A kind of high-stability quartz resonance type force sensor
The present invention relates to a kind of force measuring device, particularly a kind of force transducer that adopts piezoelectric quartz resonator to make sensitive element.
As far back as the 60 to 70's, the scientific worker just is used for the power one frequency characteristic of quartz resonator the exploitation of power, pressure, acceleration transducer.Because the use occasion (as hydrocarbon well logging, missile guidance) of pressure transducer and acceleration transducer can allow higher cost usually, thereby they have obtained than development faster.This two quartz-likes resonant transducer all is that resonator and peripheral structure are made of one, and has so just eliminated peripheral structure greatly to resonator power one influence of characteristic frequently, thereby has guaranteed that sensor has than higher precision.And the use occasion of force transducer (as weighing) often requires sensor inexpensive, reliable, and requiring again simultaneously has higher precision, and the possibility of batch process also will be arranged, and this has hindered its development undoubtedly.In order to satisfy the above requirement of force transducer, developed the quartz resonance sensor of a kind of low cost, fabricated structure at present, as the disclosed this force transducer of Chinese patent application 95104981.X (publication number CN1113006A).But because this sensor construction adopts single-iris to support crystal, the less stable of sensor has also limited its precision and range simultaneously.In addition, the connection between the sensor component, between positioning film and briquetting, connecting etc. between crystal and briquetting and the cushion block, very big to the stability influence of sensor, and cause the bigger creep of crystal easily, make sensor be easy to be damaged.The disclosed sensor of U.S. Pat PatNo.3891870, though, adopted two diaphragm structures, extremely thin because the thickness of its upper diaphragm has only 0.003 inch, so can only play the effect of sealing, still exist and support problem of unstable.
Purpose of the present invention is exactly at above-mentioned defective of the prior art, provides that a kind of creep is little, good stability, precision height, range is big, the life-span is long quartz resonance type force sensor.
The said high-stability quartz resonance type force sensor of the present invention comprises electrode, last anvil, quartz resonator, following anvil and housing, and the top of the bottom of last anvil and following anvil has the groove that width is slightly larger than resonator thickness, is used for fixing resonator.Resonator is supported in the housing of sensor by last anvil and following anvil, and external force F produces diameter pressure by last anvil and following anvil to resonator.Feature of the present invention is: go up two diaphragm supporting constructions of the position of anvil being made up of diaphragm and upper backup pad and limit, connect with a cylinder between diaphragm and the upper backup pad, member all adopts tackifier bonding with connecting of member.
Upper backup pad of the present invention plays a supportive role, and its thickness is 0.15～2mm greater than 0.15mm, and the used glue of adhesive member is glass transition temperature greater than 30 ℃ glue, and this temperature is high more good more.
The present invention is owing to adopted two diaphragm supporting constructions and used and needed the position that connects between the higher gluing connection member of glass transition temperature, make the supporting condition of resonator more become perfect, the hysteresis and the creep of sensor obviously reduce, the degree of stability of sensor and precision improve greatly in the process of dynamometry, especially prolong greatly fatigue lifetime.
Illustrate further the present invention below in conjunction with accompanying drawing.
Fig. 1 is a structural representation of the present invention.
Fig. 2 is the right view of Fig. 1.
Fig. 3 is another embodiment of the present invention structural representation.
1-electrode among the figure, the 2-housing, anvil under the 3-, the 4-resonator, the last anvil of 5-, the 6-diaphragm, the 7-connecting column, the 8-gasket ring, the 9-upper backup pad, the 10-over cap, the 11-steel ball, 12-adjusts ring, the 13-screw.
