WO2022163444A1

WO2022163444A1 - Heating device

Info

Publication number: WO2022163444A1
Application number: PCT/JP2022/001671
Authority: WO
Inventors: 浩幸前田
Original assignee: 京セラ株式会社
Priority date: 2021-01-26
Filing date: 2022-01-18
Publication date: 2022-08-04
Also published as: JP7483951B2; CN116724664A; JPWO2022163444A1

Abstract

This heating device comprises: a heating plate; a fixed plate; and a heater. The heating plate has a heating surface, and has a recess formed in a rear surface opposite to the heating surface. The fixed plate is disposed so as to be isolated from the heating plate, and has a fixing hole at a position corresponding to the recess. The heater has a columnar heater body and a fixing member. The heater body is inserted through the fixing hole, has a tip inserted into the recess, and has a base end at which a power supply terminal is provided. The fixing member is formed into a cylindrical shape so as to surround the outer circumferential surface of the heater body, and fixes the heater body in the fixing hole with a gap between the heater body and the inner wall of the fixing hole.

Description

heating device

The disclosed embodiments relate to heating devices.

Patent Document 1 discloses a heating device in which a heater is inserted and fixed in a hole formed in the side surface of a mold.

JP 2017-154409 A

A heating device according to one aspect of an embodiment includes a heating plate, a fixed plate, and a heater. The heating plate has a heating surface, and a concave portion is formed on the back surface opposite to the heating surface. The fixing plate is spaced apart from the heating plate and has fixing holes at positions corresponding to the recesses. The heater has a columnar heater main body and a fixing member. The heater main body passes through the fixing hole, the tip end is inserted into the recess, and the base end is provided with a terminal for power supply. The fixing member is formed in a cylindrical shape surrounding the outer peripheral surface of the heater main body, and fixes the heater main body to the fixing hole with a gap between it and the inner wall of the fixing hole.

FIG. 1 is a side view of the heating device according to the embodiment. FIG. 2 is a top view of the heating device according to the embodiment. FIG. 3 is a cross-sectional view taken along line III-III of FIG. FIG. 4 is a cross-sectional view taken along line IV-IV of FIG. FIG. 5 is a cross-sectional view of a heating device according to Modification 1 of the embodiment. FIG. 6 is a cross-sectional view of a heating device according to Modification 2 of the embodiment. FIG. 7 is a cross-sectional view of a heating device according to Modification 3 of the embodiment. FIG. 8 is a cross-sectional view of a heating device according to Modification 4 of the embodiment. FIG. 9 is a side view of a heating device according to Modification 5 of the embodiment. FIG. 10 is a cross-sectional view of a heating device according to Modification 5 of the embodiment.

Hereinafter, embodiments of the heating device disclosed in the present application will be described with reference to the accompanying drawings. It should be noted that the present disclosure is not limited by the embodiments shown below. Also, it should be noted that the drawings are schematic, and the relationship of dimensions of each element, the ratio of each element, and the like may differ from reality. Furthermore, even between the drawings, there are cases where portions having different dimensional relationships and ratios are included.

Further, in the embodiments described below, expressions such as "constant", "perpendicular", "perpendicular" or "parallel" may be used, but these expressions are strictly "constant", "perpendicular", " It does not have to be "perpendicular" or "parallel". That is, each of the expressions described above allows deviations in, for example, manufacturing accuracy and installation accuracy.

<Embodiment>
FIG. 1 is a side view of a heating device 100 according to an embodiment. FIG. 2 is a top view of the heating device 100 according to the embodiment. In the following description, the surface positioned on the heating object side when the heating device 100 is brought into contact with the heating object is the “upper surface”, and the surface positioned on the opposite side of the heating object is the “lower surface”. and However, the heating device 100 may be used upside down, for example, or may be used in any posture.

The heating device 100 shown in FIG. 1 has a heating plate 110, a fixed plate 120, a plurality of heaters 130, and a support plate 150.

