CN117572389A - Reflecting device for laser interference ranging and laser range finder - Google Patents
Reflecting device for laser interference ranging and laser range finder Download PDFInfo
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- CN117572389A CN117572389A CN202410076974.1A CN202410076974A CN117572389A CN 117572389 A CN117572389 A CN 117572389A CN 202410076974 A CN202410076974 A CN 202410076974A CN 117572389 A CN117572389 A CN 117572389A
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- 230000006835 compression Effects 0.000 claims abstract description 7
- 238000007906 compression Methods 0.000 claims abstract description 7
- 238000003825 pressing Methods 0.000 claims description 20
- 238000004556 laser interferometry Methods 0.000 claims description 14
- 230000003287 optical effect Effects 0.000 claims description 14
- 230000005499 meniscus Effects 0.000 claims description 5
- 238000004026 adhesive bonding Methods 0.000 claims description 3
- 230000007613 environmental effect Effects 0.000 abstract description 5
- 230000000149 penetrating effect Effects 0.000 abstract 1
- 238000012360 testing method Methods 0.000 description 26
- 238000009434 installation Methods 0.000 description 11
- 230000005540 biological transmission Effects 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 238000006073 displacement reaction Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 230000001795 light effect Effects 0.000 description 2
- 230000010355 oscillation Effects 0.000 description 2
- 238000004088 simulation Methods 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 239000003814 drug Substances 0.000 description 1
- 238000005305 interferometry Methods 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000002792 vascular Effects 0.000 description 1
- 238000012795 verification Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
- G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
- G01S7/481—Constructional features, e.g. arrangements of optical elements
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
- G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
- G01S17/06—Systems determining position data of a target
- G01S17/08—Systems determining position data of a target for measuring distance only
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Computer Networks & Wireless Communication (AREA)
- General Physics & Mathematics (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Electromagnetism (AREA)
- Instruments For Measurement Of Length By Optical Means (AREA)
Abstract
The invention belongs to the technical field of laser interference ranging, and particularly relates to a reflecting device for laser interference ranging, which comprises a focusing mirror assembly, a reflecting mirror assembly and a sleeve assembly, wherein the reflecting mirror assembly is arranged on a focal plane of the focusing mirror assembly; the sleeve assembly comprises a sleeve body, a first compression ring and a movable seat, wherein the sleeve body is provided with a through hole in a penetrating mode along the axial direction of the sleeve body, the focusing mirror assembly, the reflecting mirror assembly and the movable seat are all arranged in the through hole, the reflecting mirror assembly is arranged on the movable seat, the first compression ring is used for fixing the focusing mirror assembly, the movable seat drives the reflecting mirror assembly to move close to or far away from the focusing mirror assembly, and the movable seat is fixed through a locking structure. The reflecting device enables the parallel laser beams to be focused on the plane reflecting mirror through the focusing lens, then reflected by the plane reflecting mirror and reflected by the focusing lens in an original way, even if micro disturbance exists, most light rays can be reflected by the original way, the return light power is high, the stability and the environmental adaptability are good, the precision is high, the layout is reasonable, ingenious and compact, and the cost is low.
Description
Technical Field
The invention belongs to the technical field of laser interference ranging, and particularly relates to a reflecting device for laser interference ranging and a laser range finder.
Background
The laser range finder is a high-precision non-contact measuring device, and is mainly used for measuring tiny displacement, size and the like by an optical interference method. The method is mainly applied to various industries needing high-precision ranging, and comprises the following steps: precision machine tools, semiconductor manufacturing, lithography machines, aerospace (assembly, deformation analysis), medicine (measuring biological tissue morphology, mechanical properties, vascular elasticity, etc.), mechanics (measuring tiny deformation of materials), geological detection (detecting ground displacement to predict volcanic earthquakes), etc.
At present, when a laser range finder is used for measuring displacement of a moving object, a plane mirror or a pyramid mirror is usually arranged on the measured object as a reflecting device, wherein the pyramid mirror has very high manufacturing precision requirement, high price and high assembly precision requirement, and is a laser range finder disclosed in patent application CN 201710364317.7; the plane mirror needs to form an angle of 90 degrees with the optical axis during installation, has relatively poor environmental adaptability, has relatively high requirements on the stability of installation equipment, and has relatively poor environmental adaptability as the test distance is longer, so that the plane mirror is generally used for high-precision ranging about 1 m.
