CN108533612A - High-precision air-floating shaft system based on glass guide rail and glass guide rail processing method thereof - Google Patents
High-precision air-floating shaft system based on glass guide rail and glass guide rail processing method thereof Download PDFInfo
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- CN108533612A CN108533612A CN201810275752.7A CN201810275752A CN108533612A CN 108533612 A CN108533612 A CN 108533612A CN 201810275752 A CN201810275752 A CN 201810275752A CN 108533612 A CN108533612 A CN 108533612A
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- Prior art keywords
- rail
- glass guide
- guide
- glass
- shaft system
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Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C32/00—Bearings not otherwise provided for
- F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
- F16C32/0681—Construction or mounting aspects of hydrostatic bearings, for exclusively rotary movement, related to the direction of load
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
- B23Q1/25—Movable or adjustable work or tool supports
- B23Q1/26—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
- B23Q1/38—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members using fluid bearings or fluid cushion supports
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B1/00—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C29/00—Bearings for parts moving only linearly
- F16C29/005—Guide rails or tracks for a linear bearing, i.e. adapted for movement of a carriage or bearing body there along
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C29/00—Bearings for parts moving only linearly
- F16C29/02—Sliding-contact bearings
- F16C29/025—Hydrostatic or aerostatic
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C2220/00—Shaping
- F16C2220/60—Shaping by removing material, e.g. machining
- F16C2220/70—Shaping by removing material, e.g. machining by grinding
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Magnetic Bearings And Hydrostatic Bearings (AREA)
- Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
Abstract
The invention discloses a high-precision air-floating shaft system based on a glass guide rail and a glass guide rail processing method thereof. The glass guide rail processing method comprises the steps of roughly processing a glass material blank of the glass guide rail through a precision grinding machine, and carrying out deterministic removing polishing and repeated shape-modifying polishing on the roughly processed glass guide rail until the processing surface of the glass guide rail meets the requirements. The high-precision air-floating shaft system can greatly improve the precision of a moving shaft and reduce the straightness error of a single-shaft guide rail; the processing method can prepare the glass guide rail meeting the requirements of high-precision air floatation shafting.
Description
Technical field
The present invention relates to the fields such as optical manufacturing, optical measurement, mechanical processing, and in particular to a kind of based on glass guide-rail
High-precision air floating shaft system and its glass guide-rail processing method are related to the guide rail of glass material in high-precision moves along a straight line shafting
With.
Background technology
Guide rail is the benchmark of machine tool motion system, is one of transmission system critical component.Currently used guide rail form has
Ball-screw guide rail, linear rolling track, hydraulic pressure guide rail, air-float guide rail.Aerostatic guide way is will be with the sky of certain pressure
Gas is sent into guide clearance by flow controller, makes guideway levitation by its static pressure, makes to form one layer extremely between guide pass
Thin air film, and air-film thickness is held essentially constant a kind of rail plate of constant pure air friction.That is, air
Hydrostatic slideway is exactly the high-accuracy mechanical component developed according to fluid lubrication technology, and simultaneously by air-film thickness
Stepless action, to reach high-precision, high Motion Resolution rate.Due to the characteristic of gas itself, including it is with small vibration, viscosity is low, is not easy
Creep, the advantages that thermal stability is good and free from environmental pollution, enable this technology of gas lubrication be suitable for well it is accurate,
The processing of underloading, high speed detects in motion platform, in the smaller super-precision machine tools of load variations and measuring machine and precision
In machinery, aerostatic guide way is generally used, and with the development of new and high technology, nearly recent decades are to accurate and superfinishing
The demand of close processing and measuring apparatus constantly increases, this allows for aerostatic guide way and is widely used.
The advantages of aerostatic guide way researched and developed using gas lubrication technology, is mainly reflected in：1. kinematic accuracy is high：By
There is Panel-corrected Model in air film, improve the linearity and flatness of guide pass, and reduce air film gap, guide rail
Higher rigidity and kinematic accuracy are obtained, and then is widely used in high-precision processing and measuring apparatus.2. without fever phenomenon：By
It is low in air viscosity, therefore frictional force is small, movement speed in working condition itself is not very high, therefore aerostatic guide way is not
Movement can be caused to generate heat, be not in thermal deformation.3. friction with it is with small vibration：There are air film gaps between guide rail, and two working faces are not
Contact, and gas viscosity is minimum, therefore it is considered no friction, have the characteristics that power attenuation is small, there can be longer service life,
And it without vibration and creeping phenomenon, may be implemented accurately to position.4. use environment is good：Since compressed air is all by mistake
Filter, therefore in use, dust and liquid will not be immersed in guide rail.And due to not using lubricating oil, do not pollute ring
Border is suitable for ultraprecise and detects environment.
