CN117571611B - Ceramic substrate outward appearance detection device - Google Patents
Ceramic substrate outward appearance detection device Download PDFInfo
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- CN117571611B CN117571611B CN202410048670.4A CN202410048670A CN117571611B CN 117571611 B CN117571611 B CN 117571611B CN 202410048670 A CN202410048670 A CN 202410048670A CN 117571611 B CN117571611 B CN 117571611B
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- 238000001514 detection method Methods 0.000 title claims abstract description 136
- 239000000758 substrate Substances 0.000 title claims abstract description 66
- 239000000919 ceramic Substances 0.000 title claims abstract description 65
- 238000007689 inspection Methods 0.000 claims abstract description 30
- 238000003825 pressing Methods 0.000 claims abstract description 26
- 238000000034 method Methods 0.000 claims abstract description 18
- 230000005540 biological transmission Effects 0.000 claims description 25
- 238000006243 chemical reaction Methods 0.000 claims description 19
- 230000007306 turnover Effects 0.000 claims description 15
- 238000003780 insertion Methods 0.000 claims description 11
- 230000037431 insertion Effects 0.000 claims description 11
- 239000000523 sample Substances 0.000 claims description 7
- 230000000149 penetrating effect Effects 0.000 claims description 3
- 239000002245 particle Substances 0.000 abstract description 11
- 230000003287 optical effect Effects 0.000 abstract description 7
- 230000007547 defect Effects 0.000 abstract description 4
- 230000033001 locomotion Effects 0.000 description 7
- 238000010586 diagram Methods 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 5
- 230000002950 deficient Effects 0.000 description 3
- 239000012535 impurity Substances 0.000 description 3
- 239000002994 raw material Substances 0.000 description 3
- 230000002159 abnormal effect Effects 0.000 description 2
- 230000000903 blocking effect Effects 0.000 description 2
- 230000008602 contraction Effects 0.000 description 2
- 238000010191 image analysis Methods 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000011897 real-time detection Methods 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 238000010923 batch production Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 239000011889 copper foil Substances 0.000 description 1
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 1
- 238000010292 electrical insulation Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 238000005476 soldering Methods 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
- 210000003437 trachea Anatomy 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N19/00—Investigating materials by mechanical methods
- G01N19/08—Detecting presence of flaws or irregularities
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
- G01B21/30—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring roughness or irregularity of surfaces
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- Length Measuring Devices With Unspecified Measuring Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Abstract
The invention relates to the technical field of ceramic substrates, in particular to a ceramic substrate appearance detection device which comprises an equipment machine table, an operation machine frame arranged on the periphery of the equipment machine table and a detection machine box arranged on the operation machine frame, wherein the equipment machine table comprises a base plate, a base plate and a detection box; the detection case comprises a main case frame body and a main case support frame arranged in the main case frame body, wherein the main case support frame is provided with a pressing pneumatic detection element, a veneering pneumatic detection element and a pneumatic sensing case respectively. The pressing pneumatic inspection element is an operation implementation part for light pressure detection, and the flatness state of the surface of the ceramic substrate is known. The bottom end of the faced pneumatic detection element is attached to the surface of the detection surface of the ceramic substrate, so that the targeted process detection can be performed on the bad defects such as small particles and bulges. Compared with the optical detection mode in the prior art, the device has lower overall design cost and higher operation efficiency. The device can perform effective technical detection on the appearance process of the ceramic substrate, and is suitable for the process requirements of conventional power electronic circuits.
Description
Technical Field
The invention relates to the technical field of ceramic substrates, in particular to a ceramic substrate appearance detection device.
Background
The ceramic substrate refers to a special process board in which copper foil is directly bonded to the surface of an alumina or aluminum nitride ceramic substrate at high temperature, and the prepared ultrathin composite substrate has excellent electrical insulation property, high heat conduction property, excellent soldering property and relatively high adhesive strength, and has great current carrying capacity. The ceramic substrate with uneven surface can influence subsequent etching treatment, and the poor appearance of the ceramic substrate has larger influence on subsequent assembly.
In the prior art, the plane flatness of the ceramic substrate can be detected by the optical detection device, and the optical detection needs to carry out illumination, light angle and image analysis, so that strong computer analysis capability is needed, the whole input cost is high, the detection rate is slower, and the detection mode is only suitable for high-precision high-quality ceramic substrates and is not suitable for ceramic substrates for common power electronic circuits in batch production. Therefore, most of the conventional ceramic substrate production processes are also manually visual detection, and the large omission ratio exists.
