CN105092136B - underground quartz resonance pressure sensor - Google Patents

underground quartz resonance pressure sensor Download PDF

Info

Publication number
CN105092136B
CN105092136B CN201510240230.XA CN201510240230A CN105092136B CN 105092136 B CN105092136 B CN 105092136B CN 201510240230 A CN201510240230 A CN 201510240230A CN 105092136 B CN105092136 B CN 105092136B
Authority
CN
China
Prior art keywords
quartz
housing
crystal resonator
underground
support
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201510240230.XA
Other languages
Chinese (zh)
Other versions
CN105092136A (en
Inventor
陈敏
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yichun University
Original Assignee
Yichun University
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yichun University filed Critical Yichun University
Priority to CN201510240230.XA priority Critical patent/CN105092136B/en
Publication of CN105092136A publication Critical patent/CN105092136A/en
Application granted granted Critical
Publication of CN105092136B publication Critical patent/CN105092136B/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Landscapes

  • Measuring Fluid Pressure (AREA)

Abstract

A kind of underground quartz resonance pressure sensor, it includes the housing of tubular, the quartz-crystal resonator and support of setting in the housing, and quartz-crystal resonator is embedded in support, and support is fixedly mounted in the housing;One end centre of housing is preset with screw perforation, sealedly a micrometer adjusting screw is inserted with screw perforation, the other end of housing offers pressure detecting window, sealedly it is provided with pressure detecting window on elastic metallic diaphragm, elastic metallic diaphragm and corresponds to the centre of side in housing provided with a projection;Quartz-crystal resonator is welded with the electrode leads to client for sealedly passing through housing for a pair on quartz-crystal resonator with fifth overtone thickness-shear vibration mode formula to be in opening circular ring plate shape 4.992MHz quartz-crystal resonators;Micrometer adjusting screw is respectively inserted in support with mutual corresponding one end on projection, the quick point of power of quartz-crystal resonator respectively with mutual corresponding end contact on micrometer adjusting screw and projection.

