CN117549147A - Method and device for controlling amplitude stability of ultrasonic scratches of single abrasive particles on hard and brittle materials - Google Patents
Method and device for controlling amplitude stability of ultrasonic scratches of single abrasive particles on hard and brittle materials Download PDFInfo
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- 230000033001 locomotion Effects 0.000 claims description 17
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- 230000000087 stabilizing effect Effects 0.000 claims 2
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- 239000006061 abrasive grain Substances 0.000 abstract description 6
- 238000006748 scratching Methods 0.000 abstract description 3
- 230000002393 scratching effect Effects 0.000 abstract description 3
- 238000012360 testing method Methods 0.000 abstract description 3
- 238000010586 diagram Methods 0.000 description 9
- 238000005520 cutting process Methods 0.000 description 5
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- 239000003082 abrasive agent Substances 0.000 description 2
- 239000011153 ceramic matrix composite Substances 0.000 description 1
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- 239000013078 crystal Substances 0.000 description 1
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- 230000008092 positive effect Effects 0.000 description 1
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- 238000011897 real-time detection Methods 0.000 description 1
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B1/00—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
- B24B1/04—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes subjecting the grinding or polishing tools, the abrading or polishing medium or work to vibration, e.g. grinding with ultrasonic frequency
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
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- B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
- B24B49/003—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation involving acoustic means
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
- B24B49/12—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation involving optical means
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B51/00—Arrangements for automatic control of a series of individual steps in grinding a workpiece
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- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
- G01H1/00—Measuring characteristics of vibrations in solids by using direct conduction to the detector
- G01H1/12—Measuring characteristics of vibrations in solids by using direct conduction to the detector of longitudinal or not specified vibrations
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Abstract
本发明公开了硬脆材料单颗磨粒超声划痕振幅稳定性控制方法及装置，属于材料超声加工领域；控制装置包括：超声辅助加工刀架，包括超声刀架、超声刀具、变幅杆、换能器，单颗磨粒置于超声刀具顶端且在超声刀具上设有声发射传感器；声发射传感器测振幅装置，包括声发射传感器，声发射传感器通过无线传输将数据实时传输至计算机，计算机通过调节加工参数，来达到稳定振幅的作用；激光位移传感器测量反馈系统，包括激光位移传感器，激光位移传感器的测量数据同步至计算机，起到对振幅的反馈和修正的作用。本发明能解决现有硬脆材料超声辅助划痕过程中，振幅在力负载作用下衰减的现象，可实现稳定振幅的超声划痕试验。
The invention discloses a method and device for controlling the amplitude stability of ultrasonic scratches of single abrasive particles on hard and brittle materials, belonging to the field of ultrasonic processing of materials; the control device includes: an ultrasonic auxiliary processing tool holder, including an ultrasonic tool holder, an ultrasonic tool, a horn, A transducer, a single abrasive grain is placed on the top of the ultrasonic tool and an acoustic emission sensor is provided on the ultrasonic tool; the acoustic emission sensor amplitude measurement device includes an acoustic emission sensor, and the acoustic emission sensor transmits data to the computer in real time through wireless transmission, and the computer Adjust the processing parameters to achieve stable amplitude; the laser displacement sensor measurement feedback system includes a laser displacement sensor. The measurement data of the laser displacement sensor is synchronized to the computer to provide feedback and correction to the amplitude. The invention can solve the phenomenon of amplitude attenuation under force load during the existing ultrasonic-assisted scratching process of hard and brittle materials, and can realize an ultrasonic scratch test with stable amplitude.
Description
技术领域Technical field
本发明涉及材料超声加工领域，更具体地说，涉及硬脆材料单颗磨粒超声划痕振幅稳定性控制方法及装置。The present invention relates to the field of ultrasonic processing of materials, and more specifically, to a method and device for controlling the amplitude stability of ultrasonic scratches of single abrasive particles on hard and brittle materials.
背景技术Background technique
现代工业的产品正不断向着更高的精度，更复杂恶劣的使用环境挑战，这对先进材料提出了更高的要求。以光学玻璃、激光晶体、陶瓷基复合材料为代表的硬脆材料，因具备优异的机械、物理和化学性能，在惯性导航、光学设备、航空航天、信息通讯、交通运输等领域正发挥着越来越重要的作用。Products in modern industry are constantly facing challenges with higher precision and more complex and harsh use environments, which puts forward higher requirements for advanced materials. Hard and brittle materials represented by optical glass, laser crystals, and ceramic matrix composite materials are playing an increasingly important role in inertial navigation, optical equipment, aerospace, information communications, transportation and other fields due to their excellent mechanical, physical and chemical properties. increasingly important role.