But aerostatic guide way also has its shortcoming, including precision applied to ultra precision machine tool platform at this stage
It also needs further to be promoted with rigidity, easy tos produce self-excited vibration and gas hammer phenomenon etc., but limit it toward higher precision platform of machine tool
The main problem of application is embodied in precision aspect：
Conventional air hydrostatic slideway generally uses metal or marble material, and is added using mechanical grinding or lapping mode
The flatness level of work, guide rail moving surface can only be worked into micron dimension, cause the motion straightness of aerostatic guide way only
The accuracy requirement of scanning survey motion platform in this project can be cannot be satisfied to 0.5 μm.Therefore, although aerostatic guide way skill
Art application field and in extensive range, but the requirement of superelevation motion straightness benchmark is adapted to, there are many theoretical and practical problems
Need further to be solved, there is an urgent need for study new structure type and new material and new machining and testing method.
Invention content
The technical problem to be solved in the present invention：For the above problem of the prior art, provide a kind of based on glass guide-rail
High-precision air floating shaft system and its glass guide-rail processing method, the high-precision air floating shaft system based on glass guide-rail can greatly improve fortune
The precision of moving axis reduces the straightness error of uniaxial guide rail；Processing method, which can be prepared, meets high-precision air floating shaft system requirement
Glass guide-rail.
In order to solve the above-mentioned technical problem, the technical solution adopted by the present invention is：
The present invention provides a kind of high-precision air floating shaft system based on glass guide-rail, including pedestal, and the pedestal is equipped with guide rail, gas
Slick and frivolous block and driving mechanism, the aerostatic slide sliding are arranged on guide rail and are driven by driving mechanism, and the guide rail is to adopt
The glass guide-rail made of glass material.
Preferably, it is set on the pedestal there are two the boss of gap arrangement, the glass guide-rail support arrangement is in pedestal
On boss.
Preferably, the bottom of the glass guide-rail is set there are two threaded mounting hole, and the boss is equipped with fixing screws, institute
State fixing screws and threaded mounting hole screw-thread fit.
Preferably, it is arranged with gasket in the fixing screws.
Preferably, the top of the glass guide-rail be located at threaded mounting hole back side be equipped with unload power slot.
Preferably, the power of the unloading slot is square groove, and the both sides of the power of the unloading slot are equipped with straight slot, and the straight slot is along vertical
Direction is through on the bottom surface of glass guide-rail, and the straight slot is arranged along the glide direction of glass guide-rail.
Preferably, the openings of sizes of the power of the unloading slot is identical as the top surface size of boss, and the square groove of the power of the unloading slot is most
6 ~ 7 times of the diameter of a length of threaded mounting hole of short side, the depth of the power of the unloading slot are the 1/2 of glass guide-rail thickness.
Preferably, the aerostatic slide includes top shoe, front-slider and rear slider, the bottom side of the top shoe with
Front-slider is connected, the other side and rear slider are connected to form the U-shaped structure that cross section is back-off, and the bottom of the front-slider is equipped with
Preceding sliding block, the bottom of the rear slider are equipped with rear sliding block, the glass guide-rail sliding be arranged in top shoe, front-slider, after
Sliding block, preceding sliding block, rear sliding block surround between the vacancy to be formed.
Preferably, the driving mechanism includes decelerating motor, driving wheel, belt and driven wheel, is set respectively on the pedestal
There are two mounting groove, it is mounted in a mounting groove in motor cabinet, another mounting groove and is equipped with tensioning adjusting bracket, it is described
Tensioning adjusting bracket is connected by adjusting bolt with the tensioning adjusting switchover plate on pedestal, and the decelerating motor is mounted on
On motor cabinet, the driving wheel is mounted on by bearing on motor cabinet, and the driven wheel is mounted on tensioning by bearing and adjusts branch
On frame, the output end of the decelerating motor is connected with driving wheel, and the belt is set in driving wheel, on driven wheel, and the skin
Band is fixedly connected with aerostatic slide.