Description

Underground quartz resonance pressure sensor
Technical field
The present invention relates to art of pressure sensors, particularly relate to a kind of for oil well pressure measurement in field of petroleum exploitation Underground quartz resonance pressure sensor.
Background technology
Pressure sensor is the most commonly used a kind of sensor in industrial practice, and it is widely used in various industrial automatic control rings Border, be related to water conservancy and hydropower, railway traffic, intelligent building, production automatic control, Aero-Space, military project, petrochemical industry, oil well, electric power, ship, Numerous industries such as lathe, pipeline.The species of pressure sensor is various and application field is extremely wide, but it is possible to be pushed for oil well The sensor of power measurement cans be counted on one's fingers.Because the pressure of oil well is big, temperature is high, well liquid corrodes serious, work condition environment is severe, to surveying The requirement of pressure sensor is more harsh.Generally, domestic is generally strain pressure transducer, and external has condenser type and quartz resonance Formula etc. is several.It is easy to use and be widely adopted for strain-type, capacitance pressure transducer, because its is cheap, but it is deposited In factors such as creep, delayed, temperature drift and circuit complexity, make its measurement accuracy general 0.1% or so, it is impossible to meet such as The requirement of the high precision measurements such as interference test, pulse test and reservoir delineation test.For this kind of high-precision oil well test, generally adopt Completed with quartz resonance pressure sensor.
Quartz resonance pressure sensor is used as force sensing element using quartz-crystal resonator.When tested parameter changes When, its eigentone changes therewith, and excitation and measuring method based on piezo-electric effect are obtained with and are tested parameter Into the frequency signal of certain relation.The resonator that this sensor is used is to use thickness-shear vibration mode formula BT cut type quartz-crystals What system was made.The monolithic construction including disc oscillator and force mechanism is made in resonator.Oscillator is in lenticular, force mechanism For around the cylindrical shape of disk.Oscillator and cylinder are formed by same quartz crystal overall processing, and oscillator respectively has a pair on both sides The coated electrode covered along barrel (extending to outer wall by inner chamber).To reduce hysteresis error, the end cap of cylinder is also used and cylinder The continuous same quartz crystal processing of lattice, to improve the quality factor of oscillator, cylinder and end cap are strictly sealed, its internal cavities It is evacuated.Quartz cylinder can effectively transmit the pressure of surrounding.When being subject to driving voltage on electrode, imitated using inverse piezoelectricity Oscillator vibration should be made, while there is alternation electric charge again on electrode, this electricity and machine are supplemented by the electrode being connected with external circuit Energy needed for tool self-sustained oscillation.When quartz vibrator is acted on by static pressure, vibration frequency changes, and with being pressurizeed Power is linear.Quartzy thickness shear modulus has played main function with the change of pressure in the process.Its major advantage It is that precision is up to more than 0.025%, and delayed and repeated small, frequency stability is splendid.But its complicated, processing Difficult, cost is also high.Because the electrode of oscillator is partially exposed in test environment, when the medium of cylinder confined pressure contain electrolyte into Timesharing, can make the output amplitude of sensor reduces, and can cause not work when serious.In order to suppress such case, generally will Sensor is protected with pressure transmission hole metal cylinder, isolates well liquid using the pure silicone oil of capillary filling, this makes to scene With bringing inconvenience.
Transformation is carried out to existing quartz resonance pressure sensor extremely difficult, to solve the above problems, it is necessory to Look for another way, design a new underground quartz resonance pressure sensor, to overcome the technological deficiency that it is present.
The content of the invention
The present invention provides a kind of underground quartz resonance pressure sensor, and its technical problem underlying to be solved is:Pass Quartz resonance pressure sensor structure complexity, processing difficulties, the cost of system are high, and the electrode of oscillator is partially exposed at test wrapper In border, when the medium of cylinder confined pressure contains electrolyte ingredient, can make the output amplitude of sensor reduces, and can cause not when serious Work;And by sensor with being protected with pressure transmission hole metal cylinder, and well liquid is isolated using the pure silicone oil of capillary filling Mode suppress sensor output amplitude reduction, can bring inconvenience to onsite application again.