Disclosure of Invention
The present invention is directed to a ceramic substrate appearance detecting device, which solves the above-mentioned problems in the prior art.
In order to achieve the above purpose, the present invention provides the following technical solutions:
the ceramic substrate appearance detection device comprises an equipment machine table, an operation machine frame arranged on the periphery of the equipment machine table and a detection machine box arranged on the operation machine frame; a loading area is arranged on the table top of the equipment machine table; the operation frame comprises a first adjusting module arranged at two sides of a loading section, a second adjusting module arranged on the first adjusting module and a loading machine seat arranged on the second adjusting module, and the detection machine case is arranged on the loading machine seat.
The detection case comprises a main case frame body and a main case support frame arranged in the main case frame body, wherein a pressing pneumatic detection element, a veneering pneumatic detection element and a pneumatic sensing case are respectively arranged on the main case support frame; the main box support frame is provided with an inner support frame, a supporting end arranged at the bottom of the inner support frame and a pneumatic turnover part erected at the top of the inner support frame, the pressing pneumatic inspection element is erected on the supporting end, and the pneumatic end of the pressing pneumatic inspection element is externally connected with a pneumatic sensing branch pipe through the pneumatic turnover part; the frame wall of the main box frame body is provided with a supporting part, the supporting part is provided with a rotating part and a power conversion element which moves along with the rotating part, the veneering pneumatic detection element is arranged at the bottom end of the rotating part; the pneumatic sensor box is internally provided with a sensor case, a first sensor end and a second sensor end which are respectively arranged in the sensor case, the first sensor end is connected with the pneumatic sensor branch pipe, and the second sensor end is connected with the power conversion element.
As a further scheme of the invention: the pressing pneumatic inspection element comprises a plurality of first detection machine barrels, a collision head and a transmission air pipe arranged at the top ends of the first detection machine barrels; the locating support comprises a support body and is characterized in that a mounting frame plate and a locating frame plate located below the mounting frame plate are arranged at the support end respectively, locating sleeve openings are formed in the mounting frame plate and the locating frame plate, a first detecting machine barrel is arranged in the locating sleeve openings of the mounting frame plate, a first piston rod is arranged at the bottom end of the first detecting machine barrel in a telescopic mode, the first piston rod penetrates through the locating sleeve openings of the locating frame plate, and a collision head is arranged at the bottom end of the corresponding first piston rod.
As a further scheme of the invention: the first piston rods are respectively provided with a support gasket, the support gaskets are respectively provided with a reset spring, and the reset springs are wound on the periphery of the first detection machine barrel and the tops of the reset springs are supported on the bottom plane of the mounting frame plate.
As a further scheme of the invention: the first detection barrel top all is provided with pneumatic output head, the transmission trachea is installed in corresponding pneumatic output head department, pneumatic turnover department is provided with the gas receiving head and respectively with gas receiving head assorted and inside UNICOM's turnover gas core, the tracheal tail end connection of transmission connects to corresponding gas receiving head, pneumatic sensing branch pipe is connected with the turnover gas core that corresponds.
As a further scheme of the invention: the bottom of the supporting part is provided with a supporting base, supporting plates arranged on two sides of the supporting base, supporting bearings arranged on the supporting plates and an inner supporting shaft penetrating between the supporting bearings, and the power conversion element is connected with the rotating part through the inner supporting shaft.
As a further scheme of the invention: the rotating part is of a frame structure and is externally connected with a mounting sleeve, and the mounting sleeve is mounted at the shaft end of the inner support shaft; the power conversion element comprises a second detection machine barrel and a second piston rod which is arranged at the bottom end of the second detection machine barrel in a telescopic mode, a swinging disc is arranged at the other shaft end of the inner support shaft, a protruding portion is arranged on the side edge of the swinging disc, and the rod end of the second piston rod is connected with the protruding portion through a connecting bolt; the top end of the supporting part is provided with a positioning support rod, the second detection machine barrel is arranged on the positioning support rod, the top of the second detection machine barrel is also provided with a gas transmission head, a transmission end is arranged in the gas transmission head, and the transmission end is connected with the second sensing end through a guide pipe; and a reset torsion spring is arranged between the swinging disc and the supporting plate at the corresponding side.