Embodiment 1:
The structure of present embodiment quartz transducer as shown in Figure 1.Sensor 4 adopts the non-complete attitude disk structure of symmetry, vibrates to be thickness shearing mode, takes all factors into consideration and obtains try one's best big force sensitivity and best frequency-temperature characteristic, and resonator adopts the AT cut type, and will add on the aspect that force direction is chosen in ψ=0.Resonator 4 is supported in the housing 2 of sensor by last anvil 5 and following anvil 3, and the upper end of its contact conductor and electrode 1 welds together, and draws housing by the two legs of electrode 1.The supporting construction restriction that the lateral attitude of last anvil 5 is made up of diaphragm 6 and upper backup pad 9, upper backup pad thickness is 0.18mm, diaphragm 6 thick about 0.2mm, diaphragm 6 is connected with a cylinder 7 with upper backup pad 9 centers, and the position of following anvil 3 is limited by the housing base.Have the groove that width is slightly larger than resonator 4 thickness in the bottom of last anvil 5 and the top of following anvil 3, be used for fixing resonator, resonator can be fixed in the sensor vertically.Between cylinder 7 and back up pad 9 and the diaphragm 6, between last anvil 5 and the diaphragm 6, between resonator 4 and last anvil 5, the following anvil 3, and between following anvil 3 and the base, all adopt this cohesive force of H610 strong, the little strain gage adhesive of creep is pasted, and its glass transition temperature is 30 °.Be added on the anvil 5 by dynamometry F by the steel ball in the tapered blind hole that is centered at anvil top 11 and pass to resonator 4.In addition, in structure, bear unexpected load, on upper backup pad 9, also added over cap 10 in order to prevent sensor.Table 2 is when diaphragm 6 and upper backup pad 9 distances during for 1.5mm, this sensor is subjected to each stage performance data of horizontal pulsed load fatigue experiment. and table 1 is that thickness is the test figure that the single-iris of 0.18mm is tested under the same conditions. m01 in the table 1, m02, ... n01 in m13 and the table 2, n02, ... n13 is a sensor number, a, b, ... e is respectively the test data after sensor is subjected to horizontal pulsed load 1kg/ hour fatigue, and f...i is respectively sensor and is subjected to horizontal pulsed load 4kg/ hour tired back test data.By table as seen, after same fatigue, the dual-support structure sensor does not damage, and the single-iris sensor successively has 5 damages, and spoilage reaches 38%.
Embodiment 2
The structure of present embodiment quartz transducer as shown in Figure 3.The structure difference of present embodiment and embodiment 1 is that diaphragm 6 and back up pad 9 are made of one with connecting column 7, steel ball 11 be positioned at connecting column 7 the lower end, go up anvil 5 above, diaphragm 6 is 0.5mm with the support thickness of slab, spacing is 5mm, resonator 4 is 90 ℃ with the glass transition temperature of last anvil 5 and following anvil 3 adhesive glues. table 3 is that this sensor is loading 5kg, 131g, measured partial properties data during 16kg. by table as seen, when loading is increased to 16kg by 5kg, sensor errors does not increase, as seen this structure can enlarge its range ability, and more stable.
Table 1