The heating plate 110 is, for example, a plate-like member made of metal, and has an upper surface 110a that can come into contact with an object to be heated. That is, the upper surface 110a of the heating plate 110 serves as a heating surface for heating the object to be heated. The upper surface 110a is used, for example, for heating a mold as an example of an object to be heated. A plurality of recesses 113 (see FIG. 3) into which a plurality of heaters 130 are respectively inserted are formed in the lower surface 110b of the heating plate 110 opposite to the heating surface.

The plurality of heaters 130 are arranged so as to be perpendicular to the upper surface 110a of the heating plate 110, which is the heating surface, by being inserted into the plurality of recesses 113 respectively. By arranging the plurality of heaters 130 perpendicularly to the heating surface of the heating plate 110, variations in the distance between the plurality of heaters 130 and the heating surface are suppressed. Thermal properties can be improved.

A plurality of recesses 113 into which a plurality of heaters 130 are respectively inserted are formed on the lower surface 110b of the heating plate 110 opposite to the heating surface with uneven density. In FIG. 2, the upper surface 110a of the heating plate 110, which is the heating surface, is shown in the shape of a rectangular plate, and the formation positions of the plurality of recesses 113 are shown. That is, the recesses 113 are formed sparsely in the central portion of the lower surface 110b, and the recesses 113 are densely formed in the peripheral portion of the lower surface 110b. In other words, the plurality of recesses 113 are formed such that the density of the recesses 113 decreases closer to the center of the lower surface 110b, and the density of the recesses 113 increases closer to the periphery. Thus, by adjusting the density of the plurality of recesses 113 on the lower surface 110b of the heating plate 110 opposite to the heating surface, the density of the plurality of heaters 130 inserted into the plurality of recesses 113 can be adjusted. can. As a result, it is possible to further improve the uniformity of heat within the plane of the upper surface 110a of the heating plate 110, which is the heating surface. That is, the peripheral edge portions of the upper surface 110a and the lower surface 110b of the heating plate 110 are more likely to lose heat to the atmosphere around the heating plate 110 than the central portion. For this reason, the peripheral edge portions of the upper surface 110a and the lower surface 110b of the heating plate 110 may have a lower temperature than the central portion. In this case, since the density of the heaters 130 can be increased by increasing the density of the recesses 113 in the peripheral portion of the lower surface 110b, the amount of heat generated in the peripheral portion of the upper surface 110a can be relatively increased. As a result, the amount of heat generated lost by the ambient atmosphere is compensated for, so that the heat uniformity can be further improved.

Note that the arrangement of the recesses 113 is not limited to that shown in FIG. For example, when a heat spot with a higher temperature than other regions occurs on the upper surface 110a of the heating plate 110, which is a heating surface, a plurality of heat spots are formed so that the density of the recesses 113 is low in the region corresponding to the heat spot on the lower surface 110b. A recess 113 may be formed.

The fixed plate 120 is, for example, a plate-like member made of metal, and is arranged apart from the heating plate 110 . A plurality of heaters 130 that are respectively inserted into the plurality of recesses 113 are fixed to the fixed plate 120 . How the heater 130 is fixed to the fixing plate 120 will be described later.

The support plate 150 is fixed to the fixed plate 120 by a plurality of columnar members 151 while being separated from the fixed plate 120 . By positioning the support plate 150 away from the fixed plate 120, it is possible to secure a space between the support plate 150 and the fixed plate 120 for arranging

terminals

133 and 134 of each heater 130, which will be described later. . Note that the support plate 150 and the plurality of columnar members 151 may be omitted as necessary.

FIG. 3 is a cross-sectional view taken along line III-III in FIG. FIG. 4 is a cross-sectional view taken along line IV-IV of FIG. 3 and 4, illustration of the support plate 150 and the plurality of columnar members 151 is omitted.

As shown in FIGS. 3 and 4, the heating device 100 is configured such that a plurality of heaters 130 are fixed to a fixed plate 120 and inserted into a plurality of recesses 113 of a heating plate 110, respectively.

The heating plate 110 has a first plate member 111 and a second plate member 112 .