Disclosure of Invention
The invention provides a reflecting device for laser interference ranging and a laser range finder, which are used for solving the problems of high assembly precision requirement, high cost and poor environmental adaptability of the reflecting device for laser interference ranging in the prior art.
In order to solve the technical problems, the technical scheme adopted by the invention is as follows, and the reflecting device for laser interference ranging comprises:
a focusing mirror assembly;
a mirror assembly disposed at a focal plane of the focusing mirror assembly;
and the sleeve assembly comprises a sleeve body, a first pressing ring and a moving seat, the sleeve body is penetrated with a through hole along the axial direction of the sleeve body, the focusing mirror assembly, the reflecting mirror assembly and the moving seat are all arranged in the through hole, the reflecting mirror assembly is arranged on the moving seat, the first pressing ring is used for fixing the focusing mirror assembly, the moving seat drives the reflecting mirror assembly to move close to or far away from the focusing mirror assembly, and the moving seat is fixed through a locking structure.
Preferably, the focusing lens assembly includes a focusing lens, and the focusing lens is a biconvex lens, a plano-convex lens or a meniscus lens. The focusing lens can be used for focusing laser beams, the laser beams emitted by the laser interference testing device are focused on the reflecting mirror component through the focusing lens, reflected by the reflecting mirror component and projected to the laser interference testing device through the focusing lens, according to the light beam transmission theory, the reflected light beams are far away from and return according to the incident route, and due to the fact that the reflected light beams are focused, a light beam receiving system of the laser interference testing device can receive most of the laser beams even if micro disturbance exists, and the adaptability of the reflecting device is greatly improved.
Preferably, the mirror assembly comprises a planar mirror disposed on a side of the movable mount adjacent the focusing mirror assembly. The reflecting mirror assembly is simple and reliable in structure, the movable seat drives the plane reflecting mirror to move close to or away from the focusing lens, and the distance between the plane reflecting mirror and the focusing lens is adjusted.
Further, a mounting groove is formed in one side, close to the focusing lens assembly, of the movable seat, and the plane reflecting lens is arranged in the mounting groove through clamping or gluing. The installation structure of the plane reflector is simple and firm, the installation groove is convenient for the installation of the plane reflector on one hand, and the plane reflector can be protected on the other hand.
Preferably, one end of the sleeve body is provided with a stepped hole, the focusing lens is arranged in the stepped hole, the first pressing ring is in threaded connection with the stepped hole, and the focusing lens is located between the first pressing ring and a step of the stepped hole. The focusing lens is firstly installed in the stepped hole, and then the first pressing ring is screwed down, so that the first pressing ring is clamped with the step of the stepped hole in a matched mode to fix the focusing lens, the installation structure of the focusing lens is simple and reliable, the installation is convenient and fast, and the focusing lens can be adapted to different focusing lenses.
Preferably, the movable seat is in threaded connection with the inner wall of the sleeve body to form the locking structure. The movable seat moves back and forth through threads, so that the distance between the plane reflecting mirror and the focusing lens is conveniently adjusted, and the plane reflecting mirror is ensured to be on the focal plane of the focusing lens.
Further, still be provided with the second clamping ring in the through-hole, second clamping ring and the inner wall threaded connection of sleeve body, the second clamping ring sets up in the one side that removes the seat and keep away from the focus lens subassembly. The second clamping ring is used for pressing the movable seat to prevent loosening when being used for a long time, and is simple in structure, compact in layout and convenient to install and adjust.
The laser range finder comprises laser interference testing equipment and any one of the reflecting devices for laser interference ranging, wherein the laser interference testing equipment comprises a light beam emitting system and a light beam receiving system, the light beam emitting system is used for emitting a laser beam to the reflecting devices, and the light beam receiving system is used for receiving the laser beam reflected by the reflecting devices.
Preferably, the laser beam emitted by the beam emitting system coincides with the optical axis of the laser beam received by the beam receiving system. The laser interference testing device selects the existing coaxial laser interference testing device, namely, the laser beam emitted by the beam emitting system is overlapped with the optical axis of the laser beam received by the beam receiving system, and the measuring precision of the device is higher.