As a further scheme of the invention: the inner frame of the rotating part is provided with a mounting fixture and a fixing sleeve, and the veneering pneumatic detection element comprises a main support plate fixed in the mounting fixture and a locking bolt piece arranged on the side edge of the main support plate and inserted into the fixing sleeve;
as still further aspects of the invention: the bottom of main tributary board is provided with the rotating head, rotates and installs the interpolation piece on the rotating head, and the bottom of interpolation piece is provided with the insertion groove, and the fixed mounting has the probe in the insertion groove.
Compared with the prior art, the invention has the beneficial effects that:
according to the invention, the pressing pneumatic inspection element is used as an operation implementation part for light pressure detection, and when the concave-convex trend appears on the surface of the ceramic substrate, the pressing pneumatic inspection element correspondingly generates a telescopic change trend, so that the flatness state of the surface of the ceramic substrate is known. The bottom end of the faced pneumatic detection element is attached to the surface of the detection surface of the ceramic substrate, so that the targeted process detection can be performed on the bad defects such as small particles and bulges. Compared with the optical detection mode in the prior art, the method has lower overall cost and higher operation efficiency. The method can perform effective technical detection on the appearance process of the ceramic substrate, and is suitable for the process requirements of conventional power electronic circuits.
To the knowledge of detected data, in order to guarantee detection precision, the pneumatic sensing box is designed to be used as a detection sensing end, the expansion and contraction change of the pressing pneumatic detection element can produce pneumatic influence, the accurate detection condition of the pressing pneumatic detection element in the motion process of the detection box is judged, under the influence of rotation, the power conversion element also produces air flow change, the power conversion element is butted with a second sensing end, and the detection box senses the detection condition of the veneered pneumatic detection element accurately in real time.
For the defects such as small particles and bulges on the ceramic substrate, the invention carries out accurate data detection processing on the conditions, and can scientifically select products which can still be utilized according with requirements according to the coordinate position, bulge height and other data of the defective points in the defective products, thereby improving the raw material utilization rate of the ceramic substrate.
It is to be understood that both the foregoing general description and the following detailed description are exemplary and explanatory only and are not restrictive of the application.
Drawings
The accompanying drawings, which are incorporated in and constitute a part of this specification, illustrate embodiments consistent with the application and together with the description, serve to explain the principles of the application. Meanwhile, these drawings and the written description are not intended to limit the scope of the inventive concept in any way, but to illustrate the inventive concept to those skilled in the art by referring to specific embodiments.
Fig. 1 is a schematic diagram of the overall structure of a ceramic substrate appearance detecting device according to an embodiment of the present invention.
Fig. 2 is a schematic cross-sectional structure of a detection case according to an embodiment of the present invention.
Fig. 3 is a schematic structural diagram of a pneumatic pressing inspection element, a supporting end and a pneumatic turnover part according to an embodiment of the present invention.
Fig. 4 is a schematic structural diagram of a faced pneumatic detecting element, a rotating portion and a power conversion element according to an embodiment of the present invention.
Fig. 5 is a schematic installation diagram of a power conversion element and a rotating part according to an embodiment of the present invention.
Fig. 6 is a schematic installation diagram of a faced pneumatic detection element and a rotating portion according to an embodiment of the present invention.
Fig. 7 is a schematic structural view of the area a in fig. 5 according to the present invention.
In the figure: 11. an equipment machine; 12. loading sections; 13. a running rack; 14. a first adjusting module; 15. a second adjusting module; 16. a loading base; 17. detecting a case; 18. a display; 21. a main box frame; 22. a main box support frame; 23. a pneumatic sensor box; 24. pressing the pneumatic inspection element; 25. a faced pneumatic detection element; 31. a support end; 32. an inner support; 33. a pneumatic sensing branch pipe; 34. a pneumatic turnover part; 35. a rotating part; 36. a support part; 37. a power conversion element; 38. a first sensing end; 39. a second sensing end; 30. a sensor chassis; 41. mounting a frame plate; 42. positioning a frame plate; 43. positioning a sleeve opening; 51. a first detection barrel; 52. a first piston rod; 53. a contact; 54. a support pad; 55. a return spring; 56. pneumatic output heads; 57. a transmission gas pipe; 58. a gas joint; 59. turnover gas core; 61. a support base; 62. a support plate; 63. a support bearing; 64. an inner support shaft; 65. a mounting sleeve; 66. a swinging disc; 67. a boss; 71. a second detection barrel; 72. a second piston rod; 73. a connecting bolt; 74. positioning the supporting rod; 75. a gas delivery head; 76. a transmission end; 77. a reset torsion spring; 81. a fixed sleeve; 82. installing a clamp; 83. a main support plate; 84. locking the bolt; 85. an interpolation block; 86. an insertion groove; 87. a probe; 88. the head is turned.