In view of the shortcomings of the prior art, the present invention provides a kind of underground quartz resonance pressure sensor, and it includes tubular Housing, the quartz-crystal resonator and support that are arranged in the housing, the quartz-crystal resonator is embedded at described In support, the support is fixedly mounted in the housing;
One end centre of the housing be preset be threadedly coupled in screw perforation, the screw perforation be inserted with one Micrometer adjusting screw for adjusting pretightning force, is tightly connected between the micrometer adjusting screw and the screw perforation, the housing it is another One end offers in pressure detecting window, the pressure detecting window and is sealedly provided with elastic metallic diaphragm, the elastic metal coating The centre for corresponding to side in the housing on piece is provided with a projection;
The quartz-crystal resonator is in opening circular ring plate shape with fifth overtone thickness-shear vibration mode formula 4.992MHz quartz-crystal resonators, the cut type of the quartz-crystal resonator is on AT cut types, the quartz-crystal resonator A pair of electrodes exit is welded with, the pair of electrode leads to client sealedly passes through on the housing and opens up the screw perforation one The side wall at end;
The both sides for corresponding to the micrometer adjusting screw and projection on the support respectively offer jack, the micrometer adjusting screw with Mutual corresponding one end is respectively inserted in the support through the jack on projection, the quartz in opening circular ring plate shape The quick point of power of crystal resonator be located at cylindrical anchor ring on, and the quartz-crystal resonator the quick point of power respectively with the fine setting spiral shell Mutual corresponding end contact on nail and projection.
It is preferable over:Opened up on the housing in the side wall of described screw perforation one end and be sealedly inserted with a vacuum pipeline, Vacuum in one end sealing of the vacuum pipeline correspondence outside the housing, the housing is 6 × 10-1Pa。
It is preferable over:Axial one end projection of the correspondence quartz-crystal resonator in opening circular ring plate shape in the support There are two card keys, described two card keys support the axial one end for being stuck in the quartz-crystal resonator in opening circular ring plate shape respectively End face both sides, and it is in opening that described two card keys correspond in the radial direction of the housing, the support correspondence described respectively The axial other end of the quartz-crystal resonator of annulus sheet is provided with an annular gasket, and the quartz-crystal resonator is embedded Between described two card keys and the annular gasket.
It is preferable over:On the quartz-crystal resonator in opening circular ring plate shape respectively with the micrometer adjusting screw and projection The position of contact is provided with plane of constraint.
It is preferable over:Gold film is coated with the outer surface of the quartz-crystal resonator in opening circular ring plate shape.
It is preferable over:Counterbore is offered on the hole shoulder of the screw perforation, the ailhead of the micrometer adjusting screw sinks to the counterbore In, offered in the outer axial face of the ailhead and O-ring seal is embedded with ring-shaped insert groove, the ring-shaped insert groove, the O-shaped sealing Sealing gasket is enclosed between the outer axial face of the ailhead and the inner hole wall of the counterbore.
It is preferable over:The outward flange of the elastic metallic diaphragm is sealedly welded in the pressure detecting window of the housing, institute State the side on elastic metallic diaphragm outside the correspondence housing and offer annular ditch groove.
It is preferable over:The housing is cylindrical, and external screw thread is respectively arranged with the outer axial face at two ends on the housing Section.
Compared with prior art, the beneficial effects of the invention are as follows:
1st, the present invention uses monolithic quartz-crystal resonator and elastic metallic diaphragm for as pressure-sensing device, with entirety The quartz crystal pressure transducer of structure is compared, and its is simple in construction, cost and its cheap, frequency stabilization height, and is maintained higher Pressure measurement precision (0.05%);
