CN117652203A - Heating device - Google Patents
Heating device Download PDFInfo
- Publication number
- CN117652203A CN117652203A CN202280048189.4A CN202280048189A CN117652203A CN 117652203 A CN117652203 A CN 117652203A CN 202280048189 A CN202280048189 A CN 202280048189A CN 117652203 A CN117652203 A CN 117652203A
- Authority
- CN
- China
- Prior art keywords
- heat insulating
- heating device
- insulating member
- metal plate
- heating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 title claims abstract description 109
- 229910052751 metal Inorganic materials 0.000 claims abstract description 94
- 239000002184 metal Substances 0.000 claims abstract description 94
- 125000006850 spacer group Chemical group 0.000 claims description 10
- 230000000149 penetrating effect Effects 0.000 claims description 2
- 239000000919 ceramic Substances 0.000 description 16
- 239000007769 metal material Substances 0.000 description 9
- 239000011521 glass Substances 0.000 description 8
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 6
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 6
- 229910000833 kovar Inorganic materials 0.000 description 6
- 239000010935 stainless steel Substances 0.000 description 6
- 229910001220 stainless steel Inorganic materials 0.000 description 6
- 239000010936 titanium Substances 0.000 description 5
- 229910001374 Invar Inorganic materials 0.000 description 4
- 229910010293 ceramic material Inorganic materials 0.000 description 4
- 229910001026 inconel Inorganic materials 0.000 description 4
- 229910001369 Brass Inorganic materials 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 3
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 3
- 239000010951 brass Substances 0.000 description 3
- 229910052802 copper Inorganic materials 0.000 description 3
- 239000010949 copper Substances 0.000 description 3
- 230000006866 deterioration Effects 0.000 description 3
- 229910052742 iron Inorganic materials 0.000 description 3
- 229910052759 nickel Inorganic materials 0.000 description 3
- 229910052719 titanium Inorganic materials 0.000 description 3
- 229920000742 Cotton Polymers 0.000 description 2
- 229910000599 Cr alloy Inorganic materials 0.000 description 2
- 229910052581 Si3N4 Inorganic materials 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
- 239000000788 chromium alloy Substances 0.000 description 2
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 2
- -1 inconel Chemical compound 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 2
- 238000002791 soaking Methods 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- 238000005219 brazing Methods 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 229910052702 rhenium Inorganic materials 0.000 description 1
- WUAPFZMCVAUBPE-UHFFFAOYSA-N rhenium atom Chemical compound [Re] WUAPFZMCVAUBPE-UHFFFAOYSA-N 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B3/00—Ohmic-resistance heating
- H05B3/20—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater
Abstract
The heating device of the present disclosure is provided with a metal plate and a plurality of heaters. The metal plate has: a first face, which is a heating face; a second surface located on an opposite side of the first surface and having a plurality of recesses; and a third face connected to the first face and the second face, respectively. The plurality of heaters are respectively located in the plurality of concave portions. The heating device of the present disclosure further includes a first heat insulating member. The first heat insulating member faces the third surface and surrounds the metal plate.
Description
Technical Field
The present disclosure relates to a heating device. The heating device can be used for heating a mold for processing, such as a metal, glass, or resin.
Background
As a heating device, for example, a heating device according to a joining method of a joined body of metal plates described in patent document 1 is known. Patent document 1 describes a heating device provided with: a heating plate; a cartridge heater inserted into the heating plate from the side; a top plate disposed above the upper heating plate; a backing plate arranged below the lower heating plate; and a heat insulating member provided between the upper heating plate and the top plate and between the lower heating plate and the backing plate.
The cartridge heater is disposed in a direction parallel to the heating surface of the heating plate. In this way, the distribution of the cartridge heaters in the heating plate is uneven, and therefore, there is a possibility that the temperature of the heating surface of the heating plate varies.