Detailed Description
The technical solutions according to the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings, examples of which are shown in the accompanying drawings. When the following description refers to the accompanying drawings, like numerals in the various drawings refer to like or similar elements, unless otherwise specified.
It will be apparent that the described embodiments are only some, but not all, embodiments of the invention. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
Specific implementations of the invention are described in detail below in connection with specific embodiments.
In one embodiment, referring to fig. 1 and 2, a ceramic substrate appearance inspection apparatus includes an equipment platform 11, an operation rack 13 mounted on the periphery of the equipment platform 11, and an inspection box 17 disposed on the operation rack 13. The whole device of this embodiment sets up on ceramic substrate outward appearance detection workstation, and equipment board 11 is holistic equipment support structure, and operation frame 13 is used for driving the operation of detecting machine case 17 to make detecting machine case 17 can cover and detect ceramic substrate's whole surface situation.
A loading area 12 is arranged on the table top of the equipment machine table 11; the operation rack 13 comprises a first adjusting module 14 arranged at two sides of the loading section 12, a second adjusting module 15 arranged on the first adjusting module 14, and a loading base 16 arranged on the second adjusting module 15, and the detection case 17 is arranged on the loading base 16.
The loading section 12 is a loading area for ceramic substrates, and ceramic substrates can be pushed into the inner cavity of the loading section 12 along the opening side of the equipment table 11, and ceramic substrates with large volumes can be loaded into the loading section 12 in a single piece, and ceramic substrates with small volumes can be loaded into the loading section 12 in a form of a plurality of pieces side by side. The first adjusting module 14 and the second adjusting module 15 are respectively a transverse adjusting mechanism and a longitudinal adjusting structure, the detecting machine box 17 is installed on the loading machine base 16, and the loading machine base 16 can also be lifted up and down slightly, so that the detecting machine box 17 can be close to the surface to be detected of the ceramic substrate to facilitate detection. As an example, a mechanism design manner of the present embodiment is shown in the drawings, where the first adjusting module 14 and the second adjusting module 15 are both in a crawler adjusting manner, the loader stand 16 is in an electric control lifting manner, and a specific adjusting implementation structure is in the prior art, which will not be described in detail in this embodiment. The side edge of the equipment platform 11 is provided with a display 18 for displaying the detection condition of the detection case 17, or an operator inputs an operation instruction through the display 18.
The detection case 17 comprises a main case frame 21 and a main case support frame 22 arranged in the main case frame 21, wherein a pressing pneumatic detection element 24, a veneering pneumatic detection element 25 and a pneumatic sensing case 23 are respectively arranged on the main case support frame 22;
the main box support frame 22 is provided with an inner support frame 32, a supporting end 31 arranged at the bottom of the inner support frame 32 and a pneumatic turnover part 34 arranged at the top of the inner support frame 32, the pressing pneumatic inspection element 24 is arranged on the supporting end 31, and the pneumatic end of the pressing pneumatic inspection element is externally connected with a pneumatic sensing branch pipe 33 through the pneumatic turnover part 34;
the frame wall of the main box frame 21 is provided with a supporting part 36, the supporting part 36 is provided with a rotating part 35 and a power conversion element 37 which moves along with the rotating part 35, and the veneering pneumatic detection element 25 is arranged at the bottom end of the rotating part 35;
the pneumatic sensor box 23 is internally provided with a sensor box 30, and a first sensor end 38 and a second sensor end 39 which are respectively arranged in the sensor box 30, wherein the first sensor end 38 is connected with the pneumatic sensor branch pipe 33, and the second sensor end 39 is connected with the power conversion element 37.