| Numbering No | The date sensitivity linearity degree repeated Date Sf X (H that lags behind
z)?????Z(H
z)??C(H
2)
| Remarks |
| ??m01a ??m01b ??m01c ??m01d ??m01e ??m01f ??m01g ??m01h ??m01i | 96/12/12????351.6???????1.1????????0.5??????2.0 96/12/13????350.6???????0.6????????1.0??????0.0 96/12/14????350.2???????0.8????????0.0??????0.0 96/12/16????348.9???????0.4????????1.0??????1.0 96/12/17????349.9???????0.4????????0.5??????1.0 96/12/18????350.3???????0.6????????1.0??????1.0 96/12/20????350.4???????0.5????????1.0??????0.0 96/12/21????349.6???????0.6????????1.0??????0.0 96/12/22????349.9???????0.5????????1.5??????2.0 | |
| ??m02a ??m02b ??m02c ??m02d ??m02e ??m02f ??m02g ??m02h ??m02i | 96/12/12????346.5???????0.2????????0.5??????1.0 96/12/13????346.2???????0.3????????0.5??????1.0 96/12/14????345.8???????0.4????????1.0??????1.0 96/12/16????344.5???????0.2????????0.5??????1.0 96/12/17????345.5???????0.6????????0.5??????1.0 96/12/18????345.8???????0.1????????0.5??????1.0 96/12/20????346.8???????0.2????????0.5??????1.0 96/12/21????346.0???????1.0????????1.0??????0 96/12/22????346.3???????0.3????????0.5??????1.0 | |
| ??m03a ??m03b ??m03c ??m03d ??m03e ??m03f ??m03g ??m03h ??m03i | 96/12/12????347.6???????0.8????????1.0??????2.0 96/12/13????346.5???????0.6????????0.5??????1.0 96/12/14????346.2???????0.3????????0.0??????0.0 96/12/16????345.1???????0.2????????0.5??????1.0 96/12/17????347.6???????1.0????????0.5??????1.0 96/12/18????347.9???????1.1????????0.5??????1.0 96/12/20????348.6???????0.8????????0.5??????1.0 96/12/21????348.1???????0.8????????1.0??????1.0 96/12/22????347.8???????1.2????????0.5??????2.0 | |
Continuous table 1
| ??m04a ??m04b ??m04c ??m04d ??m04e ??m04f ??m04g ??m04h ??m04i | ?96/12/12????349.5????0.7????1.5????2.0 ?96/12/13????349.3????0.4????1.0????1.0 ?96/12/14????349.5????0.5????1.0????1.0 ?96/12/16????348.2????0.6????1.0????1.0 ?96/12/17????349.0????0.3????1.0????1.0 ?96/12/18????349.3????0.5????1.0????1.0 ?96/12/20????349.2????0.4????1.0????0.0 ?96/12/21????349.2????0.5????2.0????1.0 ?96/12/22????350.1????0.6????1.5????3.0 | |
| ??m05a ??m05b ??m05c ??m05d ??m05e ??m05f ??m05g ??m05h ??m05i | ?96/12/12????350.7????1.5????2.0????2.0 ?96/12/13????350.5????1.2????4.0????0.0 ?96/12/14????349.5????1.3????3.0????1.0 ?96/12/16????348.1????1.5????3.0????2.8 ?96/12/17????348.9????1.6????3.0????1.0 ?96/12/18????349.2????1.3????3.0????1.0 ?96/12/20????350.3????0.8????2.0????0.0 ?96/12/21????349.2????0.5????2.0????1.0 ?96/12/22????349.1????0.7????1.5????2.0 | |
| ??m06a ??m06b ??m06c ??m06d ??m06e ??m06f
*m06g ??m06h ??m06i
| ?96/12/12????338.3????0.4????0.5????2.0 ?96/12/13????338.5????1.2????0.0????1.0 ?96/12/14????338.0????1.3????1.0????0.0 ?96/12/16????336.4????1.4????1.0????0.0 ?96/12/17????338.0????0.8????0.0????1.0 ?96/12/18????338.7????0.6????0.5????1.0 ?96/12/20????344.9????1.7????2.0????1.0 ?96/12/21????345.5????2.2????1.5????1.0 ?96/12/22????345.2????1.6????2.0????4.0 | Damage (tired 8100 times) |
| ??m07a ??m07b ??m07c ??m07d ??m07e ??m07f ??m07g ??m07h ??m07i | ?96/12/12????352.9????0.7????1.0????2.0 ?96/12/13????352.4????0.6????1.0????1.0 ?96/12/14????351.8????0.4????1.0????1.0 ?96/12/16????349.8????0.4????1.0????1.0 ?96/12/17????351.1????0.3????1.0????1.0 ?96/12/18????352.0????0.1????1.0????0.0 ?96/12/20????352.3????0.3????1.0????0.0 ?96/12/21????352.0????0.2????1.5????1.0 ?96/12/22????351.3????0.3????1.0????0.0 | |
