CN220489988U - Auxiliary fixture for plane mirror surface shape detection - Google Patents
Auxiliary fixture for plane mirror surface shape detection Download PDFInfo
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- CN220489988U CN220489988U CN202322147851.6U CN202322147851U CN220489988U CN 220489988 U CN220489988 U CN 220489988U CN 202322147851 U CN202322147851 U CN 202322147851U CN 220489988 U CN220489988 U CN 220489988U
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- bottom plate
- surface shape
- plane mirror
- shape detection
- mirror surface
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- 238000001514 detection method Methods 0.000 title claims abstract description 33
- 230000003287 optical effect Effects 0.000 abstract description 8
- 238000005259 measurement Methods 0.000 description 5
- 238000013461 design Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- 230000009286 beneficial effect Effects 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 230000001788 irregular Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 238000004556 laser interferometry Methods 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
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- Length Measuring Devices By Optical Means (AREA)
- Instruments For Measurement Of Length By Optical Means (AREA)
Abstract
The utility model belongs to the technical field of optical detection, and provides a plane mirror surface shape detection auxiliary tool which comprises a bottom plate, a mounting hole formed in the bottom plate and a reflecting mirror vertically arranged on the bottom plate, wherein the position relation between the mounting hole and the reflecting mirror is as follows: any connecting line can vertically pass through the reflector in sequence and then radially pass through the circle center of the mounting hole. The bottom plate of the device can stably fix the to-be-detected object with a special configuration by utilizing structures such as mounting holes, so that the to-be-detected object cannot be fixed by utilizing the self-contained clamp of the laser interferometer, and the condition of using the laser interferometer for surface shape detection can be met.
Description
Technical Field
The utility model relates to the technical field of optical detection, in particular to a plane mirror surface shape detection auxiliary tool.
Background
The optical element is widely applied to various precision equipment, the surface shape precision is a key factor influencing the system performance, so that the high-precision optical element has strict requirements on the surface shape, good processing precision is required, and accurate measurement of the surface shape of the plane mirror after processing is completed is a key step for controlling the quality of the element.
The optical element surface shape detection technology comprises a contour scanning method, a shack-Hartmann detection method, a phase deflection method, a laser interference detection method and the like; the laser interference detection method is the most commonly used method, and the specific working principle is that a laser beam is firstly used for irradiating the surface of an object, the laser beam is detected after being reflected on the surface of the object, the detector can capture the position of the reflected laser beam, and the shape of the surface of the object is calculated according to the position relation between the reflected laser beam and the emitted laser beam.
Specifically, when the surface shape of the plane mirror is measured by a laser interferometry, the plane mirror needs to be fixed through a clamp, so that the plane mirror is parallel to the laser emission surface; in practice, the surface shape measurement of the product shown in fig. 1 is encountered, and due to the structural limitation, it is difficult to fix the surface to be measured at a position parallel to the laser emission surface by using a fixture of the laser interferometer, so that the surface shape data acquisition of the plane mirror cannot be completed.
If the measurement method of the laser interferometer is still needed to finish the accurate measurement of the surface shape of the plane mirror fixed on the optical product, an auxiliary tool is needed to fix the optical product to be measured, so that the surface to be measured meets the measurement requirement.
Disclosure of Invention
The utility model aims to provide an auxiliary tool for detecting the surface shape of a plane mirror, so that an object to be detected with a special configuration can also meet the requirement of detecting the surface shape of a laser interferometer, and the acquisition of the surface shape data of the plane mirror to be detected is completed.
The embodiment of the utility model is realized by the following technical scheme:
the plane mirror surface shape detection auxiliary tool comprises a bottom plate, a mounting hole formed in the bottom plate, and a reflector vertically arranged on the bottom plate; the positional relationship between the mounting hole and the reflector satisfies: any connecting line can vertically pass through the reflector in sequence and then radially pass through the circle center of the mounting hole.
Further, the reflector is detachably connected with the bottom plate.
Further, one side wall surface of the bottom plate is provided with a pair of first connecting screw holes, the reflector is fixed on a fixed plate in parallel, and the bottom of the fixed plate is provided with a pair of second connecting screw holes matched with the first connecting screw holes.
Further, one side of the bottom plate far away from the first connecting screw hole is provided with a pair of third connecting screw holes.
Further, a baffle is also arranged on the bottom plate and is perpendicular to the bottom plate.
Further, the baffle is disposed proximate to the mounting hole.
Further, the device also comprises an adjusting mechanism, wherein the adjusting mechanism comprises a threaded hole formed in the bottom plate and an adjusting screw in threaded fit with the threaded hole.
Further, the threaded hole is formed near one end of the bottom plate.