In this embodiment, the detection operation is performed on the surface to be detected of the ceramic substrate by the detection case 17 in two modes of light pressure detection and surface detection instead of the high-cost optical detection mode:
the pressing pneumatic inspection element 24 is an operation implementation component for light pressure detection, the compressive strength of the ceramic substrate is between 500 and 1000MPa, the light pressure cannot influence the quality of the ceramic substrate, the pressing pneumatic inspection element 24 detects the ceramic substrate, and when the surface of the ceramic substrate has concave-convex trend, the pressing pneumatic inspection element 24 senses the corresponding change trend, so that the planeness state of the surface of the ceramic substrate is known.
In the production process of the ceramic substrate, the raw materials inevitably have impurity problems, and uneven internal stress is generated in the finished ceramic substrate product due to the impurities, so that small-particle punctiform protrusions appear, which is the most main bad phenomenon of the existing ceramic substrate, and the faced pneumatic detection element 25 is designed according to the bad phenomenon, so that the faced pneumatic detection element is detected in a targeted manner. The bottom end of the faced pneumatic detection element 25 is attached to the surface of the detection surface of the ceramic substrate, along with the movement of the detection case 17, when the surface of the ceramic substrate moves on the surface of the detection surface of the ceramic substrate, punctiform protrusions appear on the surface of the ceramic substrate, interference and blocking are formed on the movement of the faced pneumatic detection element 25, so that the faced pneumatic detection element 25 and the rotating part 35 at the top are forced to rotate, the power conversion element 37 is driven to correspondingly rotate, punctiform protrusions of small particles are detected, and targeted process detection of the defective defects of the small particles and the protrusions is realized.
To the knowledge of the detection data, in order to ensure the detection accuracy, the pneumatic sensor box 23 is designed as a detection sensing end in this embodiment, the expansion and contraction change of the pressing pneumatic inspection element 24 can generate pneumatic influence, and the pneumatic sensor box is connected to the first sensing end 38 through the pneumatic sensor branch pipe 33, so that the detection condition of the pressing pneumatic inspection element 24 in the moving process can be accurately sensed in real time by the sensor box 30. Similarly, when the overlay pneumatic detection element 25 blocks the punctiform protrusions during the travelling process of the detection surface of the ceramic substrate, the rotation part 35 is rotated and driven, the power conversion element 37 also generates angle change, and is abutted to the second sensing end 39, and the sensor case 30 also accurately senses the detection condition of the overlay pneumatic detection element 25 in real time.
Compared with the optical detection mode in the prior art, the embodiment does not need high-cost camera equipment and optical detection programs or image analysis steps, has lower overall cost and higher operation efficiency, can meet the effective technical detection of the appearance process of the ceramic substrate, and is suitable for the production and inspection process requirements of the conventional power electronic circuit.
In one embodiment, referring to fig. 1, 2 and 3, for a specific operation implementation of the pneumatic inspection element 24, the following structural design is adopted in this embodiment:
the pressing pneumatic inspection element 24 comprises a plurality of first detection barrels 51, a supporting contact 53 and a transmission air pipe 57 arranged at the top end of the first detection barrels 51; the support end 31 is respectively provided with a mounting plate 41 and a positioning plate 42 positioned below the mounting plate 41, the mounting plate 41 and the positioning plate 42 are respectively provided with a positioning sleeve 43, the first detection machine barrel 51 is arranged in the positioning sleeve 43 of the mounting plate 41, the bottom end of the first detection machine barrel 51 is provided with a first piston rod 52 in a telescopic manner, the first piston rod 52 is respectively internally penetrated in the positioning sleeve 43 of the positioning plate 42, and the abutting head 53 is arranged at the bottom end of the corresponding first piston rod 52. The top end of the first detecting machine barrel 51 is provided with pneumatic output heads 56, the transmission air pipes 57 are arranged at the corresponding pneumatic output heads 56, the pneumatic turnover parts 34 are provided with air receiving heads 58 and turnover air cores 59 which are matched with the air receiving heads 58 respectively and are communicated with the inside, the tail ends of the transmission air pipes 57 are connected to the corresponding air receiving heads 58, and the pneumatic sensing branch pipes 33 are connected with the corresponding turnover air cores 59.
