CN1176350C - Measurer for thickness of float polished liquid film - Google Patents
Measurer for thickness of float polished liquid film Download PDFInfo
- Publication number
- CN1176350C CN1176350C CNB021324239A CN02132423A CN1176350C CN 1176350 C CN1176350 C CN 1176350C CN B021324239 A CNB021324239 A CN B021324239A CN 02132423 A CN02132423 A CN 02132423A CN 1176350 C CN1176350 C CN 1176350C
- Authority
- CN
- China
- Prior art keywords
- liquid film
- rotating shaft
- polishing
- clubfoot
- catoptron
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Abstract
The present invention relates to a measurer for the thickness of a float polishing liquid film, which belongs to the technical field of optical cold processing. The technical problem to be solved by the present invention is to measure the floating and pitching angular variation of an optical lever in a polishing liquid film. In order to solve the technical problem, the present invention has the technical scheme that an optical lever structure is supported by a smooth rotating shaft; one end of the optical lever floating on the surface of the liquid film is provided with a bending foot with a transition arc, and the other end of the optical lever is provided with a reflecting mirror; collimator tubes are used for observing the pitching angular variation of the optical lever. The present invention is composed of a polishing system and a measuring system, wherein the measuring system is installed at the back side of a processed workpiece in the polishing system. The measure can dynamically measure the thickness of a liquid film in real time, can improve the polishing conditions of ultra-smooth surfaces and can increase work efficiency and polishing quality.
Description
Technical field
The invention belongs to the measurement mechanism of a kind of polishing fluid film thickness in the optics cold processing technique field.
Background technology
In optics cold working, usually run into and to carry out super-smooth surface processing some eyeglasses, such as in short-wave band optics, be used in the extreme ultraviolet etching system in the VLSI (very large scale integrated circuit) manufacturing, need the image quality of optical system clear especially, this is less than the ultra-smooth degree of 1nm (RMS) with regard to the surfaceness that requires optical mirror slip.
In general, optics cold working to super-smooth surface, the lapping mode that can not adopt common work piece and mill directly to contact, allow polishing fluid be full of gap space between work piece surface and the mill but adopt, the relative motion of mill and work piece has formed the liquid film of both gap spaces, the effect of this liquid film, can reach the effect to the ultra-smooth processing of work piece surface, thickness of liquid film becomes the cold worked very important factor of super-smooth surface that influences.Therefore, in the super-smooth surface process, thickness of liquid film is carried out real time dynamic measurement, just become requisite work in the super-smooth surface processing.
According to situation about grasping, both at home and abroad in super-smooth surface processing, usually all adopt the way that on work piece, adds counterweight, regulate thickness of liquid film between work piece and the mill, with the most approaching prior art of the present invention (Y.Namba and H.Tsuwa as shown in Figure 1, Ultra-precisionfloat polishing machine, Annals CIRP, 1987,36 (1): 211-214): constitute by polishing pond 1, work piece 2, workpiece spindle 3, counterweight 4, tin mill 5, mill spindle 6.
This device is by adding the way of counterweight 4 on the work piece 2, regulate the thickness of the liquid film between work piece 2 and the tin mill 5, satisfying the needs of Super-smooth Surface Polishing.This way only knows that thickness of liquid film has obtained adjustment, in fact to the size of thickness of liquid film, does not have the notion of amount, and workpiece of every processing all must carry out the counterweight test and adjust, and makes troubles to work, influences the realization of work efficiency and robotization.In order to overcome above-mentioned shortcoming, a kind of device that can the real time dynamic measurement thickness of liquid film of ad hoc meter is to increase work efficiency and to help to realize the processing of robotization super-smooth surface.
Summary of the invention
The technical problem to be solved in the present invention is: optical lever can be floated the measurement that changes with luffing angle in liquid film.
The technical scheme of technical solution problem is: adopt smooth rotating shaft to support the optical lever structure, the end that optical lever floats over the liquid film surface has the clubfoot of transition slyness, and the other end has catoptron, and the luffing angle of observing optical lever with parallel light tube changes.
Detailed content of the present invention comprises polishing system (7,8,9,13,15,16) and measuring system (10,11,12,13,14) as shown in Figure 2.Wherein polishing system comprises tin mill 7, work piece 8, workpiece spindle 9, liquid film 13, polishing pond 15, tin mill spindle 16; Measuring system comprises catoptron 10, rotating shaft 11, clubfoot 12, liquid film 13, parallel light tube 14.
In polishing system, tin mill spindle 16 is vertically mounted on the center of tin mill 7, drives 7 rotations of tin mill, workpiece spindle 9 is vertically fixed on the center of work piece 8, drive work piece 8 rotations, the polished surface of work piece 8 is surperficial parallel with tin mill 7, is full of liquid film 13 between the two.