The first plate member 111 is a plate member having an upper surface 110a of the heating plate 110, which is a heating surface. The first plate member 111 is joined to the second plate member 112 by a joining member 114 such as a bolt. That is, the lower surface 111a of the first plate member 111 opposite to the upper surface 110a is a joint surface to which the second plate member 112 is joined.

The second plate member 112 is a plate-shaped member having an upper surface 112a that serves as a surface to be joined that is joined to the joint surface of the first plate member 111, and a lower surface 110b located on the opposite side of the upper surface 112a. A plurality of through holes 112b are formed in the lower surface 110b, and the lower surface 111a of the first plate member 111 is exposed from each of the plurality of through holes 112b.

Each of the plurality of recesses 113 is formed by each of the plurality of through holes 112b and the lower surface 111a of the first plate member 111 exposed from each of the plurality of through holes 112b. That is, the inner wall surface of each through hole 112 b forms the inner side surface of each recess 113 , and the bottom surface 111 a of the first plate member 111 forms the bottom surface of each recess 113 .

The fixing plate 120 is separated from the heating plate 110 by being connected to the heating plate 110 by a connecting member 121 such as a bolt with a gap formed between the fixing plate 120 and the heating plate 110 . It is By arranging the fixed plate 120 apart from the heating plate 110, it is possible to suppress the temperature rise of the fixing portions (for example, fixing holes 120a described later) of the plurality of heaters 130 with respect to the fixed plate 120. FIG. On the other hand, since the heat taken from the heating plate 110 by the fixing plate 120 is reduced, the temperature rise of the heating plate 110 can be accelerated.

The fixing plate 120 has a plurality of fixing holes 120 a at positions corresponding to the plurality of recesses 113 . A plurality of heaters 130 are respectively inserted and fixed to the plurality of fixing holes 120a. Hereinafter, for convenience of explanation, the plurality of recesses 113, the plurality of fixing holes 120a, and the plurality of heaters 130 will be simply referred to as "recesses 113," "fixing holes 120a," and "heaters 130," respectively, when there is no particular need to distinguish them. call.

The heater 130 has a heater body 131 and a fixing member 132 .

The heater main body 131 is, for example, a cylindrical member. The heater main body 131 penetrates through the fixing hole 120 a , and the tip 131 a thereof is inserted into the recess 113 . A base end 131b of the heater main body 131 protrudes in a direction away from the upper surface 110a of the heating plate 110, which is the heating surface, rather than the lower surface of the fixed plate 120. As shown in FIG.

Terminals

133 and 134 for supplying electric power to the main body 131 of the heater are provided at the proximal end 131b. The

terminals

133 and 134 can be kept away from the heating surface by providing the

terminals

133 and 134 at the proximal end 131b projecting away from the upper surface 110a of the heating plate 110 which is the heating surface. Transmission can be suppressed.

The heater main body 131 is a ceramic heater having a ceramic body and a heating resistor located inside the ceramic body. By using a ceramic heater for the heater main body 131, seizure between the heating plate 110 and the heater main body 131, which are made of metal, can be suppressed. The length of the heater main body 131, that is, the length of the ceramic body can be, for example, about 1 mm to 200 mm. Also, the outer dimensions of the ceramic body can be, for example, about 0.5 mm to 100 mm. The shape of the heater main body 131, that is, the shape of the ceramic body is not limited to a cylindrical shape, and may be, for example, an elliptical columnar shape or a prismatic shape. The material of the ceramic body is, for example, ceramic having insulating properties. As the material of the ceramic body, for example, oxide ceramics, nitride ceramics, carbide ceramics, or the like can be used. A heating resistor is a member that generates heat when an electric current flows. Heating resistors may include high resistance conductors including, for example, tungsten, molybdenum, and the like. The dimensions of the heating resistor can be, for example, a width of 0.1 mm to 5 mm, a thickness of 0.05 mm to 0.3 mm, and a total length of 1 mm to 500 mm. Also, the heating resistor may be a conductive ceramic containing, for example, tungsten carbide. In this case, the difference in thermal expansion between the ceramic body and the heat generating resistor can be reduced. Thereby, the thermal stress between the ceramic body and the heating resistor can be reduced. As a result, durability of the heater body 131 can be enhanced.

