
The position of the automatic adjustment platform 3 is manually adjusted or the coordinate axis of the machine tool is adjusted, so that the two PSD sensors have position detection signals, and when the first PSD position sensor 6 and the second PSD position sensor 7 have light position detection signals for input, the automatic collimation mode can be started.
Specifically, when the first PSD position sensor 6 and the second PSD position sensor 7 are both input with a light position detection signal, as shown in fig. 3, the laser interferometer host 5 emits an incident laser beam, the incident laser beam is split by the first beam splitter 8 to form a first refraction laser beam perpendicular to the direction of the incident laser beam and a second incident laser beam moving along the direction of the incident laser beam after passing through the first beam splitter 8, the second incident laser beam is reflected by the first angular cone reflector 10 to form a first reflection laser beam, the first reflection laser beam passes through the first beam splitter 8 again and is split by the first beam splitter 8 to form a second refraction laser beam and a third reflection laser beam, the third refraction laser beam is reflected by the laser splitter 6 and is made to be detected by the first PSD position sensor 6, the third reflection laser beam is reflected by the laser splitter 5, the first refraction laser beam moves along the direction perpendicular to the incident laser beam, and is reflected by the second reflection mirror 11 to form a second reflection laser beam after passing through the second beam splitter 9 and is made to be reflected by the second reflection mirror 11 and is made to be reflected by the third reflection mirror 9 and is made to be reflected by the third reflection mirror 7 and the third reflection mirror to be reflected by the third reflection mirror 7, and the third reflection laser beam splitter is made to be reflected by the third reflection mirror and the third reflection mirror 7 to the third reflection mirror to the third PSD position sensor, and the third reflection mirror is made to be reflected by the third reflection mirror to be reflected by the third mirror position sensor to the third position sensor 6.
Fig. 4 is a schematic diagram illustrating adjustment of movement errors of a laser interferometer, in which when errors are found during calibration of the laser interferometer, the first angular cone mirror 10 is moved to an optimal position and reflected light can be reflected back to the laser receiving unit of the laser interferometer host 5, and at this time, the movement errors of the laser interferometer can be adjusted according to the detection signal of the first PSD position sensor 6.
Responding to the collimation starting signal, acquiring a first detection signal of a first PSD position sensor 6, calculating the deflection angle deviation between the laser interferometer host 5 and the first angular cone reflector 10 according to the first detection signal, and completing the calibration of the deflection deviation according to the deflection angle deviation;
in the implementation process of the specific yaw deviation calibration, when the yaw angle deviation exists in the optical line of the laser interferometer, the schematic diagram of the incident light and the emergent light of the first cone mirror 10 is shown in fig. 5, and the specific implementation process of adjusting the yaw angle deviation is as follows:
s1: when the first angular cone reflector 10 is located at the first position, recording the detection signal of the first PSD position sensor 6 as a first position P1;
s2: the first angular cone reflector 10 on the end surface of the spindle is moved backwards for a certain distance to reach the second position P2, and the detection signal of the first PSD position sensor 6 is ensured not to be lost during the movement of the machine tool. Recording the moving distance between P1 and P2 and the detection signal of the first PSD position sensor 6 at the first position as the second position P2;
the distance between P1 and P2 is as small as possible, and specifically, the minimum moving distance may be determined according to the position accuracy resolution of the PSD sensor.
S3: according to the geometrical relationship of the light propagation paths, the path length difference of the path of the laser light path in the target mirror in the perpendicular to the measuring plane is as follows: (P2-P1)/cos 2 theta, wherein theta is the yaw angle deviation.
S4: at two different positions, the difference value between the falling point of the laser on the target lens and the distance between the center of the target lens and the measuring plane is: (P2-P1)/cos 2. Theta. Times.cos (pi/4+θ).
S5: from the geometrical relationship of the light propagation paths, it is known that: the yaw angle deviation can be solved according to the above equation.
Wherein, P1 is the distance between the first position signal of the laser position detected when the first PSD position sensor 6 is located at the first position and the coordinate axis perpendicular to the first PSD position sensor 6;
p2 is the distance between the second position signal of the laser position detected when the first PSD position sensor 6 is located at the second position and the coordinate axis perpendicular to the first PSD position sensor 6;
d is a first movement distance of the first PSD position sensor 6 when moving from the first position to the second position;
θ is the yaw angle deviation.