Prior art literature
Patent literature
Patent document 1: japanese patent laid-open No. 2021-3885
Disclosure of Invention
The heating device of the present disclosure is provided with a metal plate and a plurality of heaters. The metal plate has: a first face, which is a heating face; a second surface located on an opposite side of the first surface and having a plurality of recesses; and a third face connected to the first face and the second face, respectively. The plurality of heaters are respectively located in the plurality of concave portions. The heating device of the present disclosure further includes a first heat insulating member. The first heat insulating member faces the third surface and surrounds the metal plate.
Drawings
Fig. 1 is a cross-sectional view showing an example of a heating device.
Fig. 2 is a cross-sectional view showing another example of the heating device.
Fig. 3 is an enlarged cross-sectional view of the heating device shown in fig. 2 cut at line A-A'.
Fig. 4 is a cross-sectional view showing another example of the heating device.
Fig. 5 is a cross-sectional view showing another example of the heating device.
Fig. 6 is a cross-sectional view showing another example of the heating device.
Fig. 7 is a cross-sectional view showing another example of the heating device.
Fig. 8 is a cross-sectional view showing another example of the heating device.
Detailed Description
In recent years, improvement in the heat uniformity of the heating device has been desired.
The heating device 100 will be described in detail.
Fig. 1 is a cross-sectional view showing an example of a heating device 100. As shown in fig. 1, the heating apparatus 100 includes: a metal plate 1 having a first main surface (an example of a first surface) as a heating surface 11 and a second main surface (an example of a second surface) having a plurality of concave portions 12; a plurality of heaters 2 respectively located in the plurality of concave portions 12; and a first heat insulating member 3 located laterally of the metal plate 1.
The metal plate 1 is a member for supporting a mold. The metal plate 1 may be a plate-like or cylindrical member having a first main surface and a second main surface. The metal plate 1 shown in fig. 1 is a plate-like member.
The metal plate 1 has a metal material. The metal plate 1 includes, for example, a metal mainly composed of iron such as SUS (stainless steel), KOVAR (KOVAR), invar, a metal mainly composed of nickel such as inconel, or a metal material such as Ti (titanium), copper, brass, or chrome alloy. When the metal plate 1 is plate-shaped, the metal plate 1 may have a length of 10 to 500mm and a thickness of 1 to 100mm, for example.
The first main surface of the metal plate 1 is a heating surface 11. The heating surface 11 of the metal plate 1 is located on the upper surface that can be in contact with the mold. The second main surface of the metal plate 1 may be located on the opposite side of the first main surface, for example. When the first main surface of the metal plate 1 is located on the upper surface, for example, the second main surface of the metal plate 1 may be located on the lower surface. The second main surface of the metal plate 1 has a plurality of recesses 12. The plurality of recesses 12 may have, for example, a bottom surface and side surfaces. The bottom surface of the recess 12 may be, for example, a circular shape or a quadrangular shape. The depth of the recess 12 may be set to 0.5mm to 90mm. In addition, when the bottom surface of the recess 12 is circular, the diameter may be set to 0.5 to 100mm. The bottom surfaces of the plurality of concave portions 12 may have the same shape, for example. The bottom surfaces of the plurality of concave portions 12 may be different in shape. In addition, the depths of the plurality of concave portions 12 may be different from each other.
The term "upper surface" as used herein refers to a surface on which the heating surface 11 is located when viewed from the heater 2. The "lower surface" refers to the surface on which the heater 2 is located when viewed from the heating surface 11. However, the terms "upper surface" and "lower surface" in the present specification are used for easy understanding of the positional relationship, and are not limited to the embodiments. For example, the heating device 100 shown in the drawings may be inclined.
The metal plate 1 may be integrally formed, or may be formed by fixing a structure formed by separate members by bonding or the like. That is, the metal plate 1 may be configured such that a first portion having a plurality of recesses 12 and a second portion having a plurality of through holes are overlapped and fixed so that the respective recesses 12 and through holes are continuous.