2nd, using elastic metallic diaphragm as pressure-sensing device, when ambient pressure acts on elastic metallic diaphragm, it is converted into The direction centrally along power of elastic metallic diaphragm is axially moved, is applied to humorous to side displacement, elastic metallic diaphragm linkage projection Shake on the quick point of power of device, the frequency of resonator changes and changed with active force, it is tested to detect using the frequency change of resonator The size of pressure, pressure is realized to the conversion of power using elastic metallic diaphragm, while there is the effect of isolation different medium, can It is effective to have isolated erosion of the well liquid to sensor, onsite application and its conveniently;
3rd, enclosure interior is 6 × 10 in vacuum-1Pa vacuum state, and then shaking for quartz-crystal resonator can be reduced Dynamic damping, makes quartz-crystal resonator easily starting of oscillation, can effectively ensure pressure measurement precision.
Brief description of the drawings
Fig. 1 is the end view provided with micrometer adjusting screw one end of the invention.
Fig. 2 is the cross section structure diagram of the A-A along along Fig. 1.
Fig. 3 is the cross section structure diagram of the B-B along along Fig. 1.
Embodiment
Below with reference to accompanying drawing 1 to 3 and preferred embodiment to a kind of underground quartz resonance pressure proposed by the present invention Sensor is described in greater detail.
Embodiment one:
The present invention provides a kind of underground quartz resonance pressure sensor, and it includes the housing 1 of tubular, is arranged on the shell Quartz-crystal resonator 2 and support 3 in body 1, the quartz-crystal resonator 2 are embedded in the support 3, the support 3 are fixedly mounted in the housing 1;One end centre of the housing 1 is preset with spiral shell in screw perforation, the screw perforation What line was connected is inserted with a micrometer adjusting screw 11 for being used to adjust pretightning force, close between the micrometer adjusting screw 11 and the screw perforation Envelope connection, the other end of the housing 1, which is offered in pressure detecting window, the pressure detecting window, is sealedly provided with elastic metallic The centre for corresponding to side in the housing 1 on diaphragm 4, the elastic metallic diaphragm 4 is provided with a projection 41;The quartz Crystal resonator 2 is in opening circular ring plate shape 4.992MHz Quartz crystal resonants with fifth overtone thickness-shear vibration mode formula Device, the cut type of the quartz-crystal resonator 2 is the thickness-shear vibration mode formula that AT cut types, i.e. cut type are 35 ° of (YXL), described A pair of electrodes exit 21 is welded with quartz-crystal resonator 2, the pair of electrode leads to client 21 sealedly passes through the shell The side wall of described screw perforation one end is opened up on body 1;The two of the micrometer adjusting screw 11 and projection 41 is corresponded on the support 3 respectively Side offers jack, and the micrometer adjusting screw 11 respectively inserts institute with mutual corresponding one end on projection 41 through the jack State in support 3, the quick point of power of the quartz-crystal resonator 2 in opening circular ring plate shape is located on cylindrical anchor ring, and the stone The quick point of power of English crystal resonator 2 respectively with mutual corresponding end contact on the micrometer adjusting screw 11 and projection 41.
In the specific implementation, the thickness ratio fundamental crystal of overtone crystal is big, beneficial to the power that carrying is larger for the present embodiment one, And it is easy to processing, difficulty of processing is reduced, is pressure-sensing device with the elastic metallic diaphragm 4, pressure in the present invention is examined One end correspondence detection environment of window is surveyed, when detecting that the pressure in environment acts on the elastic metallic diaphragm 4, elasticity is converted into The direction centrally along power of metallic membrane 4 is to side displacement, and link the axle of projection 41 during the center displacement of elastic metallic diaphragm 4 To motion, described axial one end of projection 41 is applied on the quick point of the power of the quartz-crystal resonator 2, the Quartz crystal resonant The frequency of device 2 changes and changed with active force, changes to detect by measuring pressure using the frequency of the quartz-crystal resonator 2 Size, the pair of electrode leads to client 21 is connected by high temperature wire with outside oscillating circuit, and passes through the pair of electrode Exit 21 exports the piezo-electric effect signal of the quartz-crystal resonator 2 to oscillating circuit, using the elastic metal coating Piece 4 realizes pressure to the conversion of power, while also isolating different medium by the elastic metallic diaphragm 4, can effectively isolate The erosion of well liquid whole device 2 humorous to quartz crystal, onsite application and its conveniently;, can also be by adjusting in specific assembling process State the axial movement realization of micrometer adjusting screw 11 to be adjusted the pretightning force of the quick point of power of the quartz-crystal resonator 2, reach tune Save the working frequency under the original state of sensor.