S6: after the automatic adjustment platform 3 adjusts the corresponding deflection angle according to the calculated deflection angle deviation, the adjustment platform 3 translates along the direction of the vertical laser rays to enable the position signal of the first PSD position sensor 6 to return to the quadrant axis of the direction of the parallel laser rays, and calibration of the deflection deviation is completed.
After the deflection deviation calibration of the laser interferometer is completed, the position coordinates of the initial position (first position) under the coordinate system of the numerical control machine tool are recorded.
Responding to the collimation starting signal, obtaining a second detection signal of the first PSD position sensor 6, calculating the pitching angle deviation between the laser interferometer host 5 and the first angular cone reflector 10 according to the second detection signal, and completing the calibration of the pitching angle deviation according to the pitching angle deviation;
in the implementation process of the specific pitch deviation calibration, when the pitch angle deviation exists in the optical line of the laser interferometer, the incident light and the emergent light of the first cone mirror 10 are schematically shown in fig. 6, and the specific implementation process of adjusting the pitch angle deviation is as follows:
s1: when the first pyramid reflector 10 is located at the third position (which may coincide with the first position), the detection signal of the first PSD position sensor 6 is recorded as a third position P3;
s2: and controlling the numerical control machine to move the first angular cone reflector 10 along the normal vector direction of the laser measuring plane until the position detected by the first PSD position sensor 6 reaches a preset point, and regarding the preset point as a fourth position, wherein the laser light is directly emitted to the center of the first angular cone reflector 10. Recording the moving distance T of the numerical control machine tool, wherein the detection signal of the first PSD position sensor 6 at the fourth position is a fourth position P4;
s3: from the geometrical relationship of the light propagation paths, it is known that:the pitch angle deviation phi can be solved according to the above equation.
Wherein, P3 is the distance between the third position signal of the laser position detected when the first PSD position sensor 6 is located at the third position and the coordinate axis perpendicular to the first PSD position sensor 6;
p4 is the distance between the fourth position signal of the laser position detected when the first PSD position sensor 6 is located at the fourth position and the coordinate axis perpendicular to the first PSD position sensor 6;
t is a first movement distance of the first PSD position sensor 6 when moving from the third position to the fourth position;
phi is the pitch angle deviation.
S4: after the automatic adjustment platform 3 adjusts the corresponding pitching angle according to the calculated pitching angle deviation, the automatic adjustment platform 3 translates along the direction of the vertical laser ray to enable the position signal detected by the first PSD position sensor 6 to return to the quadrant axis of the direction of the vertical laser ray, and calibration of the pitching deviation is completed.
The order of adjusting the yaw deviation or the pitch deviation in this embodiment may be interchanged.
After the first PSD position sensor 6 is controlled to reset, the first PSD position sensor is moved along the laser ray direction so as to acquire the value of the horizontal distance and the value of the vertical distance between the laser and the vertical quadrant axis of the first PSD position sensor 6;
after the deflection deviation and the pitching deviation are adjusted, the first PSD position sensor 6 is controlled to return to the initial position, namely the first position, the machine tool coordinate system is taken as a reference coordinate system to move along the laser ray direction, n points are selected to record a plurality of detection signals of the first PSD position sensor 6, the detection signals are sequentially arranged, and the vertical distance between the detection signals and a quadrant axis parallel to the laser ray direction is H 1 、H 2 、H 3 、…、H n The method comprises the steps of carrying out a first treatment on the surface of the The vertical distance between the multiple detection signals and the quadrant axis perpendicular to the laser ray direction is V 1 、V 2 、V 3 、…、V n 。
For H 1 、H 2 、H 3 、…、H n And V 1 、V 2 、V 3 、…、V n And carrying out one-to-one correspondence and least square fitting, and carrying out SVD (singular value decomposition) on the deflection and pitching combined deviation to solve the optimal space vector direction of the emergent light of the laser interferometer.
