CN100585204C - Multi-ring connected pressure equalizing trough gas static pressure guiding rail - Google Patents
Multi-ring connected pressure equalizing trough gas static pressure guiding rail Download PDFInfo
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- CN100585204C CN100585204C CN200710164643A CN200710164643A CN100585204C CN 100585204 C CN100585204 C CN 100585204C CN 200710164643 A CN200710164643 A CN 200710164643A CN 200710164643 A CN200710164643 A CN 200710164643A CN 100585204 C CN100585204 C CN 100585204C
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Abstract
The invention discloses a multi-ring coupled pressure equalization slot gas hydrostatic guideway. One working face of the gas hydrostatic guideway is provided with two or three equidimensional ring-shaped pressure equalization slots, which are tangent to each other. The other working face of the gas hydrostatic guideway matched with the pressure equalization slots is a plane. The working face where the pressure equalization slots are arranged is provided with a restriction orifice. By adopting the invention, the amplitude of the gas film of the guideway is reduced to less than 80 percent of the amplitude of the gas film of the conventional gas hydrostatic guideway. The invention is applicable to precise gas hydrostatic guideways, in particular for ultra-precise nano-gas hydrostatic guideways.
Description
Technical field
The present invention relates to a kind of pneumato-static slideway, especially relate to a kind of multi-ring connected pressure equalizing trough gas static pressure guiding rail.
Background technique
Pneumato-static slideway,, motion little with its frictional force are steadily, precision is high and almost do not have advantage such as thermal distortion, are widely used in ultra-precision machine tool, fine measuring instrument.Along with the world has entered nanometer era, pneumato-static slideway highlights its huge advantage more, and its required precision is also improved constantly.But Recent study is found, owing to have compressibility as the gas of pneumato-static slideway bearing medium, causes small self-excited vibration easily, causes having oscillation phenomenon with the perpendicular Normal direction of lubricated air film, and amplitude can reach 30-50nm usually.When the air film Normal direction was carried out high-accuracy measurement, measurement signal was flooded by the air film oscillating signal.In like manner, much adopt the precise machining equipment of gas lubrication technology, also run into such problem.
The vibrative reason of pneumato-static slideway is very complicated, and the principal element that influences its vibration has: throttle orifice aperture, orifice structure form, supply gas pressure, air-film thickness etc.Composite throttling method (promptly offer balancing slit on the working surface surface, integrate orifice restriction and surface throttle mode) can reduce the air film vibration.But the shape difference of balancing slit is also different to air film self-excited vibration effect.Pneumato-static slideway generally adopts rectangle, circle, single annular balancing slit both at home and abroad at present.The balancing slit of these shapes suppressing in the air film self-excited vibration certain limit is arranged all, can't make the air film amplitude be decreased to nano-precision or lower.
Summary of the invention
Overcome the deficiency that exists in the above-mentioned technology, the object of the present invention is to provide the air film amplitude little, a kind of multi-ring connected pressure equalizing trough gas static pressure guiding rail that Location accuracy is high.
For achieving the above object the technical solution used in the present invention:
Technological scheme 1: a kind of multi-ring connected pressure equalizing trough gas static pressure guiding rail
On a working surface of pneumato-static slideway, offer 2 tangent isometrical ring balancing slits, on the tangent point of contact of two annulus, be provided with a diameter less than 1 millimeter throttle orifice, another working surface of the pneumato-static slideway that matches with it is the plane.
The outer shroud that described ring balancing slit is cut to two annulus mutually interior rings tangent or two annulus are tangent with the center line of outer interannular.
Technological scheme 2: a kind of multi-ring connected pressure equalizing trough gas static pressure guiding rail
On a working surface of pneumato-static slideway, offer 3 tangent in twos isometrical ring balancing slits, and the zone conducting of three circle ring center is for all pressing the chamber, all press the chamber central point to be provided with a diameter less than 1 millimeter throttle orifice, another working surface of the pneumato-static slideway that matches with it is the plane.
The outer shroud that described ring balancing slit is cut to three annulus mutually interior rings tangent or three annulus are tangent with the center line of outer interannular.
The beneficial effect that the present invention has is:
The invention enables guide rail air film amplitude to be reduced to below 80% of traditional pneumato-static slideway air film amplitude.Be applicable to accurate pneumato-static slideway, be particularly useful for ultraprecise, nano gas hydrostatic slideway.
Description of drawings
Fig. 1 is a working surface schematic representation that has the guide rail of the tangent ring balancing slit of 2 outer shrouds.
Fig. 2 is the guide rail schematic representation that has the tangent ring balancing slit of 2 outer shrouds.
Fig. 3 is a working surface schematic representation that has the guide rail of the tangent ring balancing slit of 2 center lines.
Fig. 4 is the guide rail schematic representation that has the tangent ring balancing slit of 2 center lines.
Fig. 5 is a working surface schematic representation that has the guide rail of the tangent ring balancing slit of 3 outer shrouds.
Fig. 6 is the guide rail schematic representation that has the tangent ring balancing slit of 3 outer shrouds.
Fig. 7 is the structural representation of throttle orifice.
Among the figure: 1. throttle orifice, 2. ring balancing slit, 3. pneumato-static slideway working surface, 4. another working surface of pneumato-static slideway is 5. all pressed the chamber.
Embodiment
As shown in Figure 1, a working surface 3 of pneumato-static slideway is processed as smooth plane, on a working surface 3 of pneumato-static slideway, offer 2 isometrical ring balancing slits 2 that outer shroud is tangent, a diameter is set less than 1 millimeter throttle orifice 1 on the tangent point of contact of two annulus.As shown in Figure 2, another working surface 4 of the pneumato-static slideway that will match with a working surface 3 of pneumato-static slideway is processed as smooth plane, forms the pneumato-static slideway kinematic pair.
