CN117553702A - Generalized aspheric surface non-zero position interference detection device and method with adjustable compensation range - Google Patents
Generalized aspheric surface non-zero position interference detection device and method with adjustable compensation range Download PDFInfo
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
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- G01B11/255—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures for measuring radius of curvature
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Abstract
The invention discloses a universal aspheric surface non-zero position interference detection device and method with an adjustable compensation range, wherein a designed compensator is a spherical lens, and the device is low in cost and simple to process; the compensation range of the compensator can be changed by changing the distance between the two lenses in the adjustable compensator, so that the detection method has more flexible detection modes and wider application fields; the incident light is parallel light, one surface of a lens in the adjustable compensator is a plane, and the alignment and design of a detection light path are simple; compared with other spherical compensators, the compensation range is larger; the system error calibration method matched with the method has higher detection precision.
Description
Technical Field
The invention belongs to the technical field of optical measurement, and particularly relates to a universal aspheric surface non-zero position interference detection device and method with an adjustable compensation range.
Background
The normal aberration of an aspherical surface is the offset of the curvature center of each point on the aspherical surface relative to the comparative spherical surface, and is caused by the deviation of the aspherical surface from the spherical surface shape. The existence of normal aberration can lead the light ray incident on the aspheric surface not to return according to the original path, and the normal aberration can not be ignored in general, so that the interference detection can be directly carried out on the aspheric surface, and a compensator is required to be designed to compensate the normal aberration. According to the difference of the compensation degree of the compensator to the normal aberration, the interference compensation detection of the aspheric surface can be divided into a zero position method and a non-zero position method.
The zero position method can completely compensate the normal aberration of the aspheric surface, can generate an incident wavefront consistent with the surface shape of the aspheric surface to be detected, and when the aspheric surface has no surface shape defect and the system is ideally assembled and adjusted, the light energy incident on the aspheric surface is reflected back according to the original path, and no interference fringes are generated at the detection surface of the interferometer. Common zero compensators are Hindle sphere, dall compensator, offner compensator, computer-generated hologram plate, etc. The zero method has the advantages of high detection precision and good repeatability, but the zero compensator used by the zero method has high design, processing and adjustment requirements, and special compensators are required to be designed aiming at different aspheric surfaces to be detected, so that the zero method has no universality and high detection cost.
The non-zero algorithm is to partially compensate normal aberration, so that the corresponding interference fringes can be analyzed by CCD, and then the return error correction algorithm is adopted to calculate the surface shape defect of the aspheric surface. Compared with the zero position method, the non-zero position method has the advantages of low implementation difficulty, the adopted non-zero compensator can detect the aspheric surface within a certain parameter range, has certain universality and reduces the detection cost of the aspheric surface to a certain extent.
The common return error correction algorithm comprises a zero-bit approximate double relation method, a theoretical reference wave surface method and a reverse iterative optimization algorithm, wherein the reverse iterative optimization algorithm can theoretically correct return errors of all aspheric surfaces, has high detection precision and is the most widely applied return error correction algorithm.
Whereas the compensator commonly used in the non-zero method is a partially compensating mirror. In 1973, faulde proposed a method of partially compensating lenses that combined a partially compensating lens with a hologram to achieve zero-position inspection of large asphericity aspheres. The Hao Qun subject group of Beijing university discusses and designs partial compensation lenses in 2004 based on aberration constraints, and concludes that the maximum slope of the compensated wave aberration should be 0.23 lambda/pixel. The Yang Yongying subject group of Zhejiang university combines a part of compensation mirror with a four-wave shearing interference technology in 2020, so that the detection range of the aspheric surface is improved, the requirement of a detection system on environmental stability is reduced, the detection system is more suitable for workshop operation, the detection range is still limited, and when parameters of the aspheric surface to be detected, such as conic constant, vertex circle curvature radius, relative caliber and the like, are large in difference, the part of compensation mirror still needs to be replaced for detection.
In 2018, chen Shanyong subject group of national defense science and technology university proposed a variable spherical aberration compensation method for non-zero detection of aspherical surfaces. The method designs a variable spherical aberration compensator based on the Seidel aberration theory, achieves the purpose of spherical aberration change by changing the axial distance from the compensator to the point light source, and then corrects the return error by using a reverse iterative optimization algorithm. The method not only expands the detection range of the non-zero compensation detection method, but also keeps higher detection precision and has a larger application prospect. However, the modeling accuracy of the detection system is high, and the method adopts an aspheric lens as a compensator, so that the processing and manufacturing difficulties are high.
The existing interference compensation and detection aspheric compensator has the defects of high cost, limited measuring range, high design difficulty and the like.
Disclosure of Invention
In view of the above, the invention aims to provide a generalized aspheric surface non-zero interference detection device and method with an adjustable compensation range, which not only greatly improves the detection range of the aspheric surface, but also reduces the detection cost, and has stronger applicability, and can be widely used in workshop detection of the aspheric surface.
The universal aspheric surface non-zero position interference detection device with the adjustable compensation range comprises an interferometer (1), an adjustable compensator (2) and an aspheric surface (3) to be detected; the parallel light emitted by the interferometer (1) is incident into the adjustable compensator (2), then reaches the aspheric surface (3) to be detected after passing through the adjustable compensator (2), the aspheric surface (3) to be detected is subjected to light reflection, the reflected light enters the interferometer (1) after passing through the adjustable compensator (2), and an interference pattern is formed in the interferometer (1) by interference, so that the surface shape defect of the aspheric surface (3) to be detected is detected; the adjustable compensator (2) consists of two lenses, wherein the lens far away from the aspheric surface (3) to be measured is called a fixed lens (21), the lens close to the aspheric surface (3) is a movable lens (22), and the distance between the two lenses is changed by moving the movable lens (22), so that the compensation range of the adjustable compensator (2) is adjusted.
Preferably, the movable mirror (22) of the adjustable compensator (2) can move according to the parameters of the aspheric surface (3) to be measured.
Preferably, the moving mode of the movable mirror (22) includes a continuous moving mode and a multi-shift moving mode.