After the vector direction of the laser emitted by the laser interferometer host 5 is adjusted, the position of the detection starting point of the laser interferometer is adjusted, the automatic adjustment platform 3 translates along the 2 directions of the vertical laser rays to enable the position signal of the first PSD position sensor 6 to return to the quadrant axis of the first PSD position sensor 6, initial calibration is completed, and collimation calibration of the laser interferometer is completed.
The foregoing description is only of the preferred embodiments of the present application, and is not intended to limit the scope of the claims, and all equivalent structures or equivalent processes using the descriptions and drawings of the present application, or direct or indirect application in other related technical fields are included in the scope of the claims of the present application.
Claims (10)
1. An adjusting device of a laser interferometer, which is characterized in that: the system comprises an adjusting mechanism, an adjusting platform, a first PSD position sensor, a second PSD position sensor, a first spectroscope, a second spectroscope, a first pyramid reflector and a second pyramid reflector;
the adjusting platform is movably arranged on the adjusting mechanism and is provided with four degrees of freedom and is used for installing a laser interferometer host;
the first PSD position sensor, the second PSD position sensor, the first spectroscope, the second spectroscope, the first pyramid reflector and the second pyramid reflector are all installed in the adjustment platform, so that when the laser interferometer host is installed on the adjustment platform, the first PSD position sensor, the second PSD position sensor, the first spectroscope, the second spectroscope, the first pyramid reflector and the second pyramid reflector can be in ideal collimation state after adjustment.
2. An adjustment device for a laser interferometer according to claim 1, wherein: the laser interferometer comprises a laser interferometer host, a manual fine tuning cradle head, a laser interferometer host and a laser interferometer, wherein the laser interferometer host is arranged on the top of the manual fine tuning cradle head, and the manual fine tuning cradle head is arranged on the top of the adjustment platform.
3. An adjustment device for a laser interferometer according to claim 2, wherein: the manual fine adjustment holder is connected with the adjustment platform through a quick-change connector.
4. An adjustment device for a laser interferometer according to claim 1, wherein: the adjusting mechanism comprises a two-degree-of-freedom plane adjusting mechanism and a two-degree-of-freedom swing angle adjusting mechanism;
the two-degree-of-freedom swing angle adjusting mechanism is arranged on the two-degree-of-freedom plane adjusting mechanism, and the adjusting platform is arranged on the two-degree-of-freedom swing angle adjusting mechanism.
5. A method of adjusting an adjusting apparatus based on a laser interferometer according to claims 1-4, characterized in that the method comprises:
responding to a collimation starting signal, acquiring a first detection signal of the first PSD position sensor, calculating deflection angle deviation between the laser interferometer host and the first angular cone reflector according to the first detection signal, and completing calibration of the deflection deviation according to the deflection angle deviation;
the first detection signal comprises a first position signal of the laser when the first PSD position sensor is positioned at a first position and a second position signal of the laser when the first PSD position sensor is positioned at a second position;
responding to a collimation starting signal, acquiring a second detection signal of the first PSD position sensor, calculating the pitching angle deviation between the host machine of the laser interferometer and the first angular cone reflector according to the second detection signal, and completing the calibration of pitching deviation according to the pitching angle deviation;
the second detection signal comprises a third position signal of the laser when the first PSD position sensor is positioned at a third position and a fourth position signal of the laser when the first PSD position sensor is positioned at a fourth position;
after the first PSD position sensor is controlled to reset, the first PSD position sensor is moved along the laser ray direction, so that the numerical value of the distance between the laser and the quadrant axis of the first PSD position sensor parallel to the laser ray direction and the numerical value of the distance between the laser and the quadrant axis perpendicular to the laser ray direction are obtained;
performing least square fitting on a plurality of groups of corresponding numerical values of the horizontal distance and numerical values of the vertical distance to obtain a target space vector direction of emergent light of the laser interferometer;
and obtaining the offset deviation of the target space vector direction and the laser emission direction based on the target space vector direction, and adjusting the laser emission direction according to the offset deviation.