Preferably, the laser beam emitted by the beam emitting system is parallel to the optical axis of the laser beam received by the beam receiving system. The laser interference testing device selects the existing non-coaxial laser interference testing device, namely, the laser beam emitted by the beam emitting system is parallel to the optical axis of the laser beam received by the beam receiving system, and the device cost is low.
The beneficial effects are that:
1. the invention relates to a reflecting device for laser interference ranging, which emits parallel laser beams to the reflecting device, wherein the parallel laser beams are focused on a plane reflecting mirror through a focusing lens, reflected by the plane reflecting mirror and reflected by a focusing lens in a primary way, and according to a beam transmission theory, the reflected laser beams return in a primary way according to an incident route;
2. compared with the traditional corner reflector, the reflection device for laser interference ranging has larger installation angle adaptability, greatly improves the adaptability to the installation environment and greatly reduces the manufacturing cost;
3. the reflecting device for laser interference ranging has the advantages that the focusing lens is used for focusing and then reflecting the light through the plane reflecting mirror, the light return power is high, the defects that the existing plane reflecting mirror only reflecting through the plane reflecting mirror needs a plane reflecting mirror with a large area and the angle requirement for installing the plane reflecting mirror is high in order to efficiently reflect the plane reflecting mirror in the original way are overcome, the structural layout of the reflecting device is more reasonable and compact, the stability is better, the requirement on the installation environment is less harsh, the environmental adaptability is better, the long distance can be realized, and the measuring precision is higher.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings that are needed in the description of the embodiments will be briefly described below, it being obvious that the drawings in the following description are only some embodiments of the present invention, and that other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
FIG. 1 is a schematic view showing the internal structure of an embodiment 1 of a reflection apparatus for laser interferometry according to the present invention;
FIG. 2 is a schematic view showing the internal structure of an embodiment 1 of a sleeve assembly of a reflecting device for laser interferometry according to the present invention;
FIG. 3 is a schematic view showing the internal structure of example 1 of the laser rangefinder of the invention;
FIG. 4 is a schematic view showing the internal structure of example 2 of a reflection apparatus for laser interferometry according to the present invention;
FIG. 5 is a schematic view of the optical path of embodiment 3 of the reflection apparatus for laser interferometry of the present invention;
FIG. 6 is a schematic view showing the internal structure of example 4 of the laser rangefinder of the invention;
in the figure: A. the device comprises a reflecting device 1, a focusing lens 2, a plane reflecting mirror 3, a sleeve assembly 31, a sleeve body 311, a through hole 312, a stepped hole 32, a first compression ring 33, a movable seat 331, a mounting groove 34, a locking structure 35 and a second compression ring; and B, laser interference testing equipment.
Detailed Description
The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments. The following description of at least one exemplary embodiment is merely exemplary in nature and is in no way intended to limit the invention, its application, or uses. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
Example 1.
As shown in fig. 1 and 2, a reflecting device for laser interference ranging comprises a focusing mirror assembly, a reflecting mirror assembly and a sleeve assembly 3, wherein the reflecting mirror assembly is arranged on the focal plane of the focusing mirror assembly; the sleeve assembly 3 comprises a sleeve body 31, a first pressing ring 32 and a movable seat 33, wherein the sleeve body 31 is provided with a through hole 311 along the axial direction of the sleeve body, the focusing lens assembly, the reflecting lens assembly and the movable seat 33 are all arranged in the through hole 311, the reflecting lens assembly is arranged on the movable seat 33, the first pressing ring 32 is used for fixing the focusing lens assembly, the movable seat 33 drives the reflecting lens assembly to move close to or far away from the focusing lens assembly, and the movable seat 33 is fixed through a locking structure 34.