The heater 2 is a member for generating heat by a flow of electric current. As shown in fig. 1, the heater 2 is located in a plurality of recesses 12 in the second main surface. The heating device 100 has a plurality of heaters 2. The plurality of heaters 2 are located in the plurality of concave portions 12, respectively. The heater 2 may be, for example, a ceramic heater composed of a ceramic body having a heat generating resistor therein. The heater 2 may be a cartridge heater having a heat generating body and a ceramic material in a metal tube. The heater 2 may be shaped like a rod or a plate such as a round rod or a square rod. When the heater 2 has a heat generating resistor inside, the heat generating resistor may have a folded shape, for example. The heat generating resistor may be formed as a pair of linear portions on the rear end side of the folded portion. For example, the heat generating pattern of the heat generating resistor may be a pattern that repeatedly reciprocates between the front end side and the rear end side, instead of a pattern in which the folded portion repeatedly folds only at the front end side. The rear end side of the heater 2 is connected to an external power source. The rear end side of the heater 2 may be fixed by a member such as a support body, for example.
The heating resistor body has a metal material. The metal material is, for example, tungsten, molybdenum or rhenium. The heating resistor may have an insulating member. This can adjust the resistance value of the heating resistor. The heat generating resistor may be disposed so as to generate most heat on the heating surface 11 of the metal plate 1. The heat generating resistor may be located in the recess 12, for example, in the folded portion.
The ceramic body may also have an insulating ceramic material. The ceramic body may be made of an insulating ceramic material such as alumina, silicon nitride, or aluminum nitride. When the heater 2 is formed of a ceramic body, the ceramic body may have a cylindrical shape, for example, a length of 1 to 200mm and an outer diameter of 0.5 to 100mm. In the case where the ceramic body is cylindrical in size, for example, the length may be 1 to 200mm, the outer diameter may be 0.5 to 100mm, and the inner diameter may be 0.2 to 90mm.
With the heating device 100 of the present disclosure, the second main surface of the metal plate 1 has a plurality of concave portions 12, and the plurality of heaters 2 are located in respective concave portions of the plurality of concave portions 12. As a result, compared to the case where the heater 2 is inserted in the direction parallel to the heating plate as in the heating device 100 described in patent document 1, the variation in temperature of the heating surface 11 can be reduced. As a result, the heat uniformity of the heating apparatus 100 can be improved.
The first heat insulating member 3 is a member for preventing heat generated by the heater 2 from being transferred to the outside. The first heat insulating member 3 is located laterally of the metal plate 1. In other words, the first heat insulating member 3 faces the side surface of the metal plate 1 and surrounds the metal plate 1. The side surface of the metal plate 1 is an example of a third surface connected to the first surface and the second surface of the metal plate 1, respectively. The first heat insulating member 3 may be made of, for example, ceramic, glass, or metal. The first heat insulating member 3 preferably has a lower thermal conductivity than the metal plate 1. The first heat insulating member 3 may be made of a ceramic material such as alumina, silicon nitride, or aluminum nitride, for example. The first heat insulating member 3 is preferably a fibrous ceramic member having gaps therein, such as a porous body or cotton. This makes it possible to prevent the member from being deformed by an external temperature change. As a result, durability can be improved. For example, when the heating device 100 is viewed from a direction perpendicular to the heating surface 11 of the metal plate 1, a gap may be provided between the first heat insulating member 3 and the metal plate 1. The first heat insulating member 3 may be fixed to the metal plate 1 by other members such as a joint.
The shape of the first heat insulating member 3 may be, for example, a plate, a ring, or a film. In addition, when the metal plate 1 has a rectangular plate shape on the main surface, for example, the first heat insulating member 3 may cover the side of the metal plate 1. Thereby, the possibility of heat escaping from the metal plate 1 can be further reduced. The first heat insulating member 3 may cover all four side surfaces (an example of the third surface) of the metal plate 1. Thereby, the possibility of heat escaping from the metal plate 1 can be further reduced. The first heat insulating member 3 may be a plurality of members formed in a plate shape, and may have a ring-shaped structure as a whole by covering all the side surfaces of the metal plate 1.