Embodiment two:As described above, being sealedly inserted with during the side wall of described screw perforation one end is opened up on the housing 1 Vacuum in one vacuum pipeline 5, one end sealing of the vacuum pipeline 5 correspondence outside the housing 1, the housing 1 for 6 × 10-1Pa, in the specific implementation, the present invention is after assembling, one end connection outside the vacuum pipeline 5 correspondence for the present embodiment Outside vaccum-pumping equipment, the vacuum in the housing 1 is reached after 6 × 10-1Pa, the flat vacuum pipeline 5 of folder, and Distance presss from both sides outer end at flat 3~5mm and cuts off the vacuum pipeline 5, is thoroughly sealed with high temperature scolding tin in section, this structure energy Enough it is easy to vacuumize, it is simple in construction, and assembling ending is relatively easy.
Embodiment three:Further, the correspondence quartz-crystal resonator 2 in opening circular ring plate shape in the support 3 Axial one end is convexly equipped with two card keys 31, and described two card keys 31 are supported respectively is stuck in the quartz crystal in opening circular ring plate shape The end face both sides of axial one end of resonator 2, and described two card keys 31 correspond to the radial direction of the housing 1 respectively, it is this Arrangement is conducive to fine position of the quartz-crystal resonator 2 in assembling process to find accurately, correspondence institute in the support 1 State and the axial other end of the quartz-crystal resonator 2 of opening circular ring plate shape is provided with an annular gasket 32, the quartz crystal Resonator 2 is embedded between described two card keys 31 and the annular gasket 32, and the structure of this support 3 can be effectively by institute State quartz-crystal resonator 2 to be vacantly erected in the housing 1, prevent the quartz-crystal resonator 2 and other feature contacts Interference Detection.
Example IV:Further, on the quartz-crystal resonator 2 in opening circular ring plate shape respectively with the fine setting spiral shell The position that nail 11 and projection 41 are contacted is provided with plane of constraint, and then effectively raises the micrometer adjusting screw 11 and projection 41 End face and the quartz-crystal resonator 2 the quick point of power contact area and contact stabilization, further ensure that pressure measurement essence Degree.
Embodiment five:Further, vacuum is passed through on the outer surface of the quartz-crystal resonator 2 in opening circular ring plate shape The mode of plated film is coated with gold film, and surface charge is collected using gold film, lifts charge detection stability.
Embodiment six:Further, counterbore, the ailhead of the micrometer adjusting screw 11 are offered on the hole shoulder of the screw perforation 111 sink in the counterbore, offered in the outer axial face of the ailhead 111 be embedded with ring-shaped insert groove, the ring-shaped insert groove it is O-shaped Sealing ring 6, the pad of O-ring seal sealing 6 is borrowed between the outer axial face of the ailhead 111 and the inner hole wall of the counterbore This provides a kind of to the sealed mode of screw perforation progress, and this mode is simple in construction, and does not influence the micrometer adjusting screw 11 free degree.
Embodiment seven:Further, the weldering that the outward flange of the elastic metallic diaphragm 4 passes through micro beam plasma welding or Laser Welding Connect mode to be sealedly welded in the pressure detecting window of the housing 1, on the elastic metallic diaphragm 4 outside the correspondence housing 1 Side offer annular ditch groove 42, improve its elastic deformation limit, reduce elastically-deformable minimum dynamics, and then can Lift the power susceptibility of the elastic metallic diaphragm 4.
Embodiment eight:Further, the housing 1 is cylindrical, on the housing 1 in the outer axial face at two ends respectively External thread section 12 is provided with, the external thread section 12 being arranged in the two ends outer axial face of housing 1 is lodged and easy can send out this Bright underground quartz resonance pressure sensor is arranged in downhole detection environment.
In summary, technical scheme can complete foregoing invention purpose, and the knot of the present invention with sufficiently effective Structure principle and the principle of work and power have all sufficiently been verified in embodiment, and can reach expected effect and purpose, and this The embodiment of invention can also enter line translation according to these principles, therefore, and the present invention includes all institutes in claim All replacement contents in the range of mentioning.Any equivalence changes made in scope of the present invention patent, all belong to this case Shen Within the scope of the claims please.