硬脆材料高硬度，高耐磨性的特点使其在各个领域得到应用，但也导致其加工工艺性差。采用传统的方法加工硬脆材料深小孔，存在切削力大，散热及排屑困难，刀具磨损严重等问题，容易造成出入口崩碎，粗糙度不均等缺陷，难以保证加工质量及效率。目前，国内外针对硬脆材料加工通常采用电解加工、电火花加工、激光加工以及超声加工等特种加工方法。The characteristics of high hardness and high wear resistance of hard and brittle materials make them used in various fields, but they also lead to poor processing technology. Using traditional methods to process deep and small holes in hard and brittle materials has problems such as high cutting force, difficulty in heat dissipation and chip removal, and severe tool wear. It can easily cause defects such as cracking of the entrance and exit, uneven roughness, etc., making it difficult to ensure processing quality and efficiency. At present, special processing methods such as electrolytic machining, electric discharge machining, laser machining and ultrasonic machining are usually used for processing hard and brittle materials at home and abroad.
超声辅助加工是在刀具或工件上施加一个平行于刀具轴线方向的超声振动，利用超声的能量辅助加工。超声辅助加工能够显著减小加工过程中的切削力，延长刀具使用寿命，在硬脆材料高质高效加工中已经逐渐得到认可。Ultrasonic-assisted machining is to apply an ultrasonic vibration parallel to the axis of the tool on the tool or workpiece, and use ultrasonic energy to assist processing. Ultrasonic-assisted machining can significantly reduce the cutting force during machining and extend the service life of the tool. It has gradually been recognized in high-quality and efficient machining of hard and brittle materials.
在硬脆材料超声加工过程中的振幅控制是决定硬脆材料加工表面质量关键因素，但是在实际加工过程中由于负载、工艺及环境的变化，会导致振动系统阻抗特性和谐振频率的变化，从而影响超声振幅。同时由于硬脆材料有延性域存在，当切削深度超过延性域，材料表面会从塑性变形转化为脆性变形，切削过程中材料变形形式的变化也会导致振幅波动。另外，在硬脆材料的加工过程中，超声振幅的控制精度往往要达到0.1um级别。然而在现有的超声振幅控制方法中往往难以应对实际加工过程中的复杂环境以及多影响因素的变化，同时对于高精度的振幅控制要求难以达到稳定振幅控制。Amplitude control during ultrasonic processing of hard and brittle materials is a key factor in determining the surface quality of hard and brittle materials. However, changes in load, process and environment during actual processing will lead to changes in the impedance characteristics and resonance frequency of the vibration system, thus Affects ultrasound amplitude. At the same time, because hard and brittle materials have a ductile domain, when the cutting depth exceeds the ductile domain, the material surface will transform from plastic deformation to brittle deformation, and changes in the material deformation form during the cutting process will also cause amplitude fluctuations. In addition, during the processing of hard and brittle materials, the control accuracy of ultrasonic amplitude often needs to reach the 0.1um level. However, existing ultrasonic amplitude control methods are often difficult to cope with the complex environment and changes in multiple influencing factors in the actual processing process. At the same time, it is difficult to achieve stable amplitude control for high-precision amplitude control requirements.
发明内容Contents of the invention
本发明的目的是提供一种硬脆材料单颗磨粒超声划痕振幅稳定性控制方法及装置。The purpose of the invention is to provide a method and device for controlling the amplitude stability of ultrasonic scratches of single abrasive particles on hard and brittle materials.
为了实现上述目的，本发明提供了一种硬脆材料单颗磨粒超声划痕振幅稳定性控制装置，从而实现硬脆材料超声恒振幅的划痕试验，控制装置包括超声辅助加工刀架、声发射传感器测振幅装置及激光位移传感器检测反馈系统。In order to achieve the above purpose, the present invention provides a single abrasive particle ultrasonic scratch amplitude stability control device for hard and brittle materials, thereby achieving ultrasonic constant amplitude scratch testing of hard and brittle materials. The control device includes an ultrasonic-assisted machining tool holder, an acoustic Emission sensor amplitude measurement device and laser displacement sensor detection feedback system.
超声辅助加工刀架：包括超声刀架、超声刀具、变幅杆、换能器，超声刀架上设置有换能器、变幅杆，超声刀具安装在变幅杆的底端，单颗磨粒置于超声刀具顶端且在超声刀具上设有声发射传感器，在超声刀具的上下表面设置有声发射传感器，声发射传感器与超声刀具紧密连接，声发射传感器通过无线传输与数据处理系统连接。Ultrasonic auxiliary processing tool holder: including ultrasonic tool holder, ultrasonic tool, horn, and transducer. The ultrasonic tool holder is equipped with a transducer and a horn. The ultrasonic tool is installed at the bottom of the horn. The single grinding tool The particles are placed on the top of the ultrasonic tool and an acoustic emission sensor is provided on the ultrasonic tool. Acoustic emission sensors are provided on the upper and lower surfaces of the ultrasonic tool. The acoustic emission sensor is closely connected to the ultrasonic tool. The acoustic emission sensor is connected to the data processing system through wireless transmission.
所述将单颗磨粒置于超声刀具顶端，可使得单颗磨粒借助超声刀具作用控制加工过程中的振动方向，放大振幅。Placing a single abrasive grain on the top of the ultrasonic tool allows the single abrasive grain to control the vibration direction and amplify the amplitude during the processing with the help of the ultrasonic tool.
优选地，所述换能器通过连接线超声波发生器相连，所述数据处理系统和超声波发射器通过连接线与计算机相连接Preferably, the transducer is connected to the ultrasonic generator through a connecting line, and the data processing system and the ultrasonic transmitter are connected to the computer through a connecting line.
优选地，所述数据处理系统为单片机处理系统，包括微处理器和显示屏。Preferably, the data processing system is a single-chip computer processing system, including a microprocessor and a display screen.
优选地，所述数据处理系统通过连接线与计算机连接，计算机内构建关于谐振频率、换能器温度与影响振幅的控制电压变化量的关系的RBF神经网络。Preferably, the data processing system is connected to a computer through a connecting line, and an RBF neural network regarding the relationship between the resonant frequency, the transducer temperature and the control voltage variation that affects the amplitude is constructed in the computer.
声发射传感器测振幅装置，包括声发射传感器，声发射传感器通过无线传输将数据实时传输至计算机，计算机通过调节加工参数，来达到稳定振幅的作用；The acoustic emission sensor amplitude measurement device includes an acoustic emission sensor. The acoustic emission sensor transmits data to the computer in real time through wireless transmission. The computer stabilizes the amplitude by adjusting the processing parameters;
优选地，所述声发射传感器为两个，分布在超声刀具的上下表面，与超声刀具紧密连接。Preferably, there are two acoustic emission sensors, distributed on the upper and lower surfaces of the ultrasonic tool, and closely connected with the ultrasonic tool.
优选地，声发射传感器测振幅装置还包括调节装置；Preferably, the acoustic emission sensor amplitude measurement device further includes an adjustment device;
调节装置：包括可调节功率的超声电源、处理器、计算机等。Adjustment device: including power-adjustable ultrasonic power supply, processor, computer, etc.
激光位移传感器检测反馈系统：包括激光位移传感器，在激光位移传感器的对焦点平面设置对刀器，结合三个直线运动模组，完成激光位移传感器测量焦点的定位；激光位移传感器的测量数据同步至计算机，起到对振幅的反馈和修正的作用；Laser displacement sensor detection feedback system: including a laser displacement sensor, a tool setter is set at the focusing point plane of the laser displacement sensor, and combined with three linear motion modules, it completes the positioning of the laser displacement sensor measurement focus; the measurement data of the laser displacement sensor is synchronized to Computer plays the role of feedback and correction of amplitude;
所述激光位移传感器与对刀器通过连接线与数据处理系统连接，直线运动模组通过数据处理系统与计算机相连接。The laser displacement sensor and the tool setter are connected to the data processing system through a connecting line, and the linear motion module is connected to the computer through the data processing system.
三层底座上均设有直线运动模组，直线运动模组上设有滑块，滑块与底板相互固定，测量部分由两部分组成，两者通过铰链连接可实现0°到90°的相对转动，基座上固定激光位移传感器，底板上固定对刀器。The three-layer base is equipped with a linear motion module. The linear motion module is equipped with a slider. The slider and the base plate are fixed to each other. The measurement part is composed of two parts. The two parts are connected through a hinge to achieve a relative angle of 0° to 90°. Rotate, the laser displacement sensor is fixed on the base, and the tool setter is fixed on the bottom plate.
上述反馈系统测量超声刀具负载情况下振幅，可实现激光位移传感器的自动对焦。The above feedback system measures the amplitude of the ultrasonic tool under load and can achieve automatic focusing of the laser displacement sensor.
采用控制装置进行的硬脆材料单颗磨粒超声划痕振幅稳定性控制方法，控制方法包括以下步骤：A method for controlling the amplitude stability of ultrasonic scratches of single abrasive particles on hard and brittle materials using a control device. The control method includes the following steps:
S1、将换能器通过导线连接进行供电，机床进给系统、声发射传感器与数据处理系统连接，数据处理系统与计算机相连接；S1. Connect the transducer through wires for power supply, connect the machine tool feed system and acoustic emission sensor to the data processing system, and connect the data processing system to the computer;
S2、通过数据处理系统对声发射传感器进行一次采样，标记为初始点；S2. Sample the acoustic emission sensor once through the data processing system and mark it as the initial point;
S3、将激光位移传感器检测反馈系统中的直线运动模组中的电机与数据处理系统连接；S3. Connect the motor in the linear motion module in the laser displacement sensor detection feedback system to the data processing system;
S4、启动激光位移传感器检测反馈系统，通过对刀器使得激光位移传感器的测量焦点定位在超声刀具上，通过数据处理系统将机床的位置信息同步至装置；S4. Start the laser displacement sensor detection feedback system, position the measurement focus of the laser displacement sensor on the ultrasonic tool through the tool setter, and synchronize the position information of the machine tool to the device through the data processing system;
S5、启动装置，在空载情况下对激光位移传感器和声发射传感器进行高频采样记录至少一个周期的空载时振幅与电信号对应关系；S5. Start the device, perform high-frequency sampling on the laser displacement sensor and the acoustic emission sensor under no-load conditions, and record the corresponding relationship between the amplitude and the electrical signal at no-load for at least one cycle;
S6、在工作状态下对声发射感器进行高频采样，超声刀具上的声发射传感器通过接收应力波的变化转化为电信号，根据记录空载振幅与电信号对应关系，得到工作状态下的振幅，并将处理计算出两个传感器的振幅求平均值，在显示屏上输出平均值；S6. Perform high-frequency sampling of the acoustic emission sensor in the working state. The acoustic emission sensor on the ultrasonic tool converts it into an electrical signal by receiving changes in stress waves. According to the corresponding relationship between the recorded no-load amplitude and the electrical signal, the working state is obtained. amplitude, and process to calculate the average of the amplitudes of the two sensors, and output the average value on the display;
S7、启动系统，工件车削开始，超声刀具进给，声发射传感器进行高频采样，采样数据经过数据处理系统同步到计算机中，实现对于加工过程中的振幅实时监控；S7. Start the system, start turning the workpiece, feed the ultrasonic tool, and perform high-frequency sampling with the acoustic emission sensor. The sampling data is synchronized to the computer through the data processing system to realize real-time monitoring of the amplitude during the processing process;
S8、将已有数据输入至计算机构建的RBF神经网络中；S8. Input the existing data into the RBF neural network built by the computer;
S9、采用RBF神经网络离线建立谐振频率、换能器温度与影响振幅的控制电压变化量的关系模型，通过对大量离线数据采用神经网络进行训练，逼近得到影响振幅的控制电压量与谐振频率、换能器温度的非线性关系函数；S9. Use the RBF neural network to establish an offline relationship model between the resonant frequency, transducer temperature and the control voltage change that affects the amplitude. By using the neural network to train a large amount of offline data, the control voltage that affects the amplitude and the resonant frequency are approximated. Nonlinear relationship function of transducer temperature;
S10、通过神经网络的数据处理得影响振幅的控制电压变化量的关系，通过调节相关参数而达到稳定振幅的作用；S10. Through the data processing of the neural network, the relationship between the control voltage changes that affect the amplitude is obtained, and the amplitude is stabilized by adjusting the relevant parameters;
S11、检测反馈系统中，激光位移传感器进行高频采样，采样数据经过数据处理系统同步到计算机中，实现对加工过程中稳定振幅结果的验证；S11. In the detection feedback system, the laser displacement sensor performs high-frequency sampling, and the sampling data is synchronized to the computer through the data processing system to verify the stable amplitude results during the processing process;
S12、如若振幅稳定性的结果较差，可将激光位移传感器采集的数据再次输入到神经网络中进行数据处理，对于振幅稳定性进行复反馈调节；S12. If the amplitude stability result is poor, the data collected by the laser displacement sensor can be input into the neural network again for data processing, and complex feedback adjustment can be performed on the amplitude stability;
S13、车削加工，完成轴向100mm进给之后完成加工过程；S13, turning processing, complete the processing process after completing the axial 100mm feed;
S14、将工件取下，放在电子显微镜下，观察表面划痕情况，结合加工过程中所采集的数据，得出划痕的产生与进给量，振幅的关系。S14. Remove the workpiece and place it under an electron microscope to observe the scratches on the surface. Combined with the data collected during the processing, the relationship between the occurrence of scratches, the feed amount and the amplitude can be obtained.
优选地，所述S4中通过对刀器使得激光位移传感器的测量焦点定位在超声刀具上，具体包括：Preferably, in S4, the measurement focus of the laser displacement sensor is positioned on the ultrasonic tool through the tool setter, which specifically includes:
S41、启动装置，对刀器安装的底板与基座相互垂直，使得对刀器的测跕与激光位移传感器的测量焦点处于同一平面中；S41. Start the device, and the bottom plate and the base where the tool setter is installed are perpendicular to each other, so that the measurement tip of the tool setter and the measurement focus of the laser displacement sensor are in the same plane;
S42、系统运行，三个直线运动模组在电机的驱动下使对刀器的测砧与超声刀具接触，完成对刀的同时使得激光位移传感器测量焦点落到超声加工的超声刀具上；S42. When the system is running, the three linear motion modules are driven by the motor to bring the anvil of the tool setter into contact with the ultrasonic tool. When the tool setting is completed, the measurement focus of the laser displacement sensor falls on the ultrasonic tool for ultrasonic processing;
S43、测量焦点定位完成后，通过铰链连接的底板反转90°使底板与基座相贴合，同时将系统的位置信息与车床进给系统同步，通过数据处理系统实现测量平台与车刀同步进给运动，保证激光位移传感器的测量焦点始终在超声刀具上，从而实现实时测量。S43. After the measurement focus positioning is completed, the base plate connected by the hinge is reversed 90° to fit the base plate and the base. At the same time, the position information of the system is synchronized with the lathe feed system, and the measurement platform and the turning tool are synchronized through the data processing system. The feed movement ensures that the measurement focus of the laser displacement sensor is always on the ultrasonic tool, thereby achieving real-time measurement.
本发明所述的硬脆材料单颗磨粒超声辅助加工过程划痕控制及振幅稳定性的方法和装置的优点和积极效果是：The advantages and positive effects of the method and device for scratch control and amplitude stability during ultrasonic-assisted machining of single-grain abrasive materials of hard and brittle materials according to the present invention are:
1、本发明通过超声刀具在工作过程中的高频振动，引起超声刀具本身应力波发生变化，声发射传感器捕捉到应力的波动并将其转化为电信号，根据电信号变化计算得到振幅，振幅的测量装置和方法简单、准确率高。通过计算两个传感器电信号变化对应的振幅的平均值，作为最终的测量结果，提高了精度，减少了误差。1. The present invention uses the high-frequency vibration of the ultrasonic tool during the working process to cause the stress wave of the ultrasonic tool itself to change. The acoustic emission sensor captures the stress fluctuation and converts it into an electrical signal. The amplitude is calculated based on the change in the electrical signal. The measuring devices and methods are simple and highly accurate. By calculating the average amplitude corresponding to the changes in the electrical signals of the two sensors as the final measurement result, the accuracy is improved and the error is reduced.
2、本发明构建神经网络处理数据，得出稳定振幅的修正量，通过数据处理系统输出，以此来稳定振幅。使用神经网络对多重因素进行修正，可使得振幅的稳定更高效，更准确。2. The present invention constructs a neural network to process data, obtains a correction amount that stabilizes the amplitude, and outputs it through the data processing system to stabilize the amplitude. Using neural networks to correct multiple factors can make amplitude stabilization more efficient and accurate.
3、本发明设置自动对焦系统，运用对刀器的辅助来实现激光位移传感器的对焦，通过直线运动模组的位置信息与机床进给系统同步实现在加工过程中激光位移传感器与超声刀具位置的相对静止，实现对于超声刀具振幅的实时检测与监控。3. The present invention sets up an automatic focusing system, uses the assistance of the tool setter to realize the focusing of the laser displacement sensor, and synchronizes the position information of the linear motion module with the machine tool feed system to realize the position adjustment of the laser displacement sensor and the ultrasonic tool during the processing process. Relatively stationary, it enables real-time detection and monitoring of the amplitude of the ultrasonic tool.
4、本发明两套相对独立的振幅检测系统，相互验证测量结果，构成复反馈系统，极大提高了系统控制振幅稳定性的效果。4. The present invention has two relatively independent amplitude detection systems that verify each other's measurement results and form a complex feedback system, which greatly improves the effect of system control amplitude stability.
附图说明Description of the drawings
图1为本发明硬脆材料单颗磨粒超声划痕振幅稳定性控制装置的结构示意图一；Figure 1 is a schematic structural diagram of the single abrasive particle ultrasonic scratch amplitude stability control device of the present invention for hard and brittle materials;
图2为本发明硬脆材料单颗磨粒超声划痕振幅稳定性控制装置中超声辅助加工刀架和声发射传感器测振幅装置的结构示意图；Figure 2 is a schematic structural diagram of the ultrasonic-assisted machining tool holder and the acoustic emission sensor amplitude measuring device in the ultrasonic scratch amplitude stability control device for single abrasive particles of hard and brittle materials according to the present invention;
图3为本发明硬脆材料单颗磨粒超声划痕振幅稳定性控制装置中激光位移传感器检测反馈系统的结构示意图一；Figure 3 is a schematic structural diagram of the laser displacement sensor detection feedback system in the ultrasonic scratch amplitude stability control device for single-grain abrasive materials of the present invention;
图4为本发明硬脆材料单颗磨粒超声划痕振幅稳定性控制装置中激光位移传感器检测反馈系统的结构示意图二；Figure 4 is a schematic structural diagram 2 of the laser displacement sensor detection feedback system in the ultrasonic scratch amplitude stability control device for single abrasive particles of hard and brittle materials according to the present invention;
图5为本发明硬脆材料单颗磨粒超声划痕振幅稳定性控制装置中激光位移传感器检测反馈系统的结构示意图三；Figure 5 is a schematic structural diagram three of the laser displacement sensor detection feedback system in the ultrasonic scratch amplitude stability control device for single abrasive particles of hard and brittle materials according to the present invention;
图6为本发明硬脆材料单颗磨粒超声划痕振幅稳定性控制装置的结构示意图二。Figure 6 is a schematic structural diagram 2 of the ultrasonic scratch amplitude stability control device for single abrasive particles of hard and brittle materials according to the present invention.
附图标记Reference signs
1、机床；2、待加工工件；3、超声辅助加工刀架；4、激光位移传感器检测反馈系统；5、单颗磨粒；6、超声刀具；7、声发射传感器；8、变幅杆；9、换能器；10、激光位移传感器；11、对刀器；12、底板；13、基座；14、直线运动模组；15、铰链机构；16、数据处理系统；17、超声电源；18、计算机。1. Machine tool; 2. Workpiece to be processed; 3. Ultrasonic-assisted processing tool holder; 4. Laser displacement sensor detection feedback system; 5. Single abrasive grain; 6. Ultrasonic tool; 7. Acoustic emission sensor; 8. Horn ; 9. Transducer; 10. Laser displacement sensor; 11. Tool setter; 12. Base plate; 13. Base; 14. Linear motion module; 15. Hinge mechanism; 16. Data processing system; 17. Ultrasonic power supply ; 18. Computer.
具体实施方式Detailed ways
下面将结合本发明实施例对本发明技术方案进行清楚、完整地描述，显然，所描述的实施例仅仅是本发明一部分实施例，而不是全部的实施例。The technical solution of the present invention will be clearly and completely described below with reference to the embodiments of the present invention. Obviously, the described embodiments are only some of the embodiments of the present invention, rather than all the embodiments.
实施例1：Example 1:
图1为本发明硬脆材料单颗磨粒超声划痕振幅稳定性控制装置的结构示意图，如图1、6所示，硬脆材料单颗磨粒超声划痕振幅稳定性控制装置，包括超声辅助加工刀架3、声发射传感器测振幅装置和激光位移传感器检测反馈系统4。声发射传感器7通过无线传输连接到数据处理系统16，激光位移传感器检测反馈系统4上的激光位移传感器10通过连接线与数据处理系统16相连接，直线运动模组14通过数据处理系统16与车床进给系统相连接。Figure 1 is a schematic structural diagram of the ultrasonic scratch amplitude stability control device for a single abrasive particle for hard and brittle materials according to the present invention. As shown in Figures 1 and 6, the ultrasonic scratch amplitude stability control device for a single abrasive particle for hard and brittle materials includes ultrasonic Auxiliary processing tool holder 3, acoustic emission sensor amplitude measurement device and laser displacement sensor detection feedback system 4. The acoustic emission sensor 7 is connected to the data processing system 16 through wireless transmission, the laser displacement sensor 10 on the laser displacement sensor detection feedback system 4 is connected to the data processing system 16 through a connecting line, and the linear motion module 14 is connected to the lathe through the data processing system 16 Feed system is connected.
声发射传感器测振幅装置还包括调节装置；调节装置：包括可调节功率的超声电源17、处理器、计算机18等。The amplitude measurement device of the acoustic emission sensor also includes an adjustment device; the adjustment device includes an ultrasonic power supply 17 with adjustable power, a processor, a computer 18, etc.
图2为本发明硬脆材料单颗磨粒超声划痕振幅稳定性控制装置的超声辅助加工刀架3和声发射传感器测振幅装置的结构结构示意图，如图所示，换能器9下方安装变幅杆8，超声刀具6安装在变幅杆8的底端，两者紧密接触，单颗磨粒5置于超声刀具6顶端且表面设有声发射传感器7；单颗磨粒5为待加工工件2；换能器9通过连接线与超声电源17相连接。Figure 2 is a schematic structural diagram of the ultrasonic assisted machining tool holder 3 and the acoustic emission sensor amplitude measuring device of the single abrasive particle ultrasonic scratch amplitude stability control device of the present invention. As shown in the figure, the transducer 9 is installed below The horn 8 and the ultrasonic tool 6 are installed at the bottom of the horn 8. The two are in close contact. The single abrasive grain 5 is placed on the top of the ultrasonic tool 6 and an acoustic emission sensor 7 is provided on the surface; the single abrasive grain 5 is to be processed. Workpiece 2; transducer 9 is connected to ultrasonic power supply 17 through a connecting wire.