In the heating apparatus 100 of the present disclosure, the first heat insulating member 3 is located laterally of the metal plate 1. By this, by positioning the heater 2 in the recess 12 provided in the inner periphery of the metal plate 1, heat escaping from the side of the metal plate 1 can be suppressed by the first heat insulating member 3 while transferring the heat of the heater 2 to the heating surface 11. This reduces the possibility of the temperature of the heating surface 11 of the metal plate 1 being deviated between the center and side surfaces. As a result, the soaking property of the heating surface 11 of the metal plate 1 can be improved.
As shown in fig. 2, the heat insulating member may have a frame member 4 that is located laterally to the first heat insulating member 3 and covers the first heat insulating member 3. This can reduce the exposed area of the first heat insulating member 3. Therefore, the possibility of deterioration of the first heat insulating member 3 with time due to long-term use can be reduced.
The frame member 4 is a member for protecting the first heat insulating member 3. As shown in fig. 3, the frame member 4 is located laterally of the first heat insulating member 3. The frame member 4 is disposed so as to cover the first heat insulating member 3. The frame member 4 may be made of, for example, ceramic, glass, or metal. The frame member 4 may be, for example, plate-like, cylindrical, or square-cylindrical. For example, when the main surface of the metal plate 1 is square and the first heat insulating member 3 covers the side of the metal plate 1, the frame member 4 may cover the side of the first heat insulating member 3. For example, when the frame member 4 is plate-shaped, the frame member 4 may have a width of 10 to 500mm and a thickness of 0.3 to 20mm.
Further, as shown in fig. 3, the concave portions 12 are preferably equally arranged in accordance with the length of the second main surface of the metal plate 1. The number of concave portions may be larger than that shown in fig. 3.
As shown in fig. 4, the heating device 100 may further include a first fixing member 5 penetrating the frame member 4 and the first heat insulating member 3 to fix the frame member 4 and the metal plate 1. This makes it possible to disperse stress generated in the portion where the frame member 4, the first heat insulating member 3, and the metal plate 1 are in contact with each other due to external force such as vibration. As a result, the possibility of occurrence of cracks in the portion where the first heat insulating member 3 contacts the metal plate 1 can be reduced.
The first fixing member 5 is a member for fixing the frame member 4 and the first heat insulating member 3 to the metal plate 1. The first fixing member 5 may have a bar shape or a cylindrical shape having a longitudinal direction, for example. The first fixing member 5 may have a screw-shaped portion, for example, and the metal plate 1, the first fixing member 5, and the first heat insulating member 3 may have screw holes. The frame member 4 and the first heat insulating member 3 can be fixed to the metal plate 1 by inserting the screw-shaped portions of the first fixing member 5 into screw holes. The first fixing member 5 may have, for example, ceramic, glass, metal, or the like. Particularly preferred are metals such as SUS (stainless steel), KOVAR (KOVAR), invar (invar alloy) and the like which are mainly composed of iron, metals such as inconel (inconel) and the like which are mainly composed of nickel, and metal materials such as Ti (titanium), copper, brass, chromium alloy and the like. The first fixing member 5 may be fixed to the frame member 4 and the first heat insulating member 3 by a joint such as brazing material. The first fixing member 5 may be fixed to the frame member 4 and the first heat insulating member 3 by caulking, for example. When the first fixing member 5 is a rod having a longitudinal direction, the length may be set to 3 to 100mm and the outer diameter may be set to 1 to 10mm, for example.
In addition, as shown in fig. 4, the first fixing member 5 may be inserted perpendicularly with respect to the side surface of the metal plate 1. Accordingly, since the first fixing member 5 is inserted in the direction of thermal expansion of the metal plate 1, stress generated between the first fixing member 5 and the metal plate 1 can be dispersed.