The present invention provides a kind of glass guide-rail processing method of the aforementioned high-precision air floating shaft system based on glass guide-rail, implements
Step includes：
1）Roughing is carried out to the glass material green body of glass guide-rail by precision grinder so that glass guide-rail after roughing
Flatness is better than 20 microns better than 20 microns, the depth of parallelism；
2）Polishing is removed to the being determined property of glass guide-rail after roughing by computer control optical surface formation technology, is made
The flatness of glass guide-rail is better than 10 microns better than 5 microns, the depth of parallelism；
3）Repairing type polishing is carried out to the glass guide-rail after the removal polishing of being determined property by Magnetorheological Polishing lathe, glass is made to lead
The flatness of rail is better than 0.1 micron, and the depth of parallelism is better than 1 micron, and the verticality of four working faces between any two is better than 3 rads；
4）By the machined surface of apparatus measures glass guide-rail, if the machined surface of glass guide-rail still cannot be met the requirements, and jump
Turn to execute step 3）, otherwise terminate and exit.
The present invention is based on the high-precision air floating shaft system of glass guide-rail tools to have the advantage that：The present invention is based on the height of glass guide-rail
The pedestal of precision air floating shaft system be equipped with guide rail, aerostatic slide and driving mechanism, aerostatic slide sliding be arranged on guide rail and
It is driven by driving mechanism, guide rail is that can make full use of optical manufacturing using glass guide-rail made of glass material and optics is surveyed
The means such as amount improve the accuracy of manufacture of guide rail, so that this movement benchmark of guide rail is had the linear precision of optical grade, to substantially carry
The precision of high kinematic axis.
Description of the drawings
Fig. 1 is the dimensional structure diagram of the embodiment of the present invention.
Fig. 2 is the right side structural representation of the embodiment of the present invention.
Fig. 3 is the dimensional structure diagram of pedestal of the embodiment of the present invention.
Fig. 4 is the dimensional structure diagram of glass guide-rail of the embodiment of the present invention.
Fig. 5 is the overlooking structure diagram of glass guide-rail of the embodiment of the present invention.
Marginal data：1, pedestal；11, boss；12, mounting groove；13, motor cabinet；14, it is tensioned adjusting bracket；15, tensioning is adjusted
Save pinboard；16, tensioning adjusts mounting hole；2, guide rail；21, threaded mounting hole；22, power slot is unloaded；23, straight slot；3, aerostatic slide；
31, top shoe；32, front-slider；321, preceding sliding block；33, rear slider；331, rear sliding block；4, driving mechanism；41, slow down electricity
Machine；42, driving wheel；43, belt；44, driven wheel.
Specific implementation mode
As depicted in figs. 1 and 2, the present embodiment provides a kind of high-precision air floating shaft system based on glass guide-rail, including pedestal
1, pedestal 1 is equipped with guide rail 2, aerostatic slide 3 and driving mechanism 4, and the sliding of aerostatic slide 3 is arranged on guide rail 2 and by driving
Mechanism 4 drives, and guide rail 2 is using glass guide-rail made of glass material.
As shown in figure 3, being set on pedestal 1 in the present embodiment, there are two the boss 11 of gap arrangement, glass guide-rail support arrangements
In on the boss 11 of pedestal 1, the boss 11 on pedestal 1 reduces shadow of the contact surface flatness error to high glass guide-rail precision
It rings；On pedestal 1 in addition to this two boss 11, do not contacted with glass guide-rail.In the present embodiment, pedestal 1 is made of marble；
In general, 11 height of boss is 1 millimeter, the flatness and coplane degree of two boss 11 are superior to 1 micron.
As shown in Figure 4 and Figure 5, the bottom of glass guide-rail is set there are two threaded mounting hole 21, and boss 11 is equipped with fixed spiral shell
Nail, fixing screws and 21 screw-thread fit of threaded mounting hole, and gasket is arranged in fixing screws.In the present embodiment, fixing screws
On the gasket that is arranged specifically use copper gasket, can make glass guide-rail is more firm to be fixed on pedestal 1 in this way.