Specifically, in the present embodiment, as shown in fig. 1 and 2, the focusing lens assembly includes a focusing lens 1, the focusing lens 1 being a biconvex lens or a plano-convex lens (biconvex lens in fig. 1), ensuring that the focusing lens 1 can achieve focusing of a laser beam; further, in this embodiment, one end of the sleeve body 31 has a stepped hole 312, the focusing lens 1 is disposed in the stepped hole 312, the first pressing ring 32 is in threaded connection with the stepped hole 312, the focusing lens 1 is located between the first pressing ring 32 and a step of the stepped hole 312, the focusing lens 1 is first mounted in the stepped hole 312, and then the first pressing ring 32 is screwed, so that the first pressing ring 32 and the step of the stepped hole 312 are clamped in a matching manner to fix the focusing lens 1, and the focusing lens 1 can be adapted to different focusing lenses 1; the laser beam emitted by the laser interference testing device B is focused on the reflecting mirror component through the focusing lens 1, reflected by the reflecting mirror component and projected to the laser interference testing device B through the focusing lens 1, and according to the light beam transmission theory, the reflected light beam is far away from and returns along the incident route, and as the reflected light beam is the focusing light beam, even if micro disturbance exists, the light beam receiving system of the laser interference testing device B can receive most of the laser beam, so that the adaptability of the reflecting device A is greatly improved.
Specifically, in the present embodiment, as shown in fig. 1 and 2, the mirror assembly includes a flat mirror 2, the flat mirror 2 being disposed on a side of the movable base 33 near the focusing mirror assembly; further, in this embodiment, a mounting groove 331 is formed on a side of the movable base 33 near the focusing lens assembly, and the plane mirror 2 is disposed in the mounting groove 331 by clamping or gluing; further, in this embodiment, the moving seat 33 is in threaded connection with the inner wall of the sleeve body 31 to form the locking structure 34, so that the structure of the mirror assembly in this embodiment is simple and reliable, the moving seat 33 drives the plane mirror 2 to move close to or away from the focusing lens 1, the distance between the plane mirror 2 and the focusing lens 1 can be conveniently adjusted, and the moving seat 33 realizes self-locking through the locking structure 34 after adjustment, so that the reflecting device a is adapted to focusing lenses 1 with different focal lengths.
As shown in fig. 3, the laser range finder comprises a laser interference testing device B and the reflecting device a, wherein the laser interference testing device B comprises a beam emitting system and a beam receiving system, the beam emitting system is used for emitting a laser beam to the reflecting device a, the beam receiving system is used for receiving the laser beam reflected by the reflecting device a, and the focusing lens 1 is arranged between the laser interference testing device B and the plane reflecting mirror 2; specifically, in this embodiment, the optical axes of the laser beam emitted by the beam emission system and the laser beam received by the beam receiving system coincide, that is, the laser interference test device B in this embodiment selects an existing coaxial laser interference test device, and the beam emission system and the beam receiving system are coaxial systems, so that the measurement accuracy of the device is higher.
The working principle is as follows:
as shown in fig. 1 and 3, the beam emission system emits a parallel laser beam to the reflection device a, the parallel laser beam is focused on the plane mirror 2 by the focusing lens 1, and then reflected by the plane mirror 2, and reflected by the focusing lens 1 to the beam receiving system in the original path, the laser beam emitted by the beam emission system coincides with the optical axis of the laser beam received by the beam receiving system, and according to the beam transmission theory, the reflected beam returns in the original path according to the incident path, and because the reflected focused beam is the reflected beam, even if there is a micro disturbance, most of light can be received by the beam receiving system, and the adaptability of the reflection device a is greatly improved.
The method utilizes optical interferometry ranging or optical coherence ranging, and utilizes the method of dividing the same laser beam into two beams, namely one beam of measuring light and one beam of local oscillation light, wherein the measuring light is transmitted to the inside of the surface return equipment (laser interference test equipment B) of the measured object to interfere with the local oscillation light, so that phase difference is obtained, and further information such as phase, distance and speed is obtained. The intensity and stability of the measuring light have great influence on the precision and accuracy of the measuring result, and in practical use, special light reflecting devices such as angle reflectors, plane mirrors and the like are adopted in some high-precision measuring occasions, and the light reflecting devices are fixed on the surface of the measured object to move along with the measured object, so that stable return light is obtained. The application discloses a novel light reflection device, parallel laser beam focuses on plane mirror 2 through focusing lens 1 earlier, and then reflects to the light beam receiving system through focusing lens 1 primary reflection after plane mirror 2, and wherein primary reflection refers to the laser beam and returns the light through focusing lens 1 again through plane mirror 2, and there is a bit reflection light skew focusing lens 1 negligible.
The simulation results and the test verification of the reflecting device A and the light reflecting device of the existing angle reflecting mirror or plane mirror are shown in the following table:
the test distance of 1.5m means that the distance from the laser interference test device B to the reflecting means a is 1.5m.