The universal aspheric surface non-zero position interference detection method with the adjustable compensation range comprises the following steps:
step 1, optimally designing the universal aspheric surface non-zero position interference detection device with the adjustable compensation range by adopting optical software, and specifically comprising the following steps:
step 11, setting the convex curvature radius of the fixed mirror 21 as r 1 The radius of curvature of the convex surface of the movable mirror 22 is r 2 The optimization variable in the optical design software is selected as the distance l from the movable mirror (22) to the aspheric surface (3) to be detected, and the optimization target is to minimize the residual aberration Root Mean Square (RMS) so as to enable r to be 2 And r 1 Is equal in value and then r 1 Is varied within a set range and is continuously optimized when the maximum slope of the interference wavefront is lower than the set maximum value ρ max And the relative caliber A of the target aspheric surface is larger than the set minimum value A min Stopping the change to obtain the r of the preliminary design 1 And r 2 ；
Step 12, let r 1 The value is unchanged, r 2 The value of (2) is reduced from the value obtained by the preliminary design, and then the distance l from the movable mirror (22) to the aspheric surface (3) to be measured is taken as an optimization variable, the root mean square RMS of the minimized residual aberration is taken as an optimization target to optimize the system, and the optimal design r under the limit condition that the corresponding interferogram can be analyzed is selected 1 And r 2 Is a value of (2);
step 2, according to the design result of the adjustable compensator (2), combining optical design software to perform simulation calculation on the detection range of the adjustable compensator (2) to obtain the range of the measurable aspheric surface (3) of the compensator under the distance s between different fixed mirrors (21) and moving mirrors (22), namely the value of k R and the relative caliber A of the aspheric surface (3), thereby obtaining a corresponding measurable range diagram;
step 3, optimally designing a detection light path, wherein the method comprises the following specific steps:
step 31, in the measurable range diagram, finding the corresponding abscissa s1 on the maximum kR change curve according to the parameter k×R of the aspheric surface to be measured; if k×r is lower than the minimum value of the curve, s1 is the small value smin; if above the maximum of the curve, it is not measurable;
step 32, finding the corresponding maximum measurable relative caliber Amax in the range from s1 to smax, and if the relative caliber A of the aspheric surface to be measured is higher than Amax, the relative caliber A is not measurable; if A is lower than Amax, measuring, and finding out an abscissa s2 corresponding to A according to a change curve of the maximum relative caliber; if A is smaller than the minimum value of the maximum relative caliber change curve, s2 is the maximum value smax;
step 33, the distance between the movable mirror and the fixed mirror is s2, the distance l between the movable mirror and the aspheric surface to be measured is set as an optimization variable, the system is optimized in optical design software, and the distance between the movable mirror and the aspheric surface after optimization is l2;
and 4, constructing a system according to the s2 and the l2 obtained in the step, and detecting the aspheric surface to be detected to obtain the surface defect information.
Further, the error calibration method for the detection device comprises the following steps:
step 51, replacing the aspherical surface of the detection light path model with a spherical calibration mirror in optical design software, so that the distance between the fixed mirror (21) and the movable mirror (22) is the minimum distance s between the fixed mirror and the movable mirror min ；
Step 52, the distance l from the movable mirror (22) to the calibration mirror is set as a variable, the root mean square RMS of the residual aberration is used as an optimization target, the curvature radius R of the spherical calibration mirror is changed within a set range, the system is continuously optimized, and when the maximum gradient of the interference wavefront is lower than a set value, the change is stopped, and the curvature radius R at the moment is a final design value;
step 53, after finishing the design of the spherical calibration mirror, carrying out precise machining on the spherical calibration mirror, obtaining surface shape parameters, and then carrying out precise modeling on the surface shape parameters in optical design software to construct a system error calibration model; when the distance between the fixed mirror (21) and the movable mirror (22) is s 2 When the system error calibration model is used, the corresponding distance between the two calibration models is setPut into s 2 Then, the distance p from the movable mirror (22) to the calibration mirror is set as an optimization variable, the root mean square RMS of the residual aberration is used as an optimization target, and the optimization distance p is output after the system is optimized;
in an actual system error calibration light path, the distance between the fixed mirror (21) and the movable mirror (22) and the distance between the movable mirror (22) and the calibration mirror are divided into s 2 And p, obtaining a wavefront detection result W with systematic errors real The method comprises the steps of carrying out a first treatment on the surface of the Simulating the systematic error calibration model in optical design software to obtain a wavefront detection result W without systematic error model ；
The systematic error aw is:
ΔW＝W real -W model
step 54, when the detection device is used to obtain the wavefront information W of the aspheric surface to be detected es Then, the system error delta W is eliminated to obtain the real surface shape defect W s The method comprises the following steps:
W s ＝W es -ΔW。
the universal aspheric surface non-zero position interference detection method with the adjustable compensation range comprises the following steps:
step 1, optimally designing the universal aspheric surface non-zero position interference detection device with the adjustable compensation range by adopting optical software, and specifically comprising the following steps:
step 11, setting the convex curvature radius of the fixed mirror 21 as r 1 The radius of curvature of the convex surface of the movable mirror 22 is r 2 The optimization variable in the optical design software is selected as the distance l from the movable mirror (22) to the aspheric surface (3) to be detected, and the optimization target is to minimize the residual aberration Root Mean Square (RMS) so as to enable r to be 2 And r 1 Is equal in value and then r 1 Is varied within a set range and is continuously optimized when the maximum slope of the interference wavefront is lower than the set maximum value ρ max And the relative caliber A of the target aspheric surface is larger than the set minimum value A min Stopping the change to obtain the r of the preliminary design 1 And r 2 ；
Step 12, let r 1 The value is unchanged, r 2 The value of (2) is reduced from the value obtained by the preliminary design, and then the distance l from the movable mirror (22) to the aspheric surface (3) to be measured is taken as an optimization variableThe method comprises the steps of (1) taking the minimum residual aberration Root Mean Square (RMS) as an optimization target optimization system, and selecting an optimal design r under the limit condition that a corresponding interference pattern can be analyzed 1 And r 2 Is a value of (2);