As shown in Figure 1, Figure 4 and Figure 5, the top of glass guide-rail be located at threaded mounting hole 21 back side be equipped with unload power slot 22,
It unloads power slot 22 and effectively inhibits the stress deformation of working face of guide rail during the installation process, substantially reduce the precision damage after installation
It loses.
As shown in Figure 1, Figure 4 and Figure 5, it is square groove that power slot 22 is unloaded in the present embodiment, and the both sides for unloading power slot 22 are equipped with
Straight slot 23, straight slot 23 are vertically through on the bottom surface of glass guide-rail, and straight slot 23 is arranged along the glide direction of glass guide-rail.
It is the counterbore set on the top of glass guide-rail to unload power slot 22, is reinforced glass guide-rail by installing copper backing additional, and increases screw peace
Fill transmission displacement of the power toward working face；Straight slot 23 is track type structure, for completely cutting off transmission of the mount stress toward working face.
In the present embodiment, the openings of sizes for unloading power slot 22 is identical as the top surface size of boss 11, unloads the square groove of power slot 22
6 ~ 7 times of the diameter of a length of threaded mounting hole of most short side 21, the depth for unloading power slot 22 are the 1/2 of glass guide-rail thickness.
As depicted in figs. 1 and 2, aerostatic slide 3 includes top shoe 31, front-slider 32 and rear slider 33 in the present embodiment,
The bottom side of top shoe 31 is connected with front-slider 32, the other side and rear slider 33 are connected to form the U-shaped that cross section is back-off
The bottom of structure, front-slider 32 is equipped with preceding sliding block 321, and the bottom of rear slider 33 is equipped with rear sliding block 331, glass guide-rail sliding
Top shoe 31, front-slider 32, rear slider 33, preceding sliding block 321, rear sliding block 331 is arranged in surround between the vacancy formed.
It must assure that front-slider 32, the width of rear slider 33 are 30 ~ 40 microns higher than the thickness of glass guide-rail during machining of slide block, filling
It must assure that front-slider 32, rear slider 33 and the front-back of glass guide-rail are kept at a distance from 15 ~ 20 microns with process, this distance
Ensured by the clearance gauge of respective thickness, sliding block withdraws clearance gauge and can guarantee front-slider 32, rear slider 33 and glass guide-rail after fixing
Front-back distance.
As depicted in figs. 1 and 2, in the present embodiment driving mechanism 4 include decelerating motor 41, driving wheel 42, belt 43 and from
Driving wheel 44 is respectively equipped with two mounting grooves 12 on pedestal 1, and motor cabinet 13, another peace are mounted in a mounting groove 12
Tensioning adjusting bracket 14 is equipped in tankage 12, tensioning adjusting bracket 14 passes through adjusting bolt 15 and the tensioning on pedestal 1
Adjusting switchover plate 16 is connected, and decelerating motor 41 is mounted on motor cabinet 13, and driving wheel 42 is mounted on by bearing on motor cabinet 13,
Driven wheel 44 is mounted on by bearing in tensioning adjusting bracket 14, and the output end of decelerating motor 41 is connected with driving wheel 42, belt
43 are set in driving wheel 42, on driven wheel 44, and belt 43 is fixedly connected with aerostatic slide 3.By being tensioned adjusting bracket 14, adjusting
Section bolt 15, tensioning adjusting switchover plate 16 constitute the tensioning regulating mechanism of belt 43, and make the strainer letter of belt 43
It is single effective.In the present embodiment, two mounting grooves 12 1 be L-type fixing groove, another be H-type fixing groove, L-type fixing groove and H
Type fixing groove is opened in the both ends of pedestal 1, and motor cabinet 13 is mounted in L-type fixing groove, and tensioning adjusting bracket 14 then slides arrangement
In H-type fixing groove.