The pressing pneumatic inspection element 24 is composed of a plurality of groups of first inspection barrels 51, abutting heads 53 and a transmission air pipe 57, each first inspection barrel 51 and each abutting head 53 are an inspection point, each abutting head 53 is made of a smooth soft rubber material and abuts against the surface of the ceramic substrate, the ceramic substrate cannot be affected, when the ceramic substrate has a concave-convex trend, the abutting heads 53 moving to the area correspondingly move upwards or downwards, so that the first piston rod 52 is driven to move, the first piston rod 52 moves, the pressure inside the first inspection barrels 51 changes, the transmission air pipe 57 and the pneumatic sensing branch pipe 33 conduct the internal pressure change conditions, and the first sensing end 38 is enabled to know the real-time detection conditions of each abutting head 53. And then the motion coordinates of the detection case 17 at the moment can be read out by matching with the motion position records of the first adjusting module 14 and the second adjusting module 15, so that the abnormal coordinate points of the ceramic substrate can be rapidly recorded.
In one case of the present embodiment, the first piston rods 52 are each further provided with a support pad 54, and the support pads 54 are provided with a return spring 55, and the return spring 55 is wound around the periphery of the first detecting cylinder 51 and supported on the top surface of the mounting plate 41. The support spacer 54 is positioned close to the positioning shelf 42 but with a certain clearance from the positioning shelf 42, the return spring 55 is kept in a slightly compressed state; the return spring 55 always keeps the pushing force to the support pad 54, and further always pushes the first piston rod 52 downwards, so that the abutting head 53 can abut against the surface of the ceramic substrate as much as possible.
In one embodiment, referring to fig. 1, 2, 4 and 5, for a specific operation implementation of the faced pneumatic detection element 25, the embodiment is designed as follows:
the bottom end of the supporting part 36 is provided with a supporting base 61, supporting plates 62 arranged at both sides of the supporting base 61, supporting bearings 63 mounted on the supporting plates 62, and an inner support shaft 64 penetrating between the supporting bearings 63, and the power conversion element 37 is connected to the rotating part 35 via the inner support shaft 64. The rotating portion 35 has a frame structure and is externally connected with a mounting sleeve 65, and the mounting sleeve 65 is mounted on the shaft end of the inner support shaft 64. The power conversion element 37 comprises a second detection machine barrel 71 and a second piston rod 72 which is telescopically arranged at the bottom end of the second detection machine barrel 71, the other shaft end of the inner support shaft 64 is provided with a swinging disc 66, the side edge of the swinging disc 66 is provided with a protruding part 67, and the rod end of the second piston rod 72 is connected with the protruding part 67 through a connecting bolt 73; the top of the supporting part 36 is provided with a positioning support rod 74, the second detecting machine barrel 71 is arranged on the positioning support rod 74, the top of the second detecting machine barrel 71 is also provided with a gas transmission head 75, a transmission end 76 is arranged in the gas transmission head 75, and the transmission end 76 is connected with the second sensing end 39 through a conduit.
The bottom of the faced pneumatic detection element 25 is in a laminated contact state with the surface of the ceramic substrate, the faced pneumatic detection element 25 and the rotating part 35 are fixedly installed and move synchronously, when small-particle punctiform protrusions are encountered, the faced pneumatic detection element 25 is subjected to resistance to rotate, the rotating part 35 is driven to rotate correspondingly and the inner support shaft 64 is driven to rotate, the inner support shaft 64 drives the swinging disc 66 to move, the boss 67 is driven to swing, the boss 67 in the swinging process pushes and pulls the second piston rod 72, the pressure in the second detection cylinder 71 is changed, the gas delivery head 75 is connected with the second sensing end 39 through a conduit, the gas pressure change condition is conducted to the second sensing end 39, the second sensing end 39 is enabled to know the real-time detection condition of the faced pneumatic detection element 25, the movement position record of the whole first adjusting module 14 and the second adjusting module 15 is matched, the movement coordinate of the detection case 17 at the moment can be read, and the abnormal coordinate of the ceramic substrate can be recorded rapidly.
Referring to fig. 5 and 7, a reset torsion spring 77 is disposed between the swing disc 66 and the support plate 62 at the corresponding side, and after the bottom end of the faced pneumatic detection element 25 passes over the punctiform protrusion, the reset torsion spring 77 immediately drives the swing disc 66 to reset, that is, drives the faced pneumatic detection element 25 to correspondingly reset to the original vertical state, and resumes the initial state for detection when the next time contacts the punctiform protrusion.