step 2, according to the design result of the adjustable compensator (2), combining optical design software to perform simulation calculation on the detection range of the adjustable compensator (2) to obtain the range of the measurable aspheric surface (3) of the compensator under the distance s between different fixed mirrors (21) and moving mirrors (22), namely the value of k R and the relative caliber A of the aspheric surface (3), thereby obtaining a corresponding measurable range diagram;
step 3, optimally designing a detection light path, wherein the method comprises the following specific steps:
step 31, in the measurable range diagram, finding the corresponding abscissa s1 on the maximum kR change curve according to the parameter k×R of the aspheric surface to be measured; if k R is below the minimum of the curve, s1 should be smin; if above the maximum of the curve, it is not measurable;
step 32, finding the corresponding maximum measurable relative caliber Amax in the range from s1 to smax, and if the relative caliber A of the aspheric surface to be measured is higher than Amax, the relative caliber A is not measurable; if A is lower than Amax, measuring, and finding out an abscissa s2 corresponding to A according to a change curve of the maximum relative caliber; if A is smaller than the minimum value of the maximum relative caliber change curve, s2 is smax;
step 33, step 50, dividing the range of the distance s between the fixed mirror (21) and the movable mirror (22) into a plurality of parts, wherein M parts are set as M parts, and each part is set as d as an interval; the distance between the fixed mirror (21) and the movable mirror (22) is s min 、s min +d、s min +2d、s min +3d、…、s min +(M-1)d、s max The method comprises the steps of carrying out a first treatment on the surface of the smin and smax represent the minimum and maximum values, respectively, of the range of distances s;
comparing a discrete value s3 which is smaller than s2 and closest to s2 among the given M discrete values; if s2 is equal to s1, s3 should be a discrete value greater than s2 and closest to s2;
step 34, the distance between the movable mirror and the fixed mirror is s3, the distance l between the movable mirror and the aspheric surface to be measured is set as an optimization variable, a system is optimized in optical design software, and the distance between the movable mirror and the aspheric surface after optimization is l3;
and 4, constructing a system according to the s3 and the l3 obtained in the step, and detecting the aspheric surface to be detected to obtain the surface defect information.
Further, the error calibration method for the detection device comprises the following steps:
step 51, replacing the aspherical surface of the detection light path model with a spherical calibration mirror in optical design software, so that the distance between the fixed mirror (21) and the movable mirror (22) is the minimum distance s between the fixed mirror and the movable mirror min ；
Step 52, the distance l from the movable mirror (22) to the calibration mirror is set as a variable, the Root Mean Square (RMS) of the residual aberration is used as an optimization target, the curvature radius R of the spherical calibration mirror is changed from-20 mm to-1000 mm, the system is continuously optimized, and when the maximum gradient of the interference wavefront is lower than a set value, the change is stopped, and the curvature radius R at the moment is a final design value;
step 53, after finishing the design of the spherical calibration mirror, carrying out precise machining on the spherical calibration mirror, obtaining surface shape parameters, and then carrying out precise modeling on the surface shape parameters in optical design software to construct a system error calibration model; when the distance between the fixed mirror (21) and the movable mirror (22) is s 2 When the system error calibration model is used, the corresponding distance between the two calibration models is set as s 2 Then, the distance p from the movable mirror (22) to the calibration mirror is set as an optimization variable, the root mean square RMS of the residual aberration is used as an optimization target, and the optimization distance p is output after the system is optimized;
in an actual system error calibration light path, the distance between the fixed mirror (21) and the movable mirror (22) and the distance between the movable mirror (22) and the calibration mirror are divided into s 2 And p, obtaining a wavefront detection result W with systematic errors real The method comprises the steps of carrying out a first treatment on the surface of the Simulating the systematic error calibration model in optical design software to obtain a wavefront detection result W without systematic error model ；
The systematic error aw is:
ΔW＝W real -W model
step 54, when the detection device is used to obtain the wavefront information W of the aspheric surface to be detected es Then, the system error delta W is eliminated to obtain the real surface shape defect W s The method comprises the following steps:
W s ＝W es -ΔW。
step 55, traversing each distance between the fixed mirror (21) and the movable mirror (22), obtaining system errors at different distances according to the methods of step 52 and step 53, and establishing a system error database;
when the distance between the fixed mirror (21) and the movable mirror (22) is one of the M s values during actual detection, searching a system error corresponding to the distance, and eliminating the system error of the aspheric surface to be detected.
Preferably, in the step 32, a minimum value s meeting the requirement is found according to the relative caliber A of the aspheric surface (3) to be measured 0 Then find out the value s less than the minimum value s in M discrete values contained in the system error database 0 And the closest value s 3 The s is 3 The value is the axial distance between the fixed mirror (21) and the movable mirror (22).
Preferably, in the step 32, if the minimum value s is found 0 To the minimum value of the range obtained according to kR, then find a value greater than the s 0 And is closest to s 0 Discrete value s of (2) 3 As the axial distance between the fixed mirror (21) and the movable mirror (22).
Preferably, wherein ρ max The value of (A) is in the range of 0.01lambda/pixel to 0.5lambda/pixel min The range of the value of (2) is 0.01-1.
The invention has the following beneficial effects:
1. the compensator designed by the invention is a spherical lens, and has low cost and simple processing;
2. the compensation range of the compensator can be changed by changing the distance between the two lenses in the adjustable compensator, so that the detection method has more flexible detection modes and wider application fields;
3. the incident light used in the invention is parallel light, one surface of the lens in the adjustable compensator is a plane, and the alignment and design of the detection light path are simple;
4. compared with other spherical compensators, the invention has a larger compensation range.
5. The invention has the system error calibration method matched with the method and has higher detection precision.
Drawings
FIG. 1 is a schematic diagram of an adjustable compensator detection system of the present invention;
FIG. 2 is a schematic diagram of a tunable compensator detection system based on four-wave lateral shearing interference according to the present invention;
FIG. 3 is a residual aberration wavefront map;
fig. 4 is a diagram of the measurable range of the adjustable compensator.