The design of glass guide-rail includes mainly following aspect：The length size of glass guide-rail is determined according to design objective
Afterwards, mechanics optimization emulation is carried out, determines quantity and the position of threaded mounting hole 21, and designed at the hole position of threaded mounting hole 21
Unload power slot 22；Using accurate grinding, the optical manufacturings means such as computer polishing repairing type are processed guide rail, are interfered using corrugated
Instrument measures rail shapes error, the depth of parallelism, verticality, obtains the guidance processing of three-dimensional error model；Pedestal 1 is gentle slick and frivolous
For block 3 with Dali masonry material, the supporting surface of pedestal 1 is the boss 11 centered on threaded mounting hole 21, and two are designed on pedestal 1
A mounting groove 12；Aerostatic slide 3 is driven using belt 43, and the tightness of belt 43 is adjusted by adjusting bolt 15.This reality
It applies example and a kind of foregoing glass guide rail processing method is also provided, implementation steps include：
1）Roughing is carried out to the glass material green body of glass guide-rail by precision grinder so that glass guide-rail after roughing
Flatness is better than 20 microns better than 20 microns, the depth of parallelism；
2）Pass through computer control optical surface formation technology（Computer Controlled Optical Surfacing ,
CCOS）Polishing is removed to the being determined property of glass guide-rail after roughing, make the flatness of glass guide-rail better than 5 microns, it is parallel
Degree is better than 10 microns；
3）Repairing type polishing is carried out to the glass guide-rail after the removal polishing of being determined property by Magnetorheological Polishing lathe, glass is made to lead
The flatness of rail is better than 0.1 micron, and the depth of parallelism is better than 1 micron, and the verticality of four working faces between any two is better than 3 rads；
4）Pass through instrument（Such as interferometer, three coordinate measuring machine etc.）The machined surface of glass guide-rail is measured, if glass guide-rail
Machined surface still cannot be met the requirements（It is specially that flatness is better than 0.1 micron in the present embodiment, the depth of parallelism and verticality are better than 1
Micron）, and redirect and execute step 3）, otherwise terminate and exit.In the present embodiment, particular by zygo interferometers, zeiss tri-
The means such as coordinate measure machined surface.
The above is only a preferred embodiment of the present invention, protection scope of the present invention is not limited merely to above-mentioned implementation
Example, all technical solutions belonged under thinking of the present invention all belong to the scope of protection of the present invention.It should be pointed out that for the art
Those of ordinary skill for, several improvements and modifications without departing from the principles of the present invention, these improvements and modifications
It should be regarded as protection scope of the present invention.
Claims (10)
1. a kind of high-precision air floating shaft system based on glass guide-rail, including pedestal（1）, the pedestal（1）It is equipped with guide rail（2）、
Aerostatic slide（3）And driving mechanism（4）, the aerostatic slide（3）Sliding is arranged in guide rail（2）Above and by driving mechanism（4）
Driving, it is characterised in that：The guide rail（2）For using glass guide-rail made of glass material.
2. the high-precision air floating shaft system according to claim 1 based on glass guide-rail, it is characterised in that：The pedestal（1）
On set there are two gap arrangement boss（11）, the glass guide-rail support arrangement is in pedestal（1）Boss（11）On.
3. the high-precision air floating shaft system according to claim 2 based on glass guide-rail, it is characterised in that：The glass guide-rail
Bottom set there are two threaded mounting hole（21）, the boss（11）Fixing screws are equipped with, the fixing screws are pacified with screw thread
Fill hole（21）Screw-thread fit.
4. the high-precision air floating shaft system according to claim 3 based on glass guide-rail, it is characterised in that：The fixing screws
On be arranged with gasket.
5. the high-precision air floating shaft system according to claim 3 based on glass guide-rail, it is characterised in that：The glass guide-rail
Top be located at threaded mounting hole（21）Back side be equipped with unload power slot（22）.
6. the high-precision air floating shaft system according to claim 5 based on glass guide-rail, it is characterised in that：The power of the unloading slot
（22）For square groove, and the power of the unloading slot（22）Both sides be equipped with straight slot（23）, the straight slot（23）Vertically run through
To the bottom surface of glass guide-rail, the straight slot（23）Glide direction along glass guide-rail is arranged.
7. the high-precision air floating shaft system according to claim 6 based on glass guide-rail, it is characterised in that：The power of the unloading slot
（22）Openings of sizes and boss（11）Top surface size it is identical, the power of the unloading slot（22）Square groove most short side a length of screw thread peace
Fill hole（21）6 ~ 7 times of diameter, the power of the unloading slot（22）Depth be glass guide-rail thickness 1/2.