Claims (8)

1. a kind of underground quartz resonance pressure sensor, include housing, the quartz crystal that is arranged in the housing of tubular Resonator and support, the quartz-crystal resonator are embedded in the support, and the support is fixedly mounted on the housing In;
One end centre of the housing, which is preset with being inserted with of being threadedly coupled in screw perforation, the screw perforation, one to be used for The micrometer adjusting screw of pretightning force is adjusted, is tightly connected between the micrometer adjusting screw and the screw perforation, it is characterised in that:The shell The other end of body offers in pressure detecting window, the pressure detecting window and is sealedly provided with elastic metallic diaphragm, the elasticity The centre for corresponding to side in the housing on metallic membrane is provided with a projection;
The quartz-crystal resonator is in opening circular ring plate shape 4.992MHz with fifth overtone thickness-shear vibration mode formula Quartz-crystal resonator, the cut type of the quartz-crystal resonator is to be welded with one on AT cut types, the quartz-crystal resonator To electrode leads to client, the pair of electrode leads to client sealedly passes through the side that described screw perforation one end is opened up on the housing Wall;
The both sides for corresponding to the micrometer adjusting screw and projection on the support respectively offer jack, the micrometer adjusting screw and projection Upper mutually corresponding one end is respectively inserted in the support through the jack, the quartz crystal in opening circular ring plate shape The quick point of power of resonator be located at cylindrical anchor ring on, and the quartz-crystal resonator the quick point of power respectively with the micrometer adjusting screw with And mutual corresponding end contact on projection.
2. a kind of underground quartz resonance pressure sensor according to claim 1, it is characterised in that:On the housing Open up and a vacuum pipeline is sealedly inserted with the side wall of described screw perforation one end, the vacuum pipeline correspondence is in the housing Vacuum in outer one end sealing, the housing is 6 × 10-1 Pa.
3. a kind of underground quartz resonance pressure sensor according to claim 2, it is characterised in that:In the support Axial one end of the correspondence quartz-crystal resonator in opening circular ring plate shape is convexly equipped with two card keys, described two card keys point The end face both sides of axial one end of the quartz-crystal resonator in opening circular ring plate shape, and described two card keys Di be stuck in
The correspondence Quartz crystal resonant in opening circular ring plate shape in the radial direction of the housing, the support is corresponded to respectively The axial other end of device is provided with an annular gasket, and the quartz-crystal resonator is embedded in described two card keys and the annular Between pad.
4. a kind of underground quartz resonance pressure sensor according to claim 3, it is characterised in that:Described is in opening The position contacted respectively with the micrometer adjusting screw and projection on the quartz-crystal resonator of annulus sheet is provided with plane of constraint.
5. a kind of underground quartz resonance pressure sensor according to claim 4, it is characterised in that:Described is in opening
Gold film is coated with the outer surface of the quartz-crystal resonator of annulus sheet.
6. a kind of underground quartz resonance pressure sensor according to claim 5, it is characterised in that:The screw is worn Counterbore is offered on the hole shoulder in hole, the ailhead of the micrometer adjusting screw sinks in the counterbore, opened up in the outer axial face of the ailhead Have and O-ring seal is embedded with ring-shaped insert groove, the ring-shaped insert groove, the O-ring seal sealing gasket is located at the outer of the ailhead Between the inner hole wall of axial plane and the counterbore.
7. a kind of underground quartz resonance pressure sensor according to claim 6, it is characterised in that:The elasticity gold The outward flange of category diaphragm is sealedly welded in the pressure detecting window of the housing, the correspondence shell on the elastic metallic diaphragm External side offers annular ditch groove.
8. a kind of underground quartz resonance pressure sensor according to claim 7, it is characterised in that:The housing is in On cylindrical shape, the housing external thread section is respectively arranged with the outer axial face at two ends.
CN201510240230.XA 2015-05-13 2015-05-13 underground quartz resonance pressure sensor Expired - Fee Related CN105092136B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201510240230.XA CN105092136B (en) 2015-05-13 2015-05-13 underground quartz resonance pressure sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201510240230.XA CN105092136B (en) 2015-05-13 2015-05-13 underground quartz resonance pressure sensor