As shown in fig. 5, the heating device 100 may have a spacer 6 between the frame member 4 and the metal plate 1. The spacer 6 may be located, for example, between the first heat insulating member 3 and the metal plate 1. This makes it possible to fix the frame member 4 and the metal plate 1 with a predetermined distance therebetween. Therefore, the possibility of deterioration of soaking due to the variation in the interval between the frame member 4 and the metal plate 1 can be reduced.
The spacer 6 is, for example, plate-like, rod-like or ring-like in shape. In addition, for example, when the first fixing member 5 is a member having a longitudinal direction, the spacer 6 may be disposed so as to surround at least a part of the outer periphery of the first fixing member 5. The spacer 6 may also be of metallic material, ceramic or glass. The metal material may be, for example, a metal mainly composed of iron such as SUS (stainless steel), KOVAR (KOVAR), invar, a metal mainly composed of nickel such as inconel, or a metal material such as titanium, copper, brass, or chromium alloy. When the spacer 6 is, for example, annular surrounding the outer periphery of the first fixing member 5, the outer diameter may be set to 2 to 20mm, the inner diameter may be set to 1 to 10mm, and the thickness may be set to 0.5 to 5mm.
The spacer 6 may be an annular member, or an inner peripheral surface of the spacer 6 may be in contact with an outer peripheral surface of the first fixing member 5. This can restrain the first fixing member 5 from moving in the direction perpendicular to the longitudinal direction. As a result, the durability of the heating device 100 can be improved.
As shown in fig. 6, the heating surface 11 may be located above the first heat insulating member 3. Thereby, the metal plate 1 can be arranged between the first heat insulating member 3 and the mold. This can reduce the possibility of deterioration of the first heat insulating member 3 and the mold due to direct contact between the first heat insulating member 3 and the mold when the mold is heated. As a result, the reliability of the heating apparatus 100 can be improved.
As an example where the heating surface 11 is located above the first heat insulating member 3, for example, as shown in fig. 6, when a cross section perpendicular to the heating surface 11 is viewed, the upper end (an example of an end portion) of the first heat insulating member 3 may be located below the heating surface 11. In the metal plate 1, the second main surface may have a smaller area than the heating surface 11, and the first heat insulating member 3 may be provided at a position surrounding the second main surface. The metal plate 1 may have a recess 12 or a countersink on a side surface, and the first heat insulating member 3 may be provided in the recess 12 or the countersink. The metal plate 1 may have a first portion and a second portion, each having a plate shape, and the first heat insulating member 3 may be disposed in a space sandwiched between the lower surface of the first portion and the side surface of the second portion, with the lower surface of the first portion being in contact with the entire upper surface of the second portion. In this case, the first heat insulating member 3 may be in contact with the lower surface of the first portion and the side surface of the second portion, respectively, or may be disposed with a gap from the lower surface of the first portion.
In the present specification, "above" refers to a direction in which the heating surface 11 is located when viewed from the heater 2. The term "above" as used in the present specification may be directly above. "lower" refers to the direction in which the heater 2 is located when viewed from the heating surface 11. The "side direction" means a direction parallel to the heating surface 11 and directed outward from the inside of the heating device 100. However, the terms "upper", "lower" and "lateral" in the present specification are used for easy understanding of the positional relationship, and are not limited to the embodiments. For example, the heating device 100 shown in the drawings may be inclined.
As shown in fig. 6, the upper end (an example of the end portion) of the frame member 4 may be located above the upper end of the first heat insulating member 3. The "upper end" referred to herein means the uppermost portion of the first heat insulating member 3.
As shown in fig. 7, the heating surface 11 may extend outward from the frame member 4 and be located above the frame member 4. Thereby, the metal plate 1 can be disposed between the frame member 4 and the mold. This reduces the possibility that heat of the mold escapes to the frame member 4 due to direct contact between the frame member 4 and the mold when the mold is heated. As a result, the reliability of the heating apparatus 100 can be improved.