Measuring system (10,11,12,13,14) be installed in polishing system (7,8,9,13,15, the back of the work piece 8 16), in measuring system, catoptron 10, rotating shaft 11, clubfoot 12 threes constitute optical lever, catoptron 10 is above rotating shaft 11, the axially parallel of minute surface and rotating shaft 11, axially axial vertical with vertical workpiece spindle 9 of rotating shaft 11, clubfoot 12 is below rotating shaft 11, the axially parallel of the face of clubfoot 12 and rotating shaft 11, the clubfoot face of clubfoot 12 bottoms is with the surperficial parallel of liquid film 13 and float on the surface of liquid film 13, greater than 120 ° and less than 180 °, the optical axis of parallel light tube 14 is perpendicular to the reflecting surface of catoptron 10 at the catoptron above the rotating shaft 11 10 and the angle that forms between the face of the clubfoot below the rotating shaft 11 12.
Principle of work explanation: form the optical lever of 11 rotations around the shaft by catoptron 10 and clubfoot 12, when not beginning to polish, the clubfoot 12 of optical lever falls within the surface of mill 7 naturally down, after beginning polishing, 7 on work piece 8 and mill are gapped, make mill 7 surfaces form one deck liquid film, because the effect of hydrodynamic, clubfoot 12 upwards floats, and drives catoptron 10 deflections.Measure the deflection angle of catoptron 10 with parallel light tube 14 after, can calculate the come-up distance of clubfoot 12, thereby draw thickness of liquid film.
Good effect: the present invention can go out thickness of liquid film by real time dynamic measurement, so as in time the regulator solution film thickness, improve super-smooth surface processing polishing condition, increase work efficiency, guarantee the workpiece quality of finish.
Description of drawings
Fig. 1 is the structural representation of prior art, and Fig. 2 is a structural representation of the present invention, and Figure of abstract also adopts Fig. 2.
Embodiment
The present invention implements by structure shown in Figure 2, and the clubfoot 12 in the optical lever adopts light materials, and it is slick and sly that clubfoot is wanted, and smooth rotating shaft is adopted in rotating shaft 11, and rotation is sensitive, and the reflecting surface of catoptron 10 is aluminized, and parallel light tube 14 adopts measuring accuracy to be higher than 0.2 " parallel light tube.
Claims (1)
1, a kind of measurer for thickness of float polished liquid film, comprise polishing system, polishing system comprises polishing pond, work piece, workpiece spindle, tin mill, mill spindle, it is characterized in that the present invention also comprises measuring system, measuring system comprises catoptron (10), rotating shaft (11), bent angle (12), liquid film (13), parallel light tube (14); In polishing system, tin mill spindle (16) is vertically mounted on the center of tin mill (7), workpiece spindle (9) is vertically fixed on the center of work piece (8), and the polished surface of work piece (8) is surperficial parallel with tin mill (7), is full of liquid film (13) between the two.Measuring system is installed in the back of the work piece (8) in the polishing system, in measuring system, catoptron (10), rotating shaft (11), clubfoot (12) three constitutes optical lever, catoptron (10) is in the top of rotating shaft (11), the axially parallel of minute surface and rotating shaft (11), axially axial vertical with vertical workpiece spindle (9) of rotating shaft (11), clubfoot (12) is in the below of rotating shaft (11), the axially parallel of the face of clubfoot (12) and rotating shaft (11), the clubfoot face of clubfoot (12) bottom is with the surperficial parallel of liquid film (13) and float on the surface of liquid film (13), the angle that forms between the catoptron (10) that is positioned at rotating shaft (11) top and the face that is positioned at the clubfoot (12) below the rotating shaft (11) is greater than 120 ° and less than 180 °, and the optical axis of parallel light tube (14) is perpendicular to the reflecting surface of catoptron (10).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB021324239A CN1176350C (en) | 2002-06-06 | 2002-06-06 | Measurer for thickness of float polished liquid film |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB021324239A CN1176350C (en) | 2002-06-06 | 2002-06-06 | Measurer for thickness of float polished liquid film |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1387022A CN1387022A (en) | 2002-12-25 |
| CN1176350C true CN1176350C (en) | 2004-11-17 |
Family
ID=4746763
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB021324239A Expired - Fee Related CN1176350C (en) | 2002-06-06 | 2002-06-06 | Measurer for thickness of float polished liquid film |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN1176350C (en) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101758448B (en) * | 2009-12-30 | 2011-07-27 | 东南大学 | Electrochemical electrode polishing device |
| CN102278967A (en) * | 2011-03-10 | 2011-12-14 | 清华大学 | Thickness measuring device and method of polishing solution and chemically mechanical polishing equipment |
| CN103737452A (en) * | 2014-01-16 | 2014-04-23 | 王成 | Novel float polishing equipment and polishing method |
| CN104475347B (en) * | 2014-12-12 | 2023-05-26 | 重庆瑶红食品有限公司 | Detection and sorting device for food |
| CN113267146B (en) * | 2021-05-12 | 2022-03-22 | 中国科学院西安光学精密机械研究所 | Method and system for calibrating parallelism of heterodromous deflection light pipe based on double-mirror splicing |
-
2002
- 2002-06-06 CN CNB021324239A patent/CN1176350C/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| CN1387022A (en) | 2002-12-25 |
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| C19 | Lapse of patent right due to non-payment of the annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |