CN103557931B - A kind of ultrasonic amplitude measurement mechanism and method based on constant force control - Google Patents
A kind of ultrasonic amplitude measurement mechanism and method based on constant force control Download PDFInfo
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- CN103557931B CN103557931B CN201310556682.XA CN201310556682A CN103557931B CN 103557931 B CN103557931 B CN 103557931B CN 201310556682 A CN201310556682 A CN 201310556682A CN 103557931 B CN103557931 B CN 103557931B
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Abstract
The present invention relates to the measurement of ultrasonic amplitude in Ultrasonic machining, is a kind of ultrasonic amplitude measurement mechanism and method based on constant force control. Utilize accurate micro-three-dimensional motion platform Z axis motion to be combined with pressure sensor and form closed-loop control system, without ultrasonic with have ultrasonication under ultrasonic vibration system condition, realize the measurement to ultrasonic amplitude by the coordinate difference that records twice motion of accurate micro-three-dimensional motion platform Z axis, less demanding to ambient noise interference; And the precision and the pressure sensor sample frequency that improve accurate micro-three-dimensional motion platform can improve certainty of measurement, can be as accurate as in theory nanoscale.
Description
Technical field
The present invention relates to the measurement to amplitude, especially a kind of ultrasonic amplitude measurement mechanism based on constant force controlAnd method.
Background technology
Ultrasonic machining is to utilize the instrument of ultrasonic vibration, in the liquid that has abrasive material or in dry grinding material, produces abrasive materialImpact, rubbing down, hydraulic shock and consequent cavitation effect remove material, or give instrument or workpieceApply in a certain direction ultrasonic vibration and process, or the processing side that utilizes ultrasonic vibration that workpiece is mutually combinedMethod. Ultrasonic machining both do not relied on the electric conductivity of material, without macroscopical mechanicals efforts, there is no heat effect, againCan process high-aspect-ratio 3-D solid structure, surface quality of workpieces and machining accuracy are all better, have determined ultrasonicProcessing technology has advantageous advantage aspect metal and hard brittle materia processing.
In Ultrasonic machining, in the situation that other conditions are constant, increase tool amplitude can improve the speed of Ultrasonic machiningDegree, but instrument end face amplitude not can infinitely strengthen. Therefore, making instrument end face do peak swing just movesBecome a vital problem of boosting productivity.
The size of ultrasonic amplitude, can reflect the size of acoustical power output, and has reflected generator, changesThe effect quality of energy device, ultrasonic transformer and instrument each cascade link frequency and electricity coupling, to material in processMaterial clearance, surface roughness, tool wear etc. have material impact, thereby the measurement of amplitude is ultrasonic addingFrock is put a major issue in development and application.
The method that is suitable at present measuring amplitude mainly contains: physical observation method, optical method, electrical measuring method etc.
Physical observation method is mainly to utilize high frequency vibration characteristic, and vision retention effect measures, or usesLever principle is measured amplitude; Optical method belongs to eyes with non-contact method, utilizes optical lever principle, reading microscope, lightWave interference principle, laser dopplers etc. are measured, and contemporary optics measuring system has far exceeded in the pastThe concept of that simple laser detecting apparatus plus signal treatment circuit, light, mechanical, electrical and computer technologyIn conjunction with, the particularly application of graph image technology, signal modulation technique, frequency modulation technology, feedback principle etc.Application, making to measure and controlling has become a complete organism; Electrical measuring method belongs to contact method, will be byThe vibratory output of surveying object converts electric weight to, and then power consumption tester is measured. Again by subsequent treatment mouldPiece is to result a kind of method of being further analyzed and processing of measuring, be current extensive use method itOne.
Physical observation method vibration measuring width, method is simple, but test time can add certain load to workpiece, impactTest result, is only applicable to large amplitude rough measure; Optical method, is not subject to the interference of electromagnetic field, and certainty of measurement is high,Be suitable for test specimen little to quality and that be difficult for sensor installation and make non-cpntact measurement. Accurate measurement and sensor,Vialog is used morely in demarcating, but apparatus expensive is measured cost high; Electrical measuring method highly sensitive, frequencyScope and dynamically, the range of linearity is wide, is convenient to analyze and remote measurement, certainty of measurement is higher, but it is dry to be subject to electromagnetic fieldDisturbing, affect certainty of measurement, is the method the most extensively adopting at present.