The technical scheme of the embodiment of the utility model has at least the following advantages and beneficial effects:
the utility model has reasonable design and simple structure, can fix the optical product to be detected with special configuration, so that the object to be detected can not be fixed by the self-carried clamp of the laser interferometer, and can also meet the condition of using the laser interferometer for surface shape detection; the reflector which is detachably connected with the bottom plate is matched, so that a detection light path can be conveniently adjusted, shielding of the product structure of the object to be detected on the plane mirror to be detected is avoided, and the plane mirror to be detected meets the measurement requirement.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present utility model, the drawings that are needed in the embodiments will be briefly described below, it being understood that the following drawings only illustrate some embodiments of the present utility model and therefore should not be considered as limiting the scope, and other related drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
FIG. 1 is a schematic diagram of a structure of an object to be tested according to an embodiment of the present utility model;
fig. 2 is a schematic structural diagram of an auxiliary tool for detecting the surface shape of a plane mirror according to an embodiment of the present utility model;
FIG. 3 is a schematic diagram of an auxiliary tool for detecting the surface shape of a plane mirror according to an embodiment of the present utility model;
icon: the device comprises the following components of a 10-object to be detected, a 11-cuboid, a 12-cylinder, a 13-plane mirror to be detected, a 14-edge, a 20-auxiliary tool, a 21-bottom plate, a 22-mounting hole, a 23-baffle, a 24-reflector, a 25-regulating mechanism and a 30-laser interferometer.
Detailed Description
For the purpose of making the objects, technical solutions and advantages of the embodiments of the present utility model more apparent, the technical solutions of the embodiments of the present utility model will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present utility model, and it is apparent that the described embodiments are some embodiments of the present utility model, but not all embodiments of the present utility model. The components of the embodiments of the present utility model generally described and illustrated in the figures herein may be arranged and designed in a wide variety of different configurations.
As shown in fig. 1 to 3, the present embodiment provides a plane mirror shape detection auxiliary tool 20, which includes a bottom plate 21, a mounting hole 22 formed in the bottom plate 21, and a reflective mirror 24 vertically arranged on the bottom plate 21; the positional relationship of the mounting hole 22 and the mirror 24 satisfies: either connection line may pass vertically through the mirror 24 and then radially through the center of the mounting hole 22.
In this embodiment, as shown in fig. 1, the object to be measured 10 is an irregular cuboid 11, and a small section of cylinder 12 with a size smaller than that of the cuboid 11 is fixed at the bottom of the cuboid 11 according to product design requirements, and the irregular structure makes it difficult to fix the plane mirror 13 to be measured at a position parallel to the laser emission surface by using a fixture of the laser interferometer 30; meanwhile, a plane mirror 13 to be measured of the object 10 to be measured is installed inside the cuboid 11 along the diagonal line of the cuboid 11; from the outside, part of the surface of the plane mirror 13 to be measured is blocked by the edge 14 of the cuboid 11, so that the emitted light cannot directly irradiate on the plane mirror 13 to be measured even if the plane mirror 13 to be measured and the laser emitting surface are in parallel positions. Therefore, in order to realize the surface shape detection of the plane mirror 13 to be detected of the object 10 to be detected shown in fig. 1, the embodiment designs the auxiliary surface shape detection tool 20 with a corresponding structure, and adopts the structural design of the bottom plate 21 and the mounting hole 22 with a corresponding size on the bottom plate 21 to realize the fixation of the object 10 to be detected with a special configuration; the object to be measured 10 which cannot be fixed by the laser interferometer 30 with a clamp can be well fixed on the bottom plate 21, and the condition of using the laser interferometer 30 for surface shape detection is satisfied; meanwhile, in order to solve the problem of shielding the edge 14 of the object to be measured 10, the present embodiment provides a mirror 24 perpendicular to the bottom plate 21. The direction of the bottom plate 21 is adjusted to enable the plane of the plane mirror 13 to be measured to form an included angle of 45 degrees with the plane of the reflector 24, and when the laser beam irradiates the plane mirror 13 to be measured, the incident angle is also 45 degrees; the laser beam is reflected by the plane mirror 13 to be detected and reaches the surface of the reflector 24, and then is reflected by the reflector 24 and reaches the CCD detector of the laser interferometer 30 by the plane mirror 13 to be detected, so that interference fringes are generated, and the surface shape of the plane mirror 13 to be detected can be detected by analyzing the interference fringes in combination with the correlation coefficient; shielding of the product structure of the object to be detected 10 to the plane mirror 13 to be detected is avoided, and detection efficiency is greatly improved.
Further, the mirror 24 is detachably connected to the base plate 21. In other embodiments, if the plane mirror 13 to be detected does not have the shielding of the product structure of the object 10 to be detected such as the edge 14, the bottom plate 21 can be directly adjusted without installing the reflective mirror 24, so that the plane mirror 13 to be detected is parallel to the laser emitting surface for detection; when measuring the object 10 with other configurations, the specification of the reflector 24 can be flexibly adjusted, and the application range of the auxiliary tool 20 is enlarged.
Specifically, the specific way of implementing the detachable connection between the bottom plate 21 and the reflective mirror 24 in this embodiment is as follows: one side wall surface of the bottom plate 21 is provided with a pair of first connecting screw holes, the reflector 24 is fixed on a fixed plate in parallel, and the bottom of the fixed plate is provided with a pair of second connecting screw holes matched with the first connecting screw holes. The structure is simple and easy to realize, and the processing difficulty is low.