As shown in fig. 7, the heating device 100 may further include a second heat insulating member 7 in contact with the second main surface. This reduces the possibility that heat from the heater 2 is released to the lower side of the metal plate 1. As a result, heating efficiency can be improved.
The second heat insulating member 7 is a member for preventing heat generated by the heater 2 from being transferred to the outside. The second heat insulating member 7 is in contact with the second main surface of the metal plate 1. The second insulating member 7 may have, for example, ceramic, glass, or metal. The second heat insulating member 7 is preferably a fibrous ceramic member having gaps therein, such as a porous body or cotton. This makes it possible to prevent the member from being deformed by an external temperature change. As a result, durability can be improved. In addition, the second heat insulating member 7 may have a gap between the metal plate 1 and the second heat insulating member 7 when the heating device 100 is viewed from a direction perpendicular to the heating surface 11 of the metal plate 1.
The shape of the second heat insulating member 7 may be, for example, a plate shape. For example, in the case of a plate-like member, the second heat insulating member 7 may have a width of 10 to 500mm and a thickness of 0.3 to 20mm.
As shown in fig. 8, the heating device 100 may have a support plate 8 having a plate shape and being in contact with the second heat insulating member 7.
The support plate 8 is a member for fixing the second heat insulating member 7. The support plate 8 has a metal material. The shape of the support plate 8 may be, for example, a square plate shape or a circular plate shape. The support plate 8 may be made of, for example, ceramics, glass, or metal. In the case of the plate-like shape, the dimension of the support plate 8 may be 10 to 500mm in the longitudinal direction, 10 to 500mm in the transverse direction, and 0.3 to 30mm in the thickness.
As shown in fig. 8, the heating device 100 may have a second fixing member 9 for fixing the frame member 4 and the support plate 8. This can firmly fix the frame member 4 and the support plate 8. This makes it possible to disperse stress generated in the portion where the frame member 4 and the support plate 8 are in contact with each other due to external force such as vibration. As a result, the possibility of occurrence of cracks at the contact portion between the frame member 4 and the support plate 8 can be reduced. As a result, durability can be improved.
The second fixing member 9 is a member for fixing the frame member 4 and the support plate 8. The second fixing member 9 may have a bar shape or a cylindrical shape having a longitudinal direction, for example. The second fixing member 9 may have, for example, a threaded portion, the frame member 4 and the support plate 8 may have a threaded hole, and the frame member 4 and the support plate 8 may be fixed by inserting the threaded portion of the second fixing member 9 into the threaded hole. The second fixing member 9 may be made of, for example, ceramics, glass, metal, or the like. The second fixing member 9 may be fixed to the frame member 4 and the support plate 8 by a joint such as solder. The second fixing member 9 may be fixed to the frame member 4 and the support plate 8 by caulking, for example. In the case where the second fixing member 9 is a rod having a longitudinal direction, the length may be set to 3 to 100mm and the outer diameter may be set to 1 to 10mm, for example.
As shown in fig. 8, the first heat insulating member 3 and the second heat insulating member 7 may be connected to each other. Thereby, the first heat insulating member 3 and the second heat insulating member 7 can be continuously connected. This reduces the possibility of heat transfer from the metal plate 1 to the support plate 8. As a result, the reliability of the heating apparatus 100 can be improved.
As shown in fig. 8, the support plate 8 and the frame member 4 may be in contact with each other. Thus, at the portion where the support plate 8 and the frame member 4 are in contact, heat can be easily transmitted from the support plate 8 to the outside of the heating device 100 via the frame member 4. This can improve the efficiency of heating and the heat release of the entire heating apparatus 100. As a result, the durability of the heating device 100 can be improved.
As shown in fig. 8, the lower end of the first heat insulating member 3 may be located above the support plate 8. This reduces the possibility that heat of the metal plate 1 escapes to a position below the support plate 8 via the first heat insulating member 3. As a result, the heat uniformity of the heating apparatus 100 can be improved.