Summary of the invention
The object of the invention is to consider the problems referred to above and provide a kind of ultrasonic amplitude based on constant force control to measureDevice; Meanwhile, the present invention also provides the method that adopts described device to measure amplitude, and can be effectiveSolution simple, the accurate measurement to ultrasonic vibration installation amplitude.
For achieving the above object, the technical scheme that the present invention takes is: a kind of Under Ultrasonic Vibration based on constant force controlAmplitude measuring device, comprises ultrasonic vibration processing unit (plant), pressure sensor, accurate micro-three-dimensional motion platform; InstituteState accurate micro-three-dimensional motion platform top pressure sensor is set, described pressure sensor faces Under Ultrasonic VibrationMoving processing unit (plant); Described pressure sensor is connected with computer by data collecting system; Described precisionMicro-three-dimensional motion platform is connected with computer by kinetic control system.
As the preferred embodiment of the ultrasonic amplitude measurement mechanism based on constant force control of the present invention, instituteThe minimum resolution of stating X-axis, Y-axis and Z axis in accurate micro-three-dimensional motion platform is all not more than 0.1 micron.
As the preferred embodiment of the ultrasonic amplitude measurement mechanism based on constant force control of the present invention, instituteState ultrasonic vibration processing unit (plant) comprise vertical slipway, ultrasonic vibration system, main shaft, ultrasonic-frequency power supply, chuck,Tool heads, described tool heads is fixed on ultrasonic vibration system by chuck, and ultrasonic vibration system is fixed onOn main shaft, main shaft is fixed on vertical slipway, and described vertical slipway drive shaft moves up and down, ultrasonic electricSource is connected with ultrasonic vibration system.
As the preferred embodiment of the ultrasonic amplitude measurement mechanism based on constant force control of the present invention, instituteState ultrasonic vibration processing unit (plant) comprise vertical slipway, main shaft, chuck, tool heads, ultrasonic vibration workbench,Ultrasonic-frequency power supply, described tool heads is fixed on main shaft by chuck, and main shaft is fixed on vertical slipway, instituteThe vertical slipway drive shaft of stating moves up and down, and described ultrasonic-frequency power supply is connected with ultrasonic vibration workbench, instituteThe ultrasonic vibration workbench of stating faces main shaft and is fixed on described pressure sensor.
As the preferred embodiment of the ultrasonic amplitude measurement mechanism based on constant force control of the present invention, instituteStating ultrasonic vibration processing unit (plant) is ultrasonic vibration processing unit (plant) or fine ultrasonic vibration processing unit (plant).
In addition, the present invention also provides a kind of said apparatus that uses to implement to survey based on the ultrasonic amplitude of constant force controlMetering method, comprises the following steps:
(1) desired value of the power value setting pressure sensor showing in real time according to data collecting system;
(2) drive ultrasonic vibration processing unit (plant) near pressure sensor;
(3) drive accurate micro-three-dimensional motion platform, add in the ultrasonic vibration of Z-direction convergence with the speed of settingWork system, gathers the measured value of pressure sensor end, when measured value reaches desired value by data collecting systemTime, the automatic stop motion of Z axis, records Z axis coordinate Z1, then makes accurate micro-three by kinetic control systemMaintenance and operation moving platform moves to initial position;
(4) open ultrasonic-frequency power supply, make ultrasonic vibration processing unit (plant) do dither; Drive accurate micro-three maintenance and operationsMoving platform, in Z-direction convergence ultrasonic vibration system of processing, passes through data collecting system with the speed setGather the measured value of pressure sensor end, in the time that measured value reaches desired value, the automatic stop motion of Z axis, recordZ axis coordinate Z2, then makes accurate micro-three-dimensional motion platform and ultrasonic vibration add frock by kinetic control systemPut and move to initial position;
(5) amplitude of calculating ultrasonic vibration processing unit (plant) is Z1-Z2, repeatedly measures and averages and can askGo out the amplitude of vibration processing device under certain power effect.
As the preferred embodiment of the ultrasonic amplitude measuring method based on constant force control of the present invention, described inIn accurate micro-three-dimensional motion platform, the minimum resolution of X-axis, Y-axis and Z axis is all not more than 0.1 micron.