图3为本发明硬脆材料单颗磨粒超声划痕振幅稳定性控制装置的激光位移传感器检测反馈系统4的示意图，如图3、4、5所示，对刀器11安装在底板12，对刀器11的测跕与激光位移传感器10的测量焦点在同一平面上，底板12通过铰链机构15与基座13连接，激光位移传感器10安装在基座13，整体机构安装在直线运动模组14。Figure 3 is a schematic diagram of the laser displacement sensor detection feedback system 4 of the single-grain abrasive particle ultrasonic scratch amplitude stability control device of the present invention. As shown in Figures 3, 4, and 5, the tool setter 11 is installed on the base plate 12. The measurement tip of the tool setter 11 is on the same plane as the measurement focus of the laser displacement sensor 10. The base plate 12 is connected to the base 13 through the hinge mechanism 15. The laser displacement sensor 10 is installed on the base 13. The overall mechanism is installed on the linear motion module. 14.
本发明能解决现有硬脆材料超声辅助划痕过程中，振幅在力负载作用下衰减的现象，可实现稳定振幅的超声划痕试验，为揭示超声振动对硬脆材料脆延切削性能影响机制奠定基础。The present invention can solve the phenomenon of amplitude attenuation under force load during the existing ultrasonic-assisted scratching process of hard and brittle materials, and can realize ultrasonic scratching tests with stable amplitude, in order to reveal the mechanism of the influence of ultrasonic vibration on the brittle and ductile cutting performance of hard and brittle materials. Lay the foundation.
实施例2：Example 2:
采用上述控制装置进行的硬脆材料单颗磨粒超声划痕振幅稳定性控制方法，控制方法包括以下步骤：A method for controlling the amplitude stability of ultrasonic scratches of single abrasive particles on hard and brittle materials using the above control device. The control method includes the following steps:
S1、将换能器9通过导线连接进行供电，机床进给系统、声发射传感器7与数据处理系统16连接，数据处理系统16与计算机18相连接；S1. Connect the transducer 9 through wires for power supply, connect the machine tool feed system and the acoustic emission sensor 7 to the data processing system 16, and connect the data processing system 16 to the computer 18;
S2、通过数据处理系统16对声发射传感器7进行一次采样，标记为初始点；S2. Sample the acoustic emission sensor 7 once through the data processing system 16 and mark it as the initial point;
S3、将激光位移传感器检测反馈系统4中的直线运动模组14中的电机与数据处理系统16连接；S3. Connect the motor in the linear motion module 14 in the laser displacement sensor detection feedback system 4 to the data processing system 16;
S4、启动激光位移传感器检测反馈系统4，通过对刀器11使得激光位移传感器10的测量焦点定位在超声刀具6上，通过数据处理系统16将机床1的位置信息同步至装置；S4. Start the laser displacement sensor detection feedback system 4, position the measurement focus of the laser displacement sensor 10 on the ultrasonic tool 6 through the tool setter 11, and synchronize the position information of the machine tool 1 to the device through the data processing system 16;
具体包括如下步骤：Specifically, it includes the following steps:
S41、启动装置，对刀器11安装的底板12与基座13相互垂直，使得对刀器11的测跕与激光位移传感器10的测量焦点处于同一平面中；S41. Start the device, and the bottom plate 12 on which the tool setter 11 is installed and the base 13 are perpendicular to each other, so that the measurement tip of the tool setter 11 and the measurement focus of the laser displacement sensor 10 are in the same plane;
S42、系统运行，三个直线运动模组14在电机的驱动下使对刀器11的测砧与超声刀具6接触，完成对刀的同时使得激光位移传感器10测量焦点落到超声加工的超声刀具6上；S42. The system is running. The three linear motion modules 14 are driven by the motor to make the anvil of the tool setter 11 contact the ultrasonic tool 6. When the tool setting is completed, the measurement focus of the laser displacement sensor 10 falls on the ultrasonic tool for ultrasonic processing. 6 on;
S43、测量焦点定位完成后，通过铰链连接的底板12反转90°使底板12与基座13相贴合，同时将系统的位置信息与车床进给系统同步，通过数据处理系统16实现测量平台与车刀同步进给运动，保证激光位移传感器10的测量焦点始终在超声刀具6上，从而实现实时测量；S43. After the measurement focus positioning is completed, the bottom plate 12 connected through the hinge is reversed 90° to fit the bottom plate 12 with the base 13. At the same time, the position information of the system is synchronized with the lathe feed system, and the measurement platform is realized through the data processing system 16 The feed movement is synchronized with the turning tool to ensure that the measurement focus of the laser displacement sensor 10 is always on the ultrasonic tool 6, thereby achieving real-time measurement;
S5、启动装置，在空载情况下对激光位移传感器10和声发射传感器7进行高频采样记录至少一个周期的空载时振幅与电信号对应关系；S5. Start the device, perform high-frequency sampling on the laser displacement sensor 10 and the acoustic emission sensor 7 under no-load conditions, and record the corresponding relationship between the amplitude and the electrical signal at no-load for at least one cycle;