Simulation results show that the return light intensity values of different reflecting devices under different angles, wherein the return light effect of the reflecting device A of the application is close to that of the angle reflecting mirror, but compared with the angle reflecting mirror, the angle reflecting mirror has a simple structure and greatly reduces the cost; the return light effect of plane mirror is relatively poor, and this application compares with the plane mirror, installs, debugs convenient, and the precision is higher.
Example 2.
As shown in fig. 4, in this embodiment, the difference from embodiment 1 is that the through hole 311 is further provided with a second pressing ring 35, the second pressing ring 35 is in threaded connection with the inner wall of the sleeve body 31, the second pressing ring 35 is disposed on a side of the movable seat 33 away from the focusing lens assembly, and the second pressing ring 35 is used for pressing the movable seat 33 to prevent the movable seat 33 from loosening during long-term use, and has a simple structure, compact layout, and convenient installation and adjustment.
Example 3.
As shown in fig. 5, in the present embodiment, the difference from embodiment 1 or 2 is that the focusing lens 1 is a meniscus lens, and the plane mirror 2 is disposed between the laser interference testing device B and the concave surface of the meniscus lens.
Example 4.
As shown in fig. 6, in this embodiment, the difference from embodiments 1, 2 or 3 is that the laser beam emitted by the beam emitting system is parallel to the optical axis of the laser beam received by the beam receiving system, that is, the laser interference testing device B of this embodiment selects the existing non-coaxial laser interference testing device, and the beam emitting system and the beam receiving system are non-coaxial systems, so that the device cost is low.
It should be noted that the arrangement of the focusing lens 1 in the foregoing embodiments is merely an example of embodiments of the present application, and the focusing lens 1 may be a biconvex lens, a plano-convex lens, a meniscus lens, or a lens group, and in fact, the specific form of the focusing lens 1 is just to be able to focus the light beam, and the specific form of the focusing lens is not specifically limited in this application.
The present invention is not limited to the above-mentioned embodiments, and any person skilled in the art, based on the technical solution of the present invention and the inventive concept thereof, can be replaced or changed within the scope of the present invention.
Claims (10)
1. A reflecting device for laser interferometry is characterized in that: comprising the steps of (a) a step of,
a focusing mirror assembly;
a mirror assembly disposed at a focal plane of the focusing mirror assembly;
and sleeve subassembly (3), sleeve subassembly (3) include sleeve body (31), first clamping ring (32) and remove seat (33), sleeve body (31) are run through along its axial has through-hole (311), focus mirror subassembly, reflector subassembly and remove seat (33) all set up in through-hole (311), the reflector subassembly sets up on removing seat (33), first clamping ring (32) are used for fixed focus mirror subassembly, remove seat (33) and drive reflector subassembly and be close to or keep away from focus mirror subassembly and remove, it is fixed that remove seat (33) through locking structure (34).
2. The reflection apparatus for laser interferometry according to claim 1, wherein: the focusing lens assembly comprises a focusing lens (1), and the focusing lens (1) is a biconvex lens, a plano-convex lens or a meniscus lens.
3. The reflection apparatus for laser interferometry according to any one of claims 1 or 2, wherein: the mirror assembly comprises a plane mirror (2), and the plane mirror (2) is arranged on one side of the movable seat (33) close to the focusing mirror assembly.
4. A reflection apparatus for laser interferometry according to claim 3, wherein: the movable seat (33) is provided with a mounting groove (331) at one side close to the focusing mirror assembly, and the plane reflecting mirror (2) is arranged in the mounting groove (331) through clamping or gluing.
5. The reflection apparatus for laser interferometry according to claim 2, wherein: one end of the sleeve body (31) is provided with a stepped hole (312), the focusing lens (1) is arranged in the stepped hole (312), the first pressing ring (32) is in threaded connection with the stepped hole (312), and the focusing lens (1) is located between the first pressing ring (32) and the step of the stepped hole (312).
6. A reflection apparatus for laser interferometry according to claim 3, wherein: the movable seat (33) is in threaded connection with the inner wall of the sleeve body (31) to form the locking structure (34).