Continuous table 1
| ??m08a ??m08b ??m08c ??m08d
*m08e ??m08f ??m08g ??m08h ??m08i
| ?96/12/12????347.7????0.5????1.5????2.8 ?96/12/13????347.7????0.4????0.5????1.0 ?96/12/14????347.4????0.8????0.5????1.0 ?96/12/16????345.4????1.0????0.5????1.0 ?96/12/17????353.3????2.1????0.5????2.0 ?96/12/18????353.5????1.6????2.0????2.0 ?96/12/20????354.7????2.4????1.5????1.0 ?96/12/21????354.1????3.4????3.5????8.0 ?96/12/22????354.5????5.5????4.0????2.4 | Damage (tired 4860 times) |
| ??m09a ??m09b ??m09c ??m09d
*m09e ??m09f ??m09g ??m09h ??m09i
| ?96/12/12????358.5????0.9????1.0????2.0 ?96/12/13????356.9????1.4????0.0????1.0 ?96/12/14????356.6????1.3????0.5????1.0 ?96/12/16????354.6????1.5????0.5????1.0 ?96/12/17????358.4????2.6????0.5????1.0 ?96/12/18????359.1????3.1????0.5????2.0 ?96/12/20????360.2????2.5????2.0????5.0 ?96/12/21????362.8????3.8????2.0????1.0 ?96/12/22????363.1????2.5????2.5????1.0 | Damage (tired 4860 times) |
| ??m10a ??m10b ??m10c ??m10d ??m10e
*m10f ??m10g ??m10h ??m10i
| ?96/12/12????353.0????0.9????1.5????4.0 ?96/12/13????352.2????0.6????1.5????1.0 ?96/12/14????349.9????1.3????3.0????1.0 ?96/12/16????348.6????1.1????2.0????0.0 ?96/12/17????350.3????0.9????2.0????1.0 ?96/12/18????353.8????3.2????2.0????2.0 ?96/12/20????354.9????2.1????3.0????1.0 ?96/12/21????355.1????2.0????3.5????2.0 ?96/12/22????356.7????3.6????6.0????2.8 | Damage (tired 6480 times) |
| ??m11a ??m11b ??m11c ??m11d ??m11e ??m11f ??m11g ??m11h ??m11i | ?96/12/12????348.6????1.8????1.0????2.0 ?96/12/13????348.9????0.9????1.0????1.0 ?96/12/14????349.5????2.0????2.0????2.0 ?96/12/16????347.3????1.0????1.0????1.0 ?96/12/17????348.8????0.9????2.0????1.0 ?96/12/18????350.2????0.4????1.0????0.0 ?96/12/20????350.2????0.7????1.0????1.0 ?96/12/21????349.5????0.9????0.5????1.0 ?96/12/22????349.2????1.2????1.5????4.0 | |
Continuous table 1
| ??m12a ??m12b ??m12c ??m12d ??m12e ??m12f ??m12g ??m12h ??m12i | ?96/12/12????347.8????0.8????1.5????2.0 ?96/12/13????348.5????0.8????1.0????2.8 ?96/12/14????348.1????0.6????0.5????2.0 ?96/12/16????345.8????0.4????1.0????1.0 ?96/12/17????346.9????0.5????0.2????1.0 ?96/12/18????347.2????0.3????1.0????1.0 ?96/12/20????347.4????1.1????0.5????1.0 ?96/12/21????346.1????0.9????0.5????2.0 ?96/12/22????346.5????0.1????0.5????1.0 | |
| ??m13a ??m13b ??m13c ??m13d ??m13e ??m13f
*m13g ??m13h ??m13i
| ?96/12/12????354.1????0.8????1.5????1.0 ?96/12/13????353.9????1.0????2.5????1.0 ?96/12/14????353.4????0.5????2.0????0.0 ?96/12/16????351.3????1.0????2.0????0.0 ?96/12/17????353.6????0.6????1.5????2.0 ?96/12/18????354.8????0.9????2.0????1.0 ?96/12/20????356.7????0.6????1.5????1.0 ?96/12/21????357.3????1.0????1.0????1.0 ?96/12/22????357.1????1.8????1.0????3.0 | Damage (tired 8100 times) |
Table 2
| Numbering No | Date sensitivity linearity degree repeated Date Sf X (Hz) Z (Hz) C (H that lags behind
2)
| Remarks |
| ????n01 ????n01a ????n01b ????n01c ????n01d ????n01e ????n01f ????n01g ????n01h ????n01i | 96/12/06????354.4???????1.5??????2.0??????2.0 96/12/08????327.7???????1.2??????1.0??????2.0 96/12/12????327.8???????1.4??????1.5??????2.0 96/12/14????327.6???????0.4??????0.0??????0.0 96/12/16????326.6???????0.4??????0.0??????0.0 96/12/17????327.2???????0.5??????0.5??????1.0 96/12/19????326.9???????0.2??????0.5??????1.0 96/12/20????327.6???????0.5??????0.5??????1.0 96/12/24????326.9???????0.9??????0.5??????1.0 96/12/25????327.7???????0.3??????1.0??????1.0 | |