6. The method according to claim 5, wherein the step of calculating a deflection angle deviation between the laser interferometer main body and the first cone mirror based on the first detection signal comprises:
acquiring a distance P1 between the detection signal and a coordinate axis perpendicular to the first PSD position sensor based on a first position signal of a laser position detected when the first PSD position sensor is positioned at a first position;
controlling the first PSD position sensor to move to a second position along the axial direction far away from the adjustment platform, and recording the moving distance of the first PSD position sensor as a first moving distance D;
acquiring a distance P2 between the detection signal and a coordinate axis perpendicular to the first PSD position sensor based on a second position signal of the laser position detected when the first PSD position sensor is positioned at a second position;
and calculating the deflection angle deviation between the laser interferometer host and the first angle cone reflector based on the distance P1, the distance P2 and the first moving distance D.
7. The method according to claim 6, wherein the step of calculating a pitch angle deviation between the laser interferometer main body and the first pyramid reflecting mirror based on the distance P1, the distance P2, and the first moving distance D, comprises:
calculating a deflection angle deviation between the laser interferometer host and the first cone mirror according to the distance P1, the distance P2 and the first moving distance D based on the following equation set;
wherein, P1 is the distance between the first position signal of the laser position detected when the first PSD position sensor is positioned at the first position and the coordinate axis perpendicular to the first PSD position sensor;
p2 is the distance between the second position signal of the laser position detected when the first PSD position sensor is positioned at the second position and the coordinate axis perpendicular to the first PSD position sensor;
d is a first moving distance when the first PSD position sensor moves from a first position to a second position;
θ is the yaw angle deviation.
8. The method according to claim 5, wherein the step of calculating a pitch angle deviation between the laser interferometer main body and the first cone mirror based on the second detection signal comprises:
acquiring a distance P3 between the detection signal and a coordinate axis perpendicular to the first PSD position sensor based on a third position signal of the laser position detected when the first PSD position sensor is positioned at a third position;
controlling the first PSD position sensor to move to a fourth position along the normal vector direction of a laser measurement plane, and recording the moving distance of the first PSD position sensor as a second moving distance T;
acquiring a distance P4 between the fourth position signal and a coordinate axis perpendicular to the first PSD position sensor based on a fourth position signal of the laser position detected when the first PSD position sensor is positioned at the fourth position;
and calculating the pitching angle deviation between the laser interferometer host and the first angular cone reflector based on the distance P3, the distance P4 and the second moving distance T.
9. The method for adjusting an adjustment device of a laser interferometer according to claim 8, wherein the step of calculating a pitch angle deviation between the laser interferometer main body and the first cone mirror based on the distance P3, the distance P4, and the second moving distance T comprises:
calculating a pitch angle deviation between the laser interferometer host and the first cone mirror according to the distance P3, the distance P4 and the second moving distance T based on the following equation;
wherein, P3 is the distance between the third position signal of the laser position detected by the first PSD position sensor when the first PSD position sensor is positioned at the third position and the coordinate axis perpendicular to the first PSD position sensor;
p4 is the distance between the fourth position signal of the laser position detected when the first PSD position sensor is positioned at the fourth position and the coordinate axis perpendicular to the first PSD position sensor;
t is a first moving distance when the first PSD position sensor moves from a third position to a fourth position;
phi is the pitch angle deviation.
10. The method according to claim 5, wherein the step of obtaining a value of a distance between the laser light and a quadrant axis of the first PSD position sensor parallel to the laser light direction and a value of a distance between quadrant axes perpendicular to the laser light direction comprises:
controlling the first PSD position sensor to move along the laser ray direction, and selecting n point positions in the moving process to obtain third detection signals of the laser at each point position of the first PSD position sensor;
based on the plurality of third detection signals, arranging the vertical distances between the plurality of third detection signals and the quadrant axes parallel to the laser ray direction in sequence to obtain a value H of the vertical distance between the plurality of third detection signals and the quadrant axes parallel to the laser ray direction 1 、H 2 、H 3 、…、H n ；
Based on the fourth detection signals, arranging the vertical distances between the fourth detection signals and the quadrant axes parallel to the laser ray direction in sequence to obtain the third detection signalsThe value of the vertical distance from the quadrant axis parallel to the laser ray direction is V 1 、V 2 、V 3 、…、V n 。
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