The device comprises a 1-interferometer, a 11-laser, a 12-beam expanding system, a 13-beam splitting plate, a 14-beam shrinking system, a 15-grating, a 16-CCD, a 2-adjustable compensator, a 21-fixed mirror, a 22-movable mirror and a 3-aspheric surface to be measured.
Detailed Description
The invention will now be described in detail by way of example with reference to the accompanying drawings.
Embodiment one:
the core of the universal aspheric surface non-zero position interference detection device with adjustable compensation range is an adjustable compensator 2, and a detection schematic diagram of the adjustable compensator is shown in fig. 1. The parallel light emitted by the interferometer 1 enters the adjustable compensator 2, then reaches the aspheric surface 3 to be measured after passing through the adjustable compensator 2, the aspheric surface 3 to be measured generates light reflection, the reflected light enters the interferometer 1 after passing through the adjustable compensator 2, and interference is generated in the interferometer 1 to form an interference pattern. The adjustable compensator 2 is composed of two lenses, wherein a lens far away from the aspheric surface 3 to be measured is called a fixed lens 21, a lens close to the aspheric surface 3 is called a movable lens 22, and the distance between the two lenses is changed by moving the movable lens 22, so that the purpose of adjusting the compensation range of the compensator is achieved.
The interferometer 1 used in this embodiment is a four-wave transverse shearing interferometer, and the detection light path used is shown in fig. 2. The small-caliber parallel light emitted by the laser 11 is changed into large-caliber parallel light after passing through the beam expanding system 12, and then is incident on the adjustable compensator 2 through the beam splitter 13. The parallel light is converted into an aspheric wavefront similar to the surface shape of the aspheric surface 3 to be measured after passing through the adjustable compensator 2, and is emitted after reaching the aspheric surface 3 to be measured, and the aspheric surface has surface shape defect information. The reflected wave front passes through the adjustable compensator 2 again, is reflected to the beam shrinking system 14 and the grating 15 by the beam splitting plate 13, finally generates four-wave shearing interference on the CCD16 to form a shearing interference pattern, and then adopts a return error correction algorithm to extract the surface shape defect information of the aspheric surface 3 to be detected from the interference pattern.
The movable mirror 22 of the adjustable compensator 2 can move according to the parameters of the aspheric surface 3 to be measured. The movement mode includes a continuous movement mode or a multi-shift movement mode.
In this embodiment, the fixed mirror 21 and the movable mirror 22 of the tunable compensator 2 are plano-convex lenses, the material is BK7 glass, the center thickness is 10mm, and the caliber is 45mm.
Embodiment two:
the invention provides a generalized aspheric surface non-zero position interference detection method in a continuous moving mode, which specifically comprises the following steps:
step 1, firstly, optimally designing an adjustable compensator 2, wherein the parameter to be optimized is the convex curvature radius r of a fixed mirror 21 1 Radius of curvature r of convex surface of movable mirror 22 2 . The designed light path diagram is shown in fig. 2, the radius of curvature R of the selected vertex of the target aspheric surface is 3416mm, and the conic constant k is the aspheric surface of-1. Adopting optical design software to carry out optimal design, wherein the specific optimal design process comprises the following steps:
step 11, the optimization variable in the optical design software is selected as the distance l from the movable mirror 22 to the aspheric surface 3 to be measured, and the optimization target is to minimize the residual aberration root mean square RMS, let r 2 And r 1 Is equal in value and then r 1 Varying from-20 mm to-1000 mm, is continuously optimized when the maximum slope of the interference wavefront is satisfied below ρ max The relative caliber A of the target aspheric surface is larger than A min Stopping the change to obtain the preliminarily designed r 1 And r 2 . Wherein ρ is max The value of (A) is in the range of 0.01lambda/pixel to 0.5lambda/pixel min The range of the value of (2) is 0.01-1.
Step 12, let r 1 The value is unchanged, r 2 The value of the (2) is reduced from the value obtained by the preliminary design, and then the distance l from the movable mirror 22 to the aspheric surface 3 to be measured is taken as an optimization variable, the root mean square RMS of the minimized residual aberration is taken as an optimization target optimization system, and the optimal design under the limit condition that the corresponding interferogram can be analyzed is selectedr 1 And r 2 。
After the above design steps, r obtained in this example 1 Is-260 mm, r 2 Is-70 mm. At this time, as shown in fig. 3, the residual aberration of the detection system is 0.48 relative caliber of the target aspherical surface 3. The moving range of the moving mirror 22 should be from the rear surface of the fixed mirror 21 to the focal point of the fixed mirror 21 when the moving mirror 22 is not moved, and the moving range of the moving mirror 22 should not be too close to the limit condition for adjustment and practical application, and should be considered comprehensively, for example, the distance s between the fixed mirror 21 and the moving mirror 22 in this embodiment is 50mm-450mm.
And step 2, performing simulation calculation on the detection range of the compensator according to the design result of the adjustable compensator 2 and combining optical design software, wherein the final result is shown in fig. 4. Fig. 4 is a diagram of the measurable range of the adjustable compensator 2 in this design, by which the range abscissa of the measurable aspherical surface 3 of the compensator for different s represents the distance s between the fixed mirror 21 and the movable mirror 22, and the two ordinate represent the value of k×r and the relative caliber a of the aspherical surface 3, respectively, where k represents the conic constant of the aspherical surface, and R represents the radius of curvature of the vertex of the aspherical surface. When the distance between the fixed mirror 21 and the movable mirror 22 is s, the corresponding k×r value and the relative caliber a value are found according to fig. 4 as the maximum value kR max And A is a max The method comprises the steps of carrying out a first treatment on the surface of the The aspherical surface 3 below both values can be detected by the adjustable compensator 2 at this distance, only the distance of the aspherical surface 3 to be measured from the movable mirror 22 has to be changed.
And 3, optimally designing a detection light path to achieve the optimal detection effect. When a given aspheric surface is obtained, it is first necessary to determine whether the aspheric surface can be detected by the detection system of the adjustable compensator 2, and then an optimal detection light path is designed for the aspheric surface, and the basis of the two paths is the measurable range diagram of fig. 4, which specifically includes the following steps:
step 31, locating the k×r position of the aspheric surface 3 to be measured in the measurable range diagram. Finding a value corresponding to the kR of the aspheric surface in the ordinate of the measurable range diagram, and if the value cannot be found, not measuring the aspheric surface; if can be found, finding a corresponding abscissa value s according to a variation curve of kR with s 1 . Then in the detection light path designed for this aspheric surface, a fixed mirrorDistance s between 21 and movable mirror 22 0 At s 1 At a maximum distance s from the two max Between them.
Step 32, determining an initial structure of the detection light path. According to step one 1 -s max Range finding the maximum measurable relative caliber A at that range max Judging whether the relative caliber A of the aspheric surface 3 to be detected is smaller than A max . If greater than A max The aspheric surface is not measurable; if less than A max Finding a position s satisfying A according to the variation of the relative caliber along with s 1 -s max Minimum abscissa value s in range 2 The distance s between the fixed mirror 21 and the movable mirror 22 0 Set as s 2 Distance l from movable mirror 22 to aspherical surface 0 The initial structural parameter is set as the radius of curvature R of the apex sphere of the aspheric surface 3 to be measured.
And step 33, optimizing the detection light path structure by utilizing optical design software. Will l 0 Setting the residual aberration RMS as an optimization variable, and optimizing a detection light path by taking the minimized residual aberration RMS as an optimization target, wherein the optimized detection light path is l 0 And s in step 32 2 And (3) the final result of the design of the detection light path.
And 4, after the design of the detection light path is finished, constructing an experimental device according to the structure, calibrating the system error of the detection device through a calibration mirror, measuring the aspheric surface 3 to be detected, finally obtaining an interference pattern from the CCD16, extracting the surface shape defect information of the aspheric surface 3 by utilizing an algorithm, and removing the influence of the system error according to the method. When parameters such as conic constant k, vertex curvature radius R and relative caliber A of the aspheric surface 3 to be detected are changed, the optimal detection light path is designed according to the steps, and then the light path parameters are changed according to the design result and the system error is calibrated, so that the detection can be continuously completed.
Embodiment III:
the invention provides a generalized aspheric surface non-zero position interference detection method under a multi-gear displacement motion mode, which specifically comprises the following steps:
step 1, optimally designing the universal aspheric surface non-zero position interference detection device with the adjustable compensation range by adopting optical software, and specifically comprising the following steps:
step 11, setting the convex curvature radius of the fixed mirror 21 as r 1 The radius of curvature of the convex surface of the movable mirror 22 is r 2 The optimization variable in the optical design software is selected as the distance l from the movable mirror (22) to the aspheric surface (3) to be detected, and the optimization target is to minimize the residual aberration Root Mean Square (RMS) so as to enable r to be 2 And r 1 Is equal in value and then r 1 Is varied within a set range and is continuously optimized when the maximum slope of the interference wavefront is lower than the set maximum value ρ max And the relative caliber A of the target aspheric surface is larger than the set minimum value A min Stopping the change to obtain the r of the preliminary design 1 And r 2 ；
Step 12, let r 1 The value is unchanged, r 2 The value of (2) is reduced from the value obtained by the preliminary design, and then the distance l from the movable mirror (22) to the aspheric surface (3) to be measured is taken as an optimization variable, the root mean square RMS of the minimized residual aberration is taken as an optimization target to optimize the system, and the optimal design r under the limit condition that the corresponding interferogram can be analyzed is selected 1 And r 2 Is a value of (2);
step 2, according to the design result of the adjustable compensator (2), combining optical design software to perform simulation calculation on the detection range of the adjustable compensator (2) to obtain the range of the measurable aspheric surface (3) of the compensator under the distance s between different fixed mirrors (21) and moving mirrors (22), namely the value of k R and the relative caliber A of the aspheric surface (3), thereby obtaining a corresponding measurable range diagram;
step 3, optimally designing a detection light path, wherein the method comprises the following specific steps:
step 31, in the measurable range diagram, finding the corresponding abscissa s1 on the maximum kR change curve according to the parameter k×R of the aspheric surface to be measured; if k R is below the minimum of the curve, s1 should be smin; if above the maximum of the curve, it is not measurable;
step 32, finding the corresponding maximum measurable relative caliber Amax in the range from s1 to smax, and if the relative caliber A of the aspheric surface to be measured is higher than Amax, the relative caliber A is not measurable; if A is lower than Amax, measuring, and finding out an abscissa s2 corresponding to A according to a change curve of the maximum relative caliber; if A is smaller than the minimum value of the maximum relative caliber change curve, s2 is smax;
step 33, step 50, dividing the range of the distance s between the fixed mirror (21) and the movable mirror (22) into a plurality of parts, wherein M parts are set as M parts, and each part is set as d as an interval; the distance between the fixed mirror (21) and the movable mirror (22) is s min 、s min +d、s min +2d、s min +3d、…、s min +(M-1)d、s max The method comprises the steps of carrying out a first treatment on the surface of the smin and smax represent the minimum and maximum values, respectively, of the range of distances s;
comparing a discrete value s3 which is smaller than s2 and closest to s2 among the given M discrete values; if s2 is equal to s1, s3 should be a discrete value greater than s2 and closest to s2;
step 34, the distance between the movable mirror and the fixed mirror is s3, the distance l between the movable mirror and the aspheric surface to be measured is set as an optimization variable, a system is optimized in optical design software, and the distance between the movable mirror and the aspheric surface after optimization is l3;
and 4, constructing a system according to the s3 and the l3 obtained in the step, and detecting the aspheric surface to be detected to obtain the surface defect information.