| ????n02 ????n02a ????n02b ????n02c ????n02d ????n02e ????n02f ????n02g ????n02h ????n02i | 96/12/06????347.7???????0.9??????1.5??????1.0 96/12/08????333.4???????1.1??????1.0??????1.0 96/12/12????333.6???????0.7??????0.5??????1.0 96/12/14????333.2???????1.0??????0.5??????1.0 96/12/16????331.7???????0.7??????0.5??????1.0 96/12/17????332.5???????0.5??????0.5??????1.0 96/12/19????332.5???????0.8??????1.0??????1.0 96/12/20????333.1???????0.2??????0.5??????1.0 96/12/24????332.6???????0.9??????0.5??????1.0 96/12/25????333.4???????0.4??????0.5??????1.0 | |
| ????n03 ????n03a ????n03b ????n03c ????n03d ????n03e ????n03f ????n03g ????n03h ????n03i | 96/12/06????352.2???????1.5??????3.0??????2.0 96/12/08????343.6???????1.1??????2.5??????1.0 96/12/12????343.8???????0.5??????1.0??????1.0 96/12/14????343.5???????0.2??????1.0??????1.0 96/12/16????342.0???????0.0??????0.0??????0.0 96/12/17????342.8???????0.3??????0.5??????1.0 96/12/19????343.1???????0.6??????0.5??????1.0 96/12/20????344.4???????0.6??????1.0??????1.0 96/12/24????343.0???????0.4??????0.5??????1.0 96/12/25????343.4???????0.2??????0.0??????0.0 | |
Continuous table 2
| ????n04 ????n04a ????n04b ????n04c ????n04d ????n04e ????n04f ????n04g ????n04h ????n04i | ?96/12/06????351.6??????2.4??????4.5?????4.0 ?96/12/08????329.7??????0.9??????1.5?????1.0 ?96/12/12????329.8??????0.2??????0.5?????1.0 ?96/12/14????329.4??????0.4??????1.0?????0.0 ?96/12/16????328.0??????0.0??????0.0?????0.0 ?96/12/17????328.7??????1.2??????0.0?????1.0 ?96/12/19????329.2??????0.3??????0.5?????1.0 ?96/12/20????330.4??????1.0??????1.5?????2.0 ?96/12/24????329.4??????0.3??????0.5?????1.0 ?96/12/25????329.6??????0.3??????0.5?????1.0 | |
| ????n05 ????n05a ????n05b ????n05c ????n05d ????n05e ????n05f ????n05g ????n05h ????n05i | ?96/12/06????352.0??????1.4??????3.5?????3.0 ?96/12/08????341.5??????0.9??????2.0?????2.0 ?96/12/12????341.2??????0.4??????1.0?????0.0 ?96/12/14????341.2??????0.5??????1.5?????1.0 ?96/12/16????339.6??????0.3??????1.0?????1.0 ?96/12/17????340.3??????0.6??????1.0?????1.0 ?96/12/19????341.8??????0.5??????1.0?????1.0 ?96/12/20????341.9??????0.5??????1.5?????1.0 ?96/12/24????340.5??????0.6??????1.0?????1.0 ?96/12/25????340.8??????0.3??????1.0?????1.0 | |
| ????n06 ????n06a ????n06b ????n06c ????n06d ????n06e ????n06f ????n06g ????n06h ????n06i | ?96/12/06????347.1??????1.4??????3.5?????3.0 ?96/12/08????340.9??????0.9??????2.0?????2.0 ?96/12/12????340.7??????0.4??????1.0?????0.0 ?96/12/14????341.0??????0.5??????1.5?????1.0 ?96/12/16????339.0??????0.3??????1.0?????1.0 ?96/12/17????339.9??????0.6??????1.0?????1.0 ?96/12/19????340.3??????0.5??????1.0?????1.0 ?96/12/20????341.9??????0.5??????1.5?????1.0 ?96/12/24????340.2??????0.6??????1.0?????1.0 ?96/12/25 | |
| ????n07 ????n07a ????n07b ????n07c ????n07d ????n07e ????n07f ????n07g ????n07h ????n07i | ?96/12/06????343.5??????1.1??????1.5?????2.0 ?96/12/08????333.1??????0.9??????1.0?????1.0 ?96/12/12????333.2??????0.3??????0.0?????0.0 ?96/12/14????333.4??????0.4??????0.5?????1.0 ?96/12/16????331.6??????0.4??????0.0?????0.0 ?96/12/17????332.8??????0.2??????0.0?????1.0 ?96/12/19????333.1??????0.5??????0.5?????1.0 ?96/12/20????332.9??????0.7??????0.5?????1.0 ?96/12/24????332.8??????0.8??????0.5?????1.0 ?96/12/25????332.3??????0.2??????0.5?????1.0 | |
Continuous table 2