8. the high-precision air floating shaft system according to claim 1 based on glass guide-rail, it is characterised in that：The aerostatic slide
（3）Including top shoe（31）, front-slider（32）And rear slider（33）, the top shoe（31）Bottom side and front-slider
（32）The connected, other side and rear slider（33）It is connected to form the U-shaped structure that cross section is back-off, the front-slider（32）Bottom
Portion is equipped with preceding sliding block（321）, the rear slider（33）Bottom be equipped with rear sliding block（331）, the glass guide-rail sliding cloth
It is placed in top shoe（31）, front-slider（32）, rear slider（33）, preceding sliding block（321）, rear sliding block（331）Surround the sky formed
Between position.
9. the high-precision air floating shaft system according to claim 1 based on glass guide-rail, it is characterised in that：The driving mechanism
（4）Including decelerating motor（41）, driving wheel（42）, belt（43）And driven wheel（44）, the pedestal（1）On be respectively equipped with two
Mounting groove（12）, a mounting groove（12）In be mounted with motor cabinet（13）, another mounting groove（12）In be equipped with tensioning adjust
Save holder（14）, the tensioning adjusting bracket（14）Pass through adjusting bolt（15）With mounted on pedestal（1）On tensioning adjust turn
Fishplate bar（16）It is connected, the decelerating motor（41）Mounted on motor cabinet（13）On, the driving wheel（42）It is mounted on by bearing
Motor cabinet（13）On, the driven wheel（44）It is mounted on tensioning adjusting bracket by bearing（14）On, the decelerating motor（41）
Output end and driving wheel（42）It is connected, the belt（43）It is set in driving wheel（42）, driven wheel（44）On, and the belt
（43）With aerostatic slide（3）It is fixedly connected.
10. the glass guide-rail of the high-precision air floating shaft system based on glass guide-rail described in a kind of any one of claim 1~9 adds
Work method, it is characterised in that implementation steps include：
1）Roughing is carried out to the glass material green body of glass guide-rail by precision grinder so that glass guide-rail after roughing
Flatness is better than 20 microns better than 20 microns, the depth of parallelism；
2）Polishing is removed to the being determined property of glass guide-rail after roughing by computer control optical surface formation technology, is made
The flatness of glass guide-rail is better than 10 microns better than 5 microns, the depth of parallelism；
3）Repairing type polishing is carried out to the glass guide-rail after the removal polishing of being determined property by Magnetorheological Polishing lathe, glass is made to lead
The flatness of rail is better than 0.1 micron, and the depth of parallelism is better than 1 micron, and the verticality of four working faces between any two is better than 3 rads；
4）By the machined surface of apparatus measures glass guide-rail, if the machined surface of glass guide-rail still cannot be met the requirements, and jump
Turn to execute step 3）, otherwise terminate and exit.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810275752.7A CN108533612B (en) | 2018-03-30 | 2018-03-30 | High-precision air-floating shaft system based on glass guide rail and glass guide rail processing method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810275752.7A CN108533612B (en) | 2018-03-30 | 2018-03-30 | High-precision air-floating shaft system based on glass guide rail and glass guide rail processing method thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN108533612A true CN108533612A (en) | 2018-09-14 |
| CN108533612B CN108533612B (en) | 2019-12-20 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810275752.7A Active CN108533612B (en) | 2018-03-30 | 2018-03-30 | High-precision air-floating shaft system based on glass guide rail and glass guide rail processing method thereof |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111664804A (en) * | 2020-07-06 | 2020-09-15 | 中国人民解放军国防科技大学 | High-precision three-dimensional profile scanning and measuring platform based on glass guide rail |
| CN112902908A (en) * | 2021-02-07 | 2021-06-04 | 天津大学 | Surface precision calibrating device and method for air-floatation guide rail of granite working table |
| CN113245931A (en) * | 2021-05-25 | 2021-08-13 | 中国人民解放军国防科技大学 | Cuboid optical material guide rail combination processing method and system |
| CN113340222A (en) * | 2021-05-25 | 2021-09-03 | 中国人民解放军国防科技大学 | Method and device for measuring deformation of high-precision air-floatation guide rail in loading state |
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