In one case of the present embodiment, referring to fig. 4, 5 and 6, the inner frame of the rotating part 35 is provided with a mounting fixture 82 and a fixing sleeve 81, and the pneumatic veneering detecting element 25 includes a main support 83 fixed in the mounting fixture 82 and a locking bolt 84 mounted on a side edge of the main support 83 and inserted into the fixing sleeve 81; the bottom of the main support 83 is provided with a rotating head 88, an inner insertion block 85 is mounted on the rotating head 88, the bottom of the inner insertion block 85 is provided with an insertion groove 86, and a probe 87 is fixedly mounted in the insertion groove 86.
The overlay pneumatic detection element 25 is detachably arranged in the rotating part 35, and different types of overlay pneumatic detection elements 25 can be replaced according to actual detection requirements; the main body of the faced pneumatic detection element 25 is a main support 83, the probe 87 at the bottom is a detection component contacted with the surface of the ceramic substrate, and the probe 87 is detachably arranged on the inner insert 85, so that the probes 87 of related models can be replaced conveniently according to the material condition of the ceramic substrate.
In the whole detection process, the blocking height of the particle protrusion on the surface of the ceramic substrate is known by the swing of the faced pneumatic detection element 25, the protrusion height is converted into the change of the swing angle, and the magnitude of the swing angle is known by the pressure change in the second detection barrel 71 to calculate the numerical difference of the detected protrusion height, so that the particle protrusion condition on the surface of the ceramic substrate is more accurately known and recorded. In the production process of the ceramic substrate, because the particle protrusion exists in trace impurities, the particle protrusion product cannot be used for subsequent production, the embodiment detects and records accurate data of the conditions, and products which can still be utilized can be selected comprehensively according to the coordinate position, protrusion height and other data of bad points in the inferior products, so that the raw material utilization rate of the ceramic substrate is improved.
It will be evident to those skilled in the art that the invention is not limited to the details of the foregoing illustrative embodiments, and that the present invention may be embodied in other specific forms without departing from the spirit or essential characteristics thereof. The present embodiments are, therefore, to be considered as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein.
Furthermore, it should be understood that although the present disclosure describes embodiments, not every embodiment is provided with a separate embodiment, and that this description is provided for clarity only, and that the disclosure is not limited to the embodiments described in detail below, and that the embodiments described in the examples may be combined as appropriate to form other embodiments that will be apparent to those skilled in the art.
Claims (3)
1. The ceramic substrate appearance detection device comprises an equipment machine table (11), an operation machine frame (13) arranged on the periphery of the equipment machine table (11) and a detection machine box (17) arranged on the operation machine frame (13); it is characterized in that the method comprises the steps of,
a loading section (12) is arranged on the table top of the equipment table (11); the operation rack (13) comprises a first adjusting module (14) arranged at two sides of the loading section (12), a second adjusting module (15) arranged on the first adjusting module (14) and a loading machine seat (16) arranged on the second adjusting module (15), and the detection machine box (17) is arranged on the loading machine seat (16);
the detection case (17) comprises a main case frame body (21) and a main case support frame (22) arranged in the main case frame body (21), wherein a pressing pneumatic detection element (24), a faced pneumatic detection element (25) and a pneumatic sensing case (23) are respectively arranged on the main case support frame (22);
the main box support frame (22) is provided with an inner support frame (32), a supporting end (31) arranged at the bottom of the inner support frame (32) and a pneumatic turnover part (34) arranged at the top of the inner support frame (32), the pressing pneumatic inspection element (24) is arranged on the supporting end (31) in a erected mode, and the pneumatic end of the pressing pneumatic inspection element is externally connected with a pneumatic sensing branch pipe (33) through the pneumatic turnover part (34);
the main box frame body (21) is provided with a supporting part (36) on the frame wall, a rotating part (35) and a power conversion element (37) moving along with the rotating part (35) are arranged on the supporting part (36), and the faced pneumatic detection element (25) is arranged at the bottom end of the rotating part (35);