| ????n08 ????n08a ????n08b ????n08c ????n08d ????n08e ????n08f ????n08g ????n08h ????n08i | ?96/12/06????349.4??????2.3??????4.5??????2.8 ?96/12/08????339.1??????1.2??????2.0??????0.0 ?96/12/12????338.8??????1.9??????1.0??????0.0 ?96/12/14????338.9??????0.6??????1.0??????1.0 ?96/12/16????337.1??????0.7??????1.0??????1.0 ?96/12/17????337.9??????1.1??????1.0??????0.0 ?96/12/19????338.7??????0.8??????1.0??????1.0 ?96/12/20????338.5??????0.4??????1.0??????1.0 ?96/12/24????337.9??????0.8??????2.0??????1.0 ?96/12/25????337.6??????1.1??????1.5??????1.0 | |
| ????n09 ????n09a ????n09b ????n09c ????n09d ????n09e ????n09f ????n09g ????n09h ????n09i | ?96/12/06????345.8??????2.1??????2.5??????1.0 ?96/12/08????320.9??????1.3??????1.0??????1.0 ?96/12/12????321.1??????0.9??????0.5??????1.0 ?96/12/14????321.0??????1.2??????0.2??????1.0 ?96/12/16????319.0??????0.5??????0.5??????1.0 ?96/12/17????319.7??????1.5??????1.0??????1.0 ?96/12/19????320.4??????1.3??????0.0??????0.0 ?96/12/20????320.2??????1.8??????1.0??????1.0 ?96/12/24????320.0??????1.1??????0.5??????1.0 ?96/12/25????319.6??????0.7??????0.5??????1.0 | |
| ????n10 ????n10a ????n10b ????n10c ????n10d ????n10e ????n10f ????n10g ????n10h ????n10i | ?96/12/06????338.2??????0.9??????1.5??????2.0 ?96/12/08????320.6??????0.6??????1.0??????1.0 ?96/12/12????321.2??????0.6??????1.0??????1.0 ?96/12/14????320.8??????0.7??????1.0??????1.0 ?96/12/16????319.4??????0.2??????0.2??????1.0 ?96/12/17????319.3??????0.1??????1.0??????1.0 ?96/12/19????320.2??????0.2??????0.5??????1.0 ?96/12/20????320.3??????0.2??????0.0??????1.0 ?96/12/24????320.4??????0.5??????0.5??????1.0 ?96/12/25????319.1??????0.3??????0.5??????1.0 | |
| ????n11 ????n11a ????n11b ????n11c ????n11d ????n11e ????n11f ????n11g ????n11h ????n11i | ?96/12/06????349.4??????0.9??????1.0??????2.0 ?96/12/08????321.9??????1.1??????1.0??????0.0 ?96/12/12????321.1??????0.9??????0.5??????1.0 ?96/12/14????322.1??????0.8??????0.5??????1.0 ?96/12/16????320.4??????1.0??????0.5??????1.0 ?96/12/17????320.8??????0.8??????0.5??????1.0 ?96/12/19????321.6??????0.6??????0.5??????1.0 ?96/12/20????321.4??????0.9??????1.0??????1.0 ?96/12/24????321.3??????1.0??????0.5??????1.0 ?96/12/25????321.0??????1.2??????2.0??????1.0 | |
Continuous table 2
| ????n12 ????n12a ????n12b ????n12c ????n12d ????n12e ????n12f ????n12g ????n12h ????n12i | ?96/12/06????351.9??????2.0??????3.5??????2.0 ?96/12/08????328.4??????1.1??????2.0??????2.0 ?96/12/12????328.8??????2.3??????1.5??????1.0 ?96/12/14????328.2??????0.6??????1.5??????1.0 ?96/12/16????326.5??????1.3??????1.0??????1.0 ?96/12/17????326.8??????0.9??????0.5??????1.0 ?96/12/19????327.6??????0.5??????0.5??????1.0 ?96/12/20????327.4??????0.5??????0.5??????2.8 ?96/12/24????327.5??????0.8??????0.5??????1.0 ?96/12/25????326.2??????0.5??????1.0??????1.0 | |
| ????n13 ????n13a ????n13b ????n13c ????n13d ????n13e ????n13f ????n13g ????n13h ????n13i | ?96/12/06????343.4??????1.9??????0.5??????1.0 ?96/12/08????330.6??????2.3??????0.0??????1.0 ?96/12/12????331.1??????2.4??????0.0??????1.0 ?96/12/14????331.9??????2.1??????0.0??????0.0 ?96/12/16????329.3??????2.5??????0.5??????1.0 ?96/12/17????330.5??????2.2??????1.0??????0.0 ?96/12/19????331.4??????2.4??????0.5??????1.0 ?96/12/20????331.5??????2.4??????0.5??????1.0 ?96/12/24????331.7??????2.1??????0.0??????0.0 ?96/12/25????330.9??????2.3??????0.5??????1.0 | |
Table 3