Publications (2)

Publication Number Publication Date
CN105092136A CN105092136A (en) 2015-11-25
CN105092136B true CN105092136B (en) 2017-11-03

Family

ID=54573068

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201510240230.XA Expired - Fee Related CN105092136B (en) 2015-05-13 2015-05-13 underground quartz resonance pressure sensor

Country Status (1)

Country Link
CN (1) CN105092136B (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107588884A (en) * 2017-08-08 2018-01-16 中国石油天然气集团公司 One kind is with brill down-hole pressure measuring circuit and pressure measurement method

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1175685A (en) * 1997-09-19 1998-03-11 清华大学 High-stability quartz resonance type force sensor
CN1900724A (en) * 2006-07-06 2007-01-24 重庆大学 Differential piesoelectric two dimension acceleration sensor
CN103133530A (en) * 2011-11-30 2013-06-05 上海宇航系统工程研究所 Adjustable pressing force pressing sliding mechanism and adjustment method of adjustable pressing force pressing sliding mechanism
CN103149002A (en) * 2013-02-05 2013-06-12 山东大学 Testing device and method of normal dynamic characteristic parameter of combination face

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07174651A (en) * 1993-12-17 1995-07-14 Mitsubishi Electric Corp Pressure sensor
CN1082183C (en) * 1998-07-17 2002-04-03 清华大学 Quartz resonance force/weighing sensor
US7302855B2 (en) * 2004-10-28 2007-12-04 Denso Corporation Pressure detection device
CN2748889Y (en) * 2004-11-23 2005-12-28 王武立 Quartz resonance pressure sensor
CN100587429C (en) * 2008-11-26 2010-02-03 大连理工大学 Multi-point partial pre-fastening method with adjustable load sharing mechanism
CN101961702B (en) * 2010-09-07 2012-02-15 天津理工大学 Spin coating device used for quartz crystal

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1175685A (en) * 1997-09-19 1998-03-11 清华大学 High-stability quartz resonance type force sensor
CN1900724A (en) * 2006-07-06 2007-01-24 重庆大学 Differential piesoelectric two dimension acceleration sensor
CN103133530A (en) * 2011-11-30 2013-06-05 上海宇航系统工程研究所 Adjustable pressing force pressing sliding mechanism and adjustment method of adjustable pressing force pressing sliding mechanism
CN103149002A (en) * 2013-02-05 2013-06-12 山东大学 Testing device and method of normal dynamic characteristic parameter of combination face

Also Published As

Publication number Publication date
CN105092136A (en) 2015-11-25

Similar Documents

Publication Publication Date Title
US7779700B2 (en) Pressure sensor
CA1194708A (en) Piezoelectric pressure and/or temperature transducer
KR101196090B1 (en) Diaphram for pressure sensor and pressure sensor
CN107478862B (en) Quartz vibrating beam accelerometer sensitive chip based on gold bonding
US7954383B2 (en) Method and apparatus for pressure measurement using fill tube
CN103674353B (en) Concrete stress sensor by piezoelectric properties of PVDF (polyvinylidene fluoride) film
JPH0367210B2 (en)
CN109489843B (en) High-sensitivity sensor and preparation method thereof
US20120096945A1 (en) Pressure sensor
CN112816109B (en) Radio frequency pressure sensor
JP2008232886A (en) Pressure sensor
CN110501098A (en) A kind of highly sensitive micro-pressure sensor based on double pressure membranes and weak coupling resonator system
EP1672345B1 (en) System and method for sensing pressure
CN103454345B (en) Based on the marine biochemical matter monitoring sensor of CMUT and preparation thereof and measuring method
CN109883581B (en) Cantilever beam type differential resonance pressure sensor chip
CN105092136B (en) underground quartz resonance pressure sensor
CN105897217A (en) Quartz crystal resonator, intelligent pressure transducer and sensing and measuring method therefor
CN101419243A (en) Isotropy equilibrium acceleration sensor
CN107941391B (en) Wireless passive temperature compensation method for film body acoustic wave pressure sensor
CN206132989U (en) Device is listened to differential hydrophone and differential water
JP5712674B2 (en) Force detector housing case, force measuring device
CN103217228A (en) Temperature sensor based on capacitive micromachined ultrasonic transducer (CMUT) and preparation and application method of temperature sensor
CN114544064B (en) Resonant graphene gas pressure sensor
Paros Precision Digital Pressure
CN108761128A (en) Piezoelectric vibration encourages self diagnosis mems accelerometer watch core and accelerometer

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20171103

Termination date: 20190513

CF01 Termination of patent right due to non-payment of annual fee