The fixing member 132 is formed in a tubular shape surrounding the outer peripheral surface of the heater main body 131 . The fixing member 132 fixes the heater main body 131 to the fixing hole 120a with a gap between it and the inner wall of the fixing hole 120a. Specifically, a female screw is formed in a portion of the inner wall of the fixing hole 120a located on the side opposite to the heating plate 110 . On the other hand, the fixing member 132 has an external thread 132a on part of its outer peripheral surface. When the heater main body 131 is inserted through the fixing hole 120a, the fixing member 132 is formed by fitting the male screw 132a into the female screw of the fixing hole 120a, thereby creating a gap between the heater main body 131 and the inner wall of the fixing hole 120a. is formed, the heater main body 131 is fixed to the fixing hole 120a.

Since the heater main body 131 is thus fixed to the fixing hole 120a with a gap between it and the inner wall of the fixing hole 120a, the fixing plate 120 is less likely to receive heat from the heater main body 131. As a result, the temperature rise of the fixing plate 120 is suppressed, so that heat radiated from the fixing plate 120 toward the base end 131b of the heater main body 131 where the

terminals

133 and 134 for power supply are provided is suppressed. Therefore, according to the heating device 100 according to the embodiment, deterioration of the

terminals

133 and 134 for power supply in the heater 130 can be reduced.

When the heater main body 131 is fixed to the fixing hole 120a with a gap, the gap between the inner wall of the fixing hole 120a and the portion of the heater main body 131 facing the inner wall of the fixing hole 120a is equal to the inner wall of the recess 113 and the heater main body 131. is larger than the interval between the inner wall of the recess 113 and the portion facing the recess 113 . By positioning the heater main body 131 close to the inner wall of the recess 113 and away from the inner wall of the fixing hole 120a in this manner, heat transfer to the heating plate 110 is promoted while heat transfer to the fixing plate 120 is suppressed. be able to. Therefore, according to the heating device 100 according to the embodiment, deterioration of the

terminals

133 and 134 for power supply in the heater 130 can be reduced while maintaining the heating performance of the heating plate 110 .

The diameter of the fixing hole 120a is larger than the diameter of the recess 113. Since the temperature of the concave portion 113 is likely to rise due to the heating of the heater main body 131, increasing the diameter of the fixing hole 120a located at the position corresponding to the concave portion 113 suppresses the heat received by the fixing plate 120 due to the temperature rise of the concave portion 113. be able to.

A spacer member 140 is arranged between the heating plate 110 and the fixed plate 120 . The spacer member 140 has a tubular shape, and the connecting member 121 is inserted therethrough. By providing the spacer member 140 between the heating plate 110 and the fixed plate 120, the separation between the heating plate 110 and the fixed plate 120 can be maintained, and the temperature rise of the fixed plate 120 due to the heat transfer from the heating plate 110 can be prevented. can be suppressed continuously.

The material of the spacer member 140 is preferably heat-resistant ceramic, for example. As a material of the spacer member 140, for example, oxide ceramics, nitride ceramics, carbide ceramics, or the like can be used. As a result, thermal expansion and thermal contraction of the spacer member 140 can be reduced, and wear of the spacer member 140 can be reduced.

<Modification 1>
Next, various modifications of the embodiment will be described with reference to FIGS. 5 to 10. FIG. In addition, in the following description, the same reference numerals are assigned to the configurations common to those of the above-described embodiment, and detailed description thereof will be omitted.

FIG. 5 is a cross-sectional view of the heating device 100 according to Modification 1 of the embodiment. The heating device 100 shown in FIG. 5 is mainly different from the heating device 100 shown in FIGS. 1 to 4 in that a cooling passage for passing a cooling medium is provided inside the stationary plate. Specifically, as shown in FIG. 5, the fixed plate 120 has therein a flow path 160 through which a cooling medium flows as a cooling passage. A flow path 160 through which a cooling medium flows is provided inside the fixed plate 120 to cool the fixed plate 120, thereby cooling the fixed plate 120 from the fixed plate 120 toward the base end 131b of the heater main body 131 provided with the

terminals

133 and 134 for power supply. Radiated heat is further suppressed. Therefore, according to the heating device 100 according to the present modification, deterioration of the

terminals

133 and 134 for power supply in the heater 130 can be further reduced.