As the preferred embodiment of the ultrasonic amplitude measuring method based on constant force control of the present invention, described inUltrasonic vibration processing unit (plant) comprises vertical slipway, ultrasonic vibration system, main shaft, ultrasonic-frequency power supply, chuck, workTool head, described tool heads is fixed on ultrasonic vibration system by chuck, and ultrasonic vibration system is fixed on masterOn axle, main shaft is fixed on vertical slipway, and described vertical slipway drive shaft moves up and down, ultrasonic-frequency power supplyBe connected with ultrasonic vibration system.
As the preferred embodiment of the ultrasonic amplitude measuring method based on constant force control of the present invention, described inUltrasonic vibration processing unit (plant) comprises vertical slipway, main shaft, chuck, tool heads, ultrasonic vibration workbench, superAcoustic-electric source, described tool heads is fixed on main shaft by chuck, and main shaft is fixed on vertical slipway, described inVertical slipway drive shaft move up and down, described ultrasonic-frequency power supply is connected with ultrasonic vibration workbench, described inUltrasonic vibration workbench face main shaft and be fixed on described pressure sensor.
As the preferred embodiment of the ultrasonic amplitude measuring method based on constant force control of the present invention, described inUltrasonic vibration processing unit (plant) is ultrasonic vibration processing unit (plant) or fine ultrasonic vibration processing unit (plant).
The present invention utilizes accurate micro-three-dimensional motion platform Z axis motion to be combined with pressure sensor and forms closed-loop controlSystem, without ultrasonic with have ultrasonication under ultrasonic vibration system condition, by recording accurate micro-three maintenance and operationsThe coordinate difference of twice motion of moving platform Z axis realizes the measurement to ultrasonic amplitude, to ambient noise interference requirementNot high; And the precision and the pressure sensor sample frequency that improve accurate micro-three-dimensional motion platform can improve surveyAccuracy of measurement, can be as accurate as nanoscale in theory.
Brief description of the drawings
Fig. 1 is the structural representation of a kind of embodiment of ultrasonic vibration main shaft amplitude measurement of the present invention.
Fig. 2 is the structural representation of the another kind of embodiment of ultrasonic vibration workbench amplitude measurement of the present invention.
Fig. 3 is that ultrasonic amplitude of the present invention is measured control interface.
Fig. 4 is the flow chart that ultrasonic amplitude of the present invention is measured.
In figure, 1 be accurate micro-three-dimensional motion platform, 2 for pressure sensor, 3 for tool heads, 4 for chuck,5 be front match block, 6 for piezoelectric ceramic piece, 7 for rear match block, 8 for pre-stressed bolt, 9 for ultrasonic-frequency power supply,10 is kinetic control system.
Detailed description of the invention
For the object, technical solutions and advantages of the present invention are better described, below in conjunction with accompanying drawing and concrete realThe invention will be further described to execute example.
Embodiment 1
As shown in Fig. 1,3,4, a kind of ultrasonic vibration main shaft amplitude measuring apparatus based on constant force control, bagDraw together vertical slipway (not shown in FIG.), main shaft, ultrasonic-frequency power supply 9, accurate micro-three-dimensional motion platform 1, pressureSensor 2, tool heads 3, chuck 4, front match block 5, piezoelectric ceramic piece 6, rear match block 7, in advance shouldPower bolt 8, described tool heads 3 is fixed on ultrasonic vibration system by chuck 4, ultrasonic vibration systemBe fixed on main shaft, main shaft is fixed on vertical slipway, and described vertical slipway drive shaft moves up and down,At amplitude measurement initial period, because the stroke of the micro-three-dimensional motion platform 1 of precision is smaller, be by verticalSlide unit drive shaft is near pressure sensor 2.
Ultrasonic vibration system comprises that front match block 5, piezoelectric ceramic piece 6 form with rear match block 7. Whole superAcoustic vibration system is half wavelength, and ultrasonic vibration system is fixed on main shaft by the nodal section in front match block 5,Main shaft is fixed on vertical slipway, and tool heads 3 is fastened in front match block 5 by chuck 4. Instrument3 do not need on-line machining, do not need it is rotated with main shaft, as long as its end face is positioned at yetIn sensor horizontal cross-section and can be by mobile and pressure sensor plane contact.
When described pressure sensor 2 bears certain pressure when surface, can will show by data collecting systemThe force value of face shows at control interface edge.