Reference numerals illustrate:
1: metal plate
11: heating surface
12: concave part
2: heater
3: first heat insulating member
4: frame component
5: first fixing member
6: spacing piece
7: second heat insulating member
8: support plate
9: second fixing member
100: a heating device.
Claims (11)
1. A heating device is provided with:
a metal plate; and
a plurality of the heaters are arranged on the inner wall of the chamber,
the metal plate has: a first face, which is a heating face; a second surface located on an opposite side of the first surface and having a plurality of recesses; and a third face connected to the first face and the second face, respectively,
a plurality of the heaters are respectively positioned in a plurality of the concave parts,
the heating device is further provided with a first heat insulating member,
the first heat insulating member is disposed opposite to the third surface and surrounds the metal plate.
2. The heating device according to claim 1, wherein,
the heating device has a frame member that is located laterally of the first heat insulating member and covers the first heat insulating member.
3. The heating device according to claim 2, wherein,
the heating device has a first fixing member penetrating the frame member and the first heat insulating member and fixing the frame member and the metal plate.
4. A heating device according to claim 3, wherein,
the heating device has a spacer between the frame member and the metal plate,
the spacer surrounds at least a portion of the first securing member.
5. The heating device according to any one of claims 2 to 4, wherein,
an end of the frame member is located above an end of the first heat insulating member.
6. The heating device according to any one of claims 2 to 5, wherein,
at least a portion of the heating surface is located directly above the frame member.
7. The heating device according to any one of claims 1 to 6, wherein,
the first surface is located above an end of the first heat insulating member.
8. The heating device according to any one of claims 1 to 7, wherein,
the heating device further includes a second heat insulating member in contact with the second surface of the metal plate.
9. The heating device of claim 8, wherein,
the heating device has a support plate which is plate-shaped and is in contact with the second heat insulating member.
10. The heating device according to claim 8 or 9, wherein,
the first heat insulating member is connected to the second heat insulating member.
11. The heating device according to claim 9 or 10, wherein,
the heating device has:
a frame member that is located laterally of the first heat insulating member and covers the first heat insulating member; and
a support plate having a plate shape and being in contact with the second heat insulating member,
the support plate is connected to the frame member.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2021-119802 | 2021-07-20 | ||
| JP2021119802 | 2021-07-20 | ||
| PCT/JP2022/026963 WO2023002855A1 (en) | 2021-07-20 | 2022-07-07 | Heating device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN117652203A true CN117652203A (en) | 2024-03-05 |
Family
ID=84979169
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202280048189.4A Pending CN117652203A (en) | 2021-07-20 | 2022-07-07 | Heating device |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JPWO2023002855A1 (en) |
| CN (1) | CN117652203A (en) |
| WO (1) | WO2023002855A1 (en) |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0646076Y2 (en) * | 1989-10-12 | 1994-11-24 | 坂口電熱株式会社 | Heater |
| JPH04154073A (en) * | 1990-10-17 | 1992-05-27 | Yoshino Kogyosho Co Ltd | Heater block |
| JPH06117654A (en) * | 1992-10-06 | 1994-04-28 | Toshiba Corp | Radiation panel |
| JPH11339936A (en) * | 1998-05-29 | 1999-12-10 | Nissei Denki Kk | Flat molded heater |
| JP2005166368A (en) * | 2003-12-01 | 2005-06-23 | Ngk Insulators Ltd | Heating device |
| JP6555922B2 (en) * | 2015-04-28 | 2019-08-07 | 日本特殊陶業株式会社 | Heating device |
-
2022
- 2022-07-07 JP JP2023536686A patent/JPWO2023002855A1/ja active Pending
- 2022-07-07 CN CN202280048189.4A patent/CN117652203A/en active Pending
- 2022-07-07 WO PCT/JP2022/026963 patent/WO2023002855A1/en active Application Filing
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| Publication number | Publication date |
|---|---|
| WO2023002855A1 (en) | 2023-01-26 |
| JPWO2023002855A1 (en) | 2023-01-26 |
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