Further, a pair of third connecting screw holes is formed in one side of the bottom plate 21 away from the first connecting screw hole. In the above structure, by the provision of the third connecting screw hole, more selectivity is provided for the installation of the mirror 24; the installation position of the reflector 24 can be reasonably adjusted according to the structure of the object to be measured 10, and the application range of the auxiliary tool 20 is further enlarged.
Further, a baffle plate 23 is further provided on the bottom plate 21, and the baffle plate 23 is perpendicular to the bottom plate 21 and is disposed close to the mounting hole 22. In the above structure, the baffle plate 23 can provide a supporting function for the object to be measured 10 fixed in the mounting hole 22, so that the object to be measured 10 is more stably fixed on the bottom plate 21, which is beneficial to detection. In other embodiments, the baffle 23 may also provide a fixed supporting point for the square object to be measured 10 and other objects to be measured 10.
Further, the auxiliary tool 20 further comprises an adjusting mechanism 25, the adjusting mechanism comprises a screw hole formed in the bottom plate 21 and an adjusting screw in threaded fit with the screw hole, and the end portion, close to one end of the bottom plate 21, of the screw hole is formed. In the structure, the pitching angle of the bottom plate 21 can be adjusted through the adjusting screw, so that the fine adjustment of the object to be detected 10 fixed on the bottom plate 21 is finished, and the focusing adjustment of the detection light path can be more conveniently finished; and the threaded hole is formed in one end part of the bottom plate 21 and is far away from the center of the bottom plate 21, so that the pitching adjusting effect of the adjusting screw is better.
In the plane mirror surface shape detection auxiliary tool 20 of the embodiment, the bottom plate 21 can stably fix the object 10 to be detected with a special configuration by utilizing the structures such as the mounting hole 22, the baffle plate 23 and the like, so that the object 10 to be detected which cannot be fixed by utilizing the self-contained clamp of the laser interferometer 30 can also meet the condition of using the laser interferometer 30 for surface shape detection; the reflector 24 detachably connected with the bottom plate 21 is matched, so that a laser beam detection light path can be conveniently adjusted, and shielding of the product structure of the object to be detected 10 on the plane mirror 13 to be detected is avoided; finally, the auxiliary tool 20 can conveniently perform focusing adjustment, so that the focusing adjustment of the detection light path can be more conveniently completed.
The above is only a preferred embodiment of the present utility model, and is not intended to limit the present utility model, but various modifications and variations can be made to the present utility model by those skilled in the art. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present utility model should be included in the protection scope of the present utility model.
Claims (8)
1. The utility model provides a plane mirror surface shape detects auxiliary fixtures which characterized in that: the device comprises a bottom plate, a mounting hole formed in the bottom plate, and a reflector vertically arranged on the bottom plate;
the positional relationship between the mounting hole and the reflector satisfies: any connecting line can vertically pass through the reflector in sequence and then radially pass through the circle center of the mounting hole.
2. The plane mirror surface shape detection auxiliary tool according to claim 1, wherein: the reflector is detachably connected with the bottom plate.
3. The planar mirror surface shape detection auxiliary tool according to claim 2, wherein: one side wall surface of the bottom plate is provided with a pair of first connecting screw holes, the reflector is parallelly fixed on a fixed plate, and the bottom of the fixed plate is provided with a pair of second connecting screw holes matched with the first connecting screw holes.
4. A plane mirror surface shape detection auxiliary tool according to claim 3, wherein: one side of the bottom plate, which is far away from the first connecting screw hole, is provided with a pair of third connecting screw holes.
5. The plane mirror surface shape detection auxiliary tool according to claim 4, wherein: the bottom plate is also provided with a baffle plate, and the baffle plate is perpendicular to the bottom plate.
6. The plane mirror surface shape detection auxiliary tool according to claim 5, wherein: the baffle is arranged close to the mounting hole.
7. The plane mirror surface shape detection auxiliary tool according to claim 6, wherein: the adjusting mechanism comprises a threaded hole formed in the bottom plate and an adjusting screw in threaded fit with the threaded hole.
8. The planar mirror surface shape detection auxiliary tool according to claim 7, wherein: the threaded hole is formed near one end of the bottom plate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322147851.6U CN220489988U (en) | 2023-08-08 | 2023-08-08 | Auxiliary fixture for plane mirror surface shape detection |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202322147851.6U CN220489988U (en) | 2023-08-08 | 2023-08-08 | Auxiliary fixture for plane mirror surface shape detection |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN220489988U true CN220489988U (en) | 2024-02-13 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202322147851.6U Active CN220489988U (en) | 2023-08-08 | 2023-08-08 | Auxiliary fixture for plane mirror surface shape detection |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN220489988U (en) |
-
2023
- 2023-08-08 CN CN202322147851.6U patent/CN220489988U/en active Active
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