The channel 160 extends in the direction along the upper surface 120b of the fixed plate 120 facing the heating plate 110 (for example, the direction toward the back in FIG. 5). Since the upper surface 120b is more likely to receive heat radiated from the heating plate 110 than other parts, the cooling efficiency of the fixed plate 120 can be improved by extending the flow path 160 in the direction along the upper surface 120b. can.

The flow path 160 is positioned between adjacent fixing holes 120a among the plurality of fixing holes 120a. Since the fixing holes 120a are more likely to receive heat radiated from the heater main body 131 than other parts, the cooling efficiency of the fixing plate 120 is improved by positioning the flow paths 160 between the adjacent fixing holes 120a. can be made

For example, cooling water can be used as the cooling medium that flows through the flow path 160 . Also, cooling gas such as air may be used instead of cooling water.

<Modification 2>
FIG. 6 is a cross-sectional view of a heating device 100 according to Modification 2 of the embodiment. The heating device 100 shown in FIG. 6 differs from the heating device 100 shown in FIG. 5 in the structure of the cooling passage provided inside the fixing plate. Specifically, as shown in FIG. 6, the fixed plate 120 has inside a pipe 170 through which a cooling medium flows as a cooling passage. By providing a pipe 170 through which a cooling medium flows inside the fixed plate 120 to cool the fixed plate 120, the heat is radiated from the fixed plate 120 toward the base end 131b of the heater main body 131 provided with

terminals

133 and 134 for power supply. The heat generated is further suppressed. Therefore, according to the heating device 100 according to the present modification, deterioration of the

terminals

133 and 134 for power supply in the heater 130 can be further reduced.

The pipe 170 extends in a direction along the upper surface 120b of the fixed plate 120 facing the heating plate 110 (for example, in the direction toward the back in FIG. 6). Since the upper surface 120b is more likely to receive heat radiated from the heating plate 110 than other parts, the cooling efficiency of the fixed plate 120 can be improved by extending the pipe 170 in the direction along the upper surface 120b. .

The pipe 170 is positioned between adjacent fixing holes 120a among the plurality of fixing holes 120a. Since the fixing holes 120a are more likely to receive heat radiated from the heater body 131 than other parts, the piping 170 is positioned between the adjacent fixing holes 120a, thereby improving the cooling efficiency of the fixing plate 120. be able to.

For example, cooling water can be used as the cooling medium that flows through the pipe 170 . Also, cooling gas such as air may be used instead of cooling water.

<Modification 3>
FIG. 7 is a cross-sectional view of a heating device 100 according to Modification 3 of the embodiment. The heating device 100 shown in FIG. 7 differs from the heating device 100 shown in FIG. 6 in the structure of the fixing plate and the installation mode of the piping. Specifically, as shown in FIG. 7, the fixing plate 120 is divided into two members, a lid member 121 located on the heating plate 110 side and a base member 122 located on the opposite side of the heating plate 110. It is constructed by joining a lid member 121 to a base member 122 . The joint surface of the base member 122 with the lid member 121 is formed with a groove portion 122a extending in the direction along the upper surface 120b (for example, the direction toward the back side in FIG. 7). The pipe 170 is arranged in a groove portion 122b extending in a direction along the upper surface 120b. Since the upper surface 120b is more likely to receive heat radiated from the heating plate 110 than other parts, the cooling efficiency of the fixed plate 120 is improved by installing the piping 170 in the groove 122b extending in the direction along the upper surface 120b. be able to. Further, by removing the cover member 121 from the base member 122 and opening the groove portion 122b upward, the pipe 170 can be easily taken out from the groove portion 122b.