Embodiment four:
furthermore, in the continuous movement mode of the second embodiment, in order to improve the detection accuracy of the surface shape defect, the present invention performs systematic error calibration on the adjustable compensator 2 and the fixing device in the detection light path of the adjustable compensator. The invention provides a spherical calibration mirror for an adjustable compensator 2, which can calibrate the systematic errors of the compensator and a fixing device in the variation range of the adjustable compensator 2. The system error calibration optical path is similar to that of fig. 1, except that the aspheric surface 3 to be measured is replaced by a spherical calibration mirror.
The spherical calibration mirror is a spherical reflector, and the design steps are as follows:
step 51, replacing the aspheric surface of the detection light path model with a spherical calibration mirror in the optical design software to make the distance between the fixed mirror 21 and the movable mirror 22 be the minimum distance s between the fixed mirror and the movable mirror min ；
Step 52, the distance l from the movable mirror 22 to the calibration mirror is set as a variable, the root mean square RMS of the residual aberration is taken as an optimization target, the curvature radius R of the spherical calibration mirror is changed from-20 mm to-1000 mm, the system is continuously optimized, and the change is stopped when the maximum gradient of the interference wavefront is lower than 0.01λ/pixel to 0.5λ/pixel, and the R at this time is the final design value.
And step 53, after the design of the calibration mirror is completed, performing precision machining on the calibration mirror, obtaining the surface shape parameters of the calibration mirror, and then performing precise modeling on the surface shape parameters in optical design software to construct a system error calibration model. When the distance between the fixed mirror 21 and the movable mirror 22 is s 2 When the system error calibration model is used, the corresponding distance between the two calibration models is set as s 2 Then, the distance p from the movable mirror 22 to the calibration mirror is set as an optimization variable, the root mean square RMS of the residual aberration is used as an optimization target, and the optimization system is optimized to output an optimized distance p. In the actual system error calibration light path, the distance between the fixed mirror 21 and the movable mirror 22 and the distance between the movable mirror 22 and the calibration mirror are divided into s 2 And p, obtaining a wavefront detection result W with systematic errors real . Simulating the systematic error calibration model in optical design software to obtain a wavefront detection result W without systematic error model 。W real And W is equal to model The Zernike polynomials can be expressed as:
wherein a is i And b i Respectively W real And W is equal to model Corresponding ith term Zernike polynomial Z i N is the number of terms of the Zernike polynomial.
The systematic error aw is:
wherein c i The ith term zernike polynomial Z corresponding to DeltaW i Is a coefficient of (a).
Step 54,When the detection system of the adjustable compensator 2 is utilized to obtain the surface shape defect W with systematic error es Then, the systematic error is eliminated in the corresponding Zernike polynomial coefficient to obtain the real surface shape defect W s The method comprises the following steps:
wherein d i Is W es The corresponding ith term zernike polynomial Z i Is a coefficient of (a).
Fifth embodiment:
in this embodiment, in the multi-gear shifting mode of the third embodiment, the system error calibration method provided by the present invention includes:
step 51, replacing the aspherical surface of the detection light path model with a spherical calibration mirror in optical design software, so that the distance between the fixed mirror (21) and the movable mirror (22) is the minimum distance s between the fixed mirror and the movable mirror min ；
Step 52, the distance l from the movable mirror (22) to the calibration mirror is set as a variable, the Root Mean Square (RMS) of the residual aberration is used as an optimization target, the curvature radius R of the spherical calibration mirror is changed from-20 mm to-1000 mm, the system is continuously optimized, and when the maximum gradient of the interference wavefront is lower than a set value, the change is stopped, and the curvature radius R at the moment is a final design value;
step 53, after finishing the design of the spherical calibration mirror, carrying out precise machining on the spherical calibration mirror, obtaining surface shape parameters, and then carrying out precise modeling on the surface shape parameters in optical design software to construct a system error calibration model; when the distance between the fixed mirror (21) and the movable mirror (22) is s 2 When the system error calibration model is used, the corresponding distance between the two calibration models is set as s 2 Then, the distance p from the movable mirror (22) to the calibration mirror is set as an optimization variable, the root mean square RMS of the residual aberration is used as an optimization target, and the optimization distance p is output after the system is optimized;
in an actual system error calibration light path, the distance between the fixed mirror (21) and the movable mirror (22) and the distance between the movable mirror (22) and the calibration mirror are divided into s 2 And p, obtaining a wavefront detection result W with systematic errors real The method comprises the steps of carrying out a first treatment on the surface of the In optical design softwareSimulating the systematic error calibration model to obtain a wavefront detection result W without systematic error model ；
The systematic error aw is:
ΔW＝W real -W model
step 54, when the detection device is used to obtain the wavefront information W of the aspheric surface to be detected es Then, the system error delta W is eliminated to obtain the real surface shape defect W s The method comprises the following steps:
W s ＝W es -ΔW。
step 55, traversing each distance between the fixed mirror (21) and the movable mirror (22), obtaining system errors at different distances according to the methods of step 52 and step 53, and establishing a system error database;
when the distance between the fixed mirror (21) and the movable mirror (22) is one of the M s values during actual detection, searching a system error corresponding to the distance, and eliminating the system error of the aspheric surface to be detected.
(embodiments III and V are calibration methods for creating a database of systematic errors, which are repeated and omitted here), and the above description is merely a preferred embodiment of the present invention, and is not intended to limit the scope of the present invention. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (10)
1. The universal aspheric surface non-zero position interference detection device with the adjustable compensation range is characterized by comprising an interferometer (1), an adjustable compensator (2) and an aspheric surface (3) to be detected; the parallel light emitted by the interferometer (1) is incident into the adjustable compensator (2), then reaches the aspheric surface (3) to be detected after passing through the adjustable compensator (2), the aspheric surface (3) to be detected is subjected to light reflection, the reflected light enters the interferometer (1) after passing through the adjustable compensator (2), and an interference pattern is formed in the interferometer (1) by interference, so that the surface shape defect of the aspheric surface (3) to be detected is detected; the adjustable compensator (2) consists of two lenses, wherein the lens far away from the aspheric surface (3) to be measured is called a fixed lens (21), the lens close to the aspheric surface (3) is a movable lens (22), and the distance between the two lenses is changed by moving the movable lens (22), so that the compensation range of the adjustable compensator (2) is adjusted.