7. The reflection apparatus for laser interferometry according to claim 6, wherein: the through hole (311) is internally provided with a second compression ring (35), the second compression ring (35) is in threaded connection with the inner wall of the sleeve body (31), and the second compression ring (35) is arranged on one side, far away from the focusing lens assembly, of the movable seat (33).
8. A laser rangefinder, its characterized in that: the laser rangefinder comprises a laser interferometry device (B) comprising the reflecting means for laser interferometry according to any of claims 1-7, the laser interferometry device (B) comprising a beam emitting system for emitting a laser beam towards the reflecting means (a) and a beam receiving system for receiving the laser beam reflected by the reflecting means (a).
9. The laser rangefinder of claim 8 wherein: the laser beam emitted by the beam emitting system coincides with the optical axis of the laser beam received by the beam receiving system.
10. The laser rangefinder of claim 8 wherein: the laser beam emitted by the beam emitting system is parallel to the optical axis of the laser beam received by the beam receiving system.
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CN202410076974.1A CN117572389B (en) | 2024-01-19 | 2024-01-19 | Reflecting device for laser interference ranging and laser range finder |
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CN202410076974.1A CN117572389B (en) | 2024-01-19 | 2024-01-19 | Reflecting device for laser interference ranging and laser range finder |
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Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN2800328Y (en) * | 2005-05-20 | 2006-07-26 | 鸿富锦精密工业(深圳)有限公司 | Optical zoom lens module |
CN106154520A (en) * | 2016-08-30 | 2016-11-23 | 福建福光股份有限公司 | Medium-wave infrared turntable optical lens and control method thereof |
KR101793831B1 (en) * | 2016-07-04 | 2017-11-06 | 한남대학교 산학협력단 | Collimating optics for transmitting and receiving optical signal, and Displacement amount measuring system using laser interferometer |
US10168354B1 (en) * | 2018-03-19 | 2019-01-01 | Shimadzu Corporation | Scanning probe microscope |
CN109807471A (en) * | 2019-02-01 | 2019-05-28 | 佛山科学技术学院 | A kind of laser mark printing device and method |
CN110673291A (en) * | 2019-09-17 | 2020-01-10 | 福建福光股份有限公司 | Structure of two-gear fixed-focus and reflector-switched zooming high-definition lens and implementation method |
CN113406779A (en) * | 2020-03-16 | 2021-09-17 | 华为技术有限公司 | Zoom lens, camera module and mobile terminal |
CN114371128A (en) * | 2022-01-13 | 2022-04-19 | 挚感(苏州)光子科技有限公司 | Fourier transform spectrometer based on multilayer slab waveguide structure |
CN117039604A (en) * | 2023-08-04 | 2023-11-10 | 山西大学 | Double interference filter special angle composite feedback quantity adjustable semiconductor laser |
-
2024
- 2024-01-19 CN CN202410076974.1A patent/CN117572389B/en active Active
Patent Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN2800328Y (en) * | 2005-05-20 | 2006-07-26 | 鸿富锦精密工业(深圳)有限公司 | Optical zoom lens module |
KR101793831B1 (en) * | 2016-07-04 | 2017-11-06 | 한남대학교 산학협력단 | Collimating optics for transmitting and receiving optical signal, and Displacement amount measuring system using laser interferometer |
CN106154520A (en) * | 2016-08-30 | 2016-11-23 | 福建福光股份有限公司 | Medium-wave infrared turntable optical lens and control method thereof |
US10168354B1 (en) * | 2018-03-19 | 2019-01-01 | Shimadzu Corporation | Scanning probe microscope |
CN109807471A (en) * | 2019-02-01 | 2019-05-28 | 佛山科学技术学院 | A kind of laser mark printing device and method |
CN110673291A (en) * | 2019-09-17 | 2020-01-10 | 福建福光股份有限公司 | Structure of two-gear fixed-focus and reflector-switched zooming high-definition lens and implementation method |
CN113406779A (en) * | 2020-03-16 | 2021-09-17 | 华为技术有限公司 | Zoom lens, camera module and mobile terminal |
CN114371128A (en) * | 2022-01-13 | 2022-04-19 | 挚感(苏州)光子科技有限公司 | Fourier transform spectrometer based on multilayer slab waveguide structure |
CN117039604A (en) * | 2023-08-04 | 2023-11-10 | 山西大学 | Double interference filter special angle composite feedback quantity adjustable semiconductor laser |
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