the pneumatic sensor box (23) is internally provided with a sensor case (30) and a first sensor end (38) and a second sensor end (39) which are respectively arranged in the sensor case (30), the first sensor end (38) is connected with the pneumatic sensor branch pipe (33), and the second sensor end (39) is connected with the power conversion element (37);
the pressing pneumatic inspection element (24) comprises a plurality of first detection barrels (51), a collision head (53) and a transmission air pipe (57) arranged at the top end of the first detection barrels (51); the device is characterized in that the supporting end (31) is respectively provided with a mounting frame plate (41) and a positioning frame plate (42) positioned below the mounting frame plate (41), the mounting frame plate (41) and the positioning frame plate (42) are respectively provided with a positioning sleeve opening (43), the first detection machine barrel (51) is respectively installed in the positioning sleeve opening (43) of the mounting frame plate (41), the bottom end of the first detection machine barrel (51) is provided with a first piston rod (52) in a telescopic mode, the first piston rod (52) is respectively internally penetrated in the positioning sleeve opening (43) of the positioning frame plate (42), and the abutting head (53) is installed at the bottom end of the corresponding first piston rod (52);
the pneumatic transfer machine comprises a first detection machine barrel (51), a pneumatic output head (56) is arranged at the top end of the first detection machine barrel, a transmission air pipe (57) is arranged at the corresponding pneumatic output head (56), an air receiving head (58) and a transfer air core (59) which is matched with the air receiving head (58) respectively and communicated with the inside are arranged at the pneumatic transfer part (34), the tail end of the transmission air pipe (57) is connected to the corresponding air receiving head (58), and the pneumatic sensing branch pipe (33) is connected with the corresponding transfer air core (59);
the bottom end of the supporting part (36) is provided with a supporting base (61), supporting plates (62) arranged on two sides of the supporting base (61), supporting bearings (63) arranged on the supporting plates (62) and an inner support shaft (64) penetrating between the supporting bearings (63), and the power conversion element (37) is connected with the rotating part (35) through the inner support shaft (64);
the rotating part (35) is of a frame structure and is externally connected with a mounting sleeve (65), and the mounting sleeve (65) is mounted at the shaft end of the inner support shaft (64); the power conversion element (37) comprises a second detection machine barrel (71) and a second piston rod (72) which is telescopically arranged at the bottom end of the second detection machine barrel (71), a swinging disc (66) is arranged at the other shaft end of the inner support shaft (64), a protruding part (67) is arranged at the side edge of the swinging disc (66), and the rod end of the second piston rod (72) is connected with the protruding part (67) through a connecting bolt (73); a positioning support rod (74) is arranged at the top end of the supporting part (36), a second detection machine barrel (71) is arranged on the positioning support rod (74), a gas transmission head (75) is further arranged at the top of the second detection machine barrel (71), a transmission end (76) is arranged in the gas transmission head (75), and the transmission end (76) is connected with a second sensing end (39) through a guide pipe; a reset torsion spring (77) is arranged between the swinging disc (66) and the supporting plate (62) at the corresponding side;
the inner frame of the rotating part (35) is provided with a mounting clamp (82) and a fixing sleeve (81), and the faced pneumatic detection element (25) comprises a main support plate (83) fixed in the mounting clamp (82) and a locking bolt (84) arranged on the side edge of the main support plate (83) and inserted into the fixing sleeve (81).
2. The ceramic substrate appearance inspection device according to claim 1, wherein the first piston rods (52) are each further provided with a support pad (54), the support pads (54) are provided with a return spring (55), the return spring (55) is wound around the periphery of the first inspection cylinder (51) and the top is supported on the bottom plane of the mounting frame plate (41).
3. The ceramic substrate appearance detection device according to claim 1, wherein a rotating head (88) is arranged at the bottom end of the main support plate (83), an inner insertion block (85) is mounted on the rotating head (88), an insertion groove (86) is formed at the bottom end of the inner insertion block (85), and a probe (87) is fixedly mounted in the insertion groove (86).
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| Application Number | Priority Date | Filing Date | Title |
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| CN202410048670.4A CN117571611B (en) | 2024-01-12 | 2024-01-12 | Ceramic substrate outward appearance detection device |
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| CN202410048670.4A CN117571611B (en) | 2024-01-12 | 2024-01-12 | Ceramic substrate outward appearance detection device |
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| CN117571611A (en) | 2024-02-20 |
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