As shown in Figure 3, a working surface 3 of pneumato-static slideway is processed as smooth plane, on a working surface 3 of pneumato-static slideway, offer 2 isometrical ring balancing slits 2 that center line is tangent, a diameter is set less than 1 millimeter throttle orifice 1 on the tangent point of contact of two annulus.As shown in Figure 4, another working surface 4 of the pneumato-static slideway that will match with a working surface 3 of pneumato-static slideway is processed as smooth plane, forms the pneumato-static slideway kinematic pair.
As shown in Figure 5, a working surface 3 of pneumato-static slideway is processed as smooth plane, on a working surface 3 of pneumato-static slideway, offer 3 isometrical ring balancing slits 2 that outer shroud is tangent, and the conducting of three circle ring center zones is for all pressing chamber 5, all presses to be provided with a diameter above 5 central points of chamber less than 1 millimeter throttle orifice 1.As shown in Figure 6, another working surface 4 of the pneumato-static slideway that will match with a working surface 3 of pneumato-static slideway is processed as smooth plane, forms the pneumato-static slideway kinematic pair.
In the above-described embodiment, because throttle orifice 1 is small-sized, can't show clearly in Fig. 1-6, the structure of throttle orifice 1 as shown in Figure 7.The throttle orifice 1 of pneumato-static slideway preferably adopts diameter less than 0.5 millimeter hole, if orifice dimensions is excessive, outer throttling effect will significantly weaken even disappear.The degree of depth of balancing slit 2 is chosen the 0-0.25 millimeter usually preferably less than 0.5 millimeter; The width of balancing slit 2 is chosen the 0.1-0.4 millimeter usually preferably less than 0.5 millimeter.Take all factors into consideration carrying force, supply gas pressure, throttle orifice aperture, the isoparametric correlation of working face of guide rail size are specifically selected size, the structure of throttle orifice aperture and balancing slit.
Implementing process of the present invention:
According to above-mentioned mode of execution, the processing gas hydrostatic slideway.The air that will have certain pressure is sent into the pneumato-static slideway gap through throttle orifice, by its static pressure guide rail is suspended, and forms one deck air film as thin as a wafer between the slideway, realizes the straight line motion of the pure air friction of guide rail.Contrast traditional pneumato-static slideway, the air film amplitude will significantly reduce, and improve the Location accuracy of guide rail.
Above-mentioned embodiment is used for the present invention that explains, rather than limits the invention, and in the protection domain of spirit of the present invention and claim, any modification and change to the present invention makes all fall into protection scope of the present invention.
Claims (4)
1. multi-ring connected pressure equalizing trough gas static pressure guiding rail, it is characterized in that: on a working surface of pneumato-static slideway, offer 2 tangent isometrical ring balancing slits, the balancing slit degree of depth is 0-0.25mm, width is 0.1-0.4mm, be provided with a diameter less than 1 millimeter throttle orifice on the tangent point of contact of two annulus, another working surface of the pneumato-static slideway that matches with it is the plane.
2. a kind of multi-ring connected pressure equalizing trough gas static pressure guiding rail according to claim 1 is characterized in that: the outer shroud that described ring balancing slit is cut to two annulus mutually interior rings tangent or two annulus are tangent with the center line of outer interannular.
3. multi-ring connected pressure equalizing trough gas static pressure guiding rail, it is characterized in that: on a working surface of pneumato-static slideway, offer 3 tangent in twos isometrical ring balancing slits, the balancing slit degree of depth is 0-0.25mm, width is 0.1-0.4mm, and the conducting of three circle ring center zones is for all pressing the chamber, all presses the chamber central point to be provided with a diameter less than 1 millimeter throttle orifice, and another working surface of the pneumato-static slideway that matches with it is the plane.
4. a kind of multi-ring connected pressure equalizing trough gas static pressure guiding rail according to claim 3 is characterized in that: the outer shroud that described ring balancing slit is cut to three annulus mutually interior rings tangent or three annulus are tangent with the center line of outer interannular.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200710164643A CN100585204C (en) | 2007-12-27 | 2007-12-27 | Multi-ring connected pressure equalizing trough gas static pressure guiding rail |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200710164643A CN100585204C (en) | 2007-12-27 | 2007-12-27 | Multi-ring connected pressure equalizing trough gas static pressure guiding rail |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101216069A CN101216069A (en) | 2008-07-09 |
| CN100585204C true CN100585204C (en) | 2010-01-27 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN200710164643A Expired - Fee Related CN100585204C (en) | 2007-12-27 | 2007-12-27 | Multi-ring connected pressure equalizing trough gas static pressure guiding rail |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN100585204C (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102207130A (en) * | 2011-03-15 | 2011-10-05 | 中国科学院光电技术研究所 | Aerostatic thrust bearing |
| CN102950468A (en) * | 2012-10-19 | 2013-03-06 | 北京海普瑞森科技发展有限公司 | High-precision air static pressure guide rail |
-
2007
- 2007-12-27 CN CN200710164643A patent/CN100585204C/en not_active Expired - Fee Related
Non-Patent Citations (2)
| Title |
|---|
| 空气静压导轨中常用静压垫结构特性的比较. 陈志凌，任建岳.机械，第31卷第11期. 2004 |
| 空气静压导轨中常用静压垫结构特性的比较. 陈志凌，任建岳.机械，第31卷第11期. 2004 * |
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|---|---|
| CN101216069A (en) | 2008-07-09 |
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