2. The generalized aspheric surface non-zero interference detection device with adjustable compensation range according to claim 1, characterized in that the movable mirror (22) of the adjustable compensator (2) can move according to the parameters of the aspheric surface (3) to be detected.
3. A generalized aspheric non-zero interference detection device with adjustable compensation range according to claim 2, characterized in that the moving mode of the moving mirror (22) comprises a continuous moving mode and a multi-shift moving mode.
4. A method of a generalized aspheric non-zero interference detection device with adjustable compensation range according to claim 1, 2 or 3, comprising:
step 1, optimally designing the universal aspheric surface non-zero position interference detection device with the adjustable compensation range by adopting optical software, and specifically comprising the following steps:
step 11, setting the convex curvature radius of the fixed mirror 21 as r 1 The radius of curvature of the convex surface of the movable mirror 22 is r 2 The optimization variable in the optical design software is selected as the distance l from the movable mirror (22) to the aspheric surface (3) to be detected, and the optimization target is to minimize the residual aberration Root Mean Square (RMS) so as to enable r to be 2 And r 1 Is equal in value and then r 1 Is varied within a set range and is continuously optimized when the maximum slope of the interference wavefront is lower than the set maximum value ρ max And the relative caliber A of the target aspheric surface is larger than the set minimum value A min Stopping the change to obtain the r of the preliminary design 1 And r 2 ；
Step 12, let r 1 The value is unchanged, r 2 The value of (2) is reduced from the value obtained by the preliminary design, and then the distance l from the movable mirror (22) to the aspheric surface (3) to be measured is taken as an optimization variable, the root mean square RMS of the minimized residual aberration is taken as an optimization target to optimize the system, and the optimal design r under the limit condition that the corresponding interferogram can be analyzed is selected 1 And r 2 Is a value of (2);
step 2, according to the design result of the adjustable compensator (2), combining optical design software to perform simulation calculation on the detection range of the adjustable compensator (2) to obtain the range of the measurable aspheric surface (3) of the compensator under the distance s between different fixed mirrors (21) and moving mirrors (22), namely the value of k R and the relative caliber A of the aspheric surface (3), thereby obtaining a corresponding measurable range diagram;
step 3, optimally designing a detection light path, wherein the method comprises the following specific steps:
step 31, in the measurable range diagram, finding the corresponding abscissa s1 on the maximum kR change curve according to the parameter k×R of the aspheric surface to be measured; if k×r is lower than the minimum value of the curve, s1 is the small value smin; if above the maximum of the curve, it is not measurable;
step 32, finding the corresponding maximum measurable relative caliber Amax in the range from s1 to smax, and if the relative caliber A of the aspheric surface to be measured is higher than Amax, the relative caliber A is not measurable; if A is lower than Amax, measuring, and finding out an abscissa s2 corresponding to A according to a change curve of the maximum relative caliber; if A is smaller than the minimum value of the maximum relative caliber change curve, s2 is the maximum value smax;
step 33, the distance between the movable mirror and the fixed mirror is s2, the distance l between the movable mirror and the aspheric surface to be measured is set as an optimization variable, the system is optimized in optical design software, and the distance between the movable mirror and the aspheric surface after optimization is l2;
and 4, constructing a system according to the s2 and the l2 obtained in the step, and detecting the aspheric surface to be detected to obtain the surface defect information.
5. The generalized aspheric non-zero interference detection method with adjustable compensation range according to claim 4, further comprising an error calibration method for the detection device, comprising:
step 51, replacing the aspherical surface of the detection light path model with a spherical calibration mirror in optical design software, so that the distance between the fixed mirror (21) and the movable mirror (22) is the minimum distance s between the fixed mirror and the movable mirror min ；
Step 52, the distance l from the movable mirror (22) to the calibration mirror is set as a variable, the root mean square RMS of the residual aberration is used as an optimization target, the curvature radius R of the spherical calibration mirror is changed within a set range, the system is continuously optimized, and when the maximum gradient of the interference wavefront is lower than a set value, the change is stopped, and the curvature radius R at the moment is a final design value;
step 53, after finishing the design of the spherical calibration mirror, carrying out precise machining on the spherical calibration mirror, obtaining surface shape parameters, and then carrying out precise modeling on the surface shape parameters in optical design software to construct a system error calibration model; when the distance between the fixed mirror (21) and the movable mirror (22) is s 2 When the system error calibration model is used, the corresponding distance between the two calibration models is set as s 2 Then, the distance p from the movable mirror (22) to the calibration mirror is set as an optimization variable, the root mean square RMS of the residual aberration is used as an optimization target, and the optimization distance p is output after the system is optimized;
in an actual system error calibration light path, the distance between the fixed mirror (21) and the movable mirror (22) and the distance between the movable mirror (22) and the calibration mirror are divided into s 2 And p, obtaining a wavefront detection result W with systematic errors real The method comprises the steps of carrying out a first treatment on the surface of the Simulating the systematic error calibration model in optical design software to obtain a wavefront detection result W without systematic error model ；
The systematic error aw is:
ΔW＝W real -W model
step 54, when the detection device is used to obtain the wavefront information W of the aspheric surface to be detected es Then, the system error delta W is eliminated to obtain the real surface shape defect W s The method comprises the following steps:
W s ＝W es -ΔW。
6. a method of a generalized aspheric non-zero interference detection device with adjustable compensation range according to claim 1, 2 or 3, comprising:
step 1, optimally designing the universal aspheric surface non-zero position interference detection device with the adjustable compensation range by adopting optical software, and specifically comprising the following steps:
step 11, setting the convex curvature radius of the fixed mirror 21 as r 1 The radius of curvature of the convex surface of the movable mirror 22 is r 2 The optimization variables in the optical design software are selected as moving mirrors (22) to be measuredDistance l of aspheric surface (3), optimizing target to minimize residual aberration root mean square RMS, let r 2 And r 1 Is equal in value and then r 1 Is varied within a set range and is continuously optimized when the maximum slope of the interference wavefront is lower than the set maximum value ρ max And the relative caliber A of the target aspheric surface is larger than the set minimum value A min Stopping the change to obtain the r of the preliminary design 1 And r 2 ；