<Modification 4>
FIG. 8 is a cross-sectional view of a heating device 100 according to Modification 4 of the embodiment. The heating device 100 shown in FIG. 8 differs from the heating device 100 shown in FIGS. 1 to 4 in the shape of the fixing holes. Specifically, as shown in FIG. 8, the fixing hole 120a is connected to the first hole portion 120a-1 positioned opposite the recess 113 and the first hole portion 120a-1. and a second hole 120a-2 having a diameter smaller than that of the hole 120a-1. The distance between the inner wall of the first hole portion 120a-1 and the portion of the heater body 131 facing the inner wall of the first hole portion 120a-1 is the same as the inner wall of the second hole portion 120a-2 and the heater body 131. 2 larger than the interval between the inner wall of the hole 120a-2 and the portion facing the hole 120a-2. Since the temperature of the recessed portion 113 is likely to rise due to the heating of the heater body 131, if the diameter of the first hole portion 120a-1 positioned opposite to the recessed portion 113 is increased, the fixed plate 113 will not be able to withstand the temperature rise associated with the temperature rise of the recessed portion 113. 120 heat reception can be suppressed. Further, by locating the heater body 131 close to the inner wall of the second hole 120a-2, an area for fixing the heater body 131 to the fixing hole 120a (for example, a thread corresponding to the external thread 132a of the fixing member 132) is provided. area for thread formation) can be secured.

<Modification 5>
FIG. 9 is a side view of a heating device 100 according to modification 5 of the embodiment. FIG. 10 is a cross-sectional view of a heating device 100 according to modification 5 of the embodiment. The heating device 100 shown in FIGS. 9 and 10 basically has the same structure as the heating device 100 shown in FIGS. 1-4. However, the heating apparatus 100 shown in FIGS. 9 and 10 has the heating plate 110 not divided into two members, the first plate member 111 and the second plate member 112. It differs from device 100 . Specifically, as shown in FIGS. 9 and 10, in the heating plate 110, portions corresponding to the first plate member 111 and the second plate member 112 are formed integrally with a metal plate member. It is As a result, according to the heating device 100 according to Modification 5, the manufacturing process of the heating device 100 can be simplified.

As described above, the heating device (eg, heating device 100) according to the embodiment includes a heating plate (eg, heating plate 110), a fixing plate (eg, fixing plate 120), and a heater (eg, heater 130). have The heating plate has a heating surface (eg, top surface 110a), and a recess (eg, recess 113) is formed on the back surface (eg, bottom surface 110b) opposite to the heating surface. The fixing plate is spaced apart from the heating plate and has fixing holes (for example, fixing holes 120a) at positions corresponding to the recesses. The heater has a columnar heater main body (for example, heater main body 131) and a fixing member (for example, fixing member 132). The heater main body passes through the fixing hole, the tip (eg, tip 131a) is inserted into the recess, and the base end (eg, base end 131b) is provided with terminals for power supply (eg, terminals 133 and 134). The fixing member is formed in a cylindrical shape surrounding the outer peripheral surface of the heater main body, and fixes the heater main body to the fixing hole with a gap between it and the inner wall of the fixing hole. As a result, according to the heating device of the embodiment, it is possible to reduce deterioration of the power feeding terminal of the heater.

In the heating device according to the embodiment, the distance between the inner wall of the fixing hole and the portion of the heater body facing the inner wall of the fixing hole is the distance between the inner wall of the recess and the portion of the heater body facing the inner wall of the recess. may be greater than As a result, according to the heating device of the embodiment, it is possible to reduce the deterioration of the power supply terminal of the heater while maintaining the heating performance of the heating plate.

Also, in the heating device according to the embodiment, the diameter of the fixing hole may be larger than the diameter of the recess. As a result, according to the heating device of the embodiment, it is possible to suppress the heat received by the fixing plate due to the temperature rise of the concave portion.

Further, in the heating device according to the embodiment, the fixing hole is connected to the first hole (for example, the first hole 120a-1) located at a position facing the recess, and the first hole, A second hole (for example, the second hole 120a-2) having a smaller diameter than the first hole may be formed. The distance between the inner wall of the first hole and the portion of the heater main body facing the inner wall of the first hole is the distance between the inner wall of the second hole and the portion of the heater main body facing the inner wall of the second hole. may be larger than the interval of As a result, according to the heating device according to the embodiment, it is possible to suppress the heat received by the fixing plate due to the temperature rise of the recess, and to secure the area for fixing the heater main body to the fixing hole.