Ultrasonic-frequency power supply 9 is connected with ultrasonic vibration system, opens ultrasonic-frequency power supply 9, and ultrasonic vibration system can be doneDither, thus drive tool heads dither.
Described pressure sensor 2 faces main shaft, if main shaft departs from pressure sensor 2, and can be byThe position of the motor adjustment pressure sensor of the X/Y axle in accurate micro-three-dimensional motion platform.
Described pressure sensor 2 is connected with computer by data collecting system, passes through data collecting systemSignal to pressure sensor output amplifies, and then by data collecting card, amplifying signal is enteredRow high frequency gathers, and then in the control interface of computer, demonstrates measured value.
The micro-three-dimensional motion platform 1 of described precision is connected with computer by kinetic control system 10; DescribedIn accurate micro-three-dimensional motion platform, the minimum resolution of X-axis, Y-axis and Z axis is all not more than 0.1 micron, essenceClose micro-three-dimensional motion platform and vertical slipway are used in conjunction with at measurement initial period, when main shaft is near pressure sensingWhen device 2, vertical slipway stop motion, accurate micro-three-dimensional motion platform continues motion, further measures.
In addition, as shown in Fig. 1,3,4, implement the ultrasonic amplitude measuring method based on constant force control, firstMeasure equipment according to installing shown in Fig. 1, connect measuring circuit, start constant force control system and openSoftware control interface. Then according to desired value of the design of pressure showing in software interface, reset essenceActuating speed and the coordinate of close micro-three-dimensional motion platform Z axis; Then drive accurate micro-three-dimensional motion platform with verticalFormula slide unit motion, makes tool heads 3 in Fig. 1 near sensor 2 but does not contact, and now completes and measuresThe thick tool setting of journey; Drive accurate micro-three-dimensional motion platform Z axis to move upward by kinetic control system 10,Gather the measured value of pressure sensor 2 ends by data collecting system, from the control interface of Fig. 3, observe and surveyValue, in the time that measured value is less than desired value, Z axis continues motion; In the time that measured value reaches desired value, Z axisAutomatically stop motion; Record Z axis coordinate Z1, then make accurate micro-three maintenance and operations by kinetic control system 10Moving platform moves to initial position; Open ultrasonic-frequency power supply 9 drive shaft vibrations, keep all control parametersConstant, again drive accurate micro-three-dimensional platform Z axis to move upward, gather pressure by data collecting system and passThe measured value of sensor 2 ends is observed measured value from the control interface of Fig. 3, in the time that measured value is less than desired value,Z axis continues motion; In the time that measured value reaches desired value, the automatic stop motion of Z axis, records Z axis coordinate Z2,Then make accurate micro-three-dimensional motion platform and motion of main shaft to initial position by kinetic control system 10; MeterThe amplitude of calculating ultrasonic vibration processing unit (plant) is A=Z1-Z2, repeatedly measures to average and can obtain specificThe amplitude of ultrasonic vibration main shaft under power effect.
Embodiment 2
As shown in Figure 2,3, 4, a kind of ultrasonic vibration workbench amplitude measuring apparatus based on constant force control,Comprise ultrasonic vibration workbench, vertical slipway (not shown in FIG.), main shaft 4, ultrasonic-frequency power supply 9, accurate micro-Three-dimensional motion platform 1, pressure sensor 2, tool heads 3, chuck, described tool heads 3 is consolidated by chuckFix on main shaft 4, main shaft 4 is fixed on vertical slipway, and described vertical slipway drive shaft 4 is transported up and downMoving, ultrasonic vibration workbench is fixed on pressure sensor. At amplitude measurement initial period, because precision is micro-The stroke of three-dimensional motion platform 1 is smaller, be by vertical slipway drive shaft near pressure sensor 2.
Ultrasonic vibration system in ultrasonic vibration workbench comprise front match block 5, piezoelectric ceramic piece 6 with rearJoining piece 7 forms. Ultrasonic vibration workbench is arranged on pressure sensor 2.
When described pressure sensor 2 bears certain pressure when surface, can will show by data collecting systemThe force value of face shows at control interface edge.
Ultrasonic-frequency power supply 9 is connected with ultrasonic vibration workbench, opens ultrasonic-frequency power supply 9, and ultrasonic-frequency power supply 9 drives superAcoustic vibration system dither, thus drive workbench can make dither.
The described ultrasonic vibration workbench being positioned on pressure sensor 2 faces main shaft, if main shaft departs fromUltrasonic vibration workbench, can be by the motor adjustment Under Ultrasonic Vibration of the X/Y axle in the micro-three-dimensional motion platform of precisionThe position of moving workbench.
Described pressure sensor 2 is connected with computer by data collecting system, passes through data collecting systemSignal to pressure sensor output amplifies, and then by data collecting card, amplifying signal is enteredRow high frequency gathers, and then in the control interface of computer, demonstrates measured value.
The micro-three-dimensional motion platform 1 of described precision is connected with computer by kinetic control system 10; DescribedIn accurate micro-three-dimensional motion platform, the minimum resolution of X-axis, Y-axis and Z axis is all not more than 0.1 micron, essenceClose micro-three-dimensional motion platform and vertical slipway are used in conjunction with at measurement initial period, when main shaft is near ultrasonic vibrationWhen workbench, vertical slipway stop motion, accurate micro-three-dimensional motion platform continues motion, further measures.
In addition, as shown in Figure 2,3, 4, implement the ultrasonic vibration workbench amplitude measurement based on constant force controlMethod, first measures equipment according to installing shown in Fig. 2, connects measuring circuit, starts constant force control systemUnite and open software control interface. Then according to target of the design of pressure showing in software interfaceBe worth, reset actuating speed and the coordinate of accurate micro-three-dimensional motion platform Z axis; Then drive accurate micro-three-dimensionalThe motion of motion platform and vertical slipway, makes tool heads 3 in Fig. 2 near workbench but does not contact, nowComplete the thick tool setting of measuring process; Drive accurate micro-three-dimensional motion platform Z axis by kinetic control system 10Move upward, gather the measured value of pressure sensor 2 ends by data collecting system, from control circle of Fig. 3In face, observe measured value, in the time that measured value is less than desired value, Z axis continues motion; When measured value reaches targetWhen value, the automatic stop motion of Z axis; Record Z axis coordinate Z1, then make essence by kinetic control system 10Close micro-three-dimensional motion platform moves initial position; Open ultrasonic-frequency power supply 9 and drive workbench vibration, keep allControl parameter constant, again drive accurate micro-three-dimensional platform Z axis to move upward, pass through data collecting systemGather the measured value of pressure sensor 2 ends, from the control interface of Fig. 3, observe measured value, when measured value littleIn the time of desired value, Z axis continues motion; In the time that measured value reaches desired value, the automatic stop motion of Z axis, noteRecord Z axis coordinate Z2, then makes accurate micro-three-dimensional motion platform and workbench fortune by kinetic control system 10Move initial position; The amplitude that calculates ultrasonic vibration processing unit (plant) is A=Z1-Z2, repeatedly measures and is averagedValue can be obtained the amplitude of ultrasonic vibration workbench under certain power effect.
The present invention utilizes accurate micro-three-dimensional motion platform Z axis motion to be combined with pressure sensor and forms closed loop controlSystem processed, without ultrasonic with have ultrasonication under ultrasonic vibration system condition, by recording accurate micro-three-dimensionalThe coordinate difference of twice motion of motion platform Z axis realizes the measurement to ultrasonic amplitude, and ambient noise interference is wantedAsk not high; And the precision and the pressure sensor sample frequency that improve accurate micro-three-dimensional motion platform can improveCertainty of measurement, can be as accurate as nanoscale in theory; Can measure the amplitude of ultrasonic machining device,Also can measure micro-ultrasonic amplitude.
The last above embodiment that it should be noted that of institute is only in order to technical scheme of the present invention to be described but not to thisThe restriction of invention protection domain, although the present invention is explained in detail with reference to preferred embodiment, this areaThose of ordinary skill should be appreciated that and can modify or be equal to replacement technical scheme of the present invention, andDo not depart from essence and the scope of technical solution of the present invention.
Claims (5)
1. ultrasonic based on constant force control that the use ultrasonic amplitude measurement mechanism based on constant force control is implementedVibration amplitude measurement method, the described ultrasonic amplitude measurement mechanism based on constant force control comprise ultrasonic vibration processing unit (plant),Pressure sensor, accurate micro-three-dimensional motion platform; The micro-three-dimensional motion platform of described precision top arranges pressure and passesSensor, described pressure sensor faces ultrasonic vibration processing unit (plant); Described pressure sensor is by numberBe connected with computer according to acquisition system; The micro-three-dimensional motion platform of described precision is by kinetic control system and meterCalculation machine is connected; It is characterized in that, comprise the following steps:
(1) desired value of the power value setting pressure sensor showing in real time according to data collecting system;
(2) drive ultrasonic vibration processing unit (plant) near pressure sensor;
(3) drive accurate micro-three-dimensional motion platform, add in the ultrasonic vibration of Z-direction convergence with the speed of settingWork system, gathers the measured value of pressure sensor end, when measured value reaches desired value by data collecting systemTime, the automatic stop motion of Z axis, records Z axis coordinate Z1, then makes accurate micro-three by kinetic control systemMaintenance and operation moving platform moves to initial position;
(4) open ultrasonic-frequency power supply, make ultrasonic vibration processing unit (plant) do dither; Drive accurate micro-three maintenance and operationsMoving platform, in Z-direction convergence ultrasonic vibration system of processing, passes through data collecting system with the speed setGather the measured value of pressure sensor end, in the time that measured value reaches desired value, the automatic stop motion of Z axis, recordZ axis coordinate Z2, then makes accurate micro-three-dimensional motion platform and ultrasonic vibration add frock by kinetic control systemPut and move to initial position;
(5) amplitude of calculating ultrasonic vibration processing unit (plant) is Z1-Z2, repeatedly measures and averages and can askGo out the amplitude of vibration processing device under certain power effect.
2. the ultrasonic amplitude measuring method based on constant force control as claimed in claim 1, is characterized in that,In the micro-three-dimensional motion platform of described precision, the minimum resolution of X-axis, Y-axis and Z axis is all not more than 0.1 micron.
3. the ultrasonic amplitude measuring method based on constant force control as claimed in claim 1, is characterized in that,Described ultrasonic vibration processing unit (plant) comprise vertical slipway, ultrasonic vibration system, main shaft, ultrasonic-frequency power supply, chuck,Tool heads, described tool heads is fixed on ultrasonic vibration system by chuck, and ultrasonic vibration system is fixed onOn main shaft, main shaft is fixed on vertical slipway, and described vertical slipway drive shaft moves up and down, ultrasonic electricSource is connected with ultrasonic vibration system.
4. the ultrasonic amplitude measuring method based on constant force control as claimed in claim 1, is characterized in that,Described ultrasonic vibration processing unit (plant) comprise vertical slipway, main shaft, chuck, tool heads, ultrasonic vibration workbench,Ultrasonic-frequency power supply, described tool heads is fixed on main shaft by chuck, and main shaft is fixed on vertical slipway, instituteThe vertical slipway drive shaft of stating moves up and down, and described ultrasonic-frequency power supply is connected with ultrasonic vibration workbench, instituteThe ultrasonic vibration workbench of stating faces main shaft and is fixed on described pressure sensor.
5. the ultrasonic amplitude measuring method based on constant force control as claimed in claim 1, is characterized in that,Described ultrasonic vibration processing unit (plant) is fine ultrasonic vibration processing unit (plant).
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| CN109777947A (en) * | 2019-01-18 | 2019-05-21 | 哈尔滨工业大学 | A kind of micro- texture processing method of stainless steel surface based on ultrasonic impact and preparation facilities |
| CN112556819B (en) * | 2020-09-18 | 2024-03-01 | 集美大学 | Detection device for ultrasonic processing cutter |
| CN113203467A (en) * | 2021-04-02 | 2021-08-03 | 大连理工大学 | Ultrasonic-assisted machining load amplitude measuring device and method |
| CN113290390B (en) * | 2021-05-25 | 2022-08-30 | 武汉理工大学 | Rotary ultrasonic machining amplitude control method and calibration platform |
| CN113465721B (en) * | 2021-06-11 | 2022-09-23 | 北京航空航天大学 | Multi-mode ultrasonic amplitude measurement method and device based on constant impedance |
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| CN102156032B (en) * | 2011-02-17 | 2013-08-07 | 上海交通大学 | Precisely-driven vibrating platform |
| CN203672482U (en) * | 2013-11-11 | 2014-06-25 | 广东工业大学 | Ultrasonic amplitude measurement device based on constant force control |
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