Step 12, let r 1 The value is unchanged, r 2 The value of (2) is reduced from the value obtained by the preliminary design, and then the distance l from the movable mirror (22) to the aspheric surface (3) to be measured is taken as an optimization variable, the root mean square RMS of the minimized residual aberration is taken as an optimization target to optimize the system, and the optimal design r under the limit condition that the corresponding interferogram can be analyzed is selected 1 And r 2 Is a value of (2);
step 2, according to the design result of the adjustable compensator (2), combining optical design software to perform simulation calculation on the detection range of the adjustable compensator (2) to obtain the range of the measurable aspheric surface (3) of the compensator under the distance s between different fixed mirrors (21) and moving mirrors (22), namely the value of k R and the relative caliber A of the aspheric surface (3), thereby obtaining a corresponding measurable range diagram;
step 3, optimally designing a detection light path, wherein the method comprises the following specific steps:
step 31, in the measurable range diagram, finding the corresponding abscissa s1 on the maximum kR change curve according to the parameter k×R of the aspheric surface to be measured; if k R is below the minimum of the curve, s1 should be smin; if above the maximum of the curve, it is not measurable;
step 32, finding the corresponding maximum measurable relative caliber Amax in the range from s1 to smax, and if the relative caliber A of the aspheric surface to be measured is higher than Amax, the relative caliber A is not measurable; if A is lower than Amax, measuring, and finding out an abscissa s2 corresponding to A according to a change curve of the maximum relative caliber; if A is smaller than the minimum value of the maximum relative caliber change curve, s2 is smax;
step 33, step 50, dividing the range of the distance s between the fixed mirror (21) and the movable mirror (22) into a plurality of parts, wherein M parts are set as M parts, and each part is set as d as an interval; the distance between the fixed mirror (21) and the movable mirror (22) is s min 、s min +d、s min +2d、s min +3d、…、s min +(M-1)d、s max ；s min Sum s max Respectively representing the minimum value and the maximum value of the range of the distance s;
comparing a discrete value s3 which is smaller than s2 and closest to s2 among the given M discrete values; if s2 is equal to s1, s3 should be a discrete value greater than s2 and closest to s2;
step 34, the distance between the movable mirror and the fixed mirror is s3, the distance l between the movable mirror and the aspheric surface to be measured is set as an optimization variable, a system is optimized in optical design software, and the distance between the movable mirror and the aspheric surface after optimization is l3;
and 4, constructing a system according to the s3 and the l3 obtained in the step, and detecting the aspheric surface to be detected to obtain the surface defect information.
7. The generalized aspheric non-zero interference detection method with adjustable compensation range according to claim 6, further comprising an error calibration method for the detection device, comprising:
step 51, replacing the aspherical surface of the detection light path model with a spherical calibration mirror in optical design software, so that the distance between the fixed mirror (21) and the movable mirror (22) is the minimum distance s between the fixed mirror and the movable mirror min ；
Step 52, the distance l from the movable mirror (22) to the calibration mirror is set as a variable, the Root Mean Square (RMS) of the residual aberration is used as an optimization target, the curvature radius R of the spherical calibration mirror is changed from-20 mm to-1000 mm, the system is continuously optimized, and when the maximum gradient of the interference wavefront is lower than a set value, the change is stopped, and the curvature radius R at the moment is a final design value;
step 53, after finishing the design of the spherical calibration mirror, carrying out precise machining on the spherical calibration mirror, obtaining surface shape parameters, and then carrying out precise modeling on the surface shape parameters in optical design software to construct a system error calibration model; when the distance between the fixed mirror (21) and the movable mirror (22) is s 2 When the system error calibration model is used, the corresponding distance between the two calibration models is set as s 2 Then, the distance p from the movable mirror (22) to the calibration mirror is set as an optimization variable, the root mean square RMS of the residual aberration is taken as an optimization target, and the post-system output is optimizedThe optimized distance p is obtained;
in an actual system error calibration light path, the distance between the fixed mirror (21) and the movable mirror (22) and the distance between the movable mirror (22) and the calibration mirror are divided into s 2 And p, obtaining a wavefront detection result W with systematic errors real The method comprises the steps of carrying out a first treatment on the surface of the Simulating the systematic error calibration model in optical design software to obtain a wavefront detection result W without systematic error model ；
The systematic error aw is:
ΔW＝W real -W model
step 54, when the detection device is used to obtain the wavefront information W of the aspheric surface to be detected es Then, the system error delta W is eliminated to obtain the real surface shape defect W s The method comprises the following steps:
W s ＝W es -ΔW。
step 55, traversing each distance between the fixed mirror (21) and the movable mirror (22), obtaining system errors at different distances according to the methods of step 52 and step 53, and establishing a system error database;
when the distance between the fixed mirror (21) and the movable mirror (22) is one of the M s values during actual detection, searching a system error corresponding to the distance, and eliminating the system error of the aspheric surface to be detected.
8. The generalized aspheric non-zero interference detection method with adjustable compensation range according to claim 7, characterized in that in the step 32, a minimum value s meeting the requirement is found according to the relative caliber a of the aspheric surface (3) to be detected 0 Then find out the value s less than the minimum value s in M discrete values contained in the system error database 0 And the closest value s 3 The s is 3 The value is the axial distance between the fixed mirror (21) and the movable mirror (22).
9. The generalized aspheric non-zero-bit interference detection method with adjustable compensation range according to claim 7, wherein in the step 32, if the minimum value s is found 0 To the minimum value of the range obtained according to kR, then find a value greater than the s 0 And is closest to s 0 Discrete value s of (2) 3 As the axial distance between the fixed mirror (21) and the movable mirror (22).
10. The generalized aspheric non-zero interference detection method with adjustable compensation range of claim 4 or 5, wherein ρ max The value of (A) is in the range of 0.01lambda/pixel to 0.5lambda/pixel min The range of the value of (2) is 0.01-1.
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