Further, the heating device according to the embodiment may further have a spacer member (for example, spacer member 140) provided between the heating plate and the fixed plate. As a result, according to the heating device of the embodiment, it is possible to continuously suppress the temperature rise of the fixed plate due to the heat transfer from the heating plate.

Further, in the heating device according to the embodiment, the spacer member may be made of ceramic. As a result, the heating device according to the embodiment can reduce wear of the spacer member.

In addition, in the heating device according to the embodiment, the fixed plate may have therein a cooling passage (for example, the flow path 160 or the pipe 170) through which the cooling medium passes. As a result, according to the heating device of the embodiment, it is possible to further reduce the deterioration of the terminals for power supply in the heater.

In addition, in the heating device according to the embodiment, the cooling passage may extend in the direction along the surface of the fixed plate facing the heating plate (for example, the upper surface 120b). Thereby, according to the heating device according to the embodiment, it is possible to improve the cooling efficiency of the stationary plate.

Also, in the heating device according to the embodiment, the heating plate may have a plurality of recesses. The fixing plate may have a plurality of fixing holes at positions corresponding to the plurality of recesses. The cooling passages may be located between adjacent fixation holes. Thereby, according to the heating device according to the embodiment, it is possible to improve the cooling efficiency of the stationary plate.

Further effects and modifications can be easily derived by those skilled in the art. Therefore, the broader aspects of the invention are not limited to the specific details and representative embodiments so shown and described. Accordingly, various changes may be made without departing from the spirit or scope of the general inventive concept defined by the appended claims and equivalents thereof.

100 heating device 110 heating plate 110a upper surface 110b lower surface 111 first plate member 111a lower surface 112 second plate member 112a upper surface 112b through hole 113 recess 120 fixing plate 120a fixing hole 120a-1 first hole 120a-2 second hole 120b upper surface 130 heater 131 heater main body 131a tip 131b base end 132 fixing member 132a

male screws

133, 134 terminal 140 spacer member

Claims

a heating plate having a heating surface and a concave portion formed on the back surface opposite to the heating surface;
a fixing plate spaced apart from the heating plate and having a fixing hole at a position corresponding to the recess;
A columnar heater body that passes through the fixing hole, has a tip end inserted into the recess, and has a base end provided with a terminal for power supply, and a cylindrical heater body surrounding the outer peripheral surface of the heater body, a heater having a fixing member that fixes the heater main body to the fixing hole with a gap from the inner wall.
The distance between the inner wall of the fixing hole and the portion of the heater body facing the inner wall of the fixing hole is greater than the distance between the inner wall of the recess and the portion of the heater body facing the inner wall of the recess. The heating device according to claim 1.
The heating device according to claim 1 or 2, wherein the diameter of the fixing hole is larger than the diameter of the recess.
The fixing hole is formed by a first hole located at a position facing the recess and a second hole that is continuous with the first hole and has a smaller diameter than the first hole. is,
The distance between the inner wall of the first hole and the portion of the heater body facing the inner wall of the first hole is the distance between the inner wall of the second hole and the second hole of the heater body. 4. The heating device according to any one of claims 1 to 3, wherein the space between the inner wall and the facing portion is larger.
The heating device according to any one of claims 1 to 4, further comprising a spacer member provided between said heating plate and said fixed plate.
The heating device according to claim 5, wherein the spacer member is made of ceramic.
The heating device according to any one of claims 1 to 4, wherein the fixed plate has therein a cooling passage through which a cooling medium passes.
The heating device according to claim 7, wherein the cooling passage extends in a direction along the surface of the fixed plate facing the heating plate.
The heating plate has a plurality of recesses,
the fixing plate has a plurality of fixing holes at positions corresponding to the plurality of recesses;
9. The heating device according to claim 7 or 8, wherein said cooling passage is positioned between said adjacent fixing holes.