S6、在工作状态下对声发射传感器7进行高频采样，超声刀具6上的声发射传感器7通过接收应力波的变化转化为电信号，根据记录空载振幅与电信号对应关系，得到工作状态下的振幅，并将处理计算出两个声发射传感器7的振幅求平均值，在显示屏上输出平均值；S6. Perform high-frequency sampling of the acoustic emission sensor 7 in the working state. The acoustic emission sensor 7 on the ultrasonic tool 6 converts it into an electrical signal by receiving changes in stress waves. The working state is obtained according to the corresponding relationship between the recorded no-load amplitude and the electrical signal. The amplitude of the two acoustic emission sensors 7 is calculated and averaged, and the average value is output on the display screen;
S7、启动系统，工件车削开始，超声刀具6进给，声发射传感器7进行高频采样，采样数据经过数据处理系统16同步到计算机18中，实现对于加工过程中的振幅实时监控；S7. Start the system, start turning the workpiece, the ultrasonic tool 6 feeds, the acoustic emission sensor 7 performs high-frequency sampling, and the sampling data is synchronized to the computer 18 through the data processing system 16 to realize real-time monitoring of the amplitude during the processing process;
S8、将已有数据输入至计算机18构建的RBF神经网络中；S8. Input the existing data into the RBF neural network constructed by the computer 18;
S9、采用RBF神经网络离线建立谐振频率、换能器9温度与影响振幅的控制电压变化量的关系模型，通过对大量离线数据采用神经网络进行训练，逼近得到影响振幅的控制电压量与谐振频率、换能器9温度的非线性关系函数；S9. Use the RBF neural network to offline establish the relationship model between the resonant frequency, the temperature of the transducer 9 and the control voltage change that affects the amplitude. By using the neural network to train a large amount of offline data, the control voltage and resonant frequency that affect the amplitude are approximated. , the nonlinear relationship function of the temperature of the transducer 9;
S10、通过神经网络的数据处理得影响振幅的控制电压变化量的关系，通过调节相关参数而达到稳定振幅的作用；S10. Through the data processing of the neural network, the relationship between the control voltage changes that affect the amplitude is obtained, and the amplitude is stabilized by adjusting the relevant parameters;
S11、激光位移传感器检测反馈系统4中，激光位移传感器10进行高频采样，采样数据经过数据处理系统16同步到计算机18中，实现对加工过程中稳定振幅结果的验证；S11. In the laser displacement sensor detection feedback system 4, the laser displacement sensor 10 performs high-frequency sampling, and the sampling data is synchronized to the computer 18 through the data processing system 16 to achieve verification of the stable amplitude results during the processing process;
S12、如若振幅稳定性的结果较差，可将激光位移传感器10采集的数据再次输入到神经网络中进行数据处理，对于振幅稳定性进行复反馈调节；S12. If the amplitude stability result is poor, the data collected by the laser displacement sensor 10 can be input into the neural network again for data processing, and complex feedback adjustment can be performed on the amplitude stability;
S13、车削加工，完成轴向100mm进给之后完成加工过程；S13, turning processing, complete the processing process after completing the axial 100mm feed;
S14、将工件取下，放在电子显微镜下，观察表面划痕情况，结合加工过程中所采集的数据，可以得出划痕的产生与进给量、振幅的关系。S14. Remove the workpiece and place it under an electron microscope to observe the scratches on the surface. Combined with the data collected during the processing, the relationship between the occurrence of scratches, feed amount and amplitude can be obtained.
因此，本发明采用上述硬脆材料单颗磨粒超声划痕振幅稳定性控制方法及装置，能够解决硬脆材料超声加工过程中因振幅不稳定引起的材料加工质量差，划痕产生的问题。Therefore, the present invention adopts the above-mentioned single abrasive particle ultrasonic scratch amplitude stability control method and device for hard and brittle materials, which can solve the problem of poor material processing quality and scratches caused by unstable amplitude during ultrasonic processing of hard and brittle materials.
以上显示和描述了本发明的基本原理、主要特征和本发明的优点。本行业的技术人员应该了解，本发明不受上述实施例的限制，上述实施例和说明书中描述的仅为本发明的优选例，并不用来限制本发明，在不脱离本发明精神和范围的前提下，本发明还会有各种变化和改进，这些变化和改进都落入要求保护的本发明范围内。本发明要求保护范围由所附的权利要求书及其等效物界定。The basic principles, main features and advantages of the present invention have been shown and described above. Those skilled in the industry should understand that the present invention is not limited by the above embodiments. The above embodiments and descriptions are only preferred examples of the present invention and are not used to limit the present invention. Under the premise, there will be various changes and improvements in the present invention, and these changes and improvements all fall within the scope of the claimed invention. The scope of protection of the present invention is defined by the appended